Metal diaphragm capacitor compound vacuum gauge

Abstract

The application discloses a metal diaphragm capacitor composite vacuum gauge, which comprises a vacuum gauge body, an air inlet pipe, a detection cavity, a metal diaphragm, an overpressure linkage protection system arranged in the air inlet pipe, and an overpressure linkage protection system comprising an airflow blocking unit, a pressure relief unit, a diaphragm limiting unit and a linkage driving unit; the linkage driving unit comprises an overpressure induction trigger structure, a power output structure and multiple sets of transmission coupling structures; under an overpressure working condition, the overpressure induction trigger structure starts the power output structure, the power output structure drives the airflow blocking unit to close the air inlet channel through the multiple sets of transmission coupling structures, then starts the pressure relief unit to release the pressure in the air inlet pipe, and drives the diaphragm limiting unit to be close to the metal diaphragm. The application can realize integrated protection under the overpressure working condition, block the overpressure airflow impact from the source, controllably release the pressure and limit the diaphragm deformation, so that the stability, the measurement accuracy and the service life of the vacuum gauge are improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum gauge technology, and in particular to a metal diaphragm capacitor composite vacuum gauge. Background Technology

[0002] Metal diaphragm-capacitor composite vacuum gauges are widely used in high-end industrial fields such as semiconductors, photovoltaics, and vacuum coating due to their high accuracy, wide measuring range, and insensitivity to gas types. The core component of this vacuum gauge is a highly elastic metal thin film, which measures vacuum levels by changing its capacitance value through deformation caused by gas pressure differences. The state of the metal thin film directly determines the accuracy and lifespan of the vacuum gauge.

[0003] Existing vacuum gauges have the following areas for improvement: for example, they are prone to instantaneous overpressure airflow impacts during vacuum system start-up and shutdown, pipeline switching, etc., which can cause irreversible deformation or elastic fatigue of the metal thin film, resulting in decreased measurement accuracy and shortened lifespan.

[0004] Currently, the protection of this metal film mostly relies on external pressure reducing valves, buffer tanks and other equipment, which are complex in structure, costly and slow in response, and cannot achieve the ideal protection effect; a few use built-in structures, but the protection effect is limited and cannot protect the metal film from the root.

[0005] Therefore, it is necessary to propose a metal diaphragm capacitor composite vacuum gauge to solve at least one of the above problems.

[0006] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this application and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this application. Summary of the Invention

[0007] To address the shortcomings of existing technologies, this invention provides a metal diaphragm capacitor composite vacuum gauge that enables integrated protection under overpressure conditions. It blocks the impact of overpressure airflow at the source, provides controllable pressure relief, and limits diaphragm deformation, thereby improving the stability, measurement accuracy, and service life of the vacuum gauge.

[0008] The specific technical solution of the embodiments of the present invention is as follows: A metal diaphragm-capacitor composite vacuum gauge includes: a vacuum gauge body, an inlet pipe connected to the vacuum gauge body, and a detection chamber disposed within the inlet pipe, wherein a metal diaphragm is disposed within the detection chamber; the metal diaphragm-capacitor composite vacuum gauge further includes: an overpressure linkage protection system disposed within the inlet pipe, comprising an airflow blocking unit, a pressure relief unit, a diaphragm limiting unit, and a linkage drive unit; the airflow blocking unit is used to block the air intake passage of the inlet pipe when abnormal overpressure occurs within the inlet pipe; the pressure relief unit is used to... After the air intake channel is blocked, the internal pressure of the air intake pipe is released controllably; the diaphragm limiting unit is used to limit the deformation of the metal diaphragm when abnormal overpressure occurs in the air intake pipe; the linkage drive unit includes an overpressure sensing trigger structure, a power output structure, and multiple sets of transmission coupling structures; under overpressure conditions, the overpressure sensing trigger structure activates the power output structure, and the power output structure, through the multiple sets of transmission coupling structures, first drives the airflow blocking unit to close the air intake channel, then activates the pressure relief unit to release the pressure in the air intake pipe, and drives the diaphragm limiting unit to approach the metal diaphragm.

[0009] Furthermore, the multiple sets of transmission coupling structures include a synchronous transmission component, and the power output structure can output a first path of rotational power and a second path of rotational power; the first path of rotational power is used to drive the airflow blocking unit to operate; the second path of rotational power is split into a first branch power and a second branch power through the synchronous transmission component, the first branch power is used to drive the pressure relief unit, and the second branch power is used to drive the diaphragm limiting unit.

[0010] Furthermore, the multi-set transmission coupling structure also includes a timing transmission component, which includes a rotating cylinder. The synchronous transmission component includes a synchronous pulley and a synchronous belt. The synchronous pulley includes a driving pulley and a driven pulley. The driving pulley is fixed to the output end of the power output structure, and the driven pulley is fixed to the end of the rotating cylinder. The synchronous belt simultaneously engages the driving pulley and the driven pulley, transmitting the second rotational power to the driven pulley. The driven pulley then divides the received power into the first branch power and the second branch power. The timing transmission component is connected between the driven pulley and the pressure relief unit, transmitting the first branch power through the rotating cylinder.

[0011] Furthermore, the timing transmission assembly also includes a guide rod, a linkage rod, a collar, a coil spring, a limiting plate, a positioning block, a fixing member, and a circular shell; a guide groove is provided on the side wall of the rotating cylinder, and the limiting plate is fixed to the inner wall of the air intake pipe by the fixing member; the circular shell is fixed to the fixing member; the rotating cylinder is rotatably mounted on the fixing member and can rotate independently relative to the limiting plate; the guide rod is fixed to the linkage rod and slidably embedded in the guide groove; the collar and the coil spring are housed inside the circular shell, and the collar is rotatably sleeved on the linkage rod. At the end, the two ends of the coil spring are respectively connected to the outer wall of the collar and the inner wall of the circular shell; the inner wall of the collar is provided with a positioning groove, and the positioning block is set on the outer wall of the linkage rod and can be embedded in the positioning groove; during the closing process of the airflow blocking unit, the linkage rod can rotate circumferentially with the rotating cylinder, and the collar rotates synchronously with the linkage rod and twists the coil spring; when the guide rod contacts the limiting plate, the limiting plate constrains the guide rod to rotate circumferentially, causing the linkage rod to generate axial displacement, driving the positioning block to disengage from the positioning groove and releasing the coil spring.

[0012] Furthermore, the multi-set transmission coupling structure also includes a transition transmission assembly, which is disposed between the timing transmission assembly and the pressure relief unit. This transition transmission assembly transmits the power output by the coil spring to the pressure relief unit. The pressure relief unit includes: a pressure relief cylinder, a conical pressure relief head, a conical plug, a sleeve, a connecting rod, a pressure relief spring, and a sleeve plate. The pressure relief cylinder is connected to the air inlet pipe. The conical pressure relief head is located at the end of the pressure relief cylinder. The conical plug is fixed to the sleeve. The sleeve is slidably fitted onto the connecting rod. The pressure relief spring supports and limits the sleeve. The sleeve plate is slidably fitted onto the outside of the connecting rod. The pressure relief spring is fitted onto the outside of the connecting rod. The transition transmission assembly transmits the power output by the coil spring to the sleeve plate, compressing the pressure relief spring and causing the sleeve to move upward, thus disengaging the conical plug from the conical pressure relief head.

[0013] Furthermore, the transition transmission assembly includes: a pressure plate, a rotating plate, an extrusion rod, a circular plate, an extrusion spring, a first extrusion block, a transmission rod assembly, an extrusion roller, and a second extrusion block; the pressure plate is fixed to the surface of the linkage rod; the rotating plate is fixed to the end of the collar away from the driven wheel, and an extension is provided on the side of the rotating plate, the extension having an opening for the extrusion rod to pass through; the extrusion rod passes through the rotating plate through the opening; the circular plate is disposed at one end of the extrusion rod and is directly opposite the pressure plate; the extrusion spring is sleeved on the surface of the extrusion rod, and both ends of the extrusion spring are respectively connected to the circular plate and the rotating plate; the first extrusion block The first extrusion block has an arc-shaped side surface that can be driven and engaged with the extrusion rod; the second extrusion block is fixed on the side of the sleeve plate away from the pressure relief spring, and the contact surface of the second extrusion block for engaging with the extrusion roller is an arc-shaped curved surface; the extrusion roller and the arc-shaped curved surface of the second extrusion block are in rolling engagement; the transmission rod group is connected between the first extrusion block and the extrusion roller; before the air intake channel is cut off, the extrusion rod and the first extrusion block are in a non-contact state; after the air intake channel is cut off, the linkage rod drives the pressure plate to press down on the circular plate, the extrusion spring is compressed, the extrusion rod contacts the arc-shaped side surface of the first extrusion block and sequentially drives the transmission rod group and the extrusion roller.

[0014] Furthermore, the airflow blocking unit includes: a fixed base, an opening / closing actuator, and a blocking transmission assembly; the fixed base is disposed inside the air intake pipe; the opening / closing actuator is rotatably connected to the fixed base; the blocking transmission assembly is used to receive the first rotational power of the power output structure and transmit the first rotational power to the opening / closing actuator.

[0015] Furthermore, the overpressure sensing trigger structure includes: a touch switch and an overpressure sensing component; the touch switch is electrically connected to the power output structure; the overpressure sensing component is installed inside the intake pipe and is located upstream of the airflow blocking unit along the intake direction; under overpressure conditions, the overpressure sensing component triggers the touch switch to start the power output structure.

[0016] Furthermore, the detection chamber is provided with an installation groove, and the diaphragm limiting unit includes: multiple tension springs, a lower moving ring, an annular airbag, a drive rod, and a downward transmission assembly; one end of each of the multiple tension springs is connected to the installation groove, and the other end is connected to the lower moving ring; the lower moving ring can be located in the installation groove through the tension springs; the annular airbag is fixed on the lower moving ring and located on the side of the lower moving ring facing the metal diaphragm; the drive rod is fixed to the end face of the driven wheel, and can receive the second branch power and rotate with the driven wheel; the downward transmission assembly is used to receive the rotational power of the drive rod and convert the rotational power into downward pressure on the lower moving ring, and stretch the multiple tension springs so that the annular airbag can contact the metal diaphragm.

[0017] Furthermore, the downward pressure transmission assembly includes: a downward pressure plate, a downward pressure rod, and a downward pressure ring; the downward pressure plate is disposed at the end of the drive rod opposite to the driven wheel and can rotate with the drive rod; the downward pressure rod is fixed on the downward pressure plate; the downward pressure ring is fixed on the surface of the downward moving ring opposite to the driven wheel, and an inclined surface is provided on the side wall of the downward pressure ring; when the downward pressure plate drives the downward pressure rod to rotate, the downward pressure rod can contact the inclined surface, generating downward pressure on the downward pressure ring, causing the downward pressure ring to drive the downward moving ring to move downward.

[0018] The technical solution of the present invention has the following significant beneficial effects: The metal diaphragm-capacitor composite vacuum gauge provided in this application incorporates an overpressure linkage protection system. This system integrates an airflow blocking unit, a pressure relief unit, a diaphragm limiting unit, and a linkage drive unit. The linkage drive unit consists of an overpressure sensing trigger structure, a power output structure, and multiple sets of transmission coupling structures. When abnormal overpressure occurs in the air inlet pipe, the overpressure sensing trigger structure activates the power output structure. The power is then transmitted through multiple sets of transmission coupling structures in a sequential manner: first closing the air inlet channel, then releasing the internal pressure, and simultaneously approaching the metal diaphragm. This achieves integrated protection under overpressure conditions, blocking the impact of overpressure airflow at the source, enabling controllable pressure relief, and limiting diaphragm deformation. This prevents the metal diaphragm from undergoing irreversible deformation or performance degradation due to overpressure, thereby significantly improving the stability, measurement accuracy, and service life of the vacuum gauge.

[0019] Specific embodiments of the invention are disclosed in detail below with reference to the description and accompanying drawings, indicating how the principles of the invention can be employed. It should be understood that the embodiments of the invention are not therefore limited in scope. Features described and / or shown for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments. Attached Figure Description

[0020] The accompanying drawings described herein are for illustrative purposes only and are not intended to limit the scope of the invention in any way. Furthermore, the shapes and proportions of the components in the drawings are merely illustrative to aid in understanding the invention and do not specifically limit the shapes and proportions of the components. Those skilled in the art, guided by the teachings of this invention, can select various possible shapes and proportions to implement the invention according to specific circumstances.

[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a cross-sectional view of the intake pipe of the present invention; Figure 3 This is a bottom cross-sectional view of the intake pipe of the present invention; Figure 4 This is a schematic cross-sectional view of the detection cavity of the present invention; Figure 5 This is a schematic diagram of the exploded structure of the protective shell of the present invention; Figure 6 For the present invention Figure 5 Enlarged view of point A in the middle; Figure 7 This is an exploded structural diagram of the rotating ring of the present invention; Figure 8 This is a cross-sectional view of the fixing ring of the present invention; Figure 9 For the present invention Figure 8 Enlarged view of point B in the middle; Figure 10 This is a cross-sectional view of the pressure relief cylinder of the present invention; Figure 11 For the present invention Figure 10 Enlarged view of point C in the middle; Figure 12 This is an exploded structural diagram of the rotating plate of the present invention; Figure 13 This is a cross-sectional view of the circular shell of the present invention; Figure 14 For the present invention Figure 13 Enlarged view at point D; Figure 15 This is a schematic diagram of the structure of the rotating cylinder of the present invention; Figure 16 This is an exploded view of the diaphragm limiting unit of the present invention; Figure 17 For the present invention Figure 16 Enlarged view of point E in the middle.

[0022] The reference numerals in the above figures are as follows: 1. Vacuum gauge body; 101. Inlet pipe; 102. Detection chamber; 103. Metal diaphragm; 21. Airflow blocking unit; 22. Pressure relief unit; 23. Diaphragm limiting unit; 24. Linkage drive unit; 2101. Fixing ring; 2102. Opening and closing blade; 2103. Connecting column; 2104. Dual-axis motor; 2105. Protective shell; 2106. Gear ring; 2107. Gear; 2108. Floating plate; 2109. U-shaped plate; 2110. Push plate; 2111. L-shaped rod; 2112. Push rod; 2113. Actuating switch 2114. Closed; 2115. Actuating rod; 2116. Actuating spring; 2117. Swinging rod; 2118. Rotating ring; 2119. Swinging frame; 2110. Support ring; 2120. T-ring; 2121. Limiting groove; 2201. Long rod; 2202. Synchronous pulley; 2203. Synchronous belt; 2204. Rotating cylinder; 2205. Pressure relief cylinder; 2206. Conical pressure relief head; 2206. Pressure relief port; 2207. Conical plug; 2208. Sleeve 2209. Cylinder; 2210. Support rod; 2211. Pressure relief spring; 2212. Connecting rod; 2213. First fixing rod; 2214. Second fixing rod; 2215. Pressure plate; 2216. Rotating plate; 2217. First extrusion block; 2218. Rectangular rod; 2219. Moving rod; 2220. Mounting rod; 2221. Extrusion roller; 2221. T-shaped plate; 2222. Second extrusion block; 2223. Sleeve plate; 2224. Limiting plate; 222 5. Guide rod; 2226. Coil spring; 2227. Linkage rod; 2228. Collar; 2229. Circular plate; 2230. Compression spring; 2231. Compression rod; 2232. Circular shell; 2233. Guide groove; 2234. Positioning groove; 2235. Positioning block; 301. Mounting groove; 302. Lower moving ring; 303. Tension spring; 304. Lower pressure plate; 305. Lower pressure ring; 306. Drive rod; 307. Annular airbag; 308. Lower pressure rod. Detailed Implementation

[0023] The details of the present invention can be more clearly understood by referring to the accompanying drawings and the description of specific embodiments. However, the specific embodiments of the present invention described herein are for illustrative purposes only and should not be construed as limiting the invention in any way. Under the teachings of this invention, those skilled in the art can conceive of any possible modifications based on the invention, all of which should be considered within the scope of the invention. It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there may be an intervening element. The terms "mounted," "connected," and "connected" should be interpreted broadly, for example, they can refer to mechanical or electrical connections, or internal communication between two elements, and can be direct or indirect connections through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms according to the specific circumstances. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0025] This invention provides a metal diaphragm capacitor composite vacuum gauge that can achieve integrated protection under overpressure conditions, block the impact of overpressure airflow at the source, control the pressure relief and limit the deformation of the diaphragm, thereby improving the stability, measurement accuracy and service life of the vacuum gauge.

[0026] Please refer to the following for comprehensive information. Figures 1 to 17This application specification provides a metal diaphragm-capacitor composite vacuum gauge, which may include: a vacuum gauge body 1, an air inlet pipe 101 connected to the vacuum gauge body 1, and a detection chamber 102 disposed within the air inlet pipe 101, wherein a metal diaphragm 103 is disposed within the detection chamber 102; the metal diaphragm-capacitor composite vacuum gauge further includes: an overpressure linkage protection system, which is disposed within the air inlet pipe 101 and includes an airflow blocking unit 21, a pressure relief unit 22, a diaphragm limiting unit 23, and a linkage drive unit 24; the airflow blocking unit 21 is used to block the air inlet passage of the air inlet pipe 101 when an abnormal overpressure occurs within the air inlet pipe 101; The pressure relief unit 22 is used to controllably release the internal pressure of the intake pipe 101 after the intake channel is blocked; the diaphragm limiting unit 23 is used to limit the deformation of the metal diaphragm 103 when abnormal overpressure occurs in the intake pipe 101; the linkage drive unit 24 includes an overpressure sensing trigger structure, a power output structure, and multiple sets of transmission coupling structures; under overpressure conditions, the overpressure sensing trigger structure activates the power output structure, and the power output structure, through the multiple sets of transmission coupling structures, first drives the airflow blocking unit 21 to close the intake channel, then activates the pressure relief unit 22 to release the pressure in the intake pipe 101, and drives the diaphragm limiting unit 23 to approach the metal diaphragm 103.

[0027] The metal diaphragm capacitor composite vacuum gauge provided in this application embodiment adds an overpressure linkage protection system. This system integrates an airflow blocking unit 21, a pressure relief unit 22, a diaphragm limiting unit 23, and a linkage drive unit 24. The linkage drive unit 24 consists of an overpressure sensing trigger structure, a power output structure, and multiple sets of transmission coupling structures. When an abnormal overpressure occurs in the air inlet pipe 101, the overpressure sensing trigger structure activates the power output structure. The power is then linked through multiple sets of transmission coupling structures in a sequential manner: first closing the air inlet channel, then releasing the internal pressure, and then simultaneously approaching the metal diaphragm 103. This achieves integrated protection under overpressure conditions, blocks the impact of overpressure airflow from the source, achieves controllable pressure relief, and limits diaphragm deformation. This prevents the metal diaphragm 103 from undergoing irreversible deformation or performance degradation due to overpressure, thereby significantly improving the stability, measurement accuracy, and service life of the vacuum gauge.

[0028] The present application will now be described in detail with reference to the accompanying drawings and embodiments.

[0029] Please refer to the following: Figure 1 , Figure 2 and Figure 3 In this embodiment, the metal diaphragm capacitive composite vacuum gauge may include: a vacuum body, an air inlet pipe 101, a detection chamber 102, and a metal diaphragm 103, etc.

[0030] The core working principle of the metal diaphragm-capacitor composite vacuum gauge is to measure vacuum by utilizing the elastic deformation and capacitance effect of the diaphragm. A high-precision, highly elastic metal diaphragm 103 is installed inside the detection chamber 102, dividing the chamber into a measurement chamber connected to the vacuum system under test and a reference chamber sealed with a fixed high vacuum. The metal diaphragm 103 and the opposite fixed electrode form a parallel-plate capacitor. When the pressure of the vacuum system under test changes, a pressure difference is generated across the metal diaphragm 103, driving it to undergo micron-level elastic bending. This changes the distance between the plates of the metal diaphragm 103 and the fixed electrode, causing a corresponding change in capacitance. By detecting the capacitance change and processing and calibrating the signal, the measured vacuum level can be obtained. This is existing technology and will not be elaborated further here.

[0031] In this embodiment, an overpressure linkage protection system is added to the intake pipe 101 based on the above structure. The overpressure linkage protection system mainly includes an airflow blocking unit 21, a pressure relief unit 22, a diaphragm limiting unit 23, and a linkage drive unit 24.

[0032] The multiple transmission coupling structures include a synchronous transmission component, and the power output structure can output a first rotational power and a second rotational power. The first rotational power is used to drive the airflow blocking unit 21 to operate. The second rotational power is split into a first branch power and a second branch power through the synchronous transmission component. The first branch power is used to drive the pressure relief unit 22, and the second branch power is used to drive the diaphragm limiting unit 23.

[0033] In this embodiment, the multi-group transmission coupling structure is provided with a synchronous transmission component, and the power output structure can output two independent rotational powers. The first power directly drives the airflow blocking unit 21 to operate, and the second power is split by the synchronous transmission component into the first branch power driving the pressure relief unit 22 and the second branch power driving the diaphragm limiting unit 23.

[0034] like Figure 5 As shown, the power output structure can be in the form of a dual-axis motor 2104. The two output ends of the dual-axis motor 2104 output the first rotational power and the second rotational power respectively, which are independently matched to drive the airflow blocking unit 21 and the synchronous transmission component to realize the synchronous linkage of multiple structures and the sequential step-by-step operation. It can also reverse the rotation to drive the entire mechanism to reset, so as to realize the cyclic protection use.

[0035] By using a single power source to achieve power distribution and parallel linkage of multiple units, the overall transmission path is simple and efficient. It can ensure that the airflow blocking unit 21 performs the blocking action first, and can also synchronize the pressure relief unit 22's pressure relief action with the diaphragm limiting unit 23's limiting action. This simplifies the drive structure, reduces the number of actuators, lowers costs, and improves the reliability of the protective linkage.

[0036] Furthermore, the multiple sets of transmission coupling structures may also include a timing transmission component, which is provided with a rotating cylinder 2204. The synchronous transmission component includes a synchronous pulley 2202 and a synchronous belt 2203. The synchronous pulley 2202 includes a driving pulley and a driven pulley. The driving pulley is fixed to the output end of the power output structure, and the driven pulley is fixed to the end of the rotating cylinder 2204. The synchronous belt 2203 simultaneously engages the driving pulley and the driven pulley, transmitting the second path of rotational power to the driven pulley. The driven pulley then divides the received power into the first branch power and the second branch power. The timing transmission component is connected between the rotating cylinder 2204 and the pressure relief unit 22. The rotating cylinder 2204 receives the first branch power, and the pressure relief unit 22 is controlled to release pressure after the airflow blocking unit 21 completes closure.

[0037] In this embodiment, the multi-set transmission coupling structure is provided with a rotating cylinder 2204 and a timing transmission assembly, please refer to the following: Figure 4 and Figure 10 The synchronous transmission assembly includes a driving wheel, a driven wheel, and a synchronous belt 2203. The driving wheel is fixed at the output end of the power output structure, and the driven wheel is fixed at the end of the rotating cylinder 2204. The synchronous belt 2203 transmits the second rotational power to the rotating cylinder 2204. The driven wheel further divides the power into a first branch power and a second branch power. The timing transmission assembly connects the rotating cylinder 2204 and the pressure relief unit 22.

[0038] In use, the mechanical structure forces the pressure relief action to lag behind the closing action of the airflow blocking unit 21, thereby achieving centralized power diversion and precise timing control. This prevents residual overpressure airflow from impacting the metal diaphragm 103 during pressure relief. Overall, the transmission response is fast, the structure is compact, and it is not affected by electrical control delay, which can greatly improve the stability and safety of overpressure protection.

[0039] Specifically, the timing transmission assembly may further include a guide groove 2233, a guide rod 2225, a linkage rod 2227, a collar 2228, a coil spring 2226, a limiting plate 2224, a positioning block 2235, a fixing member, and a circular shell 2232; the fixing member may include a first fixing rod 2212 and a second fixing rod 2213 that are connected or integrally formed; the rotating cylinder 2204 has a guide groove 2233 on its side wall, and the limiting plate 2224 is connected to the first fixing rod 2225 and the circular shell 2232. Rod 2212 is fixed to the inner wall of the intake pipe 101; the circular shell 2232 is fixed to the first fixed rod 2212 via the second fixed rod 2213; the rotating cylinder 2204 is rotatably mounted on the first fixed rod 2212 and can rotate independently relative to the limiting plate 2224; the guide rod 2225 is fixed to the linkage rod 2227 and slidably embedded in the guide groove 2233; the collar 2228 and the coil spring 2226 are housed in the circular shell 2212. Inside the shell 2232, the collar 2228 is rotatably sleeved on the end of the linkage rod 2227, and the two ends of the coil spring 2226 are respectively connected to the outer wall of the collar 2228 and the inner wall of the circular shell 2232; the inner wall of the collar 2228 is provided with a positioning groove 2234, and the positioning block 2235 is disposed on the outer wall of the linkage rod 2227 and can be embedded in the positioning groove 2234; during the closing process of the airflow blocking unit 21, the guide rod 2225 is initially in a non-limited state. In the first state, the linkage rod 2227 rotates circumferentially with the rotating cylinder 2204, and the collar 2228 rotates synchronously with the linkage rod 2227 and twists the coil spring 2226; when the guide rod 2225 contacts the limiting plate 2224, the limiting plate 2224 constrains the guide rod 2225 to rotate circumferentially, causing the linkage rod 2227 to generate axial displacement, driving the positioning block 2235 to disengage from the positioning groove 2234, and releasing the coil spring 2226.

[0040] In this embodiment, the timing transmission assembly may also include a guide rod 2225, a linkage rod 2227, a collar 2228, a coil spring 2226, a limiting plate 2224, a positioning block 2235, a fixing member, and a circular shell 2232, etc.

[0041] For details, please refer to the following: Figure 10 , Figure 12 , Figure 13 , Figure 14 and Figure 15 The rotating cylinder 2204 can be a hollow cylindrical structure. A spiral guide groove 2233 is provided on the side wall of the rotating cylinder 2204. The guide groove 2233 penetrates the side wall of the rotating cylinder 2204 radially and is non-through in the axial direction. The guide groove 2233 is used to cooperate with other components in the timing transmission assembly.

[0042] The limiting plate 2224 and the circular shell 2232 are fixed to the inner wall of the air intake pipe 101 by a fastener. Taking the fastener as an example, which includes a first fixing rod 2212 and a second fixing rod 2213 that are fixedly connected, one end of the first fixing rod 2212 is fixedly connected to the inner wall of the air intake pipe 101, and the surface of the rotating cylinder 2204 is rotatably connected to the first fixing rod 2212. The outer surface of the rotating cylinder 2204 can be clearance-fitted with the first fixing rod 2212. For example, the first fixing rod 2212 can at least partially surround the outer periphery of the rotating cylinder 2204. The guide rod 2225 is fixed to the linkage rod 2227 and slidably embedded in the guide groove 2233, and the collar 2228 is rotatably sleeved on the end of the linkage rod 2227. Figure 13 and Figure 14 (As shown in the lower position), the coil spring 2226 connects the collar 2228 and the round shell 2232 to store energy. The positioning groove 2234 on the inner wall of the collar 2228 and the positioning block 2235 on the outer wall of the linkage rod 2227 are normally locked (non-overpressure condition). During the closing process of the airflow blocking unit 21, the guide rod 2225 rotates only circumferentially with the rotating cylinder 2204, which drives the collar 2228 to torsion the coil spring 2226 to store energy. After the guide rod 2225 touches the limit plate 2224, it is constrained to rotate circumferentially. The linkage rod 2227 generates axial displacement, which drives the positioning block 2235 to disengage from the positioning groove 2234 and release the stored energy of the coil spring 2226.

[0043] Overall, this application, through innovative design of the above-mentioned timing transmission component structure, relies on a purely mechanical structure to complete the entire process of power storage, triggering, and energy release without the need for electronic control. The energy stored in the coil spring 2226 is released instantaneously to amplify the power and drive the pressure relief action to respond quickly. Through the linkage design of the above-mentioned timing transmission component, it can ensure that the pressure relief is triggered only after the blockage is completely closed, with precise timing and no risk of premature pressure relief. Moreover, the structure has a high degree of integration and can be well adapted to the narrow inner cavity space of the intake pipe 101.

[0044] Furthermore, the multiple transmission coupling structures may also include a transition transmission assembly, which is disposed between the timing transmission assembly and the pressure relief unit 22, for transmitting the power output by the coil spring 2226 to the pressure relief unit 22. Please refer to [reference needed]. Figure 16 and Figure 17The pressure relief unit 22 includes: a pressure relief cylinder 2205, a conical pressure relief head 2206, a conical plug 2207, a sleeve 2208, a connecting rod 2211, a pressure relief spring 2210, and a sleeve plate 2223; the pressure relief cylinder 2205 is connected to the air inlet pipe 101, the conical pressure relief head 2206 is located at the end of the pressure relief cylinder 2205, the conical plug 2207 is fixed to the sleeve 2208, and the sleeve 2208 is slidably sleeved on the connecting rod 2208. 11. The pressure relief spring 2210 supports and limits the sleeve 2208. The sleeve plate 2223 is slidably sleeved on the outside of the connecting rod 2211. The pressure relief spring 2210 is sleeved on the outside of the connecting rod 2211. The transition transmission assembly transmits the power output by the coil spring 2226 to the sleeve plate 2223, compresses the pressure relief spring 2210, and drives the sleeve 2208 to move upward, so that the conical plug 2207 disengages from the conical pressure relief head 2206.

[0045] In this embodiment, the multi-set transmission coupling structure is provided with a transition transmission component connecting the timing transmission component and the pressure relief unit 22. The pressure relief unit 22 may include a pressure relief cylinder 2205, a conical pressure relief head 2206, a conical plug 2207, a sleeve 2208, a connecting rod 2211, a pressure relief spring 2210, and a sleeve plate 2223. The pressure relief cylinder 2205 is connected to the air inlet pipe 101. The conical pressure relief head 2206 is located at the end of the pressure relief cylinder 2205. The conical plug 2207 normally seals the pressure relief head. The sleeve 2208 is slidably sleeved on the connecting rod 2211. The pressure relief spring 2210 supports the sleeve 2208 to maintain the sealing state. The sleeve plate 2223 is slidably sleeved on the outside of the connecting rod 2211.

[0046] The conical pressure relief head 2206 may include a hollow variable cross-section structure, the cross-section of which gradually decreases along the airflow direction, and a pressure relief port 22060 is provided at the end of the variable cross-section structure. The diameter of the conical plug 2207 may gradually decrease along the airflow direction, and the diameter of the conical plug 2207 is adapted to the inner diameter of the variable cross-section structure.

[0047] Under overpressure conditions, after the air intake passage is completely closed, the power released by the coil spring 2226 is transmitted to the sleeve 2223 through the transition transmission assembly. The compressed pressure relief spring 2210 drives the sleeve 2208 to move upward, so that the conical plug 2207 gradually disengages from the conical pressure relief head 2206 to achieve graded and controllable pressure relief (the outflowing air flow gradually increases from small to large), avoiding the impact of instantaneous pressure relief and releasing pressure evenly, thereby further protecting the metal diaphragm 103. After the pressure relief is completed, the pressure relief spring 2210 automatically rebounds and drives the plug to reset and seal, which can be reused without manual operation. In addition, the conical seal has high fitting accuracy and good sealing performance under normal conditions, and does not affect the normal measurement accuracy of the vacuum gauge.

[0048] The transition transmission assembly is used to controllably transmit the power provided by the energy stored in the coil spring 2226 to the pressure relief unit 22. The transition transmission assembly may include: a pressure plate 2214, a rotating plate 2215, a pressing rod 2231, a circular plate 2229, a pressing spring 2230, a first pressing block 2216, a transmission rod assembly, a pressing roller 2220, and a second pressing block 2222. The pressure plate 2214 is fixed to the surface of the linkage rod 2227; the rotating plate 2215 is fixed to the end of the collar 2228 away from the driven wheel, and the side of the rotating plate 2215 is provided with an extension, the extension having an opening for the extrusion rod 2231 to pass through; the extrusion rod 2231 passes through the rotating plate 2215 through the opening; the circular plate 2229 is disposed at one end of the extrusion rod 2231 and is directly opposite the pressure plate 2214; the compression spring 2230 is sleeved on the surface of the extrusion rod 2231, and the two ends of the compression spring 2230 are respectively connected to the circular plate 2229 and the driven wheel. The rotating plate 2215 is connected; the first extrusion block 2216 has an arc-shaped side surface that can be driven and engaged with the extrusion rod 2231; the second extrusion block 2222 is fixed on the side of the sleeve plate 2223 away from the pressure relief spring 2210, and the contact surface of the second extrusion block 2222 for engaging with the extrusion roller 2220 is an arc-shaped curved surface; the extrusion roller 2220 and the arc-shaped curved surface of the second extrusion block 2222 are in rolling engagement; the transmission rod group is connected between the first extrusion block 2216 and the extrusion roller 2220; before the air intake channel is cut off, the extrusion rod 2231 and the first extrusion block 2216 are in a non-contact state.

[0049] After the air intake channel is cut off, the linkage rod 2227 drives the pressure plate 2214 to press down the circular plate 2229, the compression spring 2230 is compressed, and the compression rod 2231 contacts the arc-shaped side of the first compression block 2216 and drives the transmission rod group and the compression roller 2220 in sequence.

[0050] In this embodiment, the transition transmission assembly may include a pressure plate 2214, a rotating plate 2215, an extrusion rod 2231, a circular plate 2229, an extrusion spring 2230, a first extrusion block 2216, a transmission rod assembly, an extrusion roller 2220, and a second extrusion block 2222. The pressure plate 2214 is fixed to the linkage rod 2227, the rotating plate 2215 is fixed to the end of the collar 2228, the extrusion rod 2231 passes through the rotating plate 2215 and has a circular plate 2229 (which can be circular or have other regular or irregular structures, and this application does not make specific limitations) at one end facing the pressure plate 2214, the extrusion spring 2230 connects the circular plate 2229 and the rotating plate 2215, the second extrusion block 2222 is fixed to the sleeve plate 2223 and the contact surface is an arc-shaped curved surface, the extrusion roller 2220 rolls with the arc-shaped curved surface, and the transmission rod assembly connects the first extrusion block 2216 and the extrusion roller 2220.

[0051] The transmission rod assembly may include a rectangular rod 2217 connecting the first extrusion block 2216, and two movable rods 2218 connecting the rectangular rod 2217. One end of each movable rod 2218 is fixed to the rectangular rod 2217, and the other end is fitted with a T-shaped plate. The T-shaped plate includes a first plate body for mounting the movable rod 2218 and a second plate body perpendicular to the first plate body. A mounting rod 2219 is provided on the second plate body; one end of the mounting rod 2219 is fixed to the second plate body, and the other end is connected to the extrusion roller 2220. Furthermore, a support rod 2209 is also mounted on the first plate body. One end of the support rod 2209 passes through the first plate body, and the other end of the support rod 2209 is fixedly connected to the inner wall of the pressure relief cylinder 2205.

[0052] Before the intake channel is cut off, the extrusion rod 2231 is not in contact with the first extrusion block 2216 and there is no transmission. After the cut-off, the linkage rod 2227 moves down, causing the pressure plate 2214 to press down the circular plate 2229 and compress the extrusion spring 2230. The extrusion rod 2231 moves down and abuts against the first extrusion block 2216, and can contact the arc-shaped side of the first extrusion block 2216. The extrusion rod 2231 moves relative to the arc-shaped side to generate a pushing force. This pushing force is transmitted to the second extrusion block 2222 through the transmission rod group and the extrusion roller 2220 to drive the sleeve plate 2223 to move up to release pressure. The transmission is triggered only after the intake channel is blocked, which can avoid malfunction. The extrusion spring 2230 provides power buffer, which can reduce hard contact impact. The arc rolling fit has low friction and smooth power transmission without jamming. The step-by-step transmission can ensure stable output power, making the staged pressure release process uniform and controllable, while also protecting the transmission components and extending their service life.

[0053] In one implementation, please refer to [reference needed]. Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Figure 9 The airflow blocking unit 21 may include: a fixed base, an opening and closing actuator, and a blocking transmission assembly; the fixed base is disposed inside the air intake pipe 101; the opening and closing actuator is rotatably connected to the fixed base; the blocking transmission assembly is used to receive the first rotational power of the power output structure and transmit the first rotational power to the opening and closing actuator.

[0054] In this embodiment, the airflow blocking unit 21 may include a fixed base, an opening / closing actuator, and a blocking transmission assembly. The fixed base is fixed inside the intake pipe 101 and may be in the form of a fixed ring 2101, which is fixedly connected to the inner cavity of the intake pipe 101. The opening / closing actuator is rotatably connected to the fixed base and may include a plurality of opening / closing blades 2102. For example, there may be multiple opening / closing blades 2102 evenly spaced in the circumferential direction. The blocking transmission assembly connects the power output structure and the opening / closing actuator, and is used to receive the first path of rotational power to drive the opening / closing actuator to rotate and close rapidly, thereby blocking the air intake passage of the intake pipe 101 at its source.

[0055] The blocking transmission assembly may include: a swing frame 2118, a support ring 2119, a limiting groove 2121, a T-shaped ring 2120, a rotating ring 2117, a swing rod 2116, a gear ring 2106, a gear 2107, etc. One end of multiple opening and closing blades 2102 extends through to the outside of the fixed ring 2101 and is fixedly connected to the swing frame 2118. The surface of the fixed ring 2101 is fixedly fitted with the support ring 2119. A limiting groove 2121 is formed in the inner cavity of the support ring 2119. A T-shaped ring 2120 is rotatably connected to the inner cavity of the limiting groove 2121. A rotating ring 2117 is fixedly connected to the surface of the T-shaped ring 2120. Several swing rods 2116 are fixedly connected to the surface of the rotating ring 2117. One end of each swing rod 2116 extends to the swing frame. On one side of 2118, a gear ring 2106 is fixedly sleeved on the surface of the rotating ring 2117. A gear 2107 meshes on the surface of the gear ring 2106. By setting a swing rod 2116, the swing frame 2118 can be driven to swing, thereby allowing the opening and closing blade 2102 to close, thus blocking the air inlet of the air inlet pipe 101. When there is an overpressure airflow impact, it can effectively prevent the airflow from entering the depth of the air inlet pipe 101 and damaging the metal diaphragm 103, ensuring the accuracy of subsequent measurements of the vacuum gauge body 1.

[0056] This rotary actuator closes quickly, cutting off the intake air in milliseconds to prevent overpressure airflow from entering the detection chamber 102. The multi-bladed opening and closing mechanism 2102 provides a complete sealing surface and excellent blocking effect after closure. Its overall structure is compatible with the inner cavity of the intake pipe 101 and is easy to install. Furthermore, the rotary structure experiences minimal wear, can be repeatedly opened and closed, is suitable for frequent overpressure conditions, and offers high reliability.

[0057] In one embodiment, the overpressure sensing trigger structure includes: a touch switch 2113 and an overpressure sensing component; the touch switch 2113 is electrically connected to the power output structure; the overpressure sensing component is installed inside the intake pipe 101 and is located upstream of the airflow blocking unit 21 along the intake direction; under overpressure conditions, the overpressure sensing component triggers the touch switch 2113 to start the power output structure.

[0058] In this embodiment, the overpressure sensing trigger structure may include a touch switch 2113 and an overpressure sensing component. The touch switch 2113 is electrically connected to the power output structure, and the overpressure sensing component is fixed inside the intake pipe 101 and located upstream of the airflow blocking unit 21 along the intake direction. Under normal conditions, the overpressure sensing component remains in its initial state, and the touch switch 2113 is not triggered. When the pressure inside the intake pipe 101 exceeds a preset value, the overpressure airflow pushes the overpressure sensing component to activate the touch switch 2113, thereby activating the power output structure. This achieves automatic sensing and protection of overpressure conditions, automatic activation of the system, and upstream monitoring provides early warning. The sensing response is rapid and without delay. By adjusting the parameters of the overpressure sensing component, the trigger pressure threshold can be changed to adapt to different vacuum range requirements. The purely mechanical sensing combined with electronic triggering results in a simple structure, low failure rate, and adaptability to various operating conditions.

[0059] Specifically, the overpressure sensing component may include: a floating plate 2108, a trigger spring 2115, a push rod 2112, a push plate 2110, a trigger rod 2114, a U-shaped plate 2109, etc.

[0060] For example, a U-shaped plate 2109 is fixedly connected to the surface of the fixed ring 2101. A push plate 2110 is provided on one side of the U-shaped plate 2109. Two push rods 2112 are fixedly connected to the surface of the push plate 2110. One end of the push rod 2112 passes through one side of the U-shaped plate 2109 and is fixedly connected to a floating plate 2108. A trigger spring 2115 is movably sleeved on the surface of the push rod 2112. The two ends of the trigger spring 2115 are fixedly connected to the surfaces of the floating plate 2108 and the U-shaped plate 2109, respectively, to push... A trigger rod 2114 is fixedly connected to the surface of plate 2110. One end of several opening and closing blades 2102 is rotatably connected to a connecting post 2103. By setting the connecting post 2103, the stability of the opening and closing blades 2102 can be guaranteed, thereby ensuring the opening and closing effect of the opening and closing blades 2102. This allows them to effectively block the air inlet of the air inlet pipe 101, making the metal diaphragm 103 less susceptible to the impact of overpressure airflow, ensuring the service life of the metal diaphragm 103, and thus ensuring the detection effect of the metal diaphragm 103.

[0061] A touch switch 2113 is fixedly connected to the surface of the connecting post 2103. A protective shell 2105 is fixedly sleeved on the surface of the fixing ring 2101. A dual-axis motor 2104 is fixedly connected to the surface of the protective shell 2105. One of the output ends of the dual-axis motor 2104 passes through the inner cavity of the protective shell 2105 and is fixedly connected to the surface of the gear 2107. Two L-shaped rods 2111 are fixedly connected to one end of the connecting post 2103. One end of each of the two L-shaped rods 2111 is fixedly connected to the surface of the fixing ring 2101.

[0062] In one specific embodiment, the power output structure can be in the form of a dual-axis motor 2104, which may include a long rod 2201. One end of the long rod 2201 is fixedly connected to one of the output ends of the dual-axis motor 2104. A rotating cylinder 2204 is provided inside the air intake pipe 101. A linkage rod 2227 is movably connected to the inner cavity of the rotating cylinder 2204. A guide rod 2225 is fixedly connected to the surface of the linkage rod 2227. A guide groove 2233 is formed on the surface of the rotating cylinder 2204. The linkage rod 2225 is slidably connected to the inner cavity of the guide groove 2233. A circular shell 2232 is rotatably sleeved on the surface of the linkage rod 2227. A coil spring 2226 is provided in the inner cavity of the circular shell 2232. A collar 2228 is rotatably connected to the inner cavity of the circular shell 2232. One end of the linkage rod 2227 is movably connected to the inner cavity of the collar 2228. Two positioning grooves 2234 are opened in the inner cavity of the collar 2228. Positioning blocks 2235 are provided in the inner cavity of the positioning grooves 2234. Both positioning blocks 2235 are fixedly connected. The two ends of the coil spring 2226 are fixedly connected to the surface of the collar 2228 and the inner wall of the circular shell 2232, respectively, and a rotating plate 2215 is fixedly connected to one end of the collar 2228. A pressing rod 2231 is provided on the surface of the rotating plate 2215. One end of the pressing rod 2231 passes through one side of the rotating plate 2215 and is fixedly connected to a circular plate 2229. Two limiting plates 2224 are provided on the surface of the rotating cylinder 2204. The surfaces of the two limiting plates 2224 share a common surface. A first fixing rod 2212 is fixedly connected, with one end of the first fixing rod 2212 fixedly connected to the inner wall of the air intake pipe 101. The surface of the rotating cylinder 2204 is rotatably connected to the inside of the first fixing rod 2212. A second fixing rod 2213 is fixedly connected to the surface of the circular shell 2232, with one end of the second fixing rod 2213 fixedly connected to the surface of the first fixing rod 2212. By setting the second fixing rod 2213, the circular shell 2232 can be fixed, ensuring the stability of the circular shell 2232.

[0063] A compression spring 2230 is movably sleeved on the surface of the compression rod 2231. The two ends of the compression spring 2230 are fixedly connected to the surfaces of the circular plate 2229 and the rotating plate 2215, respectively. A pressure plate 2214 is fixedly sleeved on the surface of the linkage rod 2227. A pressure relief cylinder 2205 is fixedly connected to the surface of the air intake pipe 101 (for example, an opening for installing the pressure relief cylinder 2205 is provided on the side wall of the air intake pipe 101, and the pressure relief cylinder 2205 communicates with the air intake pipe 101 through this opening; a sealing element can be provided at the opening position for sealing). A conical pressure relief head 2206 is fixedly connected to the surface of the pressure relief cylinder 2205, and a conical plug 2 is provided in the inner cavity of the conical pressure relief head 2206. 207. A sleeve 2208 is fixedly connected to the surface of the conical plug 2207, and a synchronous pulley 2202 (the driving pulley) is fixedly connected to the surface of the long rod 2201; a synchronous pulley 2202 (the driven pulley) is fixedly connected to the surface of the rotating cylinder 2204. The surfaces of the driving pulley and the driven pulley are connected to a synchronous belt 2203 for transmission. By setting the conical plug 2207, the conical plug 2207 can gradually move upward, gradually releasing the seal on the conical pressure relief head 2206, thereby allowing the air flow rate to increase from small to large, so that it can release pressure evenly, effectively protecting the metal diaphragm 103, preventing the metal diaphragm 103 from being damaged, and ensuring the measurement accuracy of the vacuum gauge body 1.

[0064] A connecting rod 2211 is fixedly connected to the inner wall of the pressure relief cylinder 2205. The inner cavity of the sleeve 2208 is movably sleeved on the surface of the connecting rod 2211. A pressure relief spring 2210 is movably sleeved on the surface of the connecting rod 2211. A sleeve plate 2223 is fixedly sleeved on the surface of the sleeve 2208. The two ends of the pressure relief spring 2210 are fixedly connected to the inner wall of the pressure relief cylinder 2205 and the surface of the sleeve plate 2223, respectively. Two second extrusion blocks 2222 are fixedly connected to the surface of the sleeve plate 2223.

[0065] The inner cavity of the pressure relief cylinder 2205 is provided with two movable rods 2218. One end of each movable rod 2218 is fixedly connected to a rectangular rod 2217. A first extrusion block 2216 is fixedly connected to the surface of the rectangular rod 2217. One end of each movable rod 2218 is fixedly connected to a T-shaped plate 2221. Two support rods 2209 are provided on one side of the T-shaped plate 2221. One end of each support rod 2209 extends through one side of the T-shaped plate 2221, and the other end of each support rod 2209 is fixedly connected to the inner wall of the pressure relief cylinder 2205. The T-shaped plate 2221... A mounting rod 2219 is fixedly connected to the surface. One end of the mounting rod 2219 is rotatably connected to a squeezing roller 2220. By setting the squeezing roller 2220, it can roll on the second squeezing block 2222, allowing the second squeezing block 2222 to move upward gradually. This allows the sleeve 2208 to gradually drive the conical plug 2207 upward, causing the air flow rate to gradually increase. This gradually depressurizes the air inlet pipe 101, ensuring the stability of the depressurization and effectively protecting the metal diaphragm 103 from damage.

[0066] In this embodiment, the coordinated use of the airflow blocking unit 21, the linkage drive unit 24, and the pressure relief unit 22 can achieve the purpose of protecting the metal diaphragm 103. When an overpressure airflow impact occurs suddenly, the air inlet of the air inlet pipe 101 can be quickly blocked, thereby preventing the metal diaphragm 103 from being impacted by the overpressure airflow and protecting the metal diaphragm 103. At the same time, the internal pressure of the vacuum gauge can be gradually released, from small airflow pressure release to large airflow pressure release, making the pressure release more uniform and further protecting the metal diaphragm 103.

[0067] In a specific application scenario: When the vacuum gauge body 1 is in use, if an overpressure airflow impact occurs, the overpressure airflow can push the floating plate 2108 (under normal pressure airflow, the floating plate 2108 is restricted by the trigger spring 2115 and will not be pushed), causing the push rod 2112 to move, thereby moving the floating plate 2108 and compressing the trigger spring 2115. The push rod 2112 can then push the push plate 2110, allowing the trigger rod 2114 to contact the trigger switch 2113, which then triggers the trigger switch 2113. 113. Start the dual-axis motor 2104. The operation of the dual-axis motor 2104 causes the gear 2107 to rotate, thereby driving the gear ring 2106 to rotate. The gear ring 2106 drives the rotating ring 2117 to rotate. Under the limiting action of the T-shaped ring 2120 and the limiting groove 2121, the rotating ring 2117 can rotate stably within the support ring 2119. When the rotating ring 2117 rotates, it can drive the swing rod 2116 on its surface to move, causing the swing rod 2116 to move within the swing frame 2118. Pushing the swing frame 2118 causes the opening and closing blades 2102 to rotate, allowing several blades 2102 to close quickly and simultaneously. This effectively blocks the overpressure airflow, preventing excessive overpressure airflow from continuously impacting the metal diaphragm 103 and protecting it from damage. Simultaneously, the synchronous pulley 2202 on the other output end... The drive wheel rotates, causing the timing belt 2203 to rotate. The rotation of the timing belt 2203 causes another timing wheel 2202 (the driven wheel) to rotate, thus rotating the connected rotating drum 2204. Because the guide rod 2225 is movably connected within the guide groove 2233 and the friction between them is large, the guide rod 2225 is not restricted, allowing the rotating drum 2204 to drive the internal linkage rod 2227 to rotate. This causes the guide rod 2225 to move away from a nearby limiting plate 2224 (e.g.,...). Figure 15 As shown, the limiting plate 2224 can be located on one side of the rotating cylinder 2204 along the radial direction, so that the guide rod 2225 is connected to another limiting plate 2224 (such as...). Figure 15As shown, the limiting plate 2224 can be located on the other side of the rotating cylinder 2204 in the radial direction (contacting the surface). When the linkage rod 2227 rotates, the positioning groove 2234 and the positioning block 2235 can drive the collar 2228 to rotate, causing the collar 2228 to rotate inside the circular shell 2232, thereby winding up the coil spring 2226 to store force. The coil spring 2226 completes the storage of force after the guide rod 2225 contacts the other limiting plate 2224. At the same time as the collar 2228 rotates, it drives the rotating plate 2215 connected to it to rotate. Since the extrusion rod 2231 is set on one side of the first extrusion block 2216, when the rotating plate 2215 rotates, as Figure 10 As shown, the extrusion rod 2231 is not blocked by the first extrusion block 2216 and only rotates on one side of the first extrusion block 2216. After the guide rod 2225 contacts the surface of the other limiting plate 2224, since the opening and closing blade 2102 is not fully closed, the dual-axis motor 2104 continues to run to drive the opening and closing blade 2102 to fully close and then close. At the same time, the rotating cylinder 2204 continues to rotate. Since the guide rod 2225 is limited by contact with the other limiting plate 2224, when the rotating cylinder 2204 continues to rotate, the guide rod 2225 can move down along the guide groove 2233 through the guide groove 2233, thereby driving the linkage rod 2227 to move down, so that the positioning block 2235 moves down in the positioning groove 2234, thereby removing the collar 2228 and releasing the limitation on the collar 2228. At the same time as the linkage rod 2227 moves, it drives the pressure plate 2214 to move, so that the pressure plate 2214 contacts the circular plate 2229 to extrude it. Figure 12As shown, the circular plate 2229 drives the extrusion rod 2231 to move, while the extrusion spring 2230 contracts. After the extrusion rod 2231 moves down to its position, one end of it can be flush with the other side of the first extrusion block 2216. After the positioning block 2235 moves out of the collar 2228, the opening and closing blade 2102 is completely closed. Since the limiting of the collar 2228 is released, the collar 2228 is rotated by the rotational force of the coil spring 2226, thereby driving the rotating plate 2215 to rotate. When the extrusion rod 2231 rotates, it can contact the arc-shaped side of the first extrusion block 2216, thereby extruding the first extrusion block 2216. This causes the first extrusion block 2216 to push the rectangular rod 2217. As the rectangular rod 2217 moves, it pushes the two moving rods 2218, causing the T-shaped plate 2221 connected to it to be pushed and slide on the support rod 2209. At the same time, the extrusion roller 2220 rolls on the arc surface of the second extrusion block 2222, thereby extruding the first extrusion block 2216. The second compression block 2222 pushes the sleeve 2223 upward to compress the pressure relief spring 2210, and at the same time drives the sleeve 2208 upward, so that the conical plug 2207 gradually releases the seal on the conical pressure relief head 2206, allowing the pressure relief to gradually increase, thereby gradually relieving the pressure inside the intake pipe 101, thus protecting the metal diaphragm 103, ensuring the uniformity of pressure relief, making the metal diaphragm 103 less susceptible to overpressure impact, and ensuring the service life of the metal diaphragm 103. After the protection of the metal diaphragm 103 is completed, the dual-axis motor 2104 can be reversed by the external controller power supply, thereby opening the opening and closing blade 2102. At the same time, the guide rod 2225 resets and contacts the initial limit plate 2224. By limiting the guide rod 2225, the positioning block 2235 can re-enter the collar 2228, and the other components also reset accordingly for the next use.

[0068] Please refer to the following: Figure 16 and Figure 17In one embodiment, the detection cavity 102 is provided with a mounting groove 301, and the diaphragm limiting unit 23 may include: multiple tension springs 303, a lowering ring 302, an annular airbag 307, a drive rod 306, and a downward transmission assembly; one end of each of the multiple tension springs 303 is connected to the mounting groove 301, and the other end is connected to the lowering ring 302; the lowering ring 302 can be positioned within the mounting groove 301 via the tension springs 303; the annular airbag 307 is fixed. Located on the lower moving ring 302 and on the side of the lower moving ring 302 facing the metal diaphragm 103; the drive rod 306 is fixed to the end face of the driven wheel, and can receive the second branch power and rotate with the driven wheel; the downward transmission assembly is used to receive the rotational power of the drive rod 306 and convert the rotational power into downward pressure on the lower moving ring 302, and stretch the multiple tension springs 303 so that the annular airbag 307 can contact the metal diaphragm 103.

[0069] In this embodiment, an installation groove 301 is formed in the detection cavity 102, and a diaphragm limiting unit 23 is provided to flexibly limit and protect the metal diaphragm 103 under overpressure conditions, preventing excessive deformation. Specifically, the diaphragm limiting unit 23 may include multiple tension springs 303, a lowering ring 302, an annular airbag 307, a drive rod 306, and a pressing transmission assembly. The two ends of the tension springs 303 are respectively connected to the installation groove 301 and the lowering ring 302. Under normal conditions, the tension springs 303 suspend the lowering ring 302 in the installation groove 301. The annular airbag 307 is fixed on the side of the lowering ring 302 facing the metal diaphragm 103. The drive rod 306 is fixed on the end face of the driven wheel to receive the second branch power and rotate with the driven wheel. The pressing transmission assembly converts the rotational power of the drive rod 306. For axial downward pressure, the tension spring 303 drives the downward moving ring 302 to move downward, so that the annular airbag 307 fits against the surface of the metal diaphragm 103 to restrict the diaphragm from deforming, realizing flexible limiting during overpressure. The soft contact of the annular airbag 307 can avoid damage to the diaphragm by rigid contact. The limiting action is synchronized with the blocking and pressure relief, protecting the metal diaphragm 103 in all directions. After the overpressure is released, the tension spring 303 automatically rebounds and drives the airbag to detach from the diaphragm, without affecting the normal deformation of the diaphragm and capacitance measurement. The components are integrated into the detection cavity 102, do not occupy extra space, and do not interfere with the measurement accuracy of the vacuum gauge.

[0070] The downward pressure transmission assembly may include: a downward pressure plate 304, a downward pressure rod 308, and a downward pressure ring 305; the downward pressure plate 304 is disposed at the end of the drive rod 306 away from the driven wheel and can rotate with the drive rod 306; the downward pressure rod 308 is fixed on the downward pressure plate 304; the downward pressure ring 305 is fixed on the surface of the downward moving ring 302 away from the driven wheel, and an inclined surface is provided on the side wall of the downward pressure ring 305; when the downward pressure plate 304 drives the downward pressure rod 308 to rotate, the downward pressure rod 308 can contact the inclined surface and generate downward pressure on the downward pressure ring 305, causing the downward pressure ring 305 to drive the downward moving ring 302 to move downward.

[0071] In this embodiment, the downward pressing transmission assembly may include a downward pressing plate 304, a downward pressing rod 308, and a downward pressing ring 305. The downward pressing plate 304 is connected to (or integrally formed with) the end of the drive rod 306 opposite to the driven wheel and rotates with the drive rod 306. The downward pressing rod 308 is connected to (or integrally formed with) the downward pressing plate 304. The downward pressing ring 305 is connected to (or integrally formed with) the surface of the downward moving ring 302 opposite to the driven wheel and has a beveled sidewall. In use, the drive rod 306 rotates, causing the lower pressure plate 304 and the lower pressure rod 308 to rotate. The lower pressure rod 308 contacts the inclined surface of the lower pressure ring 305, converting the rotational motion into axial downward pressure to push the lower moving ring 302 downward. The inclined surface contact can amplify the force, and a small torque is sufficient to drive the downward movement. The transmission efficiency is high, and the contact is smooth and impact-free, which can avoid damage to the diaphragm and transmission components from hard collisions. The overall structure is simple, with few parts and low cost. After the overpressure is released, the tension spring 303 rebounds, causing the lower pressure rod 308 to disengage along the inclined surface. The reset is smooth and without jamming, ensuring that the diaphragm limiting unit 23 can work repeatedly and stably.

[0072] In one specific embodiment, the mounting groove 301 is formed inside the detection cavity 102. A drive rod 306 is fixedly connected to the surface of one of the synchronous pulleys 2202 (driven pulleys). One end of the drive rod 306 passes through the inside of the detection cavity 102 and is fixedly connected to a lower pressure plate 304. A lower moving ring 302 is provided in the inner cavity of the mounting groove 301. By providing the lower moving ring, the annular airbag 307 can be driven to move downward, thereby limiting the metal diaphragm 103, preventing the metal diaphragm 103 from being excessively deformed, effectively protecting the metal diaphragm 103, and improving the service life of the metal diaphragm 103.

[0073] Four tension springs 303 are fixedly connected to the surface of the lower moving ring 302. One end of the tension spring 303 is fixedly connected to the inner wall of the mounting groove 301. A lower pressure ring 305 is fixedly connected to the surface of the lower moving ring 302. An annular airbag 307 is fixedly connected to the surface of the lower moving ring 302. A lower pressure rod 308 is fixedly connected to the surface of the lower pressure plate 304.

[0074] By setting the diaphragm limiting unit 23, the metal diaphragm 103 can be limited. When an overpressure airflow impact occurs, the deformation of the metal diaphragm 103 can be restricted, preventing it from deforming too much. This effectively protects the metal diaphragm 103, ensuring the accuracy of subsequent vacuum gauge measurement data, and thus guaranteeing the service life and detection effect of the vacuum gauge.

[0075] In a specific implementation scenario: when the dual-axis motor 2104 operates and causes the two synchronous pulleys 2202 to rotate simultaneously, the drive rod 306 connected to one of the synchronous pulleys 2202 (driven pulley) rotates, thereby driving the lower pressure plate 304 to rotate. This causes the lower pressure rod 308 to rotate until it contacts the inclined surface of the lower pressure ring 305, thus gradually pressing down on the lower pressure ring 305. The lower pressure ring 305 then drives the lower pressure plate 304 to move down, causing the tension spring 303 to stretch. This allows the annular airbag 307 to contact the metal diaphragm 103, limiting the movement of the metal diaphragm 103 and preventing it from deforming excessively. This effectively protects the metal diaphragm 103, preventing damage and ensuring its service life. This, in turn, ensures the accuracy of the detection data of the vacuum gauge body 1. After protection is completed, the lower pressure plate 304 can be reset back into the mounting groove 301 by the reset of the tension spring 303.

[0076] The various embodiments described in this specification are presented in a progressive manner, with each embodiment focusing on its differences from the others. Similar or identical parts between embodiments can be referred to interchangeably. The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made according to the spirit and essence of the present invention should be included within the scope of protection of the present invention.

Claims

1. A metal diaphragm capacitance composite vacuum gauge, comprising: The vacuum gauge body, the air inlet pipe connected to the vacuum gauge body, and the detection chamber disposed in the air inlet pipe, wherein a metal diaphragm is disposed in the detection chamber; characterized in that the metal diaphragm capacitor composite vacuum gauge further includes: an overpressure linkage protection system, wherein the overpressure linkage protection system is disposed in the air inlet pipe and includes an airflow blocking unit, a pressure relief unit, a diaphragm limiting unit, and a linkage drive unit; The airflow blocking unit is used to block the air intake passage of the air intake pipe when an abnormal overpressure occurs in the air intake pipe; The pressure relief unit is used to controllably release the internal pressure of the intake pipe after the intake channel is blocked; The diaphragm limiting unit is used to limit the deformation of the metal diaphragm when an abnormal overpressure occurs in the intake pipe; The linkage drive unit includes an overpressure sensing trigger structure, a power output structure, and multiple sets of transmission coupling structures. The multiple sets of transmission coupling structures include a synchronous transmission component, a sequential transmission component, and a transition transmission component. The power output structure is a dual-axis motor. The two output ends of the dual-axis motor respectively output a first path of rotational power and a second path of rotational power, which independently match and drive the airflow blocking unit and the synchronous transmission component. The timing transmission assembly includes a rotating cylinder, a guide rod, a linkage rod, a collar, a coil spring, a limiting plate, a positioning block, a fixing component, and a circular shell; The synchronous transmission assembly includes a synchronous pulley and a synchronous belt. The synchronous pulley includes a driving pulley and a driven pulley. The driving pulley is fixed to the output end of the dual-shaft motor, and the driven pulley is fixed to the end of the rotating cylinder. The synchronous belt simultaneously engages the driving pulley and the driven pulley, transmitting the second path of rotational power to the driven pulley. The driven pulley then splits the received power into a first branch power and a second branch power. The first branch power is used to drive the pressure relief unit, and the second branch power is used to drive the diaphragm limiting unit. The timing transmission assembly is connected between the driven wheel and the pressure relief unit, and receives the first branch power through the rotating cylinder; The rotating cylinder has a guide groove on its side wall, and the limiting plate is fixed to the inner wall of the air intake pipe by the fixing member; the circular shell is fixed to the fixing member; the rotating cylinder is rotatably assembled on the fixing member and can rotate independently relative to the limiting plate; the guide rod is fixed to the linkage rod and slidably embedded in the guide groove; the collar and the coil spring are housed inside the circular shell, the collar is rotatably sleeved on the end of the linkage rod, and the two ends of the coil spring are respectively connected to the outer wall of the collar and the inner wall of the circular shell; the inner wall of the collar has a positioning groove, and the positioning block is set on the outer wall of the linkage rod and can be embedded in the positioning groove; During the closing process of the airflow blocking unit, the linkage rod can rotate circumferentially with the rotating cylinder, and the collar rotates synchronously with the linkage rod and twists the coil spring; when the guide rod contacts the limiting plate, the limiting plate constrains the guide rod to rotate circumferentially, causing the linkage rod to generate axial displacement, driving the positioning block to disengage from the positioning groove and releasing the coil spring; The transition transmission assembly is disposed between the timing transmission assembly and the pressure relief unit, and is used to transmit the power output by the coil spring to the pressure relief unit. Under overpressure conditions, the overpressure sensing triggering structure activates the power output structure. The power output structure, through the multiple sets of transmission coupling structures, first drives the airflow blocking unit to close the air intake channel, then activates the pressure relief unit to release the pressure in the air intake pipe, and drives the diaphragm limiting unit to approach the metal diaphragm.

2. The metal diaphragm capacitor composite vacuum gauge as described in claim 1, characterized in that, The pressure relief unit includes: a pressure relief cylinder, a conical pressure relief head, a conical plug, a sleeve, a connecting rod, a pressure relief spring, and a sleeve plate; The pressure relief cylinder is connected to the air intake pipe, the conical pressure relief head is located at the end of the pressure relief cylinder, the conical plug is fixed to the sleeve, the sleeve is slidably sleeved on the connecting rod, the pressure relief spring supports and limits the sleeve, the sleeve plate is slidably sleeved on the outside of the connecting rod, and the pressure relief spring is sleeved on the outside of the connecting rod. The transition transmission assembly transmits the power output by the coil spring to the sleeve plate, compresses the pressure relief spring, drives the sleeve to move upward, and causes the conical plug to disengage from the conical pressure relief head.

3. The metal diaphragm capacitor composite vacuum gauge as described in claim 2, characterized in that, The transition transmission assembly includes: a pressure plate, a rotating plate, an extrusion rod, a circular plate, an extrusion spring, a first extrusion block, a transmission rod assembly, an extrusion roller, and a second extrusion block; The pressure plate is fixed to the surface of the linkage rod; the rotating plate is fixed to the end of the collar away from the driven wheel, and the side of the rotating plate is provided with an extension, the extension having an opening for the extrusion rod to pass through; the extrusion rod passes through the rotating plate through the opening; the circular plate is disposed at one end of the extrusion rod and is directly opposite the pressure plate; the extrusion spring is sleeved on the surface of the extrusion rod, and the two ends of the extrusion spring are respectively connected to the circular plate and the rotating plate; the first extrusion block has an arc-shaped side surface, which can drive and cooperate with the extrusion rod; the second extrusion block is fixed to the side of the sleeve away from the pressure relief spring, and the contact surface of the second extrusion block for cooperating with the extrusion roller is an arc-shaped curved surface; the extrusion roller rolls in cooperation with the arc-shaped curved surface of the second extrusion block; the transmission rod assembly is connected between the first extrusion block and the extrusion roller; Before the air intake channel is cut off, the extrusion rod and the first extrusion block are in a non-contact state; after the air intake channel is cut off, the linkage rod drives the pressure plate to press down on the circular plate, the extrusion spring is compressed, the extrusion rod contacts the arc-shaped side of the first extrusion block and drives the transmission rod assembly and the extrusion roller in sequence.

4. The metal diaphragm capacitor composite vacuum gauge as described in claim 1, characterized in that, The airflow blocking unit includes: a fixed base, an opening and closing actuator, and a blocking transmission assembly; The fixing base is disposed inside the air intake pipe; The opening and closing actuator is rotatably connected to the fixed base; The blocking transmission assembly is used to receive the first rotational power of the power output structure and transmit the first rotational power to the opening and closing actuator.

5. The metal diaphragm capacitor composite vacuum gauge as described in claim 4, characterized in that, The overvoltage sensing trigger structure includes: a touch switch and an overvoltage sensing component; The touch switch is electrically connected to the power output structure; the overpressure sensing component is installed inside the intake pipe and is located upstream of the airflow blocking unit along the intake direction. Under overpressure conditions, the overpressure sensing component triggers the touch switch and starts the power output structure.

6. The metal diaphragm capacitor composite vacuum gauge as described in claim 1, characterized in that, The detection chamber is provided with an installation groove, and the diaphragm limiting unit includes: multiple tension springs, a downward moving ring, an annular airbag, a drive rod, and a downward transmission assembly; One end of each of the multiple tension springs is connected to the mounting groove, and the other end is connected to the lower moving ring; the lower moving ring can be located in the mounting groove through the tension springs; the annular airbag is fixed on the lower moving ring and located on the side of the lower moving ring facing the metal diaphragm; the drive rod is fixed to the end face of the driven wheel, and can receive the second branch power and rotate with the driven wheel; the downward transmission assembly is used to receive the rotational power of the drive rod and convert the rotational power into downward pressure on the lower moving ring, and stretch the multiple tension springs so that the annular airbag can contact the metal diaphragm.

7. The metal diaphragm capacitor composite vacuum gauge as described in claim 6, characterized in that, The pressing transmission assembly includes: a pressing plate, a pressing rod, and a pressing ring; The lower pressure plate is disposed at the end of the drive rod opposite to the driven wheel and can rotate with the drive rod; the lower pressure rod is fixed on the lower pressure plate; the lower pressure ring is fixed on the surface of the lower moving ring opposite to the driven wheel, and the side wall of the lower pressure ring is provided with an inclined surface; When the lower pressure plate drives the lower pressure rod to rotate, the lower pressure rod can contact the inclined surface and generate downward pressure on the lower pressure ring, causing the lower pressure ring to drive the lower moving ring to move downward.

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