A liftable adsorption mechanism for a film tearing machine

Abstract

The application discloses a liftable adsorption mechanism for a film tearing machine, which comprises a first platform, a pressing piece, a second platform, a suction cup, a transmission component, a motor, an eccentric wheel type rolling wheel, a detachable inclined block and a pneumatic pressing piece; a fixed support plate, a fixed seat and a lifting fixed end are fixed on the first platform; a transmission shaft penetrates through the fixed seat and is connected with the motor and the transmission component; the second platform is movably connected with the lifting fixed end through a lifting free end; a rolling wheel is arranged at the bottom and matched with the inclined block of the transmission component; the suction cup is arranged on the second platform; the pneumatic drive controls the pressing piece through a poking piece, and the elastic reset is realized in cooperation with a spring; the inclined block is detachable and replaceable; the rolling wheel can be provided with an eccentric wheel structure, and the eccentric distance of the rolling wheel can be flexibly adjusted through adjusting bolts. Through the modular layout, the maintenance is simplified, the product of various specifications and thicknesses can be adapted, the up-down bidirectional fixing structure improves the film tearing stability, and the pain points of the poor adaptability, the low precision and the complicated operation of the traditional mechanism are effectively solved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and more specifically to a liftable adsorption mechanism for a film peeling machine. Background Technology

[0002] Currently, most film-peeling machines on the market use a fixed-height adsorption platform combined with a pressing component. However, this type of mechanism has many limitations in practical applications. On the one hand, semiconductor products of different models and specifications have varying thicknesses, and a fixed-height adsorption platform cannot achieve a tight fit with the bottom of various products, resulting in insufficient adsorption force or uneven force distribution. This can easily lead to product displacement or detachment, affecting the film-peeling accuracy and even causing product damage. On the other hand, the lifting and adjusting mechanisms of existing mechanisms mostly rely on a single drive method, which has poor stability during transmission and makes it difficult to precisely control the lifting stroke, failing to meet the needs of precision products for fine-tuning height during film peeling. At the same time, the reset response speed of the pressing component is slow, and the pressing pressure adjustment is not flexible enough, making it difficult to adapt to products with different hardness and materials. Excessive pressing can easily cause product deformation, or insufficient pressing can fail to guarantee stability during film peeling. Furthermore, the transmission components and lifting structure of traditional film-peeling machines have low compatibility, making them prone to jamming and misalignment during operation. This not only reduces film-peeling efficiency but also affects the lifespan of the mechanism due to mechanical wear. For processing products of varying thicknesses, existing mechanisms often require overall adjustment or replacement of core components, resulting in cumbersome operation and high maintenance costs, making them unsuitable for the multi-variety, small-batch processing modes of modern production. Therefore, developing a film-peeling machine adsorption mechanism that enables precise lifting adjustment, stable and reliable adsorption, strong adaptability, and convenient operation is a key requirement for addressing current technical pain points and improving the quality and efficiency of precision product film-peeling processing. Summary of the Invention

[0003] To address the aforementioned problems, this invention provides a liftable adsorption mechanism for a film-peeling machine, characterized in that it includes a first platform, on which a set of first support plates, a set of second support plates, a first fixed seat, a second fixed seat, a lifting fixed end, and a kit are fixedly disposed. A rotatable transmission shaft is provided through the first fixed seat and the second fixed seat. One end of the transmission shaft is connected to a motor, and the transmission shaft is slidably connected to a transmission component. The transmission component includes a first moving part, an inclined block, and a second moving part. The first support plate is fixedly installed on both sides of the first platform along its long side. A set of pneumatic drives is provided on the first support plate. The pneumatic drives are connected to both ends of the actuating member. The actuating member is connected to the pressing member. One end of the second spring is connected to the actuating member. The other end of the second spring is connected to the spring fixing rod fixedly installed on the first support plate. The pressing member is movably connected to the first support plate through a rotating shaft. The second support plate is fixedly mounted on the first platform along the inner side of the first support plate by a kit. Each of the second support plates is provided with two fixing rods. The second support plates are connected by connectors. The second support plate is provided with a slot, which supports the product composed of a base surface and a back plate. The first platform has a transmission rail and four lifting fixed ends fixed on its bottom surface. The lifting fixed ends are movably connected to the lifting free ends. The lifting free ends are connected to one end of a first spring. The other end of the first spring is connected to a fixed rod. The lifting free ends are fixedly set at the four corners of the second platform. The second platform is provided with suction cups. The bottom of the second platform is provided with rolling wheels. The position of the rolling wheels is adapted to the position of the inclined blocks.

[0004] As a further embodiment of the present invention, the pressing component, the pneumatic drive, the spring fixing rod, the actuating component, and the second spring cooperate with each other. The pneumatic drive controls the actuating component to control the pressing component, presses down and fixes the product, and when the pneumatic drive is turned off, the pressing component is lifted by the rebound action of the second spring.

[0005] As a further embodiment of the present invention, the motor drives the transmission component to move along the trajectory of the transmission shaft, the first moving part cooperates with the first limit, the second moving part cooperates with the second limit, and the transmission component completes the movement within the limiting range of the first limit and the second limit.

[0006] As a further embodiment of the present invention, the movement of the transmission component drives the movement of the inclined block. The inclined block moves to the right, causing the rolling wheel to lift the second platform. The second platform is reset under the action of the first spring. The inclined block moves to the left, causing the rolling wheel to lower the second platform.

[0007] As a further aspect of the present invention, the inclined block can be detached and replaced with ramps of different angles to adapt to the processing requirements of products with different thicknesses.

[0008] As a further embodiment of the present invention, the pressing component cooperates with the card slot and the suction cup. The card slot supports the product base surface, the pressing component presses the product, and the lifting and lowering adjustment of the suction cup is used to adhere to the back plate of the semiconductor product, ensuring the stability of the product film removal process.

[0009] As a further aspect of the present invention, the transmission component, the transmission shaft, and the transmission track are coordinated, and the transmission track is a linear guide rail structure to ensure the straightness and stability of the transmission component during its movement.

[0010] As a further embodiment of the present invention, the rolling wheel is an eccentric wheel, and the eccentricity can be adjusted within a range of 0-5mm by adjusting the adjusting bolt, so as to achieve fine compensation of the lifting stroke and adapt to the processing requirements of products with different thicknesses.

[0011] As a further embodiment of the present invention, the base surface and the back plate form products of different thicknesses, the thickness of the base surface remains constant, while the thickness of the back plate varies, and the portion of the base surface that protrudes beyond the width of the back plate rests on the slot.

[0012] The beneficial effects of this invention are: This invention provides a liftable adsorption mechanism for a film-peeling machine. Through the cooperation of a pressing component, a pneumatic drive, a spring-loaded fixing rod, a toggle component, and a second spring, the pressing component is pressed down and reset. This, combined with a suction cup, adsorbs the product backplate, achieving synergistic pressing and adsorption to improve product processing stability. The lifting and lowering of the suction cup is accomplished through the cooperation of a transmission component, rolling wheels, a second platform, and the suction cup. The transmission component moves within the limiting range of a first and second limit. The inclined block can be disassembled and replaced with different angles according to the product thickness requirements. The transmission component, transmission shaft, and transmission track work together. The transmission track is a linear guide rail structure to ensure the straightness and stability of the transmission component during movement. This invention solves the technical pain point of poor adaptability through a combination design of a detachable inclined block adaptable to products of different thicknesses and an eccentric rolling wheel for refined compensation. Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings are briefly described. However, the drawings do not constitute any limitation on the present invention. For those skilled in the art, other drawings can be obtained based on the following drawings without creative effort.

[0014] Figure 1 This is a perspective view of the present invention; Figure 2 This is a schematic diagram of the working components of the pressing element of the present invention; Figure 3 This is a schematic diagram of the internal working components of the present invention; Figure 4 This is a front view of the internal working components of the present invention; Figure 5 This is a schematic diagram of the back of the product of the present invention; Figure 6 These are schematic diagrams of products of different thicknesses according to the present invention; Explanation of reference numerals in the attached figures: 1. First platform; 2. Pressing component; 3. Second platform; 4. Lifting and fixing end; 5. Transmission component; 6. First fixed seat; 7. Second fixed seat; 8. First moving component; 9. Inclined block; 10. Second moving component; 11. Motor; 12. First limit; 13. Second limit; 14. First spring; 15. Transmission shaft; 16. First support plate; 17. Transmission rail; 18. Rolling wheel; 19. Lifting and free end; 20. Suction cup; 21. Pneumatic drive; 22. Spring fixing rod; 23. Actuating component; 24. Slot; 25. Second spring; 26. Second support plate; 27. Connecting component; 28. Kit; 29. ​​Fixing rod; 30. Rotating shaft; 31. Base surface; 32. Back plate. Detailed Implementation

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0016] like Figure 1-5 As shown, a liftable adsorption mechanism for a film-tearing machine is characterized by comprising a first platform 1, on which a set of first support plates 16, a set of second support plates 26, a first fixed seat 6, a second fixed seat 7, a lifting fixed end 4, and a kit 28 are fixedly disposed. A rotatable transmission shaft 15 is provided through the first fixed seat 6 and the second fixed seat 7. One end of the transmission shaft 15 is connected to a motor 11. The transmission shaft 15 is slidably connected to a transmission component 5. The transmission component 5 includes a first moving part 8, an inclined block 9, and a second moving part 10. The first support plate 16 is fixedly disposed on both sides of the first platform 1 along the long side direction. A set of pneumatic drives 21 is disposed on the first support plate 16. The pneumatic drives 21 are connected to both ends of the actuating member 23. The actuating member 23 is connected to the pressing member 2. One end of the second spring 25 is connected to the actuating member 23. The other end of the second spring 25 is connected to the spring fixing rod 22 fixedly disposed on the first support plate 16. The pressing member 2 is movably connected to the first support plate 16 through the rotating shaft 30. The second support plate 26 is fixedly mounted on the first platform 1 along the inner side of the first support plate 16 by the kit 28. Each of the second support plates 26 is provided with two fixing rods 29. The second support plates 26 are connected by connectors 27. The second support plate 26 is provided with a slot 24, which supports the product composed of the base surface 31 and the back plate 32. The bottom surface of the first platform 1 is fixedly provided with a transmission rail 17 and four lifting fixed ends 4. The lifting fixed ends 4 are movably connected to the lifting free ends 19. The lifting free ends 19 are connected to one end of the first spring 14. The other end of the first spring 14 is connected to the fixed rod 29. The lifting free ends 19 are fixedly set at the four corners of the second platform 3. The second platform 3 is provided with suction cups 20. The bottom of the second platform 3 is provided with rolling wheels 18. The position of the rolling wheels 18 is adapted to the position of the inclined blocks 9.

[0017] The pressing component 2, pneumatic drive 21, spring fixing rod 22, actuating component 23, and second spring 25 cooperate with each other. The pneumatic drive 21 controls the actuating component 23 to control the pressing component 2, pressing down and fixing the product. When the pneumatic drive 21 is turned off, the pressing component 2 is raised under the rebound action of the second spring 25.

[0018] The motor 11 drives the transmission component 5 to move along the trajectory of the transmission shaft 15. The first moving part 8 cooperates with the first limit 12, and the second moving part 10 cooperates with the second limit 13. The transmission component 5 completes its movement within the limiting range of the first limit 12 and the second limit 13.

[0019] The movement of the transmission component 5 drives the movement of the inclined block 9. The inclined block 9 moves to the right, causing the rolling wheel 18 to lift the second platform 3. The second platform 3 is reset under the action of the first spring 14. The inclined block 9 moves to the left, causing the rolling wheel 18 to lower the second platform 3.

[0020] The inclined block 9 can be detached and replaced with slopes of different angles to adapt to the processing requirements of products with different thicknesses; the pressing component 2 cooperates with the slot 24 and the suction cup 20. The slot 24 supports the product base surface 31, the pressing component 2 presses the product, and the lifting and lowering adjustment of the suction cup 20 is in contact with the back plate 32 of the semiconductor product to ensure the stability of the product film removal process.

[0021] The transmission component 5, the transmission shaft 15, and the transmission track 17 cooperate with each other. The transmission track 17 is a linear guide rail structure to ensure the straightness and stability of the transmission component 5 during its movement.

[0022] Roller 18 is an eccentric wheel, and the eccentricity can be adjusted from 0 to 5 mm by adjusting the bolt, so as to achieve fine compensation of the lifting stroke and adapt to the processing requirements of products with different thicknesses.

[0023] The base surface 31 and the back plate 32 form products with different thicknesses. The thickness of the base surface 31 remains constant, while the thickness of the back plate 32 varies. The portion of the base surface 31 that protrudes beyond the width of the back plate 32 rests on the slot 24. Working principle:

[0024] Lifting drive trigger: Start motor 11, the motor drives transmission shaft 15 to rotate, which in turn drives transmission component 5 on transmission shaft to move along the trajectory of transmission track 17. During transmission, the first moving component 8 cooperates with the first limit 12, and the second moving component 10 cooperates with the second limit 13 to achieve precise positioning of the starting position of transmission component 5 and limit the movement stroke, so as to avoid movement exceeding the limit. Lifting and lowering actions: When the transmission component 5 moves, it synchronously drives the inclined block 9 to move horizontally. When the inclined block 9 moves to the right, its slope surface contacts the rolling wheel 18 at the bottom of the second platform 3 and generates an upward supporting force, pushing the second platform 3 to rise along the movable connection direction between the lifting fixed end 4 and the lifting free end 19, synchronously driving the suction cup 20 to rise; when the inclined block 9 moves to the left... When moving, the supporting force of the ramp surface on the rolling wheel 18 gradually disappears, the second platform 3 descends under the action of the first spring 14, and the suction cup 20 moves down accordingly. Adaptive Adjustment: For semiconductor products of different thicknesses, the lifting stroke can be adjusted in two ways: First, the inclined block 9 can be disassembled and replaced with a ramp structure of different angles to change the lifting height under the same horizontal displacement; second, the eccentricity of the eccentric wheel of the rolling wheel 18 can be adjusted within the range of 0-5mm by adjusting the bolts to achieve fine compensation of the lifting stroke. The dual adjustment ensures that the suction cup 20 fits precisely with the bottom of the product. Press control: After the suction cup 20 completes the height adaptation, the pneumatic drive 21 is activated. The pneumatic drive outputs power to drive the toggle 23 to move, which in turn pushes the pressing part 2 downward toward the product until the pressing part 2 is in close contact with the top of the product, thus fixing the top of the product. Elastic reset: After the film tearing operation is completed, the pneumatic drive 21 is turned off, and the actuating part 23 returns to its initial position under the elastic reset force of the second spring 25. The pressing part 2 resets synchronously with the actuating part, releasing the pressing constraint on the product and facilitating subsequent product handling. Adsorption and fixation: The suction cup 20 generates negative pressure adsorption force on the product, tightly adhering and fixing the bottom of the product. It forms a "two-way fixation" structure with the top of the pressing part 2, which prevents the product from shifting or deforming during the film removal process. The adsorption force can be adjusted according to the product material and thickness. Stable film-tearing support: The transmission track 17 adopts a linear guide rail structure to ensure the straightness and stability of the movement of the transmission component 5, thereby ensuring that the lifting and lowering action of the second platform 3 and the suction cup 20 is smooth and without shaking; at the same time, the second support plates 26 are connected by connectors 27, which enhances the overall structural strength of the mechanism and provides a stable support foundation for the film-tearing process, ensuring that the film-tearing action is completed accurately and efficiently.

[0025] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A liftable adsorption mechanism for a film-peeling machine, characterized in that: The system includes a first platform (1), on which a set of first support plates (16), a set of second support plates (26), a first fixed seat (6), a second fixed seat (7), a lifting fixed end (4), and a kit (28) are fixedly installed. A rotatable transmission shaft (15) is provided through the first fixed seat (6) and the second fixed seat (7). One end of the transmission shaft (15) is connected to a motor (11), and the transmission shaft (15) is slidably connected to a transmission component (5). The transmission component (5) includes a first moving part (8), an inclined block (9), and a second moving part (10). The first support plate (16) is fixedly disposed on both sides of the first platform (1) along the long side direction. A set of pneumatic drives (21) is disposed on the first support plate (16). The pneumatic drives (21) are connected to both ends of the actuating member (23). The actuating member (23) is connected to the pressing member (2). One end of the second spring (25) is connected to the actuating member (23). The other end of the second spring (25) is connected to the spring fixing rod (22) fixedly disposed on the first support plate (16). The pressing member (2) is movably connected to the first support plate (16) through the rotating shaft (30). The second support plate (26) is fixedly mounted on the first platform (1) along the inner side of the first support plate (16) by a kit (28). Each of the second support plates (26) is provided with two fixing rods (29). The second support plates (26) are connected to each other by a connector (27). The second support plate (26) is provided with a slot (24), which supports the product composed of a base surface (31) and a back plate (32). The bottom surface of the first platform (1) is fixedly provided with a transmission rail (17) and four lifting fixed ends (4). The lifting fixed ends (4) are movably connected to the lifting free ends (19). The lifting free ends (19) are connected to one end of the first spring (14). The other end of the first spring (14) is connected to the fixed rod (29). The lifting free ends (19) are fixedly set at the four corners of the second platform (3). The second platform (3) is provided with suction cups (20). The bottom of the second platform (3) is provided with rolling wheels (18). The position of the rolling wheels (18) is adapted to the position of the inclined block (9).

2. The liftable adsorption mechanism for a film-tearing machine according to claim 1, characterized in that: The pressing component (2), pneumatic drive (21), spring fixing rod (22), actuating component (23), and second spring (25) cooperate with each other. The pneumatic drive (21) controls the actuating component (23) to control the pressing component (2) to press down and fix the product. When the pneumatic drive (21) is turned off, the pressing component (2) is lifted under the rebound action of the second spring (25).

3. The liftable adsorption mechanism for a film-tearing machine according to claim 1, characterized in that: The motor (11) drives the transmission component (5) to move along the trajectory of the transmission shaft (15). The first moving part (8) and the first limit (12) cooperate, and the second moving part (10) and the second limit (13) cooperate. The transmission component (5) completes the movement within the limiting range of the first limit (12) and the second limit (13).

4. The liftable adsorption mechanism for a film-tearing machine according to claim 3, characterized in that: The movement of the transmission component (5) drives the movement of the inclined block (9). The inclined block (9) moves to the right, driving the rolling wheel (18) to lift the second platform (3). The second platform (3) is reset under the action of the first spring (14). The inclined block (9) moves to the left, driving the rolling wheel (18) to lower the second platform (3).

5. The liftable adsorption mechanism for a film-tearing machine according to claim 4, characterized in that: The inclined block (9) can be disassembled and replaced with ramps of different angles to adapt to the processing requirements of products of different thicknesses.

6. The liftable adsorption mechanism for a film-tearing machine according to claim 2, characterized in that: The pressing component (2) cooperates with the slot (24) and the suction cup (20). The slot (24) supports the product base surface (31), the pressing component (2) presses the product, and the lifting adjustment of the suction cup (20) is aligned with the back plate (32) of the semiconductor product to ensure the stability of the product peeling process.

7. The liftable adsorption mechanism for a film-tearing machine according to claim 5, characterized in that: The transmission component (5), transmission shaft (15) and transmission track (17) cooperate with each other. The transmission track (17) is a linear guide rail structure to ensure the straightness and stability of the transmission component (5) during its movement.

8. A liftable adsorption mechanism for a film-tearing machine according to claim 4 or 5, characterized in that: The rolling wheel (18) is an eccentric wheel, and the eccentricity can be adjusted within a range of 0-5mm by adjusting the bolts to achieve fine compensation of the lifting stroke, so as to adapt to the processing requirements of products with different thicknesses.

9. The liftable adsorption mechanism for a film-tearing machine according to claim 1, characterized in that: The base surface (31) and the back plate (32) form products of different thicknesses. The thickness of the base surface (31) remains constant, while the thickness of the back plate (32) varies. The portion of the base surface (31) that protrudes beyond the width of the back plate (32) rests on the slot (24).

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