An extremely thin aluminum foil and a device and method for manufacturing the same

Abstract

The application relates to the technical field of material preparation, and provides an extremely thin aluminum foil and a preparation device and a preparation method thereof.The device comprises a high-vacuum cavity and an internal flattening module, a cooling module, an evaporation source module and a radio frequency ion source module in the high-vacuum cavity; the flattening module is used for forcibly flattening a flexible carrier; the cooling module is used for cooling; the evaporation source module provides aluminum vapor; and the radio frequency ion source module ionizes the aluminum vapor; the ionized aluminum vapor grows on the surface of the carrier to form the extremely thin aluminum foil.The method comprises the following steps: in the high-vacuum cavity, the flexible carrier is controlled to pass through the flattening module and the cooling module in sequence; the evaporation source module generates aluminum vapor, and the radio frequency ion source module ionizes the aluminum vapor; the ionized aluminum atoms reach the surface of the flexible carrier after passing through the cooling module, condense and grow to form an aluminum layer, and the extremely thin aluminum foil is separated and obtained.The extremely thin aluminum foil provided by the application is prepared by the method.The extremely thin aluminum foil with a thickness of about 3 microns prepared by the application has the advantages of high strength and high elongation.

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