An ultra-precision high-speed spindle rotation error detection device and method

Abstract

A kind of detection device and method of ultra-precision high-speed spindle rotation error, belong to ultra-precision machine tool detection technical field.Standard bar is adsorbed to the end of spindle of ultra-precision machine tool, and the rotation axis of standard bar coincides with the rotation axis of spindle;Measuring device is detachably installed on Z-axis support plate, and Z-axis support plate is detachably fixedly installed on Z-axis guide rail, when measuring device is not fastened on Z-axis support plate, measuring device can slide along the T-shaped slot of Z-axis support plate;When measuring device reaches appropriate position, measuring device is fastenedly connected with Z-axis support plate;Two sensors of measuring device are used to measure the rotation error at two different sections of spindle;Two sensor signal output ends of measuring device are connected with sensor controller signal input end, sensor controller signal output end is connected with data acquisition module signal input end, and data acquisition module signal output end is connected with data analysis and display module signal input end.The present application is used for ultra-precision high-speed spindle rotation error detection.

Description

Technical Field

[0001] This invention belongs to the field of ultra-precision machine tool testing technology, specifically relating to a device and method for detecting the rotational error of an ultra-precision high-speed spindle. Background Technology

[0002] Currently, most spindle rotation accuracy measuring devices are only suitable for single-section measurements (measuring only radial rotation error). Only a few devices can measure tilt error, and those that can mostly use eddy current sensors. These sensors work by using a high-frequency electromagnetic field generated by a probe coil to induce eddy currents on the surface of the metal being measured. The measurement distance is then determined based on impedance changes, making them susceptible to electromagnetic interference. Therefore, these devices are limited to using standard spheres or bars made of metal for error measurement and cannot be used with non-conductive materials such as ceramics or glass. High-precision standard bars (spheres) currently tend to use ceramic materials due to their excellent thermal stability, wear resistance, and chemical resistance.

[0003] Furthermore, most existing related products and patents are offline measuring devices isolated from the machine tool control system, which cannot achieve data transmission with the machine tool control system. Summary of the Invention

[0004] The purpose of this invention is to solve the above-mentioned problems existing in the prior art by proposing a device and method for detecting the rotational error of an ultra-precision high-speed spindle.

[0005] The ultra-precision high-speed spindle rotation error detection device of the present invention is suitable for measuring the rotation error of high-speed spindles in ultra-precision machine tools, and has the ability to simultaneously measure the radial rotation error and the horizontal sway angle error at two different cross-sectional positions. The detection device and method proposed in this invention can achieve nanometer-level precision measurement of the rotation error of ultra-precision high-speed spindles.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0007] A device for detecting the rotational error of an ultra-precision high-speed spindle includes a measuring device and a standard bar. The standard bar is attached to the end of the spindle of an ultra-precision machine tool, and the rotational axis of the standard bar coincides with the rotational axis of the spindle. A Z-axis support plate is detachably and fixedly mounted on the Z-axis guide rail of the ultra-precision machine tool. A T-slot is formed on the Z-axis support plate along the Z-axis guide rail direction. When the measuring device is initially mounted on the Z-axis support plate, it can slide along the T-slot. When the measuring device reaches a suitable position, it is detachably and fixedly connected to the Z-axis support plate. Two sensors of the measuring device are used to measure the rotational error at two different cross-sections of the standard bar.

[0008] The two sensor signal output terminals of the measuring device are respectively connected to the signal input terminal of the sensor controller. The signal output terminal of the sensor controller, as well as the signal output terminals of the spindle, Z-axis, and X-axis of the ultra-precision machine tool, are respectively connected to the signal input terminal of the data acquisition module integrated in the ultra-precision machine tool control system. The signal output terminal of the data acquisition module is connected to the signal input terminal of the data analysis and display module.

[0009] Furthermore, the sensor is used to perform real-time measurements on the standard bar and transmit the measurement data to the sensor controller;

[0010] The sensor controller is used to convert the sensor's measurement signals into analog signals and transmit the analog signals to the data acquisition module;

[0011] The data acquisition module is used for multi-channel collaborative data acquisition, including real-time measurement data from two sensors and the motion status and coordinate position of each motion axis of the ultra-precision machine tool; and transmits the acquired signals to the data analysis and display module.

[0012] The data analysis and display module is used to process, analyze, and calculate the measurement data output by the data acquisition module, and to display the results of the rotation error graphically.

[0013] Furthermore, the measuring device includes an electric displacement stage, a measuring unit connecting plate, and two measuring units with identical structures; the two measuring units are arranged in a mirror image and respectively installed on the front and rear sides of the measuring unit connecting plate, and the measuring unit connecting plate is fixedly installed on the electric displacement stage.

[0014] Furthermore, the measuring unit connecting plate has a boss in the middle to enable positioning of the two measuring units.

[0015] Furthermore, each of the measurement units includes a sensor, a sensor support, a micro-adjustment stage connecting plate, a micro-adjustment stage fixing frame, and two micro-adjustment stages, namely an X-direction micro-adjustment stage and a Y-direction micro-adjustment stage; the sensor is mounted on the sensor support, the sensor support is detachably and fixedly connected to the micro-adjustment stage connecting plate, the micro-adjustment stage connecting plate is detachably and fixedly connected to the X-direction micro-adjustment stage, the X-direction micro-adjustment stage is detachably and fixedly connected to the Y-direction micro-adjustment stage, the Y-direction micro-adjustment stage is detachably and fixedly connected to the micro-adjustment stage fixing frame, and the micro-adjustment stage fixing frame is detachably and fixedly connected to the measurement unit connecting plate.

[0016] Furthermore, the X-direction micro-adjustment stage includes an X-direction moving platform, an X-direction fixed platform, an X-direction locking plate, an X-direction moving support frame, an X-direction micro-adjustment push rod, an X-direction push rod fixing frame, and an X-direction tension spring;

[0017] The X-direction moving platform is detachably and fixedly connected to the micro-adjustment table connecting plate. The X-direction moving platform is slidably connected to the X-direction fixed platform. The upper surface of the X-direction moving platform is detachably and fixedly connected to the X-direction moving support frame. The X-direction micro-adjustment push rod is installed on the X-direction push rod fixing frame. The X-direction push rod fixing frame is detachably and fixedly connected to the upper surface of the X-direction fixed platform. The front end of the X-direction micro-adjustment push rod abuts against the X-direction moving support frame. Two X-direction sliders are provided on the X-direction fixed platform. An X-direction tension spring is provided in the X-direction long groove formed between the two X-direction sliders. One end of the X-direction tension spring is fixedly connected to fixing screw three, and the other end is fixedly connected to fixing screw one. Fixing screw three is fixed in the X-direction long groove, and fixing screw one is fixed on the X-direction moving platform. An X-direction locking plate is provided on the lower side of the X-direction moving platform and the X-direction fixed platform. The X-direction locking plate is detachably and fixedly connected to the X-direction fixed platform. The X-direction locking plate has an X-direction long hole. Locking screw one slides through the X-direction long hole and is fastened to a threaded hole one opened on the lower side of the X-direction moving platform.

[0018] Furthermore, the Y-direction micro-adjustment stage includes a Y-direction moving platform, a Y-direction fixed platform, a Y-direction locking plate, a Y-direction moving support frame, a Y-direction micro-adjustment push rod, a Y-direction push rod fixing frame, and a Y-direction tension spring;

[0019] The Y-direction moving platform and the X-direction fixed platform are detachably and fixedly connected, and slidably connected. A Y-direction moving support frame is detachably and fixedly installed on the right side of the Y-direction moving platform. A Y-direction micro-motion push rod is fixedly installed on the Y-direction push rod fixing frame, which is detachably and fixedly installed on the right side of the Y-direction fixed platform. The front end of the Y-direction micro-motion push rod rests against the Y-direction moving support frame. Two Y-direction sliders are provided on the Y-direction fixed platform. A Y-direction tension spring is installed in the Y-direction long groove formed between the two Y-direction sliders. One end of the Y-direction tension spring is connected to a fixing screw. Four fixed connections are made, with the other end fixedly connected to two fixing screws. The four fixing screws are fixed in the long groove in the Y direction, and the two fixing screws are fixed on the Y direction moving platform. The Y direction locking plate is set on the left side of the Y direction moving platform and the Y direction fixed platform. The Y direction locking plate is detachably fixedly connected to the Y direction fixed platform. The Y direction locking plate is provided with a Y direction long hole. The two locking screws slide through the Y direction long hole and are fastened to the threaded hole two opened on the left side of the Y direction moving platform. The Y direction fixed platform is detachably fixedly connected to the micro-adjustment stage fixing frame. The left end of the micro-adjustment stage fixing frame is detachably fixedly connected to the measuring unit connecting plate.

[0020] Furthermore, both sensors are white light confocal displacement sensors.

[0021] Furthermore, a slot is provided in the middle of one side of the sensor support, the sensor is placed in the slot, and the sensor is clamped by fastening screws and by material deformation.

[0022] A method for detecting the rotational error of an ultra-precision high-speed spindle, the method comprising the following steps:

[0023] S1: Precise self-alignment: Install the standard bar on the machine tool spindle chuck and perform precision self-alignment so that the axis of the standard bar coincides with the rotation axis of the spindle;

[0024] S2: Assembly of measuring device: First, assemble two measuring units, adjust the installation position of the two sensors so that the front ends of the two sensors are on the same plane, and tighten the sensors; then, detachably and fix the two measuring units on the electric displacement stage.

[0025] S3: Install the measuring device: Place the assembled measuring device on the Z-axis support plate, ensuring that both sensors are within the range corresponding to the standard bar, and install the measuring device on the Z-axis support plate.

[0026] S4: Connect the sensors: Connect the signal transmission lines of the two sensors to the sensor controller, turn on the sensor controller, and record the sensor data;

[0027] S5: Preliminary Adjustment: Drive the electric displacement stage to move vertically so that the sensor is initially aligned with the contour vertex of the standard bar; drive the X-axis to move the standard bar along the X direction to approach the measuring device. When the sensor controller displays a reading, it means that the standard bar is within the effective measurement range of the two sensors. Adjust the standard bar to be within the effective range of the two sensors respectively.

[0028] S6: Precision Adjustment: Adjust the positions of the two sensors sequentially, designating the sensor at the front as Sensor B and the sensor at the rear as Sensor A; the adjustment process is as follows:

[0029] S61: Rotate the Y-direction micro-motion push rod of the Y-direction micro-motion adjustment stage, so that the sensor moves up and down with the micro-motion adjustment stage. As the distance between the sensor and the standard bar changes, the reading in the sensor controller also changes. The position of the vertex of the standard bar contour is determined by the up and down movement of the sensor, and the sensor is adjusted to align with this position.

[0030] S62: Rotate the X-direction micro-motion push rod of the X-direction micro-motion adjustment stage, causing the sensor to move left and right with the micro-motion adjustment stage. Observe the reading in the sensor controller, ensuring the standard bar is within the sensor's optimal measurement range. Record the Z-axis position information of the ultra-precision machine tool at this time, denoted as S62. ;

[0031] S7: Calibrate the center distance between the two sensors :

[0032] S71: Drive the Z-axis to move, carrying the measuring device backward at a constant speed via the Z-axis guide rail. When the standard bar is just outside the measurement range of sensor B, record the Z-axis position at this point as... ;

[0033] S72: Continue driving the Z-axis to move. When the standard bar is just outside the measurement range of sensor A, record the Z-axis position at this point as... The center distance between the two sensors is then... ;

[0034] S8: Measuring device reset: Drive the Z-axis to... Location, in preparation for measurement;

[0035] S9: Rotational error measurement: After confirming that the data transmission status is normal, drive the spindle to rotate at high speed at the target speed, trigger the data acquisition button on the machine tool control interface, and simultaneously acquire data from the machine tool's X-axis, Z-axis, spindle, and two sensors. After acquiring the data, trigger the stop acquisition button on the machine tool control interface, store the acquired data, stop the spindle, and the measurement is complete.

[0036] S10: Data processing: Use data processing software to process the data, extract valid data, delete singular points, and use the frequency domain separation method to eliminate the influence of standard bar installation eccentricity on the measurement results.

[0037] S11: Measurement results display: Plot the radial errors corresponding to sections A and B in polar coordinates, and calculate the swing angle error based on the radial errors of these two sections and the spacing L; where: sections A and B are the radial section positions of the standard rods corresponding to sensor A and sensor B, respectively.

[0038] The advantages of this invention over the prior art are:

[0039] 1. This invention proposes a detection device for the rotational error of ultra-precision high-speed spindles. It employs a white light confocal displacement sensor as the measuring sensor. The white light confocal sensor utilizes the principle of spectral dispersion for distance measurement, providing sub-micron level absolute spatial position. The white light confocal sensor is unaffected by electromagnetic interference and can be adapted to standard rods (spheres) made of materials such as metal, glass, and ceramics. This invention uses two sensors to simultaneously measure two different cross-sectional positions of the standard rod, thereby simultaneously obtaining the radial rotational error and horizontal tilting angle error at both cross-sectional positions. This invention has good scalability and extensibility; by modifying the mechanical tooling, the vertical tilting angle error of ultra-precision high-speed spindles can be measured. This invention utilizes a data analysis and display module to display the radial rotational error in polar coordinates and the tilting angle error in a three-dimensional view, while also displaying the numerical values ​​of each error.

[0040] 2. The ultra-precision high-speed spindle rotation error detection device of the present invention can effectively solve the problem that existing measuring devices are isolated from the machine tool control system for offline measurement and cannot achieve data transmission with the machine tool control system.

[0041] The detection device of this invention can realize data transmission with the machine tool control system, exhibiting a high degree of system integration. This invention has broader applicability to the materials of the standard bar, no longer limited to metal standard bars. Furthermore, the detection device and method of this invention are characterized by simple operation, stable control, and high integration, and can also measure the vertical tilt angle error by changing the tooling. Attached Figure Description

[0042] Figure 1 This is an isometric drawing of the ultra-precision high-speed spindle rotation error detection device of the present invention;

[0043] Figure 2 It is a layout diagram of two sets of mirror-arranged measurement units of the measuring device;

[0044] Figure 3 This is a disassembled diagram of the measuring device;

[0045] Figure 4 It is an isometric adjustment table for the X direction. Figure 1 ;

[0046] Figure 5 It is an isometric adjustment table for the X direction. Figure 2 ;

[0047] Figure 6 It is an isometric adjustment table for the X direction. Figure 3 ;

[0048] Figure 7 It is the Y-direction micro-adjustment stage isometric Figure 1 ;

[0049] Figure 8 It is the Y-direction micro-adjustment stage isometric Figure 2 ;

[0050] Figure 9 It is the Y-direction micro-adjustment stage isometric Figure 3 ;

[0051] Figure 10 This is a front view showing both sensors within the range corresponding to the standard bar;

[0052] Figure 11 It is an isometric view of both sensors within the range corresponding to the standard bar;

[0053] Figure 12 This is the front view with the standard bar positioned just outside the measurement range of sensor B;

[0054] Figure 13 It is an isometric view of the standard bar being positioned just outside the measurement range of sensor B;

[0055] Figure 14 This is the front view with the standard bar positioned just outside the measurement range of sensor A;

[0056] Figure 15 It is an isometric view of the standard bar being located just outside the measurement range of sensor A;

[0057] Figure 16 This is a schematic diagram of the signal measurement principle of the detection device of the present invention;

[0058] Figure 17 This is a schematic diagram showing the radial rotation error of sections A and B in polar coordinates.

[0059] Figure 18 It presents a schematic diagram of the swing angle error in a three-dimensional form;

[0060] Figure 19 This is a schematic diagram of the sensor axis corresponding to the maximum diameter of the standard rod.

[0061] The component names and reference numerals in the above figures are as follows:

[0062] 1. Spindle; 2. Measuring device; 3. Standard bar; 4. Z-axis support plate; 5. Electric displacement stage; 6. Measuring unit connecting plate; 7. Boss; 8. Sensor B; 9. Sensor support; 10. Micro-adjustment stage connecting plate; 11. Micro-adjustment stage fixing frame; 12. X-direction micro-adjustment stage; 13. Y-direction micro-adjustment stage; 14. X-direction moving platform; 15. X-direction fixed platform; 16. X-direction locking plate; 17. X-direction moving support frame; 18. X-direction micro-adjustment rod; 19. X-direction tension rod fixing frame. 20. Extension spring, 21. Fixing screw 1, 22. Long hole in X direction, 23. Locking screw 1, 24. Moving platform in Y direction, 25. Fixed platform in Y direction, 26. Locking plate in Y direction, 27. Moving support frame in Y direction, 28. Micro-motion push rod in Y direction, 29. Push rod fixing frame in Y direction, 30. Tension spring in Y direction, 31. Fixing screw 2, 32. Long hole in Y direction, 33. Locking screw 2, 34. Slot, 35. X-axis, 36. Sensor A, 37. Z-axis, 38. Fixing screw 3, 39. Fixing screw 4. Detailed Implementation

[0063] like Figures 1-16 As shown, this embodiment describes a device for detecting the rotational error of an ultra-precision high-speed spindle, including a measuring device 2 and a (high-precision) standard bar 3;

[0064] A standard rod 3 (adsorbed by a vacuum suction cup under negative pressure) is attached to the end of the spindle 1 of the ultra-precision machine tool, and the rotation axis of the standard rod 3 coincides with the rotation axis of the spindle 1. A Z-axis support plate 4 (bolted) is detachably and fixedly mounted on the Z-axis guide rail of the ultra-precision machine tool. A T-slot is formed on the Z-axis support plate 4 along the Z-axis guide rail direction. When the measuring device 2 (using fastening screws and T-block nuts) is initially installed on the Z-axis support plate 4, the measuring device 2 can slide along the T-slot. When the measuring device 2 reaches a suitable position (i.e., the two sensors of the measuring device 2 correspond to the radial sections A and B of the standard rod 3 respectively), the measuring device 2 and the Z-axis support plate 4 are detachably and fixedly connected (the measuring device 2 is tightened onto the T-block nuts by fastening screws, thus achieving a detachable and fixed connection between the measuring device 2 and the Z-axis support plate 4). The two sensors of the measuring device 2 are used to measure the rotational error at two different sections (section A and section B) of the standard rod 3.

[0065] The two sensor signal output terminals of the measuring device 2 are respectively connected to the signal input terminal of the sensor controller. The signal output terminal of the sensor controller and the signal output terminals of the spindle 1, Z-axis 37 and X-axis 35 of the ultra-precision machine tool are respectively connected to the signal input terminal of the data acquisition module integrated in the ultra-precision machine tool control system. The signal output terminal of the data acquisition module is connected to the signal input terminal of the data analysis and display module.

[0066] Furthermore, such as Figure 16As shown, the sensor is used to perform real-time measurements on the standard rod 3 and transmit the measurement data to the sensor controller;

[0067] The sensor controller is used to convert the sensor's measurement signals into analog signals and transmit the analog signals to the data acquisition module;

[0068] The data acquisition module is used for multi-channel collaborative data acquisition, including real-time measurement data from two sensors and the motion status and coordinate position of each motion axis (spindle, Z-axis, and X-axis) of the ultra-precision machine tool; and transmits the acquired signals to the data analysis and display module.

[0069] The data analysis and display module is used to process, analyze, and calculate the measurement data output by the data acquisition module, and to display the results of the rotation error graphically.

[0070] Furthermore, such as Figure 1 , Figure 3 As shown, the measuring device 2 includes an electric displacement stage 5 (the electric displacement stage 5 is an outsourced component and is a common mechanical device), a measuring unit connecting plate 6, and two measuring units with identical structures. The two measuring units are arranged in a mirror image and are respectively (by screws) mounted on the front and rear sides of the measuring unit connecting plate 6. The measuring unit connecting plate 6 is fixedly mounted on the electric displacement stage 5 (thus ensuring that the electric displacement stage 5 can drive the two measuring units to move quickly and adjust their height position. During operation, the two measuring units are at the same height level as the standard bar 3).

[0071] Furthermore, such as Figure 2 As shown, the measuring unit connecting plate 6 has a boss 7 in the middle to achieve positioning of the two measuring units (thereby ensuring the center distance between the two sensors). ).

[0072] Furthermore, such as Figure 2 As shown, each of the measurement units includes a sensor (a measurement sensor), a sensor support 9, a micro-adjustment stage connecting plate 10, a micro-adjustment stage fixing frame 11, and two micro-adjustment stages, namely an X-direction micro-adjustment stage 12 and a Y-direction micro-adjustment stage 13. The sensor is mounted on the sensor support 9. The sensor support 9 is detachably and fixedly connected to the micro-adjustment stage connecting plate 10 (by screws). The micro-adjustment stage connecting plate 10 is detachably and fixedly connected to the X-direction micro-adjustment stage 12 (by screws). The X-direction micro-adjustment stage 12 is detachably and fixedly connected to the Y-direction micro-adjustment stage 13 (by screws). The Y-direction micro-adjustment stage 13 is detachably and fixedly connected to the micro-adjustment stage fixing frame 11 (by screws). The micro-adjustment stage fixing frame 11 is detachably and fixedly connected to the measurement unit connecting plate 6 (by screws).

[0073] The X-direction micro-adjustment stage 12 and the Y-direction micro-adjustment stage 13 are mainly used to adjust the relative positions of the sensor and the standard rod 3 in the X and Y directions.

[0074] Furthermore, such as Figures 2-6 The X-direction micro-adjustment platform 12 includes an X-direction moving platform 14, an X-direction fixed platform 15, an X-direction locking plate 16, an X-direction moving support frame 17, an X-direction micro-adjustment rod 18, an X-direction rod fixing frame 19, and an X-direction tension spring 20.

[0075] The X-direction moving platform 14 is detachably and fixedly connected to the micro-adjustment table connecting plate 10 (by screws). The X-direction moving platform 14 is slidably connected to the X-direction fixed platform 15. The upper end face of the X-direction moving platform 14 is detachably and fixedly connected to the X-direction moving support frame 17 (by screws). The X-direction micro-adjustment push rod 18 is mounted on the X-direction push rod fixing frame 19. The X-direction push rod fixing frame 19 is detachably and fixedly connected to the upper end face of the X-direction fixed platform 15 (by screws). The front end of the X-direction micro-adjustment push rod 18 abuts against the X-direction moving support frame 17. Two X-direction sliders are provided on the X-direction fixed platform 15. An X-direction tension spring 20 is provided in the X-direction long groove formed between the two X-direction sliders.

[0076] One end of the X-direction tension spring 20 is fixedly connected to the fixing screw 38, and the other end is fixedly connected to the fixing screw 21. The fixing screw 38 is fixed in the X-direction long slot, and the fixing screw 21 is fixed on the X-direction moving platform 14. (The function of the X-direction tension spring 20 is: when the X-direction micro-motion push rod 18 rotates clockwise, the X-direction moving platform 14 moves forward along the X-direction, and the X-direction tension spring 20 is stretched and deformed to store elastic potential energy; when the X-direction micro-motion push rod 18 rotates counterclockwise, the X-direction tension spring 20 releases potential energy, and the elastic restoring force generated by it drives the X-direction moving platform 14 to move backward along the X-direction to achieve reset.)

[0077] The X-direction locking plate 16 is disposed on the lower side of the X-direction moving platform 14 and the X-direction fixed platform 15. The X-direction locking plate 16 is detachably and fixedly connected to the X-direction fixed platform 15 (by screws). The X-direction locking plate 16 is provided with an X-direction elongated hole 22. The locking screw 23 slides through the X-direction elongated hole 22 and is fastened to the threaded hole 23 on the lower side of the X-direction moving platform 14.

[0078] Furthermore, such as Figure 2 , Figures 7-9 As shown, the Y-direction micro-adjustment table 13 includes a Y-direction moving platform 24, a Y-direction fixed platform 25, a Y-direction locking plate 26, a Y-direction moving support frame 27, a Y-direction micro-adjustment rod 28, a Y-direction rod fixing frame 29, and a Y-direction tension spring 30.

[0079] The Y-direction moving platform 24 is detachably and fixedly connected to the X-direction fixed platform 15 (by screws). The Y-direction moving platform 24 is slidably connected to the Y-direction fixed platform 25. A Y-direction moving support frame 27 is detachably and fixedly installed on the right side of the Y-direction moving platform 24 (by screws). A Y-direction micro-motion push rod 28 is fixedly installed on a Y-direction push rod fixing frame 29. The Y-direction push rod fixing frame 29 is detachably and fixedly installed on the right side of the Y-direction fixed platform 25 (by screws). The front end of the Y-direction micro-motion push rod 28 abuts against the Y-direction moving support frame 27. Two Y-direction sliders are provided on the Y-direction fixed platform 25. A Y-direction tension spring 30 is provided in the Y-direction long groove formed between the two Y-direction sliders.

[0080] One end of the Y-direction tension spring 30 is fixedly connected to the fourth fixing screw 39, and the other end is fixedly connected to the second fixing screw 31. The fourth fixing screw 39 is fixed in the Y-direction long slot, and the second fixing screw 31 is fixed on the Y-direction moving platform 24. (The function of the Y-direction tension spring 30 is: when the Y-direction micro-motion push rod 28 rotates clockwise, the Y-direction moving platform 24 moves forward along the Y-direction, and the Y-direction tension spring 30 is stretched and deformed to store elastic potential energy; when the Y-direction micro-motion push rod 28 rotates counterclockwise, the Y-direction tension spring 30 releases its potential energy, and the elastic restoring force it generates drives the Y-direction moving platform 24 to move backward along the Y-direction, thereby achieving reset.)

[0081] Y-direction locking plate 26 is provided on the left side of Y-direction moving platform 24 and Y-direction fixed platform 25. Y-direction locking plate 26 is detachably and fixedly connected to Y-direction fixed platform 25 (by screws). Y-direction locking plate 26 is provided with Y-direction elongated hole 32. Locking screw 23 slides through Y-direction elongated hole 32 and is fastened to threaded hole 2 opened on the left side of Y-direction moving platform 24. Y-direction fixed platform 25 is detachably and fixedly connected to micro-adjustment stage fixing bracket 11 (by screws). The left end of micro-adjustment stage fixing bracket 11 is detachably and fixedly connected to measurement unit connecting plate 6 (by screws).

[0082] Furthermore, such as Figure 2 , Figure 3 As shown, both sensors are (non-contact) white light confocal displacement sensors (capable of nanometer-level measurement accuracy).

[0083] Furthermore, such as Figure 2 , Figure 3 As shown, a slot 34 is provided in the middle of one side of the sensor support 9. The sensor is placed in the slot 34 and clamped by fastening screws and material deformation. The sensor support 9 is made of aluminum alloy.

[0084] Specific implementation method two: such as Figures 1-16 , Figure 19 As shown, this embodiment describes a method for detecting the rotational error of an ultra-precision high-speed spindle. The method is based on the detection device described in Embodiment 1, and includes the following steps:

[0085] S1: Precise alignment: Mount the standard bar 3 on the machine tool spindle chuck, use an inductive micrometer to calibrate the eccentricity of the standard bar 3, adjust the position of the standard bar 3 for precise alignment, so that the axis of the standard bar 3 coincides with the rotation axis of the spindle 1;

[0086] S2: Assembly of measuring device: First, assemble two measuring units, adjust the installation position of the two sensors so that the front ends of the two sensors are on the same plane, and tighten the sensors by rotating the fastening screws; then, detachably and fix the two measuring units on the electric displacement stage 5.

[0087] S3: Install the measuring device: Place the assembled measuring device 2 on the Z-axis support plate 4, ensuring that both sensors are within the range corresponding to the standard bar 3, and install the measuring device on the Z-axis support plate 4;

[0088] S4: Connect the sensors: Connect the signal transmission lines of the two sensors to the sensor controller, turn on the sensor controller, and record the sensor data;

[0089] S5: Preliminary adjustment: Drive the electric displacement stage 5 to move vertically so that the sensor is initially aligned with the contour vertex of the standard rod 3; drive the X-axis 35 to move the standard rod 3 along the X direction to approach the measuring device 2. When the sensor controller shows a reading, it means that the standard rod 3 is within the effective measurement range of the two sensors. Adjust the standard rod 3 to be within the effective range of the two sensors respectively.

[0090] S6: Precision Adjustment: Adjust the positions of the two sensors sequentially, designating the sensor at the front as sensor B8 and the sensor at the rear as sensor A36; the adjustment process is as follows:

[0091] S61: Rotate the Y-direction micro-motion push rod 28 of the Y-direction micro-motion adjustment stage 13 to make the sensor move up and down with the micro-motion adjustment stage. As the distance between the sensor and the standard rod 3 changes, the reading in the sensor controller also changes. The position of the apex of the standard rod 3 contour is determined by the up and down movement of the sensor, and the sensor is adjusted to align with this position.

[0092] S62: Rotate the X-direction micro-motion push rod 18 of the X-direction micro-motion adjustment stage 12 to make the sensor move left and right with the micro-motion adjustment stage. Observe the reading in the sensor controller to ensure that the standard rod 3 is within the optimal measurement range of the sensor. Record the Z-axis position information of the ultra-precision machine tool at this time, denoted as S62. ;

[0093] S7: Calibrate the center distance between the two sensors :

[0094] S71: Drive the Z-axis 37 to move, and move the measuring device 2 backward at a constant speed via the Z-axis guide rail. When it moves to a position where the standard bar 3 is just outside the measurement range of the sensor B8, record the position of the Z-axis 37 at this time as... ;

[0095] S72: Continue driving the Z-axis 37 to move. When the standard rod 3 is just outside the measurement range of the sensor A36, record the position of the Z-axis 37 at this point as... The center distance between the two sensors is then... ;

[0096] S8: Measuring device reset: Drive Z-axis 37 to... Location, in preparation for measurement;

[0097] S9: Rotational Error Measurement: After confirming that the data transmission status is normal, drive the spindle 1 to rotate at the target speed (e.g., 5000 rpm / min or 6000 rpm / min), trigger the data acquisition button on the machine tool control interface, and simultaneously acquire data from the machine tool X-axis 35, Z-axis 37, spindle 1, and the two sensors. After acquiring the data, trigger the stop acquisition button on the machine tool control interface, store the acquired data, and the spindle 1 stops rotating. The measurement is complete.

[0098] S10: Data processing: Data processing software is used to process the data, extract valid data, delete singular points, and use the frequency domain separation method to eliminate the influence of the installation eccentricity of the standard rod 3 on the measurement results.

[0099] S11: Measurement results display: Plot the radial errors corresponding to sections A and B in polar coordinates, and calculate the swing angle error based on the radial errors of these two sections and the spacing L; where: sections A and B are the radial section positions of the standard rod 3 corresponding to sensors A36 and B8, respectively.

[0100] Example:

[0101] This embodiment describes a device for detecting the rotational error of an ultra-precision high-speed spindle. Taking a three-axis ultra-precision machine tool as an example, the three-axis ultra-precision machine tool mainly includes an X-axis 35, a Z-axis 37, and a high-speed spindle 1. The X-axis 35 and Z-axis 37 are arranged perpendicularly to each other, forming a typical T-shaped layout structure. The spindle 1 is mounted on the X-axis 35, and its axis is parallel to the Z-axis 37. Figures 1-16 As shown.

[0102] Measuring device 2 includes an electric displacement stage 5 and two sets of mirror-arranged measuring units. Each measuring unit mainly includes a sensor and two micro-adjustment stages (micro-displacement stages). Using a non-contact white light confocal probe as the sensor, nanometer-level measurement accuracy can be achieved.

[0103] High-precision standard rod 3: As a standard component for measuring the rotational error of ultra-precision high-speed spindles, it needs to be concentrically aligned with the rotational axis of spindle 1 beforehand. The material of standard rod 3 is not limited, as long as the surface is smooth enough to achieve optical reflection, such as steel or aluminum; it can also be made of non-conductive materials such as ceramics or glass.

[0104] Data acquisition module 4: This is a data acquisition card, which is integrated into the ultra-precision machine tool controller.

[0105] Data analysis and display module 5: Used to process and graphically display measurement data.

[0106] The functions of each component in the detection device of the present invention are as follows:

[0107] 1. Ultra-precision machine tool main structure: mainly used for the precision installation and fixation of measuring device 2, and at the same time executes the movement of each axis of the machine tool, providing a hardware foundation for the measurement of ultra-precision high-speed spindle rotation error.

[0108] 2. Measuring device: (1) Electric displacement stage 5 is used to quickly adjust the height of the measuring unit within a wide range so that the measuring unit and the high-precision standard bar 3 are roughly at the same height; (2) The measuring unit is mainly used to measure the rotation error of the ultra-precision high-speed spindle 1. The hardware part of the measuring unit is mainly used to clamp the sensor and adjust the position of the sensor relative to the standard bar 3; among which, the sensor support 9 is used to fix and clamp the sensor; the X-direction micro-adjustment stage 12 (X-direction micro-adjustment platform) is used to realize the fine adjustment of the sensor position along the horizontal direction so that the standard bar 3 is within the effective range of the sensor; the Y-direction micro-adjustment stage 13 (Y-direction micro-adjustment platform) is used to fine adjust the vertical position of the sensor so as to realize the alignment of the sensor with the contour vertex of the standard bar 3.

[0109] 3. High-precision standard bar: The roundness and cylindricity errors of the cross-section of the high-precision standard bar 3 are very small and can be ignored when measuring the rotation error of the spindle 1. The high-precision standard bar 3 is adsorbed onto the spindle 1 by a vacuum chuck. Through a precision self-aligning operation, the axis of the high-precision standard bar 3 is made to coincide with the axis of the spindle 1. Therefore, by using the detection device proposed in this invention to measure the precisely self-aligned standard bar 3, the rotation error of the spindle 1 can be obtained.

[0110] 4. Data Acquisition Module: Primarily used for multi-channel collaborative data acquisition, including real-time measurement data from two sensors and the motion status and coordinate position of each motion axis of the ultra-precision machine tool, providing effective data for subsequent data processing, such as... Figure 16 As shown.

[0111] 5. Data Analysis and Display Module: Used to process and calculate the measurement data, and finally display the gyration error results graphically.

[0112] The relationships between the components of the detection device of the present invention are as follows:

[0113] The Z-axis support plate 4 of the ultra-precision machine tool is fixedly installed on the Z-axis guide rail by bolt connection. The Z-axis support plate 4 has a T-slot along the Z-axis guide rail direction. The fastening screw is fastened to the T-block nut to fasten the measuring device 2 to the Z-axis support plate 4 of the ultra-precision machine tool. When the measuring device 2 is not fixed (the fastening screw is not tightened), the measuring device 2 can slide in the T-slot of the Z-axis support plate 4. When the measuring device 2 reaches the appropriate position, the fastening screw in the T-block nut is tightened to achieve a tight connection between the measuring device 2 and the Z-axis support plate 4.

[0114] The sensor is connected to the sensor controller via optical fiber. The sensor controller is connected to the data acquisition module of the ultra-precision machine tool and transmits data, thus enabling multi-channel data acquisition. The data analysis and display module processes, analyzes, and calculates the measurement data obtained by the data acquisition module and displays the rotation error results graphically. The two sensors are designated as sensor A36 and sensor B8, with sensor B8 located in front of sensor A36.

[0115] like Figure 1 , Figure 2 As shown, the ultra-precision machine tool adopts a typical T-shaped structure. The spindle 1 / C axis is mounted on the X-axis guide rail, which is used to achieve high-precision linear motion. The electric displacement stage 5 is fixedly mounted vertically on the Z-axis support plate 4, which is also used to achieve high-precision linear motion. The standard rod 3 is adsorbed onto the end of the spindle 1 by a vacuum chuck (negative pressure). After self-aligning, its rotation axis can be regarded as the rotation axis of the spindle 1. Driving the spindle 1 to rotate, sensor A36 can measure the rotation error at section A of the standard rod 3; similarly, sensor B8 can measure the rotation error at section B of the standard rod 3. The rotation errors at sections A and B are compared with the center distance between the two sensors. The swing angle error of the spindle can be obtained by calculation.

[0116] The sensor employs a non-contact white light confocal method and uses a selectable analog output as the signal interface, enabling data transmission with the ultra-precision machine tool control system. The signal schematic diagram of the measurement process is shown below. Figure 16As shown, the sensor's measurement signal is converted into an analog quantity by the sensor controller and sent to the data acquisition module. The data acquisition module is a data acquisition card. The data acquisition card transmits data with the data analysis and display module (integrated in the ultra-precision machine tool control system) to monitor and record the motion status of each axis in real time. The data analysis and display module can read the data obtained by the data acquisition card, process and calculate it, and display the error results in graphical form.

[0117] like Figure 1 , Figure 2 As shown, the measuring device 2 includes an electric displacement stage 5, a measuring unit connecting plate 6, and two measuring units with identical structures arranged in a mirror image. The two measuring units are detachably and fixedly mounted (by screws) on the front and rear sides of the measuring unit connecting plate 6. A boss 7 is provided in the middle of the measuring unit connecting plate 6 to position the two measuring units, thereby ensuring the center distance L between the two sensors. The measuring unit connecting plate 6 is mounted on the electric displacement stage 5, ensuring that the electric displacement stage 5 can drive the measuring units to move quickly to adjust their height. During operation, the central axis of the sensor must be aligned with the maximum diameter of the standard rod 3. Figure 19 As shown. The sensor support 9 adopts a slotted structure 34, and the sensor is clamped by material deformation through fastening screws.

[0118] like Figure 1 , Figure 3 As shown, the measuring unit is moved to the same height as the standard rod 3 by the electric displacement stage 5, completing the initial position adjustment. The X-axis 35 is driven, and the main shaft 1 and standard rod 3 follow suit, ensuring that the standard rod 3 is within the effective range of the sensor and that the sensor signal feedback is normal. The micro-adjustment stage (micro-displacement stage) in the measuring unit is mainly used to adjust the relative position (in both X and Y directions) between the sensor and the standard rod 3. Micro-adjustment in the Y direction ensures that the sensor is directly facing the apex of the cylindrical profile of the standard rod 3, while micro-adjustment in the X direction ensures that the center distance between the standard rod 3 and both sensors is within the effective range.

[0119] Figures 4-6 As shown, the micro-motion adjustment stage is driven by a micro-motion push rod (a standard product, commonly used with a micrometer micrometer head or micrometer measuring head), enabling micrometer-level micro-motion. Rotating the micro-motion push rod clockwise (right-hand) moves its front end forward, pressing against the moving support frame, thus enabling forward micro-motion of the micro-motion adjustment stage, with the tension spring in a stretched state. Rotating the micro-motion push rod counter-clockwise (left-hand) causes the tension spring to spring back, enabling backward micro-motion of the micro-motion adjustment stage. The micro-motion adjustment stage has a locking function; after adjustment, tightening the locking screw ensures stability during measurement.

[0120] Data processing flow: During the measurement process, the position of the cylindrical cross-section corresponding to sensor A36 is called cross-section A, and the data measured by sensor A36 is recorded as A1. Although the standard rod 3 and the main shaft 1 have been precisely aligned, the installation eccentricity between them cannot be completely eliminated. Therefore, it is necessary to remove the eccentricity from the measurement data. The installation eccentricity is represented in the sensor readings as a sine wave (first harmonic) with a period of one rotation. The standard method for eliminating installation eccentricity error is the frequency domain separation method. The amplitude and phase of this first harmonic are extracted through Fourier transform, and then subtracted from the original signal to obtain the clean error data after eccentricity removal. The data processing method at section B of the cylinder is exactly the same as that at section A.

[0121] The data analysis and display module calculates purity error data. The formula is as follows:

[0122]

[0123] in, Represents the overall offset of the data; The first harmonic component representing the X-direction; The first harmonic component representing the Y direction; Represents the original measurement data. This represents the actual number of revolutions that spindle 1 made during the measurement process. This represents the total number of samples or the total number of data points in the measurement data. Representing the One data point;

[0124] The center of section A is determined using the least squares method. , and the center position of section B , Calculate the difference in the coordinates of the center of the circle. , Then calculate the swing angle error. (Unit: arcsecond)

[0125] as follows:

[0126]

[0127] The radial rotation error of sections A and B is displayed in polar coordinates, while the angular error is displayed in three dimensions. The corresponding error values ​​can be directly displayed in the image. Figure 17 , Figure 18 As shown.

[0128] The two sensors of the measuring device 2 are aligned with the apex of the cylindrical profile of the standard bar 3, and synchronous measurements are performed at the two cross-sections to obtain radial fluctuation data at the two cross-sections. This radial fluctuation data is then processed and analyzed based on the center distance between the two sensors. The swing angle error is obtained.

[0129] Example:

[0130] like Figures 1-16 As shown in the figure, this embodiment describes a method for detecting the rotational error of an ultra-precision high-speed spindle, the method comprising the following steps:

[0131] S1: Precise alignment: Install the standard bar 3 on the machine tool spindle chuck, use an inductive micrometer or other high-precision gauge to calibrate the eccentricity of the standard bar 3, adjust the position of the standard bar 3 for precise alignment, so that the axis of the standard bar 3 coincides with the rotation axis of the spindle 1.

[0132] S2: Measuring device assembly: First, assemble two measuring units to form a structure as shown in the figure. Figure 2 As shown in the diagram, adjust the installation positions of the two sensors so that their front ends are on the same plane, and tighten the sensors by rotating the fastening screws; then fix the two measuring units onto the electric displacement stage 5 with screws.

[0133] S3: Install the measuring device: Place the assembled measuring device 2 on the Z-axis support plate 4, ensuring that both sensors are within the range corresponding to the standard bar 3. Secure the measuring device 2 to the Z-axis support plate 4 using T-nuts and screws. Figure 10 , Figure 11 As shown (position I).

[0134] S4: Connect the sensors: Connect the signal transmission lines of the two sensors to the sensor controller, turn on the sensor controller, and record the sensor data.

[0135] S5: Preliminary adjustment: Drive the electric displacement stage 5 to move in the vertical direction so that the sensor in the measuring device 2 is initially aligned with the contour vertex of the standard rod 3; drive the X-axis 35 to move the standard rod 3 in the X direction to approach the measuring device 2. When the sensor controller shows a reading, it means that the standard rod 3 is within the effective measurement range of the sensor. Adjust until the standard rod 3 is within the effective range of the two sensors respectively, and then stop.

[0136] S6: Precision Adjustment: Adjust the positions of the two sensors sequentially, designating the sensor at the front as sensor B8 and the sensor at the rear as sensor A36; the adjustment process is as follows:

[0137] S61: Rotate the Y-direction micro-motion push rod 28 of the Y-direction micro-motion adjustment table 13 so that the sensor moves up and down with the micro-motion adjustment table. As the distance between the sensor and the standard rod 3 changes, the reading in the sensor controller also changes. The position of the apex of the profile of the standard rod 3 can be determined by the up and down movement of the sensor, and the sensor is adjusted to align with this position.

[0138] S62: Rotate the X-direction micro-motion push rod 18 of the X-direction micro-motion adjustment stage 12, causing the sensor to move left and right with the micro-motion adjustment stage. Observe the reading in the sensor controller to ensure that the standard rod 3 is within the optimal measurement range of the sensor (approximately half the effective range of the sensor). Figure 10 , Figure 11 The indicated position (position I). Record the machine tool's Z-axis position information at this time, denoted as . .

[0139] S7: Calibrate the center distance between the two sensors The details are as follows:

[0140] S71: Drives the Z-axis 37 to move, carrying the measuring device 2 backward slowly and uniformly via the Z-axis guide rail. When it reaches the... Figure 12 , Figure 13 At the position shown (position II), that is, when the standard rod 3 is just outside the measurement range of the sensor B8, the Z-axis position at this time is denoted as... ;

[0141] S72: Continue driving the Z-axis 37 to move, until it reaches... Figure 14 , Figure 15 At the position shown (position III), that is, when the standard rod 3 is just outside the measurement range of the sensor A36, the Z-axis position 37 at this time is denoted as The center distance between the two sensors is then... .

[0142] S8: Measuring device reset: Drive Z-axis 37 to... Figure 10 , Figure 11 The position shown (position I), i.e., position Z0, is for preparation of measurement.

[0143] S9: Rotational Error Measurement: After confirming normal data transmission, drive spindle 1 to rotate at the target speed at high speed, trigger the data acquisition button, and simultaneously acquire data from the machine tool's X-axis 35, Z-axis 37, spindle 1, and the two sensors. After acquiring sufficient data, trigger the stop acquisition button, store the acquired data, and stop spindle 1. The measurement is complete. The data acquisition button and the stop acquisition button are located on the machine tool control interface.

[0144] S10: Data Processing: Use MATLAB or other data processing software to process the data, extract valid data, delete singular points, and use the frequency domain separation method to eliminate the influence of the installation eccentricity of the standard rod 3 on the measurement results.

[0145] S11: Measurement Results Display: Plot the radial errors at sections A and B in polar coordinates. Based on the radial errors of these two sections and the spacing... Calculate the swing angle error; where: sections A and B are the radial sections of the standard rod 3 corresponding to sensor A36 and sensor B8, respectively.

[0146] S12: Disassembling the measuring device: Remove the standard rod 3 and the measuring device 2 from the ultra-precision machine tool in sequence, remove the sensor from the measuring unit, and place it in a special packaging box to prevent damage.

Claims

1. A device for detecting the rotational error of an ultra-precision high-speed spindle, characterized in that: The system includes a measuring device (2) and a standard bar (3); the standard bar (3) is attached to the end of the spindle (1) of the ultra-precision machine tool, and the rotation axis of the standard bar (3) coincides with the rotation axis of the spindle (1); the Z-axis support plate (4) is detachably and fixedly installed on the Z-axis guide rail of the ultra-precision machine tool, and a T-slot is opened on the Z-axis support plate (4) along the Z-axis guide rail direction. When the measuring device (2) is initially installed on the Z-axis support plate (4), the measuring device (2) can slide along the T-slot; when the measuring device (2) reaches the appropriate position, the measuring device (2) is detachably and fixedly connected to the Z-axis support plate (4); the two sensors of the measuring device (2) are used to measure the rotation error at two different sections of the standard bar (3); The two sensor signal output terminals of the measuring device (2) are respectively connected to the signal input terminal of the sensor controller. The signal output terminal of the sensor controller and the signal output terminals of the spindle (1), Z-axis (37) and X-axis (35) of the ultra-precision machine tool are respectively connected to the signal input terminal of the data acquisition module integrated in the ultra-precision machine tool control system. The signal output terminal of the data acquisition module is connected to the signal input terminal of the data analysis and display module.

2. The detection device according to claim 1, characterized in that: The sensor is used to measure the standard rod (3) in real time and transmit the measurement data to the sensor controller. The sensor controller is used to convert the sensor's measurement signals into analog signals and transmit the analog signals to the data acquisition module; The data acquisition module is used for multi-channel collaborative data acquisition, including real-time measurement data from two sensors and the motion status and coordinate position of each motion axis of the ultra-precision machine tool; and transmits the acquired signals to the data analysis and display module. The data analysis and display module is used to process, analyze, and calculate the measurement data output by the data acquisition module, and to display the results of the rotation error graphically.

3. The detection device according to claim 1, characterized in that: The measuring device (2) includes an electric displacement stage (5), a measuring unit connecting plate (6), and two measuring units with the same structure; the two measuring units are arranged in a mirror image and are respectively installed on the front and rear sides of the measuring unit connecting plate (6), and the measuring unit connecting plate (6) is fixedly installed on the electric displacement stage (5).

4. The detection device according to claim 3, characterized in that: The measuring unit connecting plate (6) has a boss (7) in the middle to achieve positioning of the two measuring units.

5. The detection device according to claim 3, characterized in that: Each of the measurement units includes a sensor, a sensor support (9), a micro-adjustment stage connecting plate (10), a micro-adjustment stage fixing frame (11), and two micro-adjustment stages, namely an X-direction micro-adjustment stage (12) and a Y-direction micro-adjustment stage (13); the sensor is mounted on the sensor support (9), the sensor support (9) is detachably and fixedly connected to the micro-adjustment stage connecting plate (10), the micro-adjustment stage connecting plate (10) is detachably and fixedly connected to the X-direction micro-adjustment stage (12), the X-direction micro-adjustment stage (12) is detachably and fixedly connected to the Y-direction micro-adjustment stage (13), the Y-direction micro-adjustment stage (13) is detachably and fixedly connected to the micro-adjustment stage fixing frame (11), and the micro-adjustment stage fixing frame (11) is detachably and fixedly connected to the measurement unit connecting plate (6).

6. The detection device according to claim 5, characterized in that: The X-direction micro-motion adjustment table (12) includes an X-direction moving platform (14), an X-direction fixed platform (15), an X-direction locking plate (16), an X-direction moving support frame (17), an X-direction micro-motion push rod (18), an X-direction push rod fixing frame (19), and an X-direction tension spring (20). The X-direction moving platform (14) is detachably and fixedly connected to the micro-motion adjustment table connecting plate (10). The X-direction moving platform (14) is slidably connected to the X-direction fixed platform (15). The upper end face of the X-direction moving platform (14) is detachably and fixedly connected to the X-direction moving support frame (17). The X-direction micro-motion push rod (18) is installed on the X-direction push rod fixing frame (19). The X-direction push rod fixing frame (19) is detachably and fixedly connected to the upper end face of the X-direction fixed platform (15). The front end of the X-direction micro-motion push rod (18) abuts against the X-direction moving support frame (17). Two X-direction sliders are provided on the X-direction fixed platform (15). An X-direction stretching spring is provided in the X-direction long groove formed between the two X-direction sliders. Spring (20), one end of the X-direction tension spring (20) is fixedly connected to fixing screw three (38), and the other end is fixedly connected to fixing screw one (21). Fixing screw three (38) is fixed in the X-direction long groove, and fixing screw one (21) is fixed on the X-direction moving platform (14). X-direction locking plate (16) is set on the lower side of X-direction moving platform (14) and X-direction fixed platform (15). X-direction locking plate (16) is detachably fixedly connected to X-direction fixed platform (15). X-direction locking plate (16) is provided with X-direction long hole (22). Locking screw one (23) slides through X-direction long hole (22) and is fastened to threaded hole one opened on the lower side of X-direction moving platform (14).

7. The detection device according to claim 6, characterized in that: The Y-direction micro-motion adjustment table (13) includes a Y-direction moving platform (24), a Y-direction fixed platform (25), a Y-direction locking plate (26), a Y-direction moving support frame (27), a Y-direction micro-motion push rod (28), a Y-direction push rod fixing frame (29), and a Y-direction tension spring (30); The Y-direction moving platform (24) is detachably and fixedly connected to the X-direction fixed platform (15). The Y-direction moving platform (24) is slidably connected to the Y-direction fixed platform (25). A Y-direction moving support frame (27) is detachably and fixedly installed on the right side of the Y-direction moving platform (24). A Y-direction micro-motion push rod (28) is fixedly installed on the Y-direction push rod fixing frame (29). The Y-direction push rod fixing frame (29) is detachably and fixedly installed on the right side of the Y-direction fixed platform (25). The front end of the Y-direction micro-motion push rod (28) abuts against the Y-direction moving support frame (27). Two Y-direction sliders are provided on the Y-direction fixed platform (25). A Y-direction tension spring (30) is provided in the Y-direction long groove formed between the two Y-direction sliders. One end of the Y-direction tension spring (30) is fixed to the fixing screw (39). The other end is fixedly connected to the fixing screw two (31), the fixing screw four (39) is fixed in the long groove in the Y direction, and the fixing screw two (31) is fixed on the moving platform (24) in the Y direction; the locking plate (26) in the Y direction is set on the left side of the moving platform (24) in the Y direction and the fixing platform (25) in the Y direction, the locking plate (26) in the Y direction is detachably fixedly connected to the fixing platform (25), the locking plate (26) in the Y direction is provided with a long hole (32) in the Y direction, the locking screw two (33) slides through the long hole (32) in the Y direction and is fastened to the threaded hole two opened on the left side of the moving platform (24) in the Y direction, the fixing platform (25) in the Y direction is detachably fixedly connected to the micro-adjustment stage fixing frame (11), and the left end of the micro-adjustment stage fixing frame (11) is detachably fixedly connected to the measuring unit connecting plate (6).

8. The detection device according to claim 5, characterized in that: Both sensors are white light confocal displacement sensors.

9. The detection device according to claim 5, characterized in that: The sensor support (9) has a slot (34) in the middle of one side. The sensor is placed in the slot (34) and clamped by fastening screws and material deformation.

10. A method for detecting the rotational error of an ultra-precision high-speed spindle, characterized in that: The method is implemented based on the detection device described in any one of claims 3-9, and the method includes the following steps: S1: Tight self-alignment: Install the standard bar (3) on the machine tool spindle chuck and perform precision self-alignment so that the axis of the standard bar (3) coincides with the rotation axis of the spindle (1); S2: Assembly of measuring device: First, assemble two measuring units, adjust the installation position of the two sensors so that the front ends of the two sensors are on the same plane, and tighten the sensors; then, detachably and fix the two measuring units on the electric displacement stage (5); S3: Install the measuring device: Place the assembled measuring device (2) on the Z-axis support plate (4), ensuring that both sensors are within the range corresponding to the standard bar (3), and install the measuring device on the Z-axis support plate (4); S4: Connect the sensors: Connect the signal transmission lines of the two sensors to the sensor controller, turn on the sensor controller, and record the sensor data; S5: Preliminary adjustment: Drive the electric displacement stage (5) to move vertically so that the sensor is initially aligned with the contour vertex of the standard bar (3); drive the X-axis (35) to move the standard bar (3) along the X direction to approach the measuring device (2). When the sensor controller shows a reading, it means that the standard bar (3) is within the effective measurement range of the two sensors. Adjust the standard bar (3) to be within the effective range of the two sensors respectively. S6: Precision Adjustment: Adjust the positions of the two sensors in sequence, designating the sensor at the front as sensor B (8) and the sensor at the rear as sensor A (36); the adjustment process is as follows: S61: Rotate the Y-direction micro-motion push rod (28) of the Y-direction micro-motion adjustment table (13) so that the sensor moves up and down with the micro-motion adjustment table. Since the distance between the sensor and the standard rod (3) changes, the reading in the sensor controller also changes. The position of the top of the profile of the standard rod (3) is determined by the up and down movement of the sensor, and the sensor is adjusted to align with this position. S62: Rotate the X-direction micro-motion push rod (18) of the X-direction micro-motion adjustment table (12) to make the sensor move left and right with the micro-motion adjustment table. Observe the reading in the sensor controller to make the standard rod (3) be in the optimal measurement range of the sensor. Record the Z-axis position information of the ultra-precision machine tool at this time, and record it as . ; S7: Calibrate the center distance between the two sensors : S71: Drive the Z-axis (37) to move, and move the measuring device (2) backward at a constant speed through the Z-axis guide rail. When it moves to a position where the standard bar (3) is just outside the measurement range of the sensor B (8), record the position of the Z-axis (37) at this time as S71. ; S72: Continue driving the Z-axis (37) to move. When it moves to a position where the standard bar (3) is just outside the measurement range of sensor A (36), record the position of the Z-axis (37) at this time as... The center distance between the two sensors is then... ; S8: Measuring device reset: Drive Z-axis (37) to run to Location, in preparation for measurement; S9: Rotational error measurement: After confirming that the data transmission status is normal, drive the spindle (1) to rotate at high speed at the target speed, trigger the data acquisition button on the machine tool control interface, and simultaneously collect data from the machine tool X-axis (35), Z-axis (37), spindle (1) and two sensors. After collecting the data, trigger the stop acquisition button on the machine tool control interface and store the collected data. The spindle (1) stops rotating, and the measurement is completed. S10: Data processing: Data processing software is used to process data, extract valid data, delete singular points, and use frequency domain separation method to eliminate the influence of standard bar (3) installation eccentricity on measurement results. S11: Measurement Results Display: Plot the radial errors at sections A and B in polar coordinates. Based on the radial errors of these two sections and the spacing... Calculate the swing angle error; where: sections A and B are the radial section positions of the standard rod (3) corresponding to sensor A (36) and sensor B (8), respectively.

Images