Water cooling structure based on vacuum plasma machine electrode plate

Abstract

The application discloses a water cooling structure based on a vacuum plasma machine pole plate and belongs to the technical field of vacuum plasma equipment, which comprises a cold plate unit, and a direct-current cooling channel is arranged in the cold plate unit; an independent valve control unit is arranged on the output end of the direct-current cooling channel. When the cooling liquid flowing in the direct-current cooling channel arranged side by side in the pole plate water cooling structure cools the electrode plate in the operation process, compared with the traditional S-shaped flow channel cooling structure, the cooling liquid can effectively avoid the situation that the cooling liquid continuously heats up from the inlet to the outlet, the temperature difference between the latter half and the heat source is greatly reduced, and the heat exchange efficiency is sharply attenuated, and the cooling liquid flows in the opposite direction in the adjacent two direct-current cooling channels, so that the high-temperature outlet of one direct-current cooling channel is adjacent to the low-temperature inlet of the other direct-current cooling channel, thereby the heat in the flow channel can be effectively guided from the hot zone to the cold zone.

Description

Technical Field

[0001] This invention relates to the field of vacuum plasma equipment technology, and more specifically, to a water-cooling structure based on the electrode plate of a vacuum plasma machine. Background Technology

[0002] A vacuum plasma machine is a device that uses plasma technology to treat the surface of an object in a vacuum environment, and it has a wide range of applications in many fields.

[0003] In a vacuum plasma machine, the plasma electrode plate discharges through a high-frequency power supply during plasma operation, creating an alternating electric field within the vacuum chamber. When process gases (such as argon or oxygen) are introduced into the vacuum chamber, the electric field ionizes the gas molecules, forming plasma.

[0004] During the operation of existing vacuum plasma machines, the electrode plates are inevitably bombarded by the ionized plasma as they discharge to ionize gas molecules and form plasma. This results in significant heat deposition on the electrode plates, especially when removing tightly adhering surface impurities such as adhesive residue. The medium-frequency power supply used in these processes is very powerful and energetic, causing the ions in the vacuum chamber to continuously bombard the electrode plates. This directly raises the temperature within the vacuum chamber. If the heat on the electrode plates is not removed promptly, it can easily lead to thermal deformation and gas release from the plasma electrode plates. It can also cause ablation and gas release from the vacuum seals near the electrodes, making the electrode plate discharge unstable. This results in a shift in the density and energy distribution of the ionized plasma, causing uneven plasma bombardment energy. Consequently, some areas of the workpiece surface are over-treated, while others show significantly reduced treatment effectiveness. This is particularly problematic when treating temperature-sensitive materials, as it can easily lead to physical deformation, surface discoloration, or even scorching, severely impacting the surface treatment effect of the vacuum plasma machine.

[0005] In view of this, we propose a water-cooled structure based on the electrode plate of a vacuum plasma machine. Summary of the Invention

[0006] Technical problem to be solved: The purpose of this invention is to provide a water-cooled structure based on the electrode plate of a vacuum plasma machine, which solves the technical problem mentioned in the background art above.

[0007] Technical solution: The technical solution of the present invention provides a water-cooled structure based on the electrode plate of a vacuum plasma machine, including a cold plate unit fixedly installed on the plasma electrode plate. The cold plate unit has multiple DC cooling channels arranged in parallel inside, and the liquid flow directions of two adjacent DC cooling channels are opposite. A branch pipe is fixedly connected to the input end of the DC cooling channel, and all the branch pipes are connected to the input channel. Each DC cooling channel has an independent valve control unit at its output end, and all independent valve control units are connected to the same output channel. The independent valve control unit includes an electric cylinder and a sensing bimetallic strip. Below the sensing bimetallic strip is a retractable advance mechanism, and on the side of the sensing bimetallic strip is a surface cleaning component connected to the electric cylinder. The sensing bimetallic strip is located inside the independent valve control unit and is arranged opposite to the input port of the independent valve control unit; The advance / retreat device includes a metal touch spring, a touch fixed terminal, and a signal transmitting module disposed inside it. The metal touch spring is connected to the free end of the advance / retreat device, and the touch fixed terminal is connected to the fixed end of the advance / retreat device. The touch fixed terminal has a ring-shaped structure. The electric cylinder is electrically connected to the signal transmitting module.

[0008] As an optional solution to the technical solution of this invention, the cold plate unit includes a heat dissipation substrate that can be detachably mounted on the plasma electrode plate; A thermally conductive flexible filler layer is connected to the heat dissipation substrate; The DC cooling channel is located inside the heat dissipation substrate, and the branch pipe is connected to the side wall of the heat dissipation substrate. One end of the branch pipe extends into the heat dissipation substrate and is connected to the input end of the corresponding DC cooling channel.

[0009] As an optional solution to the technical solution of this invention, the input channel includes a main transmission pipe; Each branch pipe is fixedly connected to a first connecting pipe at a location corresponding to the main transmission pipe, and the end of each branch pipe is connected to its corresponding first connecting pipe.

[0010] As an optional solution to the technical solution of this invention, the independent valve control unit also includes a valve body cover; One end of the valve body cover is fixedly connected to an inlet, and the other end is fixedly connected to a discharge outlet; The inlet is connected to the side wall of the heat dissipation substrate, and the end of the inlet away from the valve body cover extends into the interior of the heat dissipation substrate and is connected to the output end of its corresponding DC cooling channel. The sensing bimetallic strip is fixedly installed inside the valve body housing, and the sensing bimetallic strip is arranged opposite to the inlet.

[0011] As an optional solution to the technical solution of this invention, the output channel includes a return main pipe; A second connecting pipe is fixedly connected to the return main pipe at the location corresponding to the discharge port in each independent valve control unit, and the end of each discharge port is connected to its corresponding second connecting pipe.

[0012] As an optional solution of the technical solution in this invention document, the advance and retreat device also includes a second bellows cover, and an inner insulating cylinder seat is provided in the inner cavity of the second bellows cover, and the bottom end of the inner insulating cylinder seat is connected to the bottom wall of the inner cavity of the second bellows cover. A back-moving upright is slidably inserted at the top of the inner insulating cylinder seat, and the bottom end of the back-moving upright extends into the inner cavity of the inner insulating cylinder seat and is connected to the end-bottom insulating seat. The top of the back-moving upright is connected to an arc transition head, and the bottom end of the arc transition head is sealed and connected to the top opening of the second bellows cover. A return spring is provided above the end insulating seat, and one end of the return spring is connected to the end of the inner cavity of the inner insulating cylinder seat, while the other end is connected to the end insulating seat. The bottom end of the second bellows cover is connected to a base, and the base is fixedly installed on the bottom wall of the inner cavity of the valve body cover. The touch-sensitive fixed terminal is fixedly connected to the inner wall of the inner cavity of the inner insulating cylinder, and the surface of the side wall of the touch-sensitive fixed terminal is flush with the surface of the inner wall of the inner cavity of the inner insulating cylinder. The metal touch spring is fixedly connected to the end insulating base.

[0013] As an optional solution to the technical solution of this invention, the signal transmitting module includes a control circuit board fixedly connected to the inner cavity of the inner insulating cylinder seat; A wireless transmitter module is connected to the control circuit board; The metal touch spring and the touch fixed terminal are both electrically connected to the control circuit board.

[0014] As an optional solution to the technical solution in this invention document, the electric cylinder is connected to the valve body cover.

[0015] As an optional solution to the technical solution of this invention, the surface cleaning component includes a first bellows cover and a pair of treatment brushes arranged opposite to each other. Both processing brushes are connected to a common traction frame; The end of the first organ cover is connected to an end connecting bracket, and the end of the end connecting bracket away from the first organ cover is connected to the free end of the electric cylinder. The sensing bimetallic strip is positioned between two processing brushes; The end opening of the first bellows cover is sealed and connected to the side wall of the valve body cover. A reserved hole is provided at the position corresponding to the end opening of the first bellows cover on the side wall of the valve body cover. The end of the traction frame away from the treatment brush passes through the reserved hole and extends into the inner cavity of the first bellows cover and is connected to the end of the inner cavity of the first bellows cover.

[0016] As an optional solution to the technical solution of this invention, the electric cylinder is electrically connected to the wireless transmission module, and when the metal touch spring contacts the touch fixed terminal, the trigger control circuit board controls the wireless transmission module to send a wireless control signal to the electric cylinder.

[0017] Beneficial Effects: One or more technical solutions provided in this invention have at least the following technical effects or advantages: 1. When the coolant flowing in the parallel DC cooling channels within the electrode plate water-cooling structure cools the electrode plate during operation, compared with the traditional single long-distance S-shaped flow channel cooling structure, it can effectively avoid the situation where the coolant continuously heats up from the inlet to the outlet and the temperature difference between the latter half and the heat source is greatly reduced, thus causing a sharp decline in heat exchange efficiency, thereby achieving efficient cooling of the plasma electrode plate in operation.

[0018] 2. Furthermore, the coolant flows in opposite directions within the two adjacent DC cooling channels. This ensures that the high-temperature outlet of one DC cooling channel is adjacent to the low-temperature inlet of the other, effectively transferring heat from the hot zone to the cold zone. This achieves "counter-current heat exchange and complementary cooling," helping to suppress the accumulation and deterioration of heat energy in the cooling channels and preventing localized hot spots. Consequently, the cooling channels not only cool the plasma electrode plates in operation but also provide auxiliary heat dissipation for the hotter coolant in the surrounding channels. This enhances the cooling efficiency of the plasma electrode plates in operation and improves the surface treatment effect of the vacuum plasma machine on materials.

[0019] 3. When the coolant temperature in the DC cooling channel is low, the sensing bimetallic strip in the independent valve control unit located at the output end of the DC cooling channel slows down the water flow rate, which helps each independent DC cooling channel to more fully absorb the heat energy generated by the plasma electrode plate during operation.

[0020] 4. When a certain area of ​​the plasma electrode plate becomes overheated compared to other areas, the temperature of the coolant flowing in the DC cooling channel within that localized area of ​​the heat dissipation substrate rises to a preset critical upper limit. This causes the sensing bimetallic strip in the independent valve control unit located at the output end of the DC cooling channel to heat up and gradually bend and deform from bottom to top. This increases the valve opening of the independent valve control unit at the output end of the flow channel, increasing the cooling flow rate. This specifically enhances the cooling capacity for the overheated area of ​​the plasma electrode plate, while simultaneously transferring the heat energy of the higher-temperature coolant flowing in the overheated area layer by layer. By connecting the cooling system to the nearby low-temperature coolant, a multi-stage cooling series cooling channel is achieved, which significantly improves the cooling efficiency of the plasma electrode plate in operation. At the same time, when the cooling system of this invention encounters local overheating of the plasma electrode plate, it does not need to always operate at maximum flow rate. The overheated area can be adaptively allocated more cooling resources, which effectively improves the cooling efficiency and effect of the plasma electrode plate. It can also avoid the "overcooling" situation caused by the traditional cooling system always operating at maximum flow rate when encountering overheating, thus preventing the waste of electrical energy.

[0021] 5. As the temperature of the overheated area in the plasma electrode plate gradually decreases during operation, causing the temperature of the coolant flowing in the DC cooling channel within the corresponding area to drop below the preset critical upper limit, the sensing bimetallic strip gradually resets. When the resetting sensing bimetallic strip contacts the arc transition head in the advance / retreat mechanism, it continuously pushes the back-moving upright rod back through the arc transition head. When the sensing bimetallic strip returns to its initial vertical state, the metal touch spring, moving synchronously with the back-moving upright rod, contacts the touch fixed terminal, triggering the control circuit board to control the wireless transmission module to send a wireless control signal to the electric cylinder. This causes the electric cylinder to complete a set number of extension and retraction movements, cleaning the driven surface of the moving electric cylinder. During the process, a pair of brushes in the surface cleaning unit remove impurities adhering to the surface of the bimetallic sensing sheet, preventing the formation of a heat-insulating layer due to impurities on the surface of the bimetallic sensing sheet. This would not only prevent the bimetallic sensing sheet from sensing the liquid temperature normally, but also effectively prevent lag in the sensing of the liquid temperature by the bimetallic sensing sheet in the independent valve control unit. This ensures the sensitivity and accuracy of the sensing of the liquid temperature by the bimetallic sensing sheet in the independent valve control unit. Furthermore, during the cooling process, it can adaptively allocate cooling resources to the overheated area in a timely manner, ensuring the cooling effect and efficiency of the plasma electrode plate in operation, improving the stability and reliability of the plasma electrode plate operation, and ensuring the surface treatment effect of the vacuum plasma machine on materials. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0023] Figure 2 For the present invention Figure 1 A magnified view of part A in the diagram.

[0024] Figure 3 This is a bottom view of the overall structure of the present invention.

[0025] Figure 4 For the present invention Figure 3 A magnified view of part B in the diagram.

[0026] Figure 5 This is a schematic diagram of the internal structure of the heat dissipation substrate in this invention.

[0027] Figure 6 This is a cross-sectional view of the overall structure of the present invention.

[0028] Figure 7 This is a cross-sectional view of the independent valve control unit in this invention.

[0029] Figure 8 For the present invention Figure 7 A magnified view of part C in the diagram.

[0030] Figure 9 For the present invention Figure 8 A magnified view of part D in the middle.

[0031] Figure 10 This is a schematic diagram of the internal structure of the valve body cover in this invention.

[0032] Figure 11 For the present invention Figure 10 A magnified view of part E in the middle.

[0033] Explanation of the labels in the diagram: 100. Plasma electrode plate; 201. Heat dissipation substrate; 202. Main inlet pipe; 203. Return pipe; 204. Valve body cover; 205. Electric cylinder; 206. First bellows cover; 207. Branch pipe; 208. DC cooling channel; 209. Thermally conductive flexible filling layer; 210. Sensing bimetallic strip; 211. Second bellows cover; 212. Inner insulating cylinder base; 213. End bottom insulating base; 214. Back-moving upright; 215. Arc transition head; 216. Control circuit board; 217. Wireless transmission module; 218. Metal touch spring; 219. Touch fixed terminal; 220. End connection frame; 221. Traction frame; 222. Processing brush. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] In the description of this invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0036] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or a link; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0037] Reference Figures 1 to 11 The present invention provides a water-cooled structure based on a vacuum plasma generator electrode plate, including a cold plate unit fixedly installed on a plasma electrode plate 100. The cold plate unit has multiple parallel DC cooling channels 208 inside, and the liquid flow directions of two adjacent DC cooling channels 208 are opposite. The DC cooling channels 208 are straight. A branch pipe 207 is fixedly connected to the input end of the DC cooling channel 208, and all branch pipes 207 are connected to the input channel. The output end of the DC cooling channel 208 is equipped with an independent valve control unit, and all independent valve control units are connected to the same output channel. The independent valve control unit includes an electric cylinder 205 and a sensing bimetallic strip 210. The sensing bimetallic strip 210 is provided with an elastically retractable advance and retreat device below it. The side of the sensing bimetallic strip 210 is provided with a surface cleaning part connected to the electric cylinder 205. The sensing bimetallic strip 210 is made of bimetallic strip material. The sensing bimetallic strip 210 is disposed inside the independent valve control unit and is arranged opposite to the input port of the independent valve control unit; The advance / retreat device includes a metal touch spring 218, a touch fixed terminal 219 and a signal transmitting module disposed inside it. The metal touch spring 218 is connected to the free end of the advance / retreat device, and the touch fixed terminal 219 is connected to the fixed end of the advance / retreat device. The electric cylinder 205 is electrically connected to the signal transmitting module.

[0038] When the coolant flowing in the parallel DC cooling channels 208 within the electrode plate water-cooling structure cools the electrode plate during operation, compared to the traditional single long-distance S-shaped flow channel cooling structure, it can effectively avoid the situation where the coolant continuously heats up from the inlet to the outlet when the electrode plate is cooled by the traditional S-shaped flow channel, and the temperature difference between the latter half and the heat source is greatly reduced, resulting in a sharp decline in heat exchange efficiency. This achieves efficient cooling of the plasma electrode plate 100 in operation.

[0039] Furthermore, the coolant flows in opposite directions within the two adjacent DC cooling channels 208, which makes the high-temperature outlet of one DC cooling channel 208 adjacent to the low-temperature inlet of the other DC cooling channel 208. This effectively transfers heat from the hot zone to the cold zone, achieving "counter-current heat exchange and complementary cooling," which helps to suppress the accumulation and deterioration of heat energy in the cooling channel and avoids the formation of local hot spots. As a result, the cooling channel can not only cool the plasma electrode plate 100 in operation but also further assist in the heat dissipation of the hotter coolant in the surrounding channels. This helps to improve the cooling efficiency of the plasma electrode plate 100 in operation and enhance the surface treatment effect of the vacuum plasma machine on materials. The coolant is preferably an antifreeze coolant.

[0040] When the coolant temperature in the DC cooling channel 208 is low, the sensing bimetallic strip 210 in the independent valve control unit located at the output end of the DC cooling channel 208 slows down the water flow rate, which helps each independent DC cooling channel 208 to more fully absorb the heat generated during the operation of the plasma electrode plate 100.

[0041] Reference Figures 1 to 6 The present invention provides a water-cooled structure based on a vacuum plasma generator electrode plate. The cold plate unit includes a heat dissipation substrate 201 that can be detachably installed on the plasma electrode plate 100. The heat dissipation substrate 201 is made of a thermally conductive material, and preferably is made of aluminum alloy. A thermally conductive flexible filling layer 209 is connected to the heat dissipation substrate 201. The thermally conductive flexible filling layer 209 is made of a flexible thermally conductive material, and preferably made of a thermally conductive silicone sheet material. The thermally conductive flexible filling layer 209 continuously conducts the heat generated during the operation of the plasma electrode plate 100 to the heat dissipation substrate 201. A DC cooling channel 208 is disposed inside the heat dissipation substrate 201, and a branch pipe 207 is connected to the side wall of the heat dissipation substrate 201. One end of the branch pipe 207 extends into the heat dissipation substrate 201 and is connected to the input end of its corresponding DC cooling channel 208.

[0042] Reference Figures 1 to 6 This invention provides a water-cooled structure based on a vacuum plasma generator electrode plate, wherein the input channel includes a main flow pipe 202; Each branch pipe 207 is fixedly connected to a first connecting pipe at a position corresponding to the main transmission pipe 202, and the end of each branch pipe 207 is connected to its corresponding first connecting pipe.

[0043] Reference Figures 1 to 7 The present invention provides a water-cooled structure based on the electrode plate of a vacuum plasma machine. The independent valve control unit also includes a valve body cover 204, and an electric cylinder 205 is connected to the valve body cover 204. One end of the valve body cover 204 is fixedly connected to an inlet, and the other end is fixedly connected to a discharge port; The inlet is connected to the side wall of the heat dissipation substrate 201, and the end of the inlet away from the valve body cover 204 extends into the interior of the heat dissipation substrate 201 and is connected to the output end of its corresponding DC cooling channel 208. The sensing bimetallic strip 210 is fixedly installed inside the valve body cover 204, and the sensing bimetallic strip 210 is arranged opposite to the inlet.

[0044] Reference Figures 1 to 6 This invention provides a water-cooled structure based on a vacuum plasma generator electrode plate, wherein the output channel includes a return main pipe 203; The return main pipe 203 is fixedly connected to a second connecting pipe at the position corresponding to the discharge port in each independent valve control unit, and the end of each discharge port is connected to its corresponding second connecting pipe.

[0045] When a certain area of ​​the plasma electrode plate 100 becomes overheated compared to other areas, the temperature of the coolant flowing in the DC cooling channel 208 within a local area of ​​the heat dissipation substrate 201 rises to a preset critical upper limit. This causes the sensing bimetallic strip 210 in the independent valve control unit located at the output end of the DC cooling channel 208 to heat up and gradually bend from bottom to top. This increases the valve opening of the independent valve control unit at the output end of the flow channel, increasing the cooling flow rate. This specifically enhances the cooling capacity of the overheated area in the plasma electrode plate 100, while the heat energy of the higher-temperature coolant flowing in the overheated area can be continuously layered... The cooling system gradually transfers the heat to the nearby flowing low-temperature coolant, achieving multi-stage cooling in series in the cooling channel. This significantly improves the cooling efficiency of the plasma electrode plate 100 during operation. Furthermore, when the plasma electrode plate 100 experiences localized overheating, the cooling system does not need to operate at maximum flow rate continuously. The overheated area can be adaptively allocated more cooling resources, effectively improving the cooling efficiency and effect of the plasma electrode plate 100. It also avoids the "overcooling" situation caused by traditional cooling systems that always operate at maximum flow rate when overheating, thus preventing energy waste.

[0046] Reference Figures 7 to 10 The present invention provides a water-cooled structure based on the electrode plate of a vacuum plasma machine. The advance and retreat device also includes a second bellows cover 211. The inner cavity of the second bellows cover 211 is provided with an inner insulating cylinder seat 212, and the bottom end of the inner insulating cylinder seat 212 is connected to the bottom wall of the inner cavity of the second bellows cover 211. The top of the inner insulating cylinder seat 212 is slidably inserted with a back-moving upright rod 214, and the bottom end of the back-moving upright rod 214 extends into the inner cavity of the inner insulating cylinder seat 212 and is connected to the end bottom insulating seat 213. The top of the back-moving upright rod 214 is connected to an arc transition head 215, and the bottom end of the arc transition head 215 is sealed and connected to the top opening of the second bellows cover 211. A return spring is provided above the end insulating seat 213, and one end of the return spring is connected to the end of the inner cavity of the inner insulating cylinder seat 212, while the other end is connected to the end insulating seat 213. The bottom end of the second bellows cover 211 is connected to a base, and the base is fixedly installed on the bottom wall of the inner cavity of the valve body cover 204. The touch-sensitive fixed terminal 219 is fixedly connected to the inner cavity side wall of the inner insulating cylinder seat 212, and the side wall surface of the touch-sensitive fixed terminal 219 is flush with the inner cavity side wall surface of the inner insulating cylinder seat 212. The metal touch spring 218 is fixedly connected to the end insulating base 213.

[0047] Reference Figure 7 and Figure 8The present invention provides a water-cooled structure based on the electrode plate of a vacuum plasma machine, and the signal transmission module includes a control circuit board 216 fixedly connected in the inner cavity of the inner insulating cylinder seat 212. A wireless transmission module 217 is connected to the control circuit board 216. The control circuit board 216 is pre-installed with a battery, and the battery supplies power to the control circuit board 216 and the wireless transmission module 217. The metal touch spring 218 and the touch fixed terminal 219 are both electrically connected to the control circuit board 216; The electric cylinder 205 is electrically connected to the wireless transmission module 217. When the metal touch spring 218 contacts the touch fixed terminal 219, the trigger control circuit board 216 controls the wireless transmission module 217 to send a wireless control signal to the electric cylinder 205. The wireless transmission module 217 is a common existing device with small size, low voltage, and low power that uses radio signals to achieve wireless transmission, and will not be described in detail here.

[0048] Reference Figure 10 and Figure 11 The present invention provides a water-cooled structure based on a vacuum plasma generator electrode plate, wherein the surface cleaning component includes a first bellows cover 206 and a pair of treatment brushes 222 arranged opposite to each other. Both processing brushes 222 are connected to a common traction frame 221; The end of the first bellows cover 206 is connected to an end connecting bracket 220, and the end of the end connecting bracket 220 away from the first bellows cover 206 is connected to the free end of the electric cylinder 205. The sensing bimetallic strip 210 is located between two processing brushes 222; The end opening of the first bellows cover 206 is sealed and connected to the side wall of the valve body cover 204. A reserved hole is provided on the side wall of the valve body cover 204 at the position corresponding to the end opening of the first bellows cover 206. The end of the traction frame 221 away from the treatment brush 222 passes through the reserved hole and extends into the inner cavity of the first bellows cover 206 and is connected to the end of the inner cavity of the first bellows cover 206. The first bellows cover 206 and the second bellows cover 211 are both telescopic structures, and both are preferably made of rubber material.

[0049] As the temperature of the overheated area in the plasma electrode plate 100 gradually decreases during operation, causing the temperature of the coolant flowing in the DC cooling channel 208 in the corresponding area to drop below a preset critical upper limit, the sensing bimetallic strip 210 gradually resets. When the gradually reset sensing bimetallic strip 210 contacts the arc transition head 215 in the advance / retreat mechanism, it continuously pushes the back-moving upright rod 214 back through the arc transition head 215. When the sensing bimetallic strip 210 returns to its initial vertical state, the metal touch spring 218, which moves synchronously with the back-moving upright rod 214, contacts the touch fixed terminal 219, triggering the control circuit board 216 to control the wireless transmission module 217 to send a wireless control signal to the electric cylinder 205. This causes the electric cylinder 205 to complete a set number of extension and retraction movements. During the movement of the surface cleaning component driven by the actuating electric cylinder 205, the surface... The bristles on a pair of processing brushes 222 in the surface cleaning unit mechanically peel impurities adhering to the surface of the sensing bimetallic strip 210 from the surface of the sensing bimetallic strip 210, thereby removing the impurities and preventing the formation of a heat insulation layer on the surface of the sensing bimetallic strip 210 due to the adhering impurities. This would not only prevent the sensing bimetallic strip 210 from normally sensing the liquid temperature, but also effectively prevent lag in the sensing bimetallic strip 210's sensing of the liquid temperature, ensuring the sensitivity and accuracy of the sensing bimetallic strip 210's sensing of the liquid temperature in the independent valve control unit. Furthermore, during the cooling process, it can adaptively allocate cooling resources to the overheated area in a timely manner, ensuring the cooling effect and efficiency of the plasma electrode plate 100 in operation, improving the stability and reliability of the plasma electrode plate 100's operation, and ensuring the surface treatment effect of the vacuum plasma machine on materials.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A water-cooled structure based on a vacuum plasma generator electrode plate, characterized in that: It includes a cold plate unit that is fixedly installed on a plasma electrode plate. The cold plate unit has multiple DC cooling channels arranged in parallel inside, and the liquid flow directions of two adjacent DC cooling channels are opposite. The DC cooling channel input end is fixedly connected to a branch pipe, and all the branch pipes are connected to the input channel. Each DC cooling channel has an independent valve control unit at its output end, and all independent valve control units are connected to the same output channel. The independent valve control unit includes an electric cylinder and a sensing bimetallic strip. A retractable advance and retreat device is provided below the sensing bimetallic strip, and a surface cleaning component connected to the electric cylinder is provided on the side of the sensing bimetallic strip. The sensing bimetallic strip is located inside the independent valve control unit and is arranged opposite to the input port of the independent valve control unit; The advance / retractor includes a metal touch spring, a touch fixed terminal, and a signal transmitting module disposed therein. The metal touch spring is connected to the free end of the advance / retractor, and the touch fixed terminal is connected to the fixed end of the advance / retractor. The electric cylinder is electrically connected to the signal transmitting module.

2. The water-cooled structure based on the vacuum plasma generator electrode plate according to claim 1, characterized in that: The cold plate unit includes a heat dissipation substrate that can be detachably mounted on the plasma electrode plate; A thermally conductive flexible filler layer is connected to the heat dissipation substrate; The DC cooling channel is located inside the heat dissipation substrate, and the branch pipe is connected to the side wall of the heat dissipation substrate. One end of the branch pipe extends into the heat dissipation substrate and is connected to the input end of the corresponding DC cooling channel.

3. The water-cooled structure based on the vacuum plasma generator electrode plate according to claim 2, characterized in that: The input channel includes a main power supply pipe; Each branch pipe is fixedly connected to a first connecting pipe at a location corresponding to the main transmission pipe, and the end of each branch pipe is connected to its corresponding first connecting pipe.

4. The water-cooled structure based on the vacuum plasma generator electrode plate according to claim 2, characterized in that: The independent valve control unit also includes a valve body cover; One end of the valve body cover is fixedly connected to an inlet, and the other end is fixedly connected to a discharge outlet; The inlet is connected to the side wall of the heat dissipation substrate, and the end of the inlet away from the valve body cover extends into the interior of the heat dissipation substrate and is connected to the output end of its corresponding DC cooling channel. The sensing bimetallic strip is fixedly installed inside the valve body housing, and the sensing bimetallic strip is arranged opposite to the inlet.

5. The water-cooled structure based on the vacuum plasma generator electrode plate according to claim 4, characterized in that: The output channel includes a return main; A second connecting pipe is fixedly connected to the return main pipe at the location corresponding to the discharge port in each independent valve control unit, and the end of each discharge port is connected to its corresponding second connecting pipe.

6. The water-cooled structure based on the vacuum plasma generator electrode plate according to claim 4, characterized in that: The advance and retreat device also includes a second bellows cover, and an inner insulating cylinder seat is provided in the inner cavity of the second bellows cover, and the bottom end of the inner insulating cylinder seat is connected to the bottom wall of the inner cavity of the second bellows cover. A back-moving upright is slidably inserted at the top of the inner insulating cylinder seat, and the bottom end of the back-moving upright extends into the inner cavity of the inner insulating cylinder seat and is connected to the end-bottom insulating seat. The top of the back-moving upright is connected to an arc transition head, and the bottom end of the arc transition head is sealed and connected to the top opening of the second bellows cover. A return spring is provided above the end insulating seat, and one end of the return spring is connected to the end of the inner cavity of the inner insulating cylinder seat, while the other end is connected to the end insulating seat. The bottom end of the second bellows cover is connected to a base, and the base is fixedly installed on the bottom wall of the inner cavity of the valve body cover. The touch-sensitive fixed terminal is fixedly connected to the inner wall of the inner cavity of the inner insulating cylinder seat, and the surface of the side wall of the touch-sensitive fixed terminal is flush with the surface of the inner wall of the inner cavity of the inner insulating cylinder seat. The metal touch spring is fixedly connected to the end insulating base.

7. The water-cooled structure based on the vacuum plasma machine electrode plate according to claim 6, characterized in that: The signal transmitting module includes a control circuit board fixedly connected to the inner cavity of the inner insulating cylinder seat; A wireless transmission module is connected to the control circuit board; The metal touch spring and the touch fixed terminal are both electrically connected to the control circuit board.

8. The water-cooled structure based on the vacuum plasma generator electrode plate according to claim 7, characterized in that: The electric cylinder is connected to the valve body cover.

9. The water-cooled structure based on the vacuum plasma generator electrode plate according to claim 8, characterized in that: The surface cleaning component includes a first bellows cover and a pair of treatment brushes arranged opposite each other; Both processing brushes are connected to a common traction frame; The end of the first bellows cover is connected to an end connecting frame, and the end of the end connecting frame away from the first bellows cover is connected to the free end of the electric cylinder. The sensing bimetallic strip is located between two processing brushes; The end opening of the first bellows cover is sealed and connected to the side wall of the valve body cover. A reserved hole is provided at the position corresponding to the end opening of the first bellows cover on the side wall of the valve body cover. The end of the traction frame away from the treatment brush passes through the reserved hole and extends into the inner cavity of the first bellows cover and is connected to the end of the inner cavity of the first bellows cover.

10. The water-cooled structure based on the vacuum plasma machine electrode plate according to claim 7, characterized in that: The electric cylinder is electrically connected to the wireless transmission module, and when the metal touch spring contacts the touch fixed terminal, the control circuit board is triggered to control the wireless transmission module to send a wireless control signal to the electric cylinder.

Images