Magnetron and electronic device

Abstract

This application discloses a magnetron and an electronic device. The magnetron includes an anode tube and a tuning assembly. The inner wall of the anode tube has at least two resonant cavities arranged circumferentially. The tuning assembly includes at least one tuning element disposed within one of the resonant cavities and abutting against the inner wall of the anode tube. The tuning element is configured to couple with the corresponding resonant cavity for adjusting the operating frequency of the magnetron. This magnetron solves the technical problem of a fixed operating frequency that cannot be dynamically adjusted, thereby improving at least the uniformity of microwave energy distribution.

Description

Technical Field

[0001] This application relates to the field of magnetron technology, and in particular to a magnetron and electronic device. Background Technology

[0002] Microwave ovens and other microwave devices typically use magnetrons as microwave sources. The microwaves generated by the magnetron can form a standing wave distribution within the processing cavity of the microwave device.

[0003] However, existing magnetrons typically have a fixed frequency, and the microwaves they generate will have energy concentration points and energy weakness points in the processing cavity, which will cause uneven heating of the materials in the processing cavity and affect the processing quality. Summary of the Invention

[0004] This application provides a magnetron and an electronic device to solve the technical problem in the related art that the magnetron has a fixed operating frequency and cannot be dynamically adjusted, so as to at least improve the uniformity of microwave energy distribution.

[0005] To address the aforementioned technical problems, this application provides a magnetron, comprising: an anode tube and a tuning assembly. The anode tube has at least two resonant cavities arranged circumferentially on its inner wall; the tuning assembly includes at least one tuning element disposed within one of the resonant cavities and abutting against the inner wall of the anode tube. The tuning element is configured to couple with the corresponding resonant cavity for adjusting the operating frequency of the magnetron.

[0006] Optionally, the tuning element includes a dielectric body and an electrode layer, wherein a first surface of the dielectric body abuts against the inner wall of the anode tube, and the electrode layer is disposed on a second surface of the dielectric body opposite to the first surface.

[0007] Optionally, the tuning assembly includes at least two tuning elements and a connecting ring. The at least two tuning elements are arranged circumferentially along the anode tube and are located at the same axial end of the connecting ring along the axial direction of the anode tube, so as to form a gap between two adjacent tuning elements.

[0008] Optionally, the tuning assembly also includes a conductive element; the electrode layers of at least two tuning assemblies are electrically connected through the conductive element.

[0009] Optionally, the conductive element includes at least two first metal leads and a second metal lead. The first metal leads are electrically connected to the corresponding electrode layer and the second metal lead, respectively. The second metal lead is used to transmit external electrical signals to the first metal leads and the electrode layer.

[0010] Optionally, the magnetron further includes a third metal lead electrically connected to the second metal lead, the third metal lead being used to transmit electrical signals to the second metal lead; the magnetron also includes a pole piece located at the end of the anode tube, the pole piece having a through hole; at least a portion of the third metal lead passes through the through hole.

[0011] Optionally, the electrode layer is an arc-shaped sheet, and the orthographic projection of the electrode layer toward the radial direction of the anode tube is square.

[0012] Optionally, the axial dimension of the arc-shaped sheet is 3 mm, and the circumferential dimension of the arc-shaped sheet is 6.2 mm; The inner radius of the connecting ring is 16.3 mm, the outer radius of the connecting ring is 17.5 mm, and the axial depth of the connecting ring is 4 mm. The radial dimension of the notch is 1.2 mm, the circumferential dimension of the notch is 2 mm, and the axial dimension of the notch is 8.8 mm.

[0013] Alternatively, the dielectric may be made of a ferroelectric material.

[0014] To address the aforementioned technical problems, this application also provides an electronic device, comprising: the aforementioned magnetron.

[0015] Unlike existing technologies, the advantages of this application are as follows: The magnetron of this application achieves its operating frequency by placing a tuning element in the resonant cavity of the anode tube, which couples with the inner wall of the anode tube. Furthermore, the microwave wavelength generated by the magnetron dynamically changes with its operating frequency, causing the standing wave point position to change synchronously, thereby improving the problem of uneven energy distribution. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein: Figure 1 This is a cross-sectional schematic diagram of a magnetron provided in some embodiments of this application; Figure 2 This is a cross-sectional schematic diagram of a magnetron provided in some embodiments of this application; Figure 3 This is a cross-sectional schematic diagram of a magnetron provided in some embodiments of this application; Figure 4 yes Figure 2 A schematic diagram of the cross-section of the intermediate tuning component; Figure 5 yes Figure 4 A schematic diagram of the structure of the middle electrode layer, the conductor, and the third metal lead; Figure 6 yes Figure 3 A schematic diagram of the cross-section of the intermediate tuning component; Figure 7 yes Figure 6 A schematic diagram of the structure of the middle electrode layer, the conductor, and the third metal lead; Figure 8 yes Figure 7 A schematic diagram of the structure of the central cross-shaped hollow area; Figure 9 yes Figure 2 The figure shows the output power of the magnetron obtained after simulation. Figure 10 yes Figure 9 The local feature curves obtained after performing a Fourier transform on the data shown. Figure 11 When the dielectric constant is 600, Figure 3 The figure shows the output power of the magnetron obtained after simulation. Figure 12 When the dielectric constant is 400, Figure 3 The figure shows the output power of the magnetron obtained after simulation. Figure 13 yes Figure 11 and Figure 12 The local feature curves obtained by performing a Fourier transform on the data shown. Figure 14 These are schematic diagrams of the electronic devices provided in some embodiments of this application.

[0017] Reference numerals: 10. Magnetron; 11. Anode tube; 12. Tuning assembly; 110. Resonant cavity; 120. Tuning element; A. Axial direction of anode tube; 121. Dielectric; 122. Electrode layer; 123. Connecting ring; O. Notch; 111. Blade; 124. Conductive element; 1241. First metal lead; 1242. Second metal lead; 13. Third metal lead; 14. Pole shoe; 141. Through hole; 1221. Hollow area; 15. Cathode; 16. Antenna; 20. Electronic device. Detailed Implementation

[0018] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0019] It should be noted that if the embodiments of this application involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0020] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0021] Microwave ovens and other microwave equipment typically use magnetrons as microwave sources. The microwaves generated by the magnetron can form a standing wave distribution within the processing cavity of the microwave equipment. However, existing magnetrons usually have a fixed frequency, and the microwaves they generate will have energy concentration points and energy weakness points within the processing cavity, resulting in uneven heating of the materials placed in the processing cavity and affecting the processing quality.

[0022] In addition, existing methods for changing the operating frequency of a magnetron are mechanical tuning methods, which use an external drive mechanism (such as a motor) to drive rotating components (such as bearings or metal rods) to change the position of the tuning element. Since the magnetron operates at high internal temperatures, the rotating components connected to the external drive mechanism and the tuning element are also in a high-temperature environment, making them prone to wear and failure after long-term operation, thus affecting the stability and reliability of the magnetron frequency regulation.

[0023] To resolve the above technical issues, please refer to [link / reference]. Figures 1-8 This application provides a magnetron 10, which includes an anode tube 11 and a tuning assembly 12. The inner wall of the anode tube 11 has at least two resonant cavities 110 arranged circumferentially. The tuning assembly 12 includes at least one tuning element 120, which is disposed within one of the resonant cavities 110 and abuts against the inner wall of the anode tube 11. The tuning element 120 is configured to couple with the corresponding resonant cavity 110 for adjusting the operating frequency of the magnetron 10.

[0024] The anode tube 11 of this application is typically a cylindrical / quasi-cylindrical columnar structure or a tubular structure, and it is usually made of metal. The circumferential direction of the anode tube 11 refers to the tangential direction along the circumference of the anode tube 11, which is perpendicular to the axial direction A and the radial direction of the anode tube 11, respectively. The axial direction A of the anode tube 11 refers to the direction parallel to the central axis of the anode tube 11, which can be understood as the length direction of the anode tube 11. The radial direction of the anode tube 11 refers to the direction along the radius of the anode tube 11, which can be understood as the wall thickness direction of the anode tube 11, which is the direction from the center of the anode tube 11 to the sidewall, or the direction from the sidewall of the anode tube 11 to the center.

[0025] The depth, width, and other dimensional parameters of the resonant cavities 110 arranged inside the anode tube 11 determine the inherent operating frequency of the magnetron 10. The number of resonant cavities 110 inside the anode tube 11 is usually an even number, such as 8, 10, or 12. In one application scenario, the anode tube 11 is provided with 10 resonant cavities 110 arranged at intervals.

[0026] The tuning element 120 is the core mechanism of the magnetron 10 for frequency change or fine-tuning. It refers to the component or assembly used to adjust the frequency, achieve resonance, or match impedance. Since the magnetron 10 is a high-power microwave generator, its interior is located in a high-voltage, high-vacuum, and strong magnetic field environment. To ensure the performance of the tuning element 120, it must possess high temperature resistance, electromagnetic shock resistance, high reliability, and vacuum sealing. The tuning element 120 involved in this application can be a dielectric tuning element, such as a ceramic or quartz component, that affects the internal electric field of the magnetron 10 by changing its dielectric constant; or it can be a flexible metal component, such as a metal ring or tuning diaphragm, that affects the internal electric field of the magnetron 10 by deformation. The change in dielectric constant and the deformation of the flexible component can be influenced by electric fields, magnetic fields, temperature, infrared light, visible light, or various rays.

[0027] The tuning element 120 abuts against the inner wall of the anode tube 11, forming a contact tuning. The tuning element 120 is equivalent to a part of the cavity wall of the resonant cavity 110, which is equivalent to changing the cavity structure of the resonant cavity 110. In some embodiments, changing the contact position between the tuning element 120 and the inner wall of the anode tube 11, the shape and size of the tuning element 120, etc., can correspondingly change the dimensional parameters such as the depth and width of the resonant cavity 110, thereby realizing the dynamic adjustment of the operating frequency of the magnetron 10.

[0028] Compared to the non-contact tuning scheme where the tuner 120 is located in the resonant cavity 110 but does not contact the anode tube 11, the sensitivity of the contact tuning in this application is higher than that of the non-contact tuning, and the tunable frequency range of the contact tuning in this application is greater than that of the non-contact tuning. Moreover, the non-contact tuning only affects the cavity magnetic field of the resonant cavity 110 and does not change its cavity structure.

[0029] It is worth noting that, in order to reduce the impact of the addition of the tuner 120 on the working mode, working efficiency and output power of the magnetron 10, the position where the tuner 120 abuts against the inner wall of the anode tube 11 needs to be far away from the area where electrons and electromagnetic waves interact within the resonant cavity 110.

[0030] According to some embodiments of this application, when no tuning element 120 is provided in the resonant cavity 110, the operating frequency of the magnetron 10 is determined only by the size of the resonant cavity 110, and the operating frequency of the magnetron 10 is not adjustable at this time; when a tuning element 120 is provided in the resonant cavity 110, the operating frequency of the magnetron 10 is determined by both the size of the resonant cavity 110 and the tuning element 120. Since the size of the resonant cavity 110 is fixed, the operating frequency of the magnetron 10 can be directly changed by the tuning element 120, making the operating frequency of the magnetron 10 adjustable.

[0031] In some embodiments, each resonant cavity 110 is provided with a tuning element 120 (frequency adjustable), that is, the tuning element 120 corresponds one-to-one with the resonant cavity 110. In this case, the tuning element 120 in each resonant cavity 110 can directly change the resonant frequency of the corresponding resonant cavity 110. The changes of all resonant cavities 110 are superimposed to support a wider range of frequency coverage, thereby expanding the adjustable range of the magnetron 10's operating frequency.

[0032] In some embodiments, each resonant cavity 110 is provided with at least two tuning elements 120 to achieve multi-tuning (such as dual-tuning). Compared with a single-tuning scheme in which each resonant cavity 110 has only one tuning element 120, the multi-tuning scheme can increase tuning sensitivity and further expand the adjustable range of the magnetron 10's operating frequency (superposition effect).

[0033] In some embodiments, a tuning element 120 (frequency adjustable) is provided in part of the resonant cavity 110, while no tuning element 120 is provided in part of the resonant cavity 110 (frequency fixed). In this case, the mechanical structure complexity is reduced, and the adjustable range of the magnetron 10's operating frequency is narrowed, making it suitable for applications requiring fine-tuning of the frequency.

[0034] In some embodiments, the tuning element 120 may be a ring structure, a sheet structure, or other structures, which are not limited herein.

[0035] The magnetron 10 of this application has an adjustable operating frequency, supporting the use of microwave wavelengths corresponding to different operating frequencies to improve the problem of uneven energy distribution, so that the material in the processing cavity is heated evenly and the processing quality is ensured.

[0036] In some embodiments, the tuning in this application is electronic tuning. See also... Figures 1-7The tuning element 120 includes a dielectric body 121 and an electrode layer 122. The first surface of the dielectric body 121 abuts against the inner wall of the anode tube 11, and the electrode layer 122 is disposed on a second surface of the dielectric body 121 opposite to the first surface. At this time, the inner wall of the anode tube 11, the dielectric body 121, and the electrode layer 122 are arranged sequentially along the radial direction of the anode tube 11.

[0037] The electrode layer 122 of this application can be formed by processes such as sputtering, evaporation or sintering, and the electrode layer 122 can be a silver layer, a gold layer or a copper layer. In some embodiments, the electrode layer 122 is a metasurface electrode or a metal thin film electrode disposed on the dielectric 121.

[0038] The dielectric 121 of this application is made of a high dielectric constant material, which can be a ferroelectric material, such as barium strontium titanate (BST) and its ceramics, barium titanate, lead zirconate titanate, sodium bismuth titanate, epoxy resin, zirconium oxide, or others. In one application scenario, the dielectric 121 is composed of barium strontium titanate ceramic. Barium strontium titanate ceramic is a ferroelectric ceramic or dielectric ceramic with an electric field-dependent dielectric constant. Specifically, barium strontium titanate ceramic has spontaneous polarization characteristics, and its polarization direction can be reversed by an applied electric field. When a voltage signal is applied to the dielectric 121, the electric field drives the internal domains of the dielectric 121 to reorient, forming a stable polarization state, and the change in polarization state directly affects the dielectric constant of the material.

[0039] According to some embodiments of this application, when no tuning element 120 is provided in the resonant cavity 110, the operating frequency of the magnetron 10 is determined only by the size of the resonant cavity 110, and the operating frequency of the magnetron 10 is not adjustable; when a tuning element 120 is provided in the resonant cavity 110, the operating frequency of the magnetron 10 is determined by both the size of the resonant cavity 110 and the dielectric constant of the dielectric material 121, and the operating frequency of the magnetron 10 is adjustable.

[0040] The dielectric constant of dielectric 121 is related to the operating frequency of magnetron 10, and the dielectric constant of dielectric 121 has the characteristic of changing with the external electrical signal. When the dielectric constant changes, the resonant frequency of resonant cavity 110 shifts, thereby changing the operating frequency of magnetron 10. In this application, resonant cavity 110 is a vacuum or air medium; dielectric 121, as a microwave output window or support, affects the wavelength of microwaves in the medium, thus affecting the efficiency of energy coupling from resonant cavity 110 to the external waveguide, and consequently changing the operating frequency of magnetron 10.

[0041] In some embodiments, the inner wall of the anode tube 11 is typically metal. The first surface of the dielectric 121 is in direct contact with the inner wall of the anode tube 11, effectively acting as a ground or short circuit. The second surface of the dielectric 121 is in direct contact with the electrode layer 122, and is used to apply a tuning voltage. This connection can be equivalent to a variable capacitor. The first plate of the variable capacitor corresponds to the first electrode, which is formed by the inner wall of the anode tube 11. The second plate of the variable capacitor corresponds to the second electrode, which is formed by the electrode layer 122. The dielectric of the variable capacitor corresponds to the dielectric 121. The second electrode serves as the tuning voltage application terminal and can receive external electrical signals (specifically voltage signals). When a voltage is applied between the first and second electrodes, a bias electric field is generated within the dielectric 121. This bias electric field can change the dielectric constant of the dielectric 121, thereby changing the capacitance of the variable capacitor. The change in capacitance further alters the resonant frequency of the resonant cavity 110, causing a change in the operating frequency of the magnetron 10.

[0042] In this application, the dimensions of the dielectric 121 are the same as or different from the dimensions of the electrode layer 122.

[0043] In one application scenario, the width of dielectric 121 along the axial direction A of anode tube 11 is equal to the width of electrode layer 122 along the axial direction A of anode tube 11, and the arc length of dielectric 121 along the circumferential direction of anode tube 11 is equal to the arc length of electrode layer 122 along the circumferential direction of anode tube 11. At this time, electrode layer 122 completely covers the second surface of dielectric 121. Ideally, the electric field generated within dielectric 121 is uniform, and current can pass perpendicularly through dielectric 121 without bending or diverging.

[0044] In one application scenario, the width of dielectric 121 along the axial direction A of anode tube 11 is greater than the width of electrode layer 122 along the axial direction A of anode tube 11, and the arc length of dielectric 121 along the circumferential direction of anode tube 11 is greater than the arc length of electrode layer 122 along the circumferential direction of anode tube 11. In this case, electrode layer 122 does not fully cover the second surface of dielectric 121. The edges of electrode layer 122 are offset from the edges of dielectric 121, which can reduce the concentration of the edge electric field and suppress edge breakdown.

[0045] In one application scenario, the width of the dielectric 121 along the axial direction A of the anode tube 11 is smaller than the width of the electrode layer 122 along the axial direction A of the anode tube 11, and the arc length of the dielectric 121 along the circumferential direction of the anode tube 11 is smaller than the arc length of the electrode layer 122 along the circumferential direction of the anode tube 11. In this case, the electrode layer 122 completely covers the second surface of the dielectric 121. The portion of the electrode layer 122 extending around the dielectric 121 can be used for soldering leads or connecting external circuits without causing damage or contamination to the dielectric 121. Furthermore, when the coefficients of thermal expansion of the dielectric 121 and the electrode layer 122 are different, the extended electrode layer 122 can act as a buffer, preventing stress from directly acting on the dielectric 121 and causing cracking.

[0046] This application changes the dielectric constant of the dielectric material 121 by changing the voltage across it. The change in dielectric constant can cause different degrees of disturbance to the high-frequency electric field, which ultimately causes different shifts in the resonant frequency of the resonant cavity 110 of the magnetron 10, thereby achieving the purpose of adjusting the operating frequency of the magnetron 10.

[0047] It is worth noting that the speed and period of dielectric constant adjustment determine the speed and period of magnetron 10 operating frequency adjustment. Precise control of the voltage signal magnitude enables linear frequency adjustment, thereby achieving more convenient and accurate frequency regulation.

[0048] In some embodiments, see Figures 1-4 , Figure 6 The tuning assembly 12 includes at least two tuning elements 120 and a connecting ring 123. The at least two tuning elements 120 are arranged circumferentially along the anode tube 11 and are located at the same axial end of the connecting ring 123 along the axial direction A of the anode tube 11 to form a gap O between two adjacent tuning elements 120.

[0049] The shape of the connecting ring 123 includes, but is not limited to, a cylinder, annulus, ellipse, or sphere. Since both the connecting ring 123 and the tuning element 120 are located inside the anode tube 11, and the shapes of the connecting ring 123 and the anode tube 11 are the same or similar, the connecting ring 123 and the anode tube 11 are coaxially arranged. The axial end of the connecting ring 123 refers to one end of the connecting ring 123 along the axial direction A of the anode tube 11. Since the connecting ring 123 has two axial ends (e.g., front and rear ends, top and bottom), at least two tuning elements 120 located along the axial direction A of the anode tube 11 at the same axial end of the connecting ring 123 means that at least two tuning elements 120 are installed at one end of the connecting ring 123, such as the front or rear end, rather than simultaneously at the front and rear ends, to ensure that the variable capacitors equivalent to the inner wall of the anode tube 11 and each tuning element 120 are at the same potential. Here, all notches O have the same opening direction; the connecting ring 123 abuts against the inner wall of the anode tube 11.

[0050] In some embodiments, the size of the electrode layer 122 is smaller than the size of the dielectric 121. The dielectric 121 is directly disposed at the same axial end of the connecting ring 123 along the axial direction A of the anode tube 11. The dielectric 121 is connected to the connecting ring 123 (i.e., in contact with each other), while the electrode layer 122 is not in contact with the connecting ring 123. Since the dielectric of the variable capacitor corresponds to the dielectric 121, the connection of multiple dielectrics 121 with the connecting ring 123 ensures that multiple variable capacitors are at the same potential.

[0051] In some embodiments, the shape and size of the gap O between two adjacent tuning elements 120 can be determined according to the actual situation. For example, the shape of the gap O includes, but is not limited to, square, trapezoidal, V-shaped, U-shaped, semi-circular, and stepped shapes.

[0052] In some embodiments, see Figures 1-3 The magnetron 10 further includes at least two blades 111 disposed within the anode tube 11 and extending radially from the axis of the anode tube 11 towards the inner wall of the anode tube 11, thereby dividing the inner cavity of the anode tube 11 into at least two resonant cavities 110. In this case, the blades 111 can serve as isolation zones for the resonant cavities 110, and the cavity shape of the resonant cavities 110 includes, but is not limited to, fan-shaped, slotted, and elliptical shapes.

[0053] The blades 111 of this application can sense microwaves with a resonant frequency. When the anode tube 11 includes multiple blades 111, the multiple blades 111 are arranged radially at intervals. At least one end of the blade 111 away from the axis is at least partially located within a notch O, where the shape and size of the notch O are adapted to the blade 111. The number of blades 111 can be determined based on the number of notches O, which is determined by the number of tuning elements 120. The blades 111 may or may not contact the tuning elements 120, and the blades 111 may or may not contact the connecting ring 123.

[0054] In some embodiments, the blades 111 and the tuning elements 120 are arranged alternately. The end of each blade 111 away from the axis, the sidewalls of the two adjacent tuning elements 120, and the bottom surface forming the notch O (i.e., the connecting ring 123) can be equivalent to a multi-plate capacitor. The gap between the sidewall of the tuning element 120 and the blade 111 determines the capacitance value of the multi-plate capacitor, and thus the resonant frequency. In practical applications, fine-tuning can be achieved by adjusting the gap, i.e., fine-tuning the operating frequency of the magnetron 10.

[0055] In some embodiments, the notch O can not only avoid the blade 111, but also limit the blade 111 to prevent it from rotating circumferentially along the anode tube 11. In some embodiments, since the blade 111 will generate heat due to electron bombardment and high-frequency loss when the magnetron 10 is working, the notch O can play a role in heat dissipation to a certain extent, reducing the heat directly transferred to the tuner 120.

[0056] In some embodiments, the connecting ring 123 and the dielectric 121 are integrally formed, wherein the dielectric 121 is equivalent to a sector-shaped block or toothed block obtained by dividing one end of a complete ring. In some embodiments, both the connecting ring 123 and the dielectric 121 are made of barium strontium titanate ceramic.

[0057] In some embodiments, see Figures 4-6 The tuning assembly 12 further includes a conductive element 124; the electrode layers 122 of at least two tuning elements 120 are electrically connected through the conductive element 124. The conductive element 124 has electrical conductivity and includes, but is not limited to, a metal strip, an elastic conductive element, a conductive coating, and a metal tube.

[0058] In one application scenario, the electrode layers 122 of all tuners 120 are electrically connected via conductive elements 124. In another application scenario, the electrode layers 122 of some tuners 120 are electrically connected via conductive elements 124, while the electrode layers 122 of others are not electrically connected via conductive elements 124. It is noteworthy that, since the second plate of the variable capacitor corresponds to the second electrode, and the second electrode is formed by electrode layers 122, only electrically connected electrode layers 122 can receive electrical signals from the outside via conductive elements 124, thereby applying a voltage between the first and second electrodes to change the dielectric constant of the dielectric 121 and adjust the operating frequency of the magnetron 10.

[0059] In some embodiments, at least a portion of the conductive element 124 is embedded in the tuner 120. Specifically, at least a portion of the conductive element 124 is embedded in the second surface of the dielectric 121 of the tuner 120.

[0060] In some embodiments, at least a portion of the conductive element 124 is embedded in the connecting ring 123. Specifically, at least a portion of the conductive element 124 is embedded in the inner sidewall of the connecting ring 123.

[0061] It is understood that when both the connecting ring 123 and the dielectric 121 are made of insulating materials such as barium strontium titanate ceramic, the conductive element 124 directly contacts the connecting ring 123 and the dielectric 121 without conducting electricity. Therefore, it is not required that the conductive element 124 have an external insulating portion. In some embodiments, the conductive element 124 includes both a conductive layer and an insulating layer, with the insulating layer covering the conductive layer. The conductive layer is electrically connected to the electrode layers 122 of at least two tuning elements 120. The conductive layer is made of a conductive material such as metal, and the insulating layer can be made of glass, ceramic, or other materials.

[0062] In some embodiments, see Figure 1 , Figures 4-6 The conductive element 124 includes at least two first metal leads 1241 and second metal leads 1242. The first metal leads 1241 are electrically connected to the corresponding electrode layers 122 and the second metal leads 1242, respectively. The second metal leads 1242 are used to transmit external electrical signals to the first metal leads 1241 and the electrode layers 122.

[0063] In some embodiments, the number of first metal leads 1241 can be set according to the number of electrode layers 122. Specifically, the first metal leads 1241 are arranged in a one-to-one correspondence with the electrode layers 122.

[0064] In some embodiments, the first metal lead 1241 is disposed at both ends of the corresponding electrode layer 122 along the axial direction A of the anode tube 11, as detailed in the following figures. Figure 4 and Figure 5 In some embodiments, the first metal lead 1241 is disposed at one end of the corresponding electrode layer 122 along the axial direction A of the anode tube 11, as detailed in the following figures. Figure 6 and Figure 7 .

[0065] In some embodiments, the extension direction of the first metal lead 1241 is different from the extension direction of the second metal lead 1242. The extension directions of any two first metal leads 1241 may be the same or different. In one application scenario, the extension direction of the first metal lead 1241 is parallel to the axial direction A of the anode tube 11, and the extension direction of the second metal lead 1242 is parallel to the circumferential direction of the anode tube 11.

[0066] In some embodiments, the first metal lead 1241 and the second metal lead 1242 are integrally formed to ensure the continuity of signal transmission.

[0067] In some embodiments, the external electrical signal is provided by a tuned voltage source located outside the magnetron 10. The tuned voltage source serves as an input device and can be a DC regulated power supply, a socket, or something else. When the second metal lead 1242 is directly connected to the external tuned voltage source, the second metal lead 1242 needs to pass through the metal wall (such as the side wall) of the anode tube 11 to connect to the tuned voltage source. To prevent microwave leakage or short circuit between the lead and the housing when the second metal lead 1242 passes through the metal wall of the anode tube 11, the second metal lead 1242 is required to include a conductive layer and an insulating layer. The insulating layer wraps around the conductive layer to achieve isolation.

[0068] In some embodiments, see Figure 1 , Figures 4-7 The magnetron 10 also includes a third metal lead 13, which is electrically connected to the second metal lead 1242. The third metal lead 13 is used to transmit external electrical signals to the second metal lead 1242. The magnetron 10 also includes a pole piece 14, which is located at the end of the anode tube 11 and has a through hole 141. At least a portion of the third metal lead 13 passes through the through hole 141.

[0069] The pole piece 14 is typically made of a magnetically conductive material (such as pure iron or low-carbon steel). The pole piece 14 is located between the magnet of the magnetron 10 and the anode tube 11, and it is used to guide and concentrate the magnetic field generated by the magnet of the magnetron 10 into the electron interaction space inside the magnetron 10 (i.e., the region between the anode and the cathode).

[0070] The end of the anode tube 11 corresponds to one end face of the anode tube 11, such as the upper end face or the lower end face.

[0071] In some embodiments, when the third metal lead 13 is directly connected to an external tuning voltage source, the third metal lead 13 needs to pass through the metal wall of the anode tube 11 to connect to the tuning voltage source. In order to avoid microwave leakage or short circuit between the lead and the housing when the third metal lead 13 passes through the metal wall of the anode tube 11, the third metal lead 13 is required to include a conductive layer and an insulating layer, with the insulating layer wrapping the conductive layer to achieve isolation.

[0072] In some embodiments, the third metal lead 13 and the second metal lead 1242 are integrally formed to ensure the continuity of signal transmission.

[0073] In some embodiments, the conductive element 124 is integrally formed with the third metal lead 13. Specifically, the first metal lead 1241, the second metal lead 1242, and the third metal lead 13 are integrally formed to ensure the continuity of signal transmission.

[0074] In some embodiments, see Figures 2-4 , Figure 6The dielectric 121 is an arc-shaped sheet, and its radial orthographic projection onto the anode tube 11 is square. Specifically, after orthographic projection, the outer periphery of the dielectric 121 is square, which can be either a square or a rectangle.

[0075] In some embodiments, see Figures 2-4 , Figure 6 The electrode layer 122 is an arc-shaped sheet, and its radial orthographic projection onto the anode tube 11 is square. Specifically, the outer periphery of the electrode layer 122 is square after orthographic projection.

[0076] In some embodiments, see Figures 2-4 , Figure 6 The electrode layer 122 is an arc-shaped sheet, and the electrode layer 122 has at least one hollow area 1221 that runs radially through the electrode layer 122 along the anode tube 11.

[0077] The hollowed-out area 1221 serves two purposes: firstly, it reduces the effective area of ​​the electrode layer 122, thereby lowering the capacitance of the variable capacitor, which is suitable for applications involving fine-tuning the resonant frequency. Secondly, the hollowed-out area 1221 divides the large continuous electrode area into multiple smaller electrodes, exposing the corresponding dielectric 121, allowing it to directly face the resonant cavity 110. This results in a more uniform electric field distribution within the dielectric 121, preventing excessively strong local electric fields. Furthermore, since the dielectric 121 and the electrode layer 122 are made of different materials with different coefficients of thermal expansion, the high temperature environment caused by the operation of the magnetron 10 may lead to deformation of the electrode layer 122, causing cracks or breaks in the dielectric 121. To reduce the occurrence of this defect, the hollowed-out area 1221 can be used for heat dissipation.

[0078] The shape of the hollowed-out area 1221 includes, but is not limited to, circles, ovals, and squares. See also the following embodiments: Figure 3 , Figures 6-8 The cross-section of the hollowed-out region 1221 is cross-shaped. The cross-section of the hollowed-out region 1221 is perpendicular to the radial direction of the anode tube 11. In some embodiments, please refer to... Figure 8 The width d1 of the cross-shaped hollow area 1221 ranges from 0.2 to 0.4 mm, such as 0.2 mm, 0.3 mm, and 0.4 mm. The length d2 of the cross-shaped hollow area 1221 ranges from 0.8 to 1.2 mm, such as 0.8 mm, 1 mm, and 1.2 mm. The thickness d3 of the cross-shaped hollow area 1221 (not shown in the figure) ranges from 0.2 to 0.5 mm, such as 0.2 mm, 0.25 mm, and 0.5 mm. The thickness d3 of the cross-shaped hollow area 1221 is the same as the thickness of the electrode layer 122.

[0079] The number and location of the hollowed-out areas 1221 on each electrode layer 122 can be set according to actual conditions and are not limited here. In some embodiments, please refer to Figure 3 , Figures 6-8 When the electrode layer 122 includes multiple spaced-apart hollow regions 1221, the multiple hollow regions 1221 are arranged in a periodic array. The period D between two adjacent cross-shaped hollow regions 1221 ranges from 1.2 to 1.8 mm, such as 1.2 mm, 1.5 mm, and 1.8 mm.

[0080] In some embodiments, see Figure 4 and Figure 6 The axial dimension d4 of the arc-shaped sheet has a range of 3-8.8 mm, such as 3 mm, 5 mm, 7 mm, and 8.8 mm. The circumferential dimension d5 of the arc-shaped sheet is 6.2 mm, and the radial dimension of the arc-shaped sheet has a range of 0.2-0.5 mm, such as 0.2 mm, 0.25 mm, and 0.5 mm. The inner radius d6 (not shown in the figure) of the connecting ring 123 is 16.3 mm, the outer radius d7 (not shown in the figure) of the connecting ring 123 is 17.5 mm, the thickness of the connecting ring 123 is 1.2 mm (obtained by subtracting 16.3 from 17.5), and the axial depth d8 of the connecting ring 123 is 4 mm. The radial dimension d9 of the notch O is 1.2 mm, the circumferential dimension d10 of the notch O is 2 mm, and the axial dimension d11 of the notch O is 8.8 mm. The thickness of the connecting ring 123 is the same as the radial dimension d9 of the notch O. The circumferential dimension d5 of the arc-shaped sheet is less than or equal to the circumferential dimension of dielectric 121. The axial dimension d4 of the arc-shaped sheet is less than or equal to the axial dimension d11 of the notch O.

[0081] In some embodiments, in order to ensure that all resonant cavities 110 have the same dimensions, all notches O are required to have the same axial dimension.

[0082] In some embodiments, see Figures 1-3 The magnetron 10 also includes a cathode 15, also known as a filament. The cathode 15 is located inside the anode tube 11, specifically in the central region of the anode tube 11. The ends of all blades 111 that are away from the inner wall of the anode tube 11 extend toward the cathode 15, at which point all blades 111 surround the outer surface of the cathode 15.

[0083] In some embodiments, see Figure 1The magnetron 10 also includes an antenna 16. One end of the antenna 16 is connected to one of the blades 111, and the other end of the antenna 16 is bent and located at the end of the anode tube 11 for connecting to an output device (such as a processing chamber). It is worth noting that the end of the anode tube 11 here is different from the end of the upper pole piece 14. For example, if the end of the pole piece 14 is located on the upper end face of the anode tube 11, then the bent end of the antenna 16 is located on the lower end face of the anode tube 11.

[0084] In summary, in one application scenario, with Figure 2 The magnetron 10 shown is simulated using particle simulation. The initial dielectric constant of dielectric 121 is 200, and the loss tangent is 0.02. When a DC voltage of approximately 2400V is applied to electrode layer 122, the dielectric constant of dielectric 121 decreases to 160, corresponding to a tuning rate of 20%. The simulated output power of magnetron 10 is as follows. Figure 9 As shown, the magnetron 10 operates normally and stably within 100 ns. After 100 ns, a Fourier transform of the power output in the time domain yields the frequency domain characteristics as shown. Figure 10 As shown, when the dielectric constant of dielectric 121 changes, the resonant peak of magnetron 10 shifts, and the resonant frequency changes, reaching a maximum of 55.2MHz.

[0085] In one application scenario, with Figure 3 The magnetron 10 shown is simulated using particle simulation. The initial dielectric constant of dielectric 121 is 600, and the loss tangent is 0.0046. When a DC voltage of approximately 2500V is applied to electrode layer 122, the dielectric constant of dielectric 121 decreases to 400, corresponding to a tuning rate of 33%. With a dielectric constant of 600, the simulated output power of magnetron 10 is as follows... Figure 11 As shown, the magnetron 10 operates normally and stably within 100 ns. After 100 ns, a Fourier transform of the power output in the time domain yields the frequency domain characteristics as shown. Figure 13 As shown, when the dielectric constant of dielectric 121 changes, the resonant peak of magnetron 10 shifts, and the resonant frequency changes, reaching a maximum of 2.3619 GHz. When the dielectric constant is 400, the simulated output power of magnetron 10 is as follows... Figure 12 As shown, the magnetron 10 operates normally and stably within 100 ns. After 100 ns, a Fourier transform of the power output in the time domain yields the frequency domain characteristics as shown. Figure 13 As shown, when the dielectric constant of dielectric 121 changes, the resonant peak of magnetron 10 shifts, and the resonant frequency changes, reaching a maximum of 2.4246 GHz. The frequency modulation corresponding to the dielectric constant changing from 600 to 400 is approximately 62 MHz.

[0086] Please see Figure 14 This application also provides an electronic device 20, which includes the magnetron 10 of any of the above embodiments.

[0087] For the structure of the magnetron 10, please refer to the description of any of the above embodiments, which will not be repeated here.

[0088] Regarding electronic device 20, it can be a household appliance such as a microwave oven, oven, steam oven, or microwave sterilizer, or a communication device such as a ranging radar or weather radar; there are no restrictions here.

[0089] Electronic device 20 can protect the processor and memory. The processor involved in this application may be called a CPU (Central Processing Unit), which may be an integrated circuit chip, or a general-purpose processor, digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic device, discrete gate or transistor logic device, or discrete hardware component. The memory used in this application includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), or optical discs.

[0090] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A magnetron, characterized in that, include: An anode tube, wherein the inner wall of the anode tube is provided with at least two resonant cavities arranged circumferentially; A tuning assembly includes at least one tuning element disposed within one of the resonant cavities and abutting against the inner wall of the anode tube. The tuning element is configured to couple with the corresponding resonant cavity for adjusting the operating frequency of the magnetron.

2. The magnetron according to claim 1, characterized in that, The tuning element includes a dielectric body and an electrode layer. The first surface of the dielectric body abuts against the inner wall of the anode tube, and the electrode layer is disposed on a second surface of the dielectric body opposite to the first surface.

3. The magnetron according to claim 2, characterized in that, The tuning assembly includes at least two tuning elements and a connecting ring. The at least two tuning elements are arranged circumferentially spaced along the anode tube, and the at least two tuning elements are located at the same axial end of the connecting ring along the axial direction of the anode tube, so as to form a gap between two adjacent tuning elements.

4. The magnetron according to claim 3, characterized in that, The tuning assembly also includes conductive elements; At least two of the electrode layers of the tuner are electrically connected through the conductive element.

5. The magnetron according to claim 4, characterized in that, The conductive element includes at least two first metal leads and a second metal lead. The first metal leads are electrically connected to the corresponding electrode layer and the second metal lead, respectively. The second metal lead is used to transmit external electrical signals to the first metal lead and the electrode layer.

6. The magnetron according to claim 5, characterized in that, The magnetron further includes a third metal lead, which is electrically connected to the second metal lead, and the third metal lead is used to transmit the electrical signal to the second metal lead; The magnetron also includes a pole piece located at the end of the anode tube, and the pole piece has a through hole; at least a portion of the third metal lead passes through the through hole.

7. The magnetron according to claim 3, characterized in that, The electrode layer is an arc-shaped sheet, and the radial orthogonal projection of the electrode layer toward the anode tube is square.

8. The magnetron according to claim 7, characterized in that, The axial dimension of the arc-shaped sheet is 3mm, and the circumferential dimension of the arc-shaped sheet is 6.2mm; The inner radius of the connecting ring is 16.3 mm, the outer radius of the connecting ring is 17.5 mm, and the axial depth of the connecting ring is 4 mm. The radial dimension of the notch is 1.2 mm, the circumferential dimension of the notch is 2 mm, and the axial dimension of the notch is 8.8 mm.

9. The magnetron according to any one of claims 2-8, characterized in that, The dielectric is made of ferroelectric material.

10. An electronic device, characterized in that, Includes the magnetron according to any one of claims 1-9.

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