A luminescence modulation device based on in-plane hyperbolic metamaterials and a preparation method thereof

Abstract

This invention relates to the technical field of light-emitting control devices, and more specifically, to a light-emitting control device based on in-plane hyperbolic plasmons and its fabrication method. The method includes: S1. taking a supporting substrate layer and pre-treating it; S2. obtaining a two-dimensional hyperbolic plasmon metal layer using a mechanical exfoliation method, and then transferring it onto the supporting substrate layer; S3. taking a two-dimensional transition metal chalcogenide layer and transferring it onto the two-dimensional hyperbolic plasmon metal layer by dry transfer printing to obtain the light-emitting control device. The device includes a supporting substrate layer, a two-dimensional hyperbolic plasmon metal layer, and a two-dimensional transition metal chalcogenide layer stacked sequentially from bottom to top. This invention utilizes the anisotropic plasmon properties of natural hyperbolic materials to achieve polarization selection for enhanced light emission of the two-dimensional light-emitting crystal, thereby realizing the control of the emission polarization state.

Description

Technical Field

[0001] This invention relates to the technical field of light-emitting control devices, and more specifically, to a light-emitting control device based on in-plane hyperbolic plasmons and its fabrication method. Background Technology

[0002] Hyperbolic materials are a class of optical materials exhibiting anisotropic electromagnetic response. Their anisotropic structure causes light propagation within them to differ significantly from that in traditional isotropic materials, supporting unconventional propagation modes and displaying a large wave vector and open distribution in momentum space. Most existing hyperbolic materials are achieved through artificially constructed metamaterial structures, such as alternating stacked metal and dielectric layers or nanowire arrays, achieving equivalent anisotropic optical responses through subwavelength-scale periodic design. While these artificial hyperbolic metamaterials offer high tunability, they suffer from limitations such as complex fabrication processes and high energy loss.

[0003] In terms of fabrication technology, existing hyperbolic structures mostly rely on complex artificial periodic multilayer structures, generally employing methods such as magnetron sputtering and atomic layer deposition for alternating layer-by-layer deposition, requiring precise control of the thickness of each layer, making fabrication difficult. Furthermore, artificial hyperbolic metamaterials are generally prepared using noble metals, such as silver, but these materials suffer from easy oxidation, limiting their practical application and promotion.

[0004] Furthermore, since artificial hyperbolic metamaterials are typically formed by periodically alternating deposition of metal and dielectric layers on a substrate, the anisotropy of such structures is mainly manifested in the direction perpendicular to the thin film interface. That is, the equivalent dielectric constant in the out-of-plane direction differs significantly from that in the in-plane direction, resulting in typical uniaxial anisotropy. In this structural system, the propagation path and energy distribution of hyperbolic plasmons mainly unfold along the out-of-plane direction, exhibiting propagation characteristics dominated by the out-of-plane direction. Since each functional layer is usually a continuous and homogeneous structure in the in-plane direction, its in-plane equivalent dielectric response is approximately isotropic, meaning the electromagnetic response is essentially the same in different in-plane directions. In this case, the coupling between the luminescent unit and the structure lacks direction selectivity, making it difficult to effectively distinguish and control the polarization state during the luminescence process. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of existing hyperbolic metamaterials in terms of emission polarization modulation function, and to provide an emission modulation device and preparation method based on in-plane hyperbolic plasmons. By utilizing the anisotropic plasmon characteristics of natural hyperbolic materials, polarization selection for emission enhancement of luminescent two-dimensional crystals can be achieved, thereby realizing the modulation of emission polarization state.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: A method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons is provided, comprising the following steps: S1. Take the supporting substrate layer and pre-treat the supporting substrate layer; S2. A two-dimensional hyperbolic plasmonic metal layer is obtained by mechanical peeling, and then the two-dimensional hyperbolic plasmonic metal layer is transferred to the pretreated support substrate layer; S3. Take a two-dimensional transition metal chalcogenide layer and transfer it onto the two-dimensional hyperbolic plasmon metal layer by dry transfer printing to obtain a light-emitting control device.

[0007] This invention discloses a method for fabricating a light-emitting control device based on in-plane hyperbolic plasmon polaritons. A two-dimensional hyperbolic plasmon metal layer and a two-dimensional transition metal chalcogenide layer are stacked on a supporting substrate. The two-dimensional hyperbolic plasmon metal layer serves as the control layer, and the two-dimensional transition metal chalcogenide layer serves as the light-emitting layer, forming a heterostructure device. Utilizing the anisotropic plasmon properties of natural hyperbolic materials, polarization-selective luminescence enhancement of the light-emitting two-dimensional crystal can be achieved, thereby realizing the control of the light emission polarization state. Specifically, the luminescence intensity and polarization direction of the two-dimensional transition metal chalcogenide layer are simultaneously controlled by both the polarization direction of the pump laser and the lattice orientation of the two-dimensional hyperbolic plasmon metal layer. When the pump laser vertically... When the prepared light-emitting control device is directly irradiated, excitons are generated in the two-dimensional transition metal chalcogenide layer, and light emission is produced when the excitons recombine. The two-dimensional hyperbolic plasmon metal layer has a relatively high dielectric constant, which acts as an electrostatic shield for the excitons in the two-dimensional transition metal chalcogenide layer, thereby improving the polarization-maintaining property of the light emission. The excitons in the two-dimensional transition metal chalcogenide layer are transferred to the two-dimensional hyperbolic plasmon metal layer through interlayer transfer, which can shorten the average lifetime of exciton recombination and improve the polarization-maintaining property of the light emission. The light emission generated by exciton recombination is coupled with the in-plane anisotropic hyperbolic plasmons in the two-dimensional hyperbolic plasmon metal layer, which can improve the intensity and polarization degree of the light emission, thereby realizing the control of the polarization state of the light emission.

[0008] Furthermore, the two-dimensional hyperbolic plasmon metal layer is a molybdenum dichloride oxide sheet.

[0009] Furthermore, the two-dimensional transition metal chalcogenide layer is any one of molybdenum diselenide, molybdenum disulfide, tungsten diselenide, and tungsten disulfide.

[0010] Further, step S1 includes the following steps: S11. Take the supporting substrate layer, perform ultrasonic cleaning on the supporting substrate layer and dry it; S12. Perform plasma cleaning on the supporting substrate layer.

[0011] Further, step S2 includes the following steps: S21. Use adhesive tape to adhere molybdenum dichloride blocks, and obtain molybdenum dichloride sheets by repeatedly bonding the adhesive tape together; S22. Adhesive tape with molybdenum dichloride sheet attached is applied to the supporting substrate layer, and then the tape is peeled off. The molybdenum dichloride sheet layer is attached to the supporting substrate layer by van der Waals forces to obtain the first sample. S23. The first sample is heated to remove air bubbles between the molybdenum dichloride sheet and the supporting substrate layer.

[0012] Further, step S3 includes the following steps: S31. Take a glass slide, a PDMS film, and a PC film. Place the PDMS film on the glass slide, and then cover the PDMS film with the PC film to obtain a transfer carrier. S32. Take a two-dimensional transition metal chalcogenide layer, and bring the PC film end of the transfer carrier into contact with the two-dimensional transition metal chalcogenide layer to obtain a second sample; S33. The second sample is heated, and while heated, the second sample is moved to the top of the two-dimensional hyperbolic plasmonic metal layer. Then, the two-dimensional transition metal chalcogenide layer of the second sample is brought into contact and stacked with the two-dimensional hyperbolic plasmonic metal layer to obtain the third sample. S34. The third sample is heated to separate the two-dimensional transition metal chalcogenide layer from the transfer carrier.

[0013] Further, before performing step S3, the sample obtained in step S2 is soaked, cleaned, and dried; in step S3, after the two-dimensional transition metal chalcogenide layer is transferred to the two-dimensional hyperbolic plasmon metal layer, the obtained sample is soaked, cleaned, and dried, and then the light-emitting control device is obtained.

[0014] The present invention also provides a light emission control device based on in-plane hyperbolic plasmons, comprising a supporting substrate layer, a two-dimensional hyperbolic plasmon metal layer, and a two-dimensional transition metal chalcogenide layer stacked sequentially from bottom to top, wherein the two-dimensional hyperbolic plasmon metal layer is a molybdenum dichloride sheet layer, and the two-dimensional transition metal chalcogenide layer is any one of a molybdenum diselenide layer, a molybdenum disulfide layer, a tungsten diselenide layer, and a tungsten disulfide layer.

[0015] Furthermore, the area of ​​the two-dimensional hyperbolic plasmonic metal layer is greater than or equal to the area of ​​the two-dimensional transition metal chalcogenide layer, and the thickness of the two-dimensional hyperbolic plasmonic metal layer is greater than the thickness of the two-dimensional transition metal chalcogenide layer.

[0016] Furthermore, the supporting substrate layer includes a silicon-based substrate layer and a silicon dioxide substrate layer stacked on the silicon-based substrate layer, wherein the silicon-based substrate layer is an intrinsic silicon substrate layer or a doped silicon substrate layer.

[0017] Compared with the prior art, the beneficial effects of the present invention are: This invention discloses a light-emitting control device and its fabrication method based on in-plane hyperbolic plasmon polaritons. A two-dimensional hyperbolic plasmon metal layer and a two-dimensional transition metal chalcogenide layer are stacked on a supporting substrate. The two-dimensional hyperbolic plasmon metal layer serves as the control layer, and the two-dimensional transition metal chalcogenide layer serves as the light-emitting layer, forming a heterostructure device. Utilizing the anisotropic plasmon properties of natural hyperbolic materials, polarization-selective light-emitting enhancement of the light-emitting two-dimensional crystal can be achieved, thereby realizing the control of the light-emitting polarization state. Specifically, the light-emitting intensity and polarization direction of the two-dimensional transition metal chalcogenide layer are simultaneously controlled by the polarization direction of the pump laser and the lattice orientation of the two-dimensional hyperbolic plasmon metal layer. When the pump laser vertically... When the prepared light-emitting control device is directly irradiated, excitons are generated in the two-dimensional transition metal chalcogenide layer, and light emission is produced when the excitons recombine. The two-dimensional hyperbolic plasmon metal layer has a relatively high dielectric constant, which acts as an electrostatic shield for the excitons in the two-dimensional transition metal chalcogenide layer, thereby improving the polarization-maintaining property of the light emission. The excitons in the two-dimensional transition metal chalcogenide layer are transferred to the two-dimensional hyperbolic plasmon metal layer through interlayer transfer, which can shorten the average lifetime of exciton recombination and improve the polarization-maintaining property of the light emission. The light emission generated by exciton recombination is coupled with the in-plane anisotropic hyperbolic plasmons in the two-dimensional hyperbolic plasmon metal layer, which can improve the intensity and polarization degree of the light emission, thereby realizing the control of the polarization state of the light emission. Attached Figure Description

[0018] Figure 1 This is a flowchart illustrating a method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons according to the present invention. Figure 2 This is a schematic diagram of the device structure formed after step S1 in the preparation method of the present invention; Figure 3 This is a schematic diagram of the device structure formed after step S2 in the preparation method of the present invention; Figure 4 This is a schematic diagram of the device structure formed after step S3 in the preparation method of the present invention; Figure 5 The emission spectra of the device prepared by the method of the present invention were measured when the pump laser was polarized parallel to the X-axis and Y-axis directions, respectively. Figure 6 A schematic diagram of the structure of a light-emitting modulation device based on in-plane hyperbolic plasmons according to the present invention.

[0019] In the attached figures: 100, supporting substrate layer; 200, two-dimensional hyperbolic plasmon metal layer; 300, two-dimensional transition metal chalcogenide layer. Detailed Implementation

[0020] The present invention will be further described below with reference to specific embodiments. The accompanying drawings are for illustrative purposes only, representing schematic diagrams rather than actual physical objects, and should not be construed as limiting the scope of this patent. To better illustrate the embodiments of the present invention, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0021] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components. In the description of the present invention, it should be understood that if terms such as "upper," "lower," "left," "right," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting the present patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0022] Example 1 like Figures 1 to 4 The figure shows a first embodiment of a method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons according to the present invention, which includes the following steps: S1. Take the support substrate layer 100 and pre-treat the support substrate layer 100; S2. The two-dimensional hyperbolic plasmonic metal layer 200 is obtained by mechanical peeling, and then the two-dimensional hyperbolic plasmonic metal layer 200 is transferred onto the pretreated support substrate layer 100. S3. Take the two-dimensional transition metal chalcogenide layer 300 and transfer it onto the two-dimensional hyperbolic plasmon metal layer 200 by dry transfer printing to obtain the light-emitting control device.

[0023] This invention discloses a method for fabricating a light-emitting control device based on in-plane hyperbolic plasmon polaritons. A two-dimensional hyperbolic plasmon metal layer 200 and a two-dimensional transition metal chalcogenide layer 300 are stacked on a supporting substrate layer 100. The two-dimensional hyperbolic plasmon metal layer 200 serves as the control layer, and the two-dimensional transition metal chalcogenide layer 300 serves as the light-emitting layer, forming a heterostructure device. Utilizing the anisotropic plasmon properties of natural hyperbolic materials, polarization-selective light emission enhancement of the light-emitting two-dimensional crystal can be achieved, thereby realizing the control of the light emission polarization state. The light emission intensity and polarization direction of the two-dimensional transition metal chalcogenide layer 300 are simultaneously controlled by the polarization direction of the pump laser and the lattice direction of the two-dimensional hyperbolic plasmon metal layer 200. When the pump laser... When the prepared light-emitting control device is irradiated perpendicularly, the two-dimensional transition metal chalcogenide layer 300 is excited to generate excitons, and light emission is generated when the excitons recombine. The two-dimensional hyperbolic plasmon metal layer 200 has a relatively high dielectric constant, which acts as an electrostatic shield for the excitons in the two-dimensional transition metal chalcogenide layer 300, thereby improving the polarization-maintaining property of light emission. The excitons in the two-dimensional transition metal chalcogenide layer 300 are transferred to the two-dimensional hyperbolic plasmon metal layer 200 through interlayer transfer, which can shorten the average lifetime of exciton recombination and improve the polarization-maintaining property of light emission. The light emission generated by exciton recombination is coupled with the in-plane anisotropic hyperbolic plasmons in the two-dimensional hyperbolic plasmon metal layer 200, which can improve the intensity and polarization degree of light emission, thereby realizing the control of the polarization state of light emission.

[0024] In this embodiment, the two-dimensional hyperbolic plasmon metal layer 200 is a molybdenum dichloride sheet. The two-dimensional transition metal chalcogenide layer 300 is any one of a molybdenum diselenide layer, a molybdenum disulfide layer, a tungsten diselenide layer, and a tungsten disulfide layer. The supporting substrate layer 100 includes a silicon-based substrate layer and a silicon dioxide substrate layer stacked on the silicon-based substrate layer.

[0025] like Figure 2 As shown, step S1 includes the following steps: S11. Take the support substrate 100, perform ultrasonic cleaning and dry the support substrate 100; specifically, put the support substrate 100 into acetone, isopropanol and deionized water respectively for ultrasonic cleaning, and after cleaning, purge with nitrogen to obtain a clean support substrate 100. S12. Perform plasma cleaning on the support substrate 100; specifically, with the silicon dioxide substrate of the dried support substrate 100 facing upwards, perform plasma cleaning to increase the hydrophilicity of the surface and improve the adhesion of the support substrate 100 to the two-dimensional metal layer.

[0026] like Figure 3 As shown, step S2 includes the following steps: S21. Use tape to adhere molybdenum dichloride blocks, and reduce the thickness of the molybdenum dichloride blocks on the tape by repeatedly bonding the tape to obtain molybdenum dichloride sheets; S22. Adhesive tape with molybdenum dichloride sheet attached is applied to the silicon dioxide substrate of the support substrate 100, and then the tape is peeled off. The molybdenum dichloride sheet is attached to the support substrate 100 by van der Waals forces to obtain the first sample. Subsequently, the thickness of the molybdenum dichloride sheet can be characterized using an atomic force microscope. S23. The first sample is heated to remove air bubbles between the molybdenum dichloride sheet and the support substrate 100, thereby increasing the adhesion between the two.

[0027] In this embodiment, step S2 further includes S24: soaking, cleaning and drying the sample obtained in step S23. Specifically, the sample is soaked and cleaned in acetone, isopropanol and deionized water respectively, and then dried with nitrogen gas.

[0028] Example 2 This embodiment is a second embodiment of a method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmon resonances. This embodiment is similar to Embodiment 1, such as... Figure 4 As shown, step S3 includes the following steps: S31. Take a glass slide, a PDMS film, and a PC film. Place the PDMS film on the glass slide, and then cover the PDMS film with the PC film to obtain a transfer carrier. S32. Take a two-dimensional transition metal chalcogenide layer 300, and bring the PC film end of the transfer carrier into contact with the two-dimensional transition metal chalcogenide layer 300 to obtain a second sample; specifically, use a transfer device, control the transfer end of the transfer device to hold the glass slide of the transfer carrier, and then bring the PC film of the transfer carrier into contact with the two-dimensional transition metal chalcogenide layer 300 to obtain a second sample; it should be noted that the transfer device can be the Meratest E1 series two-dimensional material metallographic micro-transfer system; S33. The second sample is heated, and while heated, the second sample is moved to the top of the two-dimensional hyperbolic plasmonic metal layer 200. Then, the two-dimensional transition metal chalcogenide layer 300 of the second sample is brought into contact and stacked with the two-dimensional hyperbolic plasmonic metal layer 200 to obtain the third sample. It should be noted that heating the second sample softens the PC film and increases the adhesion between the PC film and the two-dimensional transition metal chalcogenide layer 300. While heated, the transfer end of the transfer device holds the glass slide in the second sample and lifts the sample. During this lifting, the two-dimensional transition metal chalcogenide layer 300 is lifted along with the transfer carrier. Then, the transfer device moves the second sample directly above the two-dimensional hyperbolic plasmon polariton layer 200. Next, the two-dimensional transition metal chalcogenide layer 300 of the second sample is brought into contact and stacked with the two-dimensional hyperbolic plasmon polariton layer 200. During this contact and stacking process, alignment can be observed using an optical microscope to obtain the third sample. S34. The third sample is heated to melt the PC film, which is used to separate the two-dimensional transition metal chalcogenide layer 300 from the transfer carrier, leaving the two-dimensional transition metal chalcogenide layer 300 on the surface of the molybdenum dichloride sheet; specifically, under heating, the transfer carrier is lifted using a transfer device, and the two-dimensional transition metal chalcogenide layer 300 can be separated from the transfer carrier.

[0029] In this embodiment, step S3 further includes step S35: soaking, cleaning and drying the sample obtained in step S34 to obtain the light-emitting control device; specifically, the sample is soaked in chloroform and deionized water respectively, and then dried with nitrogen gas to complete the preparation of the light-emitting control device.

[0030] In this embodiment, the dielectric constant of the

[100] crystal orientation of the molybdenum dichloride sheet is less than zero, and the dielectric constant of the

[010] crystal orientation of the molybdenum dichloride sheet is greater than zero. Figure 4 In the diagram, the X-axis direction of the molybdenum dichloride sheet corresponds to the

[100] crystal orientation of the molybdenum dichloride sheet, and the Y-axis direction of the molybdenum dichloride sheet corresponds to the

[010] crystal orientation of the molybdenum dichloride sheet. For example... Figure 5 As shown, when the laser is polarized along the X-axis, the light emission of the light-emitting control device has a strong intensity; when the laser is polarized along the Y-axis, the light emission of the light-emitting control device has a weak intensity. Therefore, it can be concluded that the light emission of the light-emitting control device of the present invention is subject to obvious in-plane anisotropic modulation.

[0031] This invention discloses a method for fabricating a photoluminescence modulation device based on in-plane hyperbolic plasmons, enabling in-plane anisotropic photoluminescence modulation. Through a heterostructure of a two-dimensional hyperbolic plasmon metal layer 200 and a two-dimensional transition metal chalcogenide layer 300, combined with the synergistic modulation of the pump laser polarization direction and the material lattice direction, in-plane anisotropic modulation of the luminescence intensity and polarization direction can be achieved. The two-dimensional hyperbolic plasmon metal layer 200 possesses a high dielectric constant, effectively shielding exciton decoherence effects and suppressing polarization degradation. Simultaneously, through exciton interlayer transfer and plasmon coupling, it shortens the exciton recombination lifetime, enhances the photoluminescence intensity, and improves polarization retention. The photoluminescence modulation device fabricated using this method exhibits good structural stability and integration compatibility with two-dimensional semiconductor materials.

[0032] Example 3 like Figure 6 The illustration shows an embodiment of a light-emitting control device based on in-plane hyperbolic plasmons according to the present invention. It includes a supporting substrate layer 100, a two-dimensional hyperbolic plasmon metal layer 200, and a two-dimensional transition metal chalcogenide layer 300, stacked sequentially from bottom to top. The two-dimensional hyperbolic plasmon metal layer 200 is a molybdenum dichloride sheet, and the two-dimensional transition metal chalcogenide layer 300 is any one of molybdenum diselenide, molybdenum disulfide, tungsten diselenide, and tungsten disulfide. This light-emitting control device based on in-plane hyperbolic plasmons can be prepared using the preparation method described in Embodiment 1 or Embodiment 2. The light-emitting control device based on in-plane hyperbolic plasmons of the present invention exhibits good structural stability and integration compatibility with two-dimensional semiconductor materials.

[0033] In this embodiment, specifically, the molybdenum dichloride sheet is a molybdenum dichloride crystalline nanosheet. The molybdenum dichloride crystalline nanosheet exhibits extreme anisotropy in the visible to near-infrared band (427~3024nm). Specifically, the dielectric constant of the

[100] crystal orientation of the molybdenum dichloride sheet is less than zero, and the dielectric constant of the

[010] crystal orientation of the molybdenum dichloride sheet is greater than zero. The emission wavelength of any one of the materials selected from the molybdenum diselenide layer, molybdenum disulfide layer, tungsten diselenide layer, and tungsten disulfide layer in the two-dimensional transition metal chalcogenide layer 300 matches the hyperbolic plasmon polariton operating band of the molybdenum dichloride sheet.

[0034] In this embodiment, the area of ​​the two-dimensional hyperbolic plasmon metal layer 200 is greater than or equal to the area of ​​the two-dimensional transition metal chalcogenide layer 300, and the area of ​​the supporting substrate layer 100 is greater than the area of ​​the two-dimensional hyperbolic plasmon metal layer 200. In this embodiment, the supporting substrate layer 100 includes a silicon-based substrate layer and a silicon dioxide substrate layer stacked on the silicon-based substrate layer. The silicon-based substrate layer is an intrinsic silicon substrate layer or a doped silicon substrate layer.

[0035] Specifically, the thickness of the two-dimensional hyperbolic plasmon metal layer 200 is greater than the thickness of the two-dimensional transition metal chalcogenide layer 300; preferably, the thickness of the two-dimensional hyperbolic plasmon metal layer 200 is set to 10~60 nm, and the thickness of the two-dimensional transition metal chalcogenide layer 300 is set to 0.6~0.7 nm, and further, the thickness of the two-dimensional transition metal chalcogenide layer 300 is set to 0.63 nm.

[0036] In the specific implementation of the above embodiments, the technical features can be combined in any non-contradictory way. For the sake of brevity, not all possible combinations of the above technical features are described. However, as long as the combination of these technical features is not contradictory, it should be considered to be within the scope of this specification.

[0037] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons, characterized in that, Includes the following steps: S1. Take the support substrate layer (100) and pre-treat the support substrate layer (100); S2. A two-dimensional hyperbolic plasmonic metal layer (200) is obtained by mechanical peeling, and then the two-dimensional hyperbolic plasmonic metal layer (200) is transferred onto the pretreated support substrate layer (100); S3. Take a two-dimensional transition metal chalcogenide layer (300) and transfer the two-dimensional transition metal chalcogenide layer (300) onto the two-dimensional hyperbolic plasmon metal layer (200) by dry transfer printing to obtain a light-emitting control device.

2. The method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons according to claim 1, characterized in that, The two-dimensional hyperbolic plasmon metal layer (200) is a molybdenum dichloride oxide sheet.

3. The method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons according to claim 1, characterized in that, The two-dimensional transition metal chalcogenide layer (300) is any one of molybdenum diselenide layer, molybdenum disulfide layer, tungsten diselenide layer, and tungsten disulfide layer.

4. The method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons according to claim 1, characterized in that, Step S1 includes the following steps: S11. Take the supporting substrate layer (100), perform ultrasonic cleaning on the supporting substrate layer (100) and dry it; S12. Perform plasma cleaning on the supporting substrate layer (100).

5. The method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons according to claim 1, characterized in that, Step S2 includes the following steps: S21. Use adhesive tape to adhere molybdenum dichloride blocks, and obtain molybdenum dichloride sheets by repeatedly bonding the adhesive tape together; S22. Adhesive tape with molybdenum dichloride sheet attached is applied to the support substrate layer (100), and then the tape is peeled off. The molybdenum dichloride sheet is attached to the support substrate layer (100) by van der Waals forces to obtain the first sample. S23. The first sample is heated to remove air bubbles between the molybdenum dichloride sheet and the supporting substrate layer (100).

6. The method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons according to claim 1, characterized in that, Step S3 includes the following steps: S31. Take a glass slide, a PDMS film, and a PC film. Place the PDMS film on the glass slide, and then cover the PDMS film with the PC film to obtain a transfer carrier. S32. Take a two-dimensional transition metal chalcogenide layer (300), and bring the PC film end of the transfer carrier into contact with the two-dimensional transition metal chalcogenide layer (300) to obtain a second sample; S33. The second sample is heated, and while heated, the second sample is moved directly above the two-dimensional hyperbolic plasmonic metal layer (200). Then, the two-dimensional transition metal chalcogenide layer (300) of the second sample is brought into contact and stacked with the two-dimensional hyperbolic plasmonic metal layer (200) to obtain the third sample. S34. The third sample is heated to separate the two-dimensional transition metal chalcogenide layer (300) from the transfer carrier.

7. The method for fabricating a light-emitting modulation device based on in-plane hyperbolic plasmons according to claim 1, characterized in that, Before performing step S3, the sample obtained in step S2 is soaked, cleaned and dried; in step S3, after the two-dimensional transition metal chalcogenide layer (300) is transferred to the two-dimensional hyperbolic plasmon metal layer (200), the obtained sample is soaked, cleaned and dried, and then the light-emitting control device is obtained.

8. A light-emitting modulation device based on in-plane hyperbolic plasmons, characterized in that, The material comprises a support substrate layer (100), a two-dimensional hyperbolic plasmonic metal layer (200), and a two-dimensional transition metal chalcogenide layer (300) stacked sequentially from bottom to top. The two-dimensional hyperbolic plasmonic metal layer (200) is a molybdenum dichloride sheet, and the two-dimensional transition metal chalcogenide layer (300) is any one of molybdenum diselenide, molybdenum disulfide, tungsten diselenide, and tungsten disulfide.

9. The light-emitting modulation device based on in-plane hyperbolic plasmons according to claim 8, characterized in that, The area of ​​the two-dimensional hyperbolic plasmon metal layer (200) is greater than or equal to the area of ​​the two-dimensional transition metal chalcogenide layer (300), and the thickness of the two-dimensional hyperbolic plasmon metal layer (200) is greater than the thickness of the two-dimensional transition metal chalcogenide layer (300).

10. The light-emitting modulation device based on in-plane hyperbolic plasmons according to claim 8, characterized in that, The supporting substrate layer (100) includes a silicon-based substrate layer and a silicon dioxide substrate layer stacked on the silicon-based substrate layer, wherein the silicon-based substrate layer is an intrinsic silicon substrate layer or a doped silicon substrate layer.

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