A three-dimensional electromagnetic actuator

Abstract

The application provides a three-way electromagnetic actuator, belonging to the field of vibration active control, comprising a magnetic conductor, a first actuation module, a second actuation module and a third actuation module; two first actuation modules are symmetrically arranged on the two sides of the magnetic conductor along the X-axis direction; two second actuation modules are symmetrically arranged on the two sides of the magnetic conductor along the Y-axis direction; the third actuation module comprises a stator, a mover, a third linear guide mechanism and a third reset limiting mechanism, the stator is arranged on the top of the magnetic conductor along the Z-axis direction, the mover comprises a permanent magnet and a magnetic cylinder, the magnetic cylinder is arranged between the coil modules adjacent to the first actuation module and the second actuation module, and the third linear guide mechanism and the third reset limiting mechanism are respectively arranged at the four corners of the magnetic cylinder. The X-axis, Y-axis and Z-axis actuation modules are integrated, which can output unidirectional translational force, can realize bidirectional and three-way decoupling translational force output, and is suitable for complex and multi-way interference working conditions of the controlled object.

Description

Technical Field

[0001] This invention relates to the field of active vibration control technology, and in particular to a three-directional electromagnetic actuator. Background Technology

[0002] In recent years, active vibration control technology has been widely used in aerospace, precision manufacturing, high-end equipment and other fields due to its excellent performance in low-frequency vibration suppression, becoming a core technical approach to solving harmful vibration problems.

[0003] As the core actuator in an active vibration control system, the actuator undertakes the crucial task of converting control signals into actual control forces, and its performance directly determines the effectiveness of vibration control. Currently, there is a wide variety of actuators available, capable of meeting the vibration control needs of most common scenarios. Among them, the triaxial electromagnetic actuator, based on electromagnetic principles, applies active control force to the controlled object and boasts outstanding advantages such as excellent dynamic performance, high reliability, high control precision, good controllability, and simple energy supply.

[0004] However, current triaxial electromagnetic actuators on the market have significant functional limitations. The vast majority are unidirectional triaxial actuators, capable of outputting control force in only one direction. Ships house various electromechanical equipment, with numerous types of onboard equipment operating under complex conditions. Vibration excitation sources are widespread during navigation, and the hull and onboard equipment are susceptible to multi-dimensional composite vibrations. This necessitates multi-directional vibration reduction in vibration damping devices, requiring triaxial electromagnetic actuators to simultaneously output translational forces in two or more directions to achieve comprehensive vibration suppression. Addressing this requirement by combining multiple unidirectional triaxial electromagnetic actuators to achieve multi-directional translational force output would significantly increase the overall size and space occupied by the equipment, contradicting the trend towards miniaturization and integration of high-precision equipment. Furthermore, combining multiple actuators would significantly increase manufacturing costs and system complexity, and it would be difficult to guarantee the synchronization and coordination of multi-directional control forces, resulting in low practical application feasibility.

[0005] In summary, the unidirectional output characteristics of existing triaxial electromagnetic actuators can no longer meet the actual needs of multi-directional vibration control in the marine field, while the combination of multiple unidirectional actuators is not feasible in terms of space and cost. Therefore, developing a triaxial electromagnetic actuator that can simultaneously output triaxial translational power to solve the shortcomings of existing technologies has important research value and practical application significance. Summary of the Invention

[0006] In view of this, the purpose of the present invention is to overcome the technical problems of existing triaxial electromagnetic actuators that can only achieve output in one direction, combined triaxial electromagnetic actuators that are complex in structure and occupy a large space, and to provide a triaxial electromagnetic actuator.

[0007] To achieve the above objectives, the present invention provides a three-directional electromagnetic actuator, comprising:

[0008] The magnetic conductor has its geometric center at the origin of the coordinate system, with two mutually orthogonal horizontal directions as the X-axis and Y-axis, and the vertical direction as the Z-axis.

[0009] The first actuation module comprises two units, which are symmetrically arranged on both sides of the magnetic conductor along the X-axis. Each first actuation module includes a coil module, a first linear guide mechanism, and a first reset limiting mechanism. The two ends of the first linear guide mechanism are respectively connected to the two coil modules. The first reset limiting mechanism is disposed on the first linear guide mechanism.

[0010] The second actuation module has two components, which are symmetrically arranged on both sides of the magnetic conductor along the Y-axis. The structure of the second actuation module is the same as that of the first actuation module.

[0011] The third actuation module includes a stator, a mover, a third linear guide mechanism, and a third reset limiting mechanism. The stator is disposed on the top of the magnetic conductor along the Z-axis. The mover includes a third magnetic conductor, a permanent magnet, a connecting plate, and a magnetic cylinder. The permanent magnet is disposed on the third magnetic conductor and is integrally connected to the connecting plate. The connecting plate is connected to the magnetic cylinder. The magnetic cylinder is mounted between the coil modules adjacent to the first and second actuation modules. The third linear guide mechanism and the third reset limiting mechanism are respectively disposed at the four corners of the magnetic cylinder.

[0012] In one embodiment, the system further includes a base plate and a housing, wherein a magnetic conductor is mounted on the base plate, and the housing is mounted on the base plate and encloses the magnetic conductor, the first actuation module, the second actuation module, and the third actuation module therein.

[0013] In one embodiment, the coil module includes a first magnetic conductor and a first coil, the first coil being uniformly wound on the first magnetic conductor.

[0014] In one embodiment, the first linear guide mechanism includes a first guide rail, a connecting frame, a first slider, and a first support block. The connecting frame is disposed on both sides of the first magnetic guide member, and the connecting frame is fixedly connected to the end of the first guide rail. The first guide rail passes through the first support block, and the first slider is embedded in the first support block and slides in cooperation with the first guide rail.

[0015] In one embodiment, the first reset limiting mechanism includes a first spring and a first limiting block. The first limiting block is fixed to the first guide rail. The two ends of the first spring abut against the first limiting block and the first support block, respectively. The first springs on both sides of the first support block are in a compressed state, and the compression of the two first springs is the same.

[0016] In one embodiment, a support module is further included, the support module comprising a base and an auxiliary support block, the base being mounted on the base plate, the auxiliary support block being fixed to the upper end of the base, and the top end of the auxiliary support block abutting against and supporting the first actuation module and the second actuation module.

[0017] In one embodiment, the stator includes a coil frame and a third coil wound on the coil frame, the coil frame being disposed on top of the magnetic conductor.

[0018] In one embodiment, the third linear guide mechanism includes a top cover, a third guide rail, and a third slider. The third guide rail is arranged along the Z-axis direction, and its two ends are fixedly connected to the top cover and the bottom plate, respectively. The third slider is fixed at the four corners of the magnetic cylinder, and the third slider slides in cooperation with the third guide rail.

[0019] In one embodiment, the third reset limiting mechanism includes a third spring and a third limiting block. The third limiting block is disposed outside the third slider, and the third spring is sleeved on the third guide rail. The third spring is also disposed between the top cover and the third limiting block, and between the bottom plate and the third limiting block.

[0020] In one embodiment, the first and third sliders are embedded with balls.

[0021] As can be seen from the above, the present invention has at least the following beneficial effects:

[0022] The present invention provides a three-dimensional electromagnetic actuator, which adopts a highly integrated structure that integrates the horizontal X-axis, horizontal Y-axis and vertical Z-axis actuation modules into one unit. It can output unidirectional linear force, as well as bidirectional and three-dimensional decoupled linear force output, thereby adapting to the complex and multidirectional interference conditions of the controlled object and exhibiting excellent multidimensional driving performance. The overall structure is compact, significantly reducing the installation space occupied, improving space utilization, and facilitating miniaturized and integrated assembly applications. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in this invention or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of this invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a triaxial projection of a three-directional electromagnetic actuator provided by the present invention.

[0025] Figure 2 In order to be in Figure 1 Based on the equilateral triaxial projection without the outer shell.

[0026] Figure 3 This is an exploded view of the first actuation module in the three-directional electromagnetic actuator of the present invention.

[0027] Figure 4 This is an exploded view of the third actuation module in the three-directional electromagnetic actuator of the present invention.

[0028] Figure 5 This is a triaxial view of the first and second actuation modules in the triaxial electromagnetic actuator of the present invention.

[0029] Figure 6 This is a triaxial view of the third actuation module in the triaxial electromagnetic actuator of the present invention.

[0030] Figure 7 This is a left view of the three-directional electromagnetic actuator of the present invention.

[0031] Figure 8 for Figure 7 A cross-sectional view along the BB direction.

[0032] Figure 9 for Figure 7 A cross-sectional view along the BB direction.

[0033] Figure 10 for Figure 7 A cross-sectional view along the BB direction.

[0034] Figure 11 This is a schematic diagram of the current flowing through the coil of the first actuation module in a three-way electromagnetic actuator.

[0035] The reference numerals in the attached figures are explained as follows:

[0036] 1. Base plate; 2. First actuation module; 201. First magnetic conductor; 202. First coil; 203. Connecting frame; 204. First guide rail; 205. First support block; 206. First slider; 207. First spring; 208. First limiting block; 3. Second actuation module; 4. Third actuation module; 401. Third guide rail; 402. Third coil; 403. Coil frame; 404. Magnetic cylinder; 405. Permanent magnet; 406. Connecting plate; 407. Fixing bolt; 408. Top cover; 409. Third spring; 4010. Third limiting block; 4011. Third slider; 4012. Third magnetic conductor; 5. Outer shell; 6. Magnetic conductor coil; 7. Magnetic conductor; 8. Magnetic conductor base; 9. Auxiliary support block; 10. Base. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0038] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this invention should have the ordinary meaning understood by those skilled in the art. The terms "first," "second," and similar terms used in the embodiments of this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0039] To keep the following description of the embodiments of the present invention clear and concise, detailed descriptions of some known functions and components have been omitted.

[0040] like Figures 1 to 7A three-axis electromagnetic actuator according to one embodiment includes a magnetic conductor 7, a first actuation module 2, a second actuation module 3, and a third actuation module 4. A magnetic conductor coil 6 is wound around the magnetic conductor 7. The geometric center of the magnetic conductor 7 is the origin of the coordinate system, with two mutually orthogonal horizontal directions designated as the X-axis and Y-axis, and a vertical direction designated as the Z-axis. Two first actuation modules 2 are symmetrically arranged on both sides of the magnetic conductor 7 along the X-axis. Each first actuation module 2 includes a coil module, a first linear guide mechanism, and a first reset limiting mechanism. The two ends of the first linear guide mechanism are respectively connected to the two coil modules, constraining the coil modules to translate only along the X-axis. The first reset limiting mechanism is located on the first linear guide mechanism, providing an elastic reset force to the coil modules and limiting the maximum displacement of the coil modules. Two second actuation modules 3 are symmetrically arranged on both sides of the magnetic conductor 7 along the Y-axis. The structure of actuation module 3 is the same as that of the first actuation module 2. The third actuation module 4 includes a stator, a mover, a third linear guide mechanism, and a third reset limiting mechanism. The stator is set on the top of the magnetic conductor 7 along the Z-axis. The mover includes a third magnetic conductor 4012, a permanent magnet 405, a connecting plate 406, and a magnetic cylinder 404. The permanent magnet 405 is set on the third magnetic conductor 4012. The permanent magnet 405 and the third magnetic conductor 4012 are connected to the connecting plate 406 by fixing bolts 407. The connecting plate 406 is connected to the magnetic cylinder 404. The magnetic cylinder 404 is set between the coil modules adjacent to the first actuation module 2 and the second actuation module 3. The third linear guide mechanism and the third reset limiting mechanism are respectively set at the four corners of the magnetic cylinder 404. The third linear guide mechanism is used to constrain the mover to only move vertically along the Z-axis. The third reset limiting mechanism is used to provide elastic reset force for the mover and limit the maximum vertical displacement of the mover.

[0041] The present invention provides a three-dimensional electromagnetic actuator, which adopts a highly integrated structure that integrates the horizontal X-axis, horizontal Y-axis and vertical Z-axis actuation modules into one unit. It can output unidirectional linear force, as well as bidirectional and three-dimensional decoupled linear force output, thereby adapting to the complex and multidirectional interference conditions of the controlled object and exhibiting excellent multidimensional driving performance. The overall structure is compact, significantly reducing the installation space occupied, improving space utilization, and facilitating miniaturized and integrated assembly applications.

[0042] In a preferred embodiment, the triaxial electromagnetic actuator further includes a base plate 1 and a housing 5. The base plate 1 serves as the mounting reference for the entire device, and the magnetic conductor 7 is mounted on the base plate 1 via a magnetic conductor base 8. The housing 5 is detachably mounted on the base plate 1 and has an overall cover-like structure, enclosing the magnetic conductor 7, the first actuation module 2, the second actuation module 3, and the third actuation module 4 within it. Through the sealing and protective function of the housing 5, external dust, moisture, debris, and other contaminants can be effectively isolated from entering the device, effectively improving the working reliability, operational safety, and environmental adaptability of the triaxial electromagnetic actuator, and extending the overall service life of the equipment.

[0043] In a preferred embodiment, the coil module includes a first magnetic conductor 201 and a first coil 202, with the first coil 202 uniformly wound around the first magnetic conductor 201 to form an excitation structure. After being energized, the first coil 202 generates a magnetic field; at the same time, the uniformly wound layout of the first coil 202 ensures a uniform magnetic field distribution, making the dynamic force output by the first actuation module 2 stable and reliable.

[0044] In a preferred embodiment, the first linear guide mechanism includes a first guide rail 204, a connecting frame 203, a first slider 206, and a first support block 205. The connecting frame 203 is symmetrically arranged on both sides of the first magnetic conductor 201. The connecting frame 203 is fixedly connected to the end of the first guide rail 204 to achieve a rigid connection between the coil module and the first guide rail 204. The first guide rail 204 is transversely inserted into the first support block 205. The first slider 206 is embedded and fixed on the first support block 205 and forms a sliding fit relationship with the first guide rail 204. The coil module and the first guide rail 204 move as a whole along the X-axis direction.

[0045] Furthermore, the first reset limiting mechanism includes a first spring 207 and a first limiting block 208. The first limiting block 208 is fixed to the first guide rail 204. The two ends of the first spring 207 abut against the first limiting block 208 and the first support block 205, respectively. The first springs 207 on both sides of the first support block 205 are in a compressed state, and the compression of the two first springs 207 is the same. During operation, the energized coil module generates electromagnetic driving force, which drives the connecting brackets 203 on both sides to perform linear reciprocating motion, thereby driving the first guide rail 204 and the coil module to move synchronously. The first slider 206 is fixed to the first support block 205, providing sliding guidance for the first guide rail 204. The first spring 207 can play an elastic buffering and automatic reset role for the moving coil module. The first limiting block 208 limits the maximum stroke of the coil module to prevent overtravel and derailment, ensuring stable and reliable X-axis operation.

[0046] In a preferred embodiment, the triaxial electromagnetic actuator further includes a support module, which includes a base 10 and an auxiliary support block 9. The base 10 is mounted on the base plate 1, and the auxiliary support block 9 is fixed to the upper end of the base 10. The top end of the auxiliary support block 9 abuts against and supports the first actuation module 2 and the second actuation module 3, thereby forming planar support for the first actuation module 2 and the second actuation module 3 from below. This effectively distributes the load borne by the guide rail, prevents the guide rail from bending and deforming due to long-term reciprocating force, improves the overall structural rigidity and motion stability, and protects internal components such as coils and sliders, extending the service life of the device.

[0047] Since the second actuation module 3 and the first actuation module 2 have the same structure, installation method and working principle, the structure, guiding mechanism, reset limit mechanism and other components of the second actuation module 3 will not be described again.

[0048] In a preferred embodiment, the stator includes a coil frame 403 and a third coil 402, the third coil 402 being wound on the coil frame 403, which is located on top of the magnetic conductor 7. Under the action of the permanent magnet 405, a magnetic field is generated between the third magnetic conductor 4012 and the magnetic cylinder 404. When alternating current is applied to the third coil 402, the third coil 402 is subjected to an Ampere force, but because the third coil 402 is fixed and does not move, the moving part moves due to the reaction force of the Ampere force.

[0049] In a preferred embodiment, the third linear guide mechanism includes a top cover 408, a third guide rail 401, and a third slider 4011. The third guide rail 401 is arranged along the Z-axis direction, and its two ends are fixedly connected to the top cover 408 and the base plate 1, respectively, forming a stable vertical guide reference. The third slider 4011 is fixed at the four corners of the magnetic cylinder 404, and the third slider 4011 slides in cooperation with the third guide rail 401 to constrain the mover to move only vertically along the Z-axis direction. When the mover reciprocates in the vertical direction, the cooperation between the third slider 4011 arranged at the four corners and the third guide rail 401 provides a limiting and guiding function for the magnetic cylinder 404 and the mover, effectively constraining the mover to move only vertically along the Z-axis direction, avoiding deviation and swaying during movement, ensuring smooth and reliable Z-axis power output, and the four-corner support structure can improve the guiding stability.

[0050] Furthermore, the third reset limiting mechanism includes a third spring 409 and a third limiting block 4010. The third limiting block 4010 is disposed outside the third slider 4011, and the third spring 409 is sleeved on the third guide rail 401. The third spring 409 is located between the top cover 408 and the third limiting block 4010, and between the bottom plate 1 and the third limiting block 4010. When the mover drives the magnetic cylinder 404 to reciprocate vertically along the Z-axis, the third springs 409 on both the upper and lower sides can play the role of elastic buffering and automatic reset after power failure; the third limiting block 4010 can limit the maximum sliding stroke, prevent the mover from overtravel, effectively ensure the safety and stability of the Z-axis operation process, and improve the overall reliability of the device.

[0051] As an alternative preferred embodiment, both the first slider 206 and the third slider 4011 are equipped with ball bearing structures. The balls can generate rolling friction between the slider and the corresponding guide rail. Compared with ordinary sliding friction, this can effectively reduce motion resistance, reduce friction loss, reduce wear caused by long-term reciprocating motion, extend the service life of the slider and guide rail, and further improve the overall motion accuracy and operational stability of the three-way electromagnetic actuator.

[0052] In a preferred embodiment, the first support block 205 used by the first actuation module 2 and the second actuation module 3 is addressed. The present invention employs a universal structural design, dividing the first support block 205 into two groups. The two groups of first support blocks 205 have identical body structures and are adapted to the installation requirements of the first actuation module 2 and the second actuation module 3 only through an alternating forward and reverse arrangement. This allows the two groups of first support blocks 205 to share a single processing mold for manufacturing, eliminating the need for separate molds for different directions. This effectively reduces the number of molds required, simplifies the types of parts, significantly reduces overall manufacturing costs, and improves the economic efficiency of mass production.

[0053] Specifically, such as Figure 8 As shown, in the third actuation module 4, under the action of the permanent magnet 405, a magnetic field is generated at the gap between the third magnetic conductor 4012 and the magnetic cylinder 404. The direction of the magnetic field is as follows: Figure 8 As shown by the black arrow in the middle. When alternating current is applied to the third coil 402 of the stator, the third coil 402 of the stator will be subjected to the Ampere force, but since the stator is fixed to the magnetic conductor 7, this part will not move; however, according to the principle of action and reaction, the moving part will be subjected to the reaction force of the Ampere force, thereby performing reciprocating motion, that is, outputting Z-axis translational force.

[0054] In the triaxial electromagnetic actuator disclosed in this invention, the first actuation module 2 and the second actuation module 3 operate on the same principle. Here, only the first actuation module 2 will be used as an example for explanation. When a direct current is applied to the magnetic coil 6 on the magnetic conductor 7, the magnetic conductor 7 becomes a magnet. Assuming its magnetic poles are as follows... Figure 9As shown. At this time, the first coil 202 corresponding to the positive X-axis is energized as follows. Figure 11 The current shown by curve a magnetizes the corresponding first magnetic permeable element 201 to form a magnet; simultaneously, a current is applied to the first coil 202 corresponding to the negative X-axis direction. Figure 11 The current shown by curve b causes the corresponding first magnetic permeable element 201 to be synchronously magnetized to form a magnet. The magnetic pole distribution of the two first magnetic permeable elements 201 is as follows: Figure 9 As shown. Reference Figure 9 As indicated by the black arrow, following the basic principle that like poles repel and unlike poles attract, the first actuation module 2 moves in the -X direction, outputting a linear force in the -X direction. Similarly, if the first coil 202 corresponding to the negative X-axis direction is energized... Figure 11 The current shown by curve c in the middle is applied to the first coil 202 corresponding to the positive X-axis. Figure 11 The current shown by curve d in the middle, the magnetic poles of the two first magnetic permeable elements 201 are as follows Figure 10 As shown. Reference Figure 10 As indicated by the black arrow, following the basic principle that like poles repel and unlike poles attract, the first actuation module moves in the +X direction and outputs a +X direction translational force.

[0055] Furthermore, the input current of the first magnetic permeable elements 201 on both sides follows the matching principle of a larger current on the attractive side and a smaller current on the repulsive side. By applying a larger current to the side that generates the attractive force and a smaller current to the side that generates the repulsive force, the overall excitation power consumption is reduced while ensuring that the driving force meets the motion requirements, thus achieving energy saving. This can be specifically set according to the actual construction requirements, and no specific restrictions are imposed in this application.

[0056] The embodiments of this invention are intended to cover all such substitutions, modifications, and variations falling within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the embodiments of this invention should be included within the protection scope of this invention.

Claims

1. A three-directional electromagnetic actuator, characterized in that, include: The magnetic conductor has its geometric center at the origin of the coordinate system, with two mutually orthogonal horizontal directions as the X-axis and Y-axis, and the vertical direction as the Z-axis. The first actuation module comprises two units, which are symmetrically arranged on both sides of the magnetic conductor along the X-axis. Each first actuation module includes a coil module, a first linear guide mechanism, and a first reset limiting mechanism. The two ends of the first linear guide mechanism are respectively connected to the two coil modules. The first reset limiting mechanism is disposed on the first linear guide mechanism. The second actuation module has two components, which are symmetrically arranged on both sides of the magnetic conductor along the Y-axis. The structure of the second actuation module is the same as that of the first actuation module. The third actuation module includes a stator, a mover, a third linear guide mechanism, and a third reset limiting mechanism. The stator is disposed on the top of the magnetic conductor along the Z-axis. The mover includes a third magnetic conductor, a permanent magnet, a connecting plate, and a magnetic cylinder. The permanent magnet is disposed on the third magnetic conductor and is integrally connected to the connecting plate. The connecting plate is connected to the magnetic cylinder. The magnetic cylinder is mounted between the coil modules adjacent to the first and second actuation modules. The third linear guide mechanism and the third reset limiting mechanism are respectively disposed at the four corners of the magnetic cylinder.

2. A three-directional electromagnetic actuator according to claim 1, characterized in that: It also includes a base plate and a housing. A magnetic conductor is mounted on the base plate, and the housing is mounted on the base plate, enclosing the magnetic conductor, the first actuation module, the second actuation module, and the third actuation module inside it.

3. A three-directional electromagnetic actuator according to claim 1 or 2, characterized in that: The coil module includes a first magnetic conductor and a first coil, wherein the first coil is uniformly wound on the first magnetic conductor.

4. A three-directional electromagnetic actuator according to claim 3, characterized in that: The first linear guide mechanism includes a first guide rail, a connecting frame, a first slider, and a first support block. The connecting frame is disposed on both sides of the first magnetic guide member. The connecting frame is fixedly connected to the end of the first guide rail. The first guide rail passes through the first support block. The first slider is embedded in the first support block and slides in cooperation with the first guide rail.

5. A three-directional electromagnetic actuator according to claim 4, characterized in that: The first reset limiting mechanism includes a first spring and a first limiting block. The first limiting block is fixed to the first guide rail. The two ends of the first spring abut against the first limiting block and the first support block, respectively. The first springs on both sides of the first support block are in a compressed state, and the compression of the two first springs is the same.

6. A three-directional electromagnetic actuator according to claim 2, characterized in that: It also includes a support module, which includes a base and an auxiliary support block. The base is mounted on the base plate, and the auxiliary support block is fixed to the upper end of the base. The top of the auxiliary support block abuts against and supports the first actuation module and the second actuation module.

7. A three-directional electromagnetic actuator according to claim 1 or 2, characterized in that: The stator includes a coil frame and a third coil, the third coil being wound on the coil frame, which is located on top of the magnetic conductor.

8. A three-directional electromagnetic actuator according to claim 4, characterized in that: The third linear guide mechanism includes a top cover, a third guide rail, and a third slider. The third guide rail is arranged along the Z-axis direction, and its two ends are fixedly connected to the top cover and the bottom plate, respectively. The third slider is fixed at the four corners of the magnetic cylinder, and the third slider slides in cooperation with the third guide rail.

9. A three-directional electromagnetic actuator according to claim 8, characterized in that: The third reset limiting mechanism includes a third spring and a third limiting block. The third limiting block is disposed outside the third slider, and the third spring is sleeved on the third guide rail. The third spring is disposed between the top cover and the third limiting block, and between the bottom plate and the third limiting block.

10. A three-directional electromagnetic actuator according to claim 8, characterized in that: The first and third sliders are fitted with ball bearings.

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