Universal wide-band high-resolution spectral detection and monochromatic generation device and method

Abstract

The present application relates to spectral detection device and method, specifically relates to general wide spectral range high resolution spectral detection and monochromatic generating device and method, in order to solve the existing spectral instrument function discrete, low integration, insufficient adaptability and the deficiency of key performance index measurement, the general wide spectral range high resolution spectral detection and monochromatic generating device of the present application includes the incident slit, collimation unit, grating tower assembly, converging unit, correction unit that are sequentially arranged along the light path, and detachable light source and switchable output unit, correction unit is used for the aberration compensation of the light after converging of converging unit, switchable output unit includes switchable detection module and slit module, to realize spectral detection or monochromatic output.Simultaneously, the present application also provides another general wide spectral range high resolution spectral detection and monochromatic generating device, including N identical integrated devices that are sequentially cascaded and intermediate matching module arranged between adjacent integrated devices.

Description

Technical Field

[0001] This invention relates to spectral detection devices and methods, specifically to a general-purpose wide-band high-resolution spectral detection and monochromatic generation device and method. Background Technology

[0002] With the rapid development of optical technology, spectral detection technology, as an integrated detection method that combines "spectral information" and "energy information", has been successfully applied in many fields such as environmental monitoring, biomedicine, materials characterization, and astronomical observation due to its qualitative and quantitative analysis capabilities. It has become the core spectral system support for obtaining information on the composition, structure and dynamic changes of matter in various fields.

[0003] Currently, several spectrometers have been put into use, such as the FieldSpec 4 series from ASD Corporation (USA), the QE Pro series high-sensitivity spectrometers from Ocean Optics, and the 6362D spectral analysis system from the 41st Research Institute of China Electronics Technology Group Corporation (CETC). These systems have all demonstrated certain advantages in their respective application scenarios. However, they generally suffer from limited functionality, possessing only spectral analysis or monochromatic output capabilities, making it difficult to achieve synergistic integration of both on a single platform. Furthermore, they still have shortcomings in measuring key performance indicators such as wide spectral coverage and high resolution, and a general-purpose spectrometer that combines wide spectral coverage, high resolution, and integrated functionality has not yet been developed.

[0004] In summary, there is an urgent need for a general-purpose, wide-band high-resolution spectral analysis and monochromatic generation integrated system to solve the problems of existing equipment such as discrete functions, low integration, insufficient adaptability, and limited key performance indicators, and to provide more accurate and efficient spectral detection methods for various application scenarios. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing spectrometers, such as functional separation, low integration, insufficient adaptability, and limited measurement of key performance indicators, and to provide a universal wide-band high-resolution spectral detection and monochromatic generation device and method.

[0006] To achieve the above objectives, the technical solution provided by this invention is as follows: A general-purpose broadband high-resolution spectral detection and monochromatic generation device, based on an M-type beam splitting structure, is characterized by: an entrance slit, a collimation unit, a grating tower assembly, a converging unit, and a correction unit arranged sequentially along the optical path; a detachable light source corresponding to the entrance slit; and a switchable output unit corresponding to the correction unit. The collimation unit, grating tower assembly, converging unit, and correction unit constitute the M-type beam splitting structure. The detachable light source provides light in monochromatic generation mode. The entrance slit limits the received signal light or light source and adjusts the spectral resolution. The collimation unit converts the light output from the entrance slit into a parallel beam, which is then reflected to the grating tower assembly. The grating tower assembly... The wheel assembly includes a turntable and multiple planar diffraction gratings with different blaze wavelengths arranged around the turntable. The blaze wavelengths of the multiple planar diffraction gratings can achieve full spectrum coverage of 200nm-2500nm. The planar diffraction gratings are used for dispersion and reflect the dispersed light to a converging unit. The converging unit is used to converge the dispersed light and reflect it to a correction unit. The correction unit is used to perform aberration compensation on the converged light and reflect it to a switchable output unit. The switchable output unit includes a switchable detection module and a slit module. The detection module is used to detect the aberration-compensated light in spectral analysis mode, and the slit module is used to output the aberration-compensated light through the slit module in monochromatic generation mode.

[0007] Furthermore, the detection module includes a first detector and a second detector, which respond to the ultraviolet-visible-near-infrared band and the near-infrared-shortwave infrared band respectively, to achieve broadband coordinated detection; The slit module includes a first exit slit and a second exit slit, which, in monochromatic generation mode, output monochromatic light of different wavelengths in aberration-compensated light, respectively. The switchable output unit also includes a switchable reflector, which is driven by the first driving component and is used to be placed in the reflected light path of the correction unit when the second exit slit or the second detector is working, so as to reflect the aberration-compensated light to the second exit slit or the second detector.

[0008] Furthermore, it also includes a control unit and a data processing unit; The control unit connects the detachable light source, the grating tower assembly, the detection module, and the slit module, and is used to control their working status. The data processing unit is connected to the detection module and is used to generate a full-spectrum spectrum based on the segmented spectral signals detected by the detection module.

[0009] Furthermore, it also includes an outer casing, in which the entrance slit, collimation unit, grating tower assembly, convergence unit, correction unit, detection module, and slit module are all disposed or integrated; An input window is provided on the outer casing corresponding to the entrance slit, and an output window is provided on the slit module; an optomechanical cascade interface is provided on the output window and the input window respectively; The length of the entrance slit is matched with the height of the photosensitive surfaces of the first and second detectors; The number of planar diffraction gratings is three, corresponding to the ultraviolet-visible, near-infrared and short-wave infrared bands respectively. The three planar diffraction gratings are arranged in an equilateral triangle and fixed off-axis on the turntable. The correction unit uses a reflective Schmidt correction plate.

[0010] In addition, a general-purpose wide-band high-resolution spectral detection and monochromatic generation method is also provided, which is special in that it includes the following steps: Step 1: Construct the aforementioned general-purpose wide-band high-resolution spectral detection and monochromatic generation device; if spectral detection is required, proceed to Step 2; if monochromatic light is required, proceed to Step 3. Step 2, spectral analysis mode; According to the set band control grating tower assembly and switchable output unit, the control signal light is introduced through the entrance slit, and then passes through the collimation unit, grating tower assembly, convergence unit and correction unit in sequence, and is focused to the detection module for reception, so as to obtain the corresponding spectral signal; Step 3, Monochrome generation mode; The rotation angle of the planar diffraction grating is controlled by the set band control grating tower assembly and switchable output unit, and monochromatic light of a specified wavelength is output from the slit module for external detection or calibration.

[0011] Meanwhile, this invention also provides a general-purpose wide-spectrum high-resolution spectral detection and monochromatic generation device, characterized by: comprising N cascaded identical integrated devices, an intermediate matching module, a detachable light source, an entrance slit, and a switchable output unit, wherein N≥2; the integrated device includes a collimating unit, a grating tower assembly, a converging unit, and a correction unit arranged sequentially along the optical path to form an M-type beam splitting structure; the collimating unit is used to convert the incident light into a parallel beam and reflect it to the grating tower assembly; the grating tower assembly includes a turntable and multiple planar diffraction gratings with different blaze wavelengths arranged around the turntable, the blaze wavelengths of the multiple planar diffraction gratings can achieve full-spectrum coverage of 200nm-2500nm, and the planar diffraction grating of the corresponding band can be selected as needed; the planar diffraction gratings are used for dispersion and reflect the dispersed light to the converging unit; the converging unit is used to converge the dispersed light and reflect it to the correction unit; the correction unit is used to compensate for aberrations in the converged light and reflect it to the switchable output unit; the intermediate matching module is configured with... The device is positioned between adjacent integrated devices and includes a central exit slit and an optical matching unit arranged sequentially along the optical path. The central exit slit is used to filter the target wavelength beam and remove stray light. The optical matching unit is switchable and, when entering the optical path, is used to change the spatial matching relationship of the optical paths of the N integrated devices, cooperating with the grating tower assembly to achieve dispersion addition mode and dispersion subtraction mode. The N integrated devices are respectively designated as the first-stage device, the second-stage device, ..., the Nth-stage device along the light incident direction. The detachable light source and the entrance slit are sequentially arranged at the input end of the entrance slit of the first-stage device. The detachable light source is used to provide light in monochromatic generation mode. The entrance slit is used to limit the received signal light or light source and adjust the spectral resolution. The switchable output unit is arranged corresponding to the output end of the correction unit of the Nth-stage device and includes a switchable detection module and a slit module. The detection module is used to detect the aberration-compensated light in spectral analysis mode, and the slit module is used to output the aberration-compensated light through the slit module in monochromatic generation mode.

[0012] Furthermore, the detection module includes a first detector and a second detector, which respond to the ultraviolet-visible-near-infrared band and the near-infrared-shortwave infrared band respectively, to achieve broadband coordinated detection; The slit module includes a first exit slit and a second exit slit, which are used in monochromatic generation mode to output monochromatic light of different wavelengths in aberration-compensated light; The switchable output unit also includes a switchable reflector, which is driven by the first driving component and is used to be placed in the reflected light path of the correction unit when the second exit slit or the second detector is working, so as to reflect the aberration-compensated light to the second exit slit or the second detector.

[0013] Furthermore, it also includes a control unit and a data processing unit; The control unit is connected to the detachable light source, grating tower assembly, detection module, slit module and optical matching unit, and is used to control its working state to realize the time-series coordinated control of N integrated devices. The data processing unit is connected to the detection module and is used to generate a full-spectrum spectrum based on the segmented spectral signals detected by the detection module.

[0014] Furthermore, the integrated device also includes a housing, in which the collimation unit, grating tower assembly, convergence unit, and correction unit are all disposed or integrated; the detachable light source and entrance slit are disposed or integrated in the housing of the first-level device, and the detection module and slit module are disposed or integrated in the housing of the Nth-level device. The first-stage device has an input window on its outer casing corresponding to the entrance slit, and the second-stage to Nth-stage devices have input windows on their outer casings corresponding to the collimation unit; the first-stage to N-1th-stage devices have output windows on their outer casings corresponding to the correction unit, and the Nth-stage device has output windows on its outer casing corresponding to the slit module; the input and output windows are respectively provided with optomechanical cascade interfaces; The length of the entrance slit is matched with the height of the photosensitive surfaces of the first and second detectors; The number of planar diffraction gratings is three, corresponding to the ultraviolet-visible, near-infrared and short-wave infrared bands respectively. The three planar diffraction gratings are arranged in an equilateral triangle and fixed off-axis on the turntable; in the N integrated devices, the corresponding planar diffraction gratings are fixed in parallel and in the same direction. The correction unit uses a reflective Schmidt correction plate; The optical matching unit is configured as a switchable mirror group. By synchronously adjusting the mirror group and the planar diffraction grating, the optical path of the integrated device is matched in the same direction to achieve the dispersion addition mode, or the optical path is spatially reversed to achieve the dispersion subtraction mode.

[0015] In addition, a general-purpose wide-band high-resolution spectral detection and monochromatic generation method is also provided, which is special in that it includes the following steps: Step 1: Construct the aforementioned general-purpose wide-band high-resolution spectral detection and monochromatic generation device; if spectral detection is required, proceed to Step 2; if monochromatic light is required, proceed to Step 3. Step 2, spectral analysis mode; Based on the state of the set band control grating tower assembly and switchable output unit, the dispersive working mode is switched to the dispersive addition mode. The control signal light is introduced through the entrance slit and passes sequentially through the collimation unit, grating tower assembly, convergence unit and correction unit of each integrated device. It is then focused onto the detection module of the Nth stage device to receive the corresponding spectral signal. Step 3, Monochrome generation mode; The system controls the detachable light source to provide light, controls the grating tower assembly and switchable output unit according to the set wavelength, selects the dispersion addition mode or dispersion subtraction mode as needed, adjusts the rotation angle of the plane diffraction grating, and outputs monochromatic light of a specified wavelength from the slit module of the Nth stage device for external detection or calibration.

[0016] Compared with the prior art, the present invention has the following beneficial technical effects: 1. This invention's universal wide-spectrum high-resolution spectral detection and monochromatic generation device, through a modular M-type spectroscopic structure and spectroscopic multiplexing design, allows the same spectroscopic optical path to be used in both spectral analysis and monochromatic generation modes via a switchable output unit, achieving integrated functionality for wide-spectrum (200 nm - 2500 nm) spectral analysis and monochromatic generation. Specifically, this invention achieves wide-spectrum coverage and sub-nanometer resolution through the collaboration of the grating tower assembly and the detection module; the grating tower assembly, through a standardized cascading interface, supports multi-unit cascading, doubling the resolution in dispersion additive mode and significantly improving stray light suppression capability in dispersion subtractive mode.

[0017] 2. The universal broadband high-resolution spectral detection and monochromatic generation device of this invention achieves aberration correction through a built-in correction unit. At the same time, it combines the collimation unit and convergence unit of the M-type beam splitting structure with an off-axis symmetrical layout, the grating tower assembly with an off-axis setting, the integrated reflective Schmidt correction plate, and the matching of the entrance slit length with the height of the photosensitive surfaces of the first and second detectors. This suppresses stray light, improves light flux efficiency and spectral imaging quality, thereby ensuring the detection accuracy and data reliability of the device in both spectral analysis mode and monochromatic generation mode.

[0018] 3. This invention's universal wide-band high-resolution spectral detection and monochromatic generation device cascades multiple integrated devices with an optical matching unit, allowing for flexible switching between dispersion additive and dispersion subtractive modes. In the N integrated devices, the corresponding planar diffraction gratings are always fixed in parallel and in the same direction. There is no need to disassemble or adjust the gratings; the optical path is spatially reversed solely by the optical matching unit, and the rotation angles of the planar diffraction gratings in the N integrated devices are simultaneously switched. This achieves seamless switching between dispersion additive and dispersion subtractive modes without the need for internal optical path recalibration. In dispersion additive mode, the system functions as a high-resolution spectrometer; in dispersion subtractive mode, it functions as an ultra-low stray light monochromator, outputting high-purity, uniform monochromatic light. The synchronized switching of the optical path state and the rotation angle of the planar diffraction gratings overcomes the technical bottleneck of traditional single-unit systems in achieving both resolution and wide spectral range, providing more complete and accurate spectral data for qualitative and quantitative analysis of substances.

[0019] 4. This invention provides a general-purpose wide-spectrum high-resolution spectral detection and monochromatic generation method. Based on the aforementioned device, it integrates spectral analysis mode and monochromatic generation mode, with both modes sharing the same core optical path. This is achieved by precisely controlling the rotation angle of the planar diffraction grating in the grating tower assembly: In spectral analysis mode, the wide-spectrum light is dispersed and received by the detection unit, then segmented and stitched together to form full-spectrum spectral information; in monochromatic generation mode, by precisely controlling the rotation angle of the planar diffraction grating, monochromatic light of a specific wavelength is output from the exit slit. This invention achieves deep integration of spectral analysis and monochromatic generation, eliminating the need for additional dedicated equipment and reducing the system complexity and application cost of multi-scenario spectral detection.

[0020] 5. This invention aims to overcome the limitations of traditional "one-domain, one-instrument" equipment and construct a universal integrated system. This system features wide spectral coverage, sub-nanometer resolution, and can simultaneously perform spectral analysis and monochromatic generation. Compared to existing equipment, this system improves core indicators such as functional integration, band adaptability, and resolution. Furthermore, it can be further optimized for spectral resolution and stray light suppression through dual-cascade or multi-cascade architectures, meeting the urgent needs of various fields for high-performance, universal spectrometers.

[0021] 6. This invention can be widely applied in the spectral fields of ocean, environment, atmosphere, and space, for precise measurement of wide-spectrum, high-precision optical parameters and accurate establishment of spectral references. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of a first embodiment of a universal wide-band high-resolution spectral detection and monochromatic generation device of the present invention.

[0023] Figure 2This is a schematic diagram of a second embodiment of the universal wide-band high-resolution spectral detection and monochromatic generation device of the present invention.

[0024] Figure 3 This is a schematic diagram of the external structure of a general-purpose wide-band high-resolution spectral detection and monochromatic generation device according to Embodiment 1 of the present invention.

[0025] The annotations in the attached figures are explained as follows: 1-Detachable light source, 2-Incident slit, 3-Collimation unit, 4-Grate tower assembly, 5-Convergence unit, 6-Correction unit, 7-First exit slit, 8-First detector, 9-Switchable mirror, 10-Second detector, 11-Second exit slit, 12-Optical matching unit, 13-Intermediate exit slit. Detailed Implementation

[0026] Example 1

[0027] This embodiment provides a general-purpose broadband high-resolution spectral analysis and monochromatic generation device (hereinafter referred to as the device), which integrates spectral analysis and monochromatic generation into a single unit. Figure 1 As shown, the structure includes a detachable light source 1 and, along the optical path of the detachable light source 1, an entrance slit 2, a collimation unit 3, a grating tower assembly 4, a converging unit 5, a correction unit 6, and a switchable output unit, arranged sequentially. The collimation unit 3, the grating tower assembly 4, the converging unit 5, and the correction unit 6 constitute an M-type beam splitting structure.

[0028] The detachable light source 1 is used to provide a light source in monochromatic generation mode. The entrance slit 2 is used to limit the received signal light or light source and adjust the spectral resolution.

[0029] Both collimating unit 3 and converging unit 5 employ a wide-spectrum concave mirror coated with aluminum and magnesium fluoride, and are arranged in an off-axis symmetrical layout to achieve an M-type beam splitting structure. The reflecting surface is spherical, with a focal length of 280mm, and an average reflectivity of no less than 90% within the 200nm-2500nm operating wavelength range. This design is compatible with the off-axis optical path of the M-type beam splitting structure, ensuring efficient collimation and convergence of the wide-spectrum optical signal. Collimating unit 3 converts the light output from the entrance slit 2 into a parallel beam; converging unit 5 focuses the beam dispersed by the grating tower assembly 4 onto the switchable output unit.

[0030] The grating tower assembly 4 is the core component for achieving broadband coverage and mode switching. The assembly features three planar diffraction gratings with different blaze wavelengths for dispersion, enabling wavelength scanning and spectral splitting. The three blaze wavelengths correspond to 300nm, 1250nm, and 1800nm, respectively, to adapt to the 200nm-900nm, 900nm-1700nm, and 1700nm-2500nm wavelength bands. To improve light utilization efficiency, the three planar diffraction gratings are arranged in an equilateral triangle and fixed off-axis to a high-precision worm gear turntable. Rotation of the worm gear turntable allows for 360° positioning and switching.

[0031] The correction unit 6 employs an improved reflective Schmidt correction plate. This correction plate is a weakly aspherical, high-reflectivity surface, positioned between the converging unit 5 and the switchable output unit. It is used to compensate for aberrations in the converged light, improving spectral imaging quality. Specifically, it compensates for primary spherical aberration introduced by the spherical mirrors of the collimating unit 3 and the converging unit 5, and collaboratively corrects astigmatism and coma introduced by the off-axis optical path, thereby improving the imaging quality of the device across the entire spectrum and ensuring spectral resolution and beam energy concentration. The correction plate uses a high-reflectivity coating, eliminating dispersion and band light absorption losses introduced by the transmission medium, and can effectively adapt to wavefront error compensation across a wide spectral range of 200nm-2500nm. Those skilled in the art can obtain the specific surface parameters of this correction plate by performing conventional optimization using optical design software ZEMAX based on the optical path structure disclosed in this embodiment.

[0032] To address the issue of incomplete band coverage in existing spectrometers and to achieve sensitive detection across the entire 200nm-2500nm spectrum, a switchable output unit is configured with a first detector 8 and a second detector 10 as detection modules, along with a switchable reflector 9. The first detector 8 is a silicon-based detector, positioned in the reflected light path of the calibration unit 6, used for ultraviolet-visible-near-infrared band detection, with a spectral response range covering 200nm-1100nm. The second detector 10 is an InGaAs detector, positioned in the reflected light path of the switchable reflector 9, used for near-infrared-short-wave infrared band detection, with a spectral response range covering 900nm-2550nm. In this embodiment, the length of the entrance slit 2 matches the height of the photosensitive surfaces of the first detector 8 and the second detector 10.

[0033] The switchable output unit also includes a first exit slit 7 and a second exit slit 11 as slit modules, which output aberration-compensated light through the first exit slit 7 or the second exit slit 11 in monochrome generation mode.

[0034] When the second detector 10 or the second exit slit 11 is operating, the switchable reflector 9 is moved or rotated onto the reflected light path of the correction unit 6 via the first driving component, reflecting the aberration-compensated light reflected by the correction unit 6 back to the second detector 10 or the second exit slit 11. In this embodiment, the first driving component is configured as a drive motor. Simultaneously, the invention provides a second driving component connected to the first exit slit 7 and the first detector 8, and a third driving component connected to the second exit slit 11 and the second detector 10, to achieve mutual switching between spectral analysis mode and monochromatic generation mode.

[0035] To achieve automated control of the entire machine, the present invention also includes a control unit. In spectral analysis mode, the control unit automatically controls the worm gear turntable to switch the required planar diffraction grating according to the set start and end wavelengths. By controlling the switchable reflector 9, the control unit can guide the split beam to the first detector 8 or the second detector 10 according to a preset program. The first detector 8 or the second detector 10 collects spectral signals in segments and finally splices them to form a complete full-spectrum spectrum.

[0036] In monochromatic generation mode, the control unit controls the detachable light source 1 to provide light, while precisely controlling the rotation angle of the planar diffraction grating, the second driving component, and the third driving component to guide monochromatic light of a specified wavelength to the first exit slit 7 or the second exit slit 11 and output it.

[0037] To achieve device integration, the present invention also includes a housing, such as Figure 3 As shown, the entrance slit 2, collimation unit 3, grating tower assembly 4, convergence unit 5, correction unit 6, and switchable output unit are all housed inside the housing. An input window is located on the housing corresponding to the entrance slit 2. In monochromatic generation mode, the detachable light source 1 is positioned outside the housing and optically coupled to the entrance slit 2 through the input window to achieve optical path connection. The housing also has output windows, including a first output window corresponding to the first exit slit 7 and the second exit slit 11, respectively.

[0038] The workflow of this invention is as follows: In spectral analysis mode, the control unit first automatically controls the grating tower assembly 4 and the switchable output unit according to the set wavelength. Then, the signal light is introduced through the entrance slit 2, and sequentially passes through the collimation unit 3 for collimation, the grating tower assembly 4 for dispersion, the convergence unit 5 for convergence, and the correction unit 6 for aberration compensation, before being focused onto the first detector 8 or the second detector 10 for reception. Simultaneously, the invention also includes an embedded data processing unit to stitch together, suppress noise, and reconstruct the segmented spectral signals acquired by the first detector 8 or the second detector 10, ultimately generating a high-resolution full-spectrum spectrum, achieving high-sensitivity, low-noise detection across the entire spectrum.

[0039] In monochromatic generation mode, the control unit precisely controls the rotation angle of the planar diffraction grating to output monochromatic light of a specified wavelength from the first exit slit 7 or the second exit slit 11 for external detection or calibration.

[0040] This device adopts a modular design. For flexible expansion, standardized optomechanical cascade interfaces are configured at the corresponding input window, first output window and second output window positions. The cascade interface can be used to expand and improve the spectral detection resolution and broaden the spectral coverage range.

[0041] Example 2

[0042] This invention also provides a universal wide-band high-resolution spectral detection and monochromatic generation device, comprising a detachable light source 1, an entrance slit 2, N integrated devices cascaded together with identical structures, a switchable output unit, and an intermediate matching module located between adjacent integrated devices to achieve higher spectral resolution, wherein N≥2. In this embodiment, N=2, and the N integrated devices include a first-stage device and a second-stage device, both of which are structurally based on the device setup of Embodiment 1.

[0043] like Figure 2 As shown, the first-stage device and the second-stage device have the same structure, both including a collimation unit 3, a grating tower assembly 4, a convergence unit 5, and a correction unit 6 arranged sequentially along the optical path. The output end of the first-stage device and the incident end of the second-stage device are optically coupled through an intermediate matching module to form a cascaded optical path.

[0044] The entrance slit 2 is located at the input end of the first-stage device. The detachable light source 1 is positioned corresponding to the input end of the entrance slit 2, and the switchable output unit is positioned corresponding to the output end of the second-stage device, including a detection module, a slit module, and a switchable reflector 9. The entrance slit 2, the detachable light source 1, and the switchable output unit all function the same as the corresponding units in Embodiment 1. Furthermore, both the first-stage and second-stage devices are equipped with housings. The collimation unit 3, the grating tower assembly 4, the convergence unit 5, and the correction unit 6 all have the same structure as their corresponding counterparts in Embodiment 1 and are integrated into their respective housings. The entrance slit 2 is integrated into the housing of the first-stage device, with an input window corresponding to the entrance slit 2 and an output window corresponding to the output end of the correction unit 6. The detection module and the slit module are integrated into the housing of the second-stage device, with an input window corresponding to the collimation unit 3 and an output window corresponding to the slit module.

[0045] The intermediate matching module includes an intermediate exit slit 13 and an optical matching unit 12 arranged sequentially along the optical path. The intermediate exit slit 13 is used to select the target wavelength beam and filter out stray light. The optical matching unit 12 includes a switchable mirror group, used to change the spatial matching relationship of the optical paths of the two integrated devices to achieve different dispersion operating modes: when the mirror group is switched to the first state, the outgoing light from the first-stage device directly enters the second-stage device after cascading, and the optical paths of the two integrated devices are matched in the same direction, forming a dispersion addition mode; when the mirror group is switched to the second state, the optical matching unit 12 cuts into the optical path, changes the beam propagation direction through the mirror group, and makes the second-stage device spatially reverse the optical path relative to the first-stage device, forming a dispersion subtraction mode. The switching between the two dispersion operating modes is achieved by manually or electrically driving the optical matching unit 12, and there is no need to recalibrate the system optical path after the mode switching is completed. Those skilled in the art can use other optical path switching elements to achieve the same function based on the principles disclosed in this embodiment, and all of them fall within the protection scope of this invention.

[0046] The reflector assembly adopts a fixed three-plane reflector assembly. After the three plane reflectors are assembled, their included angles and spatial relative positions remain fixed. The entire assembly can switch between entering and exiting the optical path through the corresponding fourth driving component. Light emitted through the central exit slit 13 sequentially enters the three plane reflectors, achieving a 180° spatial deflection of the beam through three consecutive reflections, while simultaneously forming a lateral optical path translation. The reflector assembly can effectively prevent the beam from refracting back along the original path and reflecting back to the central exit slit, ensuring that the beam is stably incident on the collimation unit 3 of the second-stage device. Compared to the two-mirror assembly, which can only achieve direction reversal but cannot shift the optical path, this embodiment has a mature three-plane reflector assembly structure. Compared to the four-mirror scheme, this embodiment has fewer optical components, lower light energy loss, easier assembly and adjustment, and a more compact overall structure. Through the optical matching unit 12 working in conjunction with the grating tower assembly 4 of the N integrated devices, the switching between dispersion addition mode and dispersion subtraction mode can be stably realized.

[0047] The corresponding planar diffraction gratings in the N integrated devices are all fixedly set in parallel and in the same direction. The reverse dispersion effect is not obtained by changing the relative placement of the planar diffraction gratings. The two dispersion working modes are switched by simply reversing the optical path space of the above-mentioned mirror group in conjunction with the rotation angle of the planar diffraction grating.

[0048] To facilitate cascading, this embodiment directly uses the device from Embodiment 1 as an integrated device for cascading. The two integrated devices are physically connected through a standardized optomechanical cascading interface, thereby achieving synchronous connection between the optical path and the data bus. No intermediate fiber coupling is required, effectively reducing optical path loss and ensuring the stability of the cascaded optical path. When the device from Embodiment 1 is used as the first-stage device in this embodiment, the first exit slit 7 can be used as the intermediate exit slit 13, and the optical matching unit 12 can be switched.

[0049] To ensure stable operation and data synchronization, this embodiment also includes a control unit that performs time-coordinated control of the two integrated devices via a high-speed data synchronization interface. This includes switching the planar diffraction grating of the grating tower assembly 4, selecting the dispersion working mode, synchronously acquiring data from the detector, controlling the working status of the detachable light source 1, and switching the operation of the detection module and the slit module. Simultaneously, the invention also includes a data processing unit connected to the detection module, used for splicing, noise suppression, and spectral reconstruction of the segmented spectral signals detected by the detection module to generate a full-spectrum spectrum.

[0050] The dispersive operating mode in this embodiment is achieved through the state switching of the optical matching unit 12: (1) Dispersion Addition Mode: The optical matching unit 12 switches to the first state, and the optical paths of the two integrated devices are matched in the same direction. At this time, the drive motor controlling the planar diffraction gratings of the two integrated devices drives the worm gear turntable to rotate in the same direction. The total dispersion capability is the sum of the two integrated devices, which is equivalent to increasing the system focal length, thereby improving the final spectral resolution by nearly double compared to a single-stage integrated device. The dispersion addition mode is mainly used for high-resolution spectral detection scenarios in spectral analysis mode. At the same time, it is also compatible with high-purity monochromatic light output in monochromatic generation mode.

[0051] (2) Dispersion Subtraction Mode: The optical matching unit 12 switches to the second state, and the second-stage device forms an optical path spatial reversal relative to the first-stage device. At this time, the drive motor controlling the planar diffraction grating of the two integrated devices drives the worm gear turntable to rotate in opposite directions, making the net dispersion capability of the device in this embodiment weaker than that of a single-stage integrated device, and the spectral resolution is correspondingly reduced, but the two-stage dispersion can be significantly offset. This mode can greatly suppress stray light in the system, and improve the stray light suppression level by several orders of magnitude compared to a single-stage integrated device. The output in the dispersion subtraction mode is spatially mixed homogenized monochromatic light, which is only suitable for monochromatic generation modes, such as weak signal detection, detector calibration and other application scenarios with high requirements for stray light.

[0052] Based on the above-mentioned device, the general-purpose wide-band high-resolution spectral detection and monochromatic generation method of the present invention mainly includes two parts: spectral analysis mode and monochromatic generation mode.

[0053] Spectral analysis mode: According to the set band, the control grating tower assembly 4 and the switchable output unit control the optical matching unit 12 to switch to the dispersion addition mode. The control signal light is introduced through the entrance slit 2 and passes through the collimation unit 3, grating tower assembly 4, convergence unit 5 and correction unit 6 of each integrated device in sequence. It is then focused onto the detection module for reception to obtain the corresponding spectral signal.

[0054] Monochromatic generation mode: The detachable light source 1 provides light, and the grating tower assembly 4 and the switchable output unit are controlled according to the set wavelength to control the rotation angle of the planar diffraction grating. Monochromatic light of a specified wavelength is output from the slit module of the Nth stage device for external detection or calibration. At the same time, depending on the purity requirements, either the dispersion addition mode or the dispersion subtraction mode can be selectively enabled to output monochromatic light.

[0055] In summary, this invention employs a modular design and a standardized optomechanical cascading interface, supporting the cascading of N identical integrated devices, where N ≥ 2. In the cascaded state, two dispersion modes—dispersion addition (resolution doubling) and dispersion subtraction (stray light suppression)—can be switched via the optical matching unit 12 located between two integrated devices, balancing the requirements of high-precision spectral detection and weak signal detection. All integrated devices in this invention use a co-directional, parallel, and fixed planar diffraction grating configuration, eliminating the need for hardware assembly adjustments. The switching between the two dispersion modes is achieved solely through optical path spatial reversal in conjunction with the rotation angle of the planar diffraction grating, without requiring recalibration of the optical path after the dispersion mode switch.

Claims

1. A general-purpose broadband high-resolution spectral detection and monochromatic generation device, based on an M-type spectroscopic structure, characterized in that: It includes an entrance slit (2), a collimation unit (3), a grating tower assembly (4), a convergence unit (5), and a correction unit (6) arranged sequentially along the optical path, as well as a detachable light source (1) corresponding to the entrance slit (2) and a switchable output unit corresponding to the correction unit (6); wherein, the collimation unit (3), the grating tower assembly (4), the convergence unit (5), and the correction unit (6) constitute an M-type beam splitting structure; The detachable light source (1) is used to provide a light source in monochromatic generation mode; The entrance slit (2) is used to limit the received signal light or light source and adjust the spectral resolution; The collimation unit (3) is used to convert the light output from the entrance slit (2) into a parallel beam and reflect it to the grating tower assembly (4). The grating tower assembly (4) includes a turntable and multiple planar diffraction gratings with different blaze wavelengths arranged around the turntable. The blaze wavelengths of the multiple planar diffraction gratings can achieve full spectrum coverage of 200nm-2500nm. The planar diffraction gratings are used for dispersion and reflect the dispersed light to the converging unit (5). The converging unit (5) is used to converge the dispersed light and reflect it to the correction unit (6). The correction unit (6) is used to compensate for aberrations in the converged light and reflect it to the switchable output unit; The switchable output unit includes a switchable detection module and a slit module. The detection module is used to detect aberration-compensated light in spectral analysis mode, and the slit module is used to output aberration-compensated light through the slit module in monochromatic generation mode. The detection module includes a first detector (8) and a second detector (10), which respond to the ultraviolet-visible-near-infrared band and the near-infrared-short-wave infrared band respectively, to achieve broadband collaborative detection; The slit module includes a first exit slit (7) and a second exit slit (11), which output monochromatic light of different wavelengths in the aberration-compensated light in monochromatic generation mode. The switchable output unit also includes a switchable reflector (9), which is driven by the first driving component and is used to be placed on the reflected light path of the correction unit (6) when the second exit slit (11) or the second detector (10) is working, so as to reflect the aberration-compensated light to the second exit slit (11) or the second detector (10).

2. The universal broadband high-resolution spectral detection and monochromatic generation device according to claim 1, characterized in that: It also includes a control unit and a data processing unit; The control unit is connected to the detachable light source (1), the grating tower assembly (4), the detection module and the slit module, and is used to control its working status; The data processing unit is connected to the detection module and is used to generate a full-spectrum spectrum based on the segmented spectral signals detected by the detection module.

3. The universal wide-band high-resolution spectral detection and monochromatic generation device according to claim 2, characterized in that: It also includes an outer shell, and the entrance slit (2), collimation unit (3), grating tower assembly (4), convergence unit (5), correction unit (6), as well as the detection module and the slit module are all disposed or integrated in the outer shell; An input window is provided on the outer shell corresponding to the incident slit (2), and an output window is provided on the slit module; an optomechanical cascade interface is provided on the output window and the input window respectively; The length of the entrance slit (2) matches the height of the photosensitive surfaces of the first detector (8) and the second detector (10); The number of planar diffraction gratings is three, corresponding to the ultraviolet-visible, near-infrared and short-wave infrared bands respectively. The three planar diffraction gratings are arranged in an equilateral triangle and fixed off-axis on the turntable. The correction unit (6) adopts a reflective Schmidt correction plate.

4. A general-purpose wide-band high-resolution spectral detection and monochromatic generation method, characterized in that, Includes the following steps: Step 1: Construct the general-purpose wide-band high-resolution spectral detection and monochromatic generation device as described in any of claims 1-3; if spectral detection is required, proceed to step 2; if monochromatic light is required, proceed to step 3. Step 2, spectral analysis mode; According to the set band control grating tower assembly (4) and switchable output unit, the control signal light is introduced through the entrance slit (2), passes through the collimation unit (3), grating tower assembly (4), convergence unit (5) and correction unit (6) in sequence, and is focused on the detection module to receive, so as to obtain the corresponding spectral signal; Step 3, Monochrome generation mode; According to the set band control grating tower assembly (4) and switchable output unit, the rotation angle of the planar diffraction grating is controlled, and monochromatic light of a specified wavelength is output from the slit module for external detection or calibration.

5. A general-purpose wide-band high-resolution spectral detection and monochromatic generation device, characterized in that: It includes N integrated devices with the same structure cascaded in sequence, as well as an intermediate matching module, a detachable light source (1), an entrance slit (2), and a switchable output unit, wherein N≥2; The integrated device includes a collimation unit (3), a grating tower assembly (4), a convergence unit (5), and a correction unit (6) arranged sequentially along the optical path to form an M-type beam splitting structure. The collimation unit (3) is used to convert the incident light into a parallel beam and reflect it to the grating tower assembly (4). The grating tower assembly (4) includes a turntable and multiple planar diffraction gratings with different blaze wavelengths arranged around the turntable. The blaze wavelengths of the multiple planar diffraction gratings can achieve full spectrum coverage of 200nm-2500nm. The planar diffraction gratings of the corresponding wavelength band can be selected as needed. The planar diffraction gratings are used for dispersion and reflect the dispersed light to the converging unit (5). The converging unit (5) is used to converge the dispersed light and reflect it to the correction unit (6). The correction unit (6) is used to compensate for aberrations in the converged light and reflect it to the switchable output unit; The intermediate matching module is disposed between adjacent integrated devices and includes an intermediate exit slit (13) and an optical matching unit (12) arranged sequentially along the optical path; the intermediate exit slit (13) is used to screen the target wavelength beam and filter out stray light; The optical matching unit (12) is switchable and, when the optical path is switched, it is used to change the spatial matching relationship of the optical paths of N integrated devices, and cooperates with the grating tower assembly (4) to realize the dispersion addition mode and dispersion subtraction mode. The N integrated devices are respectively referred to as the first-level device, the second-level device, ..., the Nth-level device along the light incident direction; The detachable light source (1) and the entrance slit (2) are sequentially arranged at the input end of the entrance slit (2) of the first-stage device. The detachable light source (1) is used to provide a light source in monochromatic generation mode; the entrance slit (2) is used to limit the received signal light or light source and adjust the spectral resolution. The switchable output unit is set at the output end of the correction unit (6) of the Nth level device, including a switchable detection module and a slit module. The detection module is used to detect the aberration-compensated light in the spectral analysis mode, and the slit module is used to output the aberration-compensated light through the slit module in the monochromatic generation mode. The detection module includes a first detector (8) and a second detector (10), which respond to the ultraviolet-visible-near-infrared band and the near-infrared-short-wave infrared band respectively, to achieve broadband collaborative detection; The slit module includes a first exit slit (7) and a second exit slit (11), which are used in monochromatic generation mode to output monochromatic light of different wavelengths in aberration-compensated light; The switchable output unit also includes a switchable reflector (9), which is driven by the first driving component and is used to be placed on the reflected light path of the correction unit (6) when the second exit slit (11) or the second detector (10) is working, so as to reflect the aberration-compensated light to the second exit slit (11) or the second detector (10).

6. The universal wide-band high-resolution spectral detection and monochromatic generation device according to claim 5, characterized in that: It also includes a control unit and a data processing unit; The control unit is connected to the detachable light source (1), the grating tower assembly (4), the detection module, the slit module and the optical matching unit (12), and is used to control its working state to realize the time-series coordinated control of N integrated devices; The data processing unit is connected to the detection module and is used to generate a full-spectrum spectrum based on the segmented spectral signals detected by the detection module.

7. The universal broadband high-resolution spectral detection and monochromatic generation device according to claim 6, characterized in that: The integrated device also includes an outer shell, and the collimation unit (3), grating tower assembly (4), convergence unit (5), and correction unit (6) are all disposed or integrated in the outer shell; the detachable light source (1) and the entrance slit (2) are disposed or integrated in the outer shell of the first-level device, and the detection module and the slit module are disposed or integrated in the outer shell of the Nth-level device; An input window is provided on the outer shell of the first-stage device corresponding to the entrance slit (2), and an input window is provided on the outer shell of the second-stage device to the Nth-stage device corresponding to the collimation unit (3); an output window is provided on the outer shell of the first-stage device to the N-1th-stage device corresponding to the correction unit (6), and an output window is provided on the outer shell of the Nth-stage device corresponding to the slit module; an optomechanical cascade interface is provided on the input window and the output window respectively; The length of the entrance slit (2) matches the height of the photosensitive surfaces of the first detector (8) and the second detector (10); The number of planar diffraction gratings is three, corresponding to the ultraviolet-visible, near-infrared and short-wave infrared bands respectively. The three planar diffraction gratings are arranged in an equilateral triangle and fixed off-axis on the turntable; in the N integrated devices, the corresponding planar diffraction gratings are fixed in parallel and in the same direction. The correction unit (6) adopts a reflective Schmidt correction plate; The optical matching unit (12) is configured as a switchable mirror group. By synchronously adjusting the mirror group and the planar diffraction grating, the optical path of the integrated device is matched in the same direction to achieve the dispersion addition mode, or the optical path is spatially reversed to achieve the dispersion subtraction mode.

8. A general-purpose wide-band high-resolution spectral detection and monochromatic generation method, characterized in that, Includes the following steps: Step 1: Construct the general-purpose wide-band high-resolution spectral detection and monochromatic generation device as described in any of claims 5-7; if spectral detection is required, proceed to step 2; if monochromatic light is required, proceed to step 3. Step 2, spectral analysis mode; According to the state of the set band control grating tower assembly (4) and switchable output unit, the dispersive working mode is switched to the dispersive addition mode. The control signal light is introduced through the entrance slit (2) and passes through the collimation unit (3), grating tower assembly (4), convergence unit (5) and correction unit (6) of each integrated device in sequence. It is focused on the detection module of the Nth level device to receive the corresponding spectral signal. Step 3, Monochrome generation mode; The detachable light source (1) provides the light source. According to the set band, the grating tower assembly (4) and the switchable output unit are controlled to select the dispersion addition mode or dispersion subtraction mode as needed. The rotation angle of the plane diffraction grating is adjusted, and the monochromatic light of the specified wavelength is output from the slit module of the Nth stage device for external detection or calibration.

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