Multi-prism laser rotary cutting machining device

Abstract

The application discloses a multi-prism laser rotary cutting processing device and relates to the technical field of femtosecond laser processing, which comprises a bottom plate, a front vertical plate connected to the bottom plate, a rotary cutting module connected to the front vertical plate, a deflection offset module and a pre-module connected to an input end of the rotary cutting module, and a focusing module connected to an output end of the rotary cutting module; a laser beam sequentially passes through the pre-module, the deflection offset module and the rotary cutting module, is finally focused by the focusing module, and reaches the surface of a workpiece to be processed; the deflection offset module comprises a plurality of optical adjusting mirrors, the posture of the optical adjusting mirrors is dynamically adjusted, and the accuracy of an optical path under a dynamic condition is ensured; a Dawei prism, a first optical wedge, a second optical wedge and a parallel flat mirror are coaxially fixed in the rotary cutting module, and the stability of the optical path is greatly improved.

Description

Technical Field

[0001] This invention relates to the field of femtosecond laser processing technology, specifically to a multi-prism laser rotary cutting processing device. Background Technology

[0002] With the widespread application of microelectromechanical systems (MEMS) in aerospace, electronics, and biomedicine, system components are increasingly trending towards miniaturization. Micropores, as a typical feature of microstructures, directly affect the performance and reliability of devices due to their processing precision and quality. Micropores are typically defined as having a diameter less than 5 μm and a depth-to-diameter ratio greater than 10:1. These pores play an irreplaceable role in microfluidic channels, aero-engine blades, and new energy battery separators.

[0003] Femtosecond lasers are widely used in micro-hole machining, such as the patent application entitled "A Precision Machining System and Method for Laser Rotary Cutting of Micro-holes with High Aspect Ratio" (Publication No.: CN114905168B) and the patent application entitled "A Precision Machining System and Method for Laser Rotary Cutting of Micro-holes with High Aspect Ratio" (Publication No.: CN121245271A). However, due to the limitations of Gaussian light depth of field and the light-blocking effect of conical beams, the machining depth is relatively shallow, making it difficult to meet the technical requirements of high-precision fields such as aerospace and biomedicine. Summary of the Invention

[0004] In order to overcome the shortcomings of the prior art, the present invention aims to provide a multi-prism laser rotary cutting processing device, which combines multiple optical prisms to dynamically control the energy spatial distribution of the laser beam, the beam transmission path and the focused spot shape, effectively suppress the formation of the recast layer, eliminate microcracks and reduce the heat-affected zone, improve the controllability and depth-to-diameter ratio of microhole processing, and meet the technical requirements of high-precision fields such as aerospace and biomedicine.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A multi-prism laser rotary cutting processing device includes a base plate 2, a front vertical plate 1 connected to the base plate 2, a rotary cutting module 5 connected to the front vertical plate 1, an input end of the rotary cutting module 5 connected to a front module 3 via a deflection offset module 4, and an output end of the rotary cutting module 5 connected to a focusing module 6; the laser beam passes sequentially through the front module 3, the deflection offset module 4, and the rotary cutting module 5, and finally reaches the surface of the workpiece after being focused by the focusing module 6.

[0006] The front module 3 includes a beam expander 7, a quarter-wave plate group 8, and a 45° deflection mirror group 9 to ensure the accuracy of the optical path. The beam expander 7 is fixed on the front vertical plate 1, and the quarter-wave plate group 8 and the 45° deflection mirror group 9 are fixed on the base plate 2.

[0007] The deflection and offset module 4 includes a deflection mechanism and an offset mechanism that are perpendicular to each other; the offset structure includes a lifting platform 12, an integrated connecting frame 11 connected to the lifting platform 12, a single-axis galvanometer 10 connected to the integrated connecting frame 11, and the single-axis galvanometer 10, the integrated connecting frame 11 and the lifting platform 12 constitute the offset structure; the deflection mechanism includes a spindle 15 connected to the integrated connecting frame 11 and supported by a bearing assembly, the input end of the spindle 15 is connected to the first drive motor 13, and a deflection wedge adjustment frame 14 is connected to the spindle 15.

[0008] The rotary cutting module 5 includes a lower rotating body 19 and an upper rotating body 27. The lower rotating body 19 is supported and fixed in the rotating chamber 25 by a bearing assembly. The bearing assembly is fixed by a retainer 26 at the upper end of the rotating body. The upper rotating body 27 is supported by the bearing assembly and fixed to the pressure ring 31 by an upper rotating body retaining ring 29 and an upper bearing retaining ring 30. The upper rotating body 27 is connected to the lower rotating body 19. A Daowei prism 32 is fixed inside the upper rotating body 27 by a Daowei sleeve 33. A parallel plate mirror 34 is connected to the end of the upper rotating body 27. A light wedge is connected to the end of the lower rotating body 19. A rotating body pulley 39 is connected to the outside of the lower rotating body 19. The rotating body pulley 39 is connected to a second drive motor 41 by a synchronous belt 40.

[0009] The mechanical axes of the upper rotating body 27 and the lower rotating body 19 are kept coaxial.

[0010] The pressure ring 31 is installed and fixed at the front end of the upper rotating body 27, and the Daowei sleeve 33 and Daowei prism 32 are fixed in the middle of the upper rotating body 27 and located on the mechanical axis of the upper rotating body 27.

[0011] The parallel plate mirror 34 is installed at the top rear end of the upper rotating body 27, and the optical wedge is installed at the rear end of the lower rotating body 19, ensuring that the axis of the parallel plate mirror 34, the optical wedge, and the axis of the Dowell prism 32 are coaxial.

[0012] The focusing module 6 includes a flat-top lens group 42, which is connected to a focusing lens group 43. The focusing lens group 43 is fixed to the end of a protective lens group 45 via a focusing lens sleeve 44, and the protective lens group 45 is fixed to the end of a nozzle 46.

[0013] Compared with the prior art, the beneficial effects of the present invention are as follows: This invention utilizes a combination of multiple optical prisms to dynamically control the spatial distribution of laser beam energy, beam transmission path, and focused spot shape, significantly improving processing quality. The multi-prism is coaxially fixed inside the rotary cutting module, greatly enhancing the stability of the optical path. The front vertical plate, base plate, front module, deflection and offset module, rotary cutting module, and focusing module are arranged sequentially, and the optical components are fixed by precision mechanical structures such as adjustment frames, bearings, and sleeves, ensuring a compact structure and a stable and reliable optical path. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of an embodiment of the present invention.

[0015] Figure 2 This is a schematic diagram of the front-end module structure in an embodiment of the present invention.

[0016] Figure 3 This is a schematic diagram of the deflection and offset module structure according to an embodiment of the present invention.

[0017] Figure 4 This is a schematic cross-sectional view of the rotary cutting module in an embodiment of the present invention.

[0018] Figure 5 This is a schematic diagram of the rotary cutting module structure according to an embodiment of the present invention.

[0019] Figure 6 This is a schematic diagram of the focusing module structure according to an embodiment of the present invention. Detailed Implementation

[0020] The present invention will now be described in further detail with reference to the embodiments and accompanying drawings.

[0021] Reference Figure 1 A multi-prism laser rotary cutting processing device includes a base plate 2, a front vertical plate 1 connected to the base plate 2, a rotary cutting module 5 connected to the front vertical plate 1, an input end of the rotary cutting module 5 connected to a front module 3 via a deflection offset module 4, and an output end of the rotary cutting module 5 connected to a focusing module 6; the laser beam passes sequentially through the front module 3, the deflection offset module 4, and the rotary cutting module 5, and finally reaches the surface of the workpiece after being focused by the focusing module 6.

[0022] Reference Figure 2 The front module 3 includes a beam expander 7, a quarter-wave plate group 8, and a 45° deflection mirror group 9 to ensure the accuracy of the optical path. The beam expander 7 is fixed on the front vertical plate 1, and the quarter-wave plate group 8 and the 45° deflection mirror group 9 are fixed on the base plate 2.

[0023] Reference Figure 3 The deflection and offset module 4 includes a deflection mechanism and an offset mechanism that are perpendicular to each other; the offset structure includes a lifting platform 12, an integrated connecting frame 11 connected to the lifting platform 12, a single-axis galvanometer 10 connected to the integrated connecting frame 11, and the single-axis galvanometer 10, the integrated connecting frame 11 and the lifting platform 12 constitute the offset structure; the deflection mechanism includes a first bearing frame 17 and a second bearing frame 18 connected to the integrated connecting frame 11, the first bearing frame 17 and the second bearing frame 18 support the spindle 15, the input end of the spindle 15 is connected to the first drive motor 13 through a coupling 16, and a deflection wedge adjustment frame 14 is connected to the spindle 15.

[0024] Reference Figure 4 , Figure 5The rotary cutting module 5 includes a lower rotating body 19 and an upper rotating body 27. The lower rotating body 19 is supported and fixed in the rotating chamber 25 by a first bearing 20 and a first bearing sleeve 21, a second bearing 22 and a second bearing sleeve 23, and a bushing cover plate 24. The first bearing sleeve 21 and the second bearing sleeve 22 are fixed by a retainer 26 at the upper end of the rotating body. The upper rotating body 27 is supported by a third bearing 28 and fixed to a pressure ring 31 by an upper rotating body retaining ring 29 and an upper bearing retaining ring 30. The pressure ring 31 is installed and fixed to the front end of the upper rotating body 27. The upper rotating body 27 and the lower rotating body 27 are connected by a first bearing 20 and a first bearing sleeve 21, a second bearing 22 and a second bearing sleeve 23, and a bushing cover plate 24. Body 19 is connected by a key, and the mechanical axes of the upper rotating body 27 and the lower rotating body 19 remain coaxial. A Dowell prism 32 is fixed inside the upper rotating body 27 via a Dowell sleeve 33. The Dowell sleeve 33 and the Dowell prism 32 are fixed in the middle of the upper rotating body 27 and located on its mechanical axis. The top of the rear end of the upper rotating body 27 is connected to a parallel plate mirror 34 via a first fastener 35. The rear end of the lower rotating body 19 is connected to a first optical wedge 36 and a second optical wedge 37 via a second fastener 38, ensuring that the axes of the parallel plate mirror 34, the optical wedges, and the Dowell prism 32 are coaxial. (Refer to...) Figure 5 The outer side of the lower rotating body 19 is connected to the rotating body pulley 39, and the rotating body pulley 39 is connected to the second drive motor 41 through the synchronous belt 40.

[0025] Reference Figure 6 The focusing module 6 consists of a flat-top lens group 42, a focusing lens group 43, a focusing lens sleeve 44, a protective lens group 45, and a nozzle 46. The flat-top lens group 42 is threadedly connected to the focusing lens group 43, the focusing lens group 43 is fixed to the end of the protective lens group 45 through the focusing lens sleeve 44, and the protective lens group 45 is fixed to the end of the nozzle 46.

[0026] The working principle of this invention is as follows: After being processed by the pre-module 3, the laser beam is expanded and collimated and travels along a predetermined optical path. The beam is deflected by 90° by the 45° deflection mirror group 9 and incident on the center point of the single-axis galvanometer 10. When the power is turned on, the lifting platform 12 at the bottom will control the up and down movement of the single-axis galvanometer 10 and the deflection wedge adjustment frame 14 through the integrated connecting frame 11. The first drive motor 13 will control the swing of the deflection wedge adjustment frame 14 individually. The device achieves the final attitude and position of the laser through its movement and rotation. After being processed by the deflection offset module 4, the laser enters the spin cutting module 5. The second drive motor 41 drives the rotating body pulley 39 to rotate through the synchronous belt 40, thereby driving the Daowei prism 32 located inside the upper rotating body 27 to rotate. The laser is refracted twice and reflected once in the Daowei prism 32 and then emitted along the predetermined optical path. Finally, it is focused by the focusing module 6 and reaches the processing surface.

Claims

1. A multi-prism laser rotary cutting processing device, comprising a base plate (2), characterized in that: A front vertical plate (1) is connected to the base plate (2), and a rotary cutting module (5) is connected to the front vertical plate (1). The input end of the rotary cutting module (5) is connected to the front module (3) through the deflection offset module (4), and the output end of the rotary cutting module (5) is connected to the focusing module (6). The laser beam passes through the front module (3), the deflection offset module (4), and the rotary cutting module (5) in sequence, and finally reaches the surface of the workpiece after being focused by the focusing module (6).

2. The apparatus according to claim 1, characterized in that: The aforementioned front module (3) includes a beam expander (7), a quarter-wave plate group (8), and a 45° deflection mirror group (9) to ensure the accuracy of the optical path. The beam expander (7) is fixed on the front vertical plate (1), and the quarter-wave plate group (8) and the 45° deflection mirror group (9) are fixed on the base plate (2).

3. The apparatus according to claim 1, characterized in that: The deflection offset module (4) includes a deflection mechanism and an offset mechanism that are perpendicular to each other; the offset structure includes a lifting platform (12), an integrated connecting frame (11) connected to the lifting platform (12), and a single-axis galvanometer (10) connected to the integrated connecting frame (11); the deflection mechanism includes a spindle (15) connected to the integrated connecting frame (11) and supported by a bearing assembly, the input end of the spindle (15) is connected to the first drive motor (13), and a deflection wedge adjustment frame (14) is connected to the spindle (15).

4. The apparatus according to claim 1, characterized in that: The rotary cutting module (5) includes a lower rotating body (19) and an upper rotating body (27); the lower rotating body (19) is supported and fixed in the rotating chamber (25) by a bearing assembly, and the bearing assembly is fixed by a retainer (26) at the upper end of the rotating body; the upper rotating body (27) is supported by a bearing assembly and fixed to the pressure ring (31) by an upper rotating body retaining ring (29) and an upper bearing retaining ring (30); the upper rotating body (27) is connected to the lower rotating body (19); a Daowei prism (32) is fixed inside the upper rotating body (27) by a Daowei sleeve (33); a parallel plate mirror (34) is connected to the end of the upper rotating body (27); an optical wedge is connected to the end of the lower rotating body (19); a rotating body pulley (39) is connected to the outside of the lower rotating body (19), and the rotating body pulley (39) is connected to a second drive motor (41) by a synchronous belt (40).

5. The apparatus according to claim 4, characterized in that: The mechanical axes of the upper rotating body (27) and the lower rotating body (19) remain coaxial.

6. The apparatus according to claim 4, characterized in that: The pressure ring (31) is installed and fixed at the front end of the upper rotating body (27).

7. The apparatus according to claim 4, characterized in that: The Daowei sleeve (33) and Daowei prism (32) are fixed in the middle of the upper rotating body (27) and located on the mechanical axis of the upper rotating body (27).

8. The apparatus according to claim 4, characterized in that: The parallel plate mirror (34) is installed at the top rear end of the upper rotating body (27), and the optical wedge is installed at the rear end of the lower rotating body (19) to ensure that the axis of the parallel plate mirror (34), the optical wedge, and the axis of the Dowell prism (32) are coaxial.

9. The apparatus according to claim 1, characterized in that: The focusing module (6) includes a flat-top lens group (42), which is connected to a focusing lens group (43). The focusing lens group (43) is fixed to the end of the protective lens group (45) through a focusing lens sleeve (44), and the protective lens group (45) is fixed to the end of the nozzle (46).

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