面向半导体与面板AOI的Golden基线管理方法及装置

By establishing a multidimensional baseline index and maintaining an event-driven baseline reconstruction mechanism in the AOI system, the problems of insufficient baseline stability and accuracy are solved, and baseline consistency management and detection accuracy are improved, supporting equipment life assessment and production line optimization.

CN122414528APending Publication Date: 2026-07-17ZHONGJIA MICROVISION (SHENZHEN) SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ZHONGJIA MICROVISION (SHENZHEN) SEMICONDUCTOR TECHNOLOGY CO LTD
Filing Date
2026-03-18
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Insufficient baseline stability and accuracy in AOI systems lead to errors in detection results, false alarms, and incomparability of indicators, especially severe baseline jumps during equipment maintenance or replacement.

Method used

The initial baselines of the camera, lens, and light source are determined by manual calibration, a multidimensional baseline index is established, equipment maintenance events are identified, full or partial reconstruction is performed, regression verification is conducted to confirm whether the new baselines meet production requirements, and the detection logic and alarm mechanism are updated.

Benefits of technology

It implements baseline version management, ensuring baseline consistency and reliability, avoiding trend breakage, improving detection accuracy, reducing false alarms, and supporting equipment life assessment and production line optimization.

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Abstract

本申请公开了一种面向半导体与面板AOI的Golden基线管理方法和装置,该方法包括:通过人工校准确定相机、镜头和光源的初始基线,为相机、镜头和光源以及生产相关因素建立统一的多维基线索引;识别设备的维护事件,并根据维护事件的类型对基线进行全量重建或局部重建,得到更新后的基线,将历史基线和新基线通过参数映射到同一寿命坐标系;对更新后的基线进行回归核验,验证新基线是否符合生产要求和检测标准,验证通过后发布新的基线版本,并更新相应的检测逻辑和报警机制。本方案能够为自动光学检测建立可靠、可追溯、动态更新的Golden基线,以保证检测系统在设备状态变化或生产条件改变时仍然能保持高准确性。
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