A crown block rail self-cleaning device, system and method

Abstract

This invention discloses a self-cleaning device, system, and method for overhead crane tracks, primarily relating to the field of track self-cleaning technology. The self-cleaning device for overhead crane tracks includes a track and an extraction assembly. The track self-cleaning system includes a self-cleaning device, a transport crane, and a cleaning crane. The track self-cleaning method includes: Step S1: Obtaining the type and location information of the crane; Step S2: Based on the type and location information of the crane, extracting gas from the track cavity using the extraction assembly, so that the extraction holes on the running surface and / or the junction section draw in air. The negative pressure within the track cavity adsorbs particles, which are then extracted from the cavity by the extraction device through an extraction pipe and finally discharged from the cleanroom. The entire negative pressure extraction channel is sealed, reducing particle contamination of production equipment. When the cleaning crane passes the track, the extraction assembly can remove particles carried down from the track junction during the crane's movement, thereby achieving higher dust removal efficiency.

Description

Technical Field

[0001] This invention relates to the field of track self-cleaning devices, and in particular to a self-cleaning device, system and method for overhead crane tracks. Background Technology

[0002] In advanced semiconductor wafer manufacturing processes, maintaining high cleanliness in AMHS (Automated Material Handling System) cleanrooms is a core prerequisite for ensuring production. Advanced processes have shrunk transistor structures to the nanometer scale; particles falling onto the wafer can directly disrupt photoresist uniformity, block ion implantation paths, and cause short circuits, open circuits, or leakage. A single particle can render an entire wafer unusable. Currently, the core areas of 7-28nm processes require a cleanliness level of ISO 3 (≤1000 particles ≥0.1μm per cubic meter), while EUV lithography areas even require ISO 1-2 (≤10-100 particles per cubic meter). Particulate contamination is the primary factor causing chip yield decline. Each improvement in cleanliness level can increase wafer yield by 2%-5%; if cleanliness standards are not met, the yield of advanced processes can plummet from over 90% to less than 50%, resulting in huge waste of production capacity.

[0003] A large wafer fab requires long tracks to meet production demands, and also employs a large number of overhead cranes. Dust generated by friction between the tracks and crane wheels, as well as dust from personnel entering and exiting the cleanroom, are the main sources of particulate contamination. Therefore, cleaning devices need to be installed on the crane tracks to reduce particulate contamination in the cleanroom.

[0004] A Chinese patent with publication number CN224225966U discloses an aerial track structure and an aerial transport vehicle system. This solution installs a protective cover above the track, so that the air blown by the fan filter unit on the ceiling will not blow the dust accumulated on the track, effectively avoiding the adverse effects caused by dust spreading to the process area and improving the cleanliness of the cleanroom.

[0005] While the aforementioned aerial transport system is beneficial for improving the cleanliness of cleanrooms, it still has the following drawbacks: dust accumulated on the tracks may still fall and affect the cleanliness of the cleanroom. Summary of the Invention

[0006] In-depth analysis revealed that the main reason dust on the track could still fall off, as described in Chinese patent CN224225966U, is that the track surface is not a continuous, flat plane. Figure 8 , Figure 9As shown, when the wheels pass through the track junction, the track surface has a stepped cross-section. Dust accumulated on the track may fall through the junction cross-section onto the lower excitation line support plate. Furthermore, with the airflow generated by the crane's movement, the dust may then fall from the excitation line support plate and disperse onto the lower machine platform. Additionally, when the track sweeper passes through the junction, dust accumulated on the track may fall from the junction cross-section onto the machine platform. Moreover, traditional track sweepers generally rely on wireless power, which is power-limited, resulting in limited dust removal efficiency. And when the track sweeper passes through the junction, dust accumulated on the track may fall from the junction cross-section onto the machine platform, such as... Figure 10 As shown.

[0007] The purpose of this invention is to provide a self-cleaning device, system, and method for crane tracks to improve the cleanliness of cleanrooms.

[0008] The objective of this invention is achieved through the following technical solution:

[0009] A self-cleaning device for crane tracks includes:

[0010] The track has a running surface and a branch intersection section located at a branch intersection, and the running surface and / or the branch intersection section are provided with air extraction holes, which are connected to the cavity inside the track.

[0011] An air extraction assembly is connected to the cavity of the track and is used to extract gas from the track cavity.

[0012] Furthermore, the cavity of the track is divided into an isolated first chamber and a second chamber, and the vent includes a first vent and a second vent.

[0013] The first air extraction port is disposed on the cross-section of the branch road and is connected to the first chamber. The air extraction assembly is connected to the first chamber and is used to extract gas from the first chamber.

[0014] The second air extraction port is disposed on the driving surface and communicates with the second chamber. The air extraction assembly communicates with the second chamber and is used to extract gas from the second chamber.

[0015] Furthermore, the air extraction assembly includes:

[0016] Air extraction equipment;

[0017] An air extraction pipe is installed on the track. One end of the air extraction pipe is connected to an air extraction device, and the other end is connected to the first chamber and the second chamber to extract the gas in the first chamber and the second chamber, so as to create a negative pressure in the first chamber and the second chamber.

[0018] Furthermore, the air extraction assembly also includes:

[0019] The first connecting pipe has one end connected to the first chamber and the other end connected to the air extraction pipe.

[0020] A first solenoid valve is installed on the first connecting pipe and is used to control the opening and closing of the first connecting pipe.

[0021] Furthermore, the air extraction assembly also includes:

[0022] The second connecting pipe has one end connected to the second chamber and the other end connected to the air extraction pipe.

[0023] The second solenoid valve is installed on the second connecting pipe and is used to control the on / off state of the second connecting pipe.

[0024] Furthermore, the first air extraction hole is provided in several portions, evenly distributed on the cross-section of the branch intersection; and / or,

[0025] The second air extraction hole is provided in a plurality of portions, evenly spaced along the length of the track; and / or,

[0026] The opening position of the second air extraction hole does not coincide with the travel path of the crane wheels on the track surface.

[0027] A self-cleaning system for overhead crane tracks includes:

[0028] The aforementioned self-cleaning device for crane tracks;

[0029] A transport crane is used to move materials by traveling on the track surface.

[0030] A cleaning crane is used to travel on the track surface to clean dust from the track.

[0031] Furthermore, it also includes:

[0032] The first controller is used to control the opening and closing of the first solenoid valve and the second solenoid valve;

[0033] The second controller is used to acquire information on the type and location of the overhead cranes traveling on the track, and to send cleaning instructions to the first controller based on the type and location information of the overhead cranes.

[0034] A self-cleaning method for overhead crane tracks includes the following steps:

[0035] Step S1: Obtain the type and location information of the overhead cranes traveling on the track;

[0036] Step S2: Based on the type and location information of the overhead crane, the gas in the track cavity is extracted by the air extraction assembly so that the air extraction holes on the running surface and / or the junction section can draw in air.

[0037] Furthermore, step S2 specifically includes:

[0038] When the cleaning crane passes over the track, the first solenoid valve is opened and the second solenoid valve is closed, so that the first chamber is under negative pressure to clean the dust on the cross-section of the branch line.

[0039] When the overhead crane passes over the track, the first solenoid valve is closed and the second solenoid valve is opened to create negative pressure in the second chamber and clean the dust on the travel surface.

[0040] Compared with the prior art, the beneficial effects of the present invention include at least the following:

[0041] By setting air extraction holes on the running surface and / or junction cross-section, the negative pressure of the cavity inside the track adsorbs the particles. The particles on the running surface and / or junction cross-section enter the track cavity through the air extraction holes, and then the air extraction assembly extracts the particles out of the cavity through the air extraction pipe, and finally discharges them from the clean room. The entire negative pressure air extraction channel is sealed, which can reduce the contamination of production equipment by particles.

[0042] The track self-cleaning device of this invention takes into account the differences in complexity between tracks and overhead cranes. It appropriately adds cleaning functions to tracks with lower complexity, while avoiding adding cleaning functions to more complex overhead cranes, thereby achieving a higher overall system reliability. When the cleaning crane passes over the track, the suction component can suck away the particles that fall from the track junction during the crane's movement, thus achieving higher dust removal efficiency.

[0043] Furthermore, by setting up two negative pressure cavities and two air extraction holes, dust removal can be carried out at different locations on the track, and it can also take into account the situation when the cleaning crane is used at the same time. That is, when the cleaning crane passes by, the second solenoid valve connected to the second air extraction hole on the track surface is closed to stop the second air extraction hole from extracting air, thereby preventing it from affecting the airflow of the cleaning crane and ensuring dust removal efficiency.

[0044] Furthermore, the self-cleaning device of the present invention relies on a wired power supply system, which has higher power than the track sweeper that relies on wireless power supply. It can be configured with correspondingly high-power air extraction power according to the cleanliness requirements of semiconductor manufacturing plants, making it easier to achieve the goal of high cleanliness. Attached Figure Description

[0045] Figure 1 This is a partial schematic diagram of a self-cleaning device for crane tracks according to an embodiment of the present invention;

[0046] Figure 2 This is a schematic diagram of the structure at the track switch intersection in Embodiment 1 of the present invention;

[0047] Figure 3 This is the present invention. Figure 1 Schematic diagram of the cross section at point AA;

[0048] Figure 4 This is a top view of a partial structure of Embodiment 1 of the present invention;

[0049] Figure 5 This is a schematic diagram showing the connection relationship between the track cleaning control software system, the track cleaning embedded software system, and the solenoid valve in Embodiment 2 of the present invention;

[0050] Figure 6 This is a schematic diagram showing the connection relationship between the track cleaning control software system, the track cleaning embedded software system, and the crane scheduling system in Embodiment 2 of the present invention;

[0051] Figure 7 This is a schematic diagram showing the connection relationship between the track cleanliness control software system and the track cleanliness embedded software system and other control systems when Embodiment 2 of the present invention is applied to an automated processing system.

[0052] Figure 8 This is a top-down view of the existing overhead crane traveling at a track junction.

[0053] Figure 9 This is a partial structural diagram of the track switch intersection;

[0054] Figure 10 This is a cross-sectional diagram of an existing track cleaning crane traveling at a junction.

[0055] In the diagram: 01, crane wheel; 02, track cleaning vehicle; 03, excitation line support plate; 1, track; 101, running surface; 102, junction section; 103, first chamber; 104, first vent; 105, second chamber; 106, second vent; 2, venting assembly; 201, venting pipe; 202, first connecting pipe; 203, first solenoid valve; 204, second connecting pipe; 205, second solenoid valve; 3, first controller; 4, second controller. Detailed Implementation

[0056] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided to make the invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0057] The terms used to express position and direction in this invention are illustrated with reference to the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this invention.

[0058] Example 1

[0059] refer to Figures 1 to 4 This embodiment provides a self-cleaning device for crane tracks, comprising: track 1 and air extraction assembly 2.

[0060] Track 1 is used for the movement of overhead cranes and cleaning cranes. Multiple track suspension components are installed on track 1, with one end connected to track 1 and the other end potentially connected to the cleanroom ceiling. These multiple suspension components are spaced apart along track 1, suspending track 1 in the air (e.g., ...). Figure 1 ).

[0061] The track 1 has a running surface 101 and a branch intersection section 102 located at the branch intersection, such as Figure 8 or Figure 9 The travel surface 101 is the surface that the crane wheels 01 travel on. The level crossing section 102 refers to the surface adjacent to the travel surface 101, which is generally a non-working surface. The track 1 generally does not extend further at the level crossing section 102. The plane of the level crossing section 102 can be perpendicular to the plane of the travel surface 101. Air extraction holes are provided on the travel surface 101 and / or the level crossing section 102, and these holes connect to the internal cavity of the track 1. The air extraction holes can penetrate the travel surface 101 and / or the level crossing section 102. When the cavity is under negative pressure, particles on the travel surface 101 and / or the level crossing section 102 are sucked into the internal cavity of the track 1 through the air extraction holes, thereby achieving cleaning of the travel surface 101 and / or the level crossing section 102.

[0062] The vacuum assembly 2 is connected to the cavity of the track 1 and is used to extract gas from the cavity of the track 1. The vacuum assembly 2 may include a vacuum pump.

[0063] By setting air extraction holes on the running surface 101 and / or the junction section 102, the particles are then adsorbed by the negative pressure in the cavity inside the track 1. The particles on the running surface 101 and / or the junction section 102 enter the track cavity through the air extraction holes, and then the air extraction assembly extracts the particles out of the cavity through the air extraction pipe 201, and finally discharges them from the clean room. The entire negative pressure air extraction channel is sealed, which can reduce the contamination of production equipment by particles.

[0064] The cavity of track 1 is preferably divided into an isolated first chamber 103 and a second chamber 105, and the air extraction port includes a first air extraction port 104 and a second air extraction port 106.

[0065] Reference Figure 2 , Figure 2 for Figure 1This is a schematic diagram of the overhead crane on track 1 when viewed from the rightmost side to the left. The first vent 104 is located on the branch section 102 and is connected to the first chamber 103. The vent assembly 2 is connected to the first chamber 103 and is used to extract the gas in the first chamber 103. Several first vents 104 are provided and are evenly distributed on the branch section 102 to prevent dust on track 1 from falling onto the lower excitation line support plate 03 through the branch section 102.

[0066] Reference Figure 3 The second exhaust port 106 is provided on the travel surface 101 and is connected to the second chamber 105. The exhaust assembly 2 is connected to the second chamber 105 and is used to extract the gas in the second chamber 105. Several second exhaust ports 106 are provided and can be evenly distributed along the length of the track 1. The opening position of the second exhaust port 106 does not coincide with the travel path of the crane wheel 01 on the travel surface 101 of the track 1, that is, the two are staggered to avoid the crane wheel rolling over and covering the second exhaust port 106 when the crane is traveling, so as to avoid affecting the dust removal effect.

[0067] The self-cleaning device for the overhead crane track provided in this embodiment, by setting two negative pressure cavities and two air extraction holes, can perform dust removal treatment at different positions of the track 1, and can also take into account the situation of simultaneous use with the cleaning crane. That is, when the cleaning crane passes by, by closing the second solenoid valve 205 connected to the second air extraction hole 106 on the running surface 101 of the track 1, the second air extraction hole 106 stops extracting air, which can prevent the operation of the self-cleaning device from affecting the airflow of the cleaning crane, thereby ensuring the dust removal efficiency.

[0068] Reference Figure 4 The extraction component 2 preferably includes an extraction device and an extraction pipe 201, and may also include a first connecting pipe 202, a first solenoid valve 203, a second connecting pipe 204, and a second solenoid valve 205. The first solenoid valve 203 and the second solenoid valve 205 can be connected to a power supply via a wired connection. The crane track self-cleaning device provided in this embodiment has higher dust collection and cleaning efficiency compared to the cleaning crane traveling on track 1. Since the cleaning crane travels on track 1 and relies on a wireless power supply system, its power is limited, and its dust collection power is also limited. However, the extraction component 2 of the self-cleaning device of the present invention relies on a wired power supply system, and its power can be much higher than that of the track cleaning vehicle 02. It can be configured with correspondingly high-power extraction power according to the cleanliness requirements of semiconductor manufacturing plants, making it easier to achieve the goal of high cleanliness.

[0069] Specifically, the air extraction pipe 201 is installed on the track 1. One end of the air extraction pipe 201 is connected to an air extraction device (not shown). The air extraction device can be a vacuum pump and can be connected to a power supply via a wired connection. The other end of the air extraction pipe 201 is connected to the first chamber 103 and the second chamber 105 to extract the gas in the first chamber 103 and the second chamber 105, so that the first chamber 103 and the second chamber 105 form a negative pressure. The total length of the exhaust pipe 201 can be equal to the total length of the track 1. In actual use, the track 1 can be divided into sections, each 4-5m long, such as 4m, 4.5m, and 5m. Sections shorter than 4-5m can be divided into separate sections. Each section of track 1 is equipped with a second solenoid valve 205 on the corresponding exhaust pipe 201. That is, one second solenoid valve 205 controls one section of track 1. Only when the overhead crane moves to the corresponding section of track 1 will the second solenoid valve 205 controlling that section of track 1 open, thereby activating the exhaust and dust removal function. Compared to continuously removing dust from the entire running surface 101 of the track 1 at the same time, the exhaust power required for segmented dust removal is lower, which can save energy.

[0070] One end of the first connecting pipe 202 is connected to the first chamber 103, and the other end is connected to the air extraction pipe 201; the first solenoid valve 203 is installed on the first connecting pipe 202 to control the opening and closing of the first connecting pipe 202, thereby controlling the opening and closing of the negative pressure air path of the first chamber 103, and thus controlling the opening and closing of the first air extraction port 104 to extract air to clean the dust at the cross section 102 of the branch channel.

[0071] The second connecting pipe 204 has one end connected to the second chamber 105 and the other end connected to the suction pipe 201. A second solenoid valve 205 is mounted on the second connecting pipe 204 and is used to control the on / off state of the second connecting pipe 204, thereby controlling the on / off state of the negative pressure air path in the second chamber 105, and thus controlling the on / off state of the second suction port 106 for suctioning air to clean dust from the driving surface 101. (Reference) Figure 5 Valve position sensors and switch controllers can be installed on the first solenoid valve 203 and the second solenoid valve 205. The valve position sensor is a device used to detect the valve's open / closed position and opening degree. It can convert the actual state of the valve into an electrical signal and transmit it to the control system so that the computer or operator knows whether the valve is open or not and how much it is open. The switch controller is used to control the opening and closing state of the solenoid valve.

[0072] The self-cleaning device for overhead crane tracks provided in this invention uses negative pressure within the cavity of track 1 to adsorb microparticles. The microparticles are then extracted from the cavity via an extraction pipe 201 by an air extraction device and finally discharged from the cleanroom. The entire negative pressure extraction channel is sealed, reducing microparticle contamination of production equipment. This self-cleaning device considers the difference in complexity between track 1 and the overhead crane, appropriately adding cleaning functions to the less complex track 1 while avoiding adding cleaning functions to the more complex overhead crane, thus achieving a higher overall system reliability. When the cleaning crane passes over track 1, the extraction component 2 can suck up the microparticles carried down from the track 1 branch point during the crane's movement, thereby achieving higher dust removal efficiency.

[0073] Example 2

[0074] Terminology Explanation:

[0075] MES stands for Manufacturing Execution System. In semiconductor manufacturing FAB (Fabrication Equipment Inc.), MES is the production information management system at the factory execution layer of semiconductor wafer manufacturing and advanced packaging and testing, and it is also the core system for production management and scheduling at the FAB level. It is also referred to in the industry as the "brain" or "nerve center" of chip manufacturing, responsible for connecting the upper-level Enterprise Resource Planning (ERP) system and the lower-level automated equipment, controlling the entire production process from material input to finished product.

[0076] EAP: Equipment Automation Program. A system related to semiconductor equipment automation, it is a core component of the semiconductor CIM (Computer Integrated Manufacturing) system. This system serves as a crucial bridge connecting upper-level factory systems such as MES (Manufacturing Execution System) and RMS (Recipe Management System) with lower-level production equipment. Its core functions include real-time equipment monitoring, production data acquisition, recipe verification, and anomaly alarm handling. It is one of the core supporting software components for FAB (Factory Automation) to achieve fully automated production.

[0077] MCS: Material Control System. In semiconductor manufacturing assembly (FAB), the MCS is the core scheduling hub of the Automated Material Handling System (AMHS). It is responsible for coordinating the collaborative work of equipment such as OHT overhead cranes, stocker storage, and AGVs, realizing the automatic transfer, storage, and path optimization scheduling of wafer cassettes between various process equipment. It is a key intermediate layer connecting the upper-level MES manufacturing execution system and the lower-level equipment control system.

[0078] TCS: Transport Control System. In semiconductor manufacturing FAB, TCS is responsible for coordinating the dispatch of OHT (Outer Hoisting) cranes, finding the optimal route from origin to destination, managing the status of OHT and track-related equipment, controlling OHT crane traffic, and serving as a key intermediate layer connecting to the MCS (Mechanical Control System) at the upper level and the VCS (Virtual Control System) embedded within the OHT at the lower level.

[0079] refer to Figures 5 to 7 The crane track self-cleaning system provided in this embodiment includes: a self-cleaning device as in embodiment 1, a transport crane and a cleaning crane, and may also include a first controller 3 and a second controller 4. The first controller 3 is embedded with a track cleaning embedded software system, and the second controller 4 is embedded with a track cleaning control software system.

[0080] The overhead crane is used to move materials on the travel surface 101 of track 1.

[0081] The cleaning crane is used to travel on the travel surface 101 of track 1 to clean the dust on track 1.

[0082] The first controller 3 is used to control the opening and closing of the first solenoid valve 203 and the second solenoid valve 205. The first controller 3 can obtain the position and opening / closing status information of each of the first solenoid valve 203 and the second solenoid valve 205 through valve position sensors. The physical connection between the first controller 3 and each solenoid valve includes, but is not limited to, communication buses such as Profinet, EtherCAT, and IO-Link. Among them, Profinet is a new generation of automation bus standard based on industrial Ethernet technology, which can be fully compatible with industrial Ethernet and existing fieldbus technologies, protecting existing investments; EtherCAT is an open architecture fieldbus system based on Ethernet, and CAT in its name is an abbreviation for Control Automation Technology. EtherCAT is deterministic industrial Ethernet; IO-Link is a standardized communication protocol in the field of industrial automation, used to realize bidirectional digital data exchange between sensors, actuators and control systems.

[0083] The first controller 3 can be a device equipped with a Rail Particle Embedded System (RPES), such as a System on Chip (SoC), which is a dedicated target integrated circuit containing a complete system and embedded software. In semiconductor manufacturing FAB (wafer fab), the RPES is responsible for receiving instructions from the host RPCS to open or close designated solenoid valves and collecting information from the solenoid valves to transmit to the host RPCS.

[0084] The second controller 4 is used to control the acquisition of crane type and location information, and to send cleaning instructions to the first controller 3 according to the crane type and location information.

[0085] The second controller 4 can be a device equipped with a Rail Particle Control System (RPCS), such as a Central Processing Unit (CPU). As the core of a computer system's computation and control, it is the final execution unit for information processing and program execution. In semiconductor manufacturing FABs (wafer fabs), the RPCS is responsible for rail cleanliness control, obtaining information such as the position and type of the OHT (Outer Hovercraft) from the TCS and sending cleanliness commands to the RPES. It collects equipment status from the RPES, displays it to the equipment user, and provides predictive maintenance information.

[0086] In this embodiment, the controller can be any applicable computing device, such as a personal computer, server, programmable logic controller (PLC controller), microcontroller, etc., or it can be an integration of computer devices. The controller has functions such as receiving information and sending control commands. The controller can control the self-cleaning device, the transport crane and the cleaning crane to perform corresponding actions through wired or wireless communication to complete material handling and track cleaning.

[0087] When the crane track self-cleaning system of this embodiment is applied to the automated wafer processing system, such as Figure 7 The MES controls the operation of the EAP box MCS, and the MCS schedules the overhead crane for material handling through the TCS. When the TCS system detects that the overhead crane is approaching a specific track section, it sends a signal to the RPCS. The RPCS controls the corresponding solenoid valve to open according to the crane type (handling / cleaning). The negative pressure of the cavity of track 1 adsorbs the particles, and then the exhaust component 2 discharges the particles out of the cleanroom. In the field of advanced semiconductor manufacturing processes, maintaining a high level of cleanliness in the production environment has a strong effect on improving the yield of wafer manufacturing.

[0088] Communication between RPES, RPCS, TCS, and EAP includes, but is not limited to, TCP / IP and UDP / IP. TCP / IP is a protocol suite composed of multiple layered protocols, with the Internet Protocol (IP) as its network layer core, providing unified logical addressing and packet forwarding capabilities. It then provides end-to-end data transmission services for various applications through transport layer protocols. User Datagram Protocol / Internet Protocol (UDP / IP) is the core protocol combination for computer networks. UDP is a connectionless transport layer protocol that enables inter-process communication via port numbers. Internet Protocol (IP), as a network layer protocol, is responsible for packet routing and cross-network transmission.

[0089] Example 3

[0090] This embodiment provides a self-cleaning method for crane tracks, including the following steps: step S1 and step S2.

[0091] Step S1: As Figure 6 or Figure 7 The second controller 4 can obtain the type and location information of the cranes traveling on track 1 through the crane scheduling system.

[0092] Step S2: Based on the type and location information of the overhead crane, and combined with the position information fed back by the valve position sensors on the first solenoid valve 203 and the second solenoid valve 205, the gas in the cavity of the track 1 is extracted by the air extraction assembly 2 so that the air extraction hole on the running surface 101 or the junction section 102 can draw in air.

[0093] In a preferred embodiment, step S2 specifically involves:

[0094] When the overhead cleaning trolley passes over track 1, the first solenoid valve 203 can be opened and the second solenoid valve 205 closed, so that the first chamber 103 forms a negative pressure, cleaning the dust falling on and / or the outer side of the junction section 102, that is, cleaning the dust that may adhere to the junction section 102, as well as the dust falling from other surfaces to the junction section 102. The self-cleaning method of the overhead cleaning trolley track in this embodiment takes into account the situation where the self-cleaning of track 1 and the overhead cleaning trolley are used simultaneously. Since the mainstream overhead cleaning trolleys on the market generally suck the particles on track 1 into the cleaning trolley and carry them away (e.g., Figure 10 The track sweeper 02 has a dust suction function. Therefore, when the sweeping crane passes by, in order not to obstruct the airflow of the sweeping crane, the second solenoid valve 205 connected to the second air extraction port 106 is closed. In addition, the first solenoid valve 203 connected to the first air extraction port 104 at the junction section 102 is opened to extract air, so as to cooperate with the sweeping crane to suck away the particles that fall onto the track 1 when the sweeping crane is moving, and finally make the dust removal efficiency of the entire system higher.

[0095] When the overhead crane passes over track 1, the first solenoid valve 203 can be closed and the second solenoid valve 205 can be opened to create negative pressure in the second chamber 105, cleaning the dust on the travel surface 101. When the overhead crane travels to the section of track 1 with the branch intersection 102, the first solenoid valve 203 and the second solenoid valve 205 can be opened at the same time to clean the dust on the travel surface 101 and the branch intersection 102 simultaneously. This can promptly suck out the newly generated particles in the closed cavity of track 1 from the cleanroom, minimizing the contamination of production equipment by particles.

[0096] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the invention without departing from the principles and spirit of the invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A self-cleaning device for crane tracks, characterized in that, include: The track (1) has a running surface (101) and a branch intersection section (102) located at a branch intersection. The running surface (101) and / or the branch intersection section (102) are provided with air extraction holes, which are connected to the cavity inside the track (1). The air extraction component (2) is connected to the cavity of the track (1) and is used to extract the gas in the cavity of the track (1).

2. The self-cleaning device for crane tracks as described in claim 1, characterized in that, The cavity of the track (1) is divided into an isolated first chamber (103) and a second chamber (105), and the air extraction port includes a first air extraction port (104) and a second air extraction port (106). The first air extraction hole (104) is disposed on the cross section (102) of the branch road and is connected to the first chamber (103). The air extraction assembly (2) is connected to the first chamber (103) and is used to extract the gas in the first chamber (103). The second air extraction port (106) is disposed on the driving surface (101) and connected to the second chamber (105). The air extraction assembly (2) is connected to the second chamber (105) and is used to extract gas from the second chamber (105).

3. The self-cleaning device for crane tracks as described in claim 2, characterized in that, The air extraction assembly (2) includes: Air extraction equipment; An air extraction pipe (201) is installed on the track (1). One end of the air extraction pipe (201) is connected to an air extraction device, and the other end is connected to the first chamber (103) and the second chamber (105) to extract the gas in the first chamber (103) and the second chamber (105) to create a negative pressure in the first chamber (103) and the second chamber (105).

4. The self-cleaning device for crane tracks as described in claim 3, characterized in that, The air extraction assembly (2) also includes: The first connecting pipe (202) has one end connected to the first chamber (103) and the other end connected to the air extraction pipe (201); A first solenoid valve (203) is disposed on the first connecting pipe (202) and is used to control the opening and closing of the first connecting pipe (202).

5. A self-cleaning device for crane tracks as described in claim 4, characterized in that, The air extraction assembly (2) also includes: The second connecting pipe (204) has one end connected to the second chamber (105) and the other end connected to the air extraction pipe (201); The second solenoid valve (205) is installed on the second connecting pipe (204) and is used to control the opening and closing of the second connecting pipe (204).

6. A self-cleaning device for crane tracks as described in claim 2, characterized in that, The first air extraction port (104) is provided in several portions, evenly distributed on the cross section (102) of the branch road; and / or, The second air extraction hole (106) is provided in a plurality of portions, evenly spaced along the length of the track (1); and / or, The opening position of the second air extraction hole (106) does not coincide with the travel path of the crane wheel on the travel surface (101) of the track (1).

7. A self-cleaning system for overhead crane tracks, characterized in that, include: The self-cleaning device as described in any one of claims 1-6; A transport crane is used to travel on the travel surface (101) of the track (1) to transport materials; A cleaning crane is used to travel on the travel surface (101) of the track (1) to clean the dust on the track (1).

8. A self-cleaning system for crane tracks as described in claim 7, characterized in that, Also includes: The first controller (3) is used to control the opening and closing of the first solenoid valve (203) and the second solenoid valve (205) as described in claim 5; The second controller (4) is used to obtain the type and location information of the crane traveling on the track (1), and send a cleaning command to the first controller (3) according to the type and location information of the crane.

9. A self-cleaning method for overhead crane tracks, characterized in that, Includes the following steps: Step S1: Obtain the type and location information of the overhead cranes traveling on the track (1); Step S2: Based on the type and location information of the overhead crane, the gas in the cavity of the track (1) is extracted by the air extraction component (2) as described in claim 1, so that the air extraction holes on the running surface (101) and / or the junction section (102) can draw in air.

10. A self-cleaning method for crane tracks as described in claim 9, characterized in that, Step S2 specifically involves: When the cleaning crane passes over the track (1), the first solenoid valve (203) as described in claim 5 is opened and the second solenoid valve (205) is closed, so that the first chamber (103) forms a negative pressure to clean the dust falling on the cross section (102) of the branch intersection and / or the outside of the cross section; When the overhead crane passes over the track (1), the first solenoid valve (203) is closed and the second solenoid valve (205) is opened so that the second chamber (105) forms a negative pressure to clean the dust on the travel surface (101).

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