Planar motor system

Abstract

The present disclosure relates to a planar motor system. The invention relates to a planar motor system (1) comprising at least one stator segment (2) and at least one shuttle (3) with a magnet unit (6). The planar motor system (1) comprises a capacitive power transfer device (10). The capacitive power transfer device (10) comprises at least two first plate electrodes (8) arranged on at least one stator segment (2, 21) of the planar motor system (1) and at least two second plate electrodes (9) arranged on at least one shuttle (3) of the planar motor system (1) and / or on a further stator segment (22).

Description

Technical Field

[0001] This invention relates to a planar motor system comprising at least one stator segment and at least one shuttle having a magnet unit, wherein a drive coil is arranged on the at least one stator segment and the magnet unit is arranged on the at least one shuttle. A control device controls the drive coil of the at least one stator segment to electromagnetically interact with the magnet unit of the at least one shuttle to move the at least one shuttle. Background Technology

[0002] Planar motor systems, well-known in the prior art, are commonly used as transport systems in production processes or in other applications requiring complex movement trajectories. For example, the basic structure and operating modes of planar motor systems are disclosed in WO2013 / 059934A1 or WO2019 / 129576A1. Applications of planar motor systems are illustrated, for example, in EP3172156B1 or EP3172134B1.

[0003] Planar motor systems typically include a stator, which is usually modular in design and forms a fixed part of the system. The stator typically comprises at least one, and usually several, stator segments, which can be connected in virtually any form—from squares and rectangles to complex paths to bypass other equipment or connect different workstations in a production process. Furthermore, the stator may include fixed stator segments and at least one movable stator segment that can be added to the fixed segments to flexibly change the shape of the stator, for example, during the production process.

[0004] Typically, one or more movable parts, the so-called movers or shuttles, are moved—at least two-dimensionally—on a plane of motion formed by the stator of a planar motor system. For this purpose, magnetic elements, such as drive coils, are usually arranged on the stator or stator segments. To move the shuttles on the stator or plane of motion, the driving force acting on each shuttle must be generated by interacting magnetic fields. For the shuttles to move in the desired direction, at least one magnetic field, typically the stator's magnetic field, must vary over time. Therefore, drive coils are arranged on the stator or stator segments. A control device controls the drive coils, or different groups of drive coils, arranged on the stator or stator segments to generate time-varying moving magnetic fields by energizing the respective drive coils.

[0005] Each shuttle typically includes a magnetic unit with a drive magnet, usually a permanent magnet, arranged at least two-dimensionally on the shuttle. It is also possible to use an electromagnet as the drive magnet on the shuttle. These drive magnets interact electromagnetically with the moving magnetic field of the stator. Typically, the moving magnetic field is generated by energizing drive coils in the stator or stator segment. Alternatively, the stator may include a movable permanent magnet for generating the moving magnetic field. The interaction between the magnetic field of the drive magnet and the moving magnetic field generated by the stator generates a driving force and a levitation force applied to the shuttle. The levitation force is used to at least slightly lift the shuttle away from the stator surface and hold the shuttle in a constant position; for example, an air gap may be created or established and maintained between the shuttle and the stator surface. The driving force can be used to move the shuttle in a desired direction of movement on a plane of movement formed by the stator or stator segment. Furthermore, the driving force can be used to generate tilting forces or torques.

[0006] When a permanent magnet is used as the driving magnet in the magnet unit of the shuttle, the shuttle ideally does not require electrical energy to generate a magnetic field and electromagnetic interaction. Therefore, the design of the shuttle can remain simple and highly complex, and flexible movement of the shuttle on the stator is possible.

[0007] However, some applications require power to be transmitted to the shuttle. For example, when the shuttle includes actuator devices such as clamps, grippers, hydraulic or pneumatic pumps, motors that operate the actuators, etc., the shuttle may require power. Furthermore, these applications may also require data transmission from the control unit of the planar motor system, for example, controlling the actuator devices arranged on the shuttle during production and / or transport processes. Additionally, there may be applications that also require data transmission from the shuttle to the stator and subsequently to the control unit of the planar motor system, for example, when measuring devices are arranged on the shuttle or simply identifying a shuttle moving on the stator, or when process parameters are sent to the control unit of the planar motor system during production. In these applications, contactless power transmission and wireless data transmission are preferred.

[0008] Furthermore, applications using planar motor systems may exist, requiring stator reconstruction during the production process. In this case, the planar motor system can include a modular stator comprising fixed and movable stator segments that can be easily added and / or moved to change the shape of the stator, thereby altering the shuttle's plane of movement. This can be advantageous when energy and / or data can be wirelessly transferred between the fixed and movable stator segments to allow the stator to quickly adapt to new requirements.

[0009] Specifically, contactless power transfer can be inductive or capacitive. Inductive or capacitive power transfer is used in charging applications, such as charging mobile devices or electric vehicles. Regensburger B.The proceedings of the 2018 IEEE Energy Conversion Conference and Expo (ECCE), pp. 2472-2477, are as follows: Proceedings Energy Conversion Congress and Exposition (ECCE), 2018 IEEE, p.2472-2477 "A high-performance capacitive wireless power transfer system for electric vehicle charging using an enhanced coupling plate design." High-Performance Capacitive Wireless Power Transfer System for Electric Vehicle Charging with Enhanced Coupling Plate Design An example of capacitor charging is given in "( )".

[0010] It is also known that inductive or conductive power transmission devices can be used simultaneously for data transmission. Bidirectional data transmission using inductive or conductive power transmission devices is highly advantageous in applications using planar motor systems, enabling the transmission of control commands to actuator devices arranged on the shuttles and / or the transmission of measurement data or process parameters or identification data of individual shuttles to the control unit of the planar motor system. Therefore, bidirectional data transmission using inductive or conductive power transmission devices is highly advantageous in applications using planar motor systems. Shaoge Zang, Others have given examples of simultaneous power and data delivery, such as "capacitive power transmission systems with integrated broadband communication." Capacitive Power Transfer System With Integrated Wide Bandwidth Communication IEEE Transactions on Power Electronics, Vol. 37, No. 8, August 2022, pp. 8805-8810 IEEE Transactions on Power Electronics, Vol. 37, Issue 8, August 2022, p.8805 -8810 ).

[0011] For example, DE102020212641A1 discloses a conveying device having a stator and at least one transport unit, wherein the transport unit moves relative to the stator in a controlled manner using magnetic force. Therefore, the transport unit includes a fixed permanent magnet interacting with a magnetic field generated by a magnet array arranged on the stator and movable by an actuating element or an electric motor. To correctly position the magnet array, the position of the transport unit relative to the stator needs to be known. Therefore, the transport unit of the conveying device includes a position determination unit and a control unit. The position determination unit includes sensors (e.g., a camera module, an inertial sensor) to provide measurement data, and the control unit determines position data from the measurement data. The control unit is also configured to transmit the determined position data to the stator using wireless data transmission, such as inductive data transmission, radio transmission, or optical data transmission. For this purpose, additional transmission devices, particularly radio or optical transmission for position data, must be provided on the transport unit and the stator of the conveying device.

[0012] In addition, the transport unit also includes an energy storage unit (e.g., a battery, capacitor, etc.) to supply energy to components of the location determination unit and / or control unit. Therefore, the transport unit may include a charging interface for charging the energy storage unit in the charging station via contact (e.g., using electrical contact) or non-contact (e.g., solar cells, inductive coupling). Alternatively, the discharged energy storage unit can be periodically replaced by the charged energy storage unit. In both embodiments, whenever the transport unit's battery is low, the transport unit must be moved or placed in a charging station or garage station—to recharge or replace the energy storage unit—which is time-consuming and can interrupt the transport or production process. Summary of the Invention

[0013] In this context, the purpose of this disclosure is to provide a planar motor system that provides improved energy and / or data transfer between its stationary and movable parts in a simple and cost-effective manner.

[0014] These and other objectives are achieved by the planar motor system according to the independent claim. The dependent claims describe advantageous embodiments of the invention.

[0015] According to the invention, these and other objectives are achieved by a planar motor system including a capacitive power transfer device comprising at least two first plate electrodes and at least two second plate electrodes, the at least two first plate electrodes being disposed on at least one stator segment of the planar motor system, and the at least two second plate electrodes being disposed on at least one shuttle of the planar motor system. A control device for the planar motor system is configured to move at least one shuttle of the planar motor system such that one of the first plate electrodes disposed on the at least one stator segment of the planar motor system and one of the second plate electrodes disposed on the at least one shuttle of the planar motor system form a first coupling capacitor, and another of the first plate electrodes disposed on the at least one stator segment of the planar motor system and another of the second plate electrodes disposed on the at least one shuttle of the planar motor system form a second coupling capacitor. Furthermore, the control device is configured to energize at least two of the first plate electrodes or at least two of the second plate electrodes to transfer energy and / or data between at least one stator segment and at least one shuttle of the planar motor.

[0016] A key aspect of this invention is that energy and / or data are wirelessly, simply, and easily transferred between at least one stator segment forming a fixed portion of a planar motor system and at least one shuttle forming a movable portion of the planar motor system. The capacitive power transfer device includes a first plate electrode disposed on the stator segment and a second plate electrode disposed on the shuttle to form a coupling capacitor; its design is simple, using plate electrodes on both the stator segment and the shuttle. Furthermore, the planar motor system can be easily enhanced to provide energy transfer and / or data transfer between the stator segment and the shuttle in a cost-effective manner. The transferred energy can be used to supply power to actuator devices (e.g., clamps, motors, grippers, hydraulic pumps, or pneumatic pumps, etc.) and / or sensor units (e.g., scales, position sensors, temperature sensors, etc., arranged on the shuttle). For example, an energy storage device (e.g., a battery, rechargeable battery, supercapacitor, etc.) arranged on the shuttle can be charged using the transferred energy, and then the energy storage device can be used to power the operation of one or more actuator devices arranged on the shuttle. Furthermore, the capacitive power transfer device can be used for data transmission between at least one stator segment and at least one shuttle, whereby data, such as control data, particularly data for controlling actuator devices arranged on the shuttle, can be transferred from the stator segment or a portion of the control device (e.g., a control unit) allocated to the stator segment to the shuttle. Additionally, the capacitive power transfer device can also be used to transfer data (e.g., measurement data from sensor units arranged on the shuttle or shuttle identification data) to the stator segment, or to a portion of the control device allocated to the stator segment for further processing. Energy and data can be transferred via the same two first plate electrodes and two second plate electrodes. It is also possible to use different two first plate electrodes and two second plate electrodes to form a coupling capacitor for energy transfer and data transmission, particularly if several first plate electrodes and second plate electrodes are provided by the capacitive power transfer device.

[0017] In a preferred embodiment, the capacitive power transfer device of the planar motor system includes a compensation network. The compensation network provides the possibility of combining capacitive power transfer with inductive power transfer. In this way, the energy transfer density between the stator segment and the shuttle can be further increased, and the capacitive transfer of energy and / or data can be more robust to plate electrode misalignment. Furthermore, the advantage of using a compensation network is that, for example, one of the transfer methods (e.g., inductive or capacitive transfer) can be used for data transfer, while another transfer method (e.g., inductive or capacitive transfer) can be used for energy transfer. The compensation network may include at least a compensation coil arranged on at least one stator segment of the planar motor system, and / or a compensation coil arranged on at least one shuttle of the planar motor system. For example, at least one compensation coil arranged on the stator segment and / or shuttle forms an oscillating circuit together with a coupling capacitor, which improves transfer efficiency. Typically, the compensation network may include several coils and capacitors.

[0018] This is also advantageous when the capacitive power transfer device is configured to provide unidirectional or bidirectional energy and / or data transfer between at least one stator segment and at least one shuttle in a planar motor system. In particular, bidirectional transfer is advantageous if data is transferred between the stator segment and the shuttle via the capacitive power transfer device, for example, control data transmission from the stator segment to the shuttle and measurement and / or identification data transmission from the shuttle to the stator segment. For data transfer between at least one stator segment and at least one shuttle in a planar motor system, the use of frequency modulation (e.g., frequency shift keying), amplitude modulation (e.g., amplitude shift keying), phase shift keying, or any combination thereof is advantageous.

[0019] In an advantageous embodiment of a planar motor system, at least two first electrodes are formed by at least two drive coils or groups of drive coils arranged on at least one stator segment. These two drive coils or groups of drive coils must be controlled independently of each other by a control device. Therefore, for capacitor-type power transmission devices, it is not necessary to arrange additional first plate electrodes on at least one stator segment.

[0020] In an alternative embodiment of the planar motor system, additional capacitor plates are arranged and disposed on at least one stator segment. These additional capacitor plates form at least two first plate electrodes of the capacitive power transmission device. The additional capacitor plates may be arranged on the side of the at least one stator segment near the drive coil or drive coil assembly disposed on the stator segment (e.g., horizontally or vertically aligned relative to the surface of the stator segment), or the additional capacitor plates may be mounted above or below the drive coil or drive coil assembly. Thus, the additional capacitor plates are ideally arranged parallel to the drive coils, or horizontally arranged relative to the surface of the stator segment. The additional capacitor plates may also be arranged between layers of the drive coils in the stator segment. Furthermore, it is possible to arrange the additional capacitor plates above or below at least one position sensor disposed on the stator segment. Different arrangements of the at least two first plate electrodes may also be combined to provide high flexibility in forming coupling capacitors with at least two second plate electrodes disposed on the shuttle of the planar motor system.

[0021] It is also advantageous if the additional capacitor plate is configured as a separate capacitor plate. This provides the possibility of having any number of first plate electrodes on the stator segment, and also being arranged in different orientations. Alternatively, it is possible to integrate the additional capacitor plate into the printed circuit board of the drive coil or drive coil group. It is also conceivable that the additional capacitor plate forming at least the first two plate electrodes is integrated into the printed circuit board of at least one sensor unit (e.g., a position sensor) on the stator segment.

[0022] In another preferred embodiment of the planar motor system, at least one additional device is provided, in which at least two first plate electrodes are integrated. This at least one additional device is either mounted near one side of the at least one stator segment or mounted on the surface of the at least one stator segment. For example, if the at least one additional device is mounted on the top of the stator segment, it can be integrated into the cover plate of the stator segment.

[0023] Furthermore, it is advantageous if at least two second plate electrodes disposed on at least one shuttle are arranged above or below the magnet unit of at least one shuttle. The at least two second plate electrodes, formed from a printed circuit board having two surfaces of, for example, a conductive material (e.g., copper), can be arranged parallel to the orientation of the magnet unit of the shuttle. Naturally, it is also possible to arrange the at least two second plate electrodes close to the magnet unit. Then the at least two second electrode plates can be arranged parallel or perpendicular to the orientation of the magnet unit on the shuttle.

[0024] Furthermore, the above-described objective is also achieved through a planar motor system comprising at least a second stator segment configured to be added to at least a first stator segment of the planar motor system. The planar motor system includes a capacitive power transfer device comprising at least two first plate electrodes disposed on the first stator segment of the planar motor system and at least two second plate electrodes disposed on a second stator segment. A control device for the planar motor system is configured to move the second stator segment of the planar motor system such that one of the first plate electrodes disposed on the first stator segment and one of the second plate electrodes disposed on the second stator segment form a first coupling capacitor, and another of the first plate electrodes disposed on the first stator segment and another of the second plate electrodes disposed on the second stator segment form a second coupling capacitor. Furthermore, the control device is configured to energize at least two of the first plate electrodes or at least two of the second plate electrodes to transfer energy and / or data between the first and second stator segments of the planar motor.

[0025] In this embodiment of the invention, energy and / or data are ideally transferred between at least two stator segments of the planar motor system, wherein at least one second stator segment is movable and can be moved. Thus, the first stator segment forms a fixed portion, and at least one second stator segment forms a movable portion of the planar motor system. Energy and / or data can be wirelessly and easily transferred between the first and second fixed segments via a capacitive power transfer device comprising a first plate electrode disposed on the first fixed segment and a second plate electrode disposed on the second fixed segment forming a coupling capacitor. The capacitive power transfer device is configured to provide unidirectional energy and / or data transfer between the first and second stator segments. Alternatively, particularly for data transmission, it may be advantageous if the capacitive data transfer device is configured to provide bidirectional energy and / or data transfer between the first and second stator segments.

[0026] In a preferred embodiment of the planar motor system, at least two first plate electrodes are integrated into the housing of a first stator segment of the planar motor system, and at least two second plate electrodes are integrated into the housing of a second stator segment of the planar motor system. These at least two second plate electrodes are conveniently arranged on or integrated into one side of the housing of the second stator segment of the planar motor system. When the second stator segment is added to the first stator segment, this side of the housing faces the housing of the first stator segment of the planar motor system, wherein at least two first plate electrodes are arranged on or integrated into this side of the housing of the first stator segment. Ideally, the at least two first plate electrodes disposed on the first stator segment and the at least two second plate electrodes disposed on the second stator segment are arranged overlapping or adjacent to each other on the respective stator segments of the planar motor system to readily form coupling capacitors for energy and / or data transmission when the second stator segment is added to the first stator segment. Attached Figure Description

[0027] In the following text, reference will be made to Figures 1 to 9 The invention will be described in more detail below. Figures 1 to 9 Exemplary, illustrative, and non-limiting advantageous embodiments of the invention are shown. In the accompanying drawings:

[0028] Figure 1 This is a schematic and exemplary cross-sectional view of a planar motor system having the capacitive power transmission device of the present invention;

[0029] Figure 2 It is a concept of capacitive power and / or data transmission;

[0030] Figure 3 It is another concept for capacitive power and / or data transmission;

[0031] Figure 4a and Figure 4b This is a cross-sectional view of another exemplary embodiment of a planar motor system having the capacitive power transmission device of the present invention, which uses different arrangements of a first plate electrode and a second plate electrode on a stator segment and a shuttle.

[0032] Figures 5a to 5e This is a cross-sectional view of the first plate electrode of the capacitive power transmission device of the present invention on a further different device on the stator section;

[0033] Figure 6a and Figure 6b This is a cross-sectional view of the second plate electrode of the capacitive power transmission device of the present invention on a further different device on the shuttle;

[0034] Figure 7a and Figure 7bThis is an exemplary embodiment of a planar motor system having the capacitive power transmission device of the present invention using additional equipment;

[0035] Figure 8 This is a top view of a planar motor system having the capacitive power transmission device of the present invention, the capacitive power transmission device having a first plate electrode mounted on the surface of the stator.

[0036] Figure 9 This is another exemplary embodiment of a planar motor system having capacitive power and / or data transmission of the present invention between two stator segments. Detailed Implementation

[0037] Figure 1 An exemplary embodiment of a planar motor system 1 is schematically illustrated. The planar motor system 1 includes at least one stator segment 2, which forms the stator of the planar motor system 1. Typically, the stator comprises a modular structure consisting of two or more stator segments 2, which can be connected in virtually any manner required for the respective application of the planar motor system 1. A coordinate system x, y, z can be defined for the planar motor system 1, which can be connected to the stator 2, and the stator 2 can be a fixed portion relative to at least one shuttle 3, which represents a moving portion of the planar motor system 1. For example, the principal plane x, y of the coordinate system x, y, z can be parallel to the surface of the stator 2 or the stator segment 2.

[0038] Furthermore, the planar motor system 1 includes at least one shuttle 3, which can move at an operating height h above the surface 4 of the stator 2 or stator segment 2 during operation of the planar motor system 1. Figure 1 As exemplarily shown in the diagram. The force required for the movement of shuttle 2 is generated (electromagnetically). For this purpose, drive coils 5 are arranged in groups on stator segment 2, wherein, for clarity, drive coils 5 are... Figure 1 (as well as Figures 4a to 5e Not shown in detail and separately in the document. Typically, a so-called PCB coil (PCB = Printed Circuit Board) arranged on a printed circuit board is used as the drive coil 5, but it is also possible to use a wound coil as the drive coil 5.

[0039] At least one shuttle 3 includes a magnet unit 6 comprising a plurality of drive magnets, typically permanent magnets, but electromagnets may also be used, for example. If permanent magnets are used, the magnet unit typically employs a special arrangement of drive magnets, such as a given number of so-called Halbach arrays, which enhance the magnetic field on one side of the array while canceling the magnetic field to near zero on the other side. Control of the movement of at least one shuttle 3 within a plane of movement formed or defined by the stator 2 or stator segment 2 is associated with control of the energization of drive coils 5, as is well known, for example, from WO2021 / 105165A1 and WO2021 / 175885A1. In principle, drive coils 5 around the shuttle 3 are energized to generate a moving magnetic field. The planar motor system 1 includes a control device 7 for controlling the energization of drive coils 5 with a drive voltage. The control device 7 may include at least one control unit, typically a plurality of control units (hardware and / or software), for controlling the energization of a single drive coil 5 or a group of single drive coils 5. In this configuration, the control device 7 may further include at least one higher-level control unit and / or a central control unit that supervises and controls several control units, which depend on the respective control device 7 to control the individual drive coils 5 or groups of drive coils. A moving magnetic field generated by energizing the drive coils 5 of the stator 2 or stator segment 2 interacts electromagnetically with the magnetic unit 6 of the shuttle 3. A driving force and a levitation force are applied to the shuttle 3, wherein the levitation force can lift the shuttle 3 from the stator surface 4 to an operating height h (e.g., a few millimeters), and the driving force can be used to move the shuttle 3. Therefore, the shuttle 3 can magnetically float at an operating height h above the stator surface 4 in the desired direction of movement.

[0040] Generally, high-precision movement of the shuttle 3 can be achieved in all six rigid body degrees of freedom directions by means of a planar motor system 1. Typically, the drive coils 5 can be arranged relative to each other in such a way that two primary directions of movement are defined, for example, in the x-axis and y-axis directions. Due to the modular structure of the stator 2, translational movement in the two primary directions of movement is virtually unrestricted. The two primary directions of movement (e.g., the x and y directions of the coordinate system) are arranged substantially parallel to the surface 4 of the stator 2 or stator segment. Furthermore, depending on the structural design of the stator 2 and shuttle 3, movement is generally possible in four additional secondary directions of movement, although some movements are possible only to a limited extent due to physical constraints and / or construction. The four secondary directions of movement include translation (up and down) in the z-axis direction and rotation around all three axes of the coordinate system (x, y, z).

[0041] In many applications, the shuttle 3 carries objects, such as products, containers, etc., to be transported. In some applications, the shuttle 3 may include or carry actuator devices, such as grippers, clamps, hydraulic pumps, or pneumatic pumps, and / or motors that operate such actuator devices during production and / or transport processes to perform specific tasks and / or handling operations. During production and / or transport processes, these actuator devices require power to properly perform their tasks. Therefore, the shuttle 3 may also include energy storage devices (e.g., AC batteries, rechargeable batteries, supercapacitors, etc.) that can power one or more actuator devices arranged on the shuttle 3. Furthermore, the actuator devices arranged on the shuttle 3 may require control data from the control device 7 of the planar motor system 1 to operate correctly during production and / or transport processes. Additionally, during operation, it may be necessary to transmit data (e.g., measurement data, identification data, process parameters, etc.) from the shuttle 3 to the control device 7 of the planar motor system 1.

[0042] Therefore, the planar motor system 1 includes a capacitor power transmission device 10. The capacitor power transmission device 10 includes at least two first plate electrodes 8, 81, 82, which are disposed on the stator 2 or stator segment 2. In a preferred embodiment of the planar motor system 1, as... Figure 1 As exemplarily shown, the two first plate electrodes are formed by at least two drive coils 5. This is possible, for example, if the stator segment 2 includes drive coils connected in a star configuration in a three-phase system. Then, at least two first plate electrodes 8, 81, 82 are formed by two three-phase systems, which can be controlled independently of each other by the control device 7. For better understanding, in Figure 1 The at least two three-phase systems used as first plate electrodes 8, 81, and 82 are shown separately. However, any at least two drive coils 5 or drive coil groups arranged on the stator section 2 can be used as first plate electrodes 8, 81, and 82, in which case these drive coils or drive coil groups can be controlled individually and independently by the control device 7. In particular, when the PCB coil is used as the drive coil 5, the drive coil 5 or drive coil group can function as the first plate electrodes 8, 81, and 82 due to its special shape.

[0043] Alternatively, additional capacitor plates may be provided on stator 2 or stator segment 2. These additional capacitor plates then form at least two first plate electrodes 8, 81, and 82. (See later...) Figures 4a to 5e An embodiment of a capacitive power transmission device 10 is shown and discussed, in which additional capacitor plates are arranged differently on the first plate electrodes 8, 81, 82 of the stator section 2.

[0044] The capacitive power transmission device 10 also includes at least two second plate electrodes 9, 91, 92, which are disposed on the shuttle 3. The shuttle 3 may contain a circuit board having two surfaces made of a conductive material (e.g., copper) forming the at least two second plate electrodes 9, 91, 92. Figure 1 In the exemplary embodiment shown, at least two second plate electrodes 9, 91, 92 or a circuit board forming at least two second plate electrodes 9, 91, 92 is arranged in a hole at the center of the magnet unit 6. However, other arrangements of at least two second plate electrodes 9, 91, 92 are also possible, which will be referred to later. Figure 4a and Figure 4b as well as Figure 6a and Figure 6b To illustrate and discuss.

[0045] Furthermore, the control device 7 is configured to move the shuttle 3 to a position (e.g. Figure 1(As shown). In this position, one of the at least two first plate electrodes 8, 81, 82 disposed on the stator 2 or stator segment 2 (e.g., first plate electrode 81) and one of the at least two second plate electrodes 9, 91, 92 disposed on the shuttle 3 (e.g., first plate electrode 91) form a first coupling capacitor C1, and the other first plate electrode (e.g., second plate electrode 82) of the at least two first plate electrodes 8, 81, 82 disposed on the stator 2 or stator segment 2 and the other second plate electrode (e.g., second plate electrode 92) of the at least two second plate electrodes 9, 91, 92 disposed on the shuttle 3 form a second coupling capacitor C2. Furthermore, the control device 7 is configured to energize at least two first plate electrodes 8, 81, 82 or at least two second plate electrodes 9, 91, 92, such that energy and / or data are transmitted between the stator 2 or stator segment 2 and the shuttle 3. Typically, the control device 7 energizes at least two first plate electrodes 8, 81, 82 for energy transfer, wherein the energy transfer and / or data transfer is unidirectional, typically from the stator 2 or stator segment 2 to the shuttle 3. The first plate electrodes 8, 81, 82 act as the primary side or transmitter of coupling capacitors C1, C2, and the second plate electrodes 9, 91, 92 act as the secondary side or receiver of coupling capacitors C1, C2. However, the capacitive power transfer device 10 may also be configured to provide bidirectional energy and / or data transfer between the stator 2 or stator segment 2 and the shuttle. Specifically, if data is transferred between the stator 2 or stator segment 2 and the shuttle 3 via the capacitive power transfer device 10, bidirectional transmission facilitates, on the one hand, the transfer of control data from the stator 2 or stator segment 2 to the shuttle 3, and on the other hand, the transfer of measurement and / or identification data from the shuttle 3 to the stator 2 or stator segment 2. Data between stator 2 or stator segment 2 and shuttle 3 can be transmitted using different modulation methods, such as frequency modulation (e.g., frequency shift keying), amplitude modulation (e.g., amplitude shift keying), or phase shift keying, or a combination of these modulation methods.

[0046] Figure 2 A concept for capacitive power and / or data transmission using a quadplate configuration for capacitive coupling is illustrated, wherein an embodiment of the capacitive power transmission device 10 uses two coupling capacitors C1, C2 for power and / or data transmission. These two coupling capacitors are formed by at least two first plate electrodes 81, 82 disposed on the stator 2 or stator segment 2 and at least two second plate electrodes 91, 92 disposed on the shuttle 3. For example, at least two first plate electrodes 81, 82 form the primary side of the capacitive power transmission device 10, and at least two second plate electrodes 91, 92 form the secondary side of the capacitive power transmission device 10.

[0047] An AC power supply applies an AC primary voltage with a 180° phase difference to the first plate electrodes 81, 82. This AC power supply can be formed by a DC power supply DC on the primary side and an inverter 11, wherein existing control circuitry serving as the drive coil 5 or drive coil group 5 for the first plate electrodes 81, 82 can be used to form the primary-side inverter 11 (e.g., a full-bridge inverter). The existing control circuitry used to form the inverter can be part of a control device 7, such as a similar control unit that controls the energization of the drive coil 5 or drive coil group 5 serving as the first plate electrodes 81, 82. The electric field generated in the coupling capacitors C1, C2 induces an antiphase AC secondary voltage in at least two second plate electrodes 91, 92 on the secondary side. This, in turn, causes a secondary AC current to flow back and forth between the two second plate electrodes 91, 92 and through the load 14 connected thereto. Between the load 14 and the two second plate electrodes 91, 92, a passive or active rectifier 12 can be provided, which will supply a DC secondary voltage and a DC secondary current to the load 14. The rectifier 12 may be included on a circuit board for forming at least two second plate electrodes 91, 92 disposed on the shuttle 3.

[0048] The amount of power transmitted by the capacitive power transmission device 10 increases with the frequency of the AC primary voltage and the capacitance of the coupling capacitors C1 and C2. This capacitance is inversely proportional to the distance between the first plate electrodes 81 and 82 and the second plate electrodes 91 and 92 in the z-axis direction (e.g., ...). Figure 1 (As shown). If resonant power delivery is used, capacitive power and / or data delivery can be improved. That is, the capacitive power delivery device 10 operates as a resonant inverter, where the correct resonant frequency can be determined, for example, using current measurements already available in stator 2 or stator segment 2. If the capacitive power delivery device 10 operates as a resonant inverter, coupling capacitors C1, C2 can be integrated into the electrical resonant circuit, including a compensation network 13 of at least one compensation coil Lc or choke (inductor) connected in series or parallel to the second plate electrodes 91, 92 on the secondary side.

[0049] Alternatively or additionally, the first plate electrodes 81, 82 may be connected in series or in parallel to the primary-side compensation network 15, which includes at least a compensation coil or a choke (inductor). The secondary-side compensation network 13 and / or the primary-side compensation network 15 may also include additional passive electronic components, such as capacitors, inductors, or resistors. By tuning the choke or compensation coil Lc (inductance value) to the coupling capacitors C1, C2, the resonant circuit can operate in a resonant or near-resonant state. The secondary-side compensation network 13, particularly the compensation coil Lc or the choke (inductor), and any optional additional electrical components, may be arranged on a circuit board for providing at least two second plate electrodes 91, 92 on shuttle 3.

[0050] By adjusting the frequency of the AC primary voltage applied to at least two first plate electrodes 81, 82 on stator 2 or stator segment 2, the resonant circuit can be excited to operate in a resonant manner. For example, if drive coil 5 or drive coil group 5 is used to form at least two first plate electrodes 81, 82 of coupling capacitors C1, C2, the existing control circuitry within control device 7 for drive coil 5 or drive coil group 5 can be used to form inverter 11. For energy and / or data transfer, drive coil 5 forming at least two first plate electrodes 81, 82 can be controlled at a higher switching frequency than the usual switching frequency (ideally the resonant frequency of capacitor power transfer device 10), the usual switching frequency used to control the energization of drive coil 5 during normal operation of planar motor system 1. If the control circuit for the drive coil 5 or drive coil group 5 forming at least two first plate electrodes 81, 82 includes a low-pass filter that filters out switching frequency ripple during normal operation of the planar motor system 1, this low-pass filter can be extended by an additional band-pass filter that also allows operation at higher frequencies, thereby allowing capacitive power and / or data transmission. Alternatively, when the control circuit is used for capacitive power and / or data transmission, an additional switch can be used in the control circuit to turn off the low-pass filter, since the assigned drive coil 5 or drive coil group 5 is used as one of the at least two first plate electrodes 81, 82.

[0051] When the drive coils 5 are arranged relative to each other in a manner that defines two primary directions of movement (e.g., in the x-axis and y-axis directions), it is possible to use the drive coil 5 defining the first primary direction (e.g., the x-axis direction) for energy and / or data transfer between the stator or stator segment 2 and the shuttle 3, while the drive coil defining the second primary direction (e.g., the y-axis direction) is used, for example, to move the shuttle 3 in the second primary direction. Alternatively, particularly, if the drive coils 5 of the corresponding stator segment 2 are star-connected in a three-phase system, and at least two first plate electrodes 81, 82 are formed by two star-connected drive coils 5 of the three-phase system, which can be controlled independently, then a high-frequency offset of the star point can be received in the control device 7. This allows for the simultaneous transfer of energy and / or data to the shuttle 3.

[0052] Furthermore, when shuttle 3 is not hovering and / or moving, it is possible to transfer energy and / or data to increase capacitance, thereby increasing the transferable energy between shuttle 3 and stator segment 2 via capacitive power transfer. Shuttle 3 can be positioned on stator 2 or stator segment 2 at a location where at least two second plate electrodes 91, 92 on shuttle 3 and at least two first plate electrodes 81, 82 on stator 2 or stator segment 2 form coupling capacitors C1, C2. In this way, for example, energy storage units (e.g., batteries, capacitors, galvanic cells, supercapacitors, etc.) arranged on shuttle 3 can be charged.

[0053] Figure 3 Another concept for capacitive power and / or data transmission using a dual-plate configuration for capacitive coupling is illustrated, wherein an embodiment of the capacitive power transmission device 10 uses two plate electrodes 8, 9, wherein a first plate electrode 8 is arranged on the stator 2 or stator segment (primary side), and a second plate electrode 9 is arranged on the shuttle 3 (secondary side), forming a coupling capacitor Cc. An additional parasitic capacitance Cp to ground E (e.g., through grounding of the stator housing) forms the return path for power and / or data transmission. On one hand, when used in an embodiment of the capacitive power transmission device 10, the advantage of the two-plate configuration lies in better misalignment behavior. That is, the first plate electrode 8 and the second plate electrode 9, arranged on the stator 2 or stator segment 2 and the shuttle 3, can be more easily arranged by moving the shuttle 3 in a manner that forms the coupling capacitance Cc, and capacitive power and / or data transmission can be guaranteed in each direction of movement of the shuttle 3. On the other hand, the parasitic capacitance Cp to ground E is not well defined and is typically very small. That is, the achievable transmittable energy for capacitive power and / or data transmission will be lower than that using, for example... Figure 2 The energy of the capacitor power transmission device 10 with the four-plate configuration shown in the embodiment.

[0054] Figure 4a and Figure 4b A further exemplary embodiment of the planar motor system 1 is shown in cross-sectional view. This planar motor system includes a capacitive power transmission device 10 for energy and / or data transfer between the stator 2 or stator segment 2 and the shuttle 3. The capacitive power transmission device 10 (such as...) Figure 4a and Figure 4b (As shown) includes an additional capacitor plate that acts as at least two first plate electrodes 8, 81, 82. The additional capacitor plates are arranged horizontally or vertically on or within the stator 2 or stator segment 2. Figures 5a to 5e Other different and possible arrangements of the first plate electrodes 8, 81, 82 in stator 2 or stator segment 2 are shown.

[0055] also, Figure 4a and Figure 4b Different arrangements of at least two second plate electrodes 9, 91, 92 disposed on shuttle 3 are shown, as well as arrangements of at least two first plate electrodes 8, 81, 82 disposed on stator 2 or stator segment 2. The two second plate electrodes 9, 91, 92 can be integrated into shuttle 3 horizontally or vertically, and are formed by, for example, a circuit board having two surfaces made of a conductive material (e.g., copper). Figure 6a and Figure 6b The diagram shows further differences and possible arrangements of the second plate electrodes 9, 91, and 92 in shuttle 3.

[0056] exist Figure 4a In this configuration, additional capacitor plates forming the first plate electrodes 81 and 82 are arranged within the stator segment 2, wherein the first plate electrodes 81 and 82 are horizontally oriented and positioned close to the drive coil 5. For example, the first electrodes 81 and 82 may be configured as separate capacitor plates; however, if a PCB coil is used, it is also possible to integrate the first electrodes 81 and 82 into the drive coil 5, such as... Figure 5a As illustrated in the example. (As shown in the example...) Figure 4a As shown, the shuttle 3 also includes second plate electrodes 91 and 92, which are arranged close to the magnet unit 6 and oriented horizontally or parallel to the magnet unit 6. When the shuttle 3 moves to a position where the first plate electrodes 81 and 82 and the second plate electrodes 91 and 92 at least partially overlap under the control of the control device 7, the first plate electrodes 81 and 82 and the second plate electrodes 91 and 92 can form coupling capacitors C1 and C2 of the capacitive power transmission device 10.

[0057] Figure 4b An embodiment of a capacitive power transmission device 10 for a planar motor system 1 is shown, wherein first plate electrodes 81, 82 are arranged vertically on the side of the stator 2 or stator segment. Second plate electrodes 91, 92 are also arranged in the shuttle near the magnet unit 6, and are, for example, vertically or perpendicular to the magnet unit 6. Similarly, the shuttle 3 is moved by a control device to the position where the first plate electrodes 81, 82 and the second plate electrodes 91, 92 can form the coupling capacitors C1, C2 of the capacitive power transmission device 10.

[0058] Furthermore, it is possible to horizontally mount the additional capacitor plate, which serves as the first plate electrode 8, above the drive coil 5 and the printed circuit board 16 of the sensor unit (e.g., the position sensor unit) arranged in the stator 2 or stator segment 2—as Figure 5b As shown, for clarity, in Figures 5b to 5e The individual first plate electrodes 81 and 82 are not shown. If a PCB coil is used, the additional capacitor plate forming the first plate electrode 8 can be integrated into the printed circuit board of the drive coil 5, or configured as a separate additional capacitor plate.

[0059] The additional capacitor plate forming the first plate electrode 8 can alternatively be horizontally mounted below the drive coil 5 and above the printed circuit board 16 of the sensor unit (e.g.) Figure 5c (as shown), or mounted below the drive coil 5 and below the printed circuit board 16 of the sensor unit (as shown). Figure 5d (As shown). If the additional capacitor plate or the first plate electrode 8 is arranged between the drive coil 5 and the printed circuit board 16 of the sensor unit (as shown). Figure 5cAs shown), the additional capacitor plate or the first plate electrode 8 can be integrated into the printed circuit board of the drive coil 5 (if a PCB coil is used), or integrated into the printed circuit board 16 of the sensor unit, or configured as a separate additional capacitor plate. If the additional capacitor plate or the first plate electrode 8 is arranged below the printed circuit board 16 of the sensor unit (e.g., Figure 5d As shown), the additional capacitor plate or the first plate electrode 8 can be integrated into the printed circuit board 16 of the sensor unit, or configured as a separate additional capacitor plate.

[0060] Alternatively, the additional capacitor plate forming the first plate electrode 8 may be horizontally arranged between layers 51 and 52 of the drive coil 5—as shown. Figure 5e As shown. In this embodiment, the additional capacitor plate is integrated into the printed circuit board of the drive coil 5.

[0061] Furthermore, the first plate electrode 8, or an additional capacitor plate serving as the first plate electrode 8, can cover the entire stator segment 2, the entire stator 2, or only the stator segment 2 or a portion of the stator 2. When using... Figure 2 In the exemplary four-plate configuration for capacitive coupling shown in the diagram, for each stator segment 2 or stator 2 of the planar motor system 1, there can be at least two additional capacitor plates serving as first plate electrodes 8, up to any number of additional capacitor plates, forming pairs of first plate electrodes 8 arranged in different orientations. If using... Figure 3 The exemplary dual-plate configuration for capacitive coupling shown in the diagram may also utilize only one additional capacitor plate as the first plate electrode 8 on the stator 2 or the corresponding stator segment 2. Several shuttles 3, including the second plate electrodes 9, 91, 92, can use the first plate electrodes 8 provided by the stator segment 2 or the stator 2 for energy and / or data transfer—different pairs of first plate electrodes 8 cannot be used, or the same pair of first plate electrodes 8 can be used.

[0062] exist Figure 4a and Figure 4b The diagram shows the arrangement of the second plate electrodes 91, 92 on the shuttle 3, wherein the second plate electrodes 91, 92 are arranged close to or next to the magnet unit 6. Figure 6a and Figure 6b An alternative arrangement for the second plate electrode 9 on shuttle 3 is shown, wherein the second plate electrode 9 is either positioned above magnet unit 6 (e.g.) Figure 6a (as shown), or arranged below magnet unit 6 (as shown) Figure 6b (As shown). For clarity, in Figure 6a and Figure 6bIndividual second plate electrodes 91 and 92 are not shown. Second plate electrodes 9, 91, and 92 may cover the entire shuttle 3 or only a portion of the shuttle 3. Each shuttle 3 may also have any number of second plate electrodes 9, 91, and 92 (e.g., starting with at least two second plate electrodes 91 and 92). The number of second plate electrodes 9, 91, and 92 may also be arranged in different directions on the shuttle 3.

[0063] Figure 7a and Figure 7b as well as Figure 8 A further embodiment of the planar motor system 1 including the capacitor power transfer device 10 is shown, wherein the first plate electrodes 81, 82 are integrated into the auxiliary device 17, rather than into the stator 2 or stator segment 2 of the planar motor system 1. The auxiliary device 17 may be arranged close to or near the motor 2 of the planar motor system 1—such as... Figure 7a and Figure 7b As shown.

[0064] For example, in Figure 7a In this configuration, the first plate electrodes 81 and 82 are mounted parallel to the stator surface 4 on the auxiliary device 17, which is arranged beside one side of the stator 2. The shuttle 3, including the second plate electrodes 91 and 92 horizontally arranged beside the magnet unit 6, can be moved onto the auxiliary device because the first plate electrodes 81 and 82 are below the shuttle 3. When the shuttle 3 is moved onto the auxiliary device 17, the first plate electrodes 81 and 82 and the second plate electrodes 91 and 92 can form coupling capacitors C1 and C2 for energy and / or data transmission. Alternatively, the auxiliary device 17 may be arranged beside the stator 2 in such a way that the first plate electrodes 81 and 82 integrated into the auxiliary device 17 are above the shuttle 3, and the shuttle 3 must be moved below the auxiliary device 17 for capacitive power and / or data transmission.

[0065] Figure 7b Another embodiment is shown in which the first plate electrodes 81, 82 are integrated into an auxiliary device 17, which is arranged next to or near the stator 2. Figure 7b In the illustrated embodiment, the first plate electrodes 81, 82 are vertically oriented. For example, the second plate electrodes 91, 92 disposed on the shuttle 3 are also vertically oriented close to the magnet unit 6. The shuttle 3 can move close to the auxiliary device 17 on the stator 2 in such a way that the first plate electrodes 81, 82 integrated into the auxiliary device 17 and the second plate electrodes 91, 92 on the shuttle 3 form coupling capacitors C1, C2 of the capacitive power transmission device 10 for energy and / or data transmission.

[0066] For example, each stator 2 may also use several additional devices 17, and one additional device 17 may cover one or more stator segments 2. Furthermore, different capacitor plates can be integrated into a single device and used as different pairs of first electrodes 81, 82 (e.g., as shown in the image). Figure 8 (As shown).

[0067] Figure 8 Another embodiment of the planar motor system 1 is shown, which includes a capacitive power transmission device 10, wherein first plate electrodes 81, 82 are integrated into an auxiliary device mounted on a surface 4 of a stator 2, such as a cover plate 18. The stator 2 may include a plurality of stator segments 2, which may be covered by the cover plate 18. At least two first plate electrodes 81, 82 may be integrated into the cover plate. A shuttle 3 including at least two second plate electrodes 91, 92—for example, arranged in a hole in a magnet unit 6—can be moved onto the pair of first plate electrodes 81, 82, and the first plate electrodes 81, 82 mounted on the fixed surface 4 or integrated into the cover plate 18, together with the second plate electrodes 91, 92 of the shuttle 3, can form coupling capacitors C1, C2 for energy and / or data transmission of the capacitive power transmission device 10.

[0068] Alternatively, the cover plate 18 may extend over several stator segments 2 or the entire stator 2 to form a large first plate electrode, serving as a primary-side capacitor plate, while only one second plate electrode on the shuttle 3 forms a secondary-side capacitor plate. The primary-side capacitor plate or cover plate 18 disposed on the shuttle 3 and the secondary-side capacitor plate form a first coupling capacitor C1. This embodiment of the capacitive power transmission device 10 can be used as... Figure 3 The bipolar plate configuration concept shown in the example uses the parasitic capacitance to ground as a return path, or as a second coupling capacitor C2.

[0069] Figure 9Another exemplary and schematic preferred embodiment of a planar motor system 1 is shown, configured for capacitive power and / or data transmission. The planar motor system 1 includes a first stator segment 21, on which drive coils 5 are disposed, and at least one shuttle 3, which includes a magnetic unit 6 (e.g., a permanent magnet) disposed on the shuttle 3. Furthermore, the planar motor system 1 includes a control device 7 that controls the energization of the drive coils 5 disposed on the first stator segment 21 to generate a moving magnetic field. The moving magnetic field generated by energizing the drive coils 5 of the first stator segment 21 interacts electromagnetically with the magnetic unit 6 of the shuttle 3. A driving force and a levitation force are applied to the shuttle 3, wherein the levitation force can lift the shuttle 3 from the surface 4 of the first stator segment 21 to an operating height h (e.g., a few millimeters), and the driving force can be used to move the shuttle 3. Thus, the shuttle 3 can magnetically float at an operating height h above the stator surface 4 in a desired direction of movement.

[0070] The planar motor system 1 includes at least one or a second stator segment 22, which is also configured to electromagnetically move the shuttle 3. Furthermore, at least one second stator segment 22 is configured to be added to the first stator segment 21 of the planar motor system 1 to expand the plane of movement for the shuttle, or to modify or adapt the stator 2 to meet the current needs of the production and / or transportation process. Thus, the second stator segment 22 can be configured to be movable and also form a movable portion of the planar motor system 1, while the first stator segment 21 can be configured as a fixed portion or virtually immovable. When the second stator segment 22 is added to the first stator segment 21, the shuttle 3 can seamlessly move from the first stator segment 21 to the second stator segment 22, and vice versa, as... Figure 9 As shown in the example.

[0071] The planar motor system 1 also includes a capacitor power transmission device 10, which includes at least two first plate electrodes 81, 82 and at least two second plate electrodes 91, 92. The at least two first plate electrodes 81, 82 are arranged on a first stator segment 21. The at least two first plate electrodes 81, 82 can be integrated into a housing 211 of the first stator segment 21, for example, into a sidewall of the housing 211, wherein the at least two first plate electrodes 81, 82 can be arranged, for example, stacked or adjacent to each other in the sidewall of the first stator segment 21. The at least two second plate electrodes 91, 92 are arranged on a second stator segment 22. The at least two second plate electrodes 91, 92 can be integrated into a housing 221 of the second stator segment 22. For example, when a second stator segment 22 is added to a first stator segment 21, at least two second plate electrodes 91, 92 can be integrated into the sidewall of the housing 221 of the second stator segment 22, the sidewall facing the sidewall of the housing 211 of the first stator segment 21 with the integrated first plate electrodes 81, 82. Similarly, the at least two second plate electrodes 91, 92 can be arranged stacked or adjacent to each other, for example, on the side of the first stator segment 21. Figure 9 In this configuration, at least the first plate electrodes 81, 82 and at least the second plate electrodes 91, 92 are arranged in the sidewalls of the housings 211, 221 of the respective stator segments 21, 22, arranged close to each other, and, for example, oriented vertically or perpendicularly to the surface orientation of the respective stator segments 21, 22.

[0072] To add the second stator segment 22 to the first stator segment 21, the control device 7 is configured to move the second stator segment 22 of the planar motor system 1. Therefore, the control device 7 may include a separate control unit (hardware and software), or if the control device includes several control units, the control function (software) for moving the second stator segment 22 may be integrated into one of the control units of the control device (e.g., integrated into a higher-level control unit or a central control unit). If the control device includes only one control unit for controlling the planar motor system 1, the control function (software) for moving the second stator segment 22 may be integrated into the control device. The control device moves the second stator segment 22 in such a way that one of the first plate electrodes 8 arranged on the first stator segment 21 and one of the second plate electrodes 91 and 92 arranged on the second stator segment 22 form a first coupling capacitor C1, and another of the first plate electrodes 81 and 82 arranged on the first stator segment 21 and another of the second plate electrodes 91 and 92 arranged on the second stator segment 22 form a second coupling capacitor C2.

[0073] like Figure 9As exemplarily shown, one of the at least two first plate electrodes 81, 82 arranged in the sidewall of the housing 211 of the first stator segment 21 faces one of the at least two second plate electrodes 91, 92 arranged in the sidewall of the housing 221 of the second stator segment 22. For example, the two plate electrodes 81, 91 form a first coupling capacitor C1. One of the at least two first plate electrodes 82 arranged in the sidewall of the housing 211 of the first stator segment 21 faces one of the at least two second plate electrodes 91, 92 arranged in the sidewall of the housing 221 of the second stator segment 22. For example, the two plate electrodes 82, 92 form a first coupling capacitor C2.

[0074] The control device is also configured to energize at least two first plate electrodes 81, 82 or at least two second plate electrodes 91, 92 to transfer energy and / or data between the first stator segment 21 and the additional second stator segment 22 of the planar motor system 1.

[0075] Typically, the control device 7 can energize at least two first plate electrodes 81, 82 of the first stator segment 21, which can be configured as a fixed part of the planar motor system 1 to transmit energy and / or data to a movable second stator segment 22. Therefore, the energy and / or data transmission between the two stator segments 21, 22 can be unidirectional, wherein the first plate electrodes 81, 82 of the first stator segment serve as the primary side of coupling capacitors C1, C2 or transmitters, while the second plate electrodes 91, 92 of the second stator segment 22 serve as the secondary side of coupling capacitors C1, C2 or receivers.

[0076] However, the capacitive power transfer device 10 can also be configured for bidirectional energy and / or data transfer between the two stator sections 21, 22. Specifically, bidirectional capacitive data transfer can be used to exchange data (e.g., control data, parameters, etc.) between the two stator sections 21, 22. Data between the two stator sections 21, 22 can be transmitted using different modulation methods, such as frequency modulation (e.g., frequency shift keying), amplitude modulation (e.g., amplitude shift keying), or phase shift keying, or a combination of these modulation methods.

[0077] Capacitive power and / or data transmission between the two stator sections 21 and 22, or the capacitive power transmission device used for such energy and / or data transmission, is based on stator sections 2, 21, and 22 and shuttle 3 (e.g., using a four-plate configuration concept). Figure 2 The same concept applies to capacitive power and / or data transmission between (as shown). However, it is also possible to use, such as Figure 3The exemplary dual-plate configuration concept uses the parasitic capacitance to ground as a return path or as a second coupling capacitor C2. Then, only one first plate electrode is disposed on the first stator segment 21, and only one second plate electrode is disposed on the second stator segment 22. These plate electrodes then form the first coupling capacitor C1. Figure Labels 1. Planar Motor System 2. Stator or stator segment 21 First stator section 211 The housing of the first stator section 22 Second stator segment 221 The housing of the second stator section 3 shuttles 4. Stator surface 5. Drive coil Layers 51 and 52 of the driving coil 6 Magnet Units 7. Control device 8 First plate electrode 81 The first plate electrode in the first plate electrode 82 The second plate electrode in the first plate electrode 9 Second plate electrode 91 The first plate electrode in the second plate electrode 92 The second plate electrode in the second plate electrode 10. Capacitor-type power transmission device 11 Inverter 12 Rectifiers 13 Secondary / Spindle-side compensation networks 14 Load 15. Compensation network for either the primary side or the stator segment side. 16 Printed circuit boards of sensor units 17. Additional Equipment 18 Cover plate h Operating height The axes of the x, y, z coordinate system C1, C2, Cc coupling capacitors Cp parasitic capacitance DC power supply E Ground, Ground Lc compensation coil

Claims

1. A planar motor system (1) comprising at least one stator segment (2) and at least one shuttle (3), wherein a drive coil (5) is arranged on the at least one stator segment (2), and wherein a magnet unit (6) is arranged on the at least one shuttle (3), and wherein a control device (7) controls the drive coil (5) to electromagnetically interact with the magnet unit (6) of the at least one shuttle (3) to move the at least one shuttle (3), characterized in that, The planar motor system (1) includes a capacitor power transmission device (10), wherein the capacitor power transmission device (10) includes at least two first plate electrodes (8) and at least two second plate electrodes (9), the at least two first plate electrodes being disposed on at least one stator segment (2) of the planar motor system (1), and the at least two second plate electrodes being disposed on at least one shuttle (3) of the planar motor system (1), characterized in that the control device (7) is configured to move the at least one shuttle (3) of the planar motor system (1), such that one of the first plate electrodes (81) disposed on the at least one stator segment (2) of the planar motor system (1) and the at least one second plate electrode (9) disposed on the at least one stator segment (2) of the planar motor system (1) are moved. One of the second plate electrodes (91) on the shuttle (3) forms a first coupling capacitor (C1), and another first plate electrode (82) on the first plate electrode (8) on the at least one stator segment (2) of the planar motor system (1) and another second plate electrode (92) on the second plate electrode (9) on the at least one shuttle (3) of the planar motor system (1) form a second coupling capacitor (C2), and is characterized in that the control device (7) is further configured to energize the at least two first plate electrodes (8) or the at least two second plate electrodes (9) to transfer energy and / or data between the at least one stator segment (2) of the planar motor system (1) and the at least one shuttle (3).

2. The planar motor system (1) according to claim 1, characterized in that, The capacitor power transmission device (10) includes a compensation network (13, 15) which includes at least a compensation coil (Lc) arranged on at least one stator segment (2) of the planar motor system (1) and / or a compensation coil (Lc) arranged on at least one shuttle (3) of the planar motor system (1).

3. The planar motor system (1) according to claim 1 or 2, characterized in that, The capacitor power transmission device (10) is configured to provide unidirectional or bidirectional energy and / or data transmission between at least one stator segment (2) of the planar motor system (1) and at least one shuttle (3).

4. The planar motor system (1) according to any one of claims 1 to 3, characterized in that, Frequency modulation, amplitude modulation, phase shift keying, or any combination thereof are used to transmit data between at least one stator segment (2) of the planar motor system (1) and at least one shuttle (3).

5. The planar motor system (1) according to any one of claims 1 to 4, characterized in that, At least two drive coils (5) or groups of drive coils arranged on the at least one stator segment (2) and controlled independently by the control device (7) form the at least two first plate electrodes (8, 81, 82).

6. The planar motor system (1) according to any one of claims 1 to 4, characterized in that, Additional capacitor plates are disposed on the at least one stator segment (2) to form the at least two first plate electrodes (8, 81, 82).

7. The planar motor system (1) according to claim 6, characterized in that, The additional capacitor plate is arranged on the side of the at least one stator segment (2) near the drive coil (5), or is characterized in that the additional capacitor plate is installed above or below the drive coil (5), or is installed between the layers (51, 52) of the drive coil (5).

8. The planar motor system (1) according to claim 6 or 7, characterized in that, The additional capacitor plate is configured as a separate capacitor plate, or is characterized in that... The additional capacitor plate is integrated into the printed circuit board of the drive coil (5) or drive coil group or the printed circuit board of the sensor unit (16).

9. The planar motor system (1) according to any one of claims 1 to 8, characterized in that, At least one additional device (17) is provided, wherein at least two first plate electrodes (8, 81, 82) are integrated into the at least one additional device, wherein the at least one additional device (17) is either mounted near one side of the at least one stator segment (2) or mounted on the surface (4) of the at least one stator segment (2).

10. The planar motor system (1) according to any one of claims 1 to 9, characterized in that, The at least two second plate electrodes (9, 91, 92) are arranged close to the magnet unit (6), and the two second plate electrodes (9, 91, 92) are arranged parallel to or perpendicular to the magnet unit (6).

11. The planar motor system (1) according to any one of claims 1 to 9, characterized in that, The at least two second plate electrodes (9) are arranged above or below the magnet unit (6) of the at least one shuttle (3).

12. A planar motor system (1) comprising a first stator segment (21) and at least one shuttle (3), wherein a drive coil (5) is arranged on the first stator segment (21) and a magnet unit (6) is arranged on the at least one shuttle (3), and wherein a control device (7) controls the drive coil (5) to electromagnetically interact with the magnet unit (6) of the at least one shuttle (3) to move the at least one shuttle (3), characterized in that, The planar motor system (1) includes at least one second stator segment (22) configured to be added to the first stator segment (21) of the planar motor system (1). The planar motor system (1) includes a capacitive power transfer device (10) comprising at least two first plate electrodes (8) arranged on the first stator segment (21) of the planar motor system (1) and at least two second plate electrodes (9) arranged on the second stator segment (22) of the planar motor system (1). The control device (7) is configured to move the second stator segment (22) of the planar motor system (1) such that one of the first plate electrodes (81) arranged on the first stator segment (21) of the planar motor system (1) is... The control device (7) is further configured to energize the at least two first plate electrodes (8) or the at least two second plate electrodes (9) arranged on the second stator segment (22) of the planar motor system (1) to transfer energy and / or data between the first stator segment (21) and the second stator segment (22) of the planar motor system (1).

13. The planar motor system (1) according to claim 12, characterized in that, The at least two first plate electrodes (8) are integrated into the housing (211) of the first stator segment (21) of the planar motor system (1), and the at least two second plate electrodes (9) are integrated into the housing (221) of the second stator segment (22) of the planar motor system (1).

14. The planar motor system (1) according to claim 12 or 13, characterized in that, The at least two second plate electrodes (9) are integrated into one side of the housing (221) of the second stator segment (22) of the planar motor system (1), and when the second stator segment (22) is added to the first stator segment (21), the side faces the housing (211) of the first stator segment (21) of the planar motor system (1) in which the at least two first plate electrodes (8) are integrated.

15. The planar motor system (1) according to any one of claims 12 to 14, characterized in that, The at least two first plate electrodes (8) and the at least two second plate electrodes (9) are arranged stacked or adjacent to each other on the respective stator segments (21, 22) of the planar motor system (1).

Images