piezoelectric sensor
By designing non-overlapping electrodes in the overlapping area between the insulating substrate and the piezoelectric film, the sensitivity variation problem caused by uneven substrate thickness in piezoelectric sensors is solved, thus improving the accuracy of deformation detection.
CN122423348APending Publication Date: 2026-07-17MURATA MFG CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- MURATA MFG CO LTD
- Filing Date
- 2024-11-19
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
In existing piezoelectric sensors, the uneven thickness of the insulating substrate leads to variations in sensitivity, affecting the accuracy of deformation detection.
Method used
In the overlapping area between the insulating substrate and the piezoelectric film, the design of multiple electrodes that do not overlap ensures that the stress neutral plane is not located on the insulating substrate, thereby suppressing the influence of thickness non-uniformity on sensitivity.
Benefits of technology
It effectively suppressed the change in deformation sensitivity caused by uneven thickness of the insulating substrate, and improved the detection accuracy of the piezoelectric sensor.
✦ Generated by Eureka AI based on patent content.
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Figure CN122423348A_ABST
Abstract
压电传感器具备：绝缘性基材，其具有第一上主面及第一下主面；多个电极，其至少形成于第一上主面，包括形成于第一上主面的第一电极；以及压电膜，其具有第二上主面及第二下主面，所述压电膜被配置为第二下主面与第一电极相对。在俯视时，在绝缘性基材与压电膜重叠的区域中，在俯视时，多个电极相互不重叠。
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Citation Information
Patent Citations
Piezoelectric film sensor and holding state detection device
WO2016194690A1