Vacuum valve calibration method, controller, and storage medium

Abstract

The embodiment of the application relates to the technical field of vacuum valve calibration, in particular to a vacuum valve calibration method, a controller and a storage medium. When the vacuum valve meets the calibration condition, the embodiment of the application controls a driving motor to drive a switch assembly of the vacuum valve to move to a zero point position and detects a driving current of the driving motor in the movement process of the switch assembly, and after the switch assembly moves to the zero point position, the switch parameters of the vacuum valve are calibrated according to the zero point position, so that the switch parameters of the vacuum valve are automatically, efficiently and accurately calibrated, the calibration cost is reduced, and the calibration reliability is improved.

Description

Technical Field

[0001] This application relates to the field of vacuum valve calibration technology, and in particular to a vacuum valve calibration method, controller and storage medium. Background Technology

[0002] During long-term service, semiconductor vacuum valves (such as automatic pressure control APC valves) are affected by mechanical wear (such as valve seats, bearings, and transmission backlash) and changes in ambient temperature (such as thermal expansion and contraction of materials). The mechanical zero point position of the vacuum valve will slowly shift, resulting in a cumulative deviation between the commanded opening degree of the drive motor to open the vacuum valve and the actual opening degree. This reduces the pressure control accuracy of the vacuum chamber and the accuracy of the etching process.

[0003] In related technologies, mechanical limit switches / photoelectric switches, dedicated drive chips with integrated stall detection functions, or manual periodic calibration using external measuring tools are used to recalibrate the mechanical zero point of vacuum valves. However, these methods increase costs, have low reliability, and cannot effectively address mechanical zero point drift caused by mechanical wear and temperature changes. Summary of the Invention

[0004] One objective of this application is to provide a vacuum valve calibration method, controller, and storage medium to improve the high cost and low reliability of vacuum valve calibration in related technologies.

[0005] In a first aspect, embodiments of this application provide a vacuum valve calibration method applied to a controller, wherein both the controller and the vacuum valve are connected to a drive motor. The method includes: responding to the vacuum valve meeting calibration conditions, controlling the drive motor to drive the switching component of the vacuum valve to move towards a zero position and detecting the drive current of the drive motor during the movement of the switching component; responding to the drive current being greater than a current threshold and the duration of the drive current being greater than the current threshold being greater than a first duration threshold, determining that the switching component has moved to the zero position; and calibrating the switching parameters of the vacuum valve according to the zero position, wherein the switching parameters include the effective stroke of the switching component, the mechanical zero point, and an angle mapping relationship, and the angle mapping relationship is used to characterize the correspondence between the position of the switching component and the opening angle of the switching component.

[0006] In some embodiments, the zero point position includes a fully open position and a fully closed position. Based on the zero point position, the switching parameters of the vacuum valve are calibrated, including: calculating the effective stroke of the switching assembly based on the fully open position and the fully closed position, where the fully open position is the position of the switching assembly when it is fully open and the fully closed position is the position of the switching assembly when it is fully closed; determining the fully open position or the fully closed position as the mechanical zero point of the switching assembly; and constructing an angular mapping relationship of the switching assembly based on the fully closed position and the effective stroke, or constructing an angular mapping relationship of the switching assembly based on the fully open position and the effective stroke.

[0007] In some embodiments, calculating the effective travel of the switch assembly based on the fully open position and the fully closed position includes determining the difference between the fully open position and the fully closed position as the effective travel.

[0008] In some embodiments, constructing an angle mapping relationship for the switch assembly based on the fully closed position and the effective travel includes: subtracting the position of the switch assembly from the fully closed position to obtain a first difference value; constructing a correspondence between the opening angle of the switch assembly and a first product to obtain an angle mapping relationship, wherein the first product is the product of a first ratio and a preset reference angle value, and the first ratio is the ratio of the first difference value to the effective travel.

[0009] In some embodiments, constructing an angle mapping relationship for the switch assembly based on the fully open position and the effective travel includes: subtracting the fully open position from the position of the switch assembly to obtain a second difference; constructing a correspondence between the opening angle of the switch assembly and a second product to obtain an angle mapping relationship, wherein the second product is the product of a second ratio and a preset reference angle value, and the second ratio is the ratio of the second difference to the effective travel.

[0010] In some embodiments, the method further includes: controlling a drive motor to drive a switching component of a vacuum valve to move toward a zero position, wherein the number of times the switching component moves toward the zero position is a preset number threshold, and detecting the drive current of the drive motor during each movement of the switching component; for each movement of the switching component, in response to the drive current being greater than a current threshold and the duration of the drive current being greater than the current threshold being greater than a first duration threshold, determining that the switching component has moved to the zero position; and calibrating the switching parameters of the vacuum valve based on multiple zero positions.

[0011] In some embodiments, the method further includes: in response to the effective stroke being less than a minimum stroke threshold, or the duration for which the drive motor drives the switch assembly to move toward the zero position being greater than a second duration threshold, stopping the calibration of the mechanical zero point of the switch assembly and stopping the construction of the angle mapping relationship of the switch assembly, and generating a first alarm flag, the first alarm flag being used to characterize an abnormality in the calibration of the vacuum valve; in response to the difference between the effective stroke and the historical stroke reference value being greater than the stroke error value, calibrating the mechanical zero point of the switch assembly and constructing the angle mapping relationship of the switch assembly, and generating a second alarm flag, the second alarm flag being used to characterize mechanical wear of the vacuum valve.

[0012] In some embodiments, the zero position includes a fully open position and a fully closed position. Controlling the drive motor to drive the switching assembly of the vacuum valve to move towards the zero position includes: controlling the drive motor to drive the switching assembly to move towards the fully open position at a first reference speed; responding to the switching assembly moving to the fully open position, controlling the drive motor to drive the switching assembly to move in the opposite direction of the fully open position by a preset step at a second reference speed, so that the switching assembly disengages from the fully open position; responding to the switching assembly disengaging from the fully open position, controlling the drive motor to drive the switching assembly to move towards the fully closed position at a third reference speed; or, controlling the drive motor to drive the switching assembly to move towards the fully closed position at a fourth reference speed; responding to the switching assembly moving to the fully closed position, controlling the drive motor to drive the switching assembly to move in the opposite direction of the fully closed position by a preset step at a fifth reference speed, so that the switching assembly disengages from the fully closed position; responding to the switching assembly disengaging from the fully closed position, controlling the drive motor to drive the switching assembly to move towards the fully open position at a sixth reference speed.

[0013] Secondly, embodiments of this application provide a controller, including a processor and a memory, wherein the memory is communicatively connected to the processor and stores computer program instructions executable by the processor. When executed by the processor, the computer program instructions cause the controller to perform the vacuum valve calibration method provided in the first aspect.

[0014] Thirdly, embodiments of this application provide a computer-readable storage medium storing processor-executable computer program instructions, which, when executed by a processor, cause the processor to perform the vacuum valve calibration method provided in the first aspect.

[0015] The embodiments of this application have the following beneficial effects: Unlike related technologies, when the vacuum valve meets the calibration conditions, the embodiments of this application control the drive motor to drive the switching component of the vacuum valve to move towards the zero position and detect the drive current of the drive motor during the movement of the switching component. After the switching component moves to the zero position, the switching parameters of the vacuum valve are calibrated according to the zero position. In this way, the switching parameters of the vacuum valve are calibrated automatically, efficiently and accurately, reducing calibration costs and improving calibration reliability. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, the accompanying drawings used in the description of the related technologies or embodiments will be briefly introduced below. Obviously, the drawings described below only show some embodiments of this application and should not be considered as limiting the scope of protection. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1AThis is a schematic diagram illustrating the application scenario of calibrating vacuum valves in some embodiments of this application; Figure 1B This is a schematic diagram of the structure of a vacuum valve calibration system provided in some embodiments of this application; Figure 2 This is a schematic diagram of the controller structure provided in some embodiments of this application; Figure 3A This is a schematic flowchart of a vacuum valve calibration method provided in some embodiments of this application; Figure 3B This is a schematic diagram of detecting the drive current of the drive motor in some embodiments of this application; Figure 4 yes Figure 3A A schematic diagram of a sub-process of step S31 in the vacuum valve calibration method shown in the embodiment; Figure 5 yes Figure 3A Another sub-process diagram of step S31 in the vacuum valve calibration method shown in the embodiment; Figure 6 yes Figure 3A A schematic diagram of a sub-process of step S33 in the vacuum valve calibration method shown in the embodiment. Detailed Implementation

[0018] To make the objectives and advantages of the embodiments of this application more readily understood, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. The detailed description of the embodiments of this application in the accompanying drawings is not intended to limit the scope of protection claimed by this application, but only represents selected embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] It should be noted that, unless there is a conflict, the various technical features involved in the embodiments of this application described below can be combined with each other, and all are within the protection scope of this application. Furthermore, although functional modules are divided in the device or structural schematic diagram and a logical order is shown in the flowchart, in some cases, the steps shown or described may be performed in a different order than the module division in the device or the order in the flowchart. In addition, the terms "first," "second," "third," and other similar expressions used herein do not limit the data or execution order, but are only for illustrative purposes and to distinguish identical or similar items with substantially the same function and effect, and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features.

[0020] Unless otherwise defined, the technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of this application. It should be understood that the term "and / or" as used in this specification includes any and all combinations of one or more of the listed items.

[0021] Semiconductor vacuum valves are used in the gas flow transmission systems of semiconductor equipment, requiring precise flow control of the gas delivered to the reaction chamber. Poor gas flow control can adversely affect wafer quality and etching processes. Vacuum valves are valves used in semiconductor equipment or systems operating under vacuum conditions; they include any suitable type of valve, such as butterfly valves and ball valves. Vacuum valves require a drive mechanism (such as a drive motor) to open or close.

[0022] The following section will use a vacuum valve as an example of a butterfly valve to explain in detail the defects of the relevant technology.

[0023] Butterfly valves and their drive motors are commonly used in semiconductor manufacturing processes. During long-term service, the butterfly valve and its drive motor are affected by mechanical wear (such as valve seat, bearing, and transmission backlash) and environmental temperature changes (such as thermal expansion and contraction of materials and temperature drift of coil winding resistance). This causes the valve plate's position relative to the drive motor's mechanical boundary to slowly shift. Because the drive motor uses open-loop micro-stepping, the controller calculates the valve plate angle based solely on the accumulated pulse count, thus failing to detect this physical boundary drift. This ultimately results in a cumulative deviation between the commanded valve opening and the actual opening, reducing the pressure control accuracy of the vacuum chamber and the accuracy of the etching process.

[0024] The working stroke of a butterfly valve is defined by two mechanical boundaries: the fully closed limit formed when the valve plate rotates to the fully closed position and abuts against the valve seat, and the fully open limit formed when the valve plate rotates to the maximum opening degree (fully open). The control system usually uses the fully closed position as the mechanical zero point, and all opening commands are based on this zero point, achieving positioning by issuing a corresponding number of micro-step pulses.

[0025] In related technologies, the mechanical zero point of a butterfly valve is calibrated using a mechanical limit switch / photoelectric switch to return to zero. A limit switch or photoelectric sensor is installed in the fully closed or fully open position of the butterfly valve. When powered on, the drive motor moves the valve plate towards the limit direction, triggering the switch to confirm that the zero point has been reached. However, this method requires additional mechanical or photoelectric switches near the vacuum chamber. Switch contacts in a vacuum environment are easily contaminated, and photoelectric devices are susceptible to contamination from process byproducts, leading to switch position drift or even failure. The zero-point reference itself is unreliable. Furthermore, it increases vacuum feedthrough, wiring, and sealing points, raising system costs, leakage risks, and maintenance complexity. This solution has extremely low reliability and economic efficiency in clean vacuum environments.

[0026] Related technologies also employ dedicated drive chips with integrated stall detection functions to calibrate the mechanical zero point of butterfly valves. Stalling of the drive motor is determined by monitoring changes in back electromotive force (EMF) or switching timing, thus establishing the valve plate's top-stop limit as the basis for zeroing. However, this method heavily relies on observable measurements of the back EMF generated with rotational speed. But butterfly valves return to zero at extremely low speeds or even near-stationary conditions, where the back EMF of the drive motor approaches zero, causing a sharp drop in the signal-to-noise ratio of the detected quantity and creating a detection blind zone at low speeds. More importantly, both of these solutions only detect whether the drive motor is stalled and do not use the detection results for automatic zero-point recalibration, failing to address zero-point drift caused by long-term wear and temperature fluctuations in butterfly valves.

[0027] In related technologies, a method of calibrating the mechanical zero point of a butterfly valve using a fixed zero point and manual periodic calibration with the aid of external measuring tools is employed. The mechanical zero point is calibrated once at the factory and fixed in the controller, and does not automatically update during operation. Recalibration relies on periodic shutdowns and manual recalibration using external measuring tools. However, this method, once the zero point is fixed, cannot track zero point drift caused by mechanical wear and temperature changes. Deviations accumulate over time, leading to a continuous deterioration in control accuracy until manual intervention is required. Furthermore, manual calibration requires machine shutdown, the use of external measuring tools, and reliance on operational experience, resulting in high maintenance costs, significant downtime losses, and low zero-point calibration accuracy.

[0028] Therefore, the purpose of this application is to provide a vacuum valve calibration method that does not require additional position sensors, does not rely on dedicated drive chips, can work reliably under low-speed quasi-stationary conditions, and uses the motor stall detection results to automatically recalibrate the mechanical zero point and stroke of the vacuum valve. This automatically calibrates the zero point drift caused by mechanical wear and temperature drift throughout the entire life cycle of the vacuum valve, ensuring long-term maintenance of the control accuracy of the opening angle, reducing hardware costs and maintenance burden, and improving calibration reliability.

[0029] Please refer to the following: Figure 1A and Figure 1B , Figure 1AThe schematic diagram illustrates an application scenario for calibrating vacuum valves in some embodiments of this application. Figure 1B A schematic diagram of the structure of a vacuum valve calibration system in some embodiments of this application is shown.

[0030] like Figure 1A and Figure 1B As shown, the application scenario includes a vacuum valve calibration system 1000, which includes a controller 100, a vacuum valve 200, and a drive motor 300. The vacuum valve 200 includes a switching assembly 201.

[0031] Both the controller 100 and the vacuum valve 200 are connected to the drive motor 300. Specifically, the controller 100 communicates with the drive motor 300 via a network, and examples of such networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0032] The vacuum valve 200 is mechanically connected to the drive motor 300. More specifically, the output shaft of the drive motor 300 is fixedly connected to the switch assembly 201 of the vacuum valve 200. The drive motor 300 is used to drive the switch assembly 201 to move in order to open or close the vacuum valve 200.

[0033] In some embodiments, the vacuum valve 200 is connected to two pipes ( Figure 1A Between (not shown), the drive motor 300 drives the switch assembly 201 to move to a specified opening angle (i.e., to (any angle between them) to connect or isolate the two pipes, thereby allowing the transmission of gas or liquid between the two pipes, or stopping the transmission of gas or liquid.

[0034] It is understood that the controller 100 includes any suitable type of component such as a microcontroller (MCU), digital signal processor (DSP), application-specific integrated circuit (ASIC), microprocessor (MPU), FPGA chip, and system-on-a-chip (SoC). Any suitable type of component can be used as the controller 100 according to actual needs, and this application embodiment does not limit it in any way.

[0035] It should be understood that vacuum valve 200 includes any suitable type of vacuum valve such as butterfly valve or ball valve. Drive motor 300 includes any suitable type of motor such as stepper motor, three-phase asynchronous motor, single-phase asynchronous motor, or DC motor.

[0036] For example, the following vacuum valve calibration operation is performed in this embodiment: First, it is detected whether the vacuum valve 200 meets the calibration conditions, for example, whether the deviation between the zero point of the switching component 201 of the vacuum valve 200 and the reference zero point exceeds a threshold. When the vacuum valve 200 meets the calibration conditions (for example, the deviation between the zero point of the switching component 201 and the reference zero point exceeds a threshold), the drive motor 300 is controlled to drive the switching component 201 of the vacuum valve 200 to move towards the zero position, and the drive current of the drive motor 300 during the movement of the switching component 201 is detected.

[0037] Next, it is determined whether the drive current of the drive motor 300 meets the stall condition. For example, if the drive current is greater than the current threshold and the duration of the drive current being greater than the current threshold is greater than the first duration threshold, the drive current of the drive motor 300 meets the stall condition, and the switch assembly 201 is determined to move to the zero position.

[0038] In this embodiment of the application, the zero position of the switch assembly 201 is obtained, and the switching parameters of the vacuum valve 200 are calibrated according to the zero position. The switching parameters are used to characterize the reference data for the drive motor 300 to drive the switch assembly 201 to open or close. For example, the switching parameters include the effective stroke of the switch assembly 201.

[0039] The above methods enable automated, efficient, and accurate calibration of vacuum valve switching parameters, reducing calibration costs and improving calibration reliability.

[0040] It should be understood that, Figure 1A and Figure 1B The illustrated embodiments are merely illustrative of one scenario for calibrating a vacuum valve in some embodiments of this application, and do not limit the structure, type, or quantity of vacuum valves, controllers, and drive motors in other embodiments. For example, in some other embodiments, the vacuum valve may also include a... Figure 1B The structure shown includes more or fewer components, or has the same... Figure 1B The diagram shows different configurations of the structure.

[0041] To facilitate understanding of the vacuum valve calibration method provided in the embodiments of this application, the controller provided in the embodiments of this application will be described in detail first.

[0042] Please see Figure 2 , Figure 2 A schematic diagram of the controller provided in some embodiments of this application is shown.

[0043] Please see Figure 2 As shown, the controller 100 includes at least one processor 110 and at least one memory 120 connected in communication. Figure 2Taking a bus system 130, a processor 110, and a memory 120 as an example, the various components of the controller 100 are coupled together through the bus system 130, which is used to realize the connection and communication between the various components. It is easy to understand that the bus system 130 may include, in addition to the data bus, a power bus, a control bus, and a status signal bus, etc., but for the sake of clarity and brevity, these will not be discussed further. Figure 2 The various buses are all labeled as Bus System 130. This is understandable. Figure 2 The structures shown in the embodiments are merely illustrative and do not limit the structure of the controller described above. For example, the controller may also include components that are more... Figure 2 The structure shown has more or fewer components, or has the same Figure 2 The diagram shows different configurations of the structure.

[0044] For example, processor 110 is configured to provide computational and control capabilities to support controller 100 in executing corresponding business logic and functions. For instance, it supports controller 100 in executing the vacuum valve calibration method provided in this application embodiment, or in executing steps in any possible implementation of the vacuum valve calibration method provided in this application embodiment. It should be understood that processor 110 can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc., or it can be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0045] The memory 120, as a non-transitory computer-readable storage medium, can be used to store non-transitory software programs, non-transitory computer-executable programs, instructions, and modules, such as the program, instructions, and modules corresponding to the vacuum valve calibration method in the embodiments of this application. In some embodiments, the memory 120 may include a program storage area and a data storage area. The program storage area may store an operating system, an application program required for at least one function, and the data storage area may store data created according to the use of the processor 110. The processor 110 executes various functional applications and data processing of the controller 100 by running the non-transitory software programs, instructions, and modules stored in the memory 120, thereby implementing the vacuum valve calibration method provided in the embodiments of this application, or executing the steps in any possible implementation of the vacuum valve calibration method provided in the embodiments of this application. In some embodiments, the memory 120 may include high-speed random access memory and may also include non-transitory memory. For example, at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some embodiments, the memory 120 may also include memories remotely located relative to the processor 110, which can be connected to the processor 110 via a communication network. It is understood that examples of the aforementioned communication networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0046] As can be understood from the above, the entity executing the vacuum valve calibration method provided in this application embodiment can be any suitable type of controller with certain computing and control capabilities, such as the controller 100 described above. In some feasible implementations, the vacuum valve calibration method provided in this application embodiment can be implemented by a processor executing computer program instructions stored in a memory.

[0047] The following will describe in detail the vacuum valve calibration method provided in this application embodiment, with reference to exemplary applications and implementations of the controller provided in the embodiments of this application.

[0048] Please see Figure 3A As shown, the vacuum valve calibration method provided in this application includes steps S31 to S33 to achieve vacuum valve calibration.

[0049] Step S31: In response to the vacuum valve meeting the calibration conditions, control the drive motor to drive the switching assembly of the vacuum valve to move towards the zero position and detect the drive current of the drive motor during the movement of the switching assembly.

[0050] It should be understood that calibration conditions include any one or more of the following: first power-on of the vacuum valve, first start-up of the vacuum valve after installation, loss or abnormality of zero-point position parameters, regular equipment maintenance, the vacuum valve reaching a cumulative number of operations threshold, the vacuum valve reaching a cumulative operating time threshold, and receiving a calibration command triggered by the user. Zero-point position includes the vacuum valve's fully closed position, fully open position, and / or a preset mechanical reference position.

[0051] For example, in this embodiment, the operating status information of the vacuum valve is acquired in real time, and the vacuum valve is judged to meet the calibration conditions based on the operating status information. When the vacuum valve meets the calibration conditions, the pre-stored zero-point position information is acquired, and the corresponding calibration direction is determined based on the zero-point position information. Specifically, when the zero-point position includes the fully closed position of the vacuum valve, the valve closing direction is determined as the calibration direction; when the zero-point position includes the fully open position of the vacuum valve, the valve opening direction is determined as the calibration direction. The calibration direction is used to indicate the target movement direction of the drive motor switching assembly to the mechanical limit position (i.e., the fully closed position or the fully open position) corresponding to the zero-point position.

[0052] For example, a corresponding calibration drive command is generated based on the calibration direction. The calibration drive command includes one or more of the following: the motor's rotation direction, target speed, drive signal duty cycle, drive voltage, and drive current. In this embodiment, the calibration drive command is sent to the drive motor. The drive motor responds to the calibration drive command by outputting a drive torque and drives the switching assembly of the vacuum valve to move in the calibration direction via a transmission mechanism. In some embodiments, the transmission mechanism includes one or more of the following: a gear reduction mechanism, a lead screw transmission mechanism, and a coupling mechanism.

[0053] Under the action of the driving torque, the switching assembly gradually approaches the mechanical limit position corresponding to the zero point position. During the movement of the switching assembly, this embodiment of the application samples and acquires the driving current of the drive motor according to a preset sampling period, and records the driving current corresponding to each sampling moment to form a driving current sequence. For example, the preset sampling period can be any suitable duration such as 1ms, 5ms, or 10ms. In some embodiments, the driving current of the drive motor can be sampled and acquired by detection methods such as current sampling resistors, Hall current sensors, or current detection chips.

[0054] For example, in this embodiment of the application, the drive current sequence is updated in real time, and a correlation is established between the current drive current and the historical drive current. Specifically, the drive current corresponding to the current sampling moment is recorded, and the average value of the drive current, the maximum value of the drive current, and the duration for which the drive current exceeds the current threshold are updated. The drive current of the drive motor is continuously detected until the drive current of the drive motor meets the preset stall condition.

[0055] In some embodiments, see Figure 3B As shown, the embodiments of this application utilize Figure 3B The circuit structure shown detects the drive current and short-circuit faults of the drive motor.

[0056] In this circuit, a low-side current sensing resistor Rcs (e.g., 0.05Ω) is connected in series in the drive circuit of the motor. Up to 0.1 After sending a drive signal to the drive circuit, the drive circuit obtains electrical energy from the DC bus Vbus and transmits drive current to the drive motor. The drive current of the drive motor flows out of the DC bus Vbus, passes sequentially through the high-side current sensing resistor Rcs1, the drive circuit, and the low-side current sensing resistor Rcs2 before flowing to the drive motor. That is, the drive current flows along the following path: Vbus → Rcs1 → drive circuit → Rcs2 → drive motor. Therefore, the voltage drop across both the high-side and low-side current sensing resistors Rcs1 and Rcs2 can reflect the drive current of the drive motor. The high-side current sensing resistor Rcs1 is used to detect short-circuit faults, and the low-side current sensing resistor Rcs2 is used to detect the drive current.

[0057] Understandably, the current flowing through the high-side current sensing resistor Rcs1 and the low-side current sensing resistor Rcs2 is the same as the drive current of the drive motor.

[0058] Specifically, when the drive current flows through the low-side current sensing resistor Rcs2, a first sampling voltage corresponding to the drive current is generated across Rcs2. Since the drive motor uses PWM (Pulse Width Modulation) drive, this first sampling voltage is a pulse voltage that changes with the PWM switching on and off. Figure 3B The chopper current signal shown is shown.

[0059] Understandably, because the resistance of the low-side current sensing resistor Rcs2 is very small, the generated first sampling voltage is a weak voltage signal of a few millivolts to tens of millivolts. Since the voltage drop across the low-side current sensing resistor Rcs2 (i.e., the first sampling voltage) is small and is superimposed with common-mode noise generated by the PWM drive, the first sampling voltage is differentially amplified using the differential amplifier of the stall detection circuit to obtain a single-ended current signal. It should be understood that the differential amplifier can effectively suppress common-mode noise and improve the accuracy of current detection.

[0060] It should be understood that because the drive motor uses PWM (Pulse Width Modulation), the single-ended current signal will contain a large number of high-frequency pulse components. The single-ended current signal is input to a low-pass filter (e.g., an RC low-pass filter) to filter the high-frequency noise from the PWM switching, thus obtaining an analog current signal corresponding to the average value of the drive current. Figure 3B The sinusoidal current signal in the middle.

[0061] For example, in this embodiment of the application, the filtered analog current signal (i.e., sinusoidal current signal) is input to an analog-to-digital converter (ADC). The ADC samples the analog current signal at a preset sampling frequency and converts it into an encoded digital signal. The encoded digital signal is then sent to the controller, which calculates the drive current based on the encoded digital signal. In this way, the drive current of the drive motor is detected.

[0062] The high-side current sensing resistor Rcs1 is connected in series between the DC bus Vbus and the drive circuit. When the drive current flows through the high-side current sensing resistor Rcs1, a second sampling voltage corresponding to the drive current is generated across the high-side current sensing resistor Rcs1. The high-side current sensing resistor Rcs1 converts this second sampling voltage into... Figure 3B The inverted current signal is shown, and the inverted current signal is output to the short-circuit detection circuit.

[0063] The short-circuit detection circuit continuously monitors the second sampled voltage corresponding to the inverted current signal and compares it with the short-circuit voltage threshold. Under normal circumstances, the second sampled voltage is less than the short-circuit voltage threshold. When any of the following occurs: motor winding short circuit, drive MOSFET breakdown, motor connection wire short circuit, output terminal short circuit to ground, or output terminal short circuit to power supply, the loop impedance drops rapidly, causing a sharp increase in drive current and a corresponding sharp increase in the second sampled voltage. When the second sampled voltage is greater than or equal to the short-circuit voltage threshold, the short-circuit detection circuit determines that a short-circuit fault has occurred and generates and sends a short-circuit detection signal to the controller.

[0064] Upon receiving a short-circuit detection signal, the controller stops outputting drive signals, controls the drive circuit to shut down the power switching devices, cuts off the power supply to the drive motor, records the fault status, and reports the short-circuit fault information to prevent MOSFET devices from burning out, motor windings from being damaged, PCB circuits from overheating, and power system from being damaged.

[0065] This application embodiment utilizes a dual current sensing architecture with a low-side current sensing resistor Rcs2 for accurate current measurement and a high-side current sensing resistor Rcs1 for fast short-circuit protection. On the one hand, it realizes the stall detection required for zero-point calibration of vacuum valves, and on the other hand, it realizes the rapid protection against short-circuit faults in the drive system, thus balancing calibration accuracy and system safety.

[0066] Step S32: In response to the driving current being greater than the current threshold and the duration of the driving current being greater than the current threshold being greater than the first duration threshold, determine that the switching component has moved to the zero position.

[0067] It is understandable that engineers can customize and set the current threshold based on the rated operating current of the drive motor, the stall current of the drive motor, and the rated load current of the vacuum valve. The first duration threshold is used to characterize the minimum duration for which the mechanical limit of the vacuum valve keeps the drive motor in a stall state. Generally, the first duration threshold is set to a value based on the typical operating conditions of the vacuum valve. to This allows for any duration between the specified intervals, which is sufficient to filter out momentary disturbances and prevent the drive motor from overheating due to prolonged rotation at the limit position.

[0068] In this application, considering the different single-phase current amplitudes of different phases under micro-stepping drive of the motor, the embodiments utilize the special characteristics of the zero-return condition, namely, the extremely low stepping frequency during zero-return, allowing the combined current amplitude of the two phases to be approximately constant at a set peak value. Therefore, a constant current threshold is adopted to simplify engineering implementation. For example, in some embodiments, the current threshold... , For threshold coefficient, The value range is [range]. Any value in, The current drive current of the set drive motor.

[0069] For example, in this embodiment of the application, a sequence of drive currents is collected during the movement of the switching component towards the zero position, and the drive current corresponding to the current sampling moment (hereinafter referred to as "current drive current") is determined. The drive current sequence includes drive currents corresponding to multiple consecutive sampling periods (moments). The current drive current is compared with a current threshold. If the current drive current is less than or equal to the current threshold, the drive motor is controlled to continue driving the switching component, and the drive current of the drive motor is continuously detected. If the current drive current is greater than the current threshold, the start time when the drive current is greater than the current threshold is recorded, and a timer is started to count the duration for which the drive current is greater than the current threshold. Obviously, the start time is used to characterize the starting time node when the drive current exceeds the current threshold.

[0070] If the subsequently sampled drive current is still greater than the current threshold, the timer continues to run. If the subsequently sampled drive current is less than or equal to the current threshold, the state of the drive current exceeding the current threshold is determined to be over, the timer stops running, and the timer count is obtained as the duration of the drive current exceeding the current threshold. For example, the duration of the drive current exceeding the current threshold is compared with a first duration threshold. If the duration of the drive current exceeding the current threshold is less than or equal to the first duration threshold, the drive current continues to be detected, and it is determined whether the drive current exceeds the current threshold. If the duration of the drive current exceeding the current threshold is greater than the first duration threshold, based on the determination that the drive current exceeds the current threshold and the duration of the drive current exceeding the current threshold is greater than the first duration threshold, it is determined that the drive motor has entered a stall state, the switching component has contacted the mechanical limit structure, the switching component can no longer move along the calibration direction, and the current position of the switching component is determined to be the mechanical limit position.

[0071] For example, when the switching assembly reaches the mechanical limit position, the mechanical limit position is determined as the zero point position of the vacuum valve. The zero point position can be the fully closed position, the fully open position, or a preset mechanical reference position of the vacuum valve.

[0072] For example, in this embodiment of the application, the position parameters corresponding to the current moment are obtained, and the position parameters are used as zero-point reference parameters to establish a correlation with the zero-point position. The position parameters include any one or more of the following: the position value of the switch component, the cumulative number of motor pulses, the encoder count value, and the motor rotation angle value. The position parameters are used to characterize the positional relationship between the drive motor and the switch component.

[0073] Understandably, when the switching assembly reaches its mechanical limit, the rotor of the drive motor is locked, its speed returns to zero, and the back electromotive force disappears. Under constant current chopper drive, the disappearance of the back electromotive force shortens the freewheeling phase and accelerates the current rise, resulting in a significant increase in the amplitude of the chopper ripple before filtering. After low-pass filtering, this manifests as an increase in the average (or envelope) phase current.

[0074] To suppress misjudgments caused by instantaneous current spikes due to vibration, shock, load changes, etc., this application adopts a dual judgment logic that combines a current threshold and a duration threshold (i.e., a first duration threshold). Only when the drive current exceeds the current threshold and the duration of the drive current exceeding the current threshold exceeds the first duration threshold is it determined to be a valid stall event of the drive motor, and the switching component is determined to move to the zero position.

[0075] Step S33: Based on the zero point position, calibrate the switching parameters of the vacuum valve.

[0076] Understandably, switching parameters are reference data used to characterize the opening or closing of the switch assembly driven by the drive motor. For example, switching parameters include the effective travel of the switch assembly, mechanical zero point, angle mapping relationship, and limit position parameters. The angle mapping relationship characterizes the correspondence between the position of the switch assembly and its opening angle.

[0077] For example, when the position parameter uses encoder counting, the current encoder count value is determined as the zero-point reference count value; when the position parameter uses motor rotation angle, the current motor rotation angle value is determined as the zero-point reference angle value.

[0078] For example, the position parameters are benchmarked based on the zero-point reference parameter, such as mapping the position parameter corresponding to the zero-point position to a preset reference value (e.g., zero). During subsequent vacuum valve operation, the real-time position parameters of the switching assembly are continuously acquired, and the current relative position of the switching assembly is determined based on the difference between the real-time position parameters and the zero-point reference parameter. The switching stroke parameters of the switching assembly are determined based on the zero-point reference parameter and the motion data of the switching assembly. These switching stroke parameters include one or more of the following: the number of pulses per unit opening degree, the angle value per unit opening degree, and the effective stroke. The switching stroke parameters characterize the correspondence between the change in the opening degree of the switching assembly and the motion of the drive motor.

[0079] For example, embodiments of this application establish a mapping relationship between the opening degree of the switch component and the position parameter (i.e., the position of the switch component) based on the zero-point reference parameter and the switch travel parameter. In some embodiments, a mapping relationship (i.e., angle mapping relationship) between the opening degree of the switch component and the position parameter is established as shown in Table 1 below.

[0080] Table 1:

[0081] It is understood that Table 1 is only a schematic representation of the mapping relationship between the opening degree of the switch component and the position parameter, and it does not impose any limitation on the mapping relationship between the opening degree of the switch component and the position parameter in other embodiments.

[0082] For example, in this application embodiment, the original switch control parameters are corrected based on the zero-point reference parameters and angle mapping relationship. Specifically, the position parameters corresponding to each target opening degree are recalculated using the new zero-point reference parameters, and the corresponding switch control parameters are updated to obtain the corrected switch control parameters, which are the calibrated switch parameters. The switch control parameters include any one or more of the following: mechanical zero point (including open target position parameters and close target position parameters), limit position parameters, and stroke compensation parameters. In this application embodiment, the drive motor is controlled to drive the switch assembly to perform open or close operations based on the calibrated switch parameters.

[0083] In this embodiment, the zero point position is not only used to determine the reference position of the vacuum valve, but also serves as a unified reference for subsequent opening control, limit control and position control, thereby improving the opening and closing control accuracy and long-term operational stability of the vacuum valve.

[0084] In this embodiment, when the vacuum valve meets the calibration conditions, the present application embodiment controls the drive motor to drive the switching component of the vacuum valve to move towards the zero position, and detects the drive current of the drive motor during the movement of the switching component. After the switching component moves to the zero position, the switching parameters of the vacuum valve are calibrated according to the zero position. In this way, the switching parameters of the vacuum valve are calibrated automatically, efficiently and accurately, reducing calibration costs and improving calibration reliability.

[0085] See Figure 4 As shown, in this embodiment of the application, steps S311 to S313 are used to control the drive motor to drive the switching assembly of the vacuum valve to move to the zero position.

[0086] Step S311: Control the drive motor to drive the switch assembly to the fully open position at the first reference speed.

[0087] Step S312: In response to the switch assembly moving to the fully open position, control the drive motor to drive the switch assembly to move in the opposite direction of the fully open position by a preset step length at the second reference speed, so that the switch assembly is removed from the fully open position.

[0088] Step S313: In response to the switch assembly disengaging from the fully open position, control the drive motor to drive the switch assembly to the fully closed position at a third reference speed.

[0089] In this embodiment, the zero point position includes a fully open position and a fully closed position. For example, in this embodiment, the switch assembly is first driven to the fully open position, and then driven to the fully closed position.

[0090] Specifically, in this embodiment, a drive control command is sent to the drive motor, causing the drive motor to drive the switch assembly to move towards the fully open position at a first reference speed. When the drive current of the drive motor is detected to be greater than a current threshold and the duration of the drive current being greater than the current threshold is greater than a first duration threshold, it indicates that the switch assembly has moved to the fully open position. A drive control command is then sent to the drive motor, causing the drive motor to drive the switch assembly to move in the opposite direction of the fully open position by a preset step at a second reference speed, so that the switch assembly is removed from the fully open position.

[0091] It is understood that engineers can customize the preset step size according to actual needs, such as a preset step size of 10 to 20 full steps of the drive motor. This application embodiment does not limit this in any way.

[0092] Specifically, after the switching assembly disengages from the fully open position, a drive control command is sent to the drive motor, causing the drive motor to move the switching assembly towards the fully closed position at a third reference speed. It is understood that any two of the first, second, and third reference speeds may be the same or different. All three reference speeds are lower than a low-speed threshold, ensuring that the drive motor consistently moves the vacuum valve's switching assembly towards the zero-point position at a low speed. This reduces or prevents collisions or impacts to the switching assembly, extending the service life of the vacuum valve.

[0093] See Figure 5 As shown, in this embodiment of the application, steps S314 to S316 are used to control the drive motor to drive the switching assembly of the vacuum valve to move to the zero position.

[0094] Step S314: Control the drive motor to drive the switch assembly to the fully closed position at the fourth reference speed.

[0095] Step S315: In response to the switch assembly moving to the fully closed position, control the drive motor to drive the switch assembly to move in the opposite direction of the fully closed position by a preset step length at the fifth reference speed, so that the switch assembly is removed from the fully closed position.

[0096] Step S316: In response to the switch assembly disengaging from the fully closed position, control the drive motor to drive the switch assembly to the fully open position at the sixth reference speed.

[0097] For example, in embodiments of this application, the switch assembly may first be driven to the fully closed position, and then driven to the fully open position.

[0098] Specifically, in this embodiment, a drive control command is sent to the drive motor, causing the drive motor to drive the switch assembly to move towards the fully off position at a fourth reference speed. When the drive current of the drive motor is detected to be greater than a current threshold and the duration of the drive current being greater than the current threshold is greater than a first duration threshold, it indicates that the switch assembly has moved to the fully off position. A drive control command is then sent to the drive motor, causing the drive motor to drive the switch assembly to move in the opposite direction of the fully off position by a preset step at a fifth reference speed, so that the switch assembly is removed from the fully off position.

[0099] Specifically, after the switching assembly disengages from the fully closed position, a drive control command is sent to the drive motor, causing the drive motor to move the switching assembly towards the fully open position at a sixth reference speed. It is understood that any two of the fourth, fifth, and sixth reference speeds may be the same or different. All three reference speeds are lower than the low-speed threshold, ensuring that the drive motor consistently moves the vacuum valve's switching assembly towards the zero-point position at a lower speed. This reduces or prevents collisions or impacts to the switching assembly, extending the service life of the vacuum valve.

[0100] See Figure 6 As shown, in this embodiment of the application, steps S331 to S333 are used to calibrate the switching parameters of the vacuum valve based on the zero point position.

[0101] Step S331: Calculate the effective travel of the switch assembly based on the fully open and fully closed positions.

[0102] The zero-point position includes the fully open position and the fully closed position, and the switching parameters include the effective stroke of the switching assembly, the mechanical zero point, and the angle mapping relationship.

[0103] The fully open position is the position when the switch assembly is fully turned on, and the fully closed position is the position when the switch assembly is fully turned off.

[0104] For example, after the switch assembly moves to the fully open position, this embodiment records the fully open position, and after the switch assembly moves to the fully closed position, it records the fully closed position. Subtracting the fully closed position from the fully open position yields the effective travel of the switch assembly.

[0105] In some implementations, calculating the effective travel of the switching assembly based on the fully open and fully closed positions includes determining the difference between the fully open and fully closed positions as the effective travel, i.e.: ,in, The effective travel of the switching assembly. Fully open position, This is the fully closed position. For example, the embodiments of this application employ... to Any percentage between these values ​​represents the effective trip. .

[0106] Step S332: Determine the fully open or fully closed position as the mechanical zero point of the switching assembly.

[0107] For example, in the embodiments of this application, the fully open position or the fully closed position is determined as the mechanical zero point of the switch assembly. That is, the fully open position can be used as the reference zero point to control the drive motor to drive the switch assembly to move in order to realize the opening or closing of the switch assembly, or the fully closed position can be used as the reference zero point to control the drive motor to drive the switch assembly to move in order to realize the opening or closing of the switch assembly.

[0108] Step S333: Construct the angle mapping relationship of the switch component based on the fully closed position and the effective travel, or construct the angle mapping relationship of the switch component based on the fully open position and the effective travel.

[0109] Among them, the angle mapping relationship is used to characterize the correspondence between the position of the switch component and the opening angle of the switch component.

[0110] For example, in this application embodiment, the position of the switch component is used as the independent variable, the opening angle of the switch component is used as the dependent variable, and the angle mapping relationship of the switch component is obtained by fitting the fully closed position and the effective stroke.

[0111] For example, in this application embodiment, the position of the switch component is used as the independent variable, the opening angle of the switch component is used as the dependent variable, and the angle mapping relationship of the switch component is obtained by fitting the fully open position and the effective stroke.

[0112] In some embodiments, the present application implements steps S3331 to S3332 to construct the angle mapping relationship of the switch components based on the fully closed position and the effective stroke.

[0113] Step S3331: Subtract the position of the switch assembly from the fully closed position to obtain the first difference value.

[0114] Step S3332: Construct the correspondence between the opening angle of the switch component and the first product to obtain the angle mapping relationship.

[0115] The first product is the product of the first ratio and the preset reference angle value, and the first ratio is the ratio of the first difference to the effective stroke.

[0116] For example, embodiments of this application are based on the following formula: Construct the angle mapping relationship of the switch components, where, This refers to the location of the switch assembly. To be in position The opening angle of the time switch component, This is a fully closed position. This represents the first difference. For the effective travel of the switching assembly, the following is adopted: to Any percentage between them. The first ratio, Using the reference angle value (i.e., the maximum opening angle of the switch assembly), the opening angle of the switch assembly is... to Any angle between them.

[0117] In some embodiments, the present application implements steps S3333 to S3334 to construct the angle mapping relationship of the switch component based on the fully open position and the effective stroke.

[0118] Step S3333: Subtract the position of the fully open position from the position of the switch assembly to obtain the second difference value.

[0119] Step S3334: Construct the correspondence between the opening angle of the switch component and the second product to obtain the angle mapping relationship.

[0120] The second product is the product of the second ratio and the preset reference angle value, and the second ratio is the ratio of the second difference to the effective stroke.

[0121] For example, embodiments of this application are based on the following formula: Construct the angle mapping relationship of the switch components, where, This refers to the location of the switch assembly. To be in position The opening angle of the time switch component, Fully open position, This represents the second difference. For the effective travel of the switching assembly, the following is adopted: to Any percentage between them. The second ratio, Using the reference angle value (i.e., the maximum opening angle of the switch assembly), the opening angle of the switch assembly is... to Any angle between them.

[0122] In one or more embodiments, the vacuum valve calibration method provided in this application further includes steps S41 to S43.

[0123] Step S41: Control the drive motor to drive the vacuum valve's switching assembly to move towards the zero position, and the number of times the switching assembly moves towards the zero position is a preset number threshold, and detect the drive current of the drive motor during each movement of the switching assembly.

[0124] For example, in this embodiment of the application, the drive motor is controlled to drive the switching assembly of the vacuum valve to move towards the zero position multiple times, and the drive current of the drive motor is detected during each movement of the switching assembly. The number of times the switching assembly is driven to move towards the zero position is a preset threshold number. Engineers can customize the preset threshold number based on experience data and actual needs, for example, the preset threshold number is 5 times.

[0125] Step S42: For each movement of the switching component, in response to the driving current being greater than the current threshold and the duration of the driving current being greater than the current threshold being greater than the first duration threshold, determine that the switching component has moved to the zero position.

[0126] For example, for each movement of the switching component, i.e., each time the switching component is driven to the zero position, the detected drive current of the drive motor is compared with a current threshold. If the drive current is greater than the current threshold, the duration of the drive current being greater than the current threshold is recorded. When the drive current is greater than the current threshold and the duration of the drive current being greater than the current threshold is greater than a first duration threshold, it is determined that the switching component has moved to the zero position (including the fully open position and the fully closed position), and the fully open position and the fully closed position are recorded.

[0127] Step S43: Calibrate the switching parameters of the vacuum valve based on multiple zero-point positions.

[0128] For example, in this embodiment of the application, the average value of multiple fully open positions obtained from multiple recordings is calculated to obtain the average fully open position, and the average value of multiple fully closed positions obtained from multiple recordings is calculated to obtain the average fully closed position. Based on the average fully open position and the average fully closed position, the effective travel of the switching assembly is calculated, that is, the average fully open position is subtracted from the average fully closed position to obtain the effective travel of the switching assembly. Furthermore, the average fully open position or the average fully closed position is determined as the mechanical zero point of the switching assembly.

[0129] An angle mapping relationship for the switch assembly is constructed based on the average position of the fully closed position and the effective travel. For example, the position of the switch assembly is used as the independent variable, and the opening angle of the switch assembly is used as the dependent variable. The average position of the fully closed position and the effective travel are combined to fit the data to obtain the angle mapping relationship of the switch assembly. That is, the difference between the position of the switch assembly and the average position of the fully closed position is used to obtain the first reference difference value. The correspondence between the opening angle of the switch assembly and the first reference product is then constructed to obtain the angle mapping relationship. Here, the first reference product is the product of the first reference ratio and a preset reference angle value. The first reference ratio is the ratio of the first reference difference value to the effective travel.

[0130] An angle mapping relationship for the switch assembly is constructed based on the average fully open position and effective travel. For example, the position of the switch assembly is used as the independent variable, and the opening angle of the switch assembly is used as the dependent variable. The average fully open position and effective travel are then fitted to obtain the angle mapping relationship of the switch assembly. Specifically, the difference between the average fully open position and the position of the switch assembly is used to obtain a second reference difference. A correspondence is then established between the opening angle of the switch assembly and the product of this second reference difference, resulting in the angle mapping relationship. The second reference product is the product of a second reference ratio and a preset reference angle value. The second reference ratio is the ratio of the second reference difference to the effective travel.

[0131] In this embodiment, the average value of the fully open position is obtained by calculating the average value of multiple fully open positions obtained from multiple records, and the average value of multiple fully closed positions is obtained by calculating the average value of multiple fully closed positions obtained from multiple records. The switching parameters of the vacuum valve are then calibrated using the average value of the fully open position and the average value of the fully closed position. In this way, accurate and stable switching parameters of the vacuum valve can be calibrated.

[0132] In one or more embodiments, the vacuum valve calibration method provided in this application further includes steps S51 to S52.

[0133] Step S51: In response to the effective stroke being less than the minimum stroke threshold, or the duration of the drive motor driving the switch assembly to move toward the zero position being greater than the second duration threshold, stop calibrating the mechanical zero point of the switch assembly and stop building the angle mapping relationship of the switch assembly, and generate a first alarm flag.

[0134] The first alarm flag indicates an abnormality in the vacuum valve calibration. Engineers can customize the minimum stroke threshold based on experimental and empirical data, for example, setting the minimum stroke threshold to... This application does not impose any limitations on this aspect. Similarly, engineers can customize and set the second duration threshold based on experimental data and empirical data. The second duration threshold is used to characterize the maximum allowable duration for the drive motor to drive the switch assembly to move towards the zero position.

[0135] For example, when the effective stroke of the switching component is less than the minimum stroke threshold, it indicates that the switching component or other components have mechanically jammed, the calibration is abnormal, the calibration of the mechanical zero point of the switching component is stopped, the construction of the angle mapping relationship of the switching component is stopped, and a first alarm flag is generated to warn of the abnormality in the vacuum valve calibration.

[0136] For example, when the drive motor starts driving the switch assembly to the zero position, this embodiment of the application counts the duration of the drive motor driving the switch assembly to the zero position. When the duration of the drive motor driving the switch assembly to the zero position exceeds a second duration threshold, it indicates that a calibration abnormality has occurred during the drive motor driving the switch assembly to the zero position (e.g., mechanical jamming of the switch assembly, drive motor malfunction, etc.). In this case, the calibration of the mechanical zero point of the switch assembly is stopped, and the construction of the angle mapping relationship of the switch assembly is stopped. At the same time, a first alarm flag is generated to warn of the abnormality in the vacuum valve calibration.

[0137] Step S52: In response to the difference between the effective stroke and the historical stroke reference value being greater than the stroke error value, calibrate the mechanical zero point of the switch assembly and construct the angle mapping relationship of the switch assembly, and generate a second alarm flag.

[0138] In this embodiment, the second alarm flag is used to indicate mechanical wear of the vacuum valve.

[0139] The historical stroke reference value is a reference value for the historical effective stroke of the vacuum valve during calibration. This historical stroke reference value can be the average of multiple historical effective strokes obtained from multiple calibrations of the vacuum valve, or it can be set to other suitable stroke values ​​according to actual needs. It should be understood that engineers can customize the stroke error value based on experience data and actual needs, for example, setting the stroke error value to... This application does not impose any limitations on this aspect.

[0140] For example, in this application embodiment, the difference between the effective stroke of the switch assembly and the historical stroke reference value is calculated. If the difference between the effective stroke of the switch assembly and the historical stroke reference value is greater than the stroke error value, the mechanical zero point of the switch assembly is calibrated according to the zero point position (including the fully open position and the fully closed position) and the angle mapping relationship of the switch assembly is constructed. At the same time, a second alarm flag is generated to warn of mechanical wear of the vacuum valve, so as to realize predictive maintenance prompts for the deterioration trend of the vacuum valve.

[0141] Overall, the embodiments of this application have at least the following beneficial effects.

[0142] 1) Long-term accuracy self-maintenance: The embodiment of this application uses the stall detection result of the drive motor for the periodic recalibration (i.e., calibration) of the mechanical zero point and effective stroke. Each calibration can re-measure and compensate for the boundary offset caused by mechanical wear and temperature drift, significantly reducing or avoiding the deviation between the commanded opening degree and the actual opening degree. It maintains the opening control accuracy of the vacuum valve throughout the entire life cycle of the vacuum valve and overcomes the accuracy degradation problem of the fixed zero point scheme.

[0143] 2) Reliable detection under low-speed conditions: The embodiments of this application use a current threshold and a duration to detect and determine stall, rather than relying on the zero-crossing detection of the back electromotive force. Under the low-speed quasi-stationary condition of mechanical return to zero, although the back electromotive force is close to zero, the increase in drive current caused by motor stall is still significant and measurable, thus eliminating the blind zone of low-speed detection.

[0144] 3) Zero hardware increment and no sensor: The embodiments of this application reuse the existing phase current sampling link to detect the drive current of the drive motor and do not introduce position sensors. There is no need to set up additional vacuum feedthroughs, wiring and sealing points. This avoids the reliability problem of mechanical switches / photoelectric switches being susceptible to contamination and failure in a vacuum environment, and significantly reduces hardware costs, leakage risks and maintenance complexity.

[0145] 4) No vendor binding: The stall detection logic in this application embodiment is implemented in software in a general controller. It only requires general-purpose components such as current sensing resistors and operational amplifiers, and does not rely on dedicated driver chips that integrate specific stall detection functions. This eliminates vendor dependence and improves supply chain autonomy and calibration scheme portability.

[0146] 5) Anti-disturbance and anti-overheating: The dual judgment logic of this application requires the driving current to be greater than the current threshold and to be sustained for a first duration threshold before it is determined to be stalled. This effectively filters out instantaneous current spikes caused by vibration, shock and load change, and reduces the false triggering rate. At the same time, by reasonably setting the first duration threshold, the top rotation time of the drive motor at the limit position is constrained, avoiding the coil winding from stalling and overheating for a long time, thus ensuring safety.

[0147] 6) Predictive maintenance capability: In each calibration embodiment of this application, the effective stroke is measured and compared with the historical stroke reference value. The gradual trend of the effective stroke directly reflects the degree of mechanical wear. Wear alarms can be output before the accuracy is lost, turning passive maintenance into predictive maintenance and reducing the risk of unplanned downtime.

[0148] This application provides a computer-readable storage medium storing processor-executable computer program instructions. When executed by the processor, the computer program instructions cause the processor to perform the vacuum valve calibration method provided in this application.

[0149] In some embodiments, the storage medium may be a flash memory, a hard disk, an optical disk, a register, a magnetic surface memory, a removable disk, a CD-ROM, a random access memory (RAM), a read-only memory (ROM), an electrically programmable ROM, and an electrically erasable programmable ROM, or any other form of storage medium known in the art, or various devices including one or any combination of the above storage media.

[0150] In some embodiments, computer program instructions may take the form of programs, software, software modules, scripts, or code, written in any form of programming language (including compiled or interpreted languages, or declarative or procedural languages), and may be deployed in any form, including as stand-alone programs or as modules, components, subroutines, or other units suitable for use in a computing environment.

[0151] As an example, computer program instructions may, but do not necessarily, correspond to files in a file system, and may be stored as part of a file that holds other programs or data, for example, in one or more scripts in an HTML (Hypertext Markup Language) document, or in a single file dedicated to the program in question, or in multiple collaborative files (e.g., a file that stores one or more modules, subroutines, or code sections).

[0152] As an example, computer program instructions can be deployed to execute on a single computing device (including devices such as smart terminals and servers), or on multiple computing devices located in one location, or on multiple computing devices distributed across multiple locations and interconnected via a communication network. It is readily understood that all or part of the steps of the methods described in the embodiments provided above can be implemented directly using electronic hardware or processor-executable computer program instructions, or a combination of both.

[0153] Those skilled in the art will understand that the embodiments provided in this application are merely illustrative. The order in which the steps in the methods of the embodiments are written does not imply a strict execution order and does not constitute any limitation on the implementation process. The order can be adjusted, merged, and deleted according to actual needs. Modules or sub-modules, units or sub-units in the apparatus or system of the embodiments can be merged, divided, and deleted according to actual needs. For example, the division of units is only a logical functional division, and there may be other division methods in actual implementation. For another example, multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed.

[0154] Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented using software plus a general-purpose hardware platform, and of course, it can also be implemented using hardware. Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. This computer program can be stored in a computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. It should be understood that the storage medium can be flash memory, hard disk, optical disk, register, magnetic surface memory, removable disk, CD-ROM, random access memory (RAM), read-only memory (ROM), electrically programmable ROM, and electrically erasable programmable ROM, etc.

[0155] It should be noted that the above embodiments are for illustrating the technical concept and features of this application, and are intended to enable those skilled in the art to understand the content of this application and implement it accordingly. They should not be construed as limiting the scope of protection of this application. Those skilled in the art can understand that all or part of the processes of the above embodiments can be implemented, modified according to the technical solutions described in the embodiments of this application, or equivalent substitutions can be made to some of the technical features. It is understood that these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application, and should be considered as equivalent changes and modifications made based on the embodiments of this application, all of which should fall within the scope of the claims of this application.

Claims

1. A method for calibrating a vacuum valve, characterized in that, Applied to a controller, wherein both the controller and the vacuum valve are connected to a drive motor, the method includes: In response to the vacuum valve meeting the calibration conditions, the drive motor is controlled to drive the switching assembly of the vacuum valve to move towards the zero position, and the drive current of the drive motor during the movement of the switching assembly is detected. The calibration conditions include any one or more of the following: the cumulative number of runs reaches a number threshold, the cumulative running time reaches a duration threshold, and a calibration command is received. In response to the driving current being greater than a current threshold and the duration of the driving current being greater than the current threshold being greater than a first duration threshold, it is determined that the switching component has moved to the zero point position; Based on the zero-point position, the switching parameters of the vacuum valve are calibrated, wherein the switching parameters include the effective stroke of the switching assembly, the mechanical zero point, and the angle mapping relationship. The angle mapping relationship is used to characterize the correspondence between the position of the switching assembly and the opening angle of the switching assembly. The zero-point position includes a fully open position and a fully closed position. The fully open position is the position when the switching assembly is fully open, and the fully closed position is the position when the switching assembly is fully closed. The step of calibrating the switching parameters of the vacuum valve based on the zero point position includes: calculating the effective stroke of the switching assembly based on the fully open position and the fully closed position; determining the fully open position or the fully closed position as the mechanical zero point of the switching assembly; and constructing an angle mapping relationship of the switching assembly based on the fully closed position and the effective stroke, or constructing an angle mapping relationship of the switching assembly based on the fully open position and the effective stroke.

2. The vacuum valve calibration method according to claim 1, characterized in that, The step of calculating the effective travel of the switch assembly based on the fully open position and the fully closed position includes: The difference between the fully open position and the fully closed position is determined as the effective stroke.

3. The vacuum valve calibration method according to claim 1, characterized in that, The step of constructing the angle mapping relationship of the switch component based on the fully closed position and the effective travel includes: The first difference value is obtained by subtracting the position of the switch assembly from the fully closed position; A correspondence is established between the opening angle of the switch assembly and the first product to obtain the angle mapping relationship, wherein the first product is the product of a first ratio and a preset reference angle value, and the first ratio is the ratio of the first difference to the effective stroke.

4. The vacuum valve calibration method according to claim 1, characterized in that, The step of constructing the angle mapping relationship of the switch component based on the fully open position and the effective travel includes: The second difference value is obtained by subtracting the fully open position from the position of the switch assembly. A correspondence is established between the opening angle of the switch assembly and the second product to obtain the angle mapping relationship, wherein the second product is the product of the second ratio and the preset reference angle value, and the second ratio is the ratio of the second difference to the effective stroke.

5. The vacuum valve calibration method according to any one of claims 1-4, characterized in that, The method further includes: The drive motor is controlled to drive the switching assembly of the vacuum valve to move towards the zero position, and the number of times the switching assembly is driven to move towards the zero position is a preset number threshold, and the drive current of the drive motor is detected during each movement of the switching assembly; For each movement of the switching component, in response to the driving current being greater than the current threshold and the duration of the driving current being greater than the current threshold being greater than the first duration threshold, it is determined that the switching component has moved to the zero point position; The switching parameters of the vacuum valve are calibrated based on the multiple zero-point positions.

6. The vacuum valve calibration method according to any one of claims 1-4, characterized in that, The method further includes: In response to the effective stroke being less than the minimum stroke threshold, or the duration for which the drive motor drives the switch assembly to move toward the zero position being greater than a second duration threshold, the calibration of the mechanical zero point of the switch assembly is stopped and the construction of the angle mapping relationship of the switch assembly is stopped, and a first alarm flag is generated. The first alarm flag is used to indicate that the vacuum valve calibration is abnormal. In response to the difference between the effective stroke and the historical stroke reference value being greater than the stroke error value, the mechanical zero point of the switching assembly is calibrated and the angle mapping relationship of the switching assembly is constructed, and a second alarm flag is generated. The second alarm flag is used to characterize the mechanical wear of the vacuum valve.

7. The vacuum valve calibration method according to claim 1, characterized in that, The zero-point position includes a fully open position and a fully closed position. Controlling the switching assembly of the vacuum valve driven by the drive motor to move towards the zero-point position includes: Control the drive motor to drive the switch assembly to the fully open position at a first reference speed; In response to the switch assembly moving to the fully open position, the drive motor is controlled to drive the switch assembly to move in the opposite direction of the fully open position by a preset step length at a second reference speed, so that the switch assembly is disengaged from the fully open position; In response to the switch assembly disengaging from the fully open position, the drive motor is controlled to drive the switch assembly toward the fully closed position at a third reference speed; or, Control the drive motor to drive the switch assembly to the fully closed position at a fourth reference speed; In response to the switch assembly moving to the fully closed position, the drive motor is controlled to drive the switch assembly to move in the opposite direction of the fully closed position by the preset step length at a fifth reference speed, so that the switch assembly disengages from the fully closed position; In response to the switch assembly disengaging from the fully closed position, the drive motor is controlled to drive the switch assembly toward the fully open position at a sixth reference speed.

8. A controller, characterized in that, The device includes a processor and a memory, the memory being communicatively connected to the processor, the memory storing computer program instructions executable by the processor, the computer program instructions being executed by the processor to cause the controller to perform the vacuum valve calibration method as described in any one of claims 1-7.

9. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores processor-executable computer program instructions, which, when executed by the processor, cause the processor to perform the vacuum valve calibration method as described in any one of claims 1-7.

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