A thermostat system and device

Abstract

The application discloses a constant temperature system and device, and relates to the technical field of temperature control, which comprises a multi-stage symmetrical biflow system, a heat exchange unit array, a multi-stage symmetrical biflow system and a heat insulation structure. Constant temperature media enters the multi-stage symmetrical biflow system from a media entrance, is symmetrically biflowed stage by stage to form parallel branches with a number of 2 power growth, and the flow rate and flow speed of each branch are consistent; after heat exchange by the heat exchange unit, the fluid flows out from the media outlet through stage by stage convergence which is completely opposite to the biflow process; the heat insulation structure isolates the biflow and the biflow system to avoid unnecessary heat exchange. The application solves the problems of the prior art, such as large temperature gradient, uneven flow distribution, uneven backflow temperature and heat exchange interference, and realizes large-area, high-precision and uniform temperature control; the structure is simple, compact, small in size and flexible in expansion, and is suitable for fields such as film coating process and electronic device cooling.

Description

Technical Field

[0001] This invention relates to the field of temperature control technology, and in particular to a constant temperature system and device. Background Technology

[0002] When performing coating processes using methods such as PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition), ALD (Atomic Layer Deposition), and coating, the substrate on the stage typically needs to be precisely controlled at a constant temperature. The larger the substrate area, the more devices can be supported in a single process, and the lower the production cost per device. To ensure consistent performance across all devices, a highly uniform temperature distribution on the substrate surface is required throughout the entire process. However, as substrate sizes continue to increase, achieving large-area uniform temperature control becomes significantly more challenging.

[0003] In addition, arrayed electronic devices (such as power battery packs and high-power semiconductor devices) generate a lot of heat during operation, requiring efficient and uniform cooling methods; otherwise, local overheating can lead to a decline in device performance or even damage.

[0004] In addition, a highly efficient constant temperature system heat exchange device is needed to improve heat exchange efficiency, reduce volume and weight, and lower energy consumption and operating costs.

[0005] The existing temperature control systems have the following main drawbacks: 1. If the fluid flow path is too long, a significant temperature gradient will be generated along the flow path direction, resulting in uneven surface temperature of the object being kept at a constant temperature. 2. The diversion method is complex, the diversion effect is poor, and the flow distribution of each branch is uneven, which further aggravates the unevenness of temperature distribution. 3. The lack of a corresponding return flow path leads to new temperature unevenness during fluid return. 4. Unnecessary heat exchange exists within the distribution system, which disrupts the normal temperature field and severely affects the accuracy of temperature control.

[0006] Therefore, there is an urgent need to develop a constant temperature system and equipment that can achieve large-area, high-precision, and uniform temperature control, and that is simple in structure and small in size. Summary of the Invention

[0007] The purpose of this invention is to overcome the above-mentioned shortcomings of the prior art and provide a constant temperature system and device that can achieve uniform distribution and collection of constant temperature medium, reduce temperature gradient, and eliminate heat exchange interference between the diversion and collection systems, thereby achieving large-area, high-precision uniform temperature control.

[0008] A constant temperature system, comprising: A multi-stage symmetrical two-way flow system is used to symmetrically split the constant temperature medium entering from the media inlet into parallel branches with a power of 2, so that the fluid flow rate and velocity of each branch are kept consistent. The heat exchange unit array consists of multiple heat exchange units, each of which is connected to a terminal branch of the multi-stage symmetrical two-way flow system. The multi-stage symmetrical two-current system has its inlet connected to the outlet of each heat exchange unit. It is used to gather the constant temperature medium after heat exchange in a way that is completely opposite to the diversion process, and finally flow out from the medium outlet. A thermal insulation structure is provided between the multi-stage symmetrical two-way flow system and the multi-stage symmetrical two-way flow system to completely isolate the two and avoid unnecessary heat exchange between fluids with different temperatures during the flow splitting and flow collection stages.

[0009] In this invention, the heat exchange unit adopts a short tube design, which makes the residence time of the constant temperature medium in the heat exchange short tube short and the temperature change along the tube length direction extremely small.

[0010] The invention also includes a heat spreader plate, which is closely attached to the surface of the heat exchange unit array to further homogenize the heat transferred by each heat exchange unit.

[0011] In this invention, the thermal insulation structure is a vacuum insulation cavity, and the flow guiding pipes of the multi-stage symmetrical two-way flow system and the multi-stage symmetrical two-way flow system are both encapsulated inside the vacuum insulation cavity.

[0012] In this invention, the multi-stage symmetrical two-way splitting system and the multi-stage symmetrical two-way collection system are composed of multiple parallel rod-shaped two-way splitting tubes, and each rod-shaped two-way splitting tube integrates a complete multi-stage two-way splitting or two-way collection channel.

[0013] In this invention, the constant temperature system is composed of multiple independent constant temperature modules, and each constant temperature module includes a complete two-way flow system, a heat exchange unit, a two-way flow system, and a heat spreader.

[0014] In this invention, the multi-stage symmetrical two-way flow system and the multi-stage symmetrical two-way flow system adopt a planar flow channel structure with intersecting latitude and longitude. The flow channel structures are arranged perpendicularly to each other in the same plane to form a grid-like fluid distribution network. The cross-sectional area of ​​the flow channel is halved at each stage along the flow splitting direction and doubled at each stage along the flow collection direction.

[0015] Furthermore, the surface of the heat spreader is provided with a flat portion and a plurality of protrusions, the protrusions being used to support the object being kept at a constant temperature or to form a groove for accommodating the object being kept at a constant temperature.

[0016] In this invention, the heat exchange unit adopts a vertical structure and is vertically installed on or around the side of the object being kept at a constant temperature.

[0017] The present invention also provides a temperature control device, including the temperature control system described above.

[0018] Beneficial effects: This invention solves the problem of uneven flow distribution in existing technologies by employing a symmetrical multi-stage two-splitter and two-collector structure. Simultaneously, it effectively eliminates temperature gradients caused by excessively long flow paths by using a short-tube heat exchange unit. By setting up a two-collector system symmetrical to the splitter system, it avoids new temperature unevenness during the return flow. The thermal insulation structure completely isolates the splitter and collector systems, eliminating unnecessary heat exchange interference with the temperature field and significantly improving temperature control accuracy and stability. This invention enables large-area, high-precision uniform temperature control, and its simple, compact structure, small size, and flexible expansion capabilities make it suitable for various applications such as large-area substrate coating and high-power electronic device cooling. Attached Figure Description

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the constant temperature system structure of the present invention; Figure 2 This is a schematic diagram of the surface constant temperature system in Embodiment 1; Figure 3 This is a schematic diagram of the surface constant temperature system used for heating in Embodiment 1. Figure 4 This is a schematic diagram of the surface temperature control system used for cooling in Embodiment 1. Figure 5 This is a schematic diagram of the structure of the constant temperature system installed in the vacuum insulation cavity in Embodiment 2; Figure 6 This is a schematic diagram of the rod-shaped constant temperature system in Embodiment 3. Figure 7 This is a schematic diagram of the cylindrical constant temperature system in Embodiment 3. Figure 8 This is a schematic diagram of the spiral constant temperature system in Embodiment 3; Figure 9 This is a schematic diagram of the annular constant temperature system in Embodiment 3. Figure 10 This is a schematic diagram of the planar structure of the spiral two-way splitter in Embodiment 3; Figure 11 This is a schematic diagram of the overlapping structure of the spiral two-way splitter in Embodiment 3; Figure 12 This is a schematic diagram of the structure of the constant temperature system used in the PVD magnetron sputtering cathode cooling system in Embodiment 4; Figure 13 This is a schematic diagram of the modular and expandable constant temperature system in Embodiment 5. Figure 14 This is a schematic diagram of the constant temperature system structure of the latitude and longitude intersecting planar flow channel structure in Embodiment 6; Figure 15 This is a schematic diagram of the flow channel structure in Embodiment 6 when the number of flow splitting stages in the two-flow splitting system is one less than the number of flow splitting stages in the two-flow collection system; Figure 16 for Figure 15 Schematic diagram of the connection structure of the heat exchange unit; Figure 17 This is a schematic diagram of the flow channel structure in Embodiment 6 when the number of flow splitting stages in the two-splitting system is two stages less than that in the two-collecting system; Figure 18 for Figure 17 Schematic diagram of the connection structure of the heat exchange unit; Figure 19 This is a schematic diagram of the flow channel structure when using a planar heat exchange short pipe in Embodiment 6. Figure 20 This is a schematic diagram of the heat exchange unit connection structure when using planar heat exchange short tubes in Embodiment 6. Figure 21 This is a schematic diagram of the optimized heat spreader structure in Embodiment 7. Figure 22 This is a schematic diagram of the optimized constant temperature system structure of the heat spreader in Embodiment 7. Figure 23 This is a schematic diagram of the optimized heat exchange unit connection structure of the heat spreader in Embodiment 7. Figure 24 This is a schematic diagram of the constant temperature system structure using a vertical heat exchange unit in Embodiment 8; Figure 25 This is a schematic diagram of the vertical heat exchange unit in Embodiment 8. Figure 26 This is a schematic diagram of the constant temperature system using a ring-shaped heat exchange unit in Embodiment 8. Figure 27 This is a schematic diagram of the annular heat exchange unit in Embodiment 8. The attached figures are labeled as follows: 1-Dual flow system, 2-Dual flow collection system, 4-Media inlet, 6-Heat exchange unit, 7-Media outlet, 10-Heat spreader, 11-Basic constant temperature unit, 12-Dual flow subsystem, 13-Heat exchange subunit, 14-Dual flow collection subsystem, 15-Upper-level dual flow system, 16-Main inlet, 17-Upper-level dual flow collection system, 18-Main outlet, 19-Temperature sensor, 20-Constant temperature drive system, 21-Vacuum insulation cavity, 25-Rod-shaped dual flow tube, 30-Backplate, 31-Target material, 32-Magnet, 33-Yoke, 35-Constant temperature module, 42-Flat surface, 43-Protrusion, 44-Vertical heat exchange unit, 100-Dual flow outlet end, 200-Flow collection inlet end. Detailed Implementation

[0020] This invention provides a constant temperature system and device. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention.

[0021] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0022] like Figure 1 As shown, the core of the constant temperature system and equipment of this invention lies in the use of a symmetrical multi-stage two-way flow system 1 and a multi-stage two-way flow collection system 2 to achieve a complete cycle of the constant temperature medium entering from a single point, being evenly distributed across the entire working surface, and then flowing out from a single point. After the constant temperature medium enters the two-way flow system 1 through the media inlet 4, it undergoes progressively symmetrical flow splitting, ultimately forming parallel branches with a number increasing exponentially by 2. The fluid flow rate and velocity of each parallel branch remain highly consistent. This symmetrical flow splitting structure ensures that all terminal heat exchange units 6 receive the exact same fluid supply, eliminating temperature differences caused by uneven flow rates at the source.

[0023] After heat exchange, the constant-temperature medium enters the corresponding two-current collector system 2, and through a step-by-step convergence process that is completely opposite to the diversion process, it finally flows out from the medium outlet 7. Throughout the entire circulation process, the two-diversion system 1 and the two-current collector system 2 are completely isolated by a thermal insulation structure, avoiding unnecessary heat exchange between fluids of different temperatures during the diversion and collection stages, thereby ensuring the stability of the temperature field.

[0024] Furthermore, the heat exchange unit 6 adopts a short tube design, resulting in a short residence time of the constant-temperature medium within the heat exchange short tube and minimal temperature change along the tube's length, thus controlling the temperature difference between the inlet and outlet of the heat exchange short tube within a very small range. Simultaneously, the heat exchange short tubes are evenly arranged in an array, and together with the heat spreader 10 above, heat can be evenly transferred to the entire surface of the object being kept at a constant temperature. See the following embodiment for details.

[0025] Example 1 like Figure 2-4 As shown, this embodiment provides a surface temperature control system suitable for coating large-area substrates. The system consists of multiple basic temperature control units 11 arranged in parallel. Each basic temperature control unit 11 includes an independent two-way subsystem 12, a heat exchange subsystem 13, and a two-way current collector subsystem 14. The inlets of the two-way subsystems 12 of all basic temperature control units 11 are connected to a higher-level two-way subsystem 15, which evenly distributes the temperature-controlled medium from the main inlet 16 to each basic temperature control unit 11. Similarly, the outlets of the two-way current collector subsystems 14 of all basic temperature control units 11 are connected to a higher-level two-way current collector system 17, which converges the temperature-controlled medium after heat exchange to the main outlet 18.

[0026] Through this two-stage flow splitting and collection structure, the heat exchange short tubes in heat exchange unit 6 can form a uniform array distribution in a large plane. A heat spreader 10 is tightly attached above the array of heat exchange short tubes. The heat spreader 10 is made of a material with good thermal conductivity, which can further homogenize the heat transferred by each heat exchange short tube, making the temperature distribution on the upper surface of the heat spreader 10 more uniform.

[0027] Furthermore, multiple temperature sensors 19 are embedded inside the heat spreader 10. The detection surface of the temperature sensors 19 is flush with the upper surface of the heat spreader 10, enabling accurate detection of the actual temperature of the substrate being kept at a constant temperature. The temperature sensors 19 transmit the detected temperature signals to the constant temperature drive system 20 in real time. The constant temperature drive system 20 automatically adjusts the temperature and flow rate of the constant temperature medium according to the difference between the set temperature and the actual temperature, thereby achieving precise control of the substrate temperature.

[0028] Furthermore, the aforementioned surface temperature control system can be directly installed inside the vacuum chamber, forming thermal insulation for the two-splitter subsystem 12 and the two-current collector system 14 through the vacuum chamber.

[0029] The surface temperature control system in this embodiment has a compact overall structure and low fluid flow resistance, which can meet the stringent requirements for temperature uniformity in large-size substrate coating processes.

[0030] Example 2 like Figure 5As shown, this embodiment adds a vacuum insulation cavity 21 as a thermal insulation structure based on embodiment 1. The entire flow guiding pipe section of the two-way flow system 1 and the two-way flow collecting system 2 is encapsulated inside the vacuum insulation cavity 21. The inner wall of the vacuum insulation cavity 21 is treated with a low-emissivity material to further reduce heat radiation loss. The vacuum environment effectively blocks conduction and convection heat transfer between the flow guiding pipes and between the flow guiding pipes and the external environment, preventing heat exchange between the lower (or higher) temperature isothermal medium in the two-way flow system 1 and the higher (or lower) temperature isothermal medium in the two-way flow collecting system 2. This design eliminates the temperature field disturbance problem caused by heat exchange between the flow guiding and collecting systems in the prior art, significantly improving the system's isothermal accuracy and stability. Furthermore, the outer wall of the vacuum insulation cavity 21 is wrapped with thermal insulation material, further reducing heat exchange between the system and the external environment and lowering the system's energy consumption.

[0031] Not limited to the above structure, the surface constant temperature system in this embodiment can also be directly used in an atmospheric pressure environment.

[0032] Example 3 like Figure 6 As shown, this embodiment provides a more integrated rod-shaped constant temperature system. The two-way flow system 1 and the two-way flow collection system 2 no longer employ the traditional plate-type flow channel structure, but are instead composed of multiple parallel rod-shaped two-way flow tubes 25. Each rod-shaped two-way flow tube 25 integrates a complete multi-stage two-way flow channel or a multi-stage two-way flow collection channel, allowing the fluid to complete a step-by-step flow splitting or collection process within the rod-shaped two-way flow tube 25.

[0033] This rod-shaped diverter tube 25 can significantly reduce the overall volume of the temperature control system and improve the system's space utilization. At the same time, the manufacturing process of the rod-shaped diverter tube 25 is relatively simple, facilitating mass production and assembly. Multiple rod-shaped diverter tubes 25 can be flexibly arranged into planes of different sizes and shapes according to actual needs, to accommodate objects of different sizes and shapes to be kept at constant temperature.

[0034] Not limited to the above-described embodiments, such as Figure 7 As shown, multiple rod-shaped diverter tubes 25 can also be arranged evenly along the circumference to form a cylindrical constant temperature system. The heat exchange unit 6 is set on the inner or outer surface of the cylinder, and the heat spreader 10 is also designed as a cylindrical sleeve structure, which is tightly attached to the outer or inner side of the heat exchange unit 6.

[0035] This cylindrical thermostat system is particularly suitable for uniform temperature control of rotating objects such as cylinders and barrels, ensuring a consistent temperature distribution across the entire circumference of the object.

[0036] Not limited to the above-described embodiments, such as Figure 8 and Figure 9 As shown, the two rod-shaped diverter tubes 25 can also be bent into a spiral structure or multiple ring structures. The spiral structure diverter tubes form a spiral constant temperature system, or the multiple ring structures diverter tubes have inner and outer rings distributed to form a ring-shaped constant temperature system; specifically as follows... Figure 10 and Figure 11 As shown, two spiral or annular diverter tubes are arranged in the same plane or overlapping vertically. One spiral or annular diverter tube constitutes a diverter system 1, and the other spiral or annular diverter tube constitutes a diverter system 2. The heat exchange unit 6 is connected between the two spiral or annular diverter tubes. The heat spreader 10 is a circular panel structure and is laid on the upper surface of the spiral or annular constant temperature system.

[0037] This spiral or ring-shaped thermostat system is particularly suitable for uniform temperature control of circular objects, such as wafers, ensuring a consistent temperature distribution across the entire inner surface of the object.

[0038] Example 4 like Figure 12 As shown, this embodiment applies the temperature control system of the present invention to a PVD magnetron sputtering cathode cooling system. Specifically, the PVD magnetron sputtering cathode mainly includes a backplate 30, a target 31, a magnet 32, a yoke 33, and the temperature control system. The target 31 is fixed to the front side of the backplate 30, and the magnet 32 ​​and yoke 33 are disposed on the back side of the backplate 30 to generate a magnetic field to confine the plasma. The temperature control system is installed on the back side of the backplate 30.

[0039] Furthermore, in the constant temperature system, the cooling medium enters the two-way flow system 1 from the media inlet 4, and after passing through multiple stages of two-way flow, it is evenly distributed to each heat exchange unit 6. The heat exchange short tubes of the heat exchange unit 6 are tightly attached to the back side of the back plate 30, and perform efficient heat exchange with the back plate 30 to promptly remove the heat generated during the sputtering of the target material 31. After heat exchange, the cooling medium enters the two-way flow system 2, and after converging, flows out from the media outlet 7.

[0040] After adopting the constant temperature system of the present invention, the temperature distribution on the surface of the target material 31 is more uniform, which can effectively avoid problems such as cracking of the target material 31, deterioration of coating quality, and coating failure caused by local overheating.

[0041] Example 5 like Figure 13 As shown, this embodiment provides a modular and expandable constant temperature system. The system is composed of multiple independent constant temperature modules 35, each of which includes a complete two-way flow system 1, a heat exchange unit 6, a two-way flow system 2, and a heat spreader 10.

[0042] The various temperature control modules 35 can be quickly assembled via a mechanical structure, allowing for flexible combination into temperature control platforms of different areas and shapes according to actual needs. Each temperature control module 35 can independently adjust its temperature. This modular design also offers good maintainability; if a temperature control module 35 malfunctions, it can be replaced individually without disassembling the entire system.

[0043] Example 6 like Figure 14 As shown, this embodiment provides a constant temperature system with a uniform flow distribution stage for latitude and longitude fluid surfaces. Specifically, the two-way flow system 1 and the two-way flow collection system 2 adopt a latitude and longitude intersecting planar flow channel structure. The flow channel structures are arranged perpendicularly to each other in the same plane to form a grid-like fluid distribution network. The heat exchange unit 6 is connected between the outlet of the two-way flow system 1 and the inlet of the two-way flow collection system 2. In the flow channel structure, the cross-sectional area of ​​the flow channel is halved step by step along the flow distribution direction and doubled step by step along the flow collection direction, ensuring that the cross-sectional area of ​​each branch flow channel matches the fluid flow rate.

[0044] Not limited to the above-described embodiments, such as Figure 15-20 As shown, the number of shunting stages in the two-shunting system 1 can also be set to be one or two fewer than the number of shunting stages in the two-collecting system 2. Specifically, refer to... Figures 15-16 As shown, when the number of branching stages in the two-way system 1 is one less than the number of branching stages in the two-way system 2, the number of branching outlets 100 at the end of the branching stage in the two-way system 1 is twice as many as the number of collection inlets 200 at the beginning of the collection stage in the two-way system 2. In this case, in the same region, one end of two adjacent heat exchange units 6 needs to be connected to the same branching outlet 100 at the same time, and the other end is connected to two adjacent collection inlets 200 respectively.

[0045] like Figures 17-18 As shown, when the number of branching stages of the two-branch system 1 is two fewer than the number of branching stages of the two-collector system 2, the number of branching outlets 100 at the branching end of the two-branch system 1 is four times less than the number of collecting inlets 200 at the collecting beginning of the two-collector system 2. In this case, within the same area, one end of each of the four heat exchange units 6 needs to be connected to the same branching outlet 100, while the other end is connected to four adjacent collecting inlets 200 respectively.

[0046] This design can further optimize the fluid flow state and reduce the residence time of the fluid in the heat exchange unit 6.

[0047] Based on the above embodiments, the heat exchange unit 6 can adopt various forms of heat exchange short pipes according to actual needs. For example, it can adopt the cross-type heat exchange short pipe form in which one branch outlet end 100 is connected to two collection inlet ends 200, or one branch outlet end 100 is connected to four collection inlet ends 200. The cross-type heat exchange short pipe can enable the fluid to complete heat exchange in a small space, which is suitable for occasions with high space requirements.

[0048] In addition, such as Figures 19-20 As shown, when one branch outlet 100 is connected to four collection inlet 200, a planar heat exchange short tube can also be used to connect one branch outlet 100 and four collection inlet 200. This planar heat exchange short tube has a larger heat exchange area and is suitable for occasions that require a larger heat exchange capacity.

[0049] Example 7 like Figure 21-23 As shown, the structure of the heat spreader 10 in this embodiment has been optimized. The upper surface of the heat spreader 10 is provided with a flat portion 42 and a plurality of protrusions 43. The protrusions 43 can be designed with different heights and shapes according to the shape and size of the object to be heated. The object to be heated can be placed directly on the top support surface of the protrusions 43, or it can be placed in the groove formed by the plurality of protrusions 43.

[0050] This heat spreader 10 structure with protrusions 43 not only increases the contact area between the heat spreader 10 and the object being kept at a constant temperature, improving heat exchange efficiency, but also adapts to objects with various three-dimensional shapes, expanding the system's applicability. Simultaneously, the gaps between the protrusions 43 can also serve as fluid channels, facilitating airflow at the bottom of the object being kept at a constant temperature and further enhancing the cooling effect.

[0051] Example 8 like Figure 24-27 As shown, this embodiment provides a constant temperature system with side heat exchange.

[0052] Specifically, such as Figure 24-25 As shown, the heat exchange unit 6 adopts a vertical structure to form multiple vertical heat exchange units 44, which are vertically installed on or around the object being kept at a constant temperature. The multiple vertical heat exchange units 44 are evenly arranged around the object being kept at a constant temperature, enabling simultaneous heat exchange on multiple sides of the object.

[0053] In addition, such as Figure 26-27As shown, the heat exchange unit 6 can also be placed at the center of the annular thermostatic material to exchange heat with the center of the annular material. In the heat exchange unit 6, the inlet and outlet of the heat exchange short tube are respectively located at both ends and are as far apart as possible to avoid heat exchange between the fluid with a lower (or higher) temperature at the inlet and the fluid with a higher (or lower) temperature at the outlet. This side heat exchange structure is particularly suitable for cooling electronic devices with large thickness and high heat generation power, and can effectively solve the problem of insufficient heat dissipation efficiency of traditional single-sided heat exchange methods.

[0054] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

[0055] The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to the embodiments described. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and these equivalent modifications or substitutions are all included within the scope defined by the claims of the present invention.

Claims

1. A constant temperature system, characterized in that, include: A multi-stage symmetrical two-way flow system is used to symmetrically split the constant temperature medium entering from the media inlet into parallel branches with a power of 2, so that the fluid flow rate and velocity of each branch are kept consistent. The heat exchange unit array consists of multiple heat exchange units, each of which is connected to a terminal branch of the multi-stage symmetrical two-way flow system. The heat exchange unit adopts a short tube design; The multi-stage symmetrical two-current system has its inlet connected to the outlet of each heat exchange unit. It is used to gather the isothermal media after heat exchange in a manner opposite to the diversion process, and finally let it flow out from the media outlet. A thermal insulation structure is disposed between the multi-stage symmetrical two-splitter system and the multi-stage symmetrical two-current collector system. The thermal insulation structure is used to isolate the multi-stage symmetrical two-splitter system and the multi-stage symmetrical two-current collector system to prevent heat exchange. It also includes a heat spreader plate, which is closely attached to the surface of the heat exchange unit array to homogenize the heat transferred by each heat exchange unit. The multi-stage symmetrical two-way splitting system and the multi-stage symmetrical two-way collection system are composed of multiple parallel rod-shaped two-way splitting tubes, and each rod-shaped two-way splitting tube integrates a complete multi-stage two-way splitting or two-way collection channel. Alternatively, the multi-stage symmetrical two-way flow system and the multi-stage symmetrical two-way flow system adopt a planar flow channel structure with intersecting latitude and longitude.

2. The constant temperature system according to claim 1, characterized in that, The thermal insulation structure is a vacuum insulation cavity, and the flow guiding pipes of the multi-stage symmetrical two-way flow system and the multi-stage symmetrical two-way flow system are both encapsulated inside the vacuum insulation cavity.

3. The constant temperature system according to claim 1, characterized in that, The constant temperature system is composed of multiple independent constant temperature modules. Each constant temperature module includes a complete multi-stage symmetrical two-way flow system, a heat exchange unit, a multi-stage symmetrical two-way flow system, and a heat spreader.

4. The constant temperature system according to claim 1, characterized in that, The surface of the heat spreader is provided with a flat portion and a plurality of protrusions, the protrusions being used to support the object being kept at a constant temperature or to form a groove for accommodating the object being kept at a constant temperature.

5. The constant temperature system according to claim 1, characterized in that, The heat exchange unit adopts a vertical structure and is installed vertically on the side or around the object being kept at a constant temperature.

6. A constant temperature device, characterized in that, Including the constant temperature system as described in any one of claims 1-5.

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