Mass spectrometer gas pressure regulation method, system, terminal and storage medium

Abstract

The application provides a mass spectrometer gas pressure adjusting method, system, terminal and storage medium, relates to the technical field of mass spectrometer gas pressure adjustment, and comprises the following steps: obtaining a system trigger signal; obtaining a front-stage vacuum degree based on the system trigger signal; analyzing the front-stage vacuum degree to determine a chamber adjustment gas pressure; obtaining a current chamber gas pressure; analyzing the current chamber gas pressure and the chamber adjustment gas pressure to determine a final mass flow; and controlling a preset mass spectrometer to perform gas pressure adjustment according to the final mass flow. The application has the effect of improving the accuracy of mass spectrometer gas pressure adjustment.

Description

Technical Field

[0001] This application relates to the technical field of mass spectrometer pressure regulation, and in particular to a mass spectrometer pressure regulation method, system, terminal and storage medium. Background Technology

[0002] Mass spectrometer pressure regulation refers to the method of adjusting the mass spectrometer pressure by controlling the gas flow rate through a mass flow controller, with the aim of improving the accuracy of mass spectrometer pressure regulation.

[0003] In related technologies, the gas pressure regulation method of mass spectrometers usually adopts a fixed parameter control method. The mass flow controller is controlled according to the preset target gas pressure value to inject reagent gas into the ion source chamber. The actual gas pressure is monitored in real time by a pressure sensor installed in the chamber. When there is a deviation in gas pressure, the output flow of the mass flow controller is manually adjusted to make the actual gas pressure close to the target gas pressure value.

[0004] Regarding the aforementioned technologies, when there is a deviation in gas pressure, the output flow rate of the mass flow controller can be manually adjusted to bring the actual gas pressure closer to the target value. However, if the pump oil of the mechanical pump emulsifies, the pump oil cannot form an effective sealing oil film, resulting in a decrease in pumping efficiency. Manual adjustment alone cannot accurately adjust the gas pressure, leading to a decrease in the accuracy of the mass spectrometer's gas pressure regulation. There is still room for improvement. Summary of the Invention

[0005] To ensure the effectiveness of improving the accuracy of mass spectrometer pressure regulation, this application provides a mass spectrometer pressure regulation method, system, terminal, and storage medium.

[0006] In a first aspect, this application provides a method for regulating the gas pressure of a mass spectrometer, employing the following technical solution: A method for regulating the gas pressure of a mass spectrometer, comprising: Obtain system trigger signals; The pre-stage vacuum level is obtained based on the system trigger signal; The pre-vacuum level is analyzed to determine the chamber adjustment pressure; Get the current chamber pressure; The current chamber pressure and chamber adjustment pressure are analyzed to determine the final mass flow rate; The gas pressure is adjusted according to the preset mass spectrometer based on the final mass flow rate control.

[0007] Optionally, the step of analyzing the pre-stage vacuum to determine the chamber adjustment pressure includes: Calculate the average value of the pre-stage vacuum level to generate the average vacuum level; The standard deviation of the vacuum level in the preceding stage is calculated based on the average vacuum level to generate the vacuum level standard deviation. Determine whether the average vacuum level and the standard deviation of vacuum level meet the preset requirements for pump oil emulsification vacuum level; If the conditions are met, the preset pump oil emulsification result will be determined as the pump oil detection result. If it does not meet the requirements, the preset pump oil health result will be determined as the pump oil test result. The pump oil test results and the preset target chamber pressure are analyzed to determine the chamber adjustment pressure.

[0008] Optionally, the steps for analyzing pump oil test results and preset chamber target air pressure to determine the chamber adjustment air pressure include: The pump oil test result is determined to be either the preset pump oil health result or the preset pump oil emulsification result; If the result is a healthy pump oil condition, then the target chamber pressure is defined as the chamber adjustment pressure; If the result is pump oil emulsification, the product of the target chamber pressure and the preset emulsification compensation factor is calculated to generate the chamber adjustment pressure.

[0009] Optionally, the step of analyzing the current chamber pressure and the chamber adjustment pressure to determine the final mass flow rate includes: Calculate the quotient of the current chamber pressure and the preset gas mass flow rate to generate an effective flow resistance ratio; The chamber adjustment pressure, effective flow resistance ratio, and preset nominal flow resistance ratio are analyzed to determine the target mass flow rate. The chamber adjustment pressure, current chamber pressure, and target mass flow rate are analyzed to determine the adjustment mass flow rate. The adjusted mass flow rate is analyzed to determine the final mass flow rate.

[0010] Optionally, the steps of analyzing the chamber adjustment pressure, effective flow resistance ratio, and preset nominal flow resistance ratio to determine the target mass flow rate include: Calculate the absolute value of the difference between the effective flow resistance ratio and the nominal flow resistance ratio to generate the flow resistance ratio deviation; Calculate the quotient of the flow resistance ratio deviation and the nominal flow resistance ratio to generate the flow resistance ratio deviation rate; Determine whether the flow resistance ratio deviation rate is less than the preset reference deviation rate; If it is less than, then calculate the quotient of the chamber adjustment pressure and the nominal flow resistance ratio to generate the target mass flow rate; If it is not less than, then calculate the quotient of the chamber adjustment pressure and the effective flow resistance ratio to generate the target mass flow rate.

[0011] Optionally, the steps to analyze the chamber adjustment pressure, current chamber pressure, and target mass flow rate to determine the adjustment mass flow rate include: Calculate the difference between the chamber adjustment pressure and the current chamber pressure to generate the current pressure deviation; A preset PID control adjustment operation is performed on the current air pressure deviation to generate the flow rate adjustment amount; Calculate the sum of the target mass flow rate and the flow regulation to generate the adjusted mass flow rate.

[0012] Optionally, the steps of analyzing the adjusted mass flow rate to determine the final mass flow rate include: Determine whether the adjusted mass flow rate conforms to the preset range of physical gas flow rate; If the conditions are met, the adjusted mass flow rate will be defined as the final mass flow rate. If it does not meet the requirements, the final mass flow rate will be determined based on the correspondence between the adjusted mass flow rate and the preset mass flow rate range, and a preset warning message will be output.

[0013] Secondly, this application provides a mass spectrometer pressure regulation system, which adopts the following technical solution: A mass spectrometer pressure regulation system, comprising: The acquisition module is used to acquire the system trigger signal, the pre-stage vacuum level, and the current chamber pressure. A memory for storing a program for a mass spectrometer pressure regulation method as described in any of the preceding claims; The processor and the program in the memory can be loaded and executed by the processor to implement a mass spectrometer pressure regulation method as described in any of the above.

[0014] Thirdly, this application provides a smart terminal, which adopts the following technical solution: A smart terminal includes a memory and a processor, wherein the memory stores a computer program that can be loaded by the processor and executed as described in any of the preceding claims, a method for regulating the gas pressure of a mass spectrometer.

[0015] Fourthly, this application provides a computer storage medium capable of storing corresponding programs, which facilitates the achievement of improving the accuracy of mass spectrometer pressure regulation, and adopts the following technical solution: A computer-readable storage medium storing a computer program that can be loaded by a processor and executed any of the above-described mass spectrometer pressure regulation methods.

[0016] In summary, this application includes at least one of the following beneficial technical effects: 1. By analyzing the pre-stage vacuum, the chamber adjustment pressure is determined. Then, by analyzing the current chamber pressure and the chamber adjustment pressure, the final mass flow rate is determined. Based on the final mass flow rate, the mass spectrometer is controlled to adjust the pressure. The chamber adjustment pressure is determined based on the actual operating conditions of the mechanical pump, thereby effectively avoiding the decrease in pumping efficiency caused by pump oil emulsification, and ensuring the improvement of the accuracy of mass spectrometer pressure adjustment. 2. After calculating the average value of the pre-stage vacuum, an average vacuum value is generated. Based on this average value, the standard deviation of the pre-stage vacuum is calculated, and then the standard deviation of the vacuum value is generated. If the average value and the standard deviation of the vacuum value meet the requirements of the pump oil emulsification vacuum, the pump oil emulsification result is directly determined as the pump oil detection result. If they do not meet the requirements, the pump oil health result is directly determined as the pump oil detection result. After analyzing the pump oil detection result and the target gas pressure in the chamber, the chamber adjustment gas pressure is determined. Based on the pump oil detection result, it is determined whether the gas pressure in the ion source chamber needs to be adjusted, thereby ensuring the effect of improving the accuracy of mass spectrometer gas pressure regulation. 3. By calculating the quotient of the current chamber pressure and the gas mass flow rate, the effective flow resistance ratio is generated. The target mass flow rate is then determined after analyzing the chamber adjustment pressure, the effective flow resistance ratio, and the nominal flow resistance ratio. The adjusted mass flow rate is then determined after analyzing the chamber adjustment pressure, the current chamber pressure, and the target mass flow rate. Finally, the final mass flow rate is determined after analyzing the adjusted mass flow rate. This allows for pressure regulation without damaging the mass spectrometer, extending its lifespan and ensuring improved accuracy in mass spectrometer pressure regulation. Attached Figure Description

[0017] Figure 1 This is a flowchart of a mass spectrometer pressure regulation method according to an embodiment of this application.

[0018] Figure 2 This is a flowchart of the steps in this application embodiment to analyze the pre-stage vacuum to determine the chamber adjustment pressure.

[0019] Figure 3 This is a flowchart of the steps in this application embodiment to analyze the pump oil detection results and the preset target air pressure in the chamber to determine the chamber adjustment air pressure.

[0020] Figure 4 This is a flowchart illustrating the steps in this application embodiment to analyze the current chamber pressure and the chamber adjustment pressure to determine the final mass flow rate.

[0021] Figure 5 This is a flowchart of the steps in this application embodiment to analyze the chamber adjustment air pressure, effective flow resistance ratio and preset nominal flow resistance ratio to determine the target mass flow rate.

[0022] Figure 6 This is a flowchart illustrating the steps in this application embodiment to analyze the chamber adjustment pressure, the current chamber pressure, and the target mass flow rate to determine the adjustment mass flow rate.

[0023] Figure 7 This is a flowchart of the steps in this application embodiment to analyze the adjusted mass flow rate in order to determine the final mass flow rate. Detailed Implementation

[0024] To make the purpose, technical solution, and advantages of this application clearer, the following description is provided in conjunction with the appendix. Figures 1 to 7 The present application will be further described in detail below with reference to embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the application.

[0025] This application discloses a method for regulating the gas pressure of a mass spectrometer. Specifically, it discloses a mass spectrometer and a processing terminal. The processing terminal is communicatively connected to the mass spectrometer to achieve data interaction and control. After receiving a system trigger signal, the processing terminal analyzes the pre-stage vacuum degree to determine the chamber adjustment gas pressure. Then, it analyzes the current chamber gas pressure and the chamber adjustment gas pressure to determine the final mass flow rate. Based on the final mass flow rate, it controls the mass spectrometer to regulate the gas pressure. This method determines the chamber adjustment gas pressure based on the actual operating conditions of the mechanical pump, thereby effectively avoiding the decrease in pumping efficiency caused by pump oil emulsification, and ensuring the improvement of the accuracy of mass spectrometer gas pressure regulation.

[0026] Reference Figure 1 This application discloses a method for regulating the gas pressure of a mass spectrometer, comprising the following steps: Step S100: Obtain the system trigger signal.

[0027] Among them, the system trigger signal refers to the system's trigger signal, which is triggered by the operator to activate the system's start switch, thereby sending the level signal representing the system trigger signal to the processing terminal for subsequent acquisition of the pre-stage vacuum level.

[0028] Step S101: Obtain the pre-stage vacuum level based on the system trigger signal.

[0029] In this process, after the processing terminal receives the system trigger signal, it responds to the system trigger signal to obtain the pre-stage vacuum degree. The pre-stage vacuum degree obtained in this step is within a preset time sliding window, which is set in advance by the operator to determine the stability of the pre-stage vacuum degree. Then, the gas pressure in the ion source chamber is adjusted according to the pre-stage vacuum degree to ensure the effect of improving the accuracy of the mass spectrometer gas pressure regulation.

[0030] The forestage vacuum refers to the vacuum pressure value in the pipeline between the mechanical pump's intake port and the high-vacuum pump's exhaust port, measured by a vacuum gauge installed on the forestage vacuum pipeline. Determining the forestage vacuum helps determine if the pump oil in the mechanical pump is emulsified. When emulsification occurs, the pumping efficiency of the mechanical pump decreases, leading to an increase in pressure in the ion source chamber. Therefore, the pressure in the ion source chamber should be reduced, thereby decreasing the pressure in the high-vacuum pump and providing data support for subsequent chamber pressure adjustments.

[0031] Step S102: Analyze the pre-stage vacuum to determine the chamber adjustment pressure.

[0032] The chamber adjustment pressure refers to the pressure value of the ion source chamber after adjustment based on whether the pump oil is emulsified. This pressure is obtained by analyzing the pre-stage vacuum level at the processing terminal. For specific methods, please refer to [reference needed]. Figure 2 The steps involve determining the chamber adjustment pressure, thereby adjusting the ion source chamber pressure based on the health of the mechanical pump oil, thus ensuring improved accuracy of mass spectrometer pressure regulation.

[0033] Step S103: Obtain the current chamber pressure.

[0034] The current chamber pressure refers to the pressure inside the ion source chamber, which is detected by a vacuum gauge installed inside the ion source chamber. The current chamber pressure is strongly correlated with the effective flow resistance ratio. The higher the current chamber pressure, the greater the flow resistance at the orifice at the ion source outlet. This indicates that the orifice may become blocked, thus increasing the effective flow resistance ratio and providing data support for determining the final mass flow rate.

[0035] Step S104: Analyze the current chamber pressure and the chamber adjustment pressure to determine the final mass flow rate.

[0036] The final mass flow rate refers to the gas flow rate ultimately output by the mass flow controller, which is obtained by the processing terminal after analyzing the current chamber pressure and the chamber adjustment pressure. The specific method is described in [reference needed]. Figure 4 The steps are as follows: By determining the final gas flow rate, the blockage or deformation of the orifice at the ion source outlet is considered while taking into account whether the pump oil is emulsified. Then, the gas flow rate output by the mass flow controller is adjusted to ensure the normal operation of the mass spectrometer, so that the gas pressure can be adjusted according to the final mass flow rate.

[0037] Step S105: Adjust the gas pressure of the mass spectrometer according to the preset mass flow rate.

[0038] In this process, after the final mass flow rate is determined at the processing terminal, the mass flow controller in the mass spectrometer precisely adjusts the gas flow rate entering the ion source chamber based on the final mass flow rate. This effectively counteracts the negative impacts caused by pump oil emulsification or blockage or deformation of the orifice at the ion source outlet, thereby ensuring the improvement of the accuracy of the mass spectrometer's gas pressure regulation.

[0039] A mass spectrometer is an analytical instrument used to quantify molecules and obtain structural information in substances. It mainly consists of a sample introduction system, an ion source chamber, a mass spectrometer analyzer chamber, and an ion detector. The sample introduction system is connected to the inlet of the ion source chamber, which is equipped with a vacuum gauge to detect the vacuum level. A mass flow controller controls the gas flow rate into the ion source chamber. A flow-limiting orifice is installed at the ion source outlet, which connects to the mass spectrometer analyzer chamber. Ions are separated according to their mass-to-charge ratio within the mass spectrometer analyzer chamber, and the ion detector records the ion signal. The mass spectrometer analyzer chamber is connected to the suction port of a high-vacuum pump via piping. The high-vacuum pump evacuates the gas from the mass spectrometer analyzer chamber and the ion source chamber to achieve a high vacuum. A mechanical pump acts as a backing pump, providing the necessary rough vacuum environment for the high-vacuum pump. A pipe connects the mechanical pump suction port to the high-vacuum pump exhaust port, and a vacuum gauge is installed at the mechanical pump suction port to detect the backing vacuum level, thus providing a vacuum environment for the mass spectrometer's operation.

[0040] Reference Figure 2 The steps for analyzing the pre-stage vacuum to determine the chamber adjustment pressure include: Step S200: Calculate the average value of the pre-stage vacuum level to generate the average vacuum level.

[0041] The average vacuum level refers to the average vacuum level of the preceding stage within the time sliding window, which is obtained by the processing terminal after calculating the average vacuum level of the preceding stage. The average vacuum level can effectively eliminate transient noise and reflect the average pumping capacity of the mechanical pump within the time sliding window. When the average vacuum level increases, it indicates that the pumping efficiency of the mechanical pump decreases. At this time, the pump oil has emulsified and cannot effectively form a sealing oil film, thus providing data support for subsequent determination of pump oil test results.

[0042] The time sliding window in this step is the same as the time sliding window in step S101.

[0043] Step S201: Calculate the standard deviation of the pre-stage vacuum degree based on the average vacuum degree to generate the vacuum degree standard deviation.

[0044] The vacuum standard deviation refers to the standard deviation of the pre-stage vacuum within the time sliding window, which is obtained by the processing terminal after calculating the standard deviation of the pre-stage vacuum based on the average vacuum value. The vacuum standard deviation reflects the dispersion of the pre-stage vacuum within the time sliding window. The larger the vacuum standard deviation, the greater the dispersion of the pre-stage vacuum. In this case, the pumping efficiency of the mechanical pump is more unstable, thus providing data support for subsequent determination of pump oil detection results, thereby ensuring the effect of improving the accuracy of mass spectrometer pressure regulation.

[0045] The time sliding window in this step is the same as the time sliding window in step S101.

[0046] Step S202: Determine whether the average vacuum level and the standard deviation of vacuum level meet the preset requirements for pump oil emulsification vacuum level.

[0047] The required vacuum level for pump oil emulsification refers to an average vacuum level greater than the average vacuum level threshold and a standard deviation of vacuum level greater than the standard deviation of vacuum level threshold, which are pre-set by the operator. By determining whether these two events—an average vacuum level greater than the average vacuum level threshold and a standard deviation of vacuum level greater than the standard deviation of vacuum level threshold—occur simultaneously, it is determined whether the upstream vacuum level is too high or unstable, and thus whether pump oil emulsification has occurred, in order to subsequently determine the pump oil emulsification result.

[0048] In this step, the average vacuum threshold refers to the critical threshold for measuring normal vacuum levels, which is set in advance by the operator. When the average vacuum level is higher than the average vacuum threshold, it indicates that the pre-stage vacuum is too high. At this time, the pumping efficiency of the mechanical pump decreases, so as to facilitate the subsequent determination of the pump oil test results.

[0049] In this step, the vacuum standard deviation threshold refers to the critical threshold for measuring the stability of the preceding vacuum level, which is set in advance by the operator. When the vacuum standard deviation is greater than the vacuum standard deviation threshold, it indicates that the preceding vacuum level is unstable. At this time, the pumping efficiency of the vacuum pump is unstable, so as to facilitate the subsequent determination of the pump oil test results.

[0050] Step S2021: If the condition is met, the preset pump oil emulsification result is determined as the pump oil detection result.

[0051] If the average vacuum level is greater than the average vacuum level threshold and the standard deviation of vacuum level is greater than the standard deviation of vacuum level threshold, it indicates that the pumping capacity of the mechanical pump has decreased and the pumping state is unstable. At this time, the pump oil of the mechanical pump has emulsified. Therefore, the processing terminal directly defines the pump oil emulsification result as the pump oil detection result, so as to determine the chamber adjustment pressure in the future.

[0052] Pump oil emulsification result refers to the emulsification of the pump oil in the mechanical pump, which is stored by the operator at the processing terminal. By determining the pump oil emulsification result, it can be confirmed that the pump oil in the current mechanical pump has emulsified. At this time, the pump oil cannot effectively form a sealing oil film, resulting in a decrease in the pumping capacity of the mechanical pump, so as to facilitate subsequent determination of chamber adjustment air pressure.

[0053] The pump oil test result refers to the result of whether the pump oil has emulsified, including the pump oil emulsification result and the pump oil health result. This result is obtained by the processing terminal after determining the pump oil emulsification result. By determining the pump oil test result, it is possible to determine whether the pump oil in the current mechanical pump has emulsified, so that the chamber adjustment air pressure can be determined accordingly.

[0054] In this step, the average vacuum threshold and the standard deviation of vacuum are the same as those in step S202.

[0055] Step S2022: If it does not meet the requirements, the preset pump oil health result will be determined as the pump oil test result.

[0056] If the two events of the average vacuum degree being greater than the average vacuum degree threshold and the standard deviation of vacuum degree being greater than the standard deviation of vacuum degree do not occur simultaneously, it indicates that the mechanical pump is working normally and the pump oil has not emulsified. Therefore, the processing terminal directly determines the pump oil health result as the pump oil detection result.

[0057] Pump oil health result refers to the absence of emulsification in the pump oil of the mechanical pump, and is stored at the processing terminal by the operator. Determining the pump oil health result confirms that the pump oil in the mechanical pump has not emulsified and that the pumping operation is normal, facilitating subsequent chamber pressure adjustments.

[0058] The pump oil detection results in this step are consistent with those in step S2021. The difference is that in this step, the pump oil detection results are obtained after the processing terminal determines the pump oil health result as the pump oil detection result.

[0059] In this step, the average vacuum threshold and the standard deviation of vacuum are the same as those in step S202.

[0060] Step S203: Analyze the pump oil detection results and the preset target chamber pressure to determine the chamber adjustment pressure.

[0061] After determining the pump oil test results, the processing terminal analyzes the pump oil test results and the target air pressure in the chamber to determine the chamber adjustment air pressure. The specific method is as follows: Figure 3 This process involves several steps to determine whether the gas pressure in the ion source chamber needs to be adjusted based on the pump oil detection results, thus providing data support for subsequent determination of chamber adjustment gas pressure.

[0062] The target pressure of the ion source chamber refers to the target pressure set in advance by the operator. By determining the target pressure, the operator can determine whether the pressure in the ion source chamber needs to be adjusted based on the pump oil detection results, thus providing data support for subsequent determination of the chamber adjustment pressure.

[0063] Reference Figure 3 The steps for adjusting the chamber pressure include analyzing the pump oil test results and the preset target chamber pressure to determine the chamber adjustment pressure: Step S300: Determine whether the pump oil detection result is the preset pump oil health result or the preset pump oil emulsification result.

[0064] Specifically, by determining whether the pump oil test result is a healthy result or an emulsified result, it is possible to determine whether the pump oil of the current mechanical pump has emulsified, and then determine whether the gas pressure of the ion source chamber needs to be adjusted, so as to provide data support for subsequent determination of chamber adjustment gas pressure.

[0065] The results of pump oil emulsification in this step are consistent with those in step S2021.

[0066] The pump oil health result in this step is consistent with the pump oil health result in step S2022.

[0067] Step S301: If the result is a healthy pump oil condition, the target chamber pressure is defined as the chamber adjustment pressure.

[0068] If the pump oil test result is a healthy result, it means that the pump oil of the mechanical pump has not emulsified and the pumping state of the mechanical pump is normal. Therefore, there is no need to adjust the gas pressure of the ion source chamber. Thus, the processing terminal directly defines the target gas pressure of the chamber as the chamber adjustment gas pressure, thereby ensuring the effect of improving the accuracy of mass spectrometer gas pressure regulation.

[0069] Step S302: If the result is pump oil emulsification, calculate the product of the target chamber pressure and the preset emulsification compensation factor to generate the chamber adjustment pressure.

[0070] If the pump oil detection result is that the pump oil is emulsified, it means that the pump oil of the mechanical pump has emulsified. At this time, the pump oil cannot effectively form a sealing oil film, resulting in a decrease in the pumping capacity of the mechanical pump. Therefore, the chamber adjustment pressure is obtained by processing the terminal to calculate the product of the target gas pressure of the chamber and the emulsification compensation factor, thereby reducing the gas pressure of the ion source chamber to reduce the total amount of gas entering the high vacuum region, so as to indirectly reduce the burden on the high vacuum pump and thus ensure the effect of improving the accuracy of mass spectrometer gas pressure regulation.

[0071] The emulsification compensation factor refers to the compensation factor for gas pressure adjustment during pump oil emulsification. It is obtained by the operator through controlled experiments beforehand. First, with the mass spectrometer running smoothly, the pre-stage vacuum level at the target gas pressure in the ion source chamber is recorded. Then, a controlled, minute leak is artificially introduced into the mechanical pump's suction line. Different emulsification compensation factors are iteratively tried, decreasing from 1 to 0.05. During this decrease, the product of the target gas pressure in the chamber and the emulsification compensation factor is calculated each time to obtain the chamber adjustment gas pressure. The pre-stage vacuum level after each adjustment is recorded. Finally, the value that makes the pre-stage vacuum level most stable is selected as the emulsification compensation factor. By determining the emulsification compensation factor, the total amount of gas entering the high vacuum region is reduced by lowering the gas pressure in the ion source chamber during pump oil emulsification, thereby reducing the burden on the high vacuum pump.

[0072] Reference Figure 4The steps for analyzing the current chamber pressure and the chamber adjustment pressure to determine the final mass flow rate include: Step S400: Calculate the quotient of the current chamber pressure and the preset gas mass flow rate to generate an effective flow resistance ratio.

[0073] The effective flow resistance ratio (IRR) is a value that measures the physical state of the orifice at the ion source outlet. It is obtained by calculating the quotient of the current chamber pressure and the gas mass flow rate from the processing terminal. Under the condition of constant gas mass flow rate, a higher current chamber pressure indicates blockage at the ion source outlet orifice, reducing the effective flow area and increasing the resistance to airflow, thus increasing the IRR. Conversely, a lower current chamber pressure indicates corrosion and deformation of the orifice due to prolonged use, increasing the effective flow area and reducing the resistance to airflow, thus decreasing the IRR. This provides data support for subsequently determining the target mass flow rate.

[0074] Gas mass flow rate refers to the mass flow rate of the gas output by the mass flow controller, which is preset by the operator when the mass spectrometer is started. By determining the gas mass flow rate, the physical state of the orifice at the ion source outlet under the current gas mass flow rate and current chamber pressure can be determined, thus facilitating the subsequent determination of the target mass flow rate.

[0075] Step S401: Analyze the chamber adjustment pressure, effective flow resistance ratio, and preset nominal flow resistance ratio to determine the target mass flow rate.

[0076] The target mass flow rate refers to the mass flow rate obtained after adjusting the output of the mass flow controller based on whether the orifice at the ion source outlet is blocked or deformed. This is obtained by analyzing the chamber pressure, effective flow resistance ratio, and nominal flow resistance ratio at the processing terminal. Specific methods are detailed in [reference needed]. Figure 5 The steps are as follows: By determining the target mass flow rate, when the orifice at the ion source outlet is blocked or deformed, the mass flow rate output by the mass flow controller is adjusted to balance the effect of the change in flow resistance ratio caused by the blockage or deformation of the orifice, thereby providing data support for subsequent determination and adjustment of the mass flow rate.

[0077] The nominal flow resistance ratio refers to the flow resistance ratio when the orifice at the ion source outlet is not blocked or deformed. It is obtained by the operator through calibration experiments in advance. Under the condition that the physical condition of the orifice at the ion source outlet is normal, the system is run for a period of time, and the gas pressure in the ion source chamber and the mass flow rate output by the mass flow controller are measured at regular intervals. Then, the ratio of these two values ​​at each moment is calculated to obtain multiple flow resistance ratios. Finally, the average value of these flow resistance ratios is calculated to obtain the nominal flow resistance ratio.

[0078] Step S402: Analyze the chamber adjustment pressure, current chamber pressure, and target mass flow rate to determine the adjustment mass flow rate.

[0079] The adjusted mass flow rate refers to the mass flow rate obtained by adjusting the target mass flow rate to bring the current chamber pressure closer to the chamber adjustment pressure. This is obtained by the processing terminal through analysis of the chamber adjustment pressure, the current chamber pressure, and the target mass flow rate. Specific methods are described in [reference needed]. Figure 6 The steps involve determining the adjustment mass flow rate, thereby enabling the system to adaptively adjust the mass flow rate output by the mass flow controller to maintain the ion source chamber pressure at the chamber adjustment pressure, thus ensuring the improvement of the accuracy of mass spectrometer pressure regulation.

[0080] Step S403: Analyze the adjusted mass flow rate to determine the final mass flow rate.

[0081] The final mass flow rate refers to the final mass flow rate obtained after adjusting the mass flow rate limit according to the physical adjustment range of the mass flow controller. This is obtained by the processing terminal after analyzing the adjusted mass flow rate. For specific methods, please refer to [reference needed]. Figure 7 The steps involve determining the final mass flow rate to regulate the gas pressure without damaging the mass spectrometer, thereby extending its lifespan and ensuring the accuracy of the gas pressure regulation.

[0082] Reference Figure 5 The steps for determining the target mass flow rate by analyzing the chamber adjustment pressure, effective flow resistance ratio, and preset nominal flow resistance ratio include: Step S500: Calculate the absolute value of the difference between the effective flow resistance ratio and the nominal flow resistance ratio to generate the flow resistance ratio deviation.

[0083] The flow resistance ratio deviation refers to the deviation between the current flow resistance ratio and the flow resistance ratio when the orifice at the ion source outlet is healthy. It is obtained by calculating the absolute value of the difference between the effective flow resistance ratio and the nominal flow resistance ratio from the processing terminal. The flow resistance ratio deviation and the flow resistance ratio deviation rate are strongly correlated. The larger the flow resistance ratio deviation, the greater the degree of blockage or deformation of the orifice at the ion source outlet, and thus the larger the flow resistance ratio deviation rate, which provides data support for subsequent determination of the flow resistance ratio deviation rate.

[0084] Step S501: Calculate the quotient of the flow resistance ratio deviation and the nominal flow resistance ratio to generate the flow resistance ratio deviation rate.

[0085] The flow resistance ratio deviation rate refers to the relative deviation between the current effective flow resistance ratio and the nominal flow resistance ratio. It is obtained by calculating the quotient of the flow resistance ratio deviation and the nominal flow resistance ratio from the processing terminal. By determining the flow resistance ratio deviation rate, a larger deviation rate indicates a greater deviation between the current effective flow resistance ratio and the nominal flow resistance ratio. This increases the probability of clogging or deformation of the orifice at the ion source outlet, thus providing data support for subsequent determination of the target mass flow rate and ensuring the improvement of the accuracy of mass spectrometer gas pressure regulation.

[0086] Step S502: Determine whether the flow resistance ratio deviation rate is less than the preset reference deviation rate.

[0087] The reference deviation rate refers to the flow resistance ratio deviation rate when the orifice at the ion source outlet is not blocked or deformed, and it is preset by the operator. By judging whether the flow resistance ratio deviation rate is less than the reference deviation rate, it is determined whether the orifice at the ion source outlet is blocked or deformed. When the orifice is blocked or deformed, the effective flow area of ​​the orifice will change, thereby affecting the gas pressure in the ion source chamber. In turn, the mass flow rate is adjusted to compensate for the impact of the change in the physical characteristics of the orifice on the gas pressure in the ion source chamber, so as to facilitate the subsequent determination of the target mass flow rate.

[0088] Step S5021: If it is less than, calculate the quotient of the chamber adjustment air pressure and the nominal flow resistance ratio to generate the target mass flow rate.

[0089] If the flow resistance ratio deviation rate is less than the reference deviation rate, it means that the orifice at the ion source outlet is not blocked or deformed, the effective flow area of ​​the orifice has not changed, and it will not affect the gas pressure in the ion source chamber. In this case, the flow resistance characteristics of the orifice can be represented by the nominal flow resistance ratio. Therefore, the processing terminal calculates the quotient of the chamber adjustment gas pressure and the nominal flow resistance ratio to generate the target mass flow rate, thereby ensuring the effect of improving the accuracy of mass spectrometer gas pressure regulation.

[0090] Step S5022: If it is not less than, calculate the quotient of the chamber adjustment pressure and the effective flow resistance ratio to generate the target mass flow rate.

[0091] If the flow resistance ratio deviation rate is not less than the reference deviation rate, it indicates that the orifice at the ion source outlet is blocked or deformed. In this case, the processing terminal calculates the quotient of the chamber adjustment gas pressure and the effective flow resistance ratio to obtain the target mass flow rate. When the orifice is blocked, the effective flow area of ​​the orifice decreases, and the resistance to airflow increases. If gas mass flow rate is still used for delivery, the effective flow resistance ratio will increase. Therefore, in order to maintain the chamber adjustment gas pressure, the mass flow rate should be reduced to obtain the target mass flow rate. When the orifice is deformed and the orifice diameter increases, the effective flow area of ​​the orifice increases, and the resistance to airflow decreases. If gas mass flow rate is still used for delivery, the effective flow resistance ratio will decrease. Therefore, in order to maintain the chamber adjustment gas pressure, the mass flow rate should be increased to obtain the target mass flow rate. Thus, when the orifice is blocked or deformed, the mass flow rate output by the mass flow controller is adjusted to compensate for the change in flow resistance ratio caused by the blockage or deformation of the orifice, thereby ensuring the effect of improving the accuracy of mass spectrometer gas pressure regulation.

[0092] The target mass flow rate in this step is the same as the target mass flow rate in step S5021. The difference is that the target mass flow rate in this step is obtained by calculating the quotient of the chamber adjustment pressure and the effective flow resistance ratio by the processing terminal.

[0093] Reference Figure 6 The steps to determine the adjustment mass flow rate include analyzing the chamber adjustment pressure, the current chamber pressure, and the target mass flow rate. Step S600: Calculate the difference between the chamber adjustment pressure and the current chamber pressure to generate the current pressure deviation.

[0094] The current pressure deviation refers to the difference between the current ion source chamber pressure and the calculated required adjustment pressure. It is obtained by the processing terminal calculating the difference between the chamber adjustment pressure and the current chamber pressure. By determining the current pressure deviation, the error signal of the current pressure is determined, which facilitates subsequent PID control adjustment operations to maintain the ion source chamber pressure at the chamber adjustment pressure, thereby ensuring improved accuracy of mass spectrometer pressure regulation.

[0095] Step S601: Perform a preset PID control adjustment operation on the current air pressure deviation to generate a flow rate adjustment amount.

[0096] The flow rate adjustment amount refers to the amount of flow rate adjustment obtained to reduce the error between the current chamber pressure and the chamber adjustment pressure. It is obtained by the processing terminal performing PID control adjustment on the current pressure deviation. By determining the flow rate adjustment amount, the target mass flow rate is precisely adjusted so that the ion source chamber pressure is maintained more accurately at the chamber adjustment pressure, thereby ensuring the improvement of the accuracy of mass spectrometer pressure regulation.

[0097] PID control adjustment refers to the operation used to calculate the flow rate adjustment, which is stored by the operator in the processing terminal. PID control adjustment consists of three parts: a proportional term, an integral term, and a derivative term. The proportional term adjusts according to a preset ratio based on the magnitude of the current pressure deviation; the larger the current pressure deviation, the larger the adjustment. The integral term eliminates potential static errors and prevents residual deviations. The derivative term predicts and adjusts based on the changing trend of the current pressure deviation; in this step, the changing trend of the current pressure deviation refers to the rate of change of the current pressure deviation. By executing PID control adjustment, the pressure in the ion source chamber is maintained more precisely at the chamber's adjustment pressure, thereby ensuring improved accuracy in mass spectrometer pressure regulation.

[0098] Step S602: Calculate the sum of the target mass flow rate and the flow regulation amount to generate the adjusted mass flow rate.

[0099] In this process, after determining the flow rate adjustment amount, the processing terminal calculates the sum of the target mass flow rate and the flow rate adjustment amount to generate the adjusted mass flow rate, thereby enabling the ion source chamber pressure to be maintained more precisely at the chamber adjusted pressure, thus ensuring the effect of improving the accuracy of mass spectrometer pressure regulation.

[0100] Reference Figure 7 The steps for analyzing the adjusted mass flow rate to determine the final mass flow rate include: Step S700: Determine whether the adjusted mass flow rate conforms to the preset range of physical gas flow rate.

[0101] The physical gas flow rate refers to the range of mass flow rates that the mass flow controller can adjust. This range is defined by the operator and is set in advance within the range of physical gas flow rates. By determining whether the adjusted mass flow rate is within the range of physical gas flow rates, it is determined whether the output of the mass flow controller can achieve the adjusted mass flow rate, thus effectively preventing damage to the mass spectrometer caused by forced adjustment.

[0102] Step S7001: If the condition is met, the adjusted mass flow rate is defined as the final mass flow rate.

[0103] If the adjusted mass flow rate is within the range of the physical gas flow rate, it means that the output of the mass flow controller can achieve the adjusted mass flow rate. Therefore, the processing terminal directly defines the adjusted mass flow rate as the final mass flow rate to ensure the effect of improving the accuracy of mass spectrometer pressure regulation.

[0104] Step S7002: If it does not meet the requirements, determine the final mass flow rate based on the correspondence between the adjusted mass flow rate and the preset mass flow rate range, and output the preset warning message.

[0105] If the adjusted mass flow rate is outside the range of the physical gas flow rate, it means that the adjusted mass flow rate exceeds the adjustment range of the mass flow controller. If the adjusted mass flow rate is still used for adjustment, it will damage the mass spectrometer. Therefore, the processing terminal determines the final mass flow rate based on the correspondence between the adjusted mass flow rate and the mass flow rate outside the range, and outputs a warning message to remind the staff to check and maintain the mass spectrometer.

[0106] The correspondence between the mass flow rate's external range and the final mass flow rate refers to the relationship between the external range of the mass flow rate and the final mass flow rate. For example, if the range of the mass flow controller is... Then the mass flow rate outside the range is, and When adjusting the mass flow rate at When the time interval is between, the corresponding final mass flow rate is When adjusting the mass flow rate at When the time interval is between, the corresponding final mass flow rate is The operator creates a mapping table that maps the outer range of mass flow rate to the final mass flow rate.

[0107] The final mass flow rate in this step is the same as the final mass flow rate in step S7001. The difference is that the final mass flow rate in this step is obtained by the processing terminal by looking up the mapping table of the correspondence between the adjusted mass flow rate and the mass flow rate range.

[0108] Warning messages are information sent to operators to alert them to check the mass spectrometer. These messages are stored in the processing terminal by the operator. By confirming the warning message, the operator is alerted that the current adjustments are insufficient to meet the actual pressure requirements, thus prompting the operator to perform inspection and maintenance on the mass spectrometer.

[0109] Based on the same inventive concept, embodiments of this application provide a mass spectrometer gas pressure regulation system, including: The acquisition module is used to acquire the system trigger signal, the pre-stage vacuum level, and the current chamber pressure. A memory for storing a program for a mass spectrometer pressure regulation method; The processor can load and execute programs in memory to implement a method for regulating the gas pressure of a mass spectrometer.

[0110] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional modules is used as an example. In practical applications, the above functions can be assigned to different functional modules as needed, that is, the internal structure of the device can be divided into different functional modules to complete all or part of the functions described above. The specific working process of the system, device, and unit described above can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0111] This application provides a computer-readable storage medium storing a computer program that can be loaded by a processor and executed as a method for regulating the gas pressure of a mass spectrometer.

[0112] Computer storage media include, for example, USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, optical disks, and other media that can store program code.

[0113] Based on the same inventive concept, this application provides a smart terminal, including a memory and a processor, wherein the memory stores a computer program that can be loaded and executed by the processor to regulate the gas pressure of a mass spectrometer.

[0114] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional modules is used as an example. In practical applications, the above functions can be assigned to different functional modules as needed, that is, the internal structure of the device can be divided into different functional modules to complete all or part of the functions described above. The specific working process of the system, device, and unit described above can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0115] The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Any feature disclosed in this specification (including the abstract and drawings) may be replaced by other equivalent or similar features unless specifically stated otherwise. That is, unless specifically stated otherwise, each feature is only one example of a series of equivalent or similar features.

Claims

1. A method for regulating gas pressure in a mass spectrometer, characterized in that, include: Obtain system trigger signals; The pre-stage vacuum level is obtained based on the system trigger signal; The pre-vacuum level is analyzed to determine the chamber adjustment pressure; Get the current chamber pressure; The current chamber pressure and chamber adjustment pressure are analyzed to determine the final mass flow rate; The gas pressure is adjusted according to the preset mass spectrometer based on the final mass flow rate control. The steps for analyzing the pre-vacuum level to determine the chamber adjustment pressure include: Calculate the average value of the pre-stage vacuum level to generate the average vacuum level; The standard deviation of the vacuum level in the preceding stage is calculated based on the average vacuum level to generate the vacuum level standard deviation. Determine whether the average vacuum level and the standard deviation of vacuum level meet the preset requirements for pump oil emulsification vacuum level; If the conditions are met, the preset pump oil emulsification result will be determined as the pump oil detection result. If it does not meet the requirements, the preset pump oil health result will be determined as the pump oil test result. The pump oil test results and the preset target chamber pressure are analyzed to determine the chamber adjustment pressure; Analyzing the pump oil test results and the preset target chamber pressure to determine the steps for adjusting the chamber pressure includes: The pump oil test result is determined to be either the preset pump oil health result or the preset pump oil emulsification result; If the result is a healthy pump oil condition, then the target chamber pressure is defined as the chamber adjustment pressure; If the result is pump oil emulsification, the product of the target chamber pressure and the preset emulsification compensation factor is calculated to generate the chamber adjustment pressure. The steps for analyzing the current chamber pressure and chamber adjustment pressure to determine the final mass flow rate include: Calculate the quotient of the current chamber pressure and the preset gas mass flow rate to generate an effective flow resistance ratio; The chamber adjustment pressure, effective flow resistance ratio, and preset nominal flow resistance ratio are analyzed to determine the target mass flow rate. The chamber adjustment pressure, current chamber pressure, and target mass flow rate are analyzed to determine the adjustment mass flow rate. The adjusted mass flow rate is analyzed to determine the final mass flow rate.

2. The method for regulating gas pressure in a mass spectrometer according to claim 1, characterized in that, The steps for determining the target mass flow rate by analyzing the chamber adjustment pressure, effective flow resistance ratio, and preset nominal flow resistance ratio include: Calculate the absolute value of the difference between the effective flow resistance ratio and the nominal flow resistance ratio to generate the flow resistance ratio deviation; Calculate the quotient of the flow resistance ratio deviation and the nominal flow resistance ratio to generate the flow resistance ratio deviation rate; Determine whether the flow resistance ratio deviation rate is less than the preset reference deviation rate; If it is less than, then calculate the quotient of the chamber adjustment pressure and the nominal flow resistance ratio to generate the target mass flow rate; If it is not less than, then calculate the quotient of the chamber adjustment pressure and the effective flow resistance ratio to generate the target mass flow rate.

3. The method for regulating gas pressure in a mass spectrometer according to claim 1, characterized in that, The steps to determine the adjustment mass flow rate include analyzing the chamber adjustment pressure, the current chamber pressure, and the target mass flow rate. Calculate the difference between the chamber adjustment pressure and the current chamber pressure to generate the current pressure deviation; A preset PID control adjustment operation is performed on the current air pressure deviation to generate the flow rate adjustment amount; Calculate the sum of the target mass flow rate and the flow regulation to generate the adjusted mass flow rate.

4. The method for regulating gas pressure in a mass spectrometer according to claim 1, characterized in that, The steps for analyzing the adjusted mass flow rate to determine the final mass flow rate include: Determine whether the adjusted mass flow rate conforms to the preset range of physical gas flow rate; If the conditions are met, the adjusted mass flow rate will be defined as the final mass flow rate. If it does not meet the requirements, the final mass flow rate will be determined based on the correspondence between the adjusted mass flow rate and the preset mass flow rate range, and a preset warning message will be output.

5. A mass spectrometer pressure regulation system, characterized in that, include: The acquisition module is used to acquire the system trigger signal, the pre-stage vacuum level, and the current chamber pressure. A memory for storing a program for a mass spectrometer pressure regulation method as described in any one of claims 1 to 4; The processor and the program in the memory can be loaded and executed by the processor to implement the mass spectrometer pressure regulation method as described in any one of claims 1 to 4.

6. A smart terminal, characterized in that, It includes a memory and a processor, wherein the memory stores a computer program that can be loaded by the processor and executed as described in any one of claims 1 to 4 for regulating the gas pressure of a mass spectrometer.

7. A computer-readable storage medium, characterized in that, The device stores a computer program capable of being loaded by a processor and executed as described in any one of claims 1 to 4 for regulating the gas pressure of a mass spectrometer.

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