A sampling and detecting device for TMAH waste liquid recovery

Abstract

This invention discloses a sampling and testing device for TMAH waste liquid recycling, belonging to the field of waste liquid testing technology. It includes a device housing and a test strip mechanism for picking up test strips. Inside the housing are a replacement mechanism for changing the test strips and a testing mechanism for sampling and testing Normal photoresist developer waste liquid, PFA photoresist developer waste liquid, and dilute photoresist developer waste liquid in the TMAH waste liquid. By setting up three detection pipes and solenoid valves connected to wastewater pipes at different treatment stages, this invention can perform targeted sampling of Normal photoresist developer waste liquid, PFA photoresist developer waste liquid, and dilute photoresist developer waste liquid, and introduce the waste liquid into the corresponding detection tank of the detection chamber to react with the test strips. This achieves independent and accurate automatic sampling and testing of different types and different treatment stages of TMAH waste liquid, avoiding cross-contamination and improving the targeting and reliability of the detection.

Description

Technical Field

[0001] This invention relates to the field of waste liquid detection technology, and in particular to a sampling and detection device for TMAH waste liquid recycling. Background Technology

[0002] TMAH wastewater primarily originates from developing equipment in semiconductor manufacturing processes. Its byproducts typically include wastewater from Normal photoresist developer, PFA photoresist developer, and dilute photoresist developer. With the rapid development of the semiconductor industry, the amount of TMAH wastewater generated is increasing daily. Direct discharge without proper treatment will not only cause serious environmental pollution but also lead to the waste of valuable resources. Therefore, recycling and reusing TMAH wastewater has become an important direction for cost reduction, efficiency improvement, and environmental protection within the industry.

[0003] In the TMAH wastewater recycling process, it is necessary to sample and test the wastewater at different treatment stages to monitor the recycling effect and assess water quality indicators. Currently, traditional sampling and testing methods mostly rely on manual operation, where operators manually take test strips, sample the wastewater from different treatment units, add reagents, and observe the reaction. This manual testing mode has the following problems: First, the testing efficiency is low, making it difficult to meet the needs of continuous processing; second, manual operation is prone to sampling position deviations, test strip contamination, or cross-contamination, affecting the accuracy of the test results; third, different types of developer wastewater (such as Normal photoresist, PFA photoresist, and dilute photoresist) need to be tested separately, making the operation process cumbersome and difficult to manage; fourth, discarded test strips need to be collected and disposed of manually, increasing the operational burden and potential contact risks.

[0004] In addition, some existing automatic sampling and testing devices are designed for single liquids or single testing items, and cannot be compatible with the phased sampling and testing of multiple waste liquids at the same time. They also lack the functions of automatic replacement, positioning and waste collection of test strips, making it difficult to meet the testing needs of multiple varieties and multiple nodes in the TMAH waste liquid recycling process. Summary of the Invention

[0005] To address the aforementioned technical problems, this invention discloses a detection device capable of automatically sampling multiple types of waste liquids, automatically replacing test strips, and collecting waste during the TMAH waste liquid recycling process. The technical solution adopted by this invention is as follows: a sampling and detection device for TMAH waste liquid recycling, comprising a device housing and a test strip mechanism for picking up test strips. The test strip mechanism includes an inner support frame fixedly installed inside the device housing. The device housing is provided with a replacement mechanism for replacing test strips and a detection mechanism for sampling and detecting Normal photoresist developer waste liquid, PFA photoresist developer waste liquid, and dilute photoresist developer waste liquid in TMAH waste liquid respectively.

[0006] Furthermore, the test strip mechanism also includes a bottom slide rail and a bottom motor fixedly installed on the inner support frame. A bottom lead screw is rotatably installed on the bottom slide rail, and the bottom lead screw is fixedly installed with the motor shaft of the bottom motor. A bottom slide block is slidably installed on the bottom slide rail, and the bottom slide block and the bottom lead screw form a threaded transmission. A rotating motor is fixedly installed on the bottom slide block, and a rotating platform is rotatably installed on the bottom slide block. The rotating motor drives the rotating platform to rotate through a transmission belt.

[0007] Furthermore, the test paper mechanism also includes an end motor fixedly installed on a rotating platform, a movable lead screw rotatably installed on the rotating platform, the movable lead screw being fixedly installed with the motor shaft of the end motor, a movable seat slidably installed on the rotating platform, an electric cylinder and an outer guide sleeve being fixedly installed on the movable seat, an inner sliding disk being slidably installed inside the outer guide sleeve, and the inner sliding disk being fixedly installed with the output end of the electric cylinder.

[0008] Furthermore, the test strip mechanism also includes a placement turntable rotatably mounted on an inner support frame. Multiple placement blocks are fixedly mounted on the placement turntable, and test strips are placed inside the placement blocks. A lower plate is fixedly mounted below the placement turntable, and multiple actuating posts are fixedly mounted on the lower plate. A connecting base and a turntable motor are fixedly mounted on the inner support frame. A sliding turntable is rotatably mounted on the connecting base. The turntable motor drives the sliding turntable to rotate. The sliding turntable is provided with actuating grooves, which cooperate with the actuating posts.

[0009] Furthermore, the test strip mechanism also includes multiple upper protruding pillars fixedly installed on the lower plate, a lever fixedly installed on the slide turntable, and an openable take-out door on the device housing.

[0010] The bottom motor drives the bottom lead screw to rotate, which in turn drives the bottom slide block to slide along the bottom slide rail. The rotation of the rotating motor, via the transmission belt, drives the rotating platform to rotate relative to the bottom slide block. The rotation of the end motor drives the moving lead screw to rotate, which in turn drives the moving seat to slide along the rotating platform. When the test strip is placed in, the take-out door is opened. At this time, the outer guide sleeve moves to the side of the take-out door, and the test strip is manually placed into the outer guide sleeve. Then, the electric cylinder moves the outer guide sleeve to the side of the placement block on the placement turntable. The electric cylinder extends, driving the inner sliding plate to move outward, pushing the test strip placed in the outer guide sleeve into the placement block, thus realizing the placement of the external test strip into the placement block.

[0011] The turntable motor drives the slide turntable to rotate, which in turn drives the lever and the actuating slide to rotate counterclockwise. The lever contacts the upper protrusion, and then the lever pushes the upper protrusion, the lower plate, and the placement turntable to rotate counterclockwise. After the lever actuates the slide to rotate a certain angle, the actuating column enters the actuating slide. When the lever disengages from the upper protrusion, the actuating column remains in the actuating slide. At this time, the actuating slide continues to drive the actuating column, the lower plate, and the placement turntable to rotate counterclockwise a short distance. Then the actuating column leaves the actuating slide. At this time, the placement turntable has rotated exactly 45 degrees. When the lever contacts the upper protrusion again, the lever and the actuating slide work together to drive the placement turntable to rotate another 45 degrees. This process repeats, so that the specified test strip can be rotated to the side of the flipping bracket according to different test waste liquids.

[0012] Furthermore, the replacement mechanism includes a fixed rail fixedly installed on an inner support frame, a rail motor fixedly installed on the fixed rail, a rail screw rotatably installed on the fixed rail, the rail screw being fixedly installed with the motor shaft of the rail motor, a detection seat slidably installed on the fixed rail, the detection seat and the rail screw forming a threaded transmission, a lifting frame fixedly installed on the detection seat, a lifting motor fixedly installed on the lifting frame, an internal screw rotatably installed inside the lifting frame, the lifting motor driving the internal screw to rotate via belt transmission, a lifting plate slidably installed on the lifting frame, the lifting plate and the internal screw forming a threaded transmission, a camera bracket fixedly installed on the inner support frame, and a camera fixedly installed on the camera bracket.

[0013] Furthermore, the replacement mechanism also includes a picking electric cylinder and a connecting bracket fixedly installed on the lifting plate. A rotary motor is fixedly installed on the connecting bracket, and a sliding shaft is provided on the connecting bracket. A square shaft is slidably installed inside the sliding shaft. The square shaft is rotatably installed with the connecting bracket. The rotary motor drives the square shaft to rotate through a drive belt. A movable sleeve is rotatably installed on the output end of the picking electric cylinder. An end electric cylinder is fixedly installed on the movable sleeve. The sliding shaft is rotatably installed with the movable sleeve. A transmission belt is wound around the sliding shaft and the movable sleeve. A delivery frame is fixedly installed on the inner support frame. A collection box is fixedly installed inside the equipment shell. A delivery motor is fixedly installed on the delivery frame. A delivery belt is rotatably installed on the delivery frame. The delivery motor drives the delivery belt to rotate.

[0014] Furthermore, the replacement mechanism also includes an end electric cylinder fixedly installed on the movable sleeve, a fixed bracket fixedly installed on the end electric cylinder, a flipping bracket rotatably installed on the fixed bracket, a fixed gear fixedly installed on the flipping bracket, a movable rack fixedly installed on the output end of the end electric cylinder, the movable rack meshing with the fixed gear, and an upper limit post and a lower limit post fixedly installed on the fixed bracket.

[0015] Furthermore, the replacement mechanism also includes a clamping motor fixedly mounted on a flipping bracket. Two lead screw shafts are rotatably mounted on the flipping bracket. The lead screw shafts are provided with two sections of threads with opposite directions. The clamping motor drives the lead screw shafts to rotate through a clamping belt. Two clamping sleeves are slidably mounted on the flipping bracket. The clamping sleeves and the threads with opposite directions on the lead screw shafts form a threaded transmission.

[0016] The track motor drives the track screw to rotate, which in turn causes the detection seat to slide along the fixed track. The lifting motor drives the internal screw to rotate via belt drive, which in turn causes the lifting plate to rise and fall along the lifting frame. The rotary motor drives the square shaft and the sliding shaft to rotate via a drive belt. The sliding shaft drives the movable sleeve to rotate relative to the output end of the picking electric cylinder via a transmission belt. The picking electric cylinder extends and retracts, causing the movable sleeve, the end electric cylinder, and the flipping bracket to extend or retract. When the sliding shaft extends, it slides relative to the square shaft. The end electric cylinder extends and retracts, causing the movable rack to move. The movable rack drives the fixed gear and the flipping bracket to rotate relative to the fixed bracket. The clamping motor drives the screw shaft to rotate via the clamping belt. The rotation of the screw shaft drives the clamping sleeve to move outward or inward simultaneously via threaded transmission.

[0017] When retrieving the test strip from the turntable, the clamping sleeve first moves to the test strip next to the flipping bracket. Then, both clamping sleeves move inward simultaneously to clamp the test strip in the placement block. Next, the electric cylinder retracts, causing the flipping bracket to move away from the placement block, thus pulling the test strip out of the placement block. Then, the flipping bracket rotates 90 degrees, making the test strip vertical. Then, through the rotation of the movable sleeve, the movement of the fixed bracket, the raising and lowering of the lifting plate, and the movement of the detection seat, the test strip is moved to the designated detection area above the detection box. Finally, the clamping sleeve releases the test strip and places the designated test strip into the designated detection area of ​​the detection box.

[0018] After the test is completed, the completed test strip is taken out of the processing box through the clamping sleeve, and then the test strip is placed on the delivery belt. The delivery motor drives the delivery belt to rotate, and the delivery belt sends the test strip into the collection box for centralized collection.

[0019] Furthermore, the detection mechanism includes a processing box fixedly installed inside the equipment housing, a wastewater pipe installed on the processing box, multiple processing units installed on the wastewater pipe, a detection box fixedly installed inside the equipment housing, three detection slots installed on the detection box, three detection pipes installed on the wastewater pipe, the detection pipes being in three different processing stages, three solenoid valves fixedly installed below the detection box, the three detection pipes being connected to the three solenoid valves respectively, a discharge box fixedly installed on the solenoid valves, three solenoid valves installed inside the discharge box, and a discharge pipe fixedly installed on the discharge box.

[0020] The main byproducts of semiconductor process development equipment include waste liquid from Normal photoresist developer, waste liquid from PFA photoresist developer, and waste liquid from dilute photoresist developer. To meet the requirements of cost reduction, efficiency improvement, and environmental protection, these byproducts are treated twice by multiple processing units on the processing tank and wastewater pipeline before being discharged. Waste liquid from different processing stages can be extracted through three detection pipelines connected to wastewater pipelines at different processing stages. When the solenoid valve connected to the detection pipeline is opened, the waste liquid in the wastewater pipeline flows into the detection tank in the detection tank. Subsequently, the solenoid valve is closed, and the waste liquid reacts with the test strips in the detection tank. The test strips are used to detect the specified components in the waste liquid. After the detection is completed, the solenoid valve in the discharge tank is opened, and the waste liquid is discharged through the discharge pipe.

[0021] The beneficial effects of this invention compared with the prior art are: (1) By setting up three detection pipes and solenoid valves that are respectively connected to wastewater pipes of different treatment stages, this invention can perform fixed-point sampling of Normal photoresist developer waste liquid, PFA photoresist developer waste liquid, and dilute photoresist developer waste liquid, and introduce the waste liquid into the corresponding detection tank of the detection box to react with the test strip, thereby realizing independent and accurate automatic sampling and detection of TMAH waste liquid of different types and different treatment stages, avoiding cross-contamination, and improving the pertinence and reliability of the detection; (2) This invention can realize the detection of TMAH waste liquid of different types and different treatment stages through the intermittent transmission cooperation of the placement turntable, lever and sliding groove in the test strip mechanism. The test strip automatically switches positions according to the set angle. Combined with the clamping sleeve, flipping bracket, lifting frame and multi-axis moving components in the replacement mechanism, it can automatically pick up new test strips from the placement turntable, flip them to a vertical position and put them into the detection slot. After the test is completed, the waste test strips are sent to the delivery belt and collected into the collection box. (3) The replacement mechanism set in this invention adopts a combination of track screw, internal screw, rotary motor and picking cylinder, etc., and with the sliding shaft, square shaft and transmission belt structure, it realizes the precise movement of the clamping sleeve in the horizontal, vertical and rotational directions. The flipping bracket achieves 90° flipping by meshing the movable rack with the fixed gear. The clamping sleeve uses a bidirectional threaded screw to achieve synchronous centering clamping. These designs ensure that the test strips are accurately positioned and move smoothly during the picking, transfer, insertion into the detection slot and waste recycling process, effectively avoiding test strip damage or misalignment, and ensuring the consistency of each test condition. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0023] Figure 2 This is a schematic diagram of the overall structure of the present invention (internal).

[0024] Figure 3 This is a schematic diagram of the test strip mechanism of the present invention. Figure 1 .

[0025] Figure 4 This is a schematic diagram of the test strip mechanism of the present invention. Figure 2 .

[0026] Figure 5 This is a schematic diagram of the test strip mechanism of the present invention. Figure 3 .

[0027] Figure 6 Schematic diagram of the replacement mechanism structure in this invention Figure 1 .

[0028] Figure 7 Schematic diagram of the replacement mechanism structure in this invention Figure 2 .

[0029] Figure 8 Schematic diagram of the replacement mechanism structure in this invention Figure 3 .

[0030] Figure 9 Schematic diagram of the replacement mechanism structure in this invention Figure 4 .

[0031] Figure 10 Schematic diagram of the replacement mechanism structure in this invention Figure 5 .

[0032] Figure 11 This is a schematic diagram of the detection mechanism of the present invention. Figure 1 .

[0033] Figure 12 This is a schematic diagram of the detection mechanism of the present invention. Figure 2 .

[0034] Reference numerals: 101-Equipment casing; 102-Inner support frame; 103-Bottom slide rail; 104-Bottom motor; 105-Bottom lead screw; 106-Bottom slide block; 107-Rotating motor; 108-Transmission belt; 109-Rotating platform; 110-End motor; 111-Moving lead screw; 112-Moving seat; 113-Electric cylinder; 114-Outer guide sleeve; 115-Inner sliding disc; 116-Turntable motor; 117-Placement turntable; 118-Placement block; 119-Test paper; 120-Slide turntable; 121-Connecting base; 122-Toggle lever; 123-Lower plate; 124-Actuating column; 125-Actuating slide; 126-Upper protruding column; 127-Removal door; 201-Export rack; 202-Collection box; 203-Export motor; 204-Export belt; 205-Fixed track; 206-Track motor; 2 07-Screw rod; 208-Detection seat; 209-Lifting frame; 210-Lifting plate; 211-Electric cylinder for picking up; 212-Connecting bracket; 213-Rotary motor; 214-Drive belt; 215-Square shaft; 216-Sliding shaft; 217-Modible sleeve; 218-End electric cylinder; 219-Fixed bracket; 220-Tilting bracket; 221-Fixed gear; 222-Modible rack; 223-Lower limit post ; 224-Upper limit post; 225-Clamping motor; 226-Clamping belt; 227-Lead screw shaft; 228-Clamping sleeve; 229-Camera bracket; 230-Camera; 231-Internal lead screw; 232-Lifting motor; 233-Transmission belt; 301-Processing box; 302-Wastewater pipe; 303-Detection box; 304-Solenoid valve; 305-Detection pipe; 306-Discharge box; 307-Discharge pipe. Detailed Implementation

[0035] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings.

[0036] Example: Reference Figures 1-12 A sampling and testing device for TMAH waste liquid recycling includes a housing 101 and a test strip mechanism for picking up test strips. The test strip mechanism includes an inner support frame 102 fixedly installed inside the housing 101. The housing 101 is provided with a replacement mechanism for replacing test strips and a testing mechanism for sampling and testing Normal photoresist developer waste liquid, PFA photoresist developer waste liquid, and dilute photoresist developer waste liquid in TMAH waste liquid.

[0037] like Figures 3-5As shown, the test paper mechanism also includes a bottom slide rail 103 and a bottom motor 104 fixedly installed on the inner support frame 102. A bottom lead screw 105 is rotatably installed on the bottom slide rail 103. The bottom lead screw 105 is fixedly installed with the motor shaft of the bottom motor 104. A bottom slide block 106 is slidably installed on the bottom slide rail 103. The bottom slide block 106 and the bottom lead screw 105 form a threaded transmission. A rotary motor 107 is fixedly installed on the bottom slide block 106. A rotary platform 109 is rotatably installed on the bottom slide block 106. The rotary motor 107 drives the rotary platform 109 to rotate through the transmission belt 108.

[0038] like Figures 3-5 As shown, the test paper mechanism also includes an end motor 110 fixedly installed on a rotating platform 109. A movable lead screw 111 is rotatably installed on the rotating platform 109. The movable lead screw 111 is fixedly installed with the motor shaft of the end motor 110. A movable seat 112 is slidably installed on the rotating platform 109. An electric cylinder 113 and an outer guide sleeve 114 are fixedly installed on the movable seat 112. An inner sliding disk 115 is slidably installed inside the outer guide sleeve 114. The inner sliding disk 115 is fixedly installed with the output end of the electric cylinder 113.

[0039] like Figures 3-5 As shown, the test strip mechanism also includes a placement turntable 117 rotatably mounted on the inner support frame 102. Multiple placement blocks 118 are fixedly mounted on the placement turntable 117, and test strips 119 are placed inside the placement blocks 118. A lower plate 123 is fixedly mounted below the placement turntable 117, and multiple actuating posts 124 are fixedly mounted on the lower plate 123. A connecting base 121 and a turntable motor 116 are fixedly mounted on the inner support frame 102. A sliding turntable 120 is rotatably mounted on the connecting base 121. The turntable motor 116 drives the sliding turntable 120 to rotate. A actuating groove 125 is provided on the sliding turntable 120, and the actuating groove 125 cooperates with the actuating posts 124.

[0040] like Figures 3-5 As shown, the test strip mechanism also includes multiple upper protrusions 126 fixedly installed on the lower plate 123, a lever 122 fixedly installed on the slide turntable 120, and an openable take-out door 127 provided on the device housing 101.

[0041] The bottom motor 104 drives the bottom lead screw 105 to rotate, and the bottom lead screw 105 drives the bottom slide block 106 to slide along the bottom slide rail 103. The rotation motor 107 rotates and drives the rotating platform 109 to rotate relative to the bottom slide block 106 through the transmission belt 108. The end motor 110 rotates and drives the moving lead screw 111 to rotate. The moving lead screw 111 drives the moving seat 112 to slide along the rotating platform 109. When the test paper 119 is put in, the take-out door 127 is opened. At this time, the outer guide sleeve 114 moves to the side of the take-out door 127. The test paper 119 is manually put into the outer guide sleeve 114. Then the electric cylinder 113 moves the outer guide sleeve 114 to the side of the placement block 118 on the placement turntable 117. The electric cylinder 113 extends and drives the inner sliding disk 115 to move outward, pushing the test paper 119 put into the outer guide sleeve 114 into the placement block 118, thus realizing the placement of the external test paper 119 into the placement block 118.

[0042] The turntable motor 116 drives the slide turntable 120 to rotate, which in turn drives the lever 122 and the actuating slide 125 to rotate counterclockwise. The lever 122 contacts the upper protrusion 126, and then the lever 122 pushes the upper protrusion 126, the lower plate 123, and the placement turntable 117 to rotate counterclockwise. After the lever 122 actuates the actuating slide 125 to rotate a certain angle, the actuating column 124 enters the actuating slide 125. When the lever 122 disengages from the upper protrusion 126, the actuating column 124 remains in the actuating slide 125. At this time, the sliding groove 125 continues to drive the sliding column 124, the lower plate 123 and the placement turntable 117 to rotate counterclockwise a short distance. Then the sliding column 124 leaves the sliding groove 125. At this time, the placement turntable 117 has just rotated forty-five degrees. When the lever 122 contacts the upper protrusion 126 again, the lever 122 and the sliding groove 125 work together to drive the placement turntable 117 to rotate another forty-five degrees. This process is repeated to rotate the designated test strip 119 to the side of the flipping bracket 220 according to different test waste liquids.

[0043] like Figures 6-10As shown, the replacement mechanism includes a fixed rail 205 fixedly installed on the inner support frame 102, a rail motor 206 fixedly installed on the fixed rail 205, a rail lead screw 207 rotatably installed on the fixed rail 205, the rail lead screw 207 being fixedly installed with the motor shaft of the rail motor 206, a detection seat 208 slidably installed on the fixed rail 205, the detection seat 208 and the rail lead screw 207 forming a threaded transmission, a lifting frame 209 fixedly installed on the detection seat 208, a lifting motor 232 fixedly installed on the lifting frame 209, an internal lead screw 231 rotatably installed inside the lifting frame 209, the lifting motor 232 driving the internal lead screw 231 to rotate via belt transmission, a lifting plate 210 slidably installed on the lifting frame 209, the lifting plate 210 and the internal lead screw 231 forming a threaded transmission, a camera bracket 229 fixedly installed on the inner support frame 102, and a camera 230 fixedly installed on the camera bracket 229.

[0044] like Figures 6-10 As shown, the replacement mechanism also includes a picking cylinder 211 and a connecting bracket 212 fixedly mounted on the lifting plate 210. A rotary motor 213 is fixedly mounted on the connecting bracket 212, and a sliding shaft 216 is provided on the connecting bracket 212. A square shaft 215 is slidably mounted inside the sliding shaft 216. The square shaft 215 is rotatably mounted to the connecting bracket 212. The rotary motor 213 drives the square shaft 215 to rotate via a drive belt 214. A movable sleeve 2 is rotatably mounted on the output end of the picking cylinder 211. 17. An end electric cylinder 218 is fixedly installed on the movable sleeve 217. The sliding shaft 216 is rotatably installed on the movable sleeve 217. A transmission belt 233 is wound around the sliding shaft 216 and the movable sleeve 217. A delivery frame 201 is fixedly installed on the inner support frame 102. A collection box 202 is fixedly installed inside the equipment shell 101. A delivery motor 203 is fixedly installed on the delivery frame 201. A delivery belt 204 is rotatably installed on the delivery frame 201. The delivery motor 203 drives the delivery belt 204 to rotate.

[0045] like Figures 6-10 As shown, the replacement mechanism also includes an end electric cylinder 218 fixedly installed on the movable sleeve 217. A fixed bracket 219 is fixedly installed on the end electric cylinder 218. A flip bracket 220 is rotatably installed on the fixed bracket 219. A fixed gear 221 is fixedly installed on the flip bracket 220. A movable rack 222 is fixedly installed on the output end of the end electric cylinder 218. The movable rack 222 meshes with the fixed gear 221. An upper limit post 224 and a lower limit post 223 are fixedly installed on the fixed bracket 219.

[0046] like Figures 6-10As shown, the replacement mechanism also includes a clamping motor 225 fixedly mounted on the flipping bracket 220. Two lead screw shafts 227 are rotatably mounted on the flipping bracket 220. The lead screw shafts 227 are provided with two sections of threads with opposite directions. The clamping motor 225 drives the lead screw shafts 227 to rotate through the clamping belt 226. Two clamping sleeves 228 are slidably mounted on the flipping bracket 220. The clamping sleeves 228 and the threads with opposite directions on the lead screw shafts 227 form a threaded transmission.

[0047] The track motor 206 drives the track screw 207 to rotate, and the track screw 207 causes the detection seat 208 to slide along the fixed track 205. The lifting motor 232 drives the internal screw 231 to rotate via belt drive, and the internal screw 231 causes the lifting plate 210 to rise and fall along the lifting frame 209. The rotary motor 213 drives the square shaft 215 and the sliding shaft 216 to rotate via the drive belt 214. The sliding shaft 216 drives the movable sleeve 217 to rotate relative to the output end of the picking cylinder 211 via the transmission belt 233. The picking cylinder 211 extends via a telescopic belt. The movable sleeve 217, the end electric cylinder 218, and the flipping bracket 220 extend or retract. When the sliding shaft 216 extends, the sliding shaft 216 slides relative to the square shaft 215. The extension and retraction of the end electric cylinder 218 drives the movable rack 222 to move. The movable rack 222 drives the fixed gear 221 and the flipping bracket 220 to rotate relative to the fixed bracket 219. The clamping motor 225 drives the lead screw shaft 227 to rotate through the clamping belt 226. The rotation of the lead screw shaft 227 drives the clamping sleeve 228 to move outward or inward simultaneously through the threaded transmission.

[0048] When taking the test strip 119 from the turntable 117, the clamping sleeve 228 first moves to the side of the test strip 119 next to the flipping bracket 220. Then, both clamping sleeves 228 move inward simultaneously to clamp the test strip 119 in the placement block 118. Then, the electric cylinder 211 retracts, causing the flipping bracket 220 to move away from the placement block 118, thereby pulling the test strip 119 out of the placement block 118. Then, the flipping bracket 220 rotates 90 degrees, so that the test strip 119 is in a vertical position. Then, through the rotation of the movable sleeve 217, the movement of the fixed bracket 219, the lifting of the lifting plate 210, and the movement of the detection seat 208, the test strip 119 is moved to the designated detection position above the detection box 303. Then, the clamping sleeve 228 releases the test strip 119 and places the designated test strip 119 into the designated detection position of the detection box 303.

[0049] After the test is completed, the completed test strip 119 is taken out from the processing box 301 through the clamping sleeve 228. Then, the test strip 119 is placed on the delivery belt 204. The delivery motor 203 drives the delivery belt 204 to rotate, and the delivery belt 204 sends the test strip 119 into the collection box 202 for centralized collection.

[0050] like Figure 11 , Figure 12 As shown, the testing mechanism includes a processing box 301 fixedly installed inside the equipment housing 101. A wastewater pipe 302 is provided on the processing box 301, and multiple processing units are provided on the wastewater pipe 302. A testing box 303 is fixedly installed inside the equipment housing 101, and three testing slots are provided on the testing box 303. Three testing pipes 305 are provided on the wastewater pipe 302, and the testing pipes 305 are respectively in three different processing stages. Three solenoid valves 304 are fixedly installed below the testing box 303, and the three testing pipes 305 are respectively connected to the three solenoid valves 304. A discharge box 306 is fixedly installed on the solenoid valves 304, and three solenoid valves are provided inside the discharge box 306. A discharge pipe 307 is fixedly installed on the discharge box 306.

[0051] The main byproducts of semiconductor process development equipment include waste liquid of Normal photoresist developer, waste liquid of PFA photoresist developer, and waste liquid of dilute photoresist developer. In order to meet the requirements of cost reduction and efficiency improvement and environmental protection, these byproducts are treated by multiple processing units on the processing tank 301 and wastewater pipe 302 before being discharged. Waste liquids from different processing stages can be extracted by three detection pipes 305 connected to wastewater pipes 302 at different processing stages. When the solenoid valve 304 connected to the detection pipe 305 is opened, the waste liquid in the wastewater pipe 302 flows into the detection tank in the detection tank 303. Then the solenoid valve 304 is closed, and the waste liquid reacts with the test paper 119 in the detection tank in the detection tank 303. The test paper 119 is used to detect the specified components in the waste liquid. After the detection is completed, the solenoid valve in the discharge tank 306 is opened, and the waste liquid is discharged through the discharge pipe 307.

[0052] Working principle: The bottom motor 104 drives the bottom lead screw 105 to rotate, and the bottom lead screw 105 drives the bottom slide block 106 to slide along the bottom slide rail 103. The rotation motor 107 rotates and drives the rotating platform 109 to rotate relative to the bottom slide block 106 through the transmission belt 108. The end motor 110 rotates and drives the moving lead screw 111 to rotate. The moving lead screw 111 drives the moving seat 112 to slide along the rotating platform 109. When the test paper 119 is put in, the take-out door 127 is opened. At this time, the outer guide sleeve 114 moves to the side of the take-out door 127. The test paper 119 is manually put into the outer guide sleeve 114. Then the electric cylinder 113 moves the outer guide sleeve 114 to the side of the placement block 118 on the placement turntable 117. The electric cylinder 113 extends and drives the inner sliding disk 115 to move outward, pushing the test paper 119 put into the outer guide sleeve 114 into the placement block 118, thus realizing the placement of the external test paper 119 into the placement block 118. The turntable motor 116 drives the slide turntable 120 to rotate, which in turn drives the lever 122 and the actuating slide 125 to rotate counterclockwise. The lever 122 contacts the upper protrusion 126, and then the lever 122 pushes the upper protrusion 126, the lower plate 123, and the placement turntable 117 to rotate counterclockwise. After the lever 122 actuates the actuating slide 125 to rotate a certain angle, the actuating column 124 enters the actuating slide 125. When the lever 122 disengages from the upper protrusion 126, the actuating column 124 remains in the actuating slide 125. At this time, the sliding groove 125 continues to drive the sliding column 124, the lower plate 123 and the placement turntable 117 to rotate counterclockwise a short distance. Then the sliding column 124 leaves the sliding groove 125. At this time, the placement turntable 117 has just rotated forty-five degrees. When the lever 122 contacts the upper protrusion 126 again, the lever 122 and the sliding groove 125 work together to drive the placement turntable 117 to rotate another forty-five degrees. This process is repeated to rotate the designated test strip 119 to the side of the flipping bracket 220 according to different test waste liquids.

[0053] The track motor 206 drives the track screw 207 to rotate, and the track screw 207 causes the detection seat 208 to slide along the fixed track 205. The lifting motor 232 drives the internal screw 231 to rotate via belt drive, and the internal screw 231 causes the lifting plate 210 to rise and fall along the lifting frame 209. The rotary motor 213 drives the square shaft 215 and the sliding shaft 216 to rotate via the drive belt 214. The sliding shaft 216 drives the movable sleeve 217 to rotate relative to the output end of the picking cylinder 211 via the transmission belt 233. The picking cylinder 211 extends via a telescopic belt. The movable sleeve 217, the end electric cylinder 218, and the flipping bracket 220 extend or retract. When the sliding shaft 216 extends, the sliding shaft 216 slides relative to the square shaft 215. The extension and retraction of the end electric cylinder 218 drives the movable rack 222 to move. The movable rack 222 drives the fixed gear 221 and the flipping bracket 220 to rotate relative to the fixed bracket 219. The clamping motor 225 drives the lead screw shaft 227 to rotate through the clamping belt 226. The rotation of the lead screw shaft 227 drives the clamping sleeve 228 to move outward or inward simultaneously through the threaded transmission. When taking the test strip 119 from the turntable 117, the clamping sleeve 228 first moves to the side of the test strip 119 next to the flipping bracket 220. Then, both clamping sleeves 228 move inward simultaneously to clamp the test strip 119 in the placement block 118. Then, the electric cylinder 211 retracts, causing the flipping bracket 220 to move away from the placement block 118, thereby pulling the test strip 119 out of the placement block 118. Then, the flipping bracket 220 rotates 90 degrees, so that the test strip 119 is in a vertical position. Then, through the rotation of the movable sleeve 217, the movement of the fixed bracket 219, the lifting of the lifting plate 210, and the movement of the detection seat 208, the test strip 119 is moved to the designated detection position above the detection box 303. Then, the clamping sleeve 228 releases the test strip 119 and places the designated test strip 119 into the designated detection position of the detection box 303.

[0054] The main byproducts of semiconductor process development equipment include waste liquid of Normal photoresist developer, waste liquid of PFA photoresist developer, and waste liquid of dilute photoresist developer. In order to meet the requirements of cost reduction and efficiency improvement and environmental protection, these byproducts are treated by multiple processing units on the processing tank 301 and wastewater pipe 302 before being discharged. Waste liquids from different processing stages can be extracted by three detection pipes 305 connected to wastewater pipes 302 at different processing stages. When the solenoid valve 304 connected to the detection pipe 305 is opened, the waste liquid in the wastewater pipe 302 flows into the detection tank in the detection tank 303. Then the solenoid valve 304 is closed, and the waste liquid reacts with the test paper 119 in the detection tank in the detection tank 303. The test paper 119 is used to detect the specified components in the waste liquid. After the detection is completed, the solenoid valve in the discharge tank 306 is opened, and the waste liquid is discharged through the discharge pipe 307. After the test is completed, the completed test strip 119 is taken out from the processing box 301 through the clamping sleeve 228. Then, the test strip 119 is placed on the delivery belt 204. The delivery motor 203 drives the delivery belt 204 to rotate, and the delivery belt 204 sends the test strip 119 into the collection box 202 for centralized collection.

[0055] The test strips used in this device are not a single type of test strip, but rather a combination of three different types of test strips with different functions, based on the characteristics of Normal photoresist developer waste, PFA photoresist developer waste, and dilute photoresist developer waste. pH test strips are used to distinguish the total alkalinity of TMAH. TMAH is a strong base, and its 1% aqueous solution has a pH value of approximately 12.9. The residual concentration of TMAH varies in different types of developer waste, and precise pH test strips can preliminarily distinguish the levels of total alkalinity. Fluoride ion test strips are used to distinguish fluoride content. Some photoresist developer waste contains fluoride ions. The principle of fluoride ion test strips is that fluoride ions can cause a specific colorimetric system to change color, and they are made using chromatography paper as a carrier. Metal ion test strips are used to distinguish the differences in metal impurities introduced by photoresist components. The metal ion content in TMAH developer directly affects chip performance and yield. Different types of photoresist introduce different types and amounts of metal ions during the development process, which can be distinguished using metal ion test strips.

[0056] The core differences among the three types of waste liquids lie in their photoresist composition, metal ion content, fluorine content, and residual TMAH concentration. These differences are achieved through combined detection and their respective independent colorimetric reactions. TMAH is a strong base that completely ionizes in water. The pH test paper reacts with the acid-base indicator in the waste liquid via a proton transfer reaction, causing a change in the indicator's molecular structure and resulting in a color change. The degree of color change is related to the OH⁻ concentration in the waste liquid. Different types of developer waste liquids exhibit varying degrees of TMAH consumption, leading to differences in residual alkalinity, which the pH test paper can use to provide a preliminary distinction.

[0057] Fluoride ion test strips are typically based on the principle of fluoride ions forming stable complexes with metal ions in a colorimetric system. The test strip is loaded with a specific colorimetric reagent-metal ion complex. When the waste liquid contains fluoride ions, the fluoride ions form a more stable complex with the metal ions, releasing the colorimetric reagent and causing the test strip color to change from one color to another. The intensity of the color change is related to the fluoride ion concentration.

[0058] Metal ion test strips are based on coordination chemistry principles, with specific organic color-developing reagents loaded onto the strips. When metal ions in waste liquid come into contact with the color-developing reagents on the strips, they form metal-ligand complexes with characteristic colors, producing a characteristic color reaction. Different metal ions form complexes with different color-developing reagents, resulting in different colors, which can be used for semi-quantitative determination of the presence and approximate concentration range of specific metal ions.

[0059] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the present invention based on the technical solution and inventive concept of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A sampling and testing device for TMAH waste liquid recycling, comprising a housing and a test strip mechanism for picking up test strips, characterized in that: The test strip mechanism includes an inner support frame fixedly installed inside the equipment housing. The equipment housing is provided with a replacement mechanism for replacing the test strip and a detection mechanism for sampling and detecting the Normal photoresist developer waste liquid, PFA photoresist developer waste liquid, and dilute photoresist developer waste liquid in the TMAH waste liquid.

2. The sampling and detection device for TMAH waste liquid recovery according to claim 1, characterized in that: The test strip mechanism also includes a bottom slide rail and a bottom motor fixedly installed on the inner support frame. A bottom lead screw is rotatably installed on the bottom slide rail and is fixedly installed with the motor shaft of the bottom motor. A bottom slide block is slidably installed on the bottom slide rail and forms a threaded transmission with the bottom lead screw. A rotating motor is fixedly installed on the bottom slide block and a rotating platform is rotatably installed on the bottom slide block. The rotating motor drives the rotating platform to rotate through a transmission belt.

3. The sampling and detection device for TMAH waste liquid recovery according to claim 2, characterized in that: The test strip mechanism also includes an end motor fixedly installed on a rotating platform, a movable lead screw rotatably installed on the rotating platform, the movable lead screw being fixedly installed with the motor shaft of the end motor, a movable seat slidably installed on the rotating platform, an electric cylinder and an outer guide sleeve being fixedly installed on the movable seat, an inner sliding disk being slidably installed inside the outer guide sleeve, and the inner sliding disk being fixedly installed with the output end of the electric cylinder.

4. The sampling and detection device for TMAH waste liquid recovery according to claim 3, characterized in that: The test strip mechanism also includes a placement turntable rotatably mounted on an inner support frame. Multiple placement blocks are fixedly mounted on the placement turntable, and test strips are placed inside the placement blocks. A lower plate is fixedly mounted below the placement turntable, and multiple actuating posts are fixedly mounted on the lower plate. A connecting base and a turntable motor are fixedly mounted on the inner support frame. A sliding turntable is rotatably mounted on the connecting base. The turntable motor drives the sliding turntable to rotate. The sliding turntable is provided with actuating grooves, which cooperate with the actuating posts.

5. The sampling and detection device for TMAH waste liquid recovery according to claim 4, characterized in that: The test strip mechanism also includes multiple upper protruding pillars fixedly installed on the lower plate, a lever fixedly installed on the slide turntable, and an openable take-out door on the device housing.

6. The sampling and detection device for TMAH waste liquid recovery according to claim 1, characterized in that: The replacement mechanism includes a fixed rail fixedly installed on an inner support frame, a rail motor fixedly installed on the fixed rail, a rail screw rotatably installed on the fixed rail, the rail screw being fixedly installed to the motor shaft of the rail motor, a detection seat slidably installed on the fixed rail, the detection seat and the rail screw forming a threaded transmission, a lifting frame fixedly installed on the detection seat, a lifting motor fixedly installed on the lifting frame, an internal screw rotatably installed inside the lifting frame, the lifting motor driving the internal screw to rotate via belt transmission, a lifting plate slidably installed on the lifting frame, the lifting plate and the internal screw forming a threaded transmission, a camera bracket fixedly installed on the inner support frame, and a camera fixedly installed on the camera bracket.

7. A sampling and detection device for TMAH waste liquid recovery according to claim 6, characterized in that: The replacement mechanism also includes a pick-up electric cylinder and a connecting bracket fixedly installed on the lifting plate. A rotary motor is fixedly installed on the connecting bracket, and a sliding shaft is provided on the connecting bracket. A square shaft is slidably installed inside the sliding shaft. The square shaft is rotatably installed with the connecting bracket. The rotary motor drives the square shaft to rotate through a drive belt. A movable sleeve is rotatably installed on the output end of the pick-up electric cylinder. An end electric cylinder is fixedly installed on the movable sleeve. The sliding shaft is rotatably installed with the movable sleeve. A transmission belt is wound around the sliding shaft and the movable sleeve. A delivery frame is fixedly installed on the inner support frame. A collection box is fixedly installed inside the equipment shell. A delivery motor is fixedly installed on the delivery frame. A delivery belt is rotatably installed on the delivery frame. The delivery motor drives the delivery belt to rotate.

8. A sampling and detection device for TMAH waste liquid recovery according to claim 7, characterized in that: The replacement mechanism also includes an end electric cylinder fixedly installed on the movable sleeve. A fixed bracket is fixedly installed on the end electric cylinder. A flipping bracket is rotatably installed on the fixed bracket. A fixed gear is fixedly installed on the flipping bracket. A movable rack is fixedly installed on the output end of the end electric cylinder. The movable rack meshes with the fixed gear. An upper limit post and a lower limit post are fixedly installed on the fixed bracket.

9. A sampling and detection device for TMAH waste liquid recovery according to claim 8, characterized in that: The replacement mechanism also includes a clamping motor fixedly mounted on a flipping bracket. Two lead screw shafts are rotatably mounted on the flipping bracket. The lead screw shafts are provided with two sections of threads with opposite directions. The clamping motor drives the lead screw shafts to rotate through a clamping belt. Two clamping sleeves are slidably mounted on the flipping bracket. The clamping sleeves and the threads with opposite directions on the lead screw shafts form a threaded transmission.

10. A sampling and detection device for TMAH waste liquid recovery according to claim 1, characterized in that: The detection mechanism includes a processing box fixedly installed inside the equipment casing. The processing box is equipped with a wastewater pipe, and multiple processing units are installed on the wastewater pipe. A detection box is fixedly installed inside the equipment casing. The detection box is equipped with three detection slots. Three detection pipes are installed on the wastewater pipe. The detection pipes are in three different processing stages. Three solenoid valves are fixedly installed below the detection box. The three detection pipes are connected to the three solenoid valves respectively. A discharge box is fixedly installed on the solenoid valves. The discharge box is equipped with three solenoid valves and a discharge pipe is fixedly installed on the discharge box.

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