Liquid cooling device and plasma apparatus
By optimizing the piping path of the liquid cooling device and configuring leakage detection components, the problems of easy bumping, scratching, and leakage of flexible tubes in plasma equipment were solved, improving the safety and reliability of the equipment and reducing maintenance costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIJING E TOWN SEMICON TECH CO LTD
- Filing Date
- 2026-04-23
- Publication Date
- 2026-07-17
AI Technical Summary
In existing plasma equipment, frequent disassembly and reassembly of the liquid cooling plate and external devices can easily damage the connection structure. Furthermore, the flexible hose is prone to collisions and scratches with surrounding components during the opening process, posing a risk of leakage and affecting equipment safety.
A liquid cooling device was designed. By optimizing the pipeline path, collisions and scratches between the hoses and other components are avoided. A leak detection component is also configured to detect leaks in a timely manner and ensure equipment safety.
The optimized piping layout of the plasma equipment prevents collisions and scratches between the hoses and other components, improving the safety and reliability of the equipment, enabling timely detection of leaks, and reducing maintenance costs.
Smart Images
Figure CN122417751A_ABST