A torsional micromechanical structure, a magnetic sensor and a method for manufacturing the same

Abstract

The application discloses a torsional micromechanical structure, a magnetic sensor and a preparation method thereof, and particularly relates to the technical field of micro-electro-mechanical systems. The torsional micromechanical structure comprises a resonance structure and at least one set of constraint units arranged in the resonance structure. The constraint units comprise an anchor point, an anchor point side beam, a resonance structure side beam and a connecting beam. The application also provides a magnetic sensor based on the above structure, which comprises an insulating layer, a metal coil and a coil electrode deposited on the resonance structure, and a capacitance structure for detection or driving. The application further provides a preparation method of the torsional micromechanical structure and the magnetic sensor. The application sets the constraint units in the resonance structure, and embeds the anchor point in the structure, so that the torsional mode is the first resonance mode in the case of a short radial side, the structure size is significantly reduced, the invalid coil length is shortened, the power consumption and the coil resistance noise are reduced, and the performance and the integration of the magnetic sensor are improved.

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