Bionic piezoelectric gas micro-pump and control method thereof

Abstract

The application discloses a bionic piezoelectric gas micro-pump and a control method thereof. The bionic piezoelectric gas micro-pump comprises a cover plate, a bottom plate and a vibrating plate. The cover plate is provided with a first through hole and a first chamber. The first chamber is communicated with the outside through the first through hole. The bottom plate is provided with a second through hole, a second chamber and a third chamber. The third chamber is arranged towards a device to be cooled. The second chamber is communicated with the third chamber through the second through hole. The vibrating plate is arranged between the cover plate and the bottom plate. The first end of the vibrating plate is fixed, and the second end of the vibrating plate is suspended. The vibrating plate comprises a front wing and a rear wing. The vibrating plate guides airflow to flow into the first chamber from the first through hole. After flowing through the second chamber, the airflow flows into the third chamber from the second through hole to form a vortex jet flow to conduct convective cooling on the device to be cooled. The vibration parameters of the vibrating plate are determined based on the cooling requirement of the device to be cooled. The vibration efficiency of the vibrating plate is improved by the bionic front wing and rear wing. Unnecessary vibration energy consumption is reduced, and overall power consumption is reduced.

Description

Technical Field

[0001] This invention relates to the field of thermal management technology, and in particular to a biomimetic piezoelectric gas micropump and its control method. Background Technology

[0002] With technological advancements, electronic devices are becoming increasingly smaller, moving towards miniaturization and high integration. However, this also leads to a significant increase in heat flux density during operation, resulting in an exponential increase in power consumption per unit area. Traditional electronic devices often utilize forced convection heat transfer via rotating fans. To accommodate miniaturized electronic devices and avoid excessively large overall sizes, the rotating fans themselves need to be miniaturized. This miniaturization reduces the fan's weight, consequently decreasing its heat dissipation performance. Furthermore, rotating fans are noisier and experience mechanical wear over time, limiting their lifespan and potentially impacting the battery life of electronic products.

[0003] Piezoelectric pumps, due to their lack of rotating parts and simple structure, are increasingly being used for heat dissipation in microelectronic devices. However, existing piezoelectric pumps are prone to self-priming when the vibration excitation frequency is too high. This means that the airflow is blown out as soon as it is drawn into the chamber, or the jet is drawn back into the chamber as soon as it is blown out, significantly reducing heat dissipation efficiency. On the other hand, existing piezoelectric pumps are usually a single vibrating plate, which consumes a lot of energy due to continuous high-frequency vibration, and they cannot be continuously and dynamically controlled and adjusted according to the heat dissipation requirements of different heat sources under different operating conditions. Summary of the Invention

[0004] To address some or all of the problems in the prior art and improve heat dissipation efficiency, the first aspect of this invention provides a biomimetic piezoelectric gas micropump, comprising: A cover plate having a first through hole and a first chamber, wherein the first chamber communicates with the outside through the first through hole; A base plate is provided with a second through hole, a second chamber and a third chamber, wherein the third chamber is disposed facing the device to be cooled, and the second chamber is connected to the third chamber through the second through hole; A vibrating plate is disposed between the cover plate and the bottom plate, with its first end fixed and its second end suspended. The vibrating plate includes a front wing and a rear wing, which are configured to guide the airflow direction through vibration to form a vortex jet for convective heat dissipation of the device to be cooled. The vibration parameters of the vibrating plate are determined based on the heat dissipation requirements of the device to be cooled.

[0005] Furthermore, the first through hole is disposed on the side of the cover plate near the first end of the vibrating plate, the first through hole is arranged in an array, and the diameter of the first through hole decreases sequentially along the airflow direction.

[0006] Furthermore, a first flow-stopping plate is provided in the first chamber. The first flow-stopping plate is located downstream of the vibrating plate along the airflow direction, dividing the first chamber into two parts along the airflow direction, and there is a gap between the top of the first flow-stopping plate and the cover plate.

[0007] Furthermore, there is a gap between the front wing and the rear wing.

[0008] Furthermore, the length of the forewing is 50% to 90% of the length of the rear wing.

[0009] Furthermore, the biomimetic piezoelectric gas micropump also includes: A piezoelectric element is disposed on the surface of the vibrating element, and after receiving an excitation signal, it generates periodic contraction and expansion to drive the front wing and rear wing to vibrate. An electrode is disposed on the surface of the piezoelectric element and is used to provide a current or voltage excitation signal to the piezoelectric element.

[0010] Furthermore, the front wing and the rear wing are rectangular in shape, and the length of the rear wing is 1.2 to 2 times that of the front wing, and the length of the piezoelectric sheet in the rear wing portion is 1.2 to 2 times its length in the front wing portion.

[0011] Furthermore, the front wing and the rear wing are butterfly-shaped, and the length of the rear wing is 1.2 to 2 times that of the front wing. The rear wing and the front wing each include an independent piezoelectric sheet.

[0012] Furthermore, the vibrating plate also includes a middle wing, which is disposed between the front wing and the rear wing, and has gaps between itself and both the front wing and the rear wing.

[0013] Furthermore, a second flow stop is provided at the end of the vibrating plate, which divides the second chamber into two parts along the airflow direction, and there is a gap between the bottom of the second flow stop and the base plate.

[0014] Furthermore, the second through hole is disposed on the side of the base plate near the first end of the vibrating plate, the second through hole is arranged in an array, and the size of the second through hole decreases sequentially along the airflow direction.

[0015] Based on the aforementioned biomimetic piezoelectric gas micropump, a second aspect of the present invention provides a control method for the biomimetic piezoelectric gas micropump, comprising: Based on the power consumption and temperature of the device to be cooled, the vibration parameters of the vibrating plate are determined. The vibration of the vibrating plate is controlled based on the vibration parameters.

[0016] Furthermore, based on the power consumption and temperature of the device to be cooled, the vibration parameters of the vibrating plate are determined, including: The required vortex intensity is determined based on the power consumption and temperature of the device to be cooled. The vibration amplitude and frequency of the vibrating plate are determined based on the intensity of the cyclone vortex. The voltage amplitude, frequency, and phase of the excitation are determined based on the vibration frequency and amplitude.

[0017] This invention provides a biomimetic piezoelectric gas micropump and its control method. It employs a biomimetic vibrating plate and dynamically adjusts the frequency and phase of the current / voltage excitation signal input to the piezoelectric plate according to the heat dissipation requirements of different operating conditions of the actual heat source. This controls the generation of vortex jets of varying intensities by the vibrating front and rear wings. These vortex jets pass through jet holes to sweep the heat source or heat sink for convective heat dissipation, effectively reducing energy loss from vertical impact jets, significantly improving heat dissipation efficiency, and lowering overall power consumption. Simultaneously, the piezoelectric vibrating plate results in low noise, eliminates mechanical rotating parts, has a long service life, and low power consumption. Furthermore, the biomimetic piezoelectric gas micropump guides the airflow direction through mechanisms such as flow deflectors, ensuring that both the intake channel and the cooling jet channel are unidirectional. This ensures that cold air is continuously drawn into the pump and continuously directed towards the heat source or the heat sink connected to it. This improves intake efficiency, effectively avoids self-priming effects, and eliminates stagnant / dead flow zones, further contributing to improved heat dissipation efficiency. Attached Figure Description

[0018] To further illustrate the above and other advantages and features of the various embodiments of the present invention, a more specific description of the various embodiments of the present invention will be presented with reference to the accompanying drawings. It is to be understood that these drawings depict only typical embodiments of the invention and are therefore not intended to limit its scope. In the drawings, identical or corresponding parts will be indicated by identical or similar reference numerals for clarity.

[0019] Figure 1 This diagram illustrates the structure of a biomimetic piezoelectric gas micropump according to an embodiment of the present invention. Figure 2 A schematic diagram of the cover plate according to an embodiment of the present invention is shown; Figure 3 A schematic diagram of the structure of a vibrating plate according to an embodiment of the present invention is shown; Figure 4 This diagram illustrates the vibration of a vibrating plate according to an embodiment of the present invention. Figure 5 This diagram shows a structural schematic of a vibrating plate according to yet another embodiment of the present invention; Figure 6 A schematic diagram of the structure of the base plate according to an embodiment of the present invention is shown; Figure 7 A schematic diagram showing the airflow direction during the intake process of a biomimetic piezoelectric gas micropump according to an embodiment of the present invention is provided. Figure 8 A schematic diagram showing the airflow direction of a biomimetic piezoelectric gas micropump jet process according to an embodiment of the present invention is provided. Figure 9 This diagram illustrates the structure of a biomimetic piezoelectric gas micropump according to another embodiment of the present invention. Figure 10 The diagram shows a structural schematic of the cover plate of a biomimetic piezoelectric gas micropump according to another embodiment of the present invention. Detailed Implementation

[0020] In the following description, the invention is described with reference to various embodiments. However, those skilled in the art will recognize that the embodiments may be practiced without one or more specific details or with other alternatives and / or additional methods, materials, or components. In other instances, well-known structures, materials, or operations are not shown or described in detail so as not to obscure the inventive points of the invention. Similarly, for illustrative purposes, specific quantities, materials, and configurations are set forth to provide a comprehensive understanding of embodiments of the invention. However, the invention is not limited to these specific details. Furthermore, it should be understood that the embodiments shown in the drawings are illustrative representations and are not necessarily drawn to scale.

[0021] In this specification, references to "an embodiment" or "this embodiment" mean that a particular feature, structure, or characteristic described in connection with that embodiment is included in at least one embodiment of the invention. The phrase "in one embodiment" appearing throughout this specification does not necessarily refer to the same embodiment in all instances.

[0022] It should be noted that the embodiments of the present invention describe the method steps in a specific order; however, this is only for illustrating the specific embodiment and not for limiting the order of the steps. On the contrary, in different embodiments of the present invention, the order of the steps can be adjusted according to actual needs.

[0023] To reduce noise and improve heat dissipation efficiency in electronic products, this invention provides a biomimetic piezoelectric gas micropump. It utilizes biomimetic vibrating plates with front and rear wings to enhance vibration efficiency, thereby reducing unnecessary vibration energy consumption and overall power consumption. The vibrating plates are piezoelectrically driven; high-frequency piezoelectric vibration is noiseless, has no mechanical rotating parts, has a long service life, and low power consumption. Furthermore, the frequency and phase of the current / voltage excitation signal input to the piezoelectric plate can be dynamically adjusted according to the heat dissipation requirements of different heat sources, allowing the vibrating plate to generate vortex jets of varying intensities. These vortex jets also reduce energy loss from vertical impact jets, significantly improving heat dissipation efficiency and lowering overall power consumption. In addition, addressing the self-priming effect problem common in existing piezoelectric pumps, a unidirectional air intake and jet channel is created by incorporating flow-stopping plates, improving intake efficiency and eliminating airflow stagnation areas.

[0024] The technical solution of the present invention will be further described below with reference to the accompanying drawings of the embodiments.

[0025] Figure 1 A schematic diagram of a biomimetic piezoelectric gas micropump according to an embodiment of the present invention is shown. Figure 1 As shown, a biomimetic piezoelectric gas micropump includes a cover plate 101, a vibrating plate 102, and a base plate 103, wherein the vibrating plate 102 is disposed between the cover plate 101 and the base plate 103.

[0026] like Figure 1 As shown, the cover plate has a first through hole 111, and a first chamber 112 is provided inside it. The first chamber 112 communicates with the outside through the first through hole 111. Figure 1 As shown, the first through hole 111 is located on the cover plate 101 near the first end of the vibrating plate 102, i.e., on its fixed end side. The diameter of the first through hole 111 decreases sequentially along the airflow direction. The cover plate 101 and the vibrating plate 102 are bonded together at the surrounding fixed frame, forming a first chamber 112 between the cover plate 101 and the vibrating plate 102. Simultaneously, to effectively reduce backflow and suppress self-priming effect, in one embodiment of the present invention, a first flow-stopping plate 113 is provided in the first chamber 112. The first flow-stopping plate 113 is positioned downstream of the vibrating plate 102 along the airflow direction, dividing the first chamber 112 into two parts along the airflow direction, and a gap exists between the top of the first flow-stopping plate 113 and the cover plate 101. The vibrating plate can also be considered a flow-stopping plate to separate the air inlet chamber and the air outlet chamber. In one embodiment of the present invention, a third flow-stopping plate 127 may also be provided extending from the end of the vibrating plate. In one embodiment of the present invention, the lengths of the first flow stopper 113 and the third flow stopper 127 are 50 to 600 micrometers.

[0027] Figure 2 A schematic diagram of the cover plate according to an embodiment of the present invention is shown. Figure 2As shown, in one embodiment of the present invention, the first through-hole 111 is arranged in an array, comprising N rows and M columns, wherein the first through-holes in the same column are of the same size, and the diameter of the first through-holes in the same row decreases sequentially along the airflow direction. The values ​​of N and M are determined according to the required heat dissipation and can be any natural number, wherein the value of M is preferably 1 to 6. In one embodiment of the present invention, the first through-hole is a cylindrical straight through-hole, with the diameters of each row being 40 micrometers, 30 micrometers, 20 micrometers, and so on. However, it should be understood that the number and size of the first through-holes are not limited to the values ​​described above, but can be adjusted according to different heat dissipation requirements to adapt to different sizes of heat sinks or heat sources. In addition, in some other embodiments of the present invention, the first through-hole can also be an inverted trapezoidal or inverted conical hole, and the bottom diameter is 50% to 90% of the surface diameter, preferably 75%. In one embodiment of the present invention, the cover plate 101 is made of stainless steel sheet, titanium sheet, aluminum sheet, silicon, silicide, etc. These materials have high strength and high stability, which can ensure that they do not deform during processing. The processing depth is 5% to 95% of the total thickness, the processing technology is stable, and it can meet various structural designs.

[0028] Figure 3 A schematic diagram of the structure of a vibrating plate according to an embodiment of the present invention is shown. Figure 3 As shown, the vibrating plate includes a front wing 121, a rear wing 122, a fixed side frame 123, a fixed front frame 124, a fixed rear frame 125, and a fixed middle frame 126. The first ends of the front wing 121 and the rear wing 122 are fixedly connected to the fixed middle frame 126, while their second ends, opposite to the first ends, are suspended. Specifically, flow passage gaps are formed between the front wing 121 and the fixed front frame 124, the rear wing 122 and the fixed rear frame 125, and the front wing 121, rear wing 122 and the fixed side frame 123. The width of these flow passage gaps varies, ranging from 50 to 800 micrometers. A gap exists between the front wing 121 and the rear wing 122, ranging from 5 to 20 micrometers. In one embodiment of the invention, a middle wing may be added between the front wing 121 and the rear wing 122. The vibrating plate guides the airflow direction through vibration to form a vortex jet for convective heat dissipation of the device to be cooled. Its vibration parameters are determined based on the heat dissipation requirements of the device to be cooled. In one embodiment of the present invention, the vibrating plate 102 is made of stainless steel, titanium, aluminum, silicon, silicide, etc. These materials have high strength and high stability, which can ensure that they do not deform during processing. The processing depth is 5% to 95% of the total thickness, the processing technology is stable, and it can meet various structural designs.

[0029] As previously stated, in this invention, the vibrating plate is driven by piezoelectricity, such as... Figure 3As shown, a piezoelectric sheet 104 is disposed on the surface of the vibrating plate. Upon receiving an excitation signal, the piezoelectric sheet 104 periodically contracts and expands to drive the front wing 121 and rear wing 122 to vibrate. An electrode 105 is disposed on the surface of the piezoelectric sheet 104, which provides a current or voltage excitation signal to the piezoelectric sheet 104. In one embodiment of the invention, the electrode 105 is a flexible electrode, which has high conductivity and stability, can continuously input excitation signals, and is highly flexible and easy to assemble due to being made of a flexible material. In one embodiment of the invention, the piezoelectric sheet is made of PZT, AIScN, or other piezoelectric materials. The distance from the center of the piezoelectric sheet 104 to the fixed side frame 123 is 20% to 80% of the length from the fixed side frame 123 to the fixed middle frame 126. In one embodiment of the invention, the length of the piezoelectric sheet 104 is 40% to 80% of the length from the fixed front frame 124 to the fixed rear frame 125. Depending on the vibration requirements, the piezoelectric sheet can be one, two, or three pieces. For example, the forewing, middle wing, and rear wing can share one piezoelectric sheet, or the forewing, middle wing, and rear wing can each have an independent piezoelectric sheet.

[0030] As mentioned above, the vibration parameters of the vibrating plate are determined based on the heat dissipation requirements of the device to be cooled. Specifically, the frequency, amplitude, phase and other parameters of the excitation signal are determined based on the heat dissipation requirements. Under different current and voltage excitation frequencies, the vibrating plate can generate multiple modes of vibration, such as the 1st, 2nd, 3rd, 4th, 5th and 6th orders. Figure 4 A schematic diagram of the vibration of a vibrating plate according to an embodiment of the present invention is shown. Figure 4 As shown, the upward flapping angle of the vibrating plate is denoted as... The downward pouncing angle is recorded as The maximum distance for a lunge is recorded as The maximum distance of the dive is recorded as Then its maximum vibration angle The upward and downward angles can be the same or different. Under given structural conditions, the vibration frequency of the vibrating plate 102 can be controlled by adjusting the voltage amplitude, frequency, and phase of the excitation. and vibration phase Thus, its angular velocity can be controlled. To obtain optimal vibration conditions and reduce total energy consumption: .

[0031] At the same time, the vortex field generated by the vibration of the vibrating plate propels the forward force. Downward impact force All are related to the size of the vibrator: , , in, air density, The average velocity of the eddy current field. This represents the vorticity along the wingspan. This represents the vorticity along the vertical direction. Let be the vorticity along the forward direction. The center of the vibrating plate along the wingspan direction, The center of the vibrating wing is along the vertical direction. The vortex field propels it forward. Downward impact force The efficiency coefficients are as follows: , , in, , The surface area of ​​the vibrating plate. The forward driving force of the vortex field. Downward impact force The efficiency coefficient and the Strouhal number together determine the efficiency of the vortex flow field generated by the vibrating plate, and can be used as an optimization target to reduce losses. The Strouhal number is calculated according to the following formula: , in, The vibration amplitude of the vibrating plate. The vibration frequency of the vibrating plate is given. Based on this, it can be seen that, in addition to adjusting parameters such as the amplitude, phase, and frequency of the excitation voltage, heat dissipation performance can also be optimized by adjusting the size of the vibrating plate. In one embodiment of the present invention, the length of the front wing is 50% to 90% of the length of the rear wing. Consequently, the vortex generated by the rear wing is stronger than that generated by the front wing, forming a forward flow thrust. The rear airflow pushes the front airflow through the jet hole and out at high speed towards the outlet, thereby improving airflow efficiency and avoiding the formation of stagnant or dead flow zones where heat accumulates.

[0032] In one embodiment of the present invention, the vibrating plate adopts a rectangular wing, that is, the front wing and the rear wing are rectangular in shape, such as... Figure 3 As shown, the length of the rear wing is 1.2 to 2 times that of the front wing, and the length of the piezoelectric sheet in the rear wing portion is 1.2 to 2 times its length in the front wing portion. Therefore, the amplitude of the rear wing is greater than that of the front wing, and the vortex intensity generated by the rear wing is greater than that of the front wing. In one embodiment of the invention, a rectangular wing is used. The overall dimensions of the biomimetic piezoelectric gas micropump are 12mm x 6mm x 1.5mm, with a maximum gas flow rate of 2.4 slm, a maximum energy consumption of 200mW, and a maximum heat transfer coefficient of 400W / (m³). 2 K).

[0033] In one embodiment of the present invention, the vibrating plate adopts a butterfly-shaped wing, that is, the front wing and the rear wing are butterfly-shaped, such as... Figure 5 As shown, the length of the rear wing is 1.3 times that of the front wing, the amplitude of the rear wing is greater than that of the front wing, and the intensity of the vortex generated by the rear wing is greater than that of the front wing. Simultaneously, both the rear and front wings include independent piezoelectric plates, thus allowing for greater controllability and more efficient coordination of their vibrations. In one embodiment of the invention, a butterfly-shaped wing is used. The biomimetic piezoelectric gas micropump has overall dimensions of 10mm x 5mm x 1.8mm, a maximum gas flow rate of 2.8slm, a maximum energy consumption of 180mW, and a maximum heat transfer coefficient of 450W / (m³). 2 K).

[0034] Back Figure 1 ,like Figure 1 As shown, the base plate 103 has a second through hole 131, an interior of which a second chamber 132 is provided, and an exterior of which a third chamber 133 is provided. The third chamber 133 faces the device to be cooled, and the second chamber 132 communicates with the third chamber 133 through the second through hole 131. Figure 1 As shown, the second through hole 131 is located on the first end of the base plate 103 near the vibrating plate 102, that is, on the side of its fixed end, and the diameter of the second through hole 131 decreases sequentially along the airflow direction. Figure 6 A schematic diagram of the structure of the base plate according to an embodiment of the present invention is shown. Figure 6As shown, in one embodiment of the present invention, the second through-hole 131 is arranged in an array, comprising K rows and L columns, wherein the second through-holes in the same column are of the same size, and the diameter of the second through-holes in the same row decreases sequentially along the airflow direction. The values ​​of K and L are determined according to the required heat dissipation and can be any natural number, wherein the value of L is preferably 1 to 6. In one embodiment of the present invention, the second through-hole is a square hole, wherein the length of the largest second through-hole, that is, the second through-hole closest to the fixed rear frame 125, is 200 to 500 micrometers, and the other second through-holes are reduced along the airflow direction by a specified ratio, wherein the specified ratio is 50% to 90%, preferably 80%. The width of the second through-hole is 100 to 500 micrometers, preferably 300 micrometers, 270 micrometers, 240 micrometers, and so on. However, it should be understood that the number and size of the second through-holes are not limited to the values ​​described above, but can be adjusted according to different heat dissipation requirements to adapt to different sizes of heat sinks or heat sources. Furthermore, in other embodiments of the present invention, the plane of the second through hole can be a rectangular hole, a trapezoidal hole, an elliptical hole, a triangular hole, etc., and the vertical plane can be a rectangle, an inverted trapezoid, an inverted cone, etc., wider at the top and narrower at the bottom. In one embodiment of the present invention, the material of the base plate 103 is stainless steel sheet, titanium sheet, aluminum sheet, silicon, silicide, etc. These materials have high strength and high stability, ensuring that they do not deform during processing. The processing depth is 5% to 95% of the total thickness, the processing technology is stable, and it can meet various structural designs.

[0035] The fixed frame of the vibrating plate 102 is bonded to the base plate 103, and the vibrating plate 102 and the base plate 103 form a second chamber 132. Similarly, in order to effectively avoid backflow and suppress the self-priming effect, a second flow stop 134 is provided at the end of the vibrating plate 102. The second flow stop 134 divides the second chamber 132 into two parts along the airflow direction, and there is a gap between the bottom of the second flow stop 134 and the base plate 103. In one embodiment of the present invention, the length of the second flow stop 134 is 50 to 600 micrometers.

[0036] Based on the aforementioned biomimetic piezoelectric gas micropump, the piezoelectric element continuously outputs AC current and sinusoidal voltage excitation signals to excite the vibrating plate to vibrate at high frequency, periodically performing a suction-jet process to generate a stable jet of cold air for efficient heat dissipation and to reduce the temperature of the heat source. During the suction process, as shown... Figure 7As shown, the movable ends of the vibrating plate, namely the front and rear wings, swing upwards. The airflow from the first through-hole and part of the airflow in the first chamber are compressed and drawn into the first chamber. The airflow in the first chamber increases and flows downwards into the second chamber. The second flow-stopping plate can suppress the backflow in the third chamber 133, avoiding the self-absorption effect. This air intake process ensures that the first and second chambers are filled with cold airflow, waiting for the jet process to mix. During the jet process, as... Figure 8 As shown, the movable ends of the vibrating plate, namely the front and rear wings, swing downwards. The cold airflow is drawn in through the first through hole and is drawn in together with the airflow in the first chamber. It mixes with the cold airflow stored in the first and second chambers during the suction process and is continuously pressed in. Under the pressure of the vibrating plate, the volume of the second chamber is reduced and enters the third chamber through the second through hole, forming a high-intensity turbulent vortex that is directed toward the chip heat source or the heat sink connected to the heat source.

[0037] As mentioned earlier, the biomimetic piezoelectric gas micropump, through its arrayed air inlet design combined with a flow-stopping plate, continuously increases the total intake volume of cold air and improves intake efficiency during both the suction and jetting processes. The flow-stopping plate combined with the arrayed jet inlet design ensures heat-free airflow recirculation during both the suction and jetting processes, avoiding self-absorption effects. Simultaneously, it enhances jet turbulence intensity, increases mixing, and improves the flow efficiency from the rear to the front, reducing / eliminating stagnant and dead flow zones. The biomimetic vibration design of the piezoelectric vibrator improves the vibrator's vibration efficiency, reduces vibration energy consumption, and lowers overall power consumption. The vibrator is divided into two blades (front and rear) or three blades (front, middle, and rear), mimicking the flapping motion of a bird. The resulting rear wing vortex airflow propels and merges with the front wing vortex airflow, avoiding the non-directional collision losses caused by the vortex generated when a single vibrator vibrates. This flapping process improves vibration efficiency and reduces overall energy consumption. Large and small vortices generated by vibrating vanes of different sizes are more easily merged to form a forward vortex jet, which enhances turbulence intensity and results in higher and faster heat dissipation. At the same time, the design of the vibrating vanes can reduce fatigue damage to various structural components caused by the periodic stress generated by high-frequency vibration, thus extending service life.

[0038] In other embodiments of the present invention, multiple biomimetic piezoelectric gas micropumps as described above can be combined, such as... Figure 9 and Figure 10 As shown, it is designed to adapt to heat sources or heat sinks of different sizes to meet the heat dissipation needs of various consumer electronics products.

[0039] Based on the aforementioned biomimetic piezoelectric gas micropump, this invention also provides a control method for the biomimetic piezoelectric gas micropump, comprising: First, based on the power consumption and temperature of the device to be cooled, the vibration parameters of the vibrating plate are determined. Specifically, based on the power consumption and temperature of the device to be cooled, the required vortex intensity is determined. Then, based on the vortex intensity, the vibration amplitude and frequency of the vibrating plate are determined. Finally, based on the vibration amplitude and frequency requirements, the excitation voltage amplitude, frequency and phase are determined. Finally, based on the voltage amplitude, frequency, and phase input excitation signal, the vibration of the vibrator is controlled.

[0040] Although various embodiments of the invention have been described above, it should be understood that they are presented by way of example only and not as limitations. It will be apparent to those skilled in the art that various combinations, modifications, and alterations can be made without departing from the spirit and scope of the invention. Therefore, the breadth and scope of the invention disclosed herein should not be limited by the exemplary embodiments disclosed above, but should be defined solely by the appended claims and their equivalents.

Claims

1. A biomimetic piezoelectric gas micropump, characterized in that, include: A cover plate having a first through hole and a first chamber, wherein the first chamber communicates with the outside through the first through hole; A base plate is provided with a second through hole, a second chamber and a third chamber, wherein the third chamber is disposed facing the device to be cooled, and the second chamber is connected to the third chamber through the second through hole; A vibrating plate is disposed between the cover plate and the bottom plate, with its first end fixed and its second end suspended. The vibrating plate includes a front wing and a rear wing. The vibrating plate is configured to guide airflow from the first through hole into the first chamber, through the second chamber, and then into the third chamber through the second through hole to form a vortex jet for convective heat dissipation of the device to be cooled. The vibration parameters of the vibrating plate are determined based on the heat dissipation requirements of the device to be cooled.

2. The biomimetic piezoelectric gas micropump as described in claim 1, characterized in that, There is a gap between the front wing and the rear wing, with a gap size ranging from 5 micrometers to 20 micrometers.

3. The biomimetic piezoelectric gas micropump as described in claim 1, characterized in that, The length of the forewing is 50% to 90% of the length of the rear wing.

4. The biomimetic piezoelectric gas micropump as described in claim 1, characterized in that, Also includes: A piezoelectric element is disposed on the surface of the vibrating element, and after receiving an excitation signal, it generates periodic contraction and expansion to drive the front wing and rear wing to vibrate. An electrode is disposed on the surface of the piezoelectric element and is used to provide a current or voltage excitation signal to the piezoelectric element.

5. The biomimetic piezoelectric gas micropump as described in claim 4, characterized in that, The front and rear wings are rectangular in shape, and the length of the rear wing is 1.2 to 2 times that of the front wing. The length of the piezoelectric sheet in the rear wing portion is 1.2 to 2 times its length in the front wing portion.

6. The biomimetic piezoelectric gas micropump as described in claim 4, characterized in that, The front and rear wings are butterfly-shaped, and the length of the rear wing is 1.2 to 2 times that of the front wing. The rear and front wings each include an independent piezoelectric sheet.

7. The biomimetic piezoelectric gas micropump as described in claim 1, characterized in that, The vibrating plate also includes a middle wing, which is disposed between the front wing and the rear wing, and there is a gap between the middle wing and both the front wing and the rear wing, with a gap size of 5 micrometers to 20 micrometers.

8. The biomimetic piezoelectric gas micropump as described in claim 1, characterized in that, The first through hole is located on the side of the cover plate near the first end of the vibrating plate. The first through holes are arranged in an array, and the diameter of the first through holes decreases sequentially along the airflow direction. The second through hole is located on the side of the base plate near the first end of the vibrating plate. The second through holes are arranged in an array, and the size of the second through holes decreases sequentially along the airflow direction.

9. The biomimetic piezoelectric gas micropump as described in claim 1, characterized in that, A first flow-stopping plate is provided in the first chamber. The first flow-stopping plate is located downstream of the vibrating plate along the airflow direction, dividing the first chamber into two parts along the airflow direction, and there is a gap between the top of the first flow-stopping plate and the cover plate. The vibrating plate is provided with a second flow stop at its end. The second flow stop divides the second chamber into two parts along the airflow direction. There is a gap between the bottom of the second flow stop and the base plate.

10. A control method for a biomimetic piezoelectric gas micropump as described in any one of claims 1 to 9, characterized in that, include: The required vortex intensity is determined based on the power consumption and temperature of the device to be cooled. The vibration frequency and amplitude of the vibrating plate are determined based on the intensity of the cyclone vortex. The voltage amplitude, frequency, and phase of the excitation are determined based on the vibration frequency and amplitude. Based on the voltage amplitude, frequency, and phase, an excitation signal is input to control the vibration of the vibrator.

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