A magnetic head

Abstract

This invention provides a magnetic head. The magnetic head includes a magnetoresistive element and upper and lower lead-out layers. The magnetoresistive element includes a top electrode, an MTJ (Metal-to-Jet) layer, and a bottom electrode stacked together. The upper surface of the top electrode, except for the portion directly connected to the upper lead-out layer, is filled with a first protective layer between itself and the upper lead-out layer. And / or the lower surface of the bottom electrode, except for the portion directly connected to the lower lead-out layer, is filled with a second protective layer between itself and the upper lead-out layer. The first and second protective layers are made of conductive and wear-resistant ternary metal nitride, where A and B are metallic elements. The magnetic head provided by this application utilizes the wear-resistant and low coefficient of friction (with the magnetic recording medium) characteristics of ternary metal nitride to provide short-circuit protection for the MTJ, preventing short circuits caused by conductive debris generated from the magnetic tape or other parts of the magnetic head. Compared to other wear-resistant and insulating materials, the magnetic head provided by this application can also improve the amplitude and signal-to-noise ratio of the sensing signal.

Description

Technical Field

[0001] This application relates to the design / manufacturing of magnetic heads and magnetic reading components, and particularly to a magnetic head structure with high stability, durability and high signal-to-noise ratio. Background Technology

[0002] In recent years, the industry and related research institutions have invested significant human and material resources in developing applications of the magnetoresistive effect (MR effect) for magnetic heads, magnetic RAM (MRAM), and other devices. The MR effect is based on conductivity phenomena dependent on electron spin, where the resistance of a multilayer film with a "magnetic layer / non-magnetic layer / magnetic layer" configuration varies with the relative angle between magnetic orientations. The resistance is minimized when the magnetic orientations are parallel and maximized when they are antiparallel. Devices utilizing this MR effect are called MR devices.

[0003] In magnetic tape drive systems, the drive moves the magnetic tape at high speed across the surface of the read / write head. The spacing between the read / write head and the magnetic tape is crucial, and magnetic tape heads are typically designed to minimize this spacing. Current magnetic tape drive systems are generally designed with the read / write head in close contact with the magnetic tape (or magnetic recording medium) to provide effective coupling of the magnetic field from the tape to the read element. However, the relative motion between the read / write head and the magnetic recording medium in a magnetoresistive reader generates persistent friction, and can even cause scratches due to the unevenness of the moving magnetic medium surface. The friction between the unevenness of the magnetic tape and the malleable metal film in the sensor generates deformation forces in the direction of tape movement. In addition, friction between the magnetic shielding layer (usually nickel-iron) and the magnetic recording medium also generates conductive debris. The magnetoresistive components in the read / write head often short-circuit due to these debris, causing the read / write head to malfunction.

[0004] To prevent short circuits caused by conductive debris in the magnetoresistive head, a rigid, insulating layer (usually aluminum oxide) is typically added across or inside the magnetoresistive head to isolate any generated conductive debris from the MTJ functional layer. However, this addition of an insulating layer also weakens the magnetoresistive sensing signal, reducing its sensitivity and the signal-to-noise ratio of the head's output signal. Summary of the Invention

[0005] In view of this, this application provides a magnetic head with a strong sensing signal, a high signal-to-noise ratio output signal, and the ability to effectively reduce the generation of conductive debris and prevent conductive debris from causing magnetoresistive short circuits. This magnetic head uses a special ternary metal nitride to form a protective layer on its sensor component (magnetoresistive). This protective layer prevents conductive debris from causing magnetoresistive short circuits while reducing the resistance of the magnetoresistive signal output component, thereby improving the output signal amplitude and signal-to-noise ratio.

[0006] The magnetic head provided in this application includes a magnetoresistive layer and upper and lower lead-out layers. The magnetoresistive layer includes a top electrode, an MTJ (Medium-Touch Panel), and a bottom electrode stacked together. The top electrode is stacked on the upper end face of the MTJ, with at least one of its left and right ends directly connected to the upper lead-out layer, which is located above the top electrode. The bottom electrode is stacked on the lower end face of the MTJ, with at least one of its left and right ends directly connected to the lower lead-out layer, which is located below the bottom electrode. The top and bottom electrodes are made of a highly conductive metallic material.

[0007] The first gap between the top electrode and the upper lead-out layer is filled with ternary metal nitride. To form a first protective layer, and / or to fill the second gap between the bottom electrode and the lower lead-out layer with ternary metal nitride. To form a second protective layer; ternary metal nitride It is a conductive and wear-resistant material, and A and B are metallic elements.

[0008] Since the first and / or second protective layers are made of conductive materials, their placement between the corresponding electrodes and lead-out layers effectively increases the contact area between the electrodes and lead-out layers, reduces the resistance between the magnetoresistive lead-out components, and improves the amplitude and signal-to-noise ratio of the sensing signal. Additionally, ternary metal nitride... The coefficient of friction between the electrode and the magnetic recording medium is typically lower than that of binary metal nitride materials (such as HfN), and its conductivity is generally higher than that of binary metal nitride materials, while also possessing wear resistance and hardness. By placing the aforementioned protective layer between the electrode and the corresponding lead-out layer, it is also possible to effectively prevent the generated conductive debris from "contaminating" the MTJ functional layer.

[0009] Preferably, the ternary metal nitride The A element in the formula includes one of Hf, Ti, and Zr, and the B element includes one of Au, Ag, and Cr.

[0010] In some embodiments, a composite contact layer is further provided on the side of the magnetic head facing the magnetic recording medium contact surface TBS, the composite contact layer at least covering the area between the first protective layer and the second protective layer. The composite contact layer includes an insulating reinforcement layer directly coated on the side of the magnetic head facing the magnetic recording medium contact surface TBS, and a contact layer disposed on the insulating reinforcement layer and in contact with the magnetic recording medium. The contact layer is made of a ternary metal nitride. Accordingly, the insulating reinforcement layer is made of silicon nitride, aluminum oxide, or DLC material.

[0011] Furthermore, on the side facing the magnetic recording medium contact surface TBS, the first protective layer and the second protective layer protrude from their respective corresponding electrodes and lead-out layers, or are flush with the one of their respective corresponding electrodes and lead-out layers closest to the magnetic recording medium contact surface TBS. With this configuration, during the relative movement of the magnetic recording medium and the magnetic head, conductive debris generated will be blocked outside the MTJ by the first and second protective layers, preventing a short circuit in the MTJ.

[0012] Preferably, on the TBS side facing the magnetic recording medium contact surface, the first protective layer at least partially covers the upper lead-out layer, and the second protective layer at least partially covers the lower lead-out layer. The lead-out layers are generally made of highly conductive metals or nickel-iron materials, due to the ternary metal nitride... It is wear-resistant and has a relatively low coefficient of friction. When it covers the lead layer at the TBS end, it can effectively prevent the lead layer from deforming and producing conductive debris due to friction with the magnetic recording medium.

[0013] Furthermore, the magnetic head also includes a first magnetic shielding layer and a second magnetic shielding layer. The first magnetic shielding layer is disposed above the upper lead-out layer, and the second magnetic shielding layer is disposed below the lower lead-out layer. On the side facing the magnetic recording medium contact surface TBS, the first protective layer protrudes beyond / is flush with the first magnetic shielding layer, and the second protective layer protrudes beyond / is flush with the second magnetic shielding layer. The shielding layer is generally made of nickel-iron material, which easily generates fragments when rubbed against the magnetic recording medium, making it one of the main sources of conductive debris. Therefore, making the protective layer more protruding relative to TBS helps to reduce / mitigate the friction between the magnetic shielding layer and the magnetic recording medium, thereby reducing the generation of conductive debris.

[0014] Furthermore, a protective layer is provided on the side of the first magnetic shielding layer and the second magnetic shielding layer facing the magnetic recording medium contact surface TBS, and the protective layer is also made of the ternary metal nitride. Formed by deposition or magnetron sputtering. To enhance the ternary metal nitride... To improve the adhesion between the protective layer and the magnetic shielding layer (nickel-iron), an additional reinforcing layer is provided between the protective layer and the corresponding side of the magnetic shielding layer. This reinforcing layer is a nickel-plated layer, a titanium-plated layer, or a chromium-plated layer.

[0015] The magnetic head provided by this invention is made of a hard, wear-resistant, low-friction coefficient with the magnetic recording medium, and conductive ternary metal nitride. The magnetic reluctance used in the magnetic head is improved. The ternary metal nitride is applied at specific locations along the magnetic reluctance. The protective layer not only effectively prevents the generation of conductive debris and "contamination" of the MTJ, avoids magnetoresistive short circuits, and improves the working stability and lifespan of the magnetic head, but also effectively improves the output amplitude and signal-to-noise ratio of the magnetoresistive sensing signal, thereby improving the performance of the magnetic head. Attached Figure Description

[0016] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the magnetic head provided by the present invention on the TBS plane in the first embodiment.

[0018] Figure 2 This is a side view of the magnetic head provided by the present invention in the second embodiment.

[0019] Figure 3 This is a side view of the magnetic head provided by the present invention in the third embodiment.

[0020] Figure 4 This is a side view of the magnetic head provided by the present invention in the fourth embodiment.

[0021] Explanation of reference numerals in the attached figures: 10-MTJ, 11-top electrode, 12-bottom electrode, 21-upper lead-out layer, 22-lower lead-out layer, 31-first protective layer, 32-second protective layer, 41-first shielding layer, 42-second shielding layer, 5-magnetic recording medium, 61-insulation reinforcement layer, 62-contact layer. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] In this application, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. It should be noted that, without conflict, the embodiments and features described in the present invention can be combined with each other.

[0024] The technical solution provided by the present invention will be further described in detail below with reference to the accompanying drawings.

[0025] exist Figure 1 In the illustrated embodiment, the magnetic head provided in this application includes: a magnetoresistive layer 1, an upper lead-out layer 21, and a lower lead-out layer 22. The magnetoresistive layer 1 includes a top electrode 11, an MTJ 10, and a bottom electrode 12 stacked together. The top electrode 11 is stacked on the upper surface of the MTJ 10, and at least one of its left and right ends is directly connected to the upper lead-out layer 21. Figure 1 Both the top electrode 11 and the bottom electrode 12 are L-shaped, with the upper lead-out layer 21 positioned above the top electrode 11. The bottom electrode 12 is stacked on the lower end face of the MTJ 10, with at least one of its left and right ends directly connected to the lower lead-out layer 22, which is positioned below the bottom electrode. The top electrode 11 and the bottom electrode 12 are made of a highly conductive metal material.

[0026] The first gap between the top electrode 11 and the upper lead-out layer 21 is filled with ternary metal nitride. To form the first protective layer 31, the second gap between the bottom electrode 12 and the lower lead-out layer 22 is filled with ternary metal nitride. To form a second protective layer 32. Ternary metal nitride A and B are conductive and wear-resistant materials, and are metallic elements. The upper lead-out layer 21 and the lower lead-out layer 22 are usually made of highly conductive metallic materials. For magnetic field shielding considerations, in some magnetoresistance systems, the upper lead-out layer 21 and the lower lead-out layer 22 can also be made of conductive soft magnetic materials such as nickel-iron.

[0027] Since the first protective layer 31 and / or the second protective layer 32 are made of conductive materials, their placement between the corresponding electrode and the lead-out layer effectively increases the contact area between the corresponding electrode and the lead-out layer, reduces the resistance between the magnetoresistive lead-out components, and improves the amplitude and signal-to-noise ratio of the sensing signal. Preferably, the ternary metal nitride... The A element in the formula includes one of Hf, Ti, and Zr, and the B element includes one of Au, Ag, and Cr.

[0028] Furthermore, on the side facing the magnetic recording medium contact surface TBS, the first protective layer 31 and the second protective layer 32 protrude from their respective corresponding electrodes and lead-out layers, or are flush with the one of their respective corresponding electrodes and lead-out layers closest to the magnetic recording medium contact surface TBS. During the relative movement of the magnetic recording medium and the magnetic head, since the first protective layer 31 and the second protective layer 32 are in close contact with the surface of the magnetic recording medium (e.g., the surface of the magnetic tape), conductive debris generated by the magnetic recording medium or other components of the magnetic head (e.g., the magnetic shielding layer) will be blocked outside the MTJ 10 by the first protective layer 31 and the second protective layer 32, thus preventing the MTJ 10 from short-circuiting.

[0029] Ternary metal nitride The coefficient of friction between it and the magnetic recording medium is generally lower than that of binary metal nitride materials (such as HfN) (“Microstructure, mechanical and tribological behaviors of hard-yet-tough Hf-Ag-N coating”, Ganggang Wang, et al., Journal of Materials Research and Technology 2023;22:2030-2042), and its conductivity is generally higher than that of binary metal nitride materials. Meanwhile, ternary metal nitride... It retains its wear-resistant and hard properties. Therefore, ternary metal nitride is used. It is reasonable and wise to maintain close and persistent contact / friction with the magnetic recording medium to protect the MTJ 10.

[0030] like Figure 2 In another embodiment shown, on the TBS side facing the magnetic recording medium 5, the first protective layer 31 at least partially covers the upper lead-out layer 21, and the second protective layer 32 at least partially covers the lower lead-out layer 22. The lead-out layers 21 and 22 are generally made of highly conductive metals or nickel-iron materials, which are prone to deformation and metal debris generation during prolonged friction with the magnetic recording medium 5. The ternary metal nitride... At least partially covering the lead-out layers 21 and 22 at the end facing the TBS, effectively preventing / blocking the lead-out layers 21 and 22 from contacting the magnetic recording medium 5, thus avoiding the generation of conductive debris at some source and preventing deformation of the lead-out layers on the TBS contact surface.

[0031] Furthermore, such as Figure 3 In the illustrated embodiments, the magnetic head provided in this application further includes a first magnetic shielding layer 41 and a second magnetic shielding layer 42. The first magnetic shielding layer 41 is disposed on the upper side of the upper lead-out layer 21, and the second magnetic shielding layer 42 is disposed on the lower side of the lower lead-out layer 22. On the side facing the magnetic recording medium contact surface TBS, the first protective layer 31 protrudes from / is flush with the first magnetic shielding layer 41, and the second protective layer 32 protrudes from / is flush with the second magnetic shielding layer 42. The magnetic shielding layers 41 / 42 are typically made of soft magnetic materials such as nickel-iron materials, which are prone to generating fragments when rubbing against the magnetic recording medium 5, and are one of the main sources of conductive debris. Therefore, making the protective layers more protruding relative to TBS helps to reduce / mitigate the contact / friction between the magnetic shielding layers 41, 42 and the magnetic recording medium 5, thereby preventing conductive debris from "contaminating" the MTJ 10 while reducing the generation of conductive debris at the source.

[0032] Preferably, a protective layer is provided on the side of the first magnetic shielding layer 41 and the second magnetic shielding layer 42 facing the magnetic recording medium contact surface TBS. The protective layer can also be made of the ternary metal nitride. It is formed by deposition or magnetron sputtering. This directly blocks contact between the magnetic shielding layer and the magnetic recording medium 5, further reducing the generation of conductive debris. To enhance the ternary metal nitride... The adhesion between the protective layer and the magnetic shielding layer (nickel-iron) is improved. An additional reinforcing layer is provided between the protective layer and the corresponding side of the magnetic shielding layer. The reinforcing layer is a nickel plating layer, a titanium plating layer, or a chromium plating layer.

[0033] like Figure 4 In the illustrated embodiment, a composite contact layer is provided on the side of the magnetic head facing the contact surface TBS of the magnetic recording medium 5, covering at least the area between the upper lead-out layer 21 and the lower lead-out layer 22. The composite contact layer includes an insulating reinforcement layer 61 directly coated on the side of the magnetic head facing the contact surface TBS of the magnetic recording medium 5, and a contact layer 62 disposed on the insulating reinforcement layer and in contact with the magnetic recording medium. The contact layer 62 is made of ternary metal nitride. Accordingly, the insulating reinforcement layer is made of silicon nitride, aluminum oxide, or DLC materials. Silicon nitride, aluminum oxide, or DLC materials not only possess excellent insulation properties but also react well with ternary metal nitride. Furthermore, it exhibits excellent adhesion to the sides of the magnetic head; coating it in the area between the upper lead-out layer 21 and the lower lead-out layer 22 not only prevents short circuits in the magnetic head (including the MTJ) but also enhances the performance of the ternary metal nitride. Adhesion to the side of the magnetic head.

[0034] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A magnetic head, characterized by, The magnetic head includes: a magnetoresistive layer and an upper lead-out layer and a lower lead-out layer; the magnetoresistive layer includes a top electrode, an MTJ, and a bottom electrode stacked together; the top electrode is stacked on the upper end face of the MTJ, and at least one of its left and right ends is directly connected to the upper lead-out layer, the upper lead-out layer being located above the top electrode; the bottom electrode is stacked on the lower end face of the MTJ, and at least one of its left and right ends is directly connected to the lower lead-out layer, the lower lead-out layer being located below the bottom electrode; The first gap between the top electrode and the upper lead-out layer is filled with a ternary metal nitride The second gap between the bottom electrode and the lower lead-out layer is filled with a ternary metal nitride to form a second protective layer; the ternary metal nitride A and B are metal elements.

2. The magnetic head of claim 1, wherein On the side facing the magnetic recording medium contact surface TBS, the first protective layer and the second protective layer protrude from their respective corresponding electrodes and lead-out layers, or are flush with the one of their respective corresponding electrodes and lead-out layers that is closest to the magnetic recording medium contact surface TBS.

3. The magnetic head of claim 1, wherein The magnetic head has a composite contact layer on its side facing the magnetic recording medium contact surface TBS, covering at least the area between the first protective layer and the second protective layer. The composite contact layer includes an insulating reinforcement layer directly coated on the side of the magnetic head facing the magnetic recording medium contact surface TBS, and a contact layer disposed on the insulating reinforcement layer and in contact with the magnetic recording medium. The contact layer is made of a ternary metal nitride. Production.

4. The magnetic head as described in claim 3, characterized in that, The insulating reinforcement layer is made of silicon nitride, aluminum oxide, or DLC material.

5. The magnetic head as claimed in any one of claims 1 to 4, wherein The ternary metal nitride The A element in the formula includes one of Hf, Ti, and Zr, and the B element includes one of Au, Ag, and Cr.

6. The magnetic head as described in claim 2, characterized in that, On the TBS side facing the magnetic recording medium contact surface, the first protective layer at least partially covers the upper lead-out layer. The second protective layer at least partially covers the lower lead-out layer.

7. The magnetic head of claim 6 wherein, The magnetic head further includes a first magnetic shielding layer and a second magnetic shielding layer; the first magnetic shielding layer is disposed on the upper side of the upper lead-out layer, and the second magnetic shielding layer is disposed on the lower side of the lower lead-out layer; on the side facing the magnetic recording medium contact surface TBS, the first protective layer protrudes from / is flush with the first magnetic shielding layer, and the second protective layer protrudes from / is flush with the second magnetic shielding layer.

8. The magnetic head of claim 7 wherein, The first magnetic shielding layer and the second magnetic shielding layer are provided with a protective layer on the side facing the magnetic recording medium contact surface TBS, and the protective layer is also made of the ternary metal nitride Deposited or magnetron sputtered.

9. The magnetic head of claim 8 wherein, An enhancement layer is also provided between the protective layer and the corresponding magnetic shielding layer side, and the enhancement layer is a nickel plating layer, a titanium plating layer, or a chromium plating layer.

10. The magnetic head of claim 5 wherein, The top electrode and bottom electrode are highly conductive metal electrodes, and the upper lead-out layer and lower lead-out layer are made of highly conductive metal materials.

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