Impedance matching method and device, electronic device and computer readable storage medium

By determining the operating frequency of each graded pulse with its characteristic differences in a multi-level pulse scenario, the problem of inaccurate frequency setting in the prior art is solved, and higher matching accuracy, stability and power transmission efficiency are achieved.

CN122431476APending Publication Date: 2026-07-21SHENZHEN CSL VACUUM SCI & TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHENZHEN CSL VACUUM SCI & TECH CO LTD
Filing Date
2026-06-16
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

In existing technologies, the operating frequency of each pulse in a multi-pulse scenario depends on manual setting, making it difficult to adaptively adjust according to the actual frequency characteristics of each pulse. This results in poor impedance matching, insufficient matching stability, and inadequate power transmission efficiency.

Method used

By acquiring multiple graded pulses from the original power signal, multiple graded sweep frequency signals are formed. The characteristic differences between each graded sweep frequency signal and the corresponding graded pulse are calculated to determine the operating frequency corresponding to each graded pulse. Impedance matching processing is then performed during the output period of each graded pulse.

Benefits of technology

It improves impedance matching accuracy and stability in multi-stage pulse scenarios, enhances power transmission efficiency, and solves the problems of inaccurate frequency setting and cumbersome operation in existing technologies.

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Abstract

The application discloses an impedance matching method and device, electronic equipment and a computer readable storage medium. The method comprises: obtaining a current original power signal, the original power signal comprising a plurality of preset hierarchical pulses in each signal period; for each hierarchical pulse, a plurality of hierarchical frequency sweep signals are formed according to a plurality of hierarchical frequencies in a corresponding hierarchical continuous frequency range; the characteristic difference between each hierarchical frequency sweep signal and the corresponding hierarchical pulse is calculated, and the working frequency corresponding to each hierarchical pulse is determined according to the characteristic difference; and in the output period corresponding to each hierarchical pulse, the impedance matching process is performed using the working frequency corresponding to the hierarchical pulse. By determining the working frequency of different hierarchical pulses and performing impedance matching at different times, the adaptive ability, accuracy and stability of impedance matching in the multi-level pulse scene are improved.
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Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular to an impedance matching method and apparatus, electronic equipment and computer-readable storage medium. Background Technology

[0002] Impedance matching technology is widely used in radio frequency (RF) systems, power transmission systems, and plasma processing systems. Its main function is to adjust the impedance relationship between the signal source and the load to reduce reflected power and transmission loss, thereby improving power transmission efficiency and system stability. In these applications, the RF power supply can act as a power signal source, outputting the raw power signal. The impedance matching device adjusts the matching network according to the set operating frequency to ensure that the output power signal of the RF power supply matches the frequency characteristics of the load.

[0003] In existing technologies, impedance matching devices typically operate by having the user pre-set the operating frequency via a control interface. After acquiring the input RF signal, the impedance matching device performs impedance matching operations based on this operating frequency. This method is relatively simple to implement and can meet basic matching requirements in scenarios with minimal load variations and stable process conditions.

[0004] However, with increasingly stringent process control requirements, more and more RF systems are employing multi-stage pulse technology in their manufacturing processes. Multi-stage pulse technology typically involves setting multiple pulses of different levels within a single signal cycle. By segmenting and adjusting the amplitude, frequency, or duration of each pulse level, more precise control over energy distribution during the process can be achieved, thereby improving processing quality and process adaptability. In such applications, the load conditions and frequency requirements corresponding to different pulse levels may differ, therefore the applicable operating frequencies for each pulse level may also vary.

[0005] However, in existing technologies, the setting of operating frequencies for multi-level pulses typically still relies on manual configuration. This means the user sets the corresponding frequency for each pulse level and performs impedance matching according to the preset frequency during subsequent operation. This method lacks adaptability to changes in the operating conditions of multi-level pulses. On the one hand, when the actual frequency characteristics corresponding to different pulse levels change, the manually preset fixed frequency is difficult to adjust in a timely manner, easily leading to a decrease in matching performance at some pulse levels. On the other hand, in scenarios with many pulse levels, complex process conditions, or rapid load changes, manually setting the frequency level by level is not only cumbersome but also makes it difficult to guarantee the accuracy and real-time performance of the frequency setting.

[0006] Furthermore, in multi-stage pulse scenarios, waveform rising and falling edges or pulse transition intervals may exist during the graded pulse switching process. If the data within these transition intervals is directly used for frequency calculation, the frequency determination result is easily affected by waveform instability, thereby further reducing the accuracy and stability of impedance matching.

[0007] Therefore, how to determine a more suitable operating frequency for multiple graded pulses within a signal cycle, and perform impedance matching processing during the corresponding graded pulse output period to improve the matching accuracy, stability, and power transmission efficiency in multi-stage pulse scenarios has become a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0008] This application provides an impedance matching method and apparatus, electronic device, and computer-readable storage medium to at least solve the technical problem in the prior art where the operating frequency of each pulse level in a multi-pulse scenario depends on manual setting and is difficult to adaptively adjust according to the actual frequency characteristics of each pulse level, resulting in poor impedance matching effect.

[0009] According to a first aspect of this application, an impedance matching method is provided, comprising: acquiring a current raw power signal, wherein the raw power signal includes multiple preset graded pulses in each signal cycle; for each graded pulse, forming multiple graded sweep frequency signals according to multiple graded frequencies within the corresponding continuous frequency range; calculating the characteristic difference between each graded sweep frequency signal and the corresponding graded pulse, and determining the operating frequency corresponding to each graded pulse based on the characteristic difference; and performing impedance matching processing using the operating frequency corresponding to the graded pulse during the output time period corresponding to each graded pulse.

[0010] In some implementations, the characteristic difference between each graded sweep frequency signal and its corresponding graded pulse is calculated, and the operating frequency of each graded pulse is determined based on the characteristic difference. This includes: calculating the characteristic difference between each graded sweep frequency signal and its corresponding graded pulse; and determining the graded frequency corresponding to the graded sweep frequency signal with the smallest characteristic difference as the operating frequency of the corresponding graded pulse.

[0011] In some implementations, the method further includes: acquiring a pulse synchronization line; in response to the pulse synchronization line indicating the start of a signal period, timing the pulse time period corresponding to each graded pulse according to the duration of each graded pulse; and within the pulse time period corresponding to each graded pulse, performing characteristic difference calculation between each graded sweep frequency signal and the corresponding graded pulse.

[0012] In some implementations, the method further includes: acquiring masking time information corresponding to each graded pulse; and removing data within the masking time indicated by the masking time information when calculating the characteristic differences between each graded sweep frequency signal and the corresponding graded pulse.

[0013] In some implementations, for each graded pulse, multiple graded sweep signals are generated based on multiple graded frequencies within the corresponding continuous frequency range, and the characteristic differences between each graded sweep signal and the corresponding graded pulse are calculated. This includes: generating multiple graded sweep signals for multiple graded frequencies corresponding to any graded pulse within a sweep cycle; calculating the characteristic differences between the generated multiple graded sweep signals and the graded pulse; and determining the operating frequency of the graded pulse in the sweep cycle based on the calculated characteristic differences.

[0014] In some implementations, for each graded pulse, multiple graded sweep signals are generated based on multiple graded frequencies within the corresponding continuous frequency range, and the characteristic differences between each graded sweep signal and the corresponding graded pulse are calculated. This includes: in each sweep cycle, only one graded sweep signal is generated for one graded frequency corresponding to a target graded pulse, and the characteristic differences between the graded sweep signal and the target graded pulse are calculated; in the current sweep cycle, impedance matching processing is performed on the target graded pulse using the operating frequency determined in the previous sweep cycle; and impedance matching processing is performed on other graded pulses using their most recently determined operating frequencies.

[0015] In some implementations, the method further includes: for each graded pulse, determining the corresponding center frequency; determining the sweep width based on the corresponding center frequency; and determining the graded continuous frequency range corresponding to the graded pulse based on the sweep width and the corresponding center frequency.

[0016] In some implementations, multiple graded sweep signals are formed based on multiple graded frequencies within a corresponding graded continuous frequency range, including: for each graded pulse, determining a corresponding sweep range; within the corresponding sweep range, determining a starting frequency and a resolution; generating multiple reference frequency points within the corresponding sweep range based on the starting frequency and resolution; and generating a corresponding graded sweep signal based on the frequency of each reference frequency point.

[0017] In some implementations, multiple graded sweep signals are generated based on multiple graded frequencies within the corresponding graded continuous frequency range, and the characteristic differences between each graded sweep signal and its corresponding graded pulse are calculated. This includes any of the following methods: generating graded sweep signals corresponding to all graded frequencies within the corresponding graded continuous frequency range at once, and calculating the characteristic differences between each graded sweep signal and its corresponding graded pulse respectively; or generating multiple graded sweep signals corresponding to multiple graded frequencies at once, and calculating the characteristic differences between each batch of graded sweep signals and its corresponding graded pulse in batches.

[0018] In some implementations, the feature differences are calculated based on the waveform characteristics of the graded sweep frequency signal and the corresponding graded pulses. The waveform characteristics include at least one of the following: peaks, troughs, phase, amplitude, rising edge, falling edge, and waveform approximation rate.

[0019] According to a second aspect of this application, an impedance matching device is provided, comprising: an acquisition module for acquiring a current raw power signal, wherein the raw power signal includes multiple preset graded pulses in each signal cycle; a generation module for generating multiple graded sweep signals for each graded pulse based on multiple graded frequencies within the corresponding continuous frequency range; a calculation module for calculating the characteristic differences between each graded sweep signal and the corresponding graded pulse, and determining the operating frequency corresponding to each graded pulse based on the characteristic differences; and an execution module for performing impedance matching processing using the operating frequency corresponding to each graded pulse during the output time period corresponding to each graded pulse.

[0020] In some embodiments, the apparatus further includes a synchronization processing module for acquiring a pulse synchronization line and, in response to the pulse synchronization line indicating the start of a signal cycle, timing the pulse period corresponding to each graded pulse according to the duration of each graded pulse; wherein, the calculation module is further configured to perform characteristic difference calculation between each graded sweep frequency signal and the corresponding graded pulse within the pulse period corresponding to each graded pulse.

[0021] In some implementations, the synchronization processing module is also used to acquire the masking time information corresponding to each graded pulse; the calculation module is also used to remove data within the masking time indicated by the masking time information when calculating the characteristic differences between each graded sweep frequency signal and the corresponding graded pulse.

[0022] According to a third aspect of this application, an electronic device is provided, comprising: one or more processors; a memory for storing one or more programs; and, when the one or more programs are executed by the one or more processors, causing the one or more processors to implement an impedance matching method according to an embodiment of this application.

[0023] According to a fourth aspect of this application, a computer-readable storage medium is provided, on which a computer program is stored, which, when executed by a processor, implements an impedance matching method according to an embodiment of this application.

[0024] The impedance matching method, apparatus, electronic device, and computer-readable storage medium provided in this application acquire the original power signal including multiple preset graded pulses in each signal cycle. For each graded pulse, multiple graded sweep frequency signals are formed according to multiple graded frequencies within the corresponding continuous frequency range. The characteristic differences between each graded sweep frequency signal and the corresponding graded pulse are calculated, and the operating frequency corresponding to each graded pulse is determined based on the characteristic differences. Then, impedance matching processing is performed using the corresponding operating frequency during the output time period corresponding to each graded pulse. This eliminates the reliance on manually setting a fixed frequency for each graded pulse. Instead, it enables frequency search and matching control based on the actual frequency characteristics of different graded pulses within a signal cycle. This solves the problems in the prior art where the operating frequency of each graded pulse in a multi-level pulse scenario mainly depends on manual setting, fixed frequencies are difficult to adapt to complex process changes, and frequency requirements of different pulse levels lead to insufficient impedance matching accuracy, poor matching stability, and low power transmission efficiency. This achieves the technical effect of improving the adaptive capability, operating frequency determination accuracy, impedance matching stability, and power signal transmission efficiency of impedance matching in multi-level pulse scenarios.

[0025] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0026] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings: Figure 1 This is a schematic diagram of a power signal system according to the impedance matching method of the embodiments of this application; Figure 2 This is a schematic flowchart of an impedance matching method according to an embodiment of this application; Figure 3 This is a schematic diagram of the impedance matching device according to an embodiment of this application; Figure 4 This is a schematic diagram of the structure of an embodiment of the electronic device provided in this application. Detailed Implementation

[0027] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0028] In scenarios involving radio frequency power control, plasma process control, and power transmission control, impedance matching devices are typically used to adjust the impedance relationship between the power signal source and the load in order to reduce reflected power, improve power transmission efficiency, and maintain stable system operation. Figure 1 A schematic diagram of a power signal system according to an embodiment of the present application is shown. Figure 1 As shown, the power signal system may include a master unit 11 and a slave unit 12, wherein the slave unit 12 may be equipped with an impedance matching device 121 and a processing module 122. The master unit 11 can be used to perform overall control of the process flow, power output, or control parameters, and the slave unit 12 can be used to receive control information from the master unit 11 and perform specific processing related to power matching through the impedance matching device 121 and the processing module 122. Of course, in other embodiments, the structural division between the master unit 11 and the slave unit 12 can be adjusted according to the actual system architecture, and this application does not limit it in this way.

[0029] In existing technologies, impedance matching is typically based on a single operating frequency or a manually preset operating frequency. For example, users can set a target operating frequency for the system through a control interface, and the impedance matching unit 121 then adjusts the matching network parameters based on this operating frequency to achieve a good impedance fit between the power signal and the load. In some relatively stable application scenarios, this method can meet basic requirements. However, with the widespread application of multi-stage pulse technology, a signal cycle often contains multiple pulses of different levels. Different levels of pulses may differ in amplitude, frequency, duration, or corresponding load conditions, and therefore their suitable operating frequencies may also differ. If the existing method of manually setting a fixed frequency for each pulse level is still used, it is difficult to adaptively adjust according to the actual frequency characteristics of different pulse levels, which can easily lead to problems such as large matching deviations for some pulse levels, decreased overall matching stability, and insufficient power transmission efficiency.

[0030] Furthermore, during multi-stage pulse switching, the rising edge, falling edge, or inter-stage switching interval of the waveform often exhibits certain instability. Directly basing frequency determination or matching control on data from these transition intervals may introduce errors, leading to inaccurate operating frequency determination and further affecting impedance matching results. Therefore, determining more suitable operating frequencies for multiple staged pulses within a signal cycle and performing corresponding impedance matching processing during the output period of each staged pulse has become a technical problem that needs to be solved in this field.

[0031] To address the aforementioned issues, this application provides an impedance matching method. This method acquires the current raw power signal, which includes multiple preset graded pulses in each signal cycle. For each graded pulse, multiple graded sweep signals are generated based on multiple graded frequencies within the corresponding continuous frequency range. The characteristic differences between each graded sweep signal and its corresponding graded pulse are calculated, and the operating frequency corresponding to each graded pulse is determined based on these differences. During the output time period corresponding to each graded pulse, impedance matching processing is performed using the operating frequency corresponding to that graded pulse. In other words, this application does not determine a single uniform operating frequency for the entire raw power signal, but rather performs frequency sweeping and difference comparison separately for each graded pulse within a signal cycle, determines the corresponding operating frequency for each graded pulse, and then performs matching control according to its respective operating frequency within the corresponding time period.

[0032] refer to Figure 1 The arithmetic module 122 can generate a graded sweep frequency signal for multiple graded pulses in the original power signal, calculate the characteristic differences, and determine the operating frequency corresponding to each graded pulse. The impedance matching device 121 can perform impedance matching according to the operating frequency determined by the arithmetic module 122 during the output period corresponding to each graded pulse. By cooperating with the master device 11 and the slave device 12, this scheme can be applied to various power control systems or process systems.

[0033] According to the impedance matching method of this application embodiment, since a graded sweep frequency signal is generated and the operating frequency is determined separately for different graded pulses, the problem that the operating frequency of each pulse level mainly depends on manual fixed setting in the prior art can be avoided, making the determination of the operating frequency more closely match the actual frequency characteristics of each graded pulse. Furthermore, performing impedance matching processing according to the respective operating frequency during the output period corresponding to each graded pulse can improve the matching accuracy and matching stability in multi-level pulse scenarios, reduce the mismatch risk caused by uniform or fixed frequency setting, and help improve the power signal transmission efficiency and system operation effect.

[0034] Example 1 Figure 2A schematic flowchart of an impedance matching method according to an embodiment of this application is shown. Figure 2 As shown, the impedance matching method according to an embodiment of this application may include steps S101 to S104. This method can be performed by... Figure 1 The slave device 12 shown can be executed, for example, by the arithmetic module 122 in conjunction with the impedance matching device 121; it can also be executed by other hardware modules, software modules or hardware-software combination modules with similar functions, and this application does not limit this.

[0035] S101, obtain the current raw power signal.

[0036] In step S101, the raw power signal to be processed for impedance matching can be acquired first. This raw power signal may include multiple preset graded pulses in each signal cycle and may be provided by an RF power supply, pulse power supply, or other power output unit, and input to the impedance matching related processing system. The term "current raw power signal" can be understood as the power signal currently being output or about to be output to the load side at the current moment or in the current process stage.

[0037] For example, the raw power signal includes multiple preset graded pulses in each signal cycle. Here, "graded pulse" can refer to multiple pulse segments of different levels that appear sequentially in a predetermined order within a cycle. Different graded pulses may differ in at least one of the following: amplitude, frequency, duration, duty cycle, or corresponding load characteristics. For example, in one signal cycle, a first-level pulse may be output first, followed by a second-level pulse, and then a third-level pulse, forming a complete graded pulse sequence. The number of graded pulses can be two, three, or more; this application does not limit this.

[0038] Furthermore, in this embodiment, the multiple graded pulses can be predefined process pulse levels or pulse segments identified by the system from the original power signal according to preset rules. In other words, the graded pulses can be a structure pre-configured on the control side or a structure identified by the acquisition side based on the signal period and pulse boundaries. As long as multiple pulse levels in different output periods can be distinguished and subsequent frequency sweeping and matching processing can be performed separately, the solution in this application is applicable.

[0039] Furthermore, in this embodiment of the application, in step S101, the corresponding center frequency can be determined for each graded pulse; the sweep width can be determined based on the corresponding center frequency; and the graded continuous frequency range corresponding to the graded pulse can be determined based on the sweep width and the corresponding center frequency.

[0040] For example, after acquiring the raw power signal and identifying each graded pulse, the center frequency of each graded pulse can be further determined. This center frequency can be a preset frequency, a historical operating frequency, an empirical frequency, the frequency obtained from the last matching, or a target frequency issued by the host 11. Then, a sweep width can be set around this center frequency, for example, extending a certain range above and below the center frequency, thereby forming a continuous frequency range corresponding to the graded pulse. In this way, the subsequent sweep process can be performed within a more targeted frequency range, which helps to reduce invalid calculations and improve the efficiency and accuracy of operating frequency search.

[0041] S102. For each graded pulse, multiple graded sweep frequency signals are generated according to multiple graded frequencies within the corresponding continuous frequency range.

[0042] In step S102, for each graded pulse identified in step S101, multiple graded frequencies can be selected within its corresponding continuous frequency range, and multiple graded sweep signals can be formed based on these graded frequencies. The "graded sweep signal" in this embodiment can be understood as a reference signal, test signal, or frequency candidate signal used for feature comparison with the corresponding graded pulse; its essence is to provide a basis for comparison at different frequencies for subsequent difference calculations.

[0043] For example, different graded pulses can correspond to different graded continuous frequency ranges, so the sets of graded sweep signals generated for different graded pulses can also be different. For example, the first graded pulse can correspond to the first frequency range, and the second graded pulse can correspond to the second frequency range. The system generates multiple sweep signals corresponding to the graded frequencies within their respective ranges, making the search for the operating frequency of each graded pulse more targeted, rather than using the same set of frequency candidate values ​​for all pulses.

[0044] Furthermore, the process of generating a hierarchical frequency sweep signal can be achieved through software calculation, hardware frequency synthesis, circuit simulation, or table lookup. This application does not limit the specific implementation form of the hierarchical frequency sweep signal, as long as it can generate multiple hierarchical frequency sweep signals that can be used for comparison based on multiple hierarchical frequencies.

[0045] Furthermore, in this embodiment of the application, the step of forming multiple graded sweep frequency signals based on multiple graded frequencies within a corresponding graded continuous frequency range may include: for each graded pulse, determining the corresponding sweep frequency range; within the corresponding sweep frequency range, determining the starting frequency and resolution; generating multiple reference frequency points within the corresponding sweep frequency range based on the starting frequency and resolution; and generating a corresponding graded sweep frequency signal based on the frequency of each reference frequency point.

[0046] In this implementation, step S102 can be further refined into a frequency point generation process. Specifically, a corresponding sweep frequency range can be determined for each graded pulse. This sweep frequency range can be the same as the aforementioned graded continuous frequency range, or it can be further determined from the graded continuous frequency range. Then, a starting frequency and resolution can be selected within this sweep frequency range. Here, the resolution can be used to characterize the interval between adjacent reference frequency points. Based on the starting frequency and resolution, the system can sequentially generate multiple reference frequency points, for example, by generating multiple candidate frequencies at fixed intervals, increasing or decreasing them sequentially. Then, corresponding graded sweep frequency signals are formed based on these reference frequency points. In this way, the generation process of the sweep frequency signal can be made more regular, configurable, and easy to implement.

[0047] Furthermore, in this embodiment of the application, the step of generating multiple graded sweep frequency signals based on multiple graded frequencies within the corresponding graded continuous frequency range and calculating the characteristic differences between each graded sweep frequency signal and its corresponding graded pulse may include any of the following methods: generating graded sweep frequency signals corresponding to all graded frequencies within the corresponding graded continuous frequency range at once, and calculating the characteristic differences between each graded sweep frequency signal and its corresponding graded pulse respectively; or, generating multiple graded sweep frequency signals corresponding to multiple graded frequencies at once, and calculating the characteristic differences between each batch of graded sweep frequency signals and its corresponding graded pulse in batches.

[0048] For example, different data processing strategies can be used for the difference calculation in step S102 and subsequent step S103. For instance, when the system has sufficient computing resources, the sweep frequency signals of all graded frequencies corresponding to a certain graded pulse can be generated at once, and all feature differences can be calculated at once or centrally. However, when there are limitations in system computing power, cache space, or real-time requirements, only the sweep frequency signals corresponding to multiple graded frequencies can be generated at once, and then the feature differences between each batch of signals and the corresponding graded pulse can be calculated step by step. By using both one-time generation and batch generation methods, the solution of this application can be more flexibly adapted to different hardware resource environments.

[0049] S103. Calculate the characteristic differences between each graded sweep frequency signal and the corresponding graded pulse, and determine the operating frequency corresponding to each graded pulse based on the characteristic differences.

[0050] In step S103, the graded sweep frequency signals formed in step S102 are compared with their corresponding graded pulses, the characteristic differences between them are calculated, and the operating frequency corresponding to each graded pulse is determined based on the comparison results. Here, "corresponding" can be understood as: a graded sweep frequency signal is only compared with its own graded pulse, and not mixed with other graded pulses for comparison, thereby ensuring that the operating frequency of each graded pulse is determined independently.

[0051] For example, the characteristic difference can be used to represent the degree of similarity between the graded sweep frequency signal and the graded pulse in terms of waveform, phase, amplitude, or other characteristics. Generally speaking, the smaller the characteristic difference, the closer the graded sweep frequency signal formed at the corresponding graded frequency is to the actual graded pulse, and therefore the more suitable it is as the operating frequency of the graded pulse. Of course, in other implementations, the similarity or approximation rate can be obtained first, and then the characteristic difference can be obtained through conversion; this application does not limit this.

[0052] Furthermore, after obtaining the corresponding characteristic difference results for each graded pulse, the graded frequency corresponding to the optimal result can be selected as the operating frequency of that graded pulse. Therefore, the final operating frequencies obtained for different graded pulses can be the same or different, depending on the actual operating conditions and their respective difference calculation results.

[0053] Furthermore, in this embodiment of the application, the step of calculating the characteristic difference between each graded sweep frequency signal and the corresponding graded pulse, and determining the operating frequency of each graded pulse based on the characteristic difference, may include: calculating the characteristic difference between each graded sweep frequency signal and the corresponding graded pulse respectively; and determining the graded frequency corresponding to the graded sweep frequency signal with the smallest characteristic difference as the operating frequency of the corresponding graded pulse.

[0054] For example, the minimum difference principle can be used to determine the operating frequency. Specifically, for a given graded pulse, multiple characteristic difference values ​​corresponding to multiple candidate graded frequencies can be obtained, and the minimum characteristic difference value is selected. The graded frequency corresponding to this minimum characteristic difference value is then determined as the operating frequency of the graded pulse. This method is simple and direct to implement, easy to implement using comparators, sorters, or program logic, and has good engineering operability.

[0055] In addition, in this embodiment of the application, step S103 may also obtain a pulse synchronization line; in response to the pulse synchronization line indicating the start of a signal cycle, the pulse period corresponding to each graded pulse is timed according to the duration of each graded pulse; and within the pulse period corresponding to each graded pulse, the characteristic difference calculation between each graded sweep frequency signal and the corresponding graded pulse is performed.

[0056] For example, the start time of a signal cycle can be marked using a pulse synchronization line. After the start of a cycle, the output period of each graded pulse is timed according to its preset or identified duration. For instance, when a specified level change occurs on the synchronization line, a new signal cycle can be considered to have begun. Subsequently, data is collected within the corresponding time period according to the start and end time windows of each graded pulse, and the difference between the corresponding graded sweep frequency signal and the graded pulse is calculated within that time period. This ensures that the data from different graded pulses are not mixed up, improving the accuracy of graded identification and frequency determination.

[0057] In addition, in this embodiment of the application, step S103 can further obtain the masking time information corresponding to each graded pulse; when calculating the characteristic difference between each graded sweep frequency signal and the corresponding graded pulse, data within the masking time indicated by the masking time information is removed.

[0058] For example, considering the potential waveform instability caused by rising edges, falling edges, and inter-stage transitions during graded pulse switching, masking time information can be set for each graded pulse. This masking time information indicates that data within a certain time window before and after the pulse start, before and after the pulse end, or near the inter-stage transition is not included in the characteristic difference calculation. By removing data within the masking time, the interference of transition waveforms on the difference calculation results can be reduced, making the finally determined operating frequency closer to the actual frequency characteristics of the stable pulse segment.

[0059] Furthermore, in this embodiment, the feature difference is calculated based on the waveform characteristics of the graded sweep signal and the corresponding graded pulse. The waveform characteristics include at least one of the following: peaks, troughs, phase, amplitude, rising edge, falling edge, and waveform approximation rate. For example, the feature difference calculation can be based on one or more waveform characteristics. For instance, the peak value, trough value, phase shift, amplitude information, rising edge shape, falling edge shape, or overall waveform approximation rate of the graded sweep signal and graded pulse can be extracted, and a difference evaluation index can be constructed based on these characteristics. The system can use only one feature, or it can combine two or more features for weighted calculation to improve the robustness and accuracy of the difference assessment.

[0060] Furthermore, in this embodiment of the application, the step of forming multiple graded sweep frequency signals based on multiple graded frequencies within the corresponding continuous frequency range for each graded pulse, and calculating the characteristic differences between each graded sweep frequency signal and the corresponding graded pulse, may further include: forming multiple graded sweep frequency signals for multiple graded frequencies corresponding to any graded pulse within a sweep frequency cycle; calculating the characteristic differences between the multiple graded sweep frequency signals formed and the graded pulse; and determining the operating frequency of the graded pulse in the sweep frequency cycle based on the calculated characteristic differences.

[0061] That is, a static frequency sweep mode can be used in the embodiments of this application. Specifically, within one frequency sweep cycle, multiple graded frequency sweep signals are formed for multiple candidate graded frequencies corresponding to a certain graded pulse. Within this cycle, the characteristic differences between these graded frequency sweep signals and the graded pulse are calculated, and then the optimal operating frequency is selected from multiple difference results at once. The static frequency sweep mode is suitable for scenarios with strong computing power and where it is desirable to obtain a relatively complete difference distribution result of a certain graded pulse quickly.

[0062] Furthermore, in this embodiment, the step of forming multiple graded sweep signals based on multiple graded frequencies within the corresponding continuous frequency range for each graded pulse, and calculating the characteristic differences between each graded sweep signal and the corresponding graded pulse, may further include: in each sweep cycle, forming only one graded sweep signal for one graded frequency corresponding to a target graded pulse, and calculating the characteristic differences between the graded sweep signal and the target graded pulse; in the current sweep cycle, performing impedance matching processing on the target graded pulse using the operating frequency determined in the previous sweep cycle; and performing impedance matching processing on other graded pulses using their most recently determined operating frequencies.

[0063] That is, a dynamic frequency sweep mode can be adopted in the embodiments of this application. Specifically, it is not necessary to calculate all candidate frequencies simultaneously in each frequency sweep cycle. Instead, a frequency sweep signal is formed for only one candidate frequency of a target graded pulse, and difference calculation is performed. For target graded pulses that have not been updated in the current cycle, the working frequency determined in the previous frequency sweep cycle can be temporarily used for impedance matching; for other graded pulses, their most recently determined working frequencies continue to be used. Through this step-by-step update method, the amount of computation and data processing pressure in a single frequency sweep cycle can be reduced, which is suitable for scenarios with limited hardware resources or those that emphasize the continuity of real-time operation.

[0064] For example, the original power signal includes four levels of graded pulses in each signal cycle, denoted as Grade 1 pulse, Grade 2 pulse, Grade 3 pulse, and Grade 4 pulse, respectively. During impedance matching, the execution module can initially perform impedance matching using a predetermined frequency provided by the computation module. For dynamic frequency sweeping, the sweep range can be preset to 350kHz to 450kHz with a resolution of 1kHz, and the sweep can be performed cycle-by-cycle using the signal cycle as the sweep unit. That is, within each sweep cycle, the computation module scans and calculates characteristic differences for only one candidate frequency of a target grade pulse, while the execution module performs impedance matching for the target grade pulse using the operating frequency corresponding to the optimal candidate result obtained in the previous sweep cycle, while keeping the most recently determined operating frequency unchanged for other grade pulses.

[0065] Specifically, for a Level 1 pulse, during its corresponding dynamic frequency sweep phase, other Level 1 pulse periods can maintain their last determined operating frequencies for impedance matching. In the first cycle, the arithmetic module can scan a frequency of 351kHz within the pulse period corresponding to the Level 1 pulse and calculate the characteristic differences at this scan frequency, such as obtaining a first approximate ratio value; simultaneously, the execution module still uses a predetermined frequency for impedance matching for the Level 1 pulse period within this first cycle. In the second cycle, the arithmetic module can continue scanning a frequency of 352kHz within the Level 1 pulse period and obtain a second approximate ratio value; the execution module then performs impedance matching within the Level 1 pulse period using the operating frequency corresponding to the first approximate ratio value obtained in the first cycle. Subsequently, as the cycle progresses, the arithmetic module can scan 353kHz, 354kHz up to 450kHz in 1kHz increments and obtain the corresponding approximate ratio values ​​or other characteristic difference values ​​respectively; the execution module then performs impedance matching in the current cycle using the corresponding candidate operating frequency obtained in the previous cycle. For example, in the 100th cycle, the arithmetic module scans a frequency of 450 kHz within the level 1 pulse period and obtains the 100th approximate ratio value. The execution module then performs impedance matching within the level 1 pulse period using the operating frequency corresponding to the approximate ratio value obtained in the 99th cycle. After all candidate frequencies corresponding to the level 1 pulse have been scanned, the arithmetic module can select the optimal result from multiple approximate ratio values ​​or characteristic difference values ​​obtained from the 1st to the 100th cycle, and determine the frequency corresponding to this optimal result as the operating frequency of the level 1 pulse in subsequent cycles.

[0066] For Level 2 pulses, the dynamic frequency sweep phase of Level 2 pulses can begin after the Level 1 pulse has completed its corresponding frequency range scan. During this phase, other Level 2 pulse periods can maintain their most recently determined operating frequencies. For example, in cycle 101, the arithmetic module can scan a frequency of 351 kHz within the Level 2 pulse period and obtain the 101st approximate ratio value; the execution module can then perform impedance matching using the operating frequency finally determined by the Level 1 pulse within the Level 1 pulse period. In cycle 102, the arithmetic module scans a frequency of 352 kHz within the Level 2 pulse period and obtains the 102nd approximate ratio value; the execution module then performs impedance matching using the operating frequency corresponding to the approximate ratio value obtained in cycle 101 within the Level 2 pulse period. This continues until cycle 200, when the arithmetic module completes its scan of the Level 2 pulse at 450 kHz and obtains the 200th approximate ratio value, and the execution module performs impedance matching using the operating frequency corresponding to the result from cycle 199 within the Level 2 pulse period. Then, the frequency corresponding to the optimal value can be selected from multiple approximate ratio values ​​or characteristic difference values ​​corresponding to the 101st to the 200th cycles, and determined as the working frequency of the level 2 pulse.

[0067] For level 3 pulses, the same dynamic frequency sweep method can be used. For example, in the 201st cycle, the calculation module can scan the frequency 351kHz within the level 3 pulse period and obtain the 201st approximate ratio value; the execution module can continue to perform impedance matching using the operating frequency determined by the level 2 pulse within the level 2 pulse period. In the 202nd cycle, the calculation module can scan the frequency 352kHz within the level 3 pulse period and obtain the 202nd approximate ratio value; the execution module then performs impedance matching using the operating frequency corresponding to the approximate ratio value obtained in the 201st cycle within the level 3 pulse period. As the cycle continues, the calculation module gradually completes the scanning of each candidate frequency in the range of 350kHz to 450kHz for the level 3 pulse, and after completing the scanning of all frequency points, selects the frequency corresponding to the optimal result from multiple approximate ratio values ​​or characteristic difference values ​​as the final operating frequency determined by the level 3 pulse. For example, in the 300th cycle, the arithmetic module can complete the scan of 450KHz and obtain the 300th approximate ratio value, and the execution module performs impedance matching at the working frequency corresponding to the result of the 299th cycle during the level 3 pulse period.

[0068] For level 4 pulses, the process can continue after the dynamic frequency sweep phase of level 3 pulses. For example, in cycle 301, the calculation module can scan the frequency 351kHz within the level 4 pulse period and obtain the 301st approximate ratio value; the execution module can perform impedance matching using the already determined operating frequency of the level 3 pulse within the level 3 pulse period. In cycle 302, the calculation module can scan the frequency 352kHz within the level 4 pulse period and obtain the 302nd approximate ratio value; the execution module then performs impedance matching using the operating frequency corresponding to the result of cycle 301 within the level 4 pulse period. This continues until cycle 400, where the calculation module completes the scan of the level 4 pulse at 450kHz and obtains the 400th approximate ratio value; the execution module then performs impedance matching using the operating frequency corresponding to the result of cycle 399 within the level 4 pulse period. Afterwards, the frequency corresponding to the optimal result can be determined from the multiple approximate ratio values ​​or characteristic difference values ​​from cycle 301 to cycle 400, serving as the final operating frequency of the level 4 pulse.

[0069] As can be seen from the above examples, in dynamic frequency sweep mode, for each level pulse, when the sweep range is 350kHz to 450kHz and the resolution is 1kHz, 100 candidate frequency points can be obtained. Therefore, completing the frequency sweep of one level pulse requires 100 sweep cycles. When the original power signal includes 4 levels of pulses, completing the dynamic frequency sweep of the 4 levels of pulses sequentially requires 400 sweep cycles. Although this method increases the total number of sweep cycles compared to calculating all candidate frequencies of all levels of pulses in a single cycle, the computational load and storage space usage per cycle can be significantly reduced because each sweep cycle only calculates one candidate frequency of a target level pulse. This is beneficial for implementing impedance matching control of multi-level pulses in scenarios with limited processor computing power, small cache resources, or systems that emphasize continuous real-time operation. Meanwhile, before the target level pulse has completed scanning of all candidate frequencies, the execution module can still use the operating frequency corresponding to the result of the previous cycle, or use the predetermined frequency to continuously perform impedance matching in the initial stage, so that the dynamic frequency sweep process and the actual matching process can proceed in parallel, thereby taking into account both frequency update capability and system operation continuity.

[0070] S104. During the output period corresponding to each graded pulse, perform impedance matching processing using the operating frequency corresponding to the graded pulse.

[0071] In step S104, the corresponding operating frequency of each graded pulse, determined in step S103, can be called during the corresponding time period when each graded pulse is actually output or applied to the load, and impedance matching processing can be performed accordingly. That is to say, different graded pulses can use different operating frequencies for matching control during their respective output periods, instead of using a single uniform operating frequency throughout the entire signal cycle.

[0072] For example, impedance matching can be performed by Figure 1 The impedance matching module 121 performs the operation. The impedance matching module 121 can adjust the operating state of the capacitors, inductors, switch arrays, or other adjustable matching units in the matching network according to the operating frequency corresponding to the current graded pulse, making the impedance relationship between the power signal source and the load more closely matched, thereby reducing reflections and improving transmission efficiency. The arithmetic module 122 can output the operating frequency or corresponding control parameters corresponding to each graded pulse to the impedance matching module 121 to achieve time-division matching control within the output period of each graded pulse.

[0073] Furthermore, the system can switch to the corresponding operating frequency configuration during different pulse periods according to the timing sequence of the graded pulses. For example, the first operating frequency is used for impedance matching during the first graded pulse output period, the second operating frequency is switched during the second graded pulse output period, and the third operating frequency is switched again during the third graded pulse output period. This pulse-level time-division matching method allows the impedance matching to better match the frequency characteristics of each pulse level, thereby improving the overall matching effect.

[0074] According to the embodiments of this application, since it is possible to generate graded sweep frequency signals for multiple graded pulses within a signal cycle, calculate the characteristic differences, and determine the operating frequency separately, it can effectively solve the problems of inaccurate matching caused by the reliance on manual setting of the operating frequency of each pulse level in the multi-level pulse scenario in the prior art, the difficulty of adapting fixed frequencies to process changes, and the differences in frequency requirements of different pulse levels. It is also beneficial to improve the adaptive capability of impedance matching, the accuracy of operating frequency determination, the stability of impedance matching, and the power transmission efficiency in the multi-level pulse scenario.

[0075] Example 2 This embodiment is a device embodiment corresponding to the first embodiment. Figure 3 A schematic diagram of an impedance matching device according to an embodiment of this application is shown. Figure 3 As shown, the impedance matching device may include: an acquisition module 21, a generation module 22, a calculation module 23, and an execution module 24. The acquisition module 21 is used to acquire the current raw power signal; the generation module 22 is used to generate multiple graded sweep signals for each graded pulse based on multiple graded frequencies within the corresponding continuous frequency range; the calculation module 23 is used to calculate the characteristic differences between each graded sweep signal and its corresponding graded pulse, and determine the operating frequency corresponding to each graded pulse based on these characteristic differences; the execution module 24 is used to perform impedance matching processing using the operating frequency corresponding to each graded pulse during its corresponding output time period.

[0076] It should be noted that, Figure 3 The modules shown are only divided according to functional logic. In actual implementation, each module can be implemented by independent hardware units, or by the same processor executing different program instructions, or by a combination of hardware and software. This application does not limit this.

[0077] The acquisition module 21 can be used to acquire the current raw power signal.

[0078] In this embodiment, the acquisition module 21 can be used to acquire the current raw power signal from an RF power supply, power output module, sampling interface, or upstream control device. The raw power signal can be the signal actually output at the current process moment, or it can be a target power signal to be output or processed. The acquisition module 21 can also identify or read the signal periodic structure in the raw power signal to determine the multiple preset graded pulses contained therein.

[0079] For example, the acquisition module 21 can combine with a sampling circuit, an interface control unit, or a program parsing unit to periodically divide the original power signal and identify the start and end positions, duration, and order of each graded pulse. Through this module's processing, basic data corresponding to different graded pulses can be provided to the subsequent generation module 22 and calculation module 23.

[0080] Furthermore, in this embodiment, the acquisition module 21 can also be further used to determine the corresponding center frequency for each graded pulse; determine the sweep width based on the corresponding center frequency; and determine the graded continuous frequency range corresponding to the graded pulse based on the sweep width and the corresponding center frequency.

[0081] For example, the acquisition module 21 or its cooperating parameter determination unit can further determine the center frequency for each graded pulse and determine the sweep width based on the center frequency to form a corresponding graded continuous frequency range. Therefore, the subsequent generation module 22 can perform processing based on a more targeted frequency range when generating the graded sweep signal.

[0082] The generation module 22 can be used to generate multiple graded sweep frequency signals for each graded pulse based on multiple graded frequencies within the corresponding continuous frequency range.

[0083] In this embodiment, the generation module 22 can generate multiple candidate frequency sweep signals for each graded pulse based on the graded pulse information and corresponding frequency range information provided by the acquisition module 21. Different graded pulses can correspond to different sets of sweep signals, thereby providing an independent operating frequency search basis for different pulse levels.

[0084] For example, the generation module 22 can generate a graded sweep frequency signal through software calculation, frequency synthesizer control, table lookup generation, or waveform modeling. As long as multiple graded sweep frequency signals suitable for difference comparison can be generated based on multiple candidate graded frequencies, the requirements of this application can be met.

[0085] Furthermore, in this embodiment, the generation module 22 can be further configured to: determine the corresponding sweep frequency range for each graded pulse; determine the starting frequency and resolution within the corresponding sweep frequency range; generate multiple reference frequency points within the corresponding sweep frequency range based on the starting frequency and resolution; and generate a corresponding graded sweep frequency signal based on the frequency of each reference frequency point.

[0086] For example, the generation module 22 can further have a reference frequency point generation function. Specifically, the generation module 22 can first determine the corresponding sweep frequency range for each graded pulse, then generate multiple reference frequency points based on the starting frequency and resolution, and generate corresponding graded sweep frequency signals according to these reference frequency points. This structure facilitates the output of a candidate frequency set according to a unified rule, improving the configurability of the generation process.

[0087] Furthermore, in this embodiment, the generation module 22 can use any of the following methods to generate multiple graded sweep signals based on multiple graded frequencies within the corresponding graded continuous frequency range, and calculate the characteristic differences between each graded sweep signal and its corresponding graded pulse: generating graded sweep signals corresponding to all graded frequencies within the corresponding graded continuous frequency range at once, and calculating the characteristic differences between each graded sweep signal and its corresponding graded pulse respectively; or generating multiple graded sweep signals corresponding to multiple graded frequencies at once, and calculating the characteristic differences between each batch of graded sweep signals and their corresponding graded pulses in batches.

[0088] For example, generation module 22 can support generating all hierarchical frequency sweep signals at once, or it can support generating partial hierarchical frequency sweep signals in batches. This is compatible with the processing power of calculation module 23, ensuring both functional implementation and resource utilization efficiency.

[0089] The calculation module 23 can be used to calculate the characteristic differences between each graded sweep frequency signal and the corresponding graded pulse, and determine the operating frequency corresponding to each graded pulse based on the characteristic differences.

[0090] In this embodiment, the calculation module 23 can receive the graded sweep frequency signal output by the generation module 22 and the graded pulse data provided by the acquisition module 21, compare the features of the two, and output the operating frequency corresponding to each graded pulse. The calculation module 23 can be implemented using a software algorithm, or it can be implemented in conjunction with a digital signal processor, a comparison circuit, or a dedicated logic unit.

[0091] For example, the calculation module 23 processes each graded pulse separately, that is, it compares the graded pulse with its corresponding multiple graded sweep signals, calculates the difference results, and determines the optimal operating frequency of the graded pulse. Different graded pulses can obtain different operating frequencies, which are then called by the execution module 24 within the corresponding time period.

[0092] Furthermore, in this embodiment, the calculation module 23 can be further used to: calculate the characteristic differences between each graded sweep frequency signal and the corresponding graded pulse; and determine the graded frequency corresponding to the graded sweep frequency signal with the smallest characteristic difference as the working frequency of the corresponding graded pulse.

[0093] For example, the calculation module 23 can determine the optimal operating frequency for each graded pulse by comparing multiple difference values ​​and selecting the minimum value. This structure is straightforward and facilitates hardware logic or program flow design.

[0094] Furthermore, in this embodiment, the device may also include a synchronization processing module for acquiring a pulse synchronization line and performing periodic synchronization and pulse time interval timing. The calculation module 23 can cooperate with the synchronization processing module to perform corresponding feature difference calculations within the time intervals corresponding to each graded pulse, thereby preventing data cross-interference between different graded pulses.

[0095] In addition, in this embodiment of the application, the acquisition module 21 can also be used to acquire the masking time information corresponding to each graded pulse; when calculating the characteristic difference between each graded sweep frequency signal and the corresponding graded pulse, the data located within the masking time indicated by the masking time information is removed.

[0096] In this implementation, the calculation module 23 can also combine the masking time information to remove data in the pulse transition period and perform difference calculation only based on the data in the effective stable interval, thereby improving the accuracy of the working frequency determination.

[0097] Furthermore, in this embodiment, the feature difference can be calculated based on the waveform features of the graded sweep frequency signal and the corresponding graded pulse. The waveform features include at least one of the following: peak, trough, phase, amplitude, rising edge, falling edge, and waveform approximation rate.

[0098] For example, the calculation module 23 can call one or more feature extraction algorithms to analyze the waveform characteristics of the graded sweep frequency signal and the graded pulse, and calculate the difference value based on the extracted features to support fine matching control under different operating conditions.

[0099] Furthermore, in this embodiment of the application, the calculation module 23 can be further used to: generate multiple graded sweep signals for multiple graded frequencies corresponding to any graded pulse within a sweep cycle; calculate the characteristic differences between the generated multiple graded sweep signals and the graded pulse; and determine the operating frequency of the graded pulse in the sweep cycle based on the calculated characteristic differences.

[0100] That is, the calculation module 23 can support static frequency sweep mode, which means that the difference calculation of multiple candidate frequencies is completed in one frequency sweep cycle, and the working frequency of the corresponding graded pulse is output.

[0101] Furthermore, in this embodiment, the needle calculation module 23 can be further configured to: in each sweep frequency cycle, form a sweep frequency signal for only one sweep frequency corresponding to a target sweep pulse, and calculate the characteristic difference between the sweep frequency signal and the target sweep pulse; in the current sweep frequency cycle, perform impedance matching processing on the target sweep pulse using the operating frequency determined in the previous sweep frequency cycle; and perform impedance matching processing on other sweep pulses using their most recently determined operating frequencies.

[0102] That is, the calculation module 23 can also support dynamic frequency sweep mode, which updates the working frequency of the target graded pulse step by step according to the frequency sweep cycle, while other graded pulses use the working frequency that was determined most recently, so as to reduce the calculation pressure per cycle.

[0103] The execution module 24 can be used to perform impedance matching processing using the operating frequency corresponding to each graded pulse during the output period corresponding to each graded pulse.

[0104] In this embodiment, the execution module 24 can be connected to an impedance matching network, capacitor array, inductor array, adjustable matching unit, or impedance matching device 121 to call the corresponding operating frequency during different graded pulse output periods and perform corresponding impedance matching control. The execution module 24 can receive the operating frequency result output by the calculation module 23 and switch the corresponding matching control parameters according to the pulse timing.

[0105] For example, the execution module 24 can call the first operating frequency during the first graded pulse output period, call the second operating frequency during the second graded pulse output period, and so on. By performing differentiated matching control according to the graded pulse periods, each pulse level can obtain a more suitable matching state.

[0106] The impedance matching device provided in the embodiments of this application can achieve the same or similar technical effects as the method in the second embodiment, that is, it can determine the working frequency and perform impedance matching for each of the multi-level pulses, thereby improving the adaptive capability, accuracy, stability and power transmission efficiency of impedance matching in multi-level pulse scenarios.

[0107] Example 3 The above describes the internal function and structure of an impedance matching device, which can be implemented as an electronic device. Figure 4 This is a schematic diagram illustrating the structure of an embodiment of the electronic device provided by the present invention. (See diagram below.) Figure 4 As shown, the electronic device includes a memory 31 and a processor 32.

[0108] Memory 31 is used to store programs. In addition to the programs described above, memory 31 can also be configured to store various other data to support operation on the electronic device. Examples of this data include instructions for any application or method used to operate on the electronic device, contact data, phonebook data, messages, pictures, videos, etc.

[0109] The memory 31 can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk or optical disk.

[0110] The processor 32, coupled to the memory 31, executes the program stored in the memory 31 for performing, for example, the impedance matching method provided in Embodiment 1.

[0111] Furthermore, such as Figure 4 As shown, the electronic device may also include other components such as a communication component 33, a power supply component 34, an audio component 35, and a display 36. Figure 4 The diagram only shows some components and does not mean that the electronic device includes only these components. Figure 4 The components shown.

[0112] Communication component 33 is configured to facilitate wired or wireless communication between electronic devices and other devices. The electronic devices can access wireless networks based on communication standards, such as WiFi, 4G, or 5G, or combinations thereof. In one exemplary embodiment, communication component 33 receives broadcast signals or broadcast-related information from an external broadcast management system via a broadcast channel. In one exemplary embodiment, communication component 33 also includes a near-field communication (NFC) module to facilitate short-range communication. For example, the NFC module may be implemented based on radio frequency identification (RFID) technology, Infrared Data Association (IrDA) technology, ultra-wideband (UWB) technology, Bluetooth (BT) technology, and other technologies.

[0113] Power supply component 34 provides power to various components of the electronic device. Power supply component 34 may include a power management system, one or more power supplies, and other components associated with generating, managing, and distributing power to the electronic device.

[0114] Audio component 35 is configured to output and / or input audio signals. For example, audio component 35 includes a microphone (MIC) configured to receive external audio signals when the electronic device is in an operating mode, such as call mode, recording mode, and voice recognition mode. The received audio signals may be further stored in memory 31 or transmitted via communication component 33. In some embodiments, audio component 35 also includes a speaker for outputting audio signals.

[0115] Display 36 includes a screen, which may include a liquid crystal display (LCD) and a touch panel (TP). If the screen includes a touch panel, the screen can be implemented as a touchscreen to receive input signals from a user. The touch panel includes one or more touch sensors to sense touches, swipes, and gestures on the touch panel. The touch sensors can sense not only the boundaries of the touch or swipe action but also the duration and pressure associated with the touch or swipe operation.

[0116] Those skilled in the art will understand that all or part of the steps of the above-described method embodiments can be implemented by hardware related to program instructions. The aforementioned program can be stored in a computer-readable storage medium. When executed, the program performs the steps of the above-described method embodiments; and the aforementioned storage medium includes various media capable of storing program code, such as ROM, RAM, magnetic disks, or optical disks.

[0117] Features of any of the examples or embodiments described above can be combined to create additional examples or embodiments without losing the intended effect. It should be understood that the embodiments or examples described above are merely illustrative descriptions, and those skilled in the art can make various modifications thereto. Furthermore, those skilled in the art will recognize that numerous further modifications and combinations can be made to different aspects. Therefore, the described aspects are intended to cover all such changes, modifications, and variations that fall within the scope of the appended claims.

[0118] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An impedance matching method, characterized in that, include: Acquire the current raw power signal, which includes multiple preset graded pulses in each signal cycle; For each graded pulse, multiple graded sweep frequency signals are generated based on multiple graded frequencies within the corresponding continuous frequency range. Calculate the characteristic differences between each graded sweep frequency signal and its corresponding graded pulse, and determine the operating frequency corresponding to each graded pulse based on the characteristic differences; During the output period corresponding to each graded pulse, impedance matching is performed using the operating frequency corresponding to that graded pulse.

2. The impedance matching method according to claim 1, characterized in that, The calculation of the characteristic differences between each graded sweep frequency signal and its corresponding graded pulse, and the determination of the operating frequency corresponding to each graded pulse based on the characteristic differences, includes: Calculate the characteristic differences between each graded sweep frequency signal and its corresponding graded pulse; and The graded frequency corresponding to the graded sweep signal with the smallest characteristic difference is determined as the working frequency of the corresponding graded pulse.

3. The impedance matching method according to claim 1, characterized in that, The method further includes: Obtain the pulse synchronization line; In response to the pulse synchronization line indicating the start of a signal cycle, the pulse time period corresponding to each graded pulse is timed according to the duration of each graded pulse; Within the pulse time period corresponding to each graded pulse, the characteristic difference between each graded sweep frequency signal and the corresponding graded pulse is calculated.

4. The impedance matching method according to claim 3, characterized in that, The method further includes: Obtain the masking time information corresponding to each graded pulse; When calculating the characteristic differences between each graded sweep frequency signal and its corresponding graded pulse, data within the masking time indicated by the masking time information is removed.

5. The impedance matching method according to claim 1, characterized in that, For each graded pulse, multiple graded sweep frequency signals are generated based on multiple graded frequencies within the corresponding continuous frequency range. The characteristic differences between each graded sweep frequency signal and its corresponding graded pulse are calculated, including: Within one sweep cycle, multiple graded sweep signals are generated for each graded pulse corresponding to multiple graded frequencies. Calculate the characteristic differences between the generated multiple graded sweep frequency signals and the graded pulse respectively; Based on the calculated characteristic differences, the operating frequency of the graded pulse in the sweep frequency cycle is determined.

6. The impedance matching method according to claim 1, characterized in that, For each graded pulse, multiple graded sweep frequency signals are generated based on multiple graded frequencies within the corresponding continuous frequency range. The characteristic differences between each graded sweep frequency signal and its corresponding graded pulse are calculated, including: In each sweep frequency cycle, a sweep frequency signal is formed only for one sweep frequency corresponding to a target sweep pulse, and the characteristic difference between the sweep frequency signal and the target sweep pulse is calculated. In the current frequency sweep cycle, impedance matching processing is performed on the target graded pulse using the operating frequency determined in the previous frequency sweep cycle; Impedance matching is performed on other graded pulses using their most recently determined operating frequencies.

7. The impedance matching method according to claim 1, characterized in that, The method further includes: For each graded pulse, determine the corresponding center frequency; The sweep width is determined based on the corresponding center frequency; The range of continuous frequencies corresponding to the graded pulse is determined based on the sweep width and the corresponding center frequency.

8. The impedance matching method according to claim 1, characterized in that, The process of forming multiple graded frequency sweep signals based on multiple graded frequencies within a corresponding graded continuous frequency range includes: For each graded pulse, determine the corresponding sweep frequency range; Within the corresponding frequency sweep range, determine the starting frequency and resolution; Based on the starting frequency and resolution, multiple reference frequency points are generated within the corresponding frequency sweep range; A corresponding hierarchical sweep frequency signal is generated based on the frequency of each of the reference frequency points.

9. The impedance matching method according to claim 1, characterized in that, The step of generating multiple graded sweep frequency signals based on multiple graded frequencies within a corresponding continuous frequency range, and calculating the characteristic differences between each graded sweep frequency signal and its corresponding graded pulse, includes any of the following methods: Generate all graded sweep frequency signals corresponding to all graded frequencies within the corresponding continuous frequency range at once, and calculate the characteristic differences between each graded sweep frequency signal and its corresponding graded pulse. or, Multiple graded sweep frequency signals corresponding to graded frequencies are generated at once, and the characteristic differences between each batch of graded sweep frequency signals and the corresponding graded pulses are calculated in batches.

10. The impedance matching method according to claim 1, characterized in that, The characteristic difference is calculated based on the waveform characteristics of the graded sweep frequency signal and the corresponding graded pulse. The waveform characteristics include at least one of the following: peak, trough, phase, amplitude, rising edge, falling edge, and waveform approximation rate.

11. An impedance matching device, characterized in that, include: The acquisition module is used to acquire the current raw power signal, which includes multiple preset graded pulses in each signal cycle; The generation module is used to generate multiple graded sweep frequency signals for each graded pulse based on multiple graded frequencies within the corresponding continuous frequency range. The calculation module is used to calculate the characteristic differences between each graded sweep frequency signal and the corresponding graded pulse, and to determine the operating frequency corresponding to each graded pulse based on the characteristic differences. The execution module is used to perform impedance matching processing using the operating frequency corresponding to each graded pulse during the output time period.

12. The impedance matching device according to claim 11, characterized in that, Also includes: The synchronization processing module is used to acquire the pulse synchronization line and, in response to the pulse synchronization line indicating the start of a signal cycle, to time the pulse period corresponding to each graded pulse according to the duration of each graded pulse. The calculation module is also used to perform characteristic difference calculation between each graded sweep frequency signal and the corresponding graded pulse within the pulse time period corresponding to each graded pulse.

13. The impedance matching device according to claim 12, characterized in that, The synchronization processing module is also used to obtain the masking time information corresponding to each graded pulse; The calculation module is also used to remove data within the masking time indicated by the masking time information when calculating the characteristic differences between each graded sweep frequency signal and the corresponding graded pulse.

14. An electronic device, characterized in that, include: One or more processors; Memory, used to store one or more programs; When the one or more programs are executed by the one or more processors, the one or more processors are made to implement the impedance matching method according to any one of claims 1 to 10.

15. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the impedance matching method according to any one of claims 1 to 10.