Crystal growth furnace for LED sapphire epitaxial substrate

By designing an automated scraper system, the problem of low efficiency in cleaning waste in the crucible after sapphire crystal growth was solved, achieving automated and efficient cleaning, reducing manual operation, and improving production efficiency.

CN122428367APending Publication Date: 2026-07-21SHANDONG QIANYUAN SEMICON TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANDONG QIANYUAN SEMICON TECH CO LTD
Filing Date
2026-06-01
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

In existing technologies, cleaning the waste layer inside the crucible after sapphire crystal growth relies on manual operation, which is inefficient and labor-intensive.

Method used

A crystal growth furnace for LED sapphire epitaxial substrates was designed. It uses a steering motor, an electric telescopic rod and a geared motor to drive the lower and side scrapers to automatically enter the crucible for rotation and scraping. The furnace also automatically cleans up waste materials by generating impact vibrations through the striking column and wedge block.

Benefits of technology

It enables efficient cleaning of waste materials inside the crucible without manual entry into the furnace, improving cleaning efficiency, preventing the shovel from jamming, and enhancing waste cleaning capabilities.

✦ Generated by Eureka AI based on patent content.

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    Figure CN122428367A_ABST
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Abstract

The application belongs to the technical field of sapphire crystal processing, in particular to a crystal growth furnace for LED sapphire epitaxial substrates, which comprises an equipment base, a furnace body is installed at the top end of the equipment base, an electric heating wire is arranged in the furnace body, a crucible is installed in the furnace body, an electric telescopic rod is installed on one side of the top end of the equipment base, an output shaft end of the electric telescopic rod is installed with a steering motor, a rotating shaft end of the steering motor is fixed with a rotating arm, the other side of the rotating arm is fixed with a connecting frame, a reduction motor is installed in the connecting frame, the reduction motor is fixed with a connecting shaft, the connecting shaft is provided with an outer rotating shell, connecting arms are fixed on both sides of the outer rotating shell, and lower scrapers and side scrapers are arranged outside the connecting arms; through the cooperation of the steering motor, the electric telescopic rod and the reduction motor, the lower scrapers and the side scrapers can automatically enter the inside of the crucible and rotate to scrape, the knocking column simultaneously knocks to make the lower scrapers and the side scrapers automatically knock the waste, and manual entering of the furnace to knock and scrape is not needed.
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