Pneumatic tee valve for semiconductor liquid supply system and working method thereof

Abstract

The application belongs to the technical field of valves, and particularly relates to a valve for semiconductor liquid supply, in particular to a pneumatic three-way valve for a semiconductor liquid supply system and a working method thereof. The pneumatic three-way valve for the semiconductor liquid supply system supplies gas to the valve body continuously, controls the communication between an external gas source and a first gas channel or a second gas channel, completes the switching control of two liquid outlet channels, and maintains the state of the first piston valve and the second piston valve through the blocking valve and the gas pressure, so that the liquid fluctuation caused by the shaking of the corresponding piston valve during switching is eliminated, and the stability of the liquid pressure of the semiconductor liquid supply system is improved.

Description

Technical Field

[0001] This invention belongs to the field of valve technology, specifically relating to valves for semiconductor liquid supply, and more particularly to a pneumatic three-way valve for a semiconductor liquid supply system and its working method. Background Technology

[0002] In the silicon wafer manufacturing process, etching solution and cleaning liquid need to be transported. In order to ensure uniform surface treatment of silicon wafers, the stability of liquid pressure is required to be extremely stringent. As the core component of the liquid supply system for switching the liquid outlet path, the three-way valve has extremely high requirements for the stability of liquid pressure when switching the liquid flow channel.

[0003] In related technologies, when a three-way valve switches the liquid outlet channel, the liquid pressure changes abruptly, which acts on the two piston valves, causing the sealing / opening state of the piston valves and the liquid outlet channel to vibrate. This leads to fluctuations in the liquid, resulting in unstable liquid pressure during liquid supply, which in turn affects the manufacturing yield of silicon wafers.

[0004] Therefore, how to avoid liquid flow fluctuations caused by switching the liquid flow channel of the three-way valve is a technical problem that urgently needs to be solved.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Summary of the Invention

[0006] This disclosure provides at least one pneumatic three-way valve for a semiconductor liquid supply system and its operating method.

[0007] In a first aspect, embodiments of this disclosure provide a pneumatic three-way valve for a semiconductor liquid supply system, comprising: The valve body has an inlet channel, a first outlet channel, and a second outlet channel inside. The first pneumatic chamber is provided with a first piston valve to divide the first pneumatic chamber into an upper first driving chamber and a lower reset chamber, and the first piston valve is used to open or close the first liquid outlet channel. The second pneumatic chamber is provided with a second piston valve to divide the second pneumatic chamber into an upper pressurization chamber and a lower second drive chamber, and the second piston valve is used to open or close the second liquid outlet channel. The first drive chamber of the first pneumatic chamber is connected to the second drive chamber of the second pneumatic chamber; The valve body is provided with an air inlet channel; A switching component is provided inside the air intake channel; The switching element is configured to divide the air intake passage into a first air passage and a second air passage; The first air passage is connected to the pressurization chamber of the second pneumatic chamber, and the second air passage is connected to the first driving chamber of the first pneumatic chamber; The first airway is equipped with a blocking valve; The control module is electrically connected to an external air source and is used to drive the external air source to connect with the first air passage or the second air passage. The blocking valve is elastically connected to the air intake channel via a return spring; Furthermore, when the first airway is ventilated, the pressure inside the first airway is greater than the tension of the reset spring, so as to push the blocking valve and insert it into the first piston valve.

[0008] In an optional embodiment, when the control module connects the external air source to the first air channel, the blocking valve in the first air channel is inserted into the first piston valve to open the first liquid outlet channel. Gas enters the pressurization chamber of the second pneumatic chamber from the first air channel, increasing the pressure on the contact surface between the second piston valve and the second liquid outlet channel, so that the second piston valve closes the second liquid outlet channel to avoid liquid fluctuations caused by fluctuations in the first piston valve and the second piston valve. When the control module connects the external air source to the second air channel, the blocking valve in the first air channel exits from the first piston valve, and the gas enters the first drive chamber of the first pneumatic chamber from the second air channel, causing the first piston valve to press down and close the first liquid outlet channel. At the same time, the gas then enters the second drive chamber of the second pneumatic chamber from the first drive chamber of the first pneumatic chamber, causing the second piston valve to lift up and open the second liquid outlet channel, so as to avoid liquid fluctuations caused by the fluctuations of the first and second piston valves.

[0009] In one alternative embodiment, the switching element includes: Connect with the supervisor; A divider plate, used to divide the connecting main pipe into upper and lower parts; A semi-circular tube, which is connected to the lower part of the main connecting tube; An elastic section is provided on the semi-circular tube; The blocking valve is slidably disposed at the bottom of the air intake channel and abuts against the end of the semi-circular pipe away from the main connecting pipe.

[0010] In one optional embodiment, the semicircular tube is a first airway; The top surface of the semi-circular tube and the air intake channel form a second air passage.

[0011] In one optional embodiment, an exhaust channel is provided on the abutting surface of the air intake channel and the semi-circular tube, and the exhaust channel is connected to the pressurization chamber of the second pneumatic chamber. The semi-circular tube is provided with a breathable layer, and the breathable layer is disposed between the elastic section and the blocking valve; When the first air passage is ventilated, the air pressure inside the semi-circular tube increases. The air pressure causes the elastic section of the semi-circular tube to deform, thereby pushing the blocking valve and inserting it into the limiting port on the side wall of the first piston. At the same time, the permeable layer is aligned with the exhaust passage.

[0012] In one alternative embodiment, the second piston valve includes: The second piston body has a second receiving groove on its top; A second compression spring is provided in the second receiving groove, and the second compression spring is elastically connected to the top of the second pneumatic chamber; A second abutment ring extends radially outward from the upper part of the second piston body; The second abutting ring abuts against the second pneumatic chamber via the second sealing ring.

[0013] In one alternative embodiment, the first piston valve includes: The first piston body is elastically connected to the bottom of the first pneumatic chamber by a first compression spring, and when the first air passage is ventilated, the top of the first piston body abuts against the top of the first pneumatic chamber by a limiting post. A first abutment ring extends radially outward from the upper part of the first piston body; The first abutting ring abuts against the first pneumatic chamber via a first sealing ring, and the first compression spring is disposed in the reset cavity.

[0014] In one optional embodiment, a limiting opening is provided on the side wall of the first abutment ring; When the first airway is ventilated, the position of the limiting port is adapted to that of the blocking valve.

[0015] Secondly, this disclosure also provides a method for operating a pneumatic three-way valve for a semiconductor liquid supply system as described above, the method comprising: The control module connects the first airway to an external air source; The first air passage supplies air, pushing the blocking valve to insert into the first piston valve and opening the first liquid outlet passage; Gas enters the pressurization chamber of the second pneumatic chamber from the first air passage, increasing the pressure on the contact surface between the second piston valve and the second liquid outlet passage, thereby closing the second liquid outlet passage; The control module connects the second airway to an external air source; The blocking valve is reset by the action of the return spring, releasing the limit on the first piston valve; The second air passage supplies air, causing the first piston valve to depress and close the first liquid outlet passage; Gas enters the second drive chamber of the second pneumatic chamber, lifting the second piston valve and opening the second liquid outlet channel.

[0016] The beneficial effects of this invention are that the pneumatic three-way valve and its working method in this semiconductor liquid supply system continuously supply air to the valve body and control the external air source to connect with the first air channel or the second air channel to complete the switching control of the two liquid outlet channels. At the same time, the state of the first piston valve and the second piston valve is maintained by the blocking valve and the air pressure, thereby eliminating the fluctuation of liquid during switching caused by the vibration of the corresponding piston valve, thereby improving the stability of the liquid pressure of the semiconductor liquid supply system.

[0017] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0018] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0019] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 A schematic diagram of the structure of a pneumatic three-way valve for a semiconductor liquid supply system provided in an embodiment of this disclosure; Figure 2 A cross-sectional view of a pneumatic three-way valve for a semiconductor liquid supply system provided in an embodiment of this disclosure; Figure 3 for Figure 2 Enlarged view of point A in the middle; Figure 4 A cross-sectional view of a portion of the structure of a pneumatic three-way valve for a semiconductor liquid supply system provided in an embodiment of this disclosure; Figure 5 A schematic diagram of a portion of the structure of the switching component provided in an embodiment of this disclosure; Figure 6 A flowchart illustrating the operation of a pneumatic three-way valve for a semiconductor liquid supply system provided in this embodiment of the disclosure.

[0021] In the diagram: 100, valve body; 110, inlet channel; 120, first outlet channel; 130, second outlet channel; 140, first pneumatic chamber; 141, first piston valve; 1411, first piston body; 1412, first compression spring; 1413, first abutment ring; 1414, limiting port; 150, second pneumatic chamber; 151, second piston valve; 1511, second piston body; 1512, second... 1513. Receiving groove; 1514. Second abutment ring; 1515. Second sealing ring; 1516. Second compression spring; 160. Inlet passage; 161. Switching component; 1611. Connecting main pipe; 1612. Semi-circular pipe; 1613. Dividing plate; 162. First air passage; 1621. Blocking valve; 1622. Return spring; 163. Second air passage; 164. Exhaust passage; 165. Breathable layer; 166. Elastic section. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] In this invention, when it is mentioned that the first component is located on the second component, this can mean that the first component can be directly formed on the second component, or that the third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0024] Research has revealed that when the three-way valve switches the liquid outlet channel, the liquid pressure changes abruptly, which affects the two piston valves. This causes the sealing / opening state of the piston valves and the liquid outlet channel to vibrate, resulting in liquid fluctuations. Consequently, the liquid pressure becomes unstable during liquid supply, thus affecting the manufacturing yield of silicon wafers.

[0025] Based on the above research, this embodiment provides a pneumatic three-way valve for a semiconductor liquid supply system and its working method. By continuously supplying air to the valve body and controlling the external air source to connect with the first air channel or the second air channel, the switching control of the two liquid outlet channels is completed. At the same time, the state of the first piston valve and the second piston valve is maintained by the blocking valve and the air pressure, thereby eliminating the fluctuation of liquid during switching caused by the vibration of the corresponding piston valve, thereby improving the stability of the liquid pressure of the semiconductor liquid supply system.

[0026] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this invention should be considered contributions made by the inventor.

[0027] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0028] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0029] Please see Figure 1 and Figure 2 At least one embodiment provides a pneumatic three-way valve for a semiconductor liquid supply system, comprising: a valve body 100, which has an inlet channel 110, a first outlet channel 120, and a second outlet channel 130 therein; a first pneumatic chamber 140, which has a first piston valve 141 therein to divide the first pneumatic chamber 140 into an upper first drive chamber and a lower reset chamber, and the first piston valve 141 is used to open or close the first outlet channel 120; a second pneumatic chamber 150, which has a second piston valve 151 therein to divide the second pneumatic chamber 150 into an upper pressurization chamber and a lower second drive chamber, and the second piston valve 151 is used to open or close the second outlet channel 130; wherein the first drive chamber of the first pneumatic chamber 140 is connected to the second drive chamber of the second pneumatic chamber 150; the valve body 100 has an air inlet channel. 160; A switching element 161 is provided in the air intake channel 160; the switching element 161 is configured to divide the air intake channel 160 into a first air passage 162 and a second air passage 163; the first air passage 162 is connected to the pressurization chamber of the second pneumatic chamber 150, and the second air passage 163 is connected to the first drive chamber of the first pneumatic chamber 140; a blocking valve 1621 is provided in the first air passage 162; a control module is electrically connected to an external air source and is used to drive the external air source to connect with the first air passage 162 or the second air passage 163; the blocking valve 1621 is elastically connected to the air intake channel 160 through a return spring 1622; and when the first air passage 162 is ventilated, the pressure in the first air passage 162 is greater than the tension of the return spring 1622, so as to push the blocking valve 1621 and insert it into the first piston valve 141.

[0030] By continuously supplying air to the valve body 100 and controlling the external air source to connect with the first air passage or the second air passage, the switching control of the two liquid outlet channels is completed. At the same time, the state of the first piston valve 141 and the second piston valve 151 is maintained by the blocking valve 1621 and the air pressure, thereby eliminating the fluctuation of liquid during switching caused by the vibration of the corresponding piston valve, thereby improving the stability of the liquid pressure of the semiconductor liquid supply system.

[0031] It should be noted that when liquid is discharged from the first liquid outlet channel 120, the liquid impacts the first piston valve 141, causing the first piston valve 141 to vibrate downwards. The blocking valve 1621 is inserted into the first piston valve 141, keeping the first piston valve 141 in the open state, preventing the first piston valve from vibrating due to the impact of the water flow, thereby improving the stability of the liquid pressure in the semiconductor liquid supply system.

[0032] Specifically, when the control module connects the external air source to the first air passage 162, the blocking valve 1621 in the first air passage 162 is inserted into the first piston valve 141, keeping the first piston valve open to open the first liquid outlet channel 120. This prevents the first piston valve 141 from vibrating due to water flow impact. Gas enters the pressurization chamber of the second pneumatic chamber 150 from the first air passage 162, increasing the pressure on the contact surfaces of the second piston valve 151 and the second liquid outlet channel 130. This causes the second piston valve 151 to close the second liquid outlet channel 130, preventing fluctuations in the first piston valve 141 and the second piston valve 151 from causing... To prevent liquid fluctuations, when the control module connects the external air source to the second air passage 163, the blocking valve 1621 in the first air passage 162 exits from the first piston valve 141, and the gas enters the first drive chamber of the first pneumatic chamber 140 from the second air passage 163, causing the first piston valve 141 to press down and close the first liquid outlet passage 120. At the same time, the gas then enters the second drive chamber of the second pneumatic chamber 150 from the first drive chamber of the first pneumatic chamber 140, causing the second piston valve 151 to lift up and open the second liquid outlet passage 130, so as to avoid liquid fluctuations caused by the fluctuations of the first piston valve 141 and the second piston valve 151.

[0033] Please see Figure 2 and Figure 3 The switching component 161 includes: a connecting main pipe 1611; a dividing plate 1613 for dividing the connecting main pipe 1611 into upper and lower parts; a semi-circular pipe 1612 connected to the lower part of the connecting main pipe 1611; an elastic section 166 provided on the semi-circular pipe 1612; and a blocking valve 1621 slidably disposed at the bottom of the air intake channel 160 and abutting against the end of the semi-circular pipe 1612 away from the connecting main pipe 1611.

[0034] The air intake channel 160 is divided into a first air passage 162 and a second air passage 163 by the dividing plate 1613, thereby realizing the switching between the first liquid outlet channel 120 and the second liquid outlet channel 130.

[0035] Specifically, the semi-circular tube 1612 is the first air passage 162; the top surface of the semi-circular tube 1612 and the air intake passage 160 form a second air passage 163.

[0036] Please see Figure 2 and Figure 4 An exhaust channel 164 is provided on the abutting surface of the air intake channel 160 and the semi-circular tube 1612; the exhaust channel 164 is connected to the pressurization chamber of the second pneumatic chamber 150; the semi-circular tube 1612 is provided with a breathable layer 165, and the breathable layer 165 is disposed between the elastic section 166 and the blocking valve 1621; when the first air passage 162 is ventilated, the air pressure in the semi-circular tube 1612 increases, and the elastic section 166 of the semi-circular tube 1612 is deformed by the air pressure, so as to push the blocking valve 1621 and insert it into the limiting port 1414 on the side wall of the first piston valve, and at the same time, the breathable layer 165 is opposite to the exhaust channel 164.

[0037] The air pressure inside the semi-circular tube 1612 is maintained by the venting layer. As the air pressure increases, the elastic section 166 of the semi-circular tube 1612 is deformed by squeezing and pushing, causing the semi-circular tube 1612 to move toward the blocking valve, so as to push the blocking valve 1621 into the limiting port 1414. At the same time, gas enters the exhaust channel 164 from the venting layer 165, which increases the air pressure inside the second pneumatic chamber 150.

[0038] To facilitate the reset of the blocking valve 1621, the blocking valve 1621 is elastically connected to the air intake channel 160 via a reset spring 1622; and when the first air passage 162 is ventilated, the pressure inside the first air passage 162 is greater than the tension of the reset spring 1622, so as to push the blocking valve 1621 into the first piston valve.

[0039] It should be noted that the bottom of the blocking valve 1621 is slidably connected to the bottom of the intake channel 160 via a limiting slider, and can only slide along the axial direction of the intake channel 160.

[0040] It ensures that when the first air passage 162 is ventilated, it can overcome the spring resistance to push the blocking valve 1621 to the working position and engage with the limiting port 1414 of the first piston valve 141. It can also automatically reset the blocking valve 1621 by the spring when the air passage is switched, thus releasing the engagement with the limiting port 1414 of the first piston valve 141.

[0041] Please see Figure 2The second piston valve 151 includes: a second piston body 1511, the top of which is provided with a second receiving groove 1512; a second compression spring 1515 is provided in the second receiving groove 1512, and the second compression spring 1515 is elastically connected to the top of the second pneumatic chamber 150; a second abutment ring 1513 extends radially outward from the upper part of the second piston body 1511; the second abutment ring 1513 abuts against the second pneumatic chamber 150 through a second sealing ring 1514, so as to divide the second pneumatic chamber 150 into an upper pressurization chamber and a lower second drive chamber.

[0042] The second compression spring 1515 and the pressurization chamber act synchronously on the abutting surface of the second piston body 1511 and the second liquid outlet channel 130, thereby reducing the air pressure required for the second drive chamber to lift the second piston body 1511, thus reducing the shaking when the second piston body 1511 is lifted, and further reducing the pressure fluctuation of the liquid surface during switching.

[0043] It should be noted that the pressurization chamber is provided with a pressure relief channel, and an electromagnetic switch valve is installed in the pressure relief channel. The electromagnetic switch valve is electrically connected to the control module. When the first liquid outlet channel 120 is open and the second liquid outlet channel 130 is closed, the electromagnetic switch valve closes the pressure relief channel; when the first liquid outlet channel 120 is closed and the second liquid outlet channel 130 is open, the electromagnetic switch valve opens the pressure relief channel.

[0044] It should be noted that when the first outlet channel 120 is open and the second outlet channel 130 is closed, the solenoid valve will close the pressure relief channel. At this time, the solenoid valve is controlled by the pressure information detected by the pressure sensor in the pressurization chamber, thereby preventing excessive pressure in the pressurization chamber. For example, when the pressure information in the pressurization chamber is greater than the first preset value, the solenoid valve will open the pressure relief channel; when the pressure information in the pressurization chamber is less than the second preset value, the solenoid valve will close the pressure relief channel, thereby preventing excessive pressure in the pressurization chamber.

[0045] Please continue reading. Figure 2 The first piston valve 141 includes: a first piston body 1411, which is elastically connected to the bottom of the first pneumatic chamber 140 via a first compression spring 1412, and when the first air passage 162 is ventilated, the top of the first piston body 1411 abuts against the top of the first pneumatic chamber 140 via a limiting post; a first abutting ring 1413 extends radially outward from the upper part of the first piston body 1411; the first abutting ring 1413 abuts against the first pneumatic chamber 140 via a first sealing ring, thereby dividing the first pneumatic chamber 140 into an upper first driving chamber and a lower reset chamber; the first compression spring 1412 is disposed in the reset chamber.

[0046] The first abutment ring 1413 has a limiting port 1414 on its side wall; when the first air passage 162 is ventilated, the limiting port 1414 is adapted to the position of the blocking valve 1621.

[0047] By precisely engaging the limiting port 1414 with the blocking valve 1621, the first piston valve 141 is mechanically locked, preventing air pressure fluctuations. The blocking valve 1621 can also fix the position of the first piston valve 141 through the limiting port 1414, completely eliminating the possibility of vibration and thus ensuring the stability of liquid pressure.

[0048] Please see Figure 6 At least one embodiment also provides a working method for a pneumatic three-way valve for a semiconductor liquid supply system as described above. By continuously supplying air to the valve body and controlling the external air source to connect with the first air passage or the second air passage, the switching control of the two liquid outlet channels is completed. At the same time, the states of the first piston valve and the second piston valve are maintained by the blocking valve and the air pressure, thereby eliminating the fluctuation of liquid during switching caused by the vibration of the corresponding piston valve, thereby improving the stability of the liquid pressure of the semiconductor liquid supply system.

[0049] Specifically, the working method includes: S110: The control module connects the first airway 162 to an external air source; S120: The first air passage 162 supplies air, pushing the blocking valve 1621 to be inserted into the first piston valve 141, opening the first liquid outlet passage 120; S130: Gas enters the pressurization chamber of the second pneumatic chamber 150 from the first air passage 162, increasing the pressure on the contact surface between the second piston valve 151 and the second liquid outlet passage 130, and closing the second liquid outlet passage 130. S140: The control module connects the second airway 163 to an external air source; S150: The blocking valve 1621 is reset under the action of the return spring 1622, releasing the limit on the first piston valve 141; S160: The second air passage 163 supplies air, causing the first piston valve 141 to be pressed down, thereby closing the first liquid outlet passage 120; S170: Gas enters the second drive chamber of the second pneumatic chamber 150, lifting the second piston valve 151 and opening the second liquid outlet channel 130.

[0050] In summary, this invention provides a pneumatic three-way valve for a semiconductor liquid supply system and its operating method. By continuously supplying air to the valve body and controlling the external air source to connect with the first or second air passage, the switching control of the two liquid outlet channels is completed. At the same time, the states of the first and second piston valves are maintained by the blocking valve and air pressure, thereby eliminating the fluctuation of liquid during switching caused by the vibration of the corresponding piston valve, thus improving the stability of the liquid pressure of the semiconductor liquid supply system.

[0051] In the description of the embodiments of the present invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the present invention based on the specific circumstances.

[0052] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A pneumatic three-way valve for a semiconductor liquid supply system, characterized in that, include: The valve body (100) has an inlet channel (110), a first outlet channel (120) and a second outlet channel (130) inside. The first pneumatic chamber (140) is provided with a first piston valve (141) to divide the first pneumatic chamber (140) into an upper first driving chamber and a lower reset chamber, and the first piston valve (141) is used to open or close the first liquid outlet channel (120); The second pneumatic chamber (150) is provided with a second piston valve (151) to divide the second pneumatic chamber (150) into an upper pressurization chamber and a lower second drive chamber, and the second piston valve (151) is used to open or close the second liquid outlet channel (130); The first drive chamber of the first pneumatic chamber (140) is connected to the second drive chamber of the second pneumatic chamber (150); The valve body (100) is provided with an air intake channel (160); A switching element (161) is provided inside the air intake channel (160). The switching element (161) is configured to divide the intake passage (160) into a first air passage (162) and a second air passage (163). The first air passage (162) is connected to the pressurization chamber of the second pneumatic chamber (150), and the second air passage (163) is connected to the first drive chamber of the first pneumatic chamber (140); The first airway (162) is provided with a blocking valve (1621); The control module is electrically connected to an external air source and is used to drive the external air source to connect with the first air passage (162) or the second air passage (163); The blocking valve (1621) is elastically connected to the air intake channel (160) via a return spring (1622); Furthermore, when the first air passage (162) is ventilated, the pressure inside the first air passage (162) is greater than the tension of the return spring (1622), so as to push the blocking valve (1621) and insert it into the first piston valve (141); When the control module connects the external air source to the first air passage (162), the blocking valve (1621) in the first air passage (162) is inserted into the first piston valve (141) to open the first liquid outlet passage (120). Gas enters the pressurization chamber of the second pneumatic chamber (150) from the first air passage (162), increasing the pressure on the abutting surface of the second piston valve (151) and the second liquid outlet passage (130), so that the second piston valve (151) closes the second liquid outlet passage (130) to avoid liquid fluctuations caused by the fluctuations of the first piston valve (141) and the second piston valve (151). When the control module connects the external air source to the second air passage (163), the blocking valve (1621) in the first air passage (162) exits from the first piston valve (141), and the gas enters the first drive chamber of the first pneumatic chamber (140) from the second air passage (163), causing the first piston valve (141) to be pressed down and the first liquid outlet passage (120) to be closed. At the same time, the gas enters the second drive chamber of the second pneumatic chamber (150) from the first drive chamber of the first pneumatic chamber (140), causing the second piston valve (151) to be raised and the second liquid outlet passage (130) to be opened, so as to avoid liquid fluctuations caused by the fluctuations of the first piston valve (141) and the second piston valve (151).

2. The pneumatic three-way valve for a semiconductor liquid supply system as described in claim 1, characterized in that, The switching element (161) includes: Connect to the supervisor (1611); Divider plate (1613) is used to divide the connecting main pipe (1611) into upper and lower parts; A semi-circular tube (1612) is connected to the lower part of the connecting main tube (1611); An elastic section (166) is provided on the semi-circular tube (1612). The blocking valve (1621) is slidably disposed at the bottom of the air intake channel (160) and abuts against the end of the semi-circular tube (1612) away from the connecting main tube (1611).

3. The pneumatic three-way valve for a semiconductor liquid supply system as described in claim 2, characterized in that, The semi-circular tube (1612) is the first airway (162); The top surface of the semi-circular tube (1612) and the air intake channel (160) form a second air passage (163).

4. The pneumatic three-way valve for a semiconductor liquid supply system as described in claim 2, characterized in that, An exhaust channel (164) is provided on the abutting surface of the air intake channel (160) and the semi-circular tube (1612), and the exhaust channel (164) is connected to the pressurization chamber of the second pneumatic chamber (150). The semi-circular tube (1612) is provided with a breathable layer (165), and the breathable layer (165) is disposed between the elastic section (166) and the blocking valve (1621); When the first air passage (162) is ventilated, the air pressure in the semi-circular tube (1612) increases. The air pressure causes the elastic section (166) of the semi-circular tube (1612) to deform, thereby pushing the blocking valve (1621) and inserting it into the limiting port (1414) on the side wall of the first piston. At the same time, the permeable layer (165) is aligned with the exhaust passage (164).

5. The pneumatic three-way valve for a semiconductor liquid supply system as described in claim 1, characterized in that, The second piston valve (151) includes: The second piston body (1511) has a second receiving groove (1512) on its top. A second compression spring (1515) is provided in the second receiving groove (1512), and the second compression spring (1515) is elastically connected to the top of the second pneumatic chamber (150); A second abutment ring (1513) extends radially outward from the upper part of the second piston body (1511). The second abutting ring (1513) abuts against the second pneumatic chamber (150) via the second sealing ring (1514).

6. The pneumatic three-way valve for a semiconductor liquid supply system as described in claim 1, characterized in that, The first piston valve (141) includes: The first piston body (1411) is elastically connected to the bottom of the first pneumatic chamber (140) by a first compression spring (1412), and when the first air passage (162) is ventilated, the top of the first piston body (1411) abuts against the top of the first pneumatic chamber (140) by a limiting post. A first abutment ring (1413) extends radially outward from the upper part of the first piston body (1411). The first abutting ring (1413) abuts against the first pneumatic chamber (140) through the first sealing ring, and the first compression spring (1412) is disposed in the reset cavity.

7. The pneumatic three-way valve for a semiconductor liquid supply system as described in claim 6, characterized in that, The first abutment ring (1413) has a limiting opening (1414) on its side wall. When the first airway (162) is ventilated, the position of the limiting port (1414) is adapted to the position of the blocking valve (1621).

8. A method for operating a pneumatic three-way valve for a semiconductor liquid supply system as described in any one of claims 1-7, characterized in that, The working method includes: The control module connects the first airway (162) to an external air source; The first air passage (162) supplies air, pushing the blocking valve (1621) to insert into the first piston valve (141), opening the first liquid outlet passage (120); Gas enters the pressurization chamber of the second pneumatic chamber (150) from the first air passage (162), increasing the pressure on the contact surface between the second piston valve (151) and the second liquid outlet passage (130), thus closing the second liquid outlet passage (130); The control module connects the second airway (163) to an external air source; The blocking valve (1621) is reset by the action of the return spring (1622), releasing the limit on the first piston valve (141); The second air passage (163) supplies air, causing the first piston valve (141) to be pressed down to close the first liquid outlet passage (120); Gas enters the second drive chamber of the second pneumatic chamber (150), lifting the second piston valve (151) and opening the second liquid outlet channel (130).

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