Symmetrically driven wafer gap equidistant expansion apparatus

Abstract

This invention relates to the field of wafer processing equipment technology, specifically to a symmetrically driven wafer gap equal-distance expansion device, comprising a frame, a mounting groove on the frame, an electric push rod fixedly mounted in the mounting groove, and a cylindrical push block fixedly mounted on the output end of the electric push rod; an elastic membrane is provided on the frame, and a fixing ring is fixedly mounted on the frame, the fixing ring being used to cooperate with the frame to clamp and fix the elastic membrane; auxiliary ring one and auxiliary ring two are fixedly mounted on the side of the elastic membrane near the frame, the auxiliary ring one and auxiliary ring two are concentrically arranged, and the centers of the auxiliary ring one and auxiliary ring two coincide with the center of the fixing ring; multiple claws are arranged in a ring array at the top of the push block, and the center of the ring array coincides with the center of the top surface of the push block; the claws are used to abut against the auxiliary ring one and auxiliary ring two. This invention improves the consistency and reliability of wafer gap equal-distance expansion.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, specifically to a symmetrically driven wafer gap equal-distance expansion device. Background Technology

[0002] A wafer gap equal-spacing expansion device is a specialized apparatus used in semiconductor packaging or microelectronics manufacturing processes. Its main function is to uniformly stretch an expansion film carrying multiple wafers (or chips) radially or in a specific direction, thereby increasing the physical spacing between the wafers and facilitating subsequent pick-up, mounting, or inspection operations. This type of equipment typically uses mechanical means to induce controllable plastic or elastic deformation in the expansion film, achieving equal-spacing separation of the wafer array. For example, the patent document with publication number CN111128840A, entitled "Wafer Expansion Method and Wafer Expansion Apparatus," discloses an existing form of such equipment.

[0003] Currently, most common wafer gap equal-pitch expansion equipment relies on the mechanical properties of the expansion film itself to transmit the expansion force. However, in actual production, inherent deviations exist in the material, thickness, microstructure, and manufacturing process of the expansion film, resulting in a non-uniform distribution of its elastic modulus in different regions (such as center and edge, longitudinal and transverse). When the equipment applies an expansion force to the expansion film, areas with lower elastic modulus will experience relatively large local deformation, while areas with higher elastic modulus will deform less, thus causing non-uniform wafer displacement. This uneven expansion phenomenon directly undermines the equidistant arrangement accuracy between wafers, causing some wafers to be too large or too small in pitch, increasing the risk of nozzle positioning errors, wafer collisions, or pick-up failures during subsequent pick-up processes. Especially in the processing of high-density, small-pitch wafer arrays, the expansion deviation caused by uneven elastic distribution will be further amplified, seriously affecting packaging yield and production efficiency.

[0004] Therefore, overcoming the problem of uneven wafer expansion caused by uneven elastic distribution of the expansion film and improving the consistency and reliability of equidistant expansion of wafer gaps is a technical problem that urgently needs to be solved in this field.

[0005] To address this, a symmetrically driven wafer gap equal-distance expansion device is proposed. Summary of the Invention

[0006] The purpose of this invention is to provide a symmetrically driven wafer gap equal-distance expansion device to improve the consistency and reliability of wafer gap equal-distance expansion.

[0007] To achieve the above objectives, the present invention provides the following technical solution: A symmetrically driven wafer gap equal-distance expansion device includes a frame with a mounting groove. An electric push rod is fixedly mounted in the mounting groove, and a cylindrical push block is fixedly mounted on the output end of the electric push rod. An elastic membrane is provided on the frame, and a fixing ring is fixedly mounted on the frame to clamp and fix the elastic membrane. An auxiliary ring one and an auxiliary ring two are fixedly mounted on the side of the elastic membrane near the frame. The auxiliary ring one and auxiliary ring two are concentrically arranged, and their centers coincide with the center of the fixing ring. Multiple claws are arranged in a ring array at the top of the push block, and the center of the ring array coincides with the center of the top surface of the push block. The claws abut against the auxiliary ring one and auxiliary ring two.

[0008] Based on this setup, as a preparatory step before using this invention, the cut and aligned wafers need to be placed on the elastic film. Additionally, it should be noted beforehand that the diameter of auxiliary ring one is larger than the diameter of auxiliary ring two, and both auxiliary ring one and auxiliary ring two are elastic rings.

[0009] In the use of this invention, the elastic membrane is first fixedly installed on the frame using a fixing ring. Then, the push block is pushed upward by an electric push rod. At this time, the push block is pushed upward, thereby pushing the elastic membrane upward simultaneously. The elastic membrane undergoes elastic deformation at this time, and this elastic deformation is used to expand the spacing between the wafers on the elastic membrane, thereby increasing the spacing between the wafers.

[0010] During the above process, as the elastic membrane expands elastically, auxiliary ring one and auxiliary ring two will also undergo elastic deformation, resulting in an increase in diameter. Furthermore, as the diameter increases, auxiliary ring one and auxiliary ring two will gradually pass over the top claws arranged in a ring array with different radii, from the inside out, according to the degree of diameter increase. After the electric push rod has extended a certain stroke, auxiliary ring one and auxiliary ring two will each have expanded by a certain radius, and at this point, they are no longer in contact with the top claws.

[0011] At this point, retracting the electric actuator downwards causes the elastic membrane to contract due to elastic force. When the electric actuator retracts a certain distance, taking auxiliary ring one as an example, auxiliary ring one will exactly abut against the nearest ring of claws closest to its center. These claws limit the retraction of auxiliary ring one, allowing the portion of the elastic membrane enclosed by auxiliary ring one to maintain its current degree of expansion. Similarly, auxiliary ring two is also limited by the corresponding claws, allowing the portion of the elastic membrane enclosed by auxiliary ring two to maintain its current degree of expansion.

[0012] Therefore, by utilizing the interaction of auxiliary ring one, auxiliary ring two, and the top claws, the elastic membrane can be divided into multiple concentric annular regions separated by auxiliary ring one and auxiliary ring two. The expansion degree of each region is limited by its corresponding top claw group, and the elastic force between different regions will not affect each other. Thus, even if the elastic modulus of the elastic membrane exhibits a non-uniform distribution in different regions due to manufacturing defects or other factors, this effect will only be limited to the annular region where the defect is located, and will not cause a wider impact, thereby helping to improve the overall consistency and reliability of the wafer gaps on the elastic membrane.

[0013] Furthermore, the top edge of the pusher block is rounded. By providing a rounded chamfer, damage to the elastic membrane from the sharp edge of the pusher block can be avoided, thereby improving the reliability of the invention.

[0014] Preferably, the top of the push block is provided with a drag-reducing groove, and both the auxiliary ring one and the auxiliary ring two are provided with chamfered portions.

[0015] The drag-reducing groove effectively reduces the contact area between the pusher and the elastic membrane when the pusher moves it, thus reducing friction and making the pusher's driving process smoother. This avoids uneven force distribution or movement jamming on the elastic membrane due to excessive friction. The chamfered portions on auxiliary rings one and two are located on the side furthest from their own center. Therefore, when the top claw contacts auxiliary ring one or two, the chamfered portion allows auxiliary ring one or two to smoothly and unidirectionally pass over the top claw or obstacle, further ensuring the stability of the elastic membrane's expansion and deformation, and thus improving the stability of the entire wafer gap expansion process.

[0016] Preferably, the push block has an installation cavity, a first slide groove, and a second slide groove. Both slide grooves one and two communicate with the installation cavity and with the external side of the push block. A rack is movably mounted in slide groove one, and a gear is rotatably mounted in the installation cavity, meshing with the rack. A push spring is fixedly mounted in slide groove one and fixedly connected to the rack. A top block is movably mounted in slide groove two, with teeth at its lower end meshing with the gear. A chamfer is formed on the rack. The push block has a third slide groove, with its two ends communicating with slide groove two and a drag-reducing groove, respectively. A steel cable is movably mounted in slide groove three, with one end fixedly connected to the top block and a claw fixedly mounted on the other end of the cable, movably positioned within slide groove three.

[0017] With this setup, when the push block is fully retracted into the mounting slot, the push spring is compressed, and the rack is also fully retracted into the slide groove one. The rack cannot be pushed out of the slide groove one due to the limiting effect of the side wall of the mounting slot. When the electric push rod pushes the push block upwards until the slide groove one is pushed out of the mounting slot, the rack inside the slide groove one will be pushed out of the push block by the elastic force of the push spring due to the loss of the mounting slot's limiting effect. At the same time, the rack drives the gear to rotate, and the gear then drives the top block to move upwards through its teeth. Because of the limiting effect of the deformation of the steel cable in the slide groove three, the upward-moving top block can transmit the thrust to the top claw through the steel cable, causing the top claw to extend outwards from the slide groove three.

[0018] With this configuration, the pusher claw will be housed within the pusher block before the rack is pushed out of the slide groove by the push spring, thus avoiding engagement with auxiliary rings one and two, and preventing any obstruction to them. Therefore, during the process of the pusher block pushing the elastic membrane to cause its expansion, the pusher claw will not hinder the expansion of the elastic membrane, making the expansion process smoother and more stable, thereby improving the stability of the invention during use.

[0019] Preferably, the steel cable includes multiple connecting ropes and multiple steel knots arranged sequentially, with adjacent steel knots connected by a connecting rope, and the connecting rope is fixedly connected to the steel knot; two flat portions are symmetrically arranged on the steel knot, and the flat portions on adjacent steel knots are used to abut against each other; two chamfers are symmetrically arranged on the steel knot, and the chamfers on adjacent steel knots are used to abut against each other.

[0020] With this configuration, when the steel cable applies a pushing force to the top claw, the force is transmitted through the mutual abutment of the planar portions between the various steel nodes. Specifically, the pushing force on the top block acts on the steel node fixedly connected to the top block, and then, through the abutment between two adjacent planar portions of an adjacent steel node, the force is transmitted to the second steel node, and so on in the same manner to each steel node, finally reaching the top claw so that the top claw can extend out of the push block.

[0021] Specifically, for cases where the design of chute three involves bends, a second chamfer can be installed at the steel joint. In this case, the force transmission of the steel cable at the bend in chute three can be achieved through the second chamfer.

[0022] Specifically, in the section of the steel cable at the three bends of the chute, because the two steel nodes in this section are arranged at an incline, their two planar portions are not parallel, and therefore cannot resist each other to transmit force. However, the inclination of these two steel nodes causes their two chamfers to abut against each other, allowing the two chamfers to replace the planar portions in transmitting force. This ensures the steel cable itself transmits force, guarantees the smooth ejection of the jack, and ensures that the jack can effectively limit the auxiliary rings one and two, thus contributing to the effectiveness of the invention.

[0023] Meanwhile, since the steel nodes are rigid bodies, the rigidity of the steel cable containing multiple steel nodes is enhanced, which helps reduce unnecessary deformation of the steel cable within the third chute, thereby helping to ensure the equivalent length of the steel cable along the length of the third chute. This helps to ensure the consistency between the ejection distance of the top block and the ejection distance of the top claw, thus improving the reliability of the invention. In addition, connecting the steel nodes with connecting ropes also allows the steel cable to retain a certain degree of flexibility, enabling it to adapt to different shapes of the third chute.

[0024] It is worth noting that the steel cable design combines a degree of flexibility with rigidity, allowing it to transmit force both linearly and at an angle. Therefore, with a well-designed layout of the slide groove, the push of a single top block can eject all the claws on the top surface of the push block. This simplifies the internal mechanism design of the push block, reduces the number of cavities required for mounting components, increases the solidity of the push block, thereby improving its structural strength and extending its service life.

[0025] Preferably, the push block has two sliding grooves, and two racks are slidably installed in each of the two sliding grooves. Two gears are symmetrically arranged in the mounting cavity, and the gear teeth are symmetrically arranged on both sides of the lower end of the top block. Two push springs are provided in each of the two sliding grooves. A limiting groove is provided on the top block, and a limiting block is fixedly installed on the side wall of the sliding groove, and the limiting block is set in the limiting groove.

[0026] With this configuration, the top block can simultaneously receive drive from two gears through two symmetrical sides, thereby helping to balance the forces on the top block and ensuring that the driving force on the top block is as far along as possible along the length of the second slide groove. This helps to reduce the tilting of the top block within the second slide groove due to uneven force during movement, thus reducing additional friction and wear caused by this, improving the stability of the invention during operation, and extending the service life of the component.

[0027] Preferably, a receiving groove is provided on the flat part of the steel node, and the connecting rope is fixedly connected to the bottom end of the receiving groove.

[0028] This design provides a stable installation space for securing the connecting rope, making the connection between the rope and the steel node plane more clearly defined and secure. When the connecting rope is under stress, the structure of the receiving groove protects the root of the rope, reducing wear caused by direct contact with the edge of the steel node plane. It also prevents the rope from shifting position under stress, ensuring that it consistently transmits tension stably, thereby improving the structural stability and reliability of the entire equipment during operation.

[0029] Simultaneously, when the planar portions of the two steel nodes abut, the receiving groove also serves as a space to accommodate the connecting rope, preventing the connecting rope from being trapped between the two planar portions and thus avoiding obstruction of the abutment. This helps ensure stable transmission of thrust directly between the two steel nodes, improving the reliability of the invention. Furthermore, this also prevents the gap between the two planar portions from being larger than expected during force transmission at the steel nodes due to the connecting rope being trapped between them. This helps control the actual length of the steel cable during force transmission, thereby helping to control the extension length of the jack and preventing damage to the elastic membrane due to excessive extension of the jack.

[0030] Preferably, the frame has an annular fixing groove for installing a fixing ring; the center of the fixing groove is concentric with the center of the cylindrical push block.

[0031] This design makes the installation and removal of the retaining ring more convenient; simply insert or remove the retaining ring along the circumference of the retaining groove, greatly improving the operational efficiency during equipment maintenance and wafer replacement. Furthermore, the center of the retaining groove coincides with the center of the push block's top surface, ensuring that the centers of auxiliary ring one and auxiliary ring two coincide with the center of the annular array of multiple top claws. This allows auxiliary ring one and auxiliary ring two to cooperate effectively when limited by the annularly arranged top claws, maintaining auxiliary ring one or auxiliary ring two in the original circular shape formed during expansion. This ensures that the wafer maintains its expanded arrangement, guaranteeing the effectiveness of the wafer expansion.

[0032] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. This invention utilizes the interaction of auxiliary ring one, auxiliary ring two, and the top claws to divide the elastic membrane into multiple concentric annular regions separated by auxiliary ring one and auxiliary ring two after expansion. The expansion degree of each region is limited by its corresponding top claw group, and the elastic force between different regions does not affect each other. Therefore, even if the elastic modulus of the elastic membrane exhibits a non-uniform distribution in different regions due to manufacturing defects or other factors, the impact will only be limited to the annular region where the defect is located, and will not cause a wider range of impact, thereby helping to improve the consistency and reliability of the wafer gap on the elastic membrane.

[0033] 2. By incorporating components such as steel cables, top claws, and top blocks, the top claws are retracted within the push block before the rack is pushed out of the slide groove by the push spring. This prevents them from engaging with auxiliary rings one and two, and also prevents them from obstructing each other. Therefore, during the process of the push block pushing the elastic membrane to cause it to expand, the top claws do not hinder the expansion of the elastic membrane, resulting in a smoother and more stable expansion process and improving the stability of the invention during use.

[0034] 3. By incorporating steel nodes and connecting ropes, the steel cable achieves a balance of flexibility and rigidity, enabling it to transmit force both linearly and at angles. Therefore, with a well-designed layout of the slide groove, a single push block can eject all the claws on the top surface of the push block. This simplifies the internal mechanism design of the push block, reduces the number of cavities required for mounting components, increases the solidity of the push block, thereby enhancing its structural strength and extending its service life. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 for Figure 1 A schematic diagram of the overall structure after removing the retaining ring and elastic membrane; Figure 3 for Figure 2 Schematic diagram of the structure under the SS section; Figure 4 for Figure 3 A magnified view of part A in the middle; Figure 5 This is a structural schematic diagram of a steel joint; Figure 6 for Figure 3 A magnified view of part B in the middle section; Figure 7 for Figure 3 Schematic diagram of the structure under the NN section; Figure 8 for Figure 1 A schematic diagram of the front view in plan view; Figure 9 for Figure 8 A magnified view of part C in the middle; Figure 10 This is a schematic diagram showing the arrangement of auxiliary ring one and auxiliary ring two on the elastic membrane.

[0036] In the diagram: 1. Frame; 2. Fixing ring; 3. Elastic membrane; 4. Mounting groove; 5. Top block; 21. Fixing groove; 31. Auxiliary ring one; 32. Auxiliary ring two; 41. Push block; 42. Electric push rod; 43. Drag reduction groove; 44. Rounded chamfer; 45. Mounting cavity; 51. Gear tooth; 52. Gear; 53. Rack; 54. Push spring; 55. Chamfer one; 311. Chamfer part; 312. Protrusion; 411. Slide groove two; 412. Slide groove one; 413. Slide groove three; 414. Top claw; 415. Steel cable; 416. Steel knot; 417. Connecting rope; 4161. Flat part; 4162. Chamfer two; 4163. Receiving groove. Detailed Implementation

[0037] The following description, with the aid of the accompanying drawings listed in the foregoing "Description of Drawings", will clearly illustrate the specific embodiments of the present invention, in order to enable readers to have a more complete and objective understanding of the working principle and corresponding technical effects of the present invention.

[0038] like Figures 1 to 10 The diagram illustrates a specific embodiment of the present invention. It should be noted that this embodiment uses only two auxiliary rings, namely auxiliary ring 31 and auxiliary ring 32. However, in practical applications, more or fewer auxiliary rings can be selected depending on the specific working conditions. Furthermore, to limit the depth to which the top claw 414 retracts into the slide groove 413, ensuring the structural stability of the invention during long-term repeated use, a protrusion 312 is provided at the top of the top claw 414 to abut against the drag-reducing groove 43, thereby limiting the movement of the top claw 414 within the slide groove 413.

[0039] When the present invention is installed, a mounting groove 4 is first provided on the frame 1, and an electric push rod 42 is fixedly installed in the mounting groove 4. A cylindrical push block 41 is fixedly installed on the output end of the electric push rod 42. An elastic membrane 3 is provided on the frame 1, and a fixing ring 2 is fixedly installed on the frame 1. The fixing ring 2 is used to cooperate with the frame 1 to clamp and fix the elastic membrane 3. An auxiliary ring 31 and an auxiliary ring 32 are fixedly installed on the side of the elastic membrane 3 near the frame 1. The auxiliary ring 31 and the auxiliary ring 32 are arranged concentrically, and the center of the auxiliary ring 31 and the auxiliary ring 32 coincides with the center of the fixing ring 2. Multiple claws 414 are arranged in a ring array at the top of the push block 41, and the center of the ring array coincides with the center of the top surface of the push block 41. The claws 414 are used to abut against the auxiliary rings 31 and the auxiliary ring 32. The top of the push block 41 is provided with a drag-reducing groove 43, and both the auxiliary ring 31 and the auxiliary ring 32 are provided with chamfered parts 311.

[0040] Additionally, the push block 41 has an installation cavity 45, a first slide groove 412, and a second slide groove 411. Both slide grooves 412 and 411 communicate with the installation cavity 45 and with the external side of the push block 41. A rack 53 is movably installed in slide groove 412, and a gear 52 is rotatably installed in the installation cavity 45, meshing with the rack 53. A push spring 54 is fixedly installed at the bottom of slide groove 412 and is fixedly connected to the rack 53. The second slide groove 411... The device includes a top block 5, with a gear tooth 51 at its lower end, which meshes with a gear 52. A chamfer 55 is provided on the rack 53. A sliding groove 413 is provided inside the push block 41, with both ends of the sliding groove 413 connected to a sliding groove 411 and a drag-reducing groove 43, respectively. A steel cable 415 is movably installed inside the sliding groove 413, with one end of the steel cable 415 fixedly connected to the top block 5 and a top claw 414 fixedly installed on the other end of the steel cable 415. The top claw 414 is movably installed inside the sliding groove 413.

[0041] The steel cable 415 includes multiple connecting ropes 417 and multiple steel knots 416 arranged sequentially. Two adjacent steel knots 416 are connected by a connecting rope 417, and the connecting rope 417 is fixedly connected to the steel knot 416. Two flat parts 4161 are symmetrically arranged on the steel knot 416, and the flat parts 4161 on two adjacent steel knots 416 are used to abut against each other. Two chamfers 4162 are symmetrically arranged on the steel knot 416, and the chamfers 4162 on two adjacent steel knots 416 are used to abut against each other. Two sliding grooves 412 are formed inside the push block 41. Two racks 53 are slidably installed in the two sliding grooves 412 respectively. Two gears 52 are symmetrically arranged in the mounting cavity 45. The gear teeth 51 are symmetrically arranged on both sides of the lower end of the top block 5. Two push springs 54 are respectively provided in the two sliding grooves 412. A limit groove is formed on the top block 5. A limit block is fixedly installed on the side wall of the second sliding groove 411 and is set in the limit groove. A receiving groove 4163 is formed on the flat part 4161 of the steel node 416. The connecting rope 417 is fixedly connected to the bottom end of the receiving groove 4163. An annular fixing groove 21 is formed on the frame 1. The fixing groove 21 is used to install the fixing ring 2. The center of the fixing groove 21 is concentric with the center of the cylindrical push block 41. A rounded chamfer 44 is formed on the top edge of the push block 41.

[0042] As a preparatory step before using this invention, the cut and aligned wafers need to be placed on the elastic membrane 3. Additionally, it should be noted that the diameter of auxiliary ring 31 is larger than the diameter of auxiliary ring 32, and both auxiliary ring 31 and auxiliary ring 32 are elastic rings.

[0043] When the present invention is in operation, the elastic membrane 3 is first fixedly installed on the frame 1 by the fixing ring 2. Then, the push block 41 is pushed by the electric push rod 42. At this time, the push block 41 is pushed upward, thereby pushing the elastic membrane 3 upward simultaneously. The elastic membrane 3 undergoes elastic deformation at this time, and the spacing between the wafers on the elastic membrane 3 is expanded by this elastic deformation, thereby increasing the spacing between the wafers.

[0044] During the above process, as the elastic membrane 3 expands elastically, auxiliary ring 31 and auxiliary ring 32 will also undergo elastic deformation and their diameters will increase. Furthermore, as the diameter increases, auxiliary ring 31 and auxiliary ring 32 will gradually pass over the top claws 414 arranged in a ring array with different radii, from the inside out, according to the degree of diameter increase. For example, taking auxiliary ring 32 as an example, see... Figure 9 When the elastic membrane 3 expands, the auxiliary ring 32 will... Figure 9 At the viewing angle shown, move to the left and from... Figure 9 The right side of the top claw 414 moves to the left side.

[0045] When the electric actuator 42 extends a certain distance, auxiliary ring 1 31 and auxiliary ring 2 32 will expand by a certain radius, and neither of them will engage with the top claw 414 at this time. Then, when the electric actuator 42 retracts downwards, the elastic membrane 3 will retract due to the elastic force. When the electric actuator 42 retracts a certain distance, taking auxiliary ring 1 31 as an example, auxiliary ring 1 31 will exactly engage with the nearest top claw 414 closest to its center. This ring of top claws 414 can limit the retraction of auxiliary ring 1 31, allowing the portion of the elastic membrane 3 enclosed by auxiliary ring 1 31 to maintain its current degree of expansion. Similarly, auxiliary ring 2 32 is also limited by the corresponding top claw 414, allowing the portion of the elastic membrane 3 enclosed by auxiliary ring 2 32 to maintain its current degree of expansion.

[0046] Therefore, by utilizing the interaction of auxiliary ring 31, auxiliary ring 32, and top claws 414, the elastic membrane 3 can be divided into multiple concentric annular regions separated by auxiliary rings 31 and 32. The expansion degree of each region is limited by its corresponding set of top claws 414, and the elastic force between different regions will not affect each other. Thus, even if the elastic modulus of the elastic membrane 3 is not uniformly distributed in different regions due to manufacturing defects or other factors, the effect will only be limited to the annular region where the defect is located, and will not cause a wider range of impact, thereby helping to improve the consistency and reliability of the wafer gap on the elastic membrane 3.

[0047] The drag-reducing groove 43 effectively reduces the contact area between the pusher block 41 and the elastic membrane 3 when the pusher block 41 pushes the elastic membrane 3, thereby reducing the friction between them and making the driving process of the pusher block 41 smoother. This avoids uneven force distribution or movement jamming of the elastic membrane 3 due to excessive friction. The chamfered portions 311 on the auxiliary ring 1 31 and auxiliary ring 2 32 are both located on the side away from their own center. Therefore, when the top claw 414 contacts the auxiliary ring 1 31 or auxiliary ring 2 32, the chamfered portion 311 facilitates the transition, allowing the auxiliary ring 1 31 or auxiliary ring 2 32 to smoothly and unidirectionally pass over the top claw 414 or obstacle. This further ensures the stability of the expansion and deformation of the elastic membrane 3, thereby improving the stability of the entire wafer gap expansion process.

[0048] When push block 41 is fully retracted into mounting groove 4, push spring 54 is compressed, and rack 53 is also fully retracted into slide groove 412. Due to the limiting effect of the side wall of mounting groove 4, rack 53 cannot be pushed out of slide groove 412. When electric push rod 42 pushes push block 41 upward until slide groove 412 is pushed out of mounting groove 4, rack 53 in slide groove 412 will be pushed out of push block 41 by the elastic force of push spring 54 due to the loss of the limiting effect of mounting groove 4. At the same time, rack 53 drives gear 52 to rotate, and gear 52 drives top block 5 to move upward through gear teeth 51. Due to the limiting effect of slide groove 413 on the deformation of steel cable 415, the upward moving top block 5 can transmit the thrust to top claw 414 through steel cable 415, thereby causing top claw 414 to extend outward from slide groove 413.

[0049] With this configuration, before the rack 53 is pushed out of the slide groove 412 by the push spring 54, the top claw 414 will be housed within the push block 41, thus avoiding engagement with the auxiliary ring 31 and the auxiliary ring 32, and preventing any obstruction to them. Therefore, during the process of the push block 41 pushing the elastic membrane 3 to cause its expansion, the top claw 414 will not hinder the expansion of the elastic membrane 3, making the expansion process of the elastic membrane 3 smoother and more stable, thereby improving the stability of the invention during use.

[0050] For example, taking auxiliary ring 2 32 as an example, see Figure 9 When the elastic membrane 3 expands, the auxiliary ring 32 will... Figure 9 At the viewing angle shown, move to the left and from... Figure 9 The right side of the top claw 414 moves to the left side. At this time, after the top claw 414 extends, it can abut against the right side of the auxiliary ring 32 when the elastic membrane 3 contracts, thereby limiting the retraction of the auxiliary ring 32 and thus limiting the retraction of the elastic membrane 3. Thus, the auxiliary rings 31 and 32 can divide the area on the elastic membrane 3 into multiple annular regions whose internal elastic forces do not affect each other.

[0051] It is worth noting that by setting up steel knots 416 and connecting ropes 417, when the steel cable 415 applies a pushing force to the top claw 414, the pushing force is transmitted through the mutual abutment of the planar portions 4161 between each steel knot 416. Specifically, the pushing force on the top block 5 acts on the steel knot 416 fixedly connected to the top block 5, and then the force is transmitted to the second steel knot 416 through the abutment between two adjacent planar portions 4161 of adjacent steel knots 416, and is transmitted sequentially to each steel knot 416 in the same manner, and finally transmitted to the top claw 414 so that the top claw 414 can extend out of the push block 41.

[0052] Specifically, for cases where the slide groove 3 413 has a bend in its design, a chamfer 2 4162 can be provided on the steel node 416. In this case, the force transmission of the steel cable 415 at the bend in the slide groove 3 413 can be achieved through the chamfer 2 4162.

[0053] Specifically, in the bent portion of the steel cable 415 at the chute 3 413, the two steel nodes 416 in this portion are arranged at an incline, so the two planar portions 4161 of the two steel nodes 416 are not parallel, and therefore the two planar portions 4161 cannot resist each other to transmit force. However, the inclination of the two steel nodes 416 at this time will cause their two chamfers 4162 to abut against each other, so that the two chamfers 4162 can replace the planar portions 4161 to transmit force, thereby ensuring the force transmission function of the steel cable 415 itself, ensuring the smooth ejection of the top claw 414, and thus ensuring that the top claw 414 can smoothly produce the correct limiting effect on the auxiliary ring 31 and the auxiliary ring 32, which helps to ensure the working effect of the present invention.

[0054] Meanwhile, since the steel nodes 416 are rigid, the rigidity of the steel cable 415, which includes multiple steel nodes 416, is enhanced. This helps reduce unnecessary deformation of the steel cable 415 within the slide groove 413, thereby ensuring the equivalent length of the steel cable 415 along the length of the slide groove 413. This helps ensure the consistency between the ejection distance of the top block 5 and the ejection distance of the top claw 414, thus improving the reliability of the invention. Furthermore, connecting the steel nodes 416 with the connecting rope 417 also allows the steel cable 415 to retain a certain degree of flexibility, enabling it to adapt to different shapes of the slide groove 413.

[0055] It is worth noting that the steel cable 415 is designed to combine flexibility and rigidity, allowing it to transmit force both linearly and at an angle. Therefore, with a reasonable design and layout of the slide groove 413, the push of a single top block 5 can eject all the claws 414 on the top surface of the push block 41. This simplifies the internal mechanism design of the push block 41, reduces the number of cavities required for mounting components, increases the solidity of the push block 41, thereby improving its structural strength and extending its service life.

[0056] Furthermore, by symmetrically arranging components such as gears 52 and racks 53, the top block 5 can simultaneously receive drive from two gears 52 through two symmetrical sides. This helps to balance the forces borne by the top block 5, ensuring that the driving force on the top block 5 is as far along as possible along the length of the second slide groove 411. This helps to reduce the tilting of the top block 5 within the second slide groove 411 due to uneven force during movement, thereby reducing additional friction and wear caused by this situation. This improves the stability of the invention during operation and helps to extend the service life of the components.

[0057] It should be emphasized that, based on the content described above, although the beneficial effects of the present invention have been explained in detail and corresponding specific embodiments have been provided, those skilled in the art can still achieve the same technical effects by making conventional substitutions, modifications, or other alterations to the given technical solutions without creative effort, provided they fully understand the working principle of the present invention. However, such modifications should not be considered as exceeding the scope of the present invention. Specifically, the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A symmetrically driven wafer gap equal-distance expansion device, comprising a frame (1), wherein a mounting groove (4) is provided on the frame (1), an electric push rod (42) is fixedly installed in the mounting groove (4), and a cylindrical push block (41) is fixedly installed on the output end of the electric push rod (42); an elastic membrane (3) is provided on the frame (1), and a fixing ring (2) is fixedly installed on the frame (1), the fixing ring (2) being used to cooperate with the frame (1) to clamp and fix the elastic membrane (3); characterized in that, The elastic membrane (3) is fixedly mounted with an auxiliary ring one (31) and an auxiliary ring two (32) on one side of the frame (1). The auxiliary ring one (31) and the auxiliary ring two (32) are arranged concentrically, and the center of the auxiliary ring one (31) and the auxiliary ring two (32) coincides with the center of the fixed ring (2). The top of the push block (41) is provided with multiple top claws (414) in a ring array, and the center of the ring array coincides with the center of the top surface of the push block (41). The top claws (414) are used to abut against the auxiliary ring one (31) and the auxiliary ring two (32).

2. The symmetrically driven wafer gap equal-distance expansion device according to claim 1, characterized in that, The top of the push block (41) is provided with a drag-reducing groove (43), and the auxiliary ring one (31) and the auxiliary ring two (32) are both provided with chamfered parts (311).

3. The symmetrically driven wafer gap equal-distance expansion device according to claim 2, characterized in that, The push block (41) has an installation cavity (45), a first slide groove (412), and a second slide groove (411). The first slide groove (412) and the second slide groove (411) are connected to the installation cavity (45) and to the outside of the side of the push block (41). A rack (53) is movably installed in the first slide groove (412), and a gear (52) is rotatably installed in the installation cavity (45). The gear (52) meshes with the rack (53). A push spring (54) is fixedly installed in the first slide groove (412) and is fixedly connected to the rack (53). The second slide groove (411) is movably installed in the first slide groove (412). A top block (5) is provided, and a gear tooth (51) is provided at the lower end of the top block (5). The gear tooth (51) meshes with the gear (52). A chamfer (55) is provided on the rack (53). A sliding groove (413) is provided in the push block (41). The two ends of the sliding groove (413) are respectively connected to the sliding groove (411) and the drag reduction groove (43). A steel cable (415) is movably provided in the sliding groove (413). One end of the steel cable (415) is fixedly connected to the top block (5). A top claw (414) is fixedly installed on the other end of the steel cable (415). The top claw (414) is movably provided in the sliding groove (413).

4. The symmetrically driven wafer gap equal-distance expansion device according to claim 3, characterized in that, The steel cable (415) includes multiple connecting ropes (417) and multiple steel knots (416) arranged in sequence. Two adjacent steel knots (416) are connected by a connecting rope (417), and the connecting rope (417) is fixedly connected to the steel knot (416). Two flat parts (4161) are symmetrically arranged on the steel knot (416), and the flat parts (4161) on two adjacent steel knots (416) are used to abut against each other. Two chamfers (4162) are symmetrically arranged on the steel knot (416), and the chamfers (4162) on two adjacent steel knots (416) are used to abut against each other.

5. The symmetrically driven wafer gap equal-distance expansion device according to claim 3, characterized in that, The push block (41) has two sliding grooves (412) and two racks (53) are slidably installed in the two sliding grooves (412). Two gears (52) are symmetrically arranged in the mounting cavity (45) and the gear teeth (51) are symmetrically arranged on both sides of the lower end of the top block (5). Two push springs (54) are respectively provided in the two sliding grooves (412). A limiting groove is provided on the top block (5). A limiting block is fixedly installed on the side wall of the sliding groove (411) and the limiting block is set in the limiting groove.

6. The symmetrically driven wafer gap equal-distance expansion device according to claim 4, characterized in that, The steel node (416) has a receiving groove (4163) on its flat part (4161), and the connecting rope (417) is fixedly connected to the bottom end of the receiving groove (4163).

7. The symmetrically driven wafer gap equal-distance expansion device according to claim 2, characterized in that, The frame (1) is provided with an annular fixing groove (21), which is used to install a fixing ring (2); the center of the fixing groove (21) is arranged concentrically with the center of the cylindrical push block (41).

8. The symmetrically driven wafer gap equal-distance expansion device according to claim 1, characterized in that, The push block (41) has a rounded chamfer (44) at its top edge.

Images