Adaptive semiconductor pressure control flow component

Abstract

The present application relates to the technical field of semiconductor and discloses a self-adaptive semiconductor pressure control flow control component, which comprises a valve body, a valve rod, a valve plate and a support assembly, the valve body is provided with a fluid passage, the valve rod is rotatably installed on the valve body, the valve rod comprises a driving end and a stop end, the driving end extends to the outside of the valve body, the stop end penetrates through the fluid passage and is axially stopped on the valve body, the valve plate is arranged in the fluid passage and connected with the valve rod, so as to adjust the opening degree or on-off state of the fluid passage, thereby realizing pressure control, the support assembly comprises a first bearing and a second bearing, the first bearing is connected between the stop end and the valve body, the second bearing is connected between the driving end and the valve body, the inner ring of the first bearing keeps linear contact with the stop end, so as to realize the aligning function, and the inner ring of the second bearing can rotate at any angle relative to the outer ring, so as to compensate the coaxiality deviation between the valve body and the valve rod. The present application allows the valve rod to have coaxiality error and installation deflection while realizing axial limiting.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor technology, and specifically relates to an adaptive semiconductor pressure control flow control component. Background Technology

[0002] In existing adaptive semiconductor pressure control flow control components, the valve stem is rotatably mounted on the valve body, and the valve plate is fixedly connected to the valve stem to rotate synchronously when the valve stem rotates, thereby opening or closing the fluid passage within the valve body or adjusting the opening degree. Typically, the valve stem is mounted on the valve body via bearings, which bear radial loads to provide radial constraint and, through appropriate design, provide unidirectional axial constraint to limit axial movement of the valve stem. However, in actual machining and assembly, the valve stem itself may have coaxiality errors, and the axis between the upper and lower mounting holes on the valve body used to mount the valve stem may also have a certain installation deviation. Therefore, when the valve stem axis is misaligned with the bearing outer ring axis, problems such as jamming and wear can easily occur when the valve stem drives the valve plate to rotate, severely shortening the service life of the flow control component. Summary of the Invention

[0003] This invention aims to at least partially solve one of the technical problems in related technologies. To this end, embodiments of this invention propose an adaptive semiconductor pressure control flow control component. This component axially limits the valve stem while allowing for coaxiality errors and installation misalignment between the valve stem and the valve body, improving adaptability to machining or assembly errors. Furthermore, to address the machining difficulties caused by the integrally machined limiting boss on the valve stem, a detachable rotating limiting component is used to reduce the machining difficulty of the valve stem.

[0004] An adaptive semiconductor pressure control flow control component according to an embodiment of the present invention includes a valve body, a valve stem, a valve plate, and a support assembly. The valve body has a fluid channel, and the valve stem is rotatably mounted on the valve body. The valve stem includes a driving end and a stop end. The driving end extends to the outside of the valve body, and the stop end passes through the fluid channel and axially stops against the valve body. The valve plate is disposed in the fluid channel and connected to the valve stem. The valve plate rotates synchronously with the valve stem to adjust the opening or closing state of the fluid channel, thereby achieving pressure control. The support assembly includes a first bearing and a second bearing. The first bearing is connected between the stop end and the valve body, and the second bearing is connected between the driving end and the valve body. The inner ring of the first bearing maintains line contact with the stop end to achieve self-aligning function. The inner ring of the second bearing can rotate at any angle relative to its outer ring to compensate for the coaxiality deviation between the valve body and the valve stem.

[0005] The adaptive semiconductor pressure control flow control component of this invention adapts to the straightness deviation of the valve stem and / or the radial deviation between the upper and lower mounting holes on the valve body used to install the valve stem by using two upper and lower bearings. This provides coaxial deviation compatibility, solves the rotation jamming problem caused by the machining error of the valve stem and / or valve body itself, or by the misalignment of the two during assembly, and extends the service life of the pressure control flow control component.

[0006] In some embodiments, the stop end and / or the drive end are formed by reducing the diameter of the portions of the valve stem at both ends other than the main body portion for mounting the valve plate, and a shoulder is formed between the stop end and the main body of the valve stem.

[0007] In some embodiments, the end of the stop end away from the shoulder forms a mounting portion that mates with the inner ring of the first bearing. The outer peripheral surface of the mounting portion is a convex arc-shaped surface, such that the maximum diameter of the mounting portion is located in its middle. The first bearing is sleeved on the mounting portion, and its inner ring maintains a line contact with the arc-shaped surface of the mounting portion.

[0008] In some embodiments, a preset distance is reserved between the mounting portion and the shoulder to allow the stop end to form a deformable portion, the diameter of which is smaller than that of the mounting portion, so that adaptive deformation can occur during valve stem assembly.

[0009] In some embodiments, a transition connection portion of a preset thickness is formed between the deformable portion and the mounting portion. The size of the transition connection portion gradually increases from the deformable portion toward the mounting portion, and its bottom surface toward the mounting portion is a planar structure to limit the first bearing.

[0010] In some embodiments, the adaptive semiconductor pressure control flow control component further includes a bracket, which is fixedly connected to the valve body for mounting a drive actuator device. The bracket has a first protruding ring on its bottom surface facing the valve body, and the first protruding ring presses against the outer ring of the second bearing from above to position the second bearing.

[0011] In some embodiments, the valve body is provided with a through hole, the driving end of the valve stem protrudes through the through hole, the driving end includes a first stepped portion that is provided adjacent to the main body portion of the valve stem and forms an inwardly tapering portion, the inner ring of the second bearing is supported on the first stepped portion, and a second stepped portion for supporting the outer ring of the second bearing is provided in the through hole.

[0012] In some embodiments, a third step portion is further provided in the through hole, the third step portion being used for positioning and connection with the bracket.

[0013] In some embodiments, a sealing assembly is provided below the second bearing inside the through hole. The sealing assembly is used to seal the annular gap between the valve stem and the valve body, so as to seal and isolate the fluid passage inside the valve body from the outside.

[0014] In some embodiments, the sealing assembly includes a plurality of sealing rings spaced apart to form multiple seals, a first spacer disposed between the sealing rings, and a second spacer disposed between the second bearing and an adjacent sealing ring.

[0015] In some embodiments, the valve stem is further provided with a rotation limiting component for limiting the rotation angle range of the valve stem. The rotation limiting component includes an integrally formed sleeve, the upper end of which forms a limiting groove, and the lower end of which is provided with a first pin hole. The valve stem is provided with a second pin hole at a preset position, so as to achieve a fixed connection between the sleeve and the valve stem by means of a pin, so that the sleeve rotates synchronously with the valve stem.

[0016] In some embodiments, the bracket is provided with a limiting protrusion extending toward the limiting groove. During the rotation of the valve stem, the limiting protrusion slides within the limiting groove to achieve limiting.

[0017] In some embodiments, the drive end further includes a fourth step portion disposed above the first step portion, the fourth step portion being used to position the rotation limiting component.

[0018] In some embodiments, the sleeve is provided with a second protruding ring that tapers inward toward the bottom surface of the fourth step portion, and the second protruding ring matches the size of the fourth step portion.

[0019] The adaptive semiconductor pressure control flow control component of this invention optimizes the valve stem end structure, especially the stop end, which utilizes a deformation part to improve assembly adaptability. A multi-layer sealing structure achieves a stable seal between the valve stem and the valve body. In addition, the detachable mechanical rotation limiting structure reduces the processing difficulty of the valve stem. The overall structure is compact, easy to assemble, and has good sealing performance and stability, making it suitable for semiconductor precision manufacturing conditions. Attached Figure Description

[0020] Figure 1 This is a three-dimensional schematic diagram of the present invention.

[0021] Figure 2 This is the front view of the present invention.

[0022] Figure 3 This is a front cross-sectional view of the present invention.

[0023] Figure 4 This is the present invention. Figure 3A magnified view of the part where the bracket and valve body meet.

[0024] Figure 5 This is a perspective view of the valve stem of the present invention.

[0025] Figure 6 It is a three-dimensional sleeve of the present invention. Figure I .

[0026] Figure 7 It is a three-dimensional sleeve of the present invention. Figure II .

[0027] Figure 8 This is the three-dimensional support of the present invention. Figure I .

[0028] Figure 9 This is the three-dimensional support of the present invention. Figure II .

[0029] Figure label: 1. Valve body; 11. Fluid passage; 12. Through hole; 121. Second step; 122. Third step; 123. Support plate; 2. Valve stem; 21. Drive end; 211. First step; 212. Fourth step; 22. Stop end; 221. Mounting part; 222. Transition connection part; 223. Deformation part; 23. Second pin hole; 24. Shoulder; 3. Valve plate; 4. First bearing; 5. Second bearing; 6. Sealing assembly; 61. Sealing ring; 62. First isolation gasket; 63. Second isolation gasket; 7. Sleeve; 71. First pin hole; 72. Limiting groove; 73. Second convex ring; 8. Pins; 9. Bracket; 91. First protruding ring; 92. Limiting protrusion. Detailed Implementation

[0030] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0031] like Figures 1-9As shown, the adaptive semiconductor pressure control flow control component of this embodiment includes a valve body 1, a valve stem 2, a valve plate 3, and a support assembly. The valve body 1 has a fluid channel 11. The valve stem 2 is rotatably mounted on the valve body 1. The valve stem 2 includes a drive end 21 and a stop end 22. The drive end 21 extends to the outside of the valve body 1, and the stop end 22 passes through the fluid channel 11 and axially abuts against the valve body 1. The valve plate 3 is disposed in the fluid channel 11 and connected to the valve stem 2. The valve plate 3 rotates synchronously with the valve stem 2 to adjust the opening or closing state of the fluid channel 11, thereby achieving pressure control. The support assembly includes a first bearing 4 and a second bearing 5. The first bearing 4 is connected between the stop end 22 and the valve body 1, and the second bearing 5 is connected between the drive end 21 and the valve body 1. The inner ring of the first bearing 4 maintains line contact with the stop end 22 to achieve self-aligning function. The inner ring of the second bearing 5 can rotate at any angle relative to its outer ring to compensate for the coaxiality deviation between the valve body 1 and the valve stem 2.

[0032] In this embodiment, the adaptive semiconductor pressure control flow control component utilizes the characteristic of the inner ring of the second bearing 5 being able to deflect at any angle relative to the outer ring. It also works in conjunction with the stop end 22, which uses the first bearing 4 to provide self-aligning functionality through inner ring line contact. The combined action of the first bearing 4 and the second bearing 5 can accommodate coaxiality deviations between the valve body 1 and the valve stem 2, i.e., straightness deviations inherent in the valve stem 2 itself, or radial deviations between the upper and lower mounting holes on the valve body 1 used to mount the valve stem 2. This reduces the machining accuracy requirements of the valve body 1 or the valve stem 2, improves adaptability and compatibility, and simultaneously enhances the accuracy of pressure control and the reliability of component operation.

[0033] Specifically, the valve body 1 is the main part. This invention uses a butterfly valve as an example to illustrate the overall pressure control flow control component, but its applicability to the support assembly is not limited to butterfly valves. A fluid channel 11 is provided inside the valve body 1. The valve plate 3 is placed inside the fluid channel 11 and fixedly connected to the valve stem 2. Typically, the valve stem 2 is a long shaft-like part. To facilitate the installation of the valve plate 3 and the rotation of the valve plate 3, a flat portion is designed in the main body of the valve stem 2, thereby facilitating its fixed connection with the valve plate 3.

[0034] The upper end of valve stem 2, i.e., the drive end 21, is typically connected to a drive actuator (fixed on bracket 9, not shown in the figure) to drive valve stem 2 to rotate, thereby causing valve plate 3 to rotate synchronously, thus changing the effective cross-sectional area of ​​fluid passage 11 to achieve on / off switching and opening degree regulation. The lower end of valve stem 2, i.e., the stop end 22, passes through valve body 1 and is rotatably connected to valve body 1. The drive actuator drives valve stem 2 to rotate, causing valve plate 3 to rotate synchronously.

[0035] The first bearing 4 is mounted on the valve body 1 at the position corresponding to the stop end 22 of the valve stem 2, with its inner ring maintaining line contact with the stop end 22. The second bearing 5 is mounted on the valve body 1 at the position corresponding to the drive end 21 of the valve stem 2, with its inner ring capable of rotating at any angle relative to its outer ring. In other words, the valve body 1 has two mounting holes, one above the other, for mounting the drive end 21 and the other the stop end 22 of the valve stem 2, respectively. It should be noted that the mounting hole for the stop end 22 is a blind hole structure, allowing the valve stem to rotate relative to the valve body 1 via the first bearing 4.

[0036] Based on the aforementioned structural form of valve body 1 and valve stem 2, machining errors in components such as valve body 1 and valve stem 2 can easily lead to poor straightness of valve stem 2 itself, machining deviations in the opening positions of the first bearing 4 or second bearing 5 mounted on valve body 1, and installation errors after valve stem 2 is installed. These issues can easily cause eccentricity between valve stem 2 and the first bearing 4, or between valve stem 2 and the second bearing 5. When there is a coaxiality deviation between the axis of valve stem 2 and the axis of the mounting hole of valve body 1, or a coaxiality deviation between the axes of the two mounting holes on the upper and lower parts of valve body 1, the inner ring of the second bearing 5 automatically deflects with the tilting posture of valve stem 2. Simultaneously, the stop end 22 can deflect relative to the inner ring of the first bearing 4, producing a ball joint-like effect. Utilizing the design of two bearings can accommodate coaxiality deviations, reduce the precision requirements for machining and installation, and ensure stable operation even after long-term use.

[0037] In some embodiments, the stop end 22 and / or the drive end 21 are formed by reducing the diameter of the portions of the valve stem 2 at both ends other than the main body portion for mounting the valve plate 3, and a shoulder 24 is formed between the stop end 22 and the main body portion of the valve stem 2.

[0038] Specifically, the valve stem 2 can be divided into a central main body and two ends, a stop end 22 and a drive end 21, located at the upper and lower ends of the main body. The main body has a larger diameter and a flat portion for mounting the valve plate 3. The stop end 22 extends from the lower end face of the main body of the valve stem 2, reducing its cylindrical diameter to a smaller size, naturally forming an annular step plane at the diameter change position. This plane is the shoulder 24 on one side of the stop end 22. The drive end 21 is similarly formed and will not be described further. The plane of the shoulder 24 is perpendicular to the axial direction of the valve stem 2, providing a defined thrust surface for the components fitted onto it. In actual machining, the diameter of the stop end 22 can be reduced to form the shoulder 24, or only the drive end 21 can be reduced, or both ends can be reduced. Preferably, both ends are reduced to facilitate bearing installation and positioning.

[0039] In some embodiments, the end of the stop end 22 away from the shoulder 24 forms a mounting portion 221 that mates with the inner ring of the first bearing 4. The outer peripheral surface of the mounting portion 221 is a convex arc surface, such that the maximum diameter of the mounting portion 221 is located in its middle. The first bearing 4 is sleeved on the mounting portion 221, and its inner ring and the arc surface of the mounting portion 221 maintain a line contact state.

[0040] In some embodiments, a preset distance is reserved between the mounting portion 221 and the shoulder 24 so that the stop end 22 forms a deformable portion 223. The diameter of the deformable portion 223 is smaller than that of the mounting portion 221, so that it can undergo adaptive deformation when the valve stem 2 is assembled, in order to accommodate the coaxiality deviation between the valve stem 2 and the valve body 1.

[0041] In some embodiments, a transition connection portion 222 of a predetermined thickness is formed between the deformable portion 223 and the mounting portion 221. The size of the transition connection portion 222 gradually increases from the deformable portion 223 toward the mounting portion 221, and its bottom surface toward the mounting portion 221 is a planar structure.

[0042] See appendix Figure 3 and attached Figure 6 As shown, this embodiment mainly focuses on the design of the stop end 22. Specifically, the end of the stop end 22 away from the shoulder 24 forms a mounting portion 221. The outer peripheral surface of the mounting portion 221 is a convex arc-shaped surface, with the maximum diameter located in the middle. The first bearing 4 is sleeved on the mounting portion 221, and its inner ring maintains a line contact with the arc-shaped surface. When the valve stem 2 deviates, the stop end 22 of the valve stem 2 can adaptively and finely adjust the angle along the contact line with the inner ring of the first bearing 4 through the arc-shaped surface of the mounting portion 221, completing the self-aligning function without generating additional constraint force, thereby accommodating the coaxiality deviation between the valve stem 2 and the valve body 1.

[0043] In some specific embodiments, at least the inner ring of the first bearing 4 is made of ceramic to avoid excessive wear caused by misalignment between the stop end 22 and the inner ring of the first bearing 4, thereby improving product life. In actual products, the first bearing 4 can be a ceramic deep groove ball bearing, and the self-aligning function can be achieved by the fit between the smaller ceramic bearing and the arc-shaped surface of the stop end 22 of the valve stem 2.

[0044] The deformation part 223 is located between the mounting part 221 and the shoulder 24. Its diameter is smaller than that of the mounting part 221. When the valve stem 2 is tilted, it can provide a clearance area for the valve stem 2, so that the deformation part 223 can undergo elastic bending deformation, thus avoiding excessive local stress in the mounting part 221 or the main body.

[0045] A transition connection 222 is disposed between the deformable portion 223 and the mounting portion 221. Its outer contour gradually expands from the deformable portion 223 towards the mounting portion 221, forming a tapered transition. The thickness of the transition connection 222 is a preset value, and the transition connection of the transition connection 222 improves the strength of the mounting portion 221. The bottom surface of the transition connection 222 facing the mounting portion 221 is a planar structure perpendicular to the axis of the valve stem 2. When the valve stem 2 is subjected to downward pressure, this planar structure can abut against the inner ring of the first bearing 4, supporting the valve stem 2. Furthermore, after assembly, a gap is reserved between the planar structure of the transition connection 222 and the upper end face of the first bearing 4. This gap provides clearance for the tilting of the valve stem 2 when it tilts, preventing the transition connection 222 on the valve stem 2 from pressing against the inner ring of the first bearing 4.

[0046] In some embodiments, the adaptive semiconductor pressure control flow control component further includes a bracket 9, which is fixedly connected to the valve body 1 for mounting a drive actuator device. The bracket 9 has a first protruding ring 91 on the bottom surface facing the valve body 1, and the first protruding ring 91 presses against the outer ring of the second bearing 5 from above to position the second bearing 5.

[0047] The bracket 9 is fixedly connected to the valve body 1, providing a mounting base for the actuator device. Simultaneously, the first convex ring 91 on the bottom surface of the bracket 9 presses against the outer ring of the second bearing 5 from above, achieving axial positioning of the second bearing 5. This structure integrates actuator mounting and bearing positioning into the bracket 9.

[0048] The bracket 9 is a connector independent of the valve body 1, and is fixed to the upper surface of the valve body 1 by screws. A drive actuator is mounted above the bracket 9, and its output shaft is connected to the drive end 21 of the valve stem 2. The bracket 9 has a downwardly protruding first ring 91 on its bottom surface facing the valve body 1. The first ring 91 is an annular boss structure, and its inner diameter is between the inner and outer ring diameters of the second bearing 5. After the bracket 9 is installed in place, the lower end face of the first ring 91 contacts the upper end face of the outer ring of the second bearing 5, pressing the outer ring tightly against the support surface of the valve body 1, without the need for additional pressure cap parts.

[0049] In some specific embodiments, the second bearing 5 is a self-aligning ball bearing, which facilitates arbitrary deflection of the valve stem 2 at various angles.

[0050] Based on the structure of the bracket 9, through the fastening connection between the bracket 9 and the valve body 1, the bracket 9 presses against the outer ring of the second bearing 5, thereby providing a downward pressing force to the driving end 21 of the valve stem 2. Simultaneously, this, combined with the limiting effect between the transition connection 222 of the stop end 22 of the valve stem 2 and the first bearing 4, achieves the axial limiting function of the valve stem 2, preventing axial movement of the valve stem 2. Furthermore, regarding the connection structure of the stop end 22, even if the downward pressing force at the driving end of the valve stem 2 fails, the limiting effect of the first bearing 4 can still prevent the valve stem 2 from moving downwards as a whole, thus preventing the valve plate 3 from shifting axially within the valve body 1 and maintaining a centered alignment. Additionally, it should be noted that the first bearing 4 is installed in the mounting hole on the valve body 1, with a predetermined gap between it and the bottom of the mounting hole to accommodate the end structure of the valve stem 2. Moreover, a gap is also maintained between the end of the valve stem 2 and the bottom wall of the mounting hole to prevent friction between the valve stem 2 and the valve body 1 during rotation. In other words, the end of the stop end 22 of the valve stem 2 is restricted to a free state.

[0051] In some embodiments, the valve body 1 is provided with a through hole 12, which serves as a mounting hole for mounting the drive end 21 of the valve stem 2. Correspondingly, a second mounting hole for mounting the stop end 22 of the valve stem 2 is also provided directly below the through hole 12 along the axial direction, and this mounting hole is a blind hole. The drive end 21 of the valve stem 2 extends through the through hole 12, and the drive end 21 includes a first stepped portion 211 that is provided adjacent to the main body of the valve stem 2 and tapers inward. (See attached figure) Figure 5 As shown, the first step portion 211 refers to a plane perpendicular to the axial direction of the valve stem 2. The inner ring of the second bearing 5 is supported on the first step portion 211. A second step portion 121 for supporting the outer ring of the second bearing 5 is provided in the through hole 12. The second step portion 121 is also a plane perpendicular to the axial direction of the valve stem 2.

[0052] In some embodiments, a third step portion 122 is also provided in the through hole 12, which is used for positioning connection with the bracket 9.

[0053] In this embodiment, the first step portion 211 supports the inner ring of the second bearing 5, the second step portion 121 supports the outer ring of the second bearing 5, and the third step portion 122 is positioned and connected to the bracket 9. The three step portions integrate the bearing mounting and bracket 9 positioning into the same through hole 12, improving the efficiency and accuracy of installation.

[0054] See appendix Figure 4Specifically, the through hole 12 is opened perpendicular to the flow direction of the fluid channel 11 of the valve body 1 and communicates with the fluid channel 11. The stop end 22 of the valve stem 2 passes through the through hole 12 and then through the fluid channel 11 and is rotatably connected to the side wall on the opposite side of the valve body 1. The drive end 21 of the valve stem 2 protrudes from the through hole 12. The drive end 21 includes a first stepped portion 211 that is adjacent to the main body and tapers inward. The inner ring of the second bearing 5 is supported on the first stepped portion 211. A second stepped portion 121 for supporting the outer ring of the second bearing 5 is provided in the through hole 12. The outer ring of the second bearing 5 is supported on the second stepped portion 121. The first stepped portion 211 and the second stepped portion 121 provide independent axial support surfaces for the inner ring and outer ring of the second bearing 5, respectively.

[0055] The third step 122 is located above the second step 121 within the through hole 12 and is used for positioning and connection with the bracket 9. During assembly, the lower part of the bracket 9 has a protrusion that mates with the third step 122 in the through hole 12. The circumferential surface of this protrusion has a straight surface structure for quick positioning. The protrusion at the lower part of the bracket 9 is placed within the through hole 12, achieving centering and positioning of the bracket 9 and the valve body 1, as well as the correspondence between the bolt holes on the valve body 1 and the bolt holes on the bracket 9. Subsequently, the bracket 9 and the valve body 1 are connected by bolts.

[0056] In some embodiments, a sealing assembly 6 is provided below the second bearing 5 in the through hole 12. The sealing assembly 6 is used to seal the annular gap between the valve stem 2 and the valve body 1 so that the fluid passage 11 inside the valve body 1 is sealed and isolated from the outside.

[0057] In some embodiments, the sealing assembly 6 includes a plurality of sealing rings 61 spaced apart to form multiple seals, a first isolation pad 62 disposed between the sealing rings 61, and a second isolation pad 63 disposed between the second bearing 5 and an adjacent sealing ring 61.

[0058] See appendix Figure 4 As shown, the sealing assembly 6 is located below the second bearing 5 within the through hole 12, sealing the annular gap between the valve stem 2 and the valve body 1. Multiple sealing rings 61 form a multi-layer sealing system, ensuring that the medium flow space corresponding to the fluid passage 11 within the valve body 1 is isolated from the outside. The first isolation gasket 62 and the second isolation gasket 63 are annular gaskets, which can further cooperate with the sealing rings 61 to achieve a better seal. It is also worth noting that the elastic deformation of the sealing assembly 6 allows the valve stem 2 to tilt, and maintains a seal even when tilted.

[0059] Preferably, along the direction from the inside to the outside of the valve body 1, the area of ​​the through hole 12 near the fluid channel 11 expands outward to form the base portion 123 of the sealing assembly 6. The base portion 123 is located closer to the valve stem 2 than the second step portion 121, so that the sealing assembly 6 can be disposed in the installation space formed between the base portion 123 and the second bearing 5, preventing the sealing assembly 6 from being excessively squeezed and improving the sealing effect of the sealing assembly 6.

[0060] In some embodiments, the valve stem 2 is further provided with a rotation limiting component for limiting the rotation angle range of the valve stem 2. The rotation limiting component includes an integrally formed sleeve 7, the upper end of the sleeve 7 is formed with a limiting groove 72, and the lower end is provided with a first pin hole 71. A second pin hole 23 is provided at a preset position on the valve stem 2 so as to achieve a fixed connection between the sleeve 7 and the valve stem 2 through the pin 8, so that the sleeve 7 rotates synchronously with the valve stem 2.

[0061] In this embodiment, the rotary limiting component is used to limit the rotation angle range of the valve stem 2. The sleeve 7 can be integrally formed separately and fixedly connected to the valve stem 2 by the pin 8, so that the sleeve 7 rotates synchronously with the valve stem 2. The sleeve 7 and the valve stem 2 are separately set, which facilitates disassembly and replacement. In addition, the detachable rotary limiting component reduces the processing steps of the valve stem 2 and greatly reduces the processing difficulty of integrally machining the limiting boss on the valve stem 2 in the prior art. It is worth noting that the limiting groove 72 usually needs to work in conjunction with the limiting protrusion and other components configured on the valve body 1. The limiting protrusion can be implemented using the same technical method in related technologies.

[0062] In some embodiments, the bracket 9 is provided with a limiting protrusion 92 extending toward the limiting groove 72. During the rotation of the valve stem 2, the limiting protrusion 92 slides within the limiting groove 72 to achieve limiting. Additionally, the limiting protrusion 92 is formed by a portion of the bracket 9 protruding inwards. Both the limiting protrusion 92 and the limiting groove 72 extend circumferentially, and they cooperate to achieve limiting. Taking a butterfly valve as an example, the limiting angle is typically 90 degrees.

[0063] In some embodiments, the drive end 21 further includes a fourth step portion 212 disposed above the first step portion 211, the fourth step portion 212 being used to position the rotation limiting component. Similar to the first step portion 211 described above, the fourth step portion 212 also refers to a surface perpendicular to the axial direction of the valve stem 2.

[0064] For details, please see the appendix. Figure 4 and attached Figure 5The maximum diameter of the fourth step 212 is smaller than the maximum diameter of the first step 211. The second pin hole 23 is located in the area of ​​the valve stem 2 above the fourth step 212. When the sleeve 7 is installed by passing through the valve stem 2 from top to bottom, the fourth step 212 can accurately position the sleeve 7 so that the pin 8 can quickly pass through the first pin hole 71 and the second pin hole 23 to achieve a fast connection.

[0065] In some embodiments, the sleeve 7 is provided with a second protruding ring 73 that retracts inward toward the bottom surface of the fourth step portion 212. The second protruding ring 73 matches the size of the fourth step portion 212 to achieve positioning and support of the second protruding ring 73.

[0066] After the sleeve 7 is installed in place, the bottom surface of the second convex ring 73 fits against the fourth step portion 212, providing axial positioning for the sleeve 7. The outer diameter of the second convex ring 73 is larger than the maximum diameter of the fourth step portion 212, but slightly protrudes beyond the maximum diameter of the fourth step portion 212. This ensures that the bottom surface of the second convex ring 73 maintains only a small contact area with the upper end face of the inner ring of the second bearing 5. On the one hand, this restricts the valve stem 2 from moving upward axially; on the other hand, the smaller contact area avoids interference with the deflection angle of the inner ring of the second bearing 5 relative to the outer ring, ensuring the overall self-aligning function.

[0067] By inwardly contracting the second convex ring 73 relative to the cylindrical portion of the sleeve 7, sufficient diameter and thickness of the cylindrical portion can be ensured, thus providing sufficient length for the first pin hole 71. This allows for a further connection via a matching pin, ensuring the strength of the connection between the sleeve 7 and the valve stem 2. Based on this structure, since the upper portion of the sleeve 7 does not require strength, the diameter of the cylindrical portion can be appropriately reduced, and a limiting groove 72 can be integrally formed by cutting. Correspondingly, an installation channel is formed in the central region of the bracket 9 for inserting the valve stem 2 and accommodating the sleeve 7. A limiting protrusion 92 is formed on the top edge of the installation channel to engage with the limiting groove 72, simplifying the complex structure of the bracket in the prior art. Bearings and other components are no longer pre-installed within the bracket, facilitating assembly.

[0068] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0069] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0070] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0071] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0072] In this invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0073] Although the above embodiments have been shown and described, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Any changes, modifications, substitutions and variations made to the above embodiments by those skilled in the art are within the protection scope of the present invention.

Claims

1. An adaptive semiconductor pressure control flow control component, characterized in that, include: Valve body, wherein the valve body is provided with a fluid passage; A valve stem is rotatably mounted on the valve body. The valve stem includes a driving end and a stop end. The driving end extends to the outside of the valve body, and the stop end passes through the fluid passage and axially stops against the valve body. A valve plate is disposed in the fluid channel and connected to the valve stem. The valve plate rotates synchronously with the valve stem to adjust the opening degree or opening and closing state of the fluid channel, thereby realizing pressure control. The support assembly includes a first bearing and a second bearing. The first bearing is connected between the stop end and the valve body, and the second bearing is connected between the drive end and the valve body. The inner ring of the first bearing maintains line contact with the stop end to achieve self-aligning function. The inner ring of the second bearing can rotate at any angle relative to its outer ring to compensate for the coaxiality deviation between the valve body and the valve stem. A shoulder is formed between the stop end and the main body of the valve stem. The end of the stop end away from the shoulder forms a mounting part that mates with the inner ring of the first bearing. The outer peripheral surface of the mounting part is a convex arc surface, so that the maximum diameter of the mounting part is located in its middle. The first bearing is sleeved on the mounting part, and its inner ring maintains a line contact with the arc surface of the mounting part. A preset distance is reserved between the mounting part and the shoulder so that the stop end forms a deformable part. The diameter of the deformable part is smaller than that of the mounting part so that it can undergo adaptive deformation when the valve stem is assembled. A transition connection portion of preset thickness is formed between the deformable portion and the mounting portion. The size of the transition connection portion gradually increases from the deformable portion toward the mounting portion, and its bottom surface toward the mounting portion is a planar structure to mate with the inner ring of the first bearing.

2. The adaptive semiconductor pressure control flow control component according to claim 1, characterized in that, The stop end and / or the drive end are formed by reducing the diameter of the portions of the valve stem outside the main body portion for mounting the valve plate.

3. The adaptive semiconductor pressure control flow control component according to claim 1, characterized in that, It also includes a bracket, which is fixedly connected to the valve body for mounting a drive actuator device. The bracket has a first protruding ring on the bottom surface facing the valve body. The first protruding ring presses against the outer ring of the second bearing from above to position the second bearing.

4. The adaptive semiconductor pressure control flow control component according to claim 3, characterized in that, The valve body is provided with a through hole, and the driving end of the valve stem passes through the through hole. The driving end includes a first step portion that is provided adjacent to the main body of the valve stem and forms an inwardly tapering portion. The inner ring of the second bearing is supported on the first step portion. The through hole is provided with a second step portion for supporting the outer ring of the second bearing.

5. The adaptive semiconductor pressure control flow control component according to claim 4, characterized in that, A third step is also provided inside the through hole, which is used for positioning and connection with the bracket.

6. The adaptive semiconductor pressure control flow control component according to claim 4, characterized in that, A sealing assembly is provided below the second bearing inside the through hole. The sealing assembly is used to seal the annular gap between the valve stem and the valve body, so as to seal and isolate the fluid passage inside the valve body from the outside.

7. The adaptive semiconductor pressure control flow control component according to claim 6, characterized in that, The sealing assembly includes a plurality of sealing rings spaced apart to form multiple seals, a first spacer spaced between the sealing rings, and a second spacer spaced between the second bearing and the adjacent sealing ring.

8. The adaptive semiconductor pressure control flow control component according to claim 7, characterized in that, The valve stem is also provided with a rotation limiting component for limiting the rotation angle range of the valve stem. The rotation limiting component includes an integrally formed sleeve. The upper end of the sleeve forms a limiting groove, and the lower end is provided with a first pin hole. The valve stem is provided with a second pin hole at a preset position so as to achieve a fixed connection between the sleeve and the valve stem through a pin, so that the sleeve rotates synchronously with the valve stem.

9. The adaptive semiconductor pressure control flow control component according to claim 8, characterized in that, The bracket is provided with a limiting protrusion extending toward the limiting groove. During the rotation of the valve stem, the limiting protrusion slides in the limiting groove to achieve limiting.

10. The adaptive semiconductor pressure control flow control component according to claim 8, characterized in that, The driving end also includes a fourth step portion disposed above the first step portion, the fourth step portion being used to position the rotation limiting component.

11. The adaptive semiconductor pressure control flow control component according to claim 10, characterized in that, The sleeve is provided with a second protruding ring that tapers inward toward the bottom surface of the fourth step portion, and the second protruding ring matches the size of the fourth step portion.

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