OPC hot spot repairing method
By selecting specific edges as the repair targets and utilizing reference directions and rectangular expansion techniques, OPC hotspots are automatically identified and repaired, solving the problems of inaccurate repair and low efficiency in existing technologies, and achieving efficient and accurate automated closed-loop repair.
CN122410883APending Publication Date: 2026-07-17CHONGQING XINLIAN MICROELECTRONICS CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- CHONGQING XINLIAN MICROELECTRONICS CO LTD
- Filing Date
- 2026-04-28
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
Existing OPC hotspot repair methods suffer from inaccurate repair, low efficiency, and are prone to introducing new optical disturbances and computational loads, making it difficult to achieve automated closed-loop repair.
Method used
By selecting specific edges as the repair targets, and utilizing reference directions and rectangular expansion technology, hotspot areas are automatically identified and repaired, avoiding the movement of irrelevant edges, reducing optical disturbances, and improving repair accuracy and efficiency.
Benefits of technology
It achieves fully automated closed-loop repair from hotspot identification to repair verification, improving repair accuracy, reducing redundant computing load and user judgment complexity, and improving repair efficiency.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN122410883A_ABST
Abstract
本发明公开了一种OPC热点修复方法，包括以下步骤：S1：提供一待修复层，识别待修复层中的热点区域；S2：定义参考方向，参考方向为横向或纵向；S3：将热点区域外延扩展得到标准矩形；放大标准矩形得到与待修复层的图形相交的相交矩形；S4：判断热点区域类型，根据热点区域的类型从待修复边中选边进行修复；S5：识别修复后的待修复层，若热点区域消除，输出修复后的待修复层；若热点区域存在，重复S3‑S4直至热点区域清除，输出修复后的待修复层。选择特定边缘作为修复对象，减少光学扰动并降低引入新热点的风险，提高修复精准度；自动针对性选边，降低冗余计算负荷以及用户判断复杂度，提升热点修复效率，实现热点自动化修复。
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