A back type ejector pin monitoring jig and a method of use

Abstract

This invention relates to a back-shaped ejector pin monitoring fixture and its usage method. The fixture includes a base, a housing mounted on top of the base, and first and second actuating mechanisms. The base has a movable cavity and a limiting wall; the test platform on top of the housing has first and second openings. The first actuating mechanism drives the first top contact portion to extend through the engagement of a push rod and the inclined surface of a slider. The second actuating mechanism includes a limiting shell, a horizontal slider, a roller, and a connecting block with a groove at the bottom. The second movable block drives the horizontal slider to move the roller into the groove, realizing the falling action of the second top contact portion. This invention accurately simulates the pre-peeling and peeling dynamic process of the back-shaped ejector pin outside the machine tool through a mechanical linkage structure, and the dynamic displacement can be monitored using a test lens. This solution solves the problem of difficulty in measuring the flatness of the back-shaped ejector pin inside the machine tool, achieving a measurement accuracy of 0.1μm, effectively reducing the risk of chip cracking, and improving the operating yield and modification efficiency of packaging equipment.

Description

Technical Field

[0001] This invention relates to the field of semiconductor packaging technology, and more particularly to a rotary pin monitoring fixture and its usage method. Background Technology

[0002] The description in this section provides only background information related to the disclosure of this invention and does not constitute prior art.

[0003] In semiconductor packaging processes, U-shaped ejector pins, due to their unique wall-like structure, are typically ejected in multiple steps in a planar manner during operation. Due to space constraints within the equipment and the complexity of the ejector pin structure, existing CCD lenses often cannot directly measure the flatness of the ejector pins. Furthermore, the ejection mechanism of U-shaped ejector pins differs from that of ordinary ejector pins, resulting in a lack of effective flatness monitoring mechanisms during their operation. If the flatness of the ejector pin does not meet the standards, stress concentration is easily generated during chip ejection, increasing the risk of chip cracking and severely impacting product yield and rework efficiency.

[0004] It should be noted that the above description of the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of the present invention and facilitating understanding by those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because they have been described in the background section of this invention. Summary of the Invention

[0005] The purpose of this invention is to provide a back-shaped ejector pin monitoring fixture, which can simulate the actual ejection process of the machine outside the machine through a complete mechanical fixture device, and achieve accurate monitoring of the flatness before the ejector pin is installed on the machine.

[0006] To achieve the above objectives, the present invention discloses a rotary pin monitoring fixture, the rotary pin monitoring fixture comprising: A base, the bottom of which forms a movable cavity, and a first limiting wall and a second limiting wall are provided on the top of the movable cavity; A housing is mounted on top of the base, and a test platform is provided on the top of the housing, with an opening on the test platform; The first actuating mechanism includes a first push rod, a first slider, a first top block, and a first movable block. The first slider and the first top block are disposed in the movable cavity and form a motion conversion mechanism through inclined surface cooperation. The first push rod is connected to the first slider to drive the first slider to move and drive the first top block to rise until the top of the first top block abuts against the first limiting wall. The first movable block is connected to the top of the first top block, and the first movable block is provided with a first top connection portion that extends through to the top of the housing and passes through the opening. The second actuating mechanism includes a second push rod, a second slider, a second top block, a second movable block, a limiting shell, a horizontal slider, a roller, and a connecting block. The second slider and the second top block are disposed in the movable cavity and form a motion conversion mechanism through inclined surface cooperation. The second push rod is connected to the second slider to drive the second slider to move and drive the second top block to rise until the top of the second top block abuts against the second limiting wall. The second movable block is connected to the top of the second top block. The limiting shell is installed in the housing and forms a limiting groove. The horizontal slider is disposed in the limiting groove and cooperates with the inclined surface of the top inclined wall of the second movable block to convert the vertical displacement of the second movable block into the horizontal displacement of the horizontal slider. The roller is installed on the top of the horizontal slider. The connecting block abuts against the top of the roller. The top of the connecting block is provided with a second top contact part, which passes through the opening. The bottom of the connecting block is provided with a groove so that when the horizontal slider drives the roller to move horizontally, the roller disengages from the groove or enters the groove, so that the connecting block is lifted or falls back by the roller. A test lens is positioned facing the test platform to monitor the displacement of the first and second top joints relative to the surface of the test platform.

[0007] As a further description of the above technical solution, a round rod is provided at the bottom of the horizontal slider, and the round rod cooperates with the inclined surface of the second movable block.

[0008] As a further description of the above technical solution, the limiting shell is provided with a clearance opening, and the top of the second movable block passes through the clearance opening and is disposed in the limiting groove.

[0009] As a further description of the above technical solution, the first limiting wall has a preset height, such that when the first mating wall provided on the first top block contacts the first limiting wall of the base, the first top contact portion just extends out of the opening to a first preset height, and the second top contact portion just extends out of the opening to a second preset height, and the first preset height and the second preset height are equal.

[0010] As a further description of the above technical solution, the second limiting wall has a preset height, so that when the second mating wall provided on the second top block contacts the second limiting wall of the base, the roller at the top of the horizontal slider just rolls into the groove.

[0011] As a further description of the above technical solution, the return-shaped ejector pin monitoring fixture is independently installed outside the chip packaging equipment.

[0012] The present invention also discloses a method of using the above-mentioned spiral-shaped thimble monitoring fixture, which includes the following steps: A pre-peeling lifting action is performed, driving the first action mechanism to push the first top contact part out from the opening position, driving the second action mechanism to push the second top contact part out from the opening position, and recording the displacement of the first top contact part and the second top contact part relative to the surface of the test platform through a test lens; The peeling and lifting action is performed, and the second action mechanism is driven in the reverse direction, so that the second top contact part is retracted from the opening position, and the displacement of the second top contact part relative to the surface of the test platform is recorded by the test lens; After confirming that the displacement of the first top contact and the second top contact meets the preset deviation value, the shell, the first movable block and the connecting block of this test are assembled into the chip packaging equipment.

[0013] By employing the above technical solutions, the beneficial effects of the present invention are as follows: The rotary ejector pin monitoring fixture of the present invention can simulate the actual ejection operation process of the machine outside the machine through a complete mechanical fixture device, and achieve precise monitoring of the flatness before the ejector pin is installed on the machine. Specifically, the present invention, through a mechanical linkage structure, can independently and with high precision simulate the dynamic operation process of the rotary ejector pin without occupying machine production line time. By combining contact measurement and optical monitoring, its measurement accuracy can reach 0.1 micrometers, effectively avoiding the risk of chip cracking caused by ejector pin flatness exceeding the standard, and significantly improving production efficiency and machine modification quality.

[0014] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are for reference and illustration only and are not intended to limit the present invention. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments or prior art of this specification, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the first station of a rotary pin monitoring fixture provided in the embodiments of this specification; Figure 2 This is a schematic diagram of the second station of a rotary pin monitoring fixture provided in the embodiments of this specification; Figure 3 This is a schematic diagram of the third station of a rotary pin monitoring fixture provided in the embodiments of this specification; Figure 4This is a three-dimensional schematic diagram of a rotary pin monitoring fixture provided in the embodiments of this specification; In the picture: 1. Base; 11. Movable cavity; 12. First limiting wall; 13. Second limiting wall; 2. Housing; 21. Test platform; 22. Opening; 3. First actuating mechanism; 31. First push rod; 32. First slider; 33. First top block; 34. First movable block; 341. First top contact part; 4. Second actuating mechanism; 41. Second push rod; 42. Second slider; 43. Second top block; 44. Second movable block; 45. Limiting shell; 451. Limiting groove; 452. Clearance opening; 46. Horizontal slider; 461. Round rod; 47. Roller; 48. Connecting block; 481. Second top connection part; 482. Groove. Detailed Implementation

[0017] To enable those skilled in the art to better understand the technical solutions in this specification, the technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this specification, and not all embodiments. Based on the embodiments in this specification, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this specification.

[0018] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. Furthermore, the accompanying drawings of the present invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of protection of the present invention.

[0019] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the related listed items.

[0020] Please see Figures 1 to 4 This embodiment provides a type of rotary pin monitoring fixture, wherein the rotary pin monitoring fixture includes: Specifically, in the structure of this embodiment, the bottom of the base 1 forms a movable cavity 11, and the base 1 is provided with a first limiting wall 12 and a second limiting wall 13 at the top of the movable cavity 11. The first limiting wall 12 and the second limiting wall 13 may be staggered.

[0021] The housing 2 is mounted on top of the base 1, and a test platform 21 is provided on the top of the housing 2. The test platform 21 has an opening 22. The first actuation mechanism 3 includes a first push rod 31, a first slider 32, a first top block 33, and a first movable block 34. The first slider 32 and the first top block 33 are disposed in the movable cavity 11 and form a first motion conversion mechanism through inclined surface cooperation. The first push rod 31 is connected to the first slider 32 to drive the first slider 32 to slide in the horizontal direction and drive the first top block 33 to rise in the vertical direction until the top of the first top block 33 contacts and abuts vertically against the first limiting wall 12, thereby locking the stroke height of the first top block 33.

[0022] The first movable block 34 is connected to the top of the first top block 33. The first movable block 34 is provided with a first top joint 341 that extends through to the top of the housing 2. The first top joint 341 passes through the opening 22 so that the first top joint 341 can be exposed above the test platform 21.

[0023] In other words, by having the operator pull the first push rod 31 horizontally, the first top part 341 is slightly displaced vertically.

[0024] The second actuation mechanism 4 includes a second push rod 41, a second slider 42, a second top block 43, a second movable block 44, a limiting shell 45, a horizontal slider 46, a roller 47, and a connecting block 48. The second slider 42 and the second top block 43 are disposed in the movable cavity 11 and form a second motion conversion mechanism through inclined surface cooperation. The second push rod 41 is connected to the second slider 42 to drive the second slider 42 to move horizontally and drive the second top block 43 to rise vertically until the top of the second top block 43 contacts and abuts against the second limiting wall 13. The second movable block 44 is connected to the top of the second top block 43 to perform vertical movement synchronously. The limiting shell 45 is installed in the housing 2 and forms a limiting groove 451. The horizontal slider 46 is disposed in the limiting groove 451 and forms an inclined surface friction cooperation with the inclined wall at the top of the second movable block 44, thereby controlling the vertical movement generated by the driven second movable block 44. The displacement is converted into the horizontal displacement of the horizontal slider 46 within the limiting groove 451; the roller 47 is installed on the top of the horizontal slider 46 and moves horizontally synchronously with it; the connecting block 48 abuts against the top of the roller 47, and the top of the connecting block 48 is provided with a second top contact 481, which also passes through the opening 22 and is arranged in parallel with the first top contact 341; the bottom of the connecting block 48 is provided with a groove 482, so that when the horizontal slider 46 drives the roller 47 to move horizontally, the roller 47 disengages from the groove 482 or enters the groove 482, thereby changing the vertical support height of the bottom of the connecting block 48, so that the connecting block 48 is lifted or lowered by the roller 47. In this way, in the external space of the chip packaging equipment, the alternating operation process of the return pin in the pre-peeling state and the formal peeling state is highly reproduced through a purely mechanical linkage physical method.

[0025] In other words, by having the operator pull the second push rod 41 horizontally, the second top part 481 is slightly displaced vertically.

[0026] The test lens is positioned toward the test platform 21 and is used to dynamically monitor and record the relative displacement and height difference between the first top contact part 341 and the second top contact part 481 and the surface of the test platform 21, thereby achieving offline high-precision measurement of the surface flatness fluctuation of the return pin assembly during dynamic switching stroke.

[0027] Further, please see Figure 1In the above structure, the first movable block 34 is provided with a first top connection 341 that extends to the top of the housing 2. This means that the green main body of the first movable block 34 in the figure passes through the limiting shell 45 and the horizontal slider 46 from the position covered by the limiting shell 45 and the horizontal slider 46 in the figure, and extends to the position of the topmost test platform 21. The first top connection 341 of its topmost structure extends into the opening 22.

[0028] Similarly, the second movable block 44 is connected to the top of the second top block 43, which means that the main body of the blue second top block 43 in the figure passes through the first movable block 34, the limiting shell 45 and other structures from the position in the figure that is blocked by the first movable block 34, the limiting shell 45 and other structures, and is connected to the plate-shaped second top block 43 at the bottom.

[0029] Based on the fixture structure of the present invention, at least the following three workstations can be included during use, wherein... In the first station, the first push rod 31 drives the first slider 32 to retract, the first top block 33 and the first movable block 34 fall down, and the first top contact part 341 retracts from the opening 22 position; The second push rod 41 drives the second slider 42 to retract, the second top block 43 and the second movable block 44 fall down, the roller 47 at the top of the horizontal slider 46 is set outside the groove 482, the connecting block 48 is pushed up, so that the second top part 481 is flush with the first top part 341, and the second top part 481 retracts from the opening 22 position. In the second station, the first push rod 31 pushes the first slider 32, the first top block 33 and the first movable block 34 are lifted, and the first top contact part 341 is pushed out from the opening 22. The second push rod 41 drives the second slider 42 to retract, the second top block 43 and the second movable block 44 fall down, the roller 47 at the top of the horizontal slider 46 is set outside the groove 482, the connecting block 48 is pushed up, so that the second top part 481 is flush with the first top part 341, and the second top part 481 is pushed out from the opening 22. In the third station, the first push rod 31 pushes the first slider 32, the first top block 33 and the first movable block 34 are lifted, and the first top contact part 341 is pushed out from the opening 22. The second push rod 41 pushes the second slider 42, the second top block 43 and the second movable block 44 are lifted, the horizontal slider 46 is pushed by the second movable block 44, the roller 47 at the top of the horizontal slider 46 rolls into the groove 482, the connecting block 48 falls, causing the second top part 481 to be misaligned with the first top part 341, and the second top part 481 retracts from the opening 22.

[0030] Specifically, in the above structure, the first top connection 341 and the second top connection 481 are actually composed of a spiral-shaped ejector pin with special wall-like structural characteristics. The top of the first top connection 341 is located in the middle of the spiral-shaped ejector pin, and the top of the second top connection 481 is located on the outer periphery of the spiral-shaped ejector pin, covering the first top connection 341.

[0031] The back-shaped ejector pin monitoring fixture is independently installed outside the chip packaging equipment, and the above process mainly corresponds to the semiconductor chip flexible peeling process of the chip packaging equipment. Specifically, in the actual operation of the die bonding equipment, the chip is initially attached to the surface of the adhesive film. If the chip is lifted up all at once by the ejector pin, it is easy to cause excessive instantaneous force on the chip, resulting in problems such as chip cracking, edge chipping, or microcracks. Therefore, the equipment usually adopts a staged lifting method for peeling. First, the back-shaped ejector pin is lifted as a whole to form a pre-loose state between the chip and the blue film, so as to reduce the adhesion force of the blue film to the chip. This corresponds to the state in the second station of this embodiment where the first top contact part 341 and the second top contact part 481 are lifted together. Then, the relative displacement of some ejector pins causes the chip to gradually detach from the blue film from a local point, forming a progressive peeling process. This avoids the entire chip being subjected to force at the same time, effectively reducing the bending stress and impact stress during the chip peeling process, improving the chip picking stability, and reducing the risk of chip cracking. This corresponds to the state in the third station of this embodiment where the first top contact part 341 is held and the second top contact part 481 is lowered together.

[0032] Specifically, based on the above fixture structure, the fixture can be used in the following way, including the following steps: First, perform a pre-peeling lifting action, drive the first action mechanism 3 so that the first top contact 341 is pushed out from the opening 22 position, drive the second action mechanism 4 so that the second top contact 481 is pushed out from the opening 22 position, and record the displacement of the first top contact 341 and the second top contact 481 relative to the surface of the test platform 21 through the test lens; Then, a peeling and lifting action is performed, driving the second action mechanism in the reverse direction, causing the second top contact part 481 to retract from the opening 22 position, and the displacement of the second top contact part 481 relative to the surface of the test platform 21 is recorded through the test lens; then, after confirming that the displacement of the first top contact part 341 and the second top contact part 481 meets the preset deviation value, the housing 2, the first movable block 34, and the connecting block 48 of this test are equipped into the chip packaging equipment.

[0033] Of course, in another embodiment, the device equipped in the chip packaging equipment may include more related fixture structures as needed, such as all the structures in the first action mechanism 3 except for the first push rod 31, the first slider 32, and the first top block 33, and all the structures in the second action mechanism 4 except for the second push rod 41, the second slider 42, and the second top block 43.

[0034] Specifically, the test lens can be an industrial camera with a high-precision microscopic vision system or other optical height measurement system, which gets rid of the problem of extremely small internal space of the machine tool and can be directly set up at the test platform 21 where the chip is placed. Most importantly, in this process, the test is moved to an external fixture for monitoring, and the dynamic movement process can be monitored throughout, not just the static height, so as to effectively monitor the dynamic flatness of the ejector pin during its movement.

[0035] In other words, in the solution of this invention, a complete mechanical fixture can be used to simulate the actual ejection process of the machine outside the machine, enabling precise monitoring of flatness before the ejector pin is installed on the machine. Specifically, this invention, through a mechanical linkage structure, can independently and with high precision simulate the dynamic operation process of the return-shaped ejector pin without occupying machine production line time. By combining contact measurement with optical monitoring, its measurement accuracy can reach 0.1 micrometers, effectively avoiding the risk of chip cracking caused by ejector pin flatness exceeding the standard, and significantly improving production efficiency and machine modification quality. In the above process, using a high-precision height gauge in conjunction with a test lens, the measurement accuracy can reach 0.1 micrometers, and the measurement efficiency is improved by more than 70% compared with traditional non-contact measurement.

[0036] Furthermore, a round rod 461 is provided at the bottom of the horizontal slider 46. The round rod 461 cooperates with the inclined surface of the second movable block 44 to reduce frictional resistance through rolling or sliding contact, thereby ensuring the accuracy of motion simulation.

[0037] Furthermore, the limiting shell 45 is provided with a clearance opening 452, and the top of the second movable block 44 passes through the clearance opening 452 and extends into the limiting groove 451, thereby realizing a compact mechanical linkage within a limited space.

[0038] Furthermore, the first limiting wall 12 has a specific preset height. When the first mating wall of the first top block 33 contacts the first limiting wall 12, the first top contact 341 and the second top contact 481 extend out of the opening 22 and the opening 22 respectively, achieving equal first and second preset heights, thereby simulating the flatness of the ejector pin in its fully ejected state. Similarly, the second limiting wall 13 has a specific preset height. When the second mating wall of the second top block 43 contacts the second limiting wall 13, through precise control of the mechanical stroke, it is ensured that the roller 47 at the top of the horizontal slider 46 rolls precisely into the groove 482, triggering the falling action of the connecting block 48, so as to accurately simulate the scenario of the ejector pin's peripheral support falling.

[0039] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention specification and drawings are included in the scope of the patent application of the present invention.

[0040] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0041] Although this application has been described by way of examples, those skilled in the art will know that this application has many modifications and variations without departing from the spirit of this application, and it is intended that the appended embodiments include these modifications and variations without departing from this application.

Claims

1. A back-type needle monitoring jig, characterized by, The rotary pin monitoring fixture includes: A base, the bottom of which forms a movable cavity, and a first limiting wall and a second limiting wall are provided on the top of the movable cavity; A housing is mounted on top of the base, and a test platform is provided on the top of the housing, with an opening on the test platform; The first actuating mechanism includes a first push rod, a first slider, a first top block, and a first movable block. The first slider and the first top block are disposed in the movable cavity and form a motion conversion mechanism through inclined surface cooperation. The first push rod is connected to the first slider to drive the first slider to move and drive the first top block to rise until the top of the first top block abuts against the first limiting wall. The first movable block is connected to the top of the first top block, and the first movable block is provided with a first top connection portion that extends through to the top of the housing and passes through the opening. The second actuating mechanism includes a second push rod, a second slider, a second top block, a second movable block, a limiting shell, a horizontal slider, a roller, and a connecting block. The second slider and the second top block are disposed in the movable cavity and form a motion conversion mechanism through inclined surface cooperation. The second push rod is connected to the second slider to drive the second slider to move and drive the second top block to rise until the top of the second top block abuts against the second limiting wall. The second movable block is connected to the top of the second top block. The limiting shell is installed in the housing and forms a limiting groove. The horizontal slider is disposed in the limiting groove and cooperates with the inclined surface of the top inclined wall of the second movable block to convert the vertical displacement of the second movable block into the horizontal displacement of the horizontal slider. The roller is installed on the top of the horizontal slider. The connecting block abuts against the top of the roller. The top of the connecting block is provided with a second top contact part, which passes through the opening. The bottom of the connecting block is provided with a groove so that when the horizontal slider drives the roller to move horizontally, the roller disengages from the groove or enters the groove, so that the connecting block is lifted or lowered by the roller. A test lens is positioned facing the test platform to monitor the displacement of the first and second top joints relative to the surface of the test platform.

2. The inverted top pin monitoring fixture of claim 1, wherein: The bottom of the horizontal slider is provided with a round rod, which cooperates with the inclined surface of the second movable block.

3. The inverted top pin monitoring fixture of claim 1, wherein: The limiting shell is provided with a clearance opening, and the top of the second movable block passes through the clearance opening and is disposed in the limiting groove.

4. The rotary pin monitoring fixture according to claim 1, characterized in that: The first limiting wall has a preset height, such that when the first mating wall provided on the first top block contacts the first limiting wall of the base, the first top contact part just extends out of the opening to the first preset height, and the second top contact part just extends out of the opening to the second preset height, and the first preset height and the second preset height are equal.

5. The rotary pin monitoring fixture according to claim 4, characterized in that: The second limiting wall has a preset height so that when the second mating wall on the second top block contacts the second limiting wall of the base, the roller at the top of the horizontal slider just rolls into the groove.

6. The rotary pin monitoring fixture according to claim 1, characterized in that: The rotary pin monitoring fixture is independently installed outside the chip packaging equipment.

7. A method of using the rotary pin monitoring fixture as described in claim 1, characterized in that, Includes the following steps: A pre-peeling lifting action is performed, driving the first action mechanism to push the first top contact part out from the opening position, driving the second action mechanism to push the second top contact part out from the opening position, and recording the displacement of the first top contact part and the second top contact part relative to the surface of the test platform through a test lens; The peeling and lifting action is performed, and the second action mechanism is driven in the reverse direction, so that the second top contact part is retracted from the opening position, and the displacement of the second top contact part relative to the surface of the test platform is recorded by the test lens; After confirming that the displacement of the first top contact and the second top contact meets the preset deviation value, the shell, the first movable block and the connecting block of this test are assembled into the chip packaging equipment.

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