Excimer laser optical path fixing structure of heat deformation prevention split base

Abstract

The present application relates to the technical field of optical path adjustment, in particular to a kind of heat deformation prevention split base's excimer laser optical path fixing structure.The present application includes pusher assembly, the pusher assembly includes No.1 spring tube, the inside of No.1 spring tube is fixedly provided with No.2 spring tube, No.1 spring tube and No.2 spring tube are combined and are spirally wound, and the end of No.1 spring tube away from No.2 spring tube is fixedly provided with push rod.The present application passes through optical path base and transmits heat to pusher assembly, the expansion coefficient of No.1 spring tube and No.2 spring tube is different, causes the torsion of both, and push rod is pushed, push rod transmits force to optical path support flange plate through force transmission component, makes optical path support flange plate produce a small tilt opposite to thermal drift, prevents optical path support flange plate from drifting due to thermal expansion and cannot be compensated in real time, so that the device appears performance degradation after long time work.

Description

Technical Field

[0001] This invention relates to the field of optical path adjustment technology, and more specifically, to an excimer laser optical path fixing structure with a heat-resistant, split-type base. Background Technology

[0002] An excimer laser is a gas laser, such as one using a mixture of xenon (Xe) and chlorine (Cl2) gas, excited by a high-voltage pulsed discharge to generate an excimer laser with a wavelength of 308 nm. It is primarily used for interventional procedures and ablation within blood vessels. Due to its use in interventional procedures, the precision requirements for laser energy are extremely stringent. The laser cavity is mounted on a chassis via a cavity base, and the resonant cavity mirrors and optical path support rods are fixed by the optical path base and optical path support flange to ensure high coaxiality between the laser cavity and the resonant cavity mirrors. To reduce the thermal impact, current designs often avoid direct contact between the optical path support rod and the cavity base, thus preventing heat transfer to the support rod to some extent.

[0003] However, under actual continuous operation of excimer lasers, the laser cavity generates significant heat during operation, which is conducted to the surrounding structure through the cavity base. Since both the cavity base and the optical path base are fixed to the same chassis, even without direct contact, the thermal expansion of the cavity base will still generate mechanical tension through the chassis, causing slight displacement or tilting of the optical path base, which in turn causes spatial attitude changes in the optical path support flange and resonant cavity mirrors. This change directly leads to real-time drift in the coaxiality between the laser cavity and the resonant cavity mirrors. Furthermore, since excimer lasers operate through discharge excitation, long-term operation or transportation impacts can cause cavity vibration and displacement, further affecting optical path alignment.

[0004] To address the aforementioned thermal drift, existing technologies typically employ manual adjustment using an optical path adjustment rod and knob before laser power-on to initially align the cavity with the optical path. However, during actual laser operation, the temperature of the cavity base continuously rises, and its thermal expansion gradually increases with temperature accumulation, causing dynamic changes in optical path drift. Existing manual adjustment methods cannot compensate for this in real time during operation, leading to problems such as beam pointing deviation and reduced output energy after prolonged laser operation. To maintain performance, operators often need to frequently stop and readjust, severely impacting the laser's efficiency and stability. Therefore, this invention proposes a thermally deformable, split-type base optical path fixing structure for excimer lasers. Summary of the Invention

[0005] The purpose of this invention is to provide a thermal deformation-resistant split-type base for fixing the optical path of an excimer laser, in order to solve the problem mentioned in the background art that when an excimer laser is running, the thermal expansion of the cavity causes optical path drift through the chassis, and manual adjustment cannot compensate for it in real time, resulting in beam deviation and energy reduction after long-term operation, requiring frequent shutdowns and readjustments, which affects efficiency and stability.

[0006] To address the aforementioned issues, a heat-resistant, split-type base for fixing the optical path of an excimer laser is provided. The structure includes a laser cavity, with optical path bases symmetrically arranged on the lower side of the laser cavity. On the sides of the two optical path bases that are far apart from each other, cavity bases are provided for supporting the laser cavity. Compensation components are symmetrically arranged between the optical path bases and the cavity bases. Each compensation component includes a heat-conducting component, a pushing component, and a force-transmitting component connected in sequence.

[0007] The pushing component is disposed between the optical path base and the cavity base. The pushing component includes a first spring tube, which is made of manganese-copper alloy.

[0008] A second spring tube is fixedly installed on the inner side of the first spring tube, and the second spring tube is made of Invar alloy.

[0009] The first and second spring tubes are combined and wound into a spiral shape;

[0010] The laser cavity is surrounded by multiple optical path support rods, which are made of a material with a low coefficient of thermal expansion.

[0011] When the optical path base is heated, the temperature rises and is transferred to the push component through the heat conduction component. The expansion coefficients of the first and second spring tubes are different, causing them to twist and push the push rod.

[0012] As a further improvement to this technical solution, a push rod is fixedly provided at the end of the first spring tube away from the second spring tube, and the push rod slides through one end of the cavity base;

[0013] The inner side of the second spring tube is provided with a limiting rod for supporting it, and one end of the limiting rod is slidably disposed inside the push rod;

[0014] The heat-conducting component is located on the side of the pushing component close to the optical path base, and the force-transmitting component is located on the side of the cavity base away from the optical path base.

[0015] After being heated and twisted, the No. 1 and No. 2 spring tubes can only deform axially under the restriction of the limiting rod, thus pushing the push rod.

[0016] As a further improvement to this technical solution, the heat-conducting component includes a copper block, which is fixedly disposed on one side of the optical path base;

[0017] A stainless steel sheet is fixedly installed on the side of the copper block near the pushing component, and one end of the No. 1 spring tube and the limiting rod are both fixedly connected to the stainless steel sheet.

[0018] When the optical path base is heated and the temperature rises, the heat flows to the copper block, and the heat inside the copper block flows to the driving component through the stainless steel sheet.

[0019] As a further improvement to this technical solution, the copper block is embedded with several miniature thermal diodes, which are filled with phase change working fluid to guide heat to be transferred unidirectionally from the optical path base to the driving component.

[0020] Under the action of each diode, heat can only flow from the optical path base to the driving component, and the reverse flow is blocked. The low thermal conductivity stainless steel sheet further weakens the reverse heat conduction, ensuring that the temperature change of the driving component strictly follows the temperature change of the optical path base, but will not be heated in the reverse due to ambient temperature fluctuations or cooling after the device stops working.

[0021] As a further improvement to this technical solution, a ball seat is engaged with one side of the ball head, and the ball seat is fixedly mounted on one side of the optical path support flange plate;

[0022] A set of disc springs is sleeved on the connecting rod, and the disc springs are located between the ball head and the push rod.

[0023] In the initial state, a certain preload is applied to the push rod through the disc spring assembly, so that the ball head and the ball seat fit tightly together, thereby eliminating the mechanical gap between the push rod and the optical path support flange plate. This allows any slight displacement of the push rod to be accurately transmitted to the optical path support flange plate, while preventing the ball seat and ball head from separating due to vibration or temperature fluctuations. Furthermore, the preload is insufficient to cause the optical path support flange plate to rotate.

[0024] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0025] 1. In the excimer laser optical path fixing structure of this heat-resistant split base, when the optical path base is heated, the temperature rises and the heat is transferred to the pushing component through the heat conduction component. The expansion coefficients of the first and second spring tubes are different, causing them to twist and push the push rod. The push rod transmits the thrust to the optical path support flange plate through the force transmission component, causing the optical path support flange plate to produce a slight tilt opposite to the thermal drift. This prevents the optical path support flange plate from failing to compensate for thermal expansion drift in real time, thus preventing the device from experiencing performance degradation after long-term operation and improving the operational stability of the device.

[0026] 2. In the excimer laser optical path fixing structure of this heat-resistant split base, a preload is applied to the push rod through a disc spring assembly, eliminating the mechanical gap between the push rod and the optical path support flange plate. This allows all the minute displacements of the push rod to be immediately transmitted to the optical path support flange plate. Furthermore, the spherical hinge relationship between the ball head and the ball seat causes the ball seat to automatically tilt with the movement of the push rod, enabling the push rod to smoothly transmit the thrust to the optical path support flange plate, thus improving the accuracy of the push rod's angle adjustment of the optical path support flange plate. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 This is a schematic diagram of the optical path base, cavity base, and compensation component structure of the present invention;

[0029] Figure 3 For the present invention Figure 2 Enlarged view of the structure at point A in the middle;

[0030] Figure 4 This is a side view of the compensation component structure of the present invention;

[0031] Figure 5 This is a schematic diagram of the compensation component structure of the present invention;

[0032] Figure 6 This is a schematic diagram of the structure of the driving component and the heat-conducting component of the present invention;

[0033] Figure 7 This is an exploded view of the thermal conductive component structure of the present invention;

[0034] Figure 8 This is a schematic diagram of the force transmission component structure of the present invention;

[0035] Figure 9 This is an exploded view of the force transmission component structure of the present invention;

[0036] Figure 10 This is a cross-sectional view of the optical path support rod structure of the present invention.

[0037] The meanings of the labels in the diagram are as follows:

[0038] 1. Laser cavity; 2. Optical path base; 3. Cavity base;

[0039] 4. Compensation component; 41. Push component; 411. Bourdon tube No. 1; 412. Bourdon tube No. 2; 413. Push rod; 414. Limit rod;

[0040] 42. Thermal conductive components; 421. Copper block; 422. Stainless steel sheet;

[0041] 43. Force transmission assembly; 431. Connecting rod; 432. Ball head; 433. Ball seat; 434. Disc spring assembly;

[0042] 5. Optical path support flange plate; 6. Optical path support rod; 7. Tension spring; 8. Resonant cavity lens flange plate; 9. Optical path adjustment rod. Detailed Implementation

[0043] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0045] Example 1

[0046] First, please refer to Figures 1-2 The purpose of this embodiment is to provide an excimer laser optical path fixing structure with a heat-resistant split base, including a laser cavity 1. Optical path support flanges 5 are rotatably provided at both ends of the laser cavity 1. The optical path support flanges 5 can rotate slightly. In addition, multiple optical path support rods 6 are provided around the laser cavity 1. The optical path support rods 6 are used to support the optical path support flanges 5. The multiple optical path support rods 6 are respectively fixed at each corner of the optical path support flanges 5.

[0047] The optical path support rod 6 passes through the cavity base 3 but does not directly contact it, so as to prevent the heat of the cavity base 3 from being directly transferred to the optical path support rod 6 when the laser is working. At the same time, the optical path support rod 6 is made of a material with a low coefficient of thermal expansion, so its deformation is minimal when the temperature changes, which further ensures the stability of the cage structure. The cage structure is rigid and anti-interference, which can keep the optical path highly coaxial and has high alignment accuracy.

[0048] Furthermore, a resonant cavity lens flange plate 8 is fixedly installed on the side of the optical path support flange plate 5 away from the laser cavity 1. The photons generated by the laser cavity 1 resonate back and forth between the two resonant cavity lens flange plates 8, and finally form a laser beam that is emitted from the light outlet. Optical path bases 2 are symmetrically arranged on the lower side of the laser cavity 1. The optical path bases 2 are used to fix the laser optical path. On the side of the two optical path bases 2 that are far apart from each other, there are cavity bases 3 for supporting the laser cavity 1. The cavity bases 3 are fixed to the chassis on which the device is installed by rubber shock absorbers.

[0049] Two optical path support rods 6 on the same side of the laser cavity 1 are symmetrically fixedly connected to optical path adjustment rods 9. The optical path adjustment rods 9 are threaded with fine adjustment knobs for adjusting the position of the laser cavity 1. After the laser cavity 1 is fixed on the optical path base 2 and the cavity base 3, the position of the laser cavity 1 can be finely adjusted by adjusting the fine adjustment knobs on each optical path adjustment rod 9, so that the laser cavity 1 and the laser optical path are in a coaxial state. This fine adjustment function is especially suitable for rapid calibration after the device is offset to the left or right due to long-term discharge excitation vibration or long-distance transportation impact.

[0050] For further details, please refer to Figures 1-7 A compensation component 4 is symmetrically arranged between the optical path base 2 and the cavity base 3. The compensation component 4 includes a heat-conducting component 42, a pushing component 41, and a force-transmitting component 43 connected in sequence. Specifically:

[0051] The heat-conducting component 42 is disposed on the side of the pushing component 41 near the optical path base 2. The heat-conducting component 42 includes a copper block 421, which is fixedly disposed on one side of the optical path base 2. When the optical path base 2 is heated and the temperature rises, heat flows to the copper block 421. A stainless steel sheet 422 is fixedly disposed on the side of the copper block 421 near the pushing component 41. The heat inside the copper block 421 flows to the pushing component 41 through the stainless steel sheet 422.

[0052] The copper block 421 has several miniature thermal diodes embedded inside. These miniature thermal diodes are filled with a phase change working medium to guide heat unidirectionally from the optical path base 2 to the driving component 41. Under the action of each diode, heat can only flow from the optical path base 2 to the driving component 41, and the reverse flow is blocked. The stainless steel sheet 422 with low thermal conductivity further weakens the reverse heat conduction, ensuring that the temperature change of the driving component 41 strictly follows the temperature change of the optical path base 2, but will not be heated in the reverse direction due to ambient temperature fluctuations or cooling after the device stops working.

[0053] For further details, please refer to Figures 2-6The pushing component 41 is disposed between the optical path base 2 and the cavity base 3. The pushing component 41 includes a first spring tube 411, which is made of manganese copper alloy. A second spring tube 412 is fixedly disposed inside the first spring tube 411, which is made of Invar alloy. After the temperature of the optical path base 2 rises, the heat flows to the pushing component 41 through the heat conduction component 42. Since the expansion coefficients of the first spring tube 411 and the second spring tube 412 are different, the first spring tube 411 is a high expansion material and the second spring tube 412 is a low expansion material. After the first spring tube 411 and the second spring tube 412 are combined and wound into a spiral shape, they twist after being heated.

[0054] To prevent radial deformation of the first spring tube 411 and the second spring tube 412, a limiting rod 414 for support is provided on the inner side of the second spring tube 412. One end of the first spring tube 411 and the limiting rod 414 are fixedly connected to the stainless steel sheet 422. Furthermore, a push rod 413 is fixedly provided at the end of the first spring tube 411 away from the second spring tube 412. The push rod 413 slides through one end of the cavity base 3. After the first spring tube 411 and the second spring tube 412 are torn by heat, they can only deform axially under the restriction of the limiting rod 414, thus pushing the push rod 413. In addition, one end of the limiting rod 414 is slidably provided inside the push rod 413, so that when the first spring tube 411 and the second spring tube 412 push the push rod 413, the push rod 413 is restricted to move axially along the direction set by the limiting rod 414.

[0055] To ensure that the thrust of push rod 413 is accurately transmitted to optical path support flange plate 5, please refer to... Figures 2-10 The force transmission component 43 is located on the side of the cavity base 3 away from the optical path base 2. Specifically:

[0056] The force transmission component 43 includes a connecting rod 431. One end of the connecting rod 431 is slidably disposed at the end of the push rod 413, and the other end of the connecting rod 431 is fixedly disposed with a ball head 432. A ball seat 433 is engaged with one side of the ball head 432 and is fixedly disposed on one side of the optical path support flange plate 5. A set of disc springs 434 is sleeved on the connecting rod 431 and is disposed between the ball head 432 and the push rod 413. In the initial state, a certain preload is applied to the push rod 413 through the disc springs 434, so that the ball head 432 and the ball seat 433 fit tightly together, thereby eliminating the mechanical gap between the push rod 413 and the optical path support flange plate 5. This allows any small displacement of the push rod 413 to be accurately transmitted to the optical path support flange plate 5, while avoiding the separation of the ball seat 433 and the ball head 432 due to vibration or temperature fluctuations. Moreover, the preload is insufficient to cause the optical path support flange plate 5 to rotate.

[0057] When push rod 413 is pushed, it transmits the thrust to ball head 432 through disc spring assembly 434, and pushes ball seat 433 through ball head 432. The spherical hinge relationship between ball head 432 and ball seat 433 causes ball seat 433 to automatically tilt with the movement of push rod 413, thereby enabling push rod 413 to smoothly transmit the thrust to optical path support flange plate 5, ensuring the accuracy of angle adjustment of optical path support flange plate 5. In order to enable optical path support flange plate 5 to generate feedback immediately after being subjected to force, both ends of optical path support rod 6 can rotate, and A tension spring 7 is fixedly installed inside the corner of the optical path support rod 6. In the initial state, the two ends of the optical path support rod 6 are pulled by the tension spring 7, which keeps it straight. When the optical path support flange plate 5 is pushed, the tension spring 7 extends accordingly. At the same time, the optical path support flange plate 5 immediately produces a slight tilt opposite to thermal drift after being subjected to force. This prevents the optical path support flange plate 5 from failing to compensate for thermal expansion drift in real time, which would lead to a performance degradation of the device after long-term operation. This ensures that the device can continue to operate stably for a long time.

[0058] Therefore, based on the above, the working principle of the present invention can be summarized as follows: When the optical path base 2 is heated, the heat flows to the pushing component 41 through the copper block 421 and the stainless steel sheet 422. Under the action of the diode inside the copper block 421, the heat can only flow from the optical path base 2 to the pushing component 41, ensuring that the temperature change of the pushing component 41 strictly follows the temperature change of the optical path base 2. The first spring tube 411 and the second spring tube 412 twist after being heated, and push the push rod 413. The push rod 413 then moves along the direction set by the limit rod 414, and transmits the thrust to the ball head 432 through the disc spring assembly 434. The ball head 432 pushes the ball seat 433, causing the optical path support flange plate 5 to tilt slightly to compensate for thermal drift, thus avoiding problems such as beam pointing deviation and output energy reduction after the device has been running for a long time.

[0059] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A heat-deformation-resistant split-type base for fixing the optical path of an excimer laser, comprising a laser cavity (1), characterized in that: The laser cavity (1) is symmetrically provided with optical path bases (2) on the lower side, and cavity bases (3) for supporting the laser cavity (1) are provided on the side of the two optical path bases (2) that are far apart from each other. Both ends of the laser cavity (1) are provided with optical path support flanges (5); The laser cavity (1) is provided with multiple optical path support rods (6) around its perimeter, and the optical path support rods (6) are made of a material with a low coefficient of thermal expansion. The optical path support rod (6) passes through the cavity base (3) but does not directly contact it; The optical path support rod (6) is used to support the optical path support flange plate (5), and multiple optical path support rods (6) are respectively fixed at each corner of the optical path support flange plate (5); A resonant cavity lens flange plate (8) is fixedly installed on the side of the optical path support flange plate (5) away from the laser cavity (1). Compensation components (4) are symmetrically arranged between the optical path base (2) and the cavity base (3). The compensation components (4) include a heat conduction component (42), a pushing component (41) and a force transmission component (43) connected in sequence. The optical path support flange (5) can rotate slightly. The pushing component (41) is disposed between the optical path base (2) and the cavity base (3). The pushing component (41) includes a first spring tube (411), which is made of manganese copper alloy. A second spring tube (412) is fixedly installed on the inner side of the first spring tube (411), and the second spring tube (412) is made of Invar alloy. The expansion coefficients of the first spring tube (411) and the second spring tube (412) are different. The first spring tube (411) is a high expansion material and the second spring tube (412) is a low expansion material. The first spring tube (411) and the second spring tube (412) are combined and wound into a spiral shape. A push rod (413) is fixedly installed at the end of the first spring tube (411) away from the second spring tube (412), and the push rod (413) slides through one end of the cavity base (3); The inner side of the second spring tube (412) is provided with a limiting rod (414) for supporting it. One end of the limiting rod (414) is slidably disposed inside the push rod (413). The push rod (413) is used to transmit the thrust through the force transmission assembly (43) to the optical path support flange plate (5), so that the optical path support flange plate (5) produces an inclination opposite to the thermal drift. The heat-conducting component (42) is located on the side of the pushing component (41) close to the optical path base (2), and the force-transmitting component (43) is located on the side of the cavity base (3) away from the optical path base (2).

2. The excimer laser optical path fixing structure with a heat-resistant, split-type base according to claim 1, characterized in that: The laser cavity (1) has two optical path support rods (6) on the same side of the laser cavity (1) that are symmetrically fixedly connected to an optical path adjustment rod (9). The optical path adjustment rod (9) is threaded with a fine adjustment knob for adjusting the position of the laser cavity (1).

3. The excimer laser optical path fixing structure with a heat-resistant, split-type base according to claim 1, characterized in that: Both ends of the optical path support rod (6) can rotate, and a tension spring (7) is fixedly installed inside the corner of the optical path support rod (6).

4. The excimer laser optical path fixing structure with a heat-resistant, split-type base according to claim 1, characterized in that: The heat-conducting component (42) includes a copper block (421), which is fixedly disposed on one side of the optical path base (2); A stainless steel sheet (422) is fixedly installed on the side of the copper block (421) near the pushing assembly (41), and one end of the first spring tube (411) and the limiting rod (414) are fixedly connected to the stainless steel sheet (422).

5. The excimer laser optical path fixing structure with a heat-resistant, split-type base according to claim 4, characterized in that: The copper block (421) has several miniature thermal diodes embedded inside. The miniature thermal diodes are filled with a phase change working medium to guide heat to be transferred unidirectionally from the optical path base (2) to the driving component (41).

6. The excimer laser optical path fixing structure with a heat-resistant, split-type base according to claim 5, characterized in that: The force transmission component (43) includes a connecting rod (431), one end of which is slidably disposed at the end of the push rod (413); A ball head (432) is fixedly provided at the other end of the connecting rod (431).

7. The excimer laser optical path fixing structure with a heat-resistant, split-type base according to claim 6, characterized in that: A ball seat (433) is engaged with one side of the ball head (432), and the ball seat (433) is fixedly disposed on one side of the optical path support flange plate (5); A set of disc springs (434) is sleeved on the connecting rod (431), and the disc springs (434) are located between the ball head (432) and the push rod (413).

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