A method for identifying chip layout necking structures and a computer program product

Abstract

This application discloses a method for identifying necking structures in a chip layout and a computer program product, relating to the field of semiconductor manufacturing technology. The method for identifying necking structures in a chip layout includes: acquiring a target layout and setting judgment rules based on the geometric features of the necking structure to distinguish different necking structure types; secondly, identifying parallel opposite edges in the target layout, and then initially screening candidate necking structures using two conditions: a preset included angle range and non-overlapping adjacent edges, excluding structures with non-necking structure features such as angle deviation or overlapping adjacent edges; finally, extracting the geometric features of the candidate necking structures and matching them with the set judgment rules, outputting the candidate necking structures that match the judgment rules, thus achieving targeted identification of necking structures and improving the accuracy of necking structure identification.

Description

Technical Field

[0001] This application belongs to the field of semiconductor manufacturing technology, and in particular relates to a method for identifying chip layout necking structures and a computer program product. Background Technology

[0002] In the semiconductor chip manufacturing process, Design Rule Check (DRC) and Mask Rule Check (MRC) target the chip design layout and mask layout, respectively, to check the compliance of parameters such as the size and positional relationship of each layer of graphics, thus avoiding defects such as short circuits and open circuits in subsequent production. As the complexity of the layout increases, the necking structure formed by the difference in density between signal lead-out and wiring areas is prone to imaging deviations in the photolithography stage and over-etching in the etching stage. This can lead to local high resistance, affecting current transmission and even causing signal interruption. Therefore, rule checking of the necking structure has become an important direction for DRC and MRC rule optimization.

[0003] Currently, DRC and MRC perform rule checks on necking structures by setting minimum line width or minimum spacing, filtering out all graphic structures whose line width or spacing does not meet the threshold. However, this rule-based checking method based on minimum line width or minimum spacing cannot specifically identify necking structures, and will also filter out non-necking structures such as rectangles and T-shapes, resulting in low accuracy in identifying necking structures. Summary of the Invention

[0004] This application provides a method for identifying necking structures in a chip layout and a computer program product that can improve the accuracy of necking structure identification.

[0005] A first aspect of this application provides a method for identifying a chip layout necking structure, comprising: Obtain the target map and set the judgment rules. The judgment rules include the distinguishing conditions for the necking structure type based on the geometric features of the necking structure. The geometric features include the directional relationship of the adjacent sides of the parallel opposite sides in the necking structure. The necking structure type includes at least one of the four-sided necking structure, the three-sided necking structure, and the two-sided necking structure. Identify the parallel opposite edges in the target map, wherein the parallel opposite edges include a first edge and a second edge that have a parallel relationship; From the structures containing the parallel opposite sides, select candidate necking structures in which the angle between the first side and its adjacent side and the angle between the second side and its adjacent side are both within a preset angle range, and the adjacent side of the first side and the adjacent side of the second side do not coincide. Obtain the geometric features of the candidate necking structure; When the geometric features of the candidate necking structure match the determination rule, the candidate necking structure is marked as the corresponding necking structure type and then output.

[0006] A second aspect of this application provides a device for identifying chip layout necking structures, comprising: The rule setting module is used to obtain the target map and set the judgment rules. The judgment rules include the distinguishing conditions for the necking structure type based on the geometric features of the necking structure. The geometric features include the directional relationship of the adjacent sides of the parallel opposite sides in the necking structure. The necking structure type includes at least one of the four-sided necking structure, the three-sided necking structure, and the two-sided necking structure. The identification module is used to identify the parallel opposite edges in the target map, the parallel opposite edges including a first edge and a second edge that have a parallel relationship; The filtering module is used to filter out candidate necking structures from the structures containing the parallel opposite sides, where the angle between the first side and its adjacent side and the angle between the second side and its adjacent side are both within a preset angle range, and the adjacent side of the first side and the adjacent side of the second side do not coincide. The acquisition module is used to acquire the geometric features of the candidate necking structure; The determination module is used to mark the candidate necking structure as the corresponding necking structure type and output it when the geometric features of the candidate necking structure match the determination rule.

[0007] A third aspect of the embodiments of this application provides a computer device, the device comprising: a memory and a program or instructions stored in the memory and executable on a processor, wherein when the program or instructions are executed by the processor, a method for identifying a chip layout necking structure as provided in any of the embodiments of this application described above is implemented.

[0008] A fourth aspect of the embodiments of this application provides a readable storage medium storing a program or instructions, which, when executed by a processor, implements a chip layout necking structure identification method as provided in any of the embodiments of this application described above.

[0009] A fifth aspect of the embodiments of this application provides a computer program product, wherein when the instructions in the computer program product are executed by the processor of an electronic device, the electronic device performs a chip layout necking structure identification method as provided in any of the embodiments of this application described above.

[0010] The technical solution provided in this application has at least the following beneficial effects: In the chip layout necking structure identification method provided in this application embodiment, a target layout is obtained and a judgment rule is set to distinguish different necking structure types based on the geometric features of the necking structure. Next, parallel opposite edges are identified in the target layout, and candidate necking structures are initially screened using two conditions: a preset included angle range and non-overlapping adjacent edges. Structures with non-necking structure features such as angle deviation or overlapping adjacent edges are excluded. Finally, the geometric features of the candidate necking structures are extracted and matched with the set judgment rule, and the candidate necking structures matching the judgment rule are output. This achieves targeted identification of necking structures and improves the accuracy of necking structure identification. Attached Figure Description

[0011] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a flowchart illustrating a method for identifying a chip layout necking structure according to an embodiment of this application; Figure 2 This is a schematic diagram of the adjacent side direction provided in an embodiment of this application; Figure 3 This is a schematic diagram of a candidate necking structure provided in an embodiment of this application; Figure 4 This is a schematic diagram of the output form of the candidate necking structure provided in the embodiments of this application; Figure 5a This is a schematic diagram of the four-sided necking structure provided in the embodiments of this application; Figure 5b This is a schematic diagram of the three-sided necking structure provided in the embodiments of this application; Figure 5c This is a schematic diagram of a double-sided necking structure provided in an embodiment of this application; Figure 5d This is a schematic diagram of another double-sided necking structure provided in the embodiments of this application; Figure 5e This is a schematic diagram of the necking structure provided in the embodiments of this application; Figure 6a This is a schematic diagram of a misaligned quadrilateral necking structure provided in an embodiment of this application; Figure 6b This is a schematic diagram of another misaligned quadrilateral necking structure provided in the embodiments of this application; Figure 7a This is a schematic diagram of a three-sided necking structure of the double-sided same-side misalignment type provided in the embodiments of this application; Figure 7bThis is a schematic diagram of a three-sided necking structure with double-sided misalignment provided in an embodiment of this application; Figure 7c This is a schematic diagram of a quadrilateral necking structure with double-sided misalignment provided in an embodiment of this application; Figure 8 This is a schematic diagram of the structure of a chip layout necking structure identification device provided in an embodiment of this application; Figure 9 This is a schematic diagram of a chip layout necking structure identification device provided in an embodiment of this application. Detailed Implementation

[0013] The features and exemplary embodiments of various aspects of this application will be described in detail below. To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are intended to explain this application only and are not intended to limit this application. For those skilled in the art, this application can be implemented without some of these specific details. The following description of the embodiments is only intended to provide a better understanding of this application by illustrating examples of this application.

[0014] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.

[0015] It should be noted that the acquisition, storage, use, and processing of data in the technical solution of this application all comply with the relevant provisions of national laws and regulations. In the embodiments of this application, certain existing industry solutions such as software, components, and models may be mentioned. These should be considered exemplary, intended only to illustrate the feasibility of implementing the technical solution of this application, and do not imply that the applicant has already used or necessarily used such solutions.

[0016] First, the terms and concepts involved in one or more embodiments of this application will be explained.

[0017] Neckback structure refers to a graphic structure in chip layout where the line width or spacing is reduced due to differences in the density of signal lead-out and wiring areas.

[0018] Design rule checking is a compliance testing technology for design layouts. It verifies whether the design layout meets the actual chip manufacturing process requirements by checking parameters such as graphic size and positional relationships.

[0019] Mask rule checking is a compliance testing technology for mask layouts. It verifies whether the graphic dimensions, positional relationships, and other parameters in the mask layout meet the requirements of mask manufacturing processes by checking them.

[0020] Parallel opposite sides refer to two sides that are parallel to each other.

[0021] The inspection parameters refer to the screening conditions for specific necking structures, including parameters such as necking structure type, spacing or line width.

[0022] The judgment rule refers to the identification standard based on the geometric characteristics of the necking structure, including the distinguishing conditions for different types of necking structures based on the geometric characteristics of the necking structure.

[0023] Geometric features refer to the spatial geometric properties of a necked structure, including the directional relationship between adjacent sides of parallel opposite sides in the necked structure.

[0024] In the semiconductor chip manufacturing process, Design Rule Check (DRC) and Mask Rule Check (MRC) target the chip design layout and mask layout, respectively, to check the compliance of parameters such as the size and positional relationship of each layer of graphics, avoiding defects such as short circuits and open circuits in subsequent production. As the layout complexity increases, the necking structure formed by the difference in density between signal lead-out and wiring areas is prone to imaging deviations in the photolithography stage and over-etching in the etching stage, which may form local high resistance affecting current transmission or even causing signal interruption. Therefore, rule checking of the necking structure has become an important direction for DRC and MRC rule optimization.

[0025] Currently, DRC and MRC perform rule checks on necking structures by setting minimum line width or minimum spacing, filtering out all graphic structures whose line width or spacing does not meet the threshold. However, this rule-based checking method based on minimum line width or minimum spacing cannot specifically identify necking structures, and will also filter out non-necking structures such as rectangles and T-shapes, resulting in low accuracy in identifying necking structures.

[0026] To address the aforementioned technical problems, this application provides a method, apparatus, medium, and product for identifying necking structures in chip layouts. In the chip layout necking structure identification method provided in this application embodiment, this application establishes a judgment rule based on geometric features to distinguish different necking structures. After filtering out candidate necking structures that meet the conditions of included angle and non-overlapping adjacent sides, feature matching is performed with the judgment rule, thereby improving the accuracy of necking structure identification.

[0027] The method for identifying chip layout necking structures provided in this application embodiment is described below. In practical applications, the execution subject of the chip layout necking structure identification method in this application embodiment can be a terminal device, such as a desktop computer, laptop computer, etc., or a remote device like a server. Of course, this application embodiment can also adopt an execution subject in the form of software, such as a client or software program installed on a terminal device. The specific type of execution subject corresponding to the technical solution provided in this application embodiment is not strictly limited here, and can be flexibly selected according to the actual application scenario and actual needs.

[0028] The following describes specific embodiments of a chip layout necking structure identification method, apparatus, computer device, storage medium, and computer program product provided by this application. First, a method for identifying a chip layout necking structure is introduced.

[0029] Figure 1 This is a schematic flowchart illustrating a method for identifying a chip layout necking structure provided in an embodiment of this application. Figure 1 As shown, the method includes steps S100 to S104.

[0030] S100: Obtain the target layout and set the judgment rules. The judgment rules include the distinction conditions for differentiating the necking structure type based on the geometric features of the necking structure. The geometric features include the directional relationship of adjacent sides of parallel opposite sides in the necking structure. The necking structure type includes at least one of four-sided necking structure, three-sided necking structure, and two-sided necking structure.

[0031] S101: Identify the parallel opposite edges in the target map, the parallel opposite edges including a first edge and a second edge that have a parallel relationship.

[0032] S102: From the structures containing the parallel opposite sides, select candidate necking structures in which the angle between the first side and its adjacent side and the angle between the second side and its adjacent side are both within a preset angle range, and the adjacent side of the first side and the adjacent side of the second side do not coincide.

[0033] S103: Obtain the geometric features of the candidate necking structure.

[0034] S104: When the geometric features of the candidate necking structure match the determination rule, the candidate necking structure is marked as the corresponding necking structure type and then output.

[0035] In the above-mentioned rule-based inspection method for necking structures, this application first presets a judgment rule based on the geometric features of the necking structure to distinguish different types of necking structures. Then, based on the preset angle range and the condition that adjacent sides do not overlap, the preliminary screening of candidate necking structures is completed. Then, the targeted identification of necking structures can be achieved by matching the geometric features with the distinction conditions of specific necking structure types, thereby improving the accuracy of necking structure identification.

[0036] For example, the chip layout necking structure identification method provided in this application embodiment can be applied to the production line of a semiconductor manufacturing company to perform targeted rule checks on specific necking structures of chip design layouts and / or chip mask layouts. In practical applications, the above-mentioned chip layout necking structure identification method sequentially completes the judgment rule setting, parallel edge identification, candidate necking structure screening, geometric feature matching, and result output for the target layout in the production process, obtaining the necking structure identification result, which is then stored in a data storage device. Operators can perform various mathematical analyses or quality assessments based on the necking structure identification result, such as statistically analyzing the distribution patterns of different necking structure types, analyzing the process compliance of layout design, and assessing the compliance risks of mask layout manufacturing.

[0037] It should be noted that the application scenarios described in the above embodiments of this application are for the purpose of more clearly illustrating the technical solutions of the embodiments of this application, and do not constitute a limitation on the technical solutions provided by the embodiments of this application. Those skilled in the art will understand that with the emergence of new application scenarios, the technical solutions provided by the embodiments of this application are also applicable to similar technical problems. The chip layout necking structure identification method provided in the embodiments of this application can be applied to various application scenarios that require the identification of necking structures.

[0038] In step S100, in order to accurately identify and filter out the necking structures in the target layout, this application needs to obtain the target layout and set the judgment rules.

[0039] Specifically, the target layout is the design layout or mask layout to be checked for necking structure rules. This application sets the judgment rules corresponding to the necking structure to be identified. The judgment rules include the distinction conditions for different necking structure types based on the geometric features of the necking structure, and the geometric features include the directional relationship between adjacent sides of parallel opposite sides in the necking structure.

[0040] It should be noted that this application does not limit the specific method of setting the judgment rules, which can be set according to actual needs, such as the default judgment rules built into the system. In order to improve the targeting and efficiency of neck retraction structure recognition, in one or more embodiments of this application, this application can respond to the user's neck retraction structure recognition request, obtain the inspection parameters input by the user, and then set the judgment rules according to the inspection parameters. This application does not limit the specific content of the inspection parameters and judgment rules, which can be set according to actual needs. For example, the inspection parameters may include the neck retraction structure type of the neck retraction structure to be identified, the projection length threshold corresponding to the common projection length of the parallel opposite sides, the line width threshold or spacing threshold corresponding to the distance between the parallel opposite sides, etc. Correspondingly, the judgment rules are supplemented with distinguishing conditions of geometric features such as the common projection length of the parallel opposite sides; the common projection length refers to the length of the overlapping part of the projection of the first side and the second side when the first side and the second side are projected in the direction perpendicular to the parallel opposite sides.

[0041] The direction of adjacent edges refers to the orientation determined by the traversal order of the graph during rule-based inspection. This application does not restrict the specific traversal order, such as clockwise or counterclockwise. Figure 2 As shown, the arrows point to the directions used to indicate the edges. After identifying the parallel opposite edges, when traversing the figure clockwise, the starting and ending points of the first edge L1, the second edge L2, the first edge adjacent edge e1, the first edge adjacent edge e3, the second edge adjacent edge e2, and the second edge adjacent edge e4 are determined. Then, based on the starting and ending points, the orientation of each edge is obtained as the direction.

[0042] In step S101, in order to subsequently select candidate necking structures that meet the judgment rules, this application needs to identify parallel opposite edges in the target layout. In order to facilitate the distinction and description of the two edges in the parallel opposite edges, this application designates one edge as the first edge and the other edge as the second edge. This marking method does not affect the subsequent identification of necking structures.

[0043] Specifically, the edge features of all graphics in the target map are extracted, and based on the geometric features such as the direction and slope of the edges, two edges that are parallel to each other are matched from the edges of the graphics and these two edges are taken as parallel opposite edges.

[0044] In step S102, in order to subsequently select candidate necking structures that match the judgment rules in step S100, this application first needs to select candidate necking structures from the structures containing parallel opposite sides, where the angle between the first side and its adjacent side and the angle between the second side and its adjacent side are both within the preset angle range, and the adjacent side of the first side and the adjacent side of the second side do not coincide.

[0045] Specifically, the angle between the first side and its adjacent side and the angle between the second side and its adjacent side are calculated respectively. It is determined whether the angles are within the preset angle range and whether the adjacent side of the first side coincides with the adjacent side of the second side. The graphic structure that satisfies the angle condition and the condition that the adjacent sides do not coincide is determined as the candidate necking structure.

[0046] It should be noted that, because the geometric characteristics of a necking structure are that parallel opposite sides are approximately perpendicular to adjacent sides, using 90° for judgment may lead to missed necking structures due to actual layout drawing or process deviations. Therefore, a preset angle range can be set to adapt to the geometric characteristics of the actual necking structure. Of course, this application does not limit the specific value of the preset angle range; it can be set according to actual needs, such as a preset angle range of 88° to 92°. Figure 3 As shown, the first side L1 and the second side L2 of the candidate necking structure 201 are parallel opposite sides that are parallel to each other. The angle between the first side and its two adjacent sides (e1 and e3) and the angle between the second side and its two adjacent sides (e2 and e4) are both within the preset angle range.

[0047] In step S103, in order to output candidate necking structures that match the judgment rules, this application needs to obtain the geometric features of the candidate necking structures.

[0048] It should be noted that this application does not limit the extraction dimension of geometric features. In addition to the directional relationship of adjacent sides of parallel sides, geometric parameters such as the common projection length, line width or spacing of parallel sides can be added according to actual needs. The extraction dimension can correspond to the distinguishing conditions in the judgment rules.

[0049] In step S104, in order to achieve accurate identification and output of the necking structure to be identified, this application needs to match the geometric features of the candidate necking structure with the judgment rule and output the candidate necking structure that matches the judgment rule.

[0050] Specifically, the geometric features of the candidate necking structures obtained in step S103 are matched with the judgment rules set in step S100, which distinguish necking structure types based on geometric features such as the directional relationship between adjacent sides of parallel opposite sides. If the two match, the candidate necking structure is marked as the corresponding necking structure type and then output. For example, if the necking structure to be identified is a quadrilateral necking structure, then the judgment rule set in step S100 is the screening condition for quadrilateral necking structures. After identifying the candidate necking structure that matches the judgment rule in this step, it is marked as a quadrilateral necking structure and then output.

[0051] It should be noted that this application does not limit the specific form of the output candidate necking structure, and can be set according to actual needs, such as the coordinate position of the output necking structure, the type of necking structure, geometric parameter information, or visualization marking results. To more intuitively and systematically mark and output candidate necking structures, and to clearly define the area where the candidate necking structure contracts, in one or more embodiments of this application, after marking the candidate necking structure as the corresponding necking structure type, the application can output the candidate necking structure according to the quadrilateral region formed by the common projection of the parallel opposite sides and the line width or spacing of the parallel opposite sides. For example... Figure 4 As shown, the four shapes from left to right are an I-shaped necked structure 401, a T-shaped shape 402, a rectangular shape 403, and a three-sided necked structure 404. The rectangular dashed lines represent the quadrilateral regions formed by the common projection of the parallel opposite sides and the line width or spacing of the parallel opposite sides. By visualizing the necked structure and the non-necked structure, the definition effect of the quadrilateral region under different structures can be clearly compared.

[0052] Furthermore, in step S100, the necking structure type includes at least one of a four-sided necking structure, a three-sided necking structure, and a two-sided necking structure. Correspondingly, the inspection parameters include the necking structure type. In step S104, in order to achieve accurate differentiation and classification of different necking structure types, in one or more embodiments of this application, the candidate necking structures can be type-marked according to the adjacent side direction relationship before output, as follows: If the adjacent sides of the first and second sides on the same side of the length direction have the same direction, and the adjacent sides on opposite sides of the length direction have opposite directions, then the candidate necking structure is marked as a quad necking structure and output. As shown in 5a, following the example above, the first side L1 and the second side L2 are parallel opposite sides with a parallel relationship. The two adjacent sides of the first side are e1 and e3, and the two adjacent sides of the second side are e2 and e4. Taking the traversal order as clockwise as an example, the direction of each side in the necking structure is represented by dashed arrows, and the pattern filling area is the layout graphic. In the quad necking structure 501, the first and second sides on the same side of the length direction have the same direction for e1 and e2, and the same direction for e3 and e4. On opposite sides of the length direction, the directions for e1 and e4 are opposite, and the directions for e2 and e3 are opposite.

[0053] If the two adjacent edges of the first side have opposite directions, and the two adjacent edges of the second side have the same direction, then the candidate necking structure is marked as a three-sided necking structure and output. For example... Figure 5b As shown, following the three-sided necking structure 502 in the previous example, the two adjacent sides e1 and e3 of the first side have opposite directions, while the two adjacent sides e2 and e4 of the second side have the same direction.

[0054] If the adjacent sides of the first and second sides on the same side of the length direction have opposite directions, and the adjacent sides on opposite sides of the length direction have the same or opposite directions, then the candidate necking structure is marked as a bilateral necking structure and output. For example... Figure 5c As shown, following the example of the double-sided necking structure 503, the directions of e1 and e2, e3 and e4 on the same side of the length direction are opposite, and the directions of e1 and e4, e2 and e3 on opposite sides of the length direction are opposite. Figure 5d As shown, in the example above, the first and second sides of the double-sided necking structure 504 have opposite directions for e1 and e2, e3 and e4 on the same side in the length direction, and the directions for e1 and e4, e2 and e3 on opposite sides in the length direction are the same.

[0055] It should be noted that due to actual layout drawing or process deviations, the determination of whether adjacent sides have the same or opposite directions in this application can also be subject to a certain tolerance range. For example, a deviation of 90° from a preset angle range of 88° to 92° can be used as the tolerance range for whether adjacent sides have the same or opposite directions. That is, if the direction of adjacent sides has a deviation of 0° to 2°, it can be considered as the same or opposite. Two parallel sides may belong to the same graphic or different graphic. When the first and second sides belong to the same graphic, the distance between the parallel sides is the line width, and this type of necking structure is called a line width necking structure. Conversely, when the first and second sides belong to two different graphic, the distance between the parallel sides is the spacing, and this type of necking structure is called a spacing necking structure. Figure 5e As shown, the three figures from left to right are a four-sided spacing necking structure 505, a three-sided spacing necking structure 506, and a two-sided spacing necking structure 507.

[0056] In step S100, the determination rule further includes a distinction condition for differentiating alignment types based on the overlap between the orthographic projection points of the two endpoints of the first side and the two endpoints of the second side. The alignment types include at least one of equal height type and misalignment type. Correspondingly, the inspection parameters also include the alignment type of the necking structure to be identified. In step S104, to achieve accurate differentiation and classification of necking structures with different alignment types, in one or more embodiments of this application, the candidate necking structures matching the determination rule can be marked with alignment types based on the overlap between the orthographic projection points of the two endpoints of the first side and the two endpoints of the second side before being output, as follows: If the orthographic projection points of the two endpoints of the first side coincide with the two endpoints of the second side, then the candidate necking structure is marked with the corresponding necking structure type and equal height type before being output. For example... Figure 5a As shown, following the previous example, in the quadrilateral necking structure 501, the orthographic projection point of the endpoint of the first side on the e1 side coincides with the endpoint of the second side on the e2 side, and the orthographic projection point of the endpoint of the first side on the e3 side coincides with the endpoint of the second side on the e4 side. Therefore, the quadrilateral necking structure is of the same height type.

[0057] If the orthographic projection points of the two endpoints of the first side do not coincide with at least one of the two endpoints of the second side, then the candidate necking structure is marked with the corresponding necking structure type and misalignment type and output. For example... Figure 6a As shown, following the previous example, in the quadrilateral necking structure 601, the orthographic projection point of the endpoint of the first side on the e1 side does not coincide with the endpoint of the second side on the e2 side, while the orthographic projection point of the endpoint of the first side on the e3 side coincides with the endpoint of the second side on the e4 side. That is, at least one of the orthographic projection points of the two endpoints of the first side does not coincide with the two endpoints of the second side, and this quadrilateral necking structure is of the misaligned type. Figure 6b As shown, following the previous example, in the quadrilateral necking structure 602, the orthographic projection point of the endpoint of the first side on the e1 side does not coincide with the endpoint of the second side on the e2 side, and the orthographic projection point of the endpoint of the first side on the e3 side does not coincide with the endpoint of the second side on the e4 side. That is, at least one of the orthographic projection points of the two endpoints of the first side does not coincide with the two endpoints of the second side, and this quadrilateral necking structure is a misaligned type.

[0058] It should be noted that this application can further subdivide the misalignment type based on the number of overlaps between the orthographic projection points of the two endpoints of the first side and the two endpoints of the second side. That is, in step S100, the judgment rule also includes a distinction condition for distinguishing misalignment subtypes based on the number of overlaps between the orthographic projection points of the first endpoints and the second endpoints. The misalignment subtypes include at least one of unilateral misalignment and bilateral misalignment. Correspondingly, the inspection parameters also include the misalignment subtype of the necking structure to be identified. In step S104, in order to achieve accurate distinction and classification output of necking structures with different misalignment subtypes, in one or more embodiments of this application, this application can mark the candidate necking structures that match the judgment rule with misalignment subtypes based on the number of overlaps between the orthographic projection points of the first endpoints and the second endpoints before outputting them, as follows: If the orthographic projection point of one endpoint of the first side coincides with one endpoint of the second side, then the candidate necking structure is marked as the corresponding necking structure type and unilateral misalignment type before being output. For example... Figure 6a As shown, in the quadrilateral necking structure 601, the orthographic projection points of the two endpoints of the first side do not coincide with the two endpoints of the second side, indicating that this quadrilateral necking structure is a unilateral misalignment type. Figure 5b As shown, in the three-sided necking structure 502, the orthographic projection point of the endpoint of the first side on the e1 side coincides with the endpoint of the second side on the e2 side, while the orthographic projection point of the endpoint of the first side on the e3 side does not coincide with the endpoint of the second side on the e4 side. This three-sided necking structure is a single-sided misalignment type.

[0059] If the orthographic projection points of the two endpoints of the first side do not coincide with the two endpoints of the second side, then the candidate necking structure is marked as the corresponding necking structure type and the bilateral misalignment type before being output. For example... Figure 6bAs shown, in the quadrilateral necking structure 602, the orthographic projection points of the two endpoints of the first side do not coincide with the two endpoints of the second side, indicating that this quadrilateral necking structure is a double-sided misalignment type. Figure 5c As shown, the bilateral necking structure 503 is a bilateral misalignment type. (As...) Figure 5d As shown, the bilateral necking structure 504 is a bilateral misalignment type.

[0060] It should be noted that this application can further subdivide the bilateral misalignment type based on the positional relationship between the orthographic projection point of the first side and the second side. That is, in step S100, the judgment rule also includes a distinction condition for distinguishing bilateral misalignment subtypes based on the positional relationship between the orthographic projection point of the first side and the second side. The bilateral misalignment subtypes include at least one of bilateral same-side misalignment type and bilateral opposite-side misalignment type. Correspondingly, the inspection parameters also include the bilateral misalignment subtype of the necking structure to be identified. In step S104, in order to achieve accurate distinction and classification output of necking structures with different bilateral misalignment subtypes, in one or more embodiments of this application, this application can mark the candidate necking structures that match the judgment rule with bilateral misalignment subtypes based on the positional relationship between the orthographic projection point of the first side and the second side before outputting them, as follows: If the orthographic projections of both endpoints of the first side are located within the second side, then the candidate necking structure is marked with the corresponding necking structure type and the bilateral same-side misalignment type before being output. For example... Figure 6b As shown, in the quadrilateral necking structure 603, the orthographic projection points of the two endpoints of the first side are both located inside the second side. This quadrilateral necking structure is a double-sided same-side misalignment type. Figure 7a As shown, in the three-sided necking structure 701 of the previous example, the orthographic projection points of the two endpoints of the first side are both located inside the second side. This three-sided necking structure is a double-sided same-side misalignment type.

[0061] If the orthographic projection of one endpoint of the first side is inside the second side and the orthographic projection of the other endpoint is outside the second side, then the candidate necking structure is marked with the corresponding necking structure type and the double-sided misalignment type before being output. For example... Figure 7b As shown, in the three-sided necking structure 702 of the previous example, the orthographic projection point of the endpoint of the first side on the e1 side is located inside the second side, and the orthographic projection point of the endpoint on the e3 side is located outside the second side. This three-sided necking structure is a double-sided offset type. Figure 7c As shown, in the quadrilateral necking structure 703 of the previous example, the orthographic projection point of the endpoint of the first side on the e1 side is located inside the second side, and the orthographic projection point of the endpoint on the e3 side is located outside the second side. This quadrilateral necking structure is a double-sided offset type.

[0062] Furthermore, this application can further subdivide bilateral misalignment types based on the projection lengths of the first and second sides and the lengths of the first and second sides. The judgment rule also includes a distinction condition for differentiating bilateral misalignment subtypes based on the projection lengths of the first and second sides and the lengths of the first and second sides. Bilateral misalignment subtypes include at least one of bilateral same-side misalignment type and bilateral opposite-side misalignment type. Correspondingly, the inspection parameters also include the bilateral misalignment subtype of the necking structure to be identified. In step S104, in order to achieve accurate differentiation and classification output of necking structures with different bilateral misalignment subtypes, in one or more embodiments of this application, this application can mark the candidate necking structures matched with the judgment rule as bilateral misalignment subtypes based on the common projection lengths of the first and second sides and the lengths of the first and second sides before outputting them, as follows: If the length of the common projection is equal to the length of the first or second side, then the candidate necking structure is marked with the corresponding necking structure type and the bilateral same-side misalignment type before being output. For example... Figure 5d As shown, in the double-sided necking structure 504, the common projection length of the first side and the second side is equal to the side length of the first side. This double-sided necking structure is a double-sided same-side misalignment type. Figure 6b As shown, in the quadrilateral necking structure 603, the common projected length of the first side and the second side is equal to the side length of the first side. This quadrilateral necking structure is a double-sided same-side misalignment type. Figure 7a As shown, in the three-sided necking structure 701, the common projection length of the first side and the second side is equal to the side length of the first side. This three-sided necking structure is a double-sided same-side misalignment type.

[0063] If the length of the common projection is less than the length of the first side and less than the length of the second side, then the candidate necking structure is marked with the corresponding necking structure type and the double-sided misalignment type before being output. For example... Figure 5c As shown, in the double-sided necking structure 503, the common projected length of the first side and the second side is less than the side length of the first side and less than the side length of the second side. This double-sided necking structure is a double-sided misaligned type. Figure 7b As shown, in the three-sided necking structure 702, the common projection length of the first side and the second side is less than the side length of the first side and less than the side length of the second side. This three-sided necking structure is a double-sided misaligned type. Figure 7c As shown, in the quadrilateral necking structure 703, the common projection length of the first side and the second side is less than the side length of the first side and less than the side length of the second side. This quadrilateral necking structure is a double-sided offset type.

[0064] Based on a rule-based inspection method for necking structures, this application also provides specific embodiments of a chip layout necking structure identification device.

[0065] like Figure 8As shown in the figure, a chip layout necking structure identification device 800 provided in this application embodiment includes a rule setting module 801, an identification module 802, a filtering module 803, an acquisition module 804, and a judgment module 805.

[0066] The rule setting module 801 is used to acquire the target map and set the judgment rules. The judgment rules include the distinguishing conditions for the necking structure type based on the geometric features of the necking structure. The geometric features include the directional relationship of the adjacent sides of the parallel opposite sides in the necking structure. The necking structure type includes at least one of the four-sided necking structure, the three-sided necking structure, and the two-sided necking structure. The identification module 802 is used to identify the parallel opposite edges in the target map, the parallel opposite edges including a first edge and a second edge that have a parallel relationship; The filtering module 803 is used to filter out candidate necking structures from the structures containing the parallel opposite sides, where the angle between the first side and its adjacent side and the angle between the second side and its adjacent side are both within a preset angle range, and the adjacent side of the first side and the adjacent side of the second side do not coincide. The acquisition module 804 is used to acquire the geometric features of the candidate necking structure; The determination module 805 is used to mark the candidate necking structure as the corresponding necking structure type and output it when the geometric features of the candidate necking structure match the determination rule.

[0067] In some embodiments, the determination module is specifically used to: mark the candidate necking structure as the corresponding necking structure type, and output the quadrilateral region formed by the common projection of the parallel opposite sides and the line width or spacing of the parallel opposite sides.

[0068] In some embodiments, the determination module can also be used to: if the adjacent sides of the first side and the second side on the same side of the length direction are in the same direction, and the adjacent sides on opposite sides of the length direction are in opposite directions, then the candidate necking structure is marked as the quad-necking structure and output; if the two adjacent sides of the first side are in opposite directions, and the two adjacent sides of the second side are in the same direction, then the candidate necking structure is marked as the tri-necking structure and output; if the adjacent sides of the first side and the second side on the same side of the length direction are in opposite directions, and the adjacent sides on opposite sides of the length direction are in the same or opposite directions, then the candidate necking structure is marked as the bilateral necking structure and output.

[0069] In some embodiments, the above-mentioned determination module can also be used for: the determination rule further includes a distinction condition for distinguishing alignment types based on the overlap between the orthographic projection points of the two endpoints of the first side and the two endpoints of the second side; the alignment type includes at least one of equal height type and misalignment type; if the orthographic projection points of the two endpoints of the first side overlap with the two endpoints of the second side respectively, then the candidate necking structure is marked as the corresponding necking structure type and the equal height type and output; if the orthographic projection points of the two endpoints of the first side do not overlap with at least one of the two endpoints of the second side, then the candidate necking structure is marked as the corresponding necking structure type and the misalignment type and output.

[0070] In some embodiments, the above-mentioned determination module can also be used for: the determination rule further includes a distinction condition for distinguishing misalignment subtypes based on the number of overlaps between the orthographic projection points of the first side endpoint and the second side endpoint; the misalignment subtype includes at least one of unilateral misalignment type and bilateral misalignment type; if the orthographic projection point of one endpoint of the first side coincides with one endpoint of the second side, the candidate necking structure is marked as the corresponding necking structure type and the unilateral misalignment type and then output; if the orthographic projection points of both endpoints of the first side do not coincide with either endpoint of the second side, the candidate necking structure is marked as the corresponding necking structure type and the bilateral misalignment type and then output.

[0071] In some embodiments, the determination module can also be used for: the determination rule further includes a distinction condition for distinguishing bilateral misalignment types based on the positional relationship between the orthographic projection point of the first side and the second side; the bilateral misalignment type includes at least one of bilateral same-side misalignment type and bilateral opposite-side misalignment type; if the orthographic projection points of both endpoints of the first side are located inside the second side, the candidate necking structure is marked as the corresponding necking structure type and the bilateral same-side misalignment type and then output; if the orthographic projection point of one endpoint of the first side is located inside the second side and the orthographic projection point of the other endpoint is located outside the second side, the candidate necking structure is marked as the corresponding necking structure type and the bilateral opposite-side misalignment type and then output.

[0072] In some embodiments, the determination module can also be used for: the determination rule further includes a distinction condition for distinguishing bilateral misalignment subtypes based on the relationship between the common projection length of the first side and the second side and the side lengths of the first side and the second side; the bilateral misalignment subtypes include at least one of bilateral same-side misalignment type and bilateral opposite-side misalignment type; if the common projection length is equal to the side length of the first side or the second side, the candidate necking structure is marked as the corresponding necking structure type and the bilateral same-side misalignment type and then output; if the common projection length is less than the side length of the first side and less than the side length of the second side, the candidate necking structure is marked as the corresponding necking structure type and the bilateral opposite-side misalignment type and then output.

[0073] In some embodiments, the rule setting module is specifically used to: in response to a user's neck retraction structure recognition request, obtain the inspection parameters input by the user, the inspection parameters including the neck retraction structure type of the neck retraction structure to be identified; and set the determination rule according to the inspection parameters.

[0074] This application provides a method for identifying chip layout necking structures. Accordingly, it also provides a specific embodiment of a device for identifying chip layout necking structures.

[0075] Figure 9 This illustration shows a hardware structure diagram of a chip layout necking structure identification device provided in an embodiment of this application.

[0076] The rule checking device for necking structures may include a processor 901 and a memory 902 storing computer program instructions.

[0077] Specifically, the processor 901 may include a central processing unit (CPU), an application-specific integrated circuit (ASIC), or one or more integrated circuits that can be configured to implement the embodiments of this application.

[0078] Memory 902 may include mass storage for data or instructions. For example, and not limitingly, memory 902 may include a hard disk drive (HDD), floppy disk drive, flash memory, optical disk, magneto-optical disk, magnetic tape, or Universal Serial Bus (USB) drive, or a combination of two or more of these. Where appropriate, memory 902 may include removable or non-removable (or fixed) media. Where appropriate, memory 902 may be internal or external to the integrated gateway disaster recovery device. In a particular embodiment, memory 902 is non-volatile solid-state memory.

[0079] The processor 901 reads and executes computer program instructions stored in the memory 902 to implement any of the chip layout necking structure identification methods in the above embodiments.

[0080] In one example, the electronic device may also include a communication interface 903 and a bus 910. Wherein, as... Figure 9 As shown, the processor 901, memory 902, and communication interface 903 are connected through bus 910 and complete communication with each other.

[0081] The communication interface 903 is mainly used to realize communication between various modules, devices, units and / or equipment in the embodiments of this application.

[0082] Bus 910 includes hardware, software, or both, that couples the components of the electronic device together. For example, and not limitingly, the bus may include an Accelerated Graphics Port (AGP) or other graphics bus, an Enhanced Industry Standard Architecture (EISA) bus, a Front Side Bus (FSB), HyperTransport (HT) interconnect, an Industry Standard Architecture (ISA) bus, an Infinite Bandwidth Interconnect, a Low Pin Count (LPC) bus, a memory bus, a Microchannel Architecture (MCA) bus, a Peripheral Component Interconnect (PCI) bus, a PCI-Express (PCI-X) bus, a Serial Advanced Technology Attachment (SATA) bus, a Video Electronics Standards Association Local (VLB) bus, or other suitable buses, or combinations of two or more of these. Where appropriate, bus 910 may include one or more buses. Although specific buses are described and illustrated in embodiments of this application, any suitable bus or interconnect is contemplated herein.

[0083] Furthermore, in conjunction with the rule-based checks on necking structures in the above embodiments, this application embodiment can provide a computer storage medium for implementation. This computer storage medium stores computer program instructions; when these computer program instructions are executed by a processor, they implement any of the chip layout necking structure identification methods in the above embodiments.

[0084] In addition, in conjunction with the rule-checking method for necking structures in the above embodiments, this application embodiment can provide a computer program product for implementation. When the instructions in the computer program product are executed by the processor of an electronic device, the electronic device performs a chip layout necking structure identification method as provided in any aspect of the above embodiments of this application.

[0085] It should be clarified that this application is not limited to the specific configurations and processes described above and shown in the figures. For the sake of brevity, detailed descriptions of known methods are omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of this application is not limited to the specific steps described and shown. Those skilled in the art can make various changes, modifications, and additions, or change the order of steps, after understanding the spirit of this application.

[0086] The functional blocks shown in the above-described structural diagram can be implemented as hardware, software, firmware, or a combination thereof. When implemented in hardware, they can be, for example, electronic circuits, application-specific integrated circuits (ASICs), appropriate firmware, plug-ins, function cards, etc. When implemented in software, the elements of this application are programs or code segments used to perform the required tasks. Programs or code segments can be stored on a machine-readable medium or transmitted over a transmission medium or communication link via data signals carried on a carrier wave. "Machine-readable medium" can include any medium capable of storing or transmitting information. Examples of machine-readable media include electronic circuits, semiconductor memory devices, ROM, flash memory, erasable ROM (EROM), floppy disks, CD-ROMs, optical disks, hard disks, fiber optic media, radio frequency (RF) links, etc. Code segments can be downloaded via computer networks such as the Internet, intranets, etc.

[0087] It should also be noted that the exemplary embodiments mentioned in this application describe methods or systems based on a series of steps or apparatus. However, this application is not limited to the order of the above steps; that is, the steps can be performed in the order mentioned in the embodiments, or in a different order, or several steps can be performed simultaneously.

[0088] The aspects of this disclosure have been described above with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this disclosure. It should be understood that each block in the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing apparatus to produce a machine such that these instructions, executable via the processor of the computer or other programmable data processing apparatus, enable the implementation of the functions / actions specified in one or more blocks of the flowchart illustrations and / or block diagrams. Such a processor can be, but is not limited to, a general-purpose processor, a special-purpose processor, a special application processor, or a field-programmable logic circuit. It is also understood that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, can also be implemented by special-purpose hardware performing the specified functions or actions, or can be implemented by a combination of special-purpose hardware and computer instructions.

[0089] The above description is merely a specific implementation of this application. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, modules, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here. It should be understood that the protection scope of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the protection scope of this application.

Claims

1. A method for identifying a chip layout necking structure, the method comprising: receiving a chip layout; identifying a necking structure in the chip layout; and determining a necking structure type of the necking structure. include: Obtain the target map and set the judgment rules. The judgment rules include the distinguishing conditions for the necking structure type based on the geometric features of the necking structure. The geometric features include the directional relationship of the adjacent sides of the parallel opposite sides in the necking structure. The necking structure type includes at least one of the four-sided necking structure, the three-sided necking structure, and the two-sided necking structure. Identify the parallel opposite edges in the target map, wherein the parallel opposite edges include a first edge and a second edge that have a parallel relationship; From the structures containing the parallel opposite sides, select candidate necking structures in which the angle between the first side and its adjacent side and the angle between the second side and its adjacent side are both within a preset angle range, and the adjacent side of the first side and the adjacent side of the second side do not coincide. Obtain the geometric features of the candidate necking structure; When the geometric features of the candidate necking structure match the determination rule, the candidate necking structure is marked as the corresponding necking structure type and then output.

2. The method of claim 1, wherein, After labeling the candidate necking structures with the corresponding necking structure type, the output includes: After marking the candidate necking structures as the corresponding necking structure type, the quadrilateral region formed by the common projection of the parallel opposite sides and the line width or spacing of the parallel opposite sides is output.

3. The method as described in claim 1, characterized in that, When the geometric features of the candidate necking structure match the determination rule, the candidate necking structure is marked as the corresponding necking structure type and then output, including: If the adjacent sides of the first side and the second side on the same side of the length direction are in the same direction, and the adjacent sides on opposite sides of the length direction are in opposite directions, then the candidate necking structure is marked as the quad necking structure and output. If the two adjacent sides of the first side are in opposite directions and the two adjacent sides of the second side are in the same direction, then the candidate necking structure is marked as the three-sided necking structure and output. If the adjacent sides of the first side and the second side on the same side of the length direction are opposite, and the adjacent sides on opposite sides of the length direction are the same or opposite, then the candidate necking structure is marked as the bilateral necking structure and output.

4. The method as described in claim 1, characterized in that, The determination rule also includes a distinction condition for differentiating alignment types based on the overlap between the orthographic projection points of the two endpoints of the first side and the two endpoints of the second side; the alignment types include at least one of equal height type and misalignment type; When the geometric features of the candidate necking structure match the determination rule, the candidate necking structure is marked as the corresponding necking structure type and then output, including: If the orthographic projection points of the two endpoints of the first side coincide with the two endpoints of the second side, then the candidate necking structure is marked as the corresponding necking structure type and the equal height type and output. If the orthographic projection points of the two endpoints of the first side do not coincide with at least one of the two endpoints of the second side, then the candidate necking structure is marked as the corresponding necking structure type and the misalignment type and output.

5. The method as described in claim 4, characterized in that, The determination rule also includes a distinction condition for differentiating misalignment subtypes based on the number of overlaps between the orthographic projection point of the first side endpoint and the second side endpoint; the misalignment subtypes include at least one of unilateral misalignment type and bilateral misalignment type; After labeling the candidate necking structures with the corresponding necking structure type and misalignment type, the output includes: If the orthographic projection point of one endpoint of the first side coincides with one endpoint of the second side, then the candidate necking structure is marked as the corresponding necking structure type and the unilateral misalignment type and output. If the orthographic projection points of the two endpoints of the first side do not coincide with the two endpoints of the second side, then the candidate necking structure is marked as the corresponding necking structure type and the bilateral misalignment type and output.

6. The method as described in claim 5, characterized in that, The determination rule also includes a distinction condition for differentiating bilateral misalignment types based on the positional relationship between the orthographic projection point of the first side and the second side; the bilateral misalignment types include at least one of bilateral same-side misalignment type and bilateral opposite-side misalignment type; After labeling the candidate necking structures with the corresponding necking structure type and bilateral misalignment type, the output includes: If the orthographic projection points of both endpoints of the first side are located inside the second side, then the candidate necking structure is marked as the corresponding necking structure type and the double-sided same-side misalignment type and then output. If the orthographic projection of one endpoint of the first side is inside the second side and the orthographic projection of the other endpoint is outside the second side, then the candidate necking structure is marked as the corresponding necking structure type and the double-sided misalignment type and output.

7. The method as described in claim 5, characterized in that, The determination rule also includes a distinction condition for differentiating bilateral misalignment subtypes based on the relationship between the common projection length of the first side and the second side and the side lengths of the first side and the second side; the bilateral misalignment subtypes include at least one of bilateral same-side misalignment type and bilateral opposite-side misalignment type; After labeling the candidate necking structures with the corresponding necking structure type and bilateral misalignment type, the output includes: If the common projection length is equal to the side length of the first side or the second side, then the candidate necking structure is marked as the corresponding necking structure type and the double-sided same-side misalignment type and then output. If the common projection length is less than the side length of the first side and less than the side length of the second side, then the candidate necking structure is marked as the corresponding necking structure type and the double-sided misalignment type and output.

8. The method according to any one of claims 1 to 7, characterized in that, Define the judgment rules, including: In response to a user's request to identify a constricted neck structure, the system obtains the inspection parameters input by the user, the inspection parameters including the type of constricted neck structure to be identified; The determination rule is set based on the inspection parameters.

9. The method as described in claim 1, characterized in that, The direction of the adjacent edges is determined according to the traversal order during rule checking.

10. A computer program product, characterized in that, When the instructions in the computer program product are executed by the processor of the electronic device, the electronic device performs the chip layout necking structure identification method as described in any one of claims 1-9.

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