A patterned substrate for projection imaging and a method of making the same

By using stacked color functional film layers and light-shielding film layers on the projection imaging substrate, and achieving alignment through overprinting marks, the problem of high overprinting accuracy between the color film layer and the light-shielding layer is solved, enabling high-yield production of high-contrast projection patterns and improving design freedom.

CN122431065APending Publication Date: 2026-07-21HANGZHOU MDK OPTO ELECTRONICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HANGZHOU MDK OPTO ELECTRONICS CO LTD
Filing Date
2026-06-23
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

In existing projection imaging devices, the overlay precision requirements for the color film layer and the light-shielding layer are extremely high, resulting in a narrow process window, low yield, limited design freedom, and difficulty in achieving high-precision, multi-color, and high-contrast projection patterns.

Method used

The first substrate layer and the second substrate layer are stacked. The first substrate layer is covered with a colored functional film layer, and the second substrate layer is covered with a light-shielding film layer except for the overprinted mark and the preset pattern area. Alignment is achieved by overprinting the mark. The colored pattern is exposed by the colored functional film layer, and the black background is composed of the light-shielding film layer, which reduces the alignment accuracy requirements.

Benefits of technology

It significantly broadens the process window, improves product yield, ensures high contrast and edge clarity of the projected pattern, reduces the overlay accuracy requirements of the photolithography equipment, and improves design flexibility.

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Abstract

The application discloses a kind of graphical substrates for projection imaging, including first substrate layer and second substrate layer being arranged in stack and being aligned by overlay mark, the side surface of first substrate layer towards the second substrate layer, the whole surface is covered with color functional film layer except overlay mark area, the side surface of second substrate layer towards the first substrate layer, the whole surface is covered with light shielding film layer except overlay mark area and preset pattern hollow area, wherein, light shielding film layer is covered on the color functional film layer, and pattern hollow area exposes color functional film layer, to form color pattern composed of exposed color functional film layer and dark background composed of light shielding film layer under projection light illumination.The application can fundamentally decouple the strong correlation between pattern edge precision and lithography overlay precision, so as to greatly relax the requirement for equipment overlay precision while ensuring and even improving the optical performance of the final projection pattern.
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