An evaporation boat

Abstract

This application relates to the field of evaporation coating technology, and in particular to an evaporation boat, including a boat body, a splash guard, a lower cover, and an upper cover. The splash guard is placed inside the boat body and is used to contain the film material, with a closed top. At least one side wall of the splash guard has a diffusion hole, forming a vertical diffusion cavity between its outer periphery and the inner periphery of the boat body. A lower vent hole is formed on the lower cover. An upper vent hole is formed on the upper cover, and the upper vent hole is offset from the lower vent hole. Compared with existing evaporation boats, the evaporation path is further extended, allowing tiny particles of splashed gas to deposit inside the boat body. Simultaneously, the extended evaporation path provides sufficient time for the film material to sublimate. The presence of the diffusion hole, lower vent hole, and upper vent hole increases the resistance of the evaporation boat, thereby increasing its heating efficiency and reducing the power required to achieve the desired evaporation rate, effectively reducing the probability of splashing during the heating process of the film material.

Description

Technical Field

[0001] This application relates to the field of evaporation coating technology, and in particular to an evaporation boat. Background Technology

[0002] The evaporation boat heats zinc sulfide, zinc selenide, and other film materials using resistance heating, causing the film material to sublimate directly into a gaseous state and be deposited onto the workpiece without melting. During the heating process, tiny particles of the solid film material splash onto the coating, forming pits that severely affect product quality.

[0003] Existing vapor deposition boats consist of a boat body and a filter element. The filter element is installed at the top of the boat body to block or filter out small particles splashed onto the surface, thereby improving product quality.

[0004] The existing technical solutions mentioned above have the following drawbacks: when using existing evaporation boats for evaporation coating, there are still many sputtering defects on the coating. Summary of the Invention

[0005] To further reduce sputtering defects, this application provides an evaporation boat.

[0006] This application provides an evaporation boat, which adopts the following technical solution: An evaporation boat, comprising: boat body; A splash guard is installed inside the boat body. The interior is used to contain the film material. The top is a closed structure. At least one side wall has a diffusion hole. The outer periphery and the inner periphery of the boat body form a vertical diffusion cavity. The lower cover is located at the top of the boat hull; a lower vent is formed on the lower cover; The upper cover is placed on top of the lower cover; an upper vent is formed on the upper cover; the upper vent and the lower vent are staggered. After sublimation, the film material flows sequentially through the interior of the splash shield, the diffusion holes, the vertical diffusion chamber, and the lower vent, before flowing out through the upper vent.

[0007] By adopting the above technical solution, the evaporation path is further extended, allowing tiny particles of splashing gas to deposit within the boat. Simultaneously, the extended evaporation path provides sufficient time for the film material to sublimate, thus enabling the formation of a uniformly thick coating on the substrate awaiting deposition. Furthermore, the presence of diffuser holes, lower vent holes, and upper vent holes increases the resistance of the evaporation boat, resulting in higher heating efficiency. Consequently, the power required to achieve the desired evaporation rate is reduced, effectively decreasing the probability of splashing during film material heating and reducing the amount of splashed material generated.

[0008] The application further specifies that: a support portion is provided in the middle of the lower cover, and lower mounting portions are provided at opposite ends; the bottom end of the support portion abuts against the top end of the splash shield; the bottom end of the lower mounting portion abuts against the top end of the boat body; the opposite ends of the support portion are bent to form vertical flow guiding chambers at opposite ends of the support portion; and multiple lower vent holes are formed at the bottom of the vertical flow guiding chambers at both ends.

[0009] By adopting the above technical solution, the support part cooperates with the top of the splash shield, and the lower mounting part cooperates with the top of the boat body, ensuring the lower cover remains stable in the vertical direction. The sublimated membrane material flows sequentially through the interior of the splash shield, the diffuser holes, the vertical diffuser chamber, the lower vent, the vertical guide chamber, and the transverse diffuser chamber before exiting from the upper vent. This further extends the evaporation path, allowing tiny particles of splash gas to deposit inside the boat body. Simultaneously, the extended evaporation path provides sufficient time for the membrane material to sublimate.

[0010] This application further specifies that: the top surface of the support portion is lower than the top surface of the lower mounting portion in the vertical direction; and a transverse diffusion cavity is formed between the top surface of the support portion and the bottom surface of the upper cover.

[0011] By adopting the above technical solution, the vertical diffusion cavity and the horizontal diffusion cavity are conducive to uniform gas distribution, thereby improving the uniformity of film deposition.

[0012] This application is further configured such that: upper mounting portions are respectively provided at opposite ends of the upper cover, and multiple upper vent holes are formed in the middle; the bottom ends of the upper mounting portions at both ends abut against the top ends of the lower mounting portions at the corresponding ends.

[0013] By adopting the above technical solution, the upper mounting part and the lower mounting part cooperate to keep the upper cover stable in the vertical direction.

[0014] The application further specifies that: the upper cover has flanges formed on opposite sides; the inner walls of the flanges on both sides abut against the outer walls of the corresponding sides of the hull.

[0015] By adopting the above technical solution, the side flanges not only serve a sealing function to prevent splashes from overflowing from both sides of the boat, but also serve a positioning function to prevent the top cover from moving along its own width.

[0016] The present application further provides that: the top ends of the boat body are respectively formed with supporting parts; the top ends of the supporting parts at both ends abut against the bottom ends of the corresponding ends of the lower cover.

[0017] This application is further configured such that multiple diffusion holes are formed on the opposite side walls of the splash shield.

[0018] By adopting the above technical solution, the diffusion rate of the film material is effectively improved, and the gas is distributed uniformly, thus ensuring the evaporation efficiency and evaporation effect.

[0019] This application further includes: There are two drive shafts, each rotatably mounted on the upper part inside the splash guard; The first transmission gear consists of two gears, which are fitted onto one end of each of the two transmission shafts in a one-to-one correspondence. There are two second transmission gears, which are rotatably mounted on one side of the outer wall of the splash shield, and the side walls are meshed with each other; the side wall of one second transmission gear is meshed with the side wall of one first transmission gear, and the side wall of the other second transmission gear is meshed with the side wall of the other first transmission gear. There are two guide vanes, both of which are arc-shaped. Both guide vanes are set inside the splash guard, with their raised sides adjacent to each other, and their top ends are fixedly connected to the outer walls of the two drive shafts one by one. The drive motor is mounted on one outer wall of the splash guard, and its output shaft is fixedly connected to one of the second transmission gears.

[0020] By adopting the above technical solution, the two guide plates not only guide the airflow, allowing the sublimated film material inside the splash shield to flow rapidly towards the diffusion holes, thereby improving the evaporation rate, but also intercept splashes, causing solid microparticles to fall and providing a substrate for liquid microparticles to adhere. The drive motor rotates one of the second transmission gears, which in turn rotates the other second transmission gear and the two first transmission gears, thereby driving the two drive shafts to rotate synchronously in opposite directions. This causes the bottom ends of the two guide plates to move towards or away from each other. By adjusting the distance between the bottom ends of the two guide plates, the guiding and interception effects can be adjusted. Overall, it has an active and controllable splash prevention function to adapt to the process requirements of different evaporation stages or different materials.

[0021] This application is further configured such that: each guide vane has multiple interception sections arranged from top to bottom on its recessed side.

[0022] By adopting the above technical solution, a particle-collecting groove is formed between each interception section and the concave surface of the guide plate. Multiple interception sections work together to achieve the goal of tiered capture of splashing particles. A vortex is generated at the interception section, further improving the interception effect.

[0023] In summary, the beneficial technical effects of this application are as follows: 1. The sublimated film flows sequentially through the interior of the splash shield, the diffuser holes, the vertical diffuser chamber, and the lower vent, before exiting through the upper vent. This further extends the evaporation path, allowing tiny particles of splash gas to deposit within the boat. Simultaneously, the extended evaporation path provides ample time for the film to sublimate, resulting in a uniformly thick coating on the substrate awaiting deposition. Furthermore, the presence of the diffuser holes, lower vent, and upper vent increases the resistance of the evaporation boat, leading to higher heating efficiency. Therefore, the power required to achieve the desired evaporation rate is reduced, effectively decreasing the probability of splashing during heating and minimizing the amount of splashes generated.

[0024] 2. The support portion mates with the top of the splash guard, and the lower mounting portion mates with the top of the boat body, ensuring the lower cover remains vertically stable. The sublimated film flows sequentially through the interior of the splash guard, the diffuser holes, the vertical diffuser cavity, the lower vent, the vertical guide chamber, and the transverse diffuser cavity before exiting through the upper vent. This further extends the evaporation path, allowing fine particles of splash gas to deposit within the boat body. Simultaneously, the extended evaporation path provides ample time for the film to sublimate. The vertical and transverse diffuser cavities facilitate uniform gas distribution, improving the uniformity of the coating deposition.

[0025] 3. The baffles on both sides of the top cover serve both a sealing function to prevent splashes from overflowing from the sides of the boat and a positioning function to prevent the top cover from moving along its own width.

[0026] 4. Multiple diffusion holes are formed on the opposite side walls of the splash shield, which effectively improves the diffusion rate of the film material and facilitates uniform gas distribution, thus ensuring the evaporation efficiency and evaporation effect.

[0027] 5. The two guide vanes not only guide the airflow, allowing the sublimated film material inside the splash shield to flow quickly towards the diffuser holes, thus increasing the evaporation rate, but also intercept splashes, causing solid microparticles to fall and providing a substrate for liquid microparticles to adhere. The drive motor rotates one of the second transmission gears, which in turn rotates the other second transmission gear and the two first transmission gears, thereby driving the two drive shafts to rotate synchronously in opposite directions. This causes the bottom ends of the two guide vanes to move towards or away from each other. By adjusting the distance between the bottom ends of the two guide vanes, the guiding and interception effects can be adjusted. Overall, it has an active and controllable splash protection function to adapt to the process requirements of different evaporation stages or different materials. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of an embodiment of an evaporation boat; Figure 2 yes Figure 1A schematic diagram of the combined structure of the hull and splash guard in the evaporation boat shown; Figure 3 yes Figure 1 The diagram shows the combined structure of the hull, splash guard, and lower cover of the evaporation boat. Figure 4 This is a schematic diagram of the movement path of the sublimated film material inside the evaporation boat; Figure 5 yes Figure 1 The diagram shows the structure of the splash guard in the evaporation boat; Figure 6 yes Figure 1 The diagram shows the structure of the lower cover of the evaporation boat. Figure 7 yes Figure 6 The front view of the lower cover shown; Figure 8 yes Figure 1 The diagram shows the structure of the upper cover of the evaporation boat. Figure 9 This is a schematic diagram of the combined structure of the splash guard, drive shaft, first drive gear, second drive gear, and guide plate; Figure 10 This is a schematic diagram of the combined structure of the drive shaft and the guide plate.

[0029] Reference numerals: 110, hull; 111, support unit; 120, splash guard; 121, diffuser hole; 122, vertical diffuser cavity; 130, lower cover; 131, support unit; 1311, vertical guide chamber; 13111, lower vent; 132, lower mounting unit; 133, lateral diffuser cavity; 140, upper cover; 141, upper mounting unit; 142, upper vent; 143, baffle; 150, drive shaft; 160, first drive gear; 170, second drive gear; 180, guide plate; 181, interception unit. Detailed Implementation

[0030] The following is in conjunction with the appendix Figure 1-10 This application will be described in further detail.

[0031] Reference Figure 1 , Figure 2 and Figure 3This application discloses an evaporation boat, including a boat body 110, a splash guard 120, a lower cover 130, and an upper cover 140. The splash guard 120 is placed inside the boat body 110 and is used to contain film material; its top is a closed structure. At least one side wall of the splash guard 120 has a diffusion hole 121, and its outer periphery forms a vertical diffusion cavity 122 with the inner periphery of the boat body 110. The lower cover 130 is placed on the top of the boat body 110. A lower vent hole 13111 is formed on the lower cover 130. The upper cover 140 is placed on the top of the lower cover 130. An upper vent hole 142 is formed on the upper cover 140, and the upper vent hole 142 is offset from the lower vent hole 13111. It should be noted that... Figure 4 The middle arrow indicates the path of the sublimated film material within the evaporation boat. The sublimated film material flows sequentially through the interior of the splash guard 120, the diffuser hole 121, the vertical diffuser cavity 122, and the lower vent hole 13111 before exiting through the upper vent hole 142. Compared to existing evaporation boats, the evaporation path is further extended, allowing tiny particles of splash gas to deposit within the boat body 110. Simultaneously, the extended evaporation path provides sufficient time for the film material to sublimate, thus enabling the formation of a uniformly thick coating on the substrate awaiting deposition. Furthermore, the presence of the diffuser hole 121, the lower vent hole 13111, and the upper vent hole 142 increases the resistance of the evaporation boat, resulting in higher heating efficiency. Therefore, the power required to achieve the desired evaporation rate is reduced, effectively decreasing the probability of splashing during film material heating and reducing the amount of splashes generated.

[0032] In one embodiment, a plurality of diffusion holes 121 are formed on one side wall of the splash shield 120. The sublimated film material inside the splash shield 120 flows into the vertical diffusion cavity 122 through the diffusion holes 121. Since the diffusion holes 121 are provided on only one side, splashes can be effectively intercepted inside the splash shield 120.

[0033] Reference Figure 2 and Figure 5 In one embodiment, a plurality of diffusion holes 121 are formed on the opposite side walls of the splash guard 120. The presence of diffusion holes 121 on opposite sides effectively increases the diffusion rate of the film material and promotes uniform gas distribution, thus ensuring evaporation efficiency and evaporation effect.

[0034] In another embodiment, a plurality of diffusion holes 121 are formed on the four side walls of the splash guard 120. This further improves the evaporation efficiency and evaporation effect.

[0035] Reference Figure 2 , Figure 6 and Figure 7In one embodiment, a support portion 131 is provided in the middle of the lower cover 130, and lower mounting portions 132 are provided at opposite ends. The bottom end of the support portion 131 abuts against the top end of the splash shield 120. The bottom end of the lower mounting portion 132 abuts against the top end of the boat body 110. The cooperation between the support portion 131 and the top end of the splash shield 120, and the cooperation between the lower mounting portion 132 and the top end of the boat body 110, ensures that the lower cover 130 remains stable in the vertical direction. The opposite ends of the support portion 131 are bent to form vertical flow guiding chambers 1311 at opposite ends of the support portion 131. Multiple lower vent holes 13111 are formed at the bottom of the vertical flow guiding chambers 1311 at both ends. The top surface of the support portion 131 is lower than the top surface of the lower mounting portion 132 in the vertical direction. A transverse diffusion cavity 133 is formed between the top surface of the support portion 131 and the bottom surface of the upper cover 140. The sublimated film material flows sequentially through the interior of the splash shield 120, the diffusion hole 121, the vertical diffusion cavity 122, the lower vent 13111, the vertical guide chamber 1311, and the transverse diffusion cavity 133, before exiting through the upper vent 142. This further extends the evaporation path, allowing tiny particles of splash gas to deposit within the boat body 110. Simultaneously, the extended evaporation path provides sufficient time for the film material to sublimate. Furthermore, the vertical diffusion cavity 122 and the transverse diffusion cavity 133 facilitate uniform gas distribution, improving the uniformity of the coating deposition.

[0036] Reference Figure 1 and Figure 8 In one embodiment, upper mounting portions 141 are respectively provided at opposite ends of the upper cover 140. The bottom ends of the upper mounting portions 141 at both ends abut against the top ends of the corresponding lower mounting portions 132. The upper mounting portions 141 and the lower mounting portions 132 cooperate to keep the upper cover 140 stable in the vertical direction. A plurality of upper vent holes 142 are formed in the middle of the upper cover 140. Baffles 143 are respectively formed on opposite sides of the upper cover 140. The inner walls of the baffles 143 on both sides abut against the outer walls of the corresponding sides of the boat body 110. The baffles 143 on both sides serve both a sealing function to prevent splashes from overflowing from both sides of the boat body 110 and a positioning function to prevent the upper cover 140 from moving along its own width direction.

[0037] Reference Figure 2 In one embodiment, support portions 111 are formed at opposite ends of the top of the boat 110. The top ends of the support portions 111 at both ends abut against the bottom ends of the corresponding ends of the lower cover 130. The support portions 111 at both ends provide support for the lower cover 130 and the upper cover 140. At the same time, it facilitates the repositioning of the boat 110.

[0038] Reference Figure 9 and Figure 10In one embodiment, the evaporation boat further includes two drive shafts 150, two first drive gears 160, two second drive gears 170, two guide plates 180, and a drive motor (not shown in the figure). The two drive shafts 150 are rotatably mounted on the upper part of the splash shield 120. The two first drive gears 160 are sleeved onto one end of each drive shaft 150 in a one-to-one correspondence. The two second drive gears 170 are rotatably mounted on one side outer wall of the splash shield 120, with the side walls meshing with each other. The side wall of one second drive gear 170 meshes with the side wall of one first drive gear 160, and the side wall of the other second drive gear 170 meshes with the side wall of the other first drive gear 160. Both guide plates 180 are arc-shaped structures. Both guide plates 180 are disposed within the splash shield 120, with their protruding sides adjacent to each other, and their top ends are fixedly connected to the outer walls of the two drive shafts 150 in a one-to-one correspondence. The drive motor is mounted on one outer wall of the splash shield 120, and its output shaft is fixedly connected to one of the second transmission gears 170. It should be noted that the splashes generated during the evaporation coating process mainly consist of solid and liquid microparticles. The two guide plates 180 both guide the airflow, allowing the sublimated film material inside the splash shield 120 to flow rapidly towards the diffuser hole 121, thereby increasing the evaporation rate, and intercept the splashes, causing solid microparticles to fall and providing a substrate for liquid microparticles to adhere. The drive motor can drive one of the second transmission gears 170 to rotate, which in turn drives the other second transmission gear 170 and the two first transmission gears 160 to rotate, thereby driving the two transmission shafts 150 to rotate synchronously in opposite directions, thus causing the bottom ends of the two guide plates 180 to move towards or away from each other. By adjusting the distance between the bottom ends of the two guide plates 180, the guiding and interception effects can be adjusted. In the initial stage of evaporation, the distance between the bottom ends of the two guide plates 180 is adjusted to the minimum to block a large amount of splashing. After the evaporation process stabilizes, the distance between the bottom ends of the two guide plates 180 is adjusted to the maximum to ensure the deposition rate. Overall, it has an active and controllable anti-splash function to adapt to the process requirements of different evaporation stages or different materials.

[0039] Preferably, each guide vane 180 has multiple interception sections 181 arranged from top to bottom on its concave side. Each interception section 181 and the concave surface of the guide vane 180 form a particle trapping groove. The multiple interception sections 181 cooperate to achieve the purpose of trapping splashing particles in stages. Vortexes can be generated at the interception sections 181, further improving the interception effect.

[0040] The implementation principle of this embodiment is as follows: the sublimated film material flows sequentially through the interior of the splash guard 120, the diffusion hole 121, the vertical diffusion cavity 122, and the lower vent hole 13111, before exiting through the upper vent hole 142. Compared to existing evaporation boats, the evaporation path is further extended, allowing tiny particles of splash gas to deposit within the boat body 110. Simultaneously, the extended evaporation path provides sufficient time for the film material to sublimate, thus enabling the formation of a uniformly thick coating on the substrate awaiting deposition. Furthermore, the presence of the diffusion hole 121, the lower vent hole 13111, and the upper vent hole 142 increases the resistance of the evaporation boat, resulting in higher heating efficiency. Therefore, the power required to achieve the desired evaporation rate is reduced, effectively lowering the probability of splashing during film material heating and reducing the amount of splashes generated.

[0041] The embodiments described herein are preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, all equivalent changes made in accordance with the structure, shape, and principle of the present invention should be covered within the scope of protection of the present invention.

Claims

1. An evaporation boat, characterized in that, include: Boat hull(110); A splash guard (120) is disposed inside the boat body (110), the interior of which is used to contain the film material, the top of which is a closed structure, and a diffusion hole (121) is formed on at least one side wall. The outer periphery and the inner periphery of the boat body (110) form a vertical diffusion cavity (122). A lower cover (130) is provided on the top of the boat body (110); a lower vent (13111) is formed on the lower cover (130); An upper cover (140) is provided on the top of the lower cover (130); an upper vent (142) is formed on the upper cover (140); the upper vent (142) and the lower vent (13111) are offset from each other; After sublimation, the film material flows sequentially through the interior of the splash shield (120), the diffusion hole (121), the vertical diffusion cavity (122), and the lower vent (13111), and then flows out from the upper vent (142).

2. The evaporation boat according to claim 1, characterized in that, The lower cover (130) has a support portion (131) in the middle and lower mounting portions (132) at opposite ends; the bottom end of the support portion (131) abuts against the top end of the splash shield (120); the bottom end of the lower mounting portion (132) abuts against the top end of the boat body (110); the opposite ends of the support portion (131) are bent to form vertical flow guiding chambers (1311) at opposite ends of the support portion (131); a plurality of lower vent holes (13111) are formed at the bottom of the vertical flow guiding chambers (1311) at both ends.

3. The evaporation boat according to claim 2, characterized in that, The top surface of the support part (131) is lower than the top surface of the lower mounting part (132) in the vertical direction; a transverse diffusion cavity (133) is formed between the top surface of the support part (131) and the bottom surface of the upper cover (140).

4. The evaporation boat according to claim 1, characterized in that, The upper cover (140) has upper mounting portions (141) at its opposite ends, and a plurality of upper vent holes (142) are formed in the middle. The bottom ends of the upper mounting portions (141) at both ends abut against the top ends of the lower mounting portions (132) at their respective ends.

5. The evaporation boat according to claim 4, characterized in that, The upper cover (140) has flanges (143) formed on opposite sides; the inner walls of the flanges (143) on both sides abut against the outer walls of the corresponding sides of the boat body (110).

6. The evaporation boat according to any one of claims 1 to 5, characterized in that, The top of the boat body (110) has a support portion (111) formed at each of the opposite ends; the top of the support portion (111) at both ends abuts against the bottom of the corresponding end of the lower cover (130).

7. The evaporation boat according to any one of claims 1 to 5, characterized in that, The splash shield (120) has a plurality of diffusion holes (121) formed on its opposite side walls.

8. The evaporation boat according to any one of claims 1 to 5, characterized in that, Also includes: There are two drive shafts (150), each rotatably mounted on the upper part inside the splash guard (120); There are two first transmission gears (160), which are sleeved on one end of the two transmission shafts (150) in a one-to-one correspondence; There are two second transmission gears (170), which are rotatably mounted on one side outer wall of the splash shield (120), and the side walls are meshed with each other; the side wall of one of the second transmission gears (170) meshes with the side wall of one of the first transmission gears (160), and the side wall of the other second transmission gear (170) meshes with the side wall of the other first transmission gear (160). There are two guide plates (180), both of which are arc-shaped structures; both guide plates (180) are set inside the splash guard (120) and are arranged adjacent to each other on the raised side, and their top ends are fixedly connected to the outer walls of the two drive shafts (150) one by one; The drive motor is mounted on one side of the outer wall of the splash guard (120), and its output shaft is fixedly connected to one of the second transmission gears (170).

9. The evaporation boat according to claim 8, characterized in that, Each of the deflector plates (180) has a plurality of intercepting parts (181) arranged from top to bottom on the recessed side.

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