Quick-release solid precursor source bottle tray structure

Abstract

The application relates to the technical field of new energy semiconductor thin film deposition equipment manufacturing, and mainly discloses a quick-release type solid-state precursor source bottle tray structure, which comprises a source bottle body, a heating cavity is arranged in the inside of a bottle body part of the source bottle body, a tray assembly is arranged in the source bottle body, a limiting assembly is arranged in a moving groove, and a positioning pin hole is arranged in the lower surface of the upper surrounding fence; a sealing gasket and a positioning assembly are arranged on the upper surface of the lower surrounding fence. The outer side surface of the limiting card plate is provided with a positioning card plate which is inserted into the positioning port when the upper surrounding fence is matched with the lower surrounding fence, so that the upper surrounding fence and the lower surrounding fence can be quickly connected and matched to form the tray assembly. In addition, the sealing gasket is arranged in the inside of the lower surrounding fence, the sealing gasket expands outward due to thermal expansion, tightly extrudes the inner wall of the limiting card groove arranged at the bottom of the upper surrounding fence, the sealing force is larger when the temperature is higher, and the self-tight sealing in the hot state is realized.

Description

Technical Field

[0001] This invention relates to the field of new energy semiconductor thin film deposition equipment manufacturing technology, and in particular to a quick-release solid precursor source bottle tray structure. Background Technology

[0002] In the epitaxial growth process of third-generation semiconductors (silicon carbide power devices, perovskite photovoltaic cells) for new energy applications, solid metal-organic precursors need to be sublimated into a gaseous state. The source bottle, as the core container that carries the precursor, has its internal tray's thermal conductivity directly determining the stability of the sublimation rate, which in turn affects the performance and yield of new energy semiconductor devices.

[0003] In existing technologies, the source bottle trays mostly adopt a simple flat-bottomed structure. Heat has to pass through the bottom of the bottle and the air gap to reach the tray, resulting in high thermal resistance and uneven temperature distribution. This causes the precursor sublimation rate to fluctuate by more than 12%, which cannot meet the high precision requirements of thin film uniformity for new energy power devices and photovoltaic cells.

[0004] In addition, when changing raw materials or cleaning, operators need to go deep into the narrow bottle opening to perform tedious bolt removal or clipping operations, which is not only time-consuming and laborious, but also easy to scratch the sealing surface or introduce particulate contamination due to improper operation. Summary of the Invention

[0005] The technical problem to be solved by the present invention is: to facilitate the quick disassembly and installation of the tray assembly by means of the cooperation of the limiting component and the positioning component, and to provide a first heating plate, a second heating plate and a third heating plate inside the source bottle body so as to form a temperature gradient from bottom to top inside the source bottle, so as to realize the slow sublimation of the precursor from the bottom. The main elements of the present invention include the tray assembly, the limiting component, the positioning component and the heating chamber.

[0006] This invention provides a quick-release solid precursor source bottle tray structure, comprising: a source bottle body, defining the side of the source bottle body facing the direction of gravity as the lower surface, a bottle cap provided on the upper surface of the source bottle body, a heating cavity provided inside the bottle body, a first heating plate, a second heating plate and a third heating plate arranged sequentially from bottom to top inside the heating cavity, a first pipe installed on the side near the bottom of the source bottle body, and a spiral tube provided inside the source bottle body to form a temperature gradient from bottom to top inside the source bottle, so as to realize the slow sublimation of the precursor from the bottom and avoid boiling and splashing; Furthermore, a tray assembly is provided inside the source bottle body. The tray assembly includes a lower base and an upper base. A lower baffle is provided on the upper surface of the lower base, and an upper baffle is provided on the lower surface of the upper base. Several sets of tray assemblies are stacked sequentially along the axial direction inside the source bottle body. A main pipe is provided at the center of the tray assembly, through which several sets of tray assemblies pass. A support plate is provided inside the lower baffle. Several sets of honeycomb holes are opened on the surface of the support plate. After the solid precursor is placed on the support plate, the heat flow is increased through the honeycomb holes, thereby improving the sublimation of the solid precursor. Furthermore, the outer ring surface of the lower enclosure has a movable groove, and a limiting component is provided in the movable groove. The limiting component includes a support rod, a limiting plate, and a positioning plate. The lower surface of the upper enclosure has a positioning groove, and the side of the positioning groove near the outer ring surface of the upper enclosure has a positioning opening. The lower surface of the upper enclosure has a positioning pin hole. In addition, the upper surface of the lower enclosure is provided with a sealing gasket and a positioning component. The positioning component includes a limiting protrusion and a positioning protrusion. Through the cooperation of the limiting component and the positioning component, the upper enclosure and the lower enclosure can be quickly connected to form a tray assembly, which facilitates the formation of a sealed cavity to place the solid precursor. In addition, a sealing gasket is provided inside the lower enclosure. Due to thermal expansion, the sealing gasket expands outward and tightly squeezes the inner wall of the limiting groove at the bottom of the upper enclosure. The higher the temperature, the greater the sealing force, achieving a hot self-tightening seal.

[0007] More specifically, the inner bottom surface of the source bottle body is provided with a threaded groove, and a positioning spring is provided on the lower surface of the threaded groove. One end of the positioning spring is fixedly connected to the lower surface of the threaded groove, and the other end of the positioning spring is fixedly connected to a limiting push plate. The limiting push plate has a circular plate structure, and the opening width of the threaded groove is greater than the diameter of the limiting push plate, so as to allow the limiting push plate to slide through the threaded groove. The positioning spring is compressed to generate an axial preload, which forces the bottom surface of the tray assembly to fit tightly against the bottom of the source bottle body.

[0008] More specifically, among the several groups of tray assemblies, the tray assembly located at the bottom layer and abutting against the bottom of the bottle inside the source bottle body has a threaded rod vertically fixedly connected to its center position on its lower surface. The lower end of the threaded rod is threaded into a threaded groove. The threaded rod is threaded into the threaded groove, which facilitates subsequent installation and disassembly.

[0009] More specifically, the first heating plate, the second heating plate, and the third heating plate are all configured as independent temperature control units. By applying increasing heating power to the first heating plate, the second heating plate, and the third heating plate, a temperature gradient field that increases stepwise from bottom to top is formed inside the heating cavity, so that the precursor slowly sublimates from the bottom, avoiding boiling and splashing.

[0010] More specifically, the spiral tube is fixedly connected to the inner wall of the source bottle body. A flexible tube is installed at one end of the spiral tube near the bottom of the source bottle body. One end of the flexible tube is connected to the output end of the first pipe, and the other end of the flexible tube is connected to the end face of the spiral tube. Several sets of the tray assemblies are located in the central area of ​​the spiral tube. The surface of the spiral tube is provided with exhaust holes. Several sets of exhaust holes are provided. The several sets of exhaust holes are evenly distributed in a spiral pattern along the axial and circumferential directions of the spiral tube. The axial and circumferential distances between two adjacent sets of exhaust holes are equal. The heat discharged by the spiral tube around the tray assembly and through the exhaust holes can make the heat act evenly on the tray assembly.

[0011] More specifically, one end of the support rod is vertically fixed to the side of the moving groove, and the limiting plate is sleeved on the support rod. The limiting plate has a square plate structure. There are two sets of support rods, which are vertically fixed to the side wall of the moving groove and are arranged vertically at intervals. The limiting plate has a square plate structure and slides with the two sets of support rods. It can move along the axis of the support rods toward or away from the source bottle body. The two sets of support rods facilitate the displacement of the limiting plate and avoid the problem of the limiting plate tilting if only one set of support rods is used.

[0012] More specifically, a reset spring is sleeved on the surface of the support rod. One end of the reset spring is fixedly connected to the side wall of the moving groove, and the other end of the reset spring is fixedly connected to the side of the limiting plate facing the moving groove. The reset spring facilitates the automatic reset of the limiting plate after it is pressed.

[0013] More specifically, the sealing gasket has an overall annular structure and its cross-section is a right-angled triangle. The upper surface of the lower enclosure is fixedly connected to a limiting protrusion with an annular structure. The limiting protrusion has a trapezoidal cross-section. Due to thermal expansion, the sealing gasket expands outward and can tightly squeeze the inner wall of the limiting groove opened at the bottom of the upper enclosure. The higher the temperature, the greater the sealing force, thus achieving a hot self-tightening seal.

[0014] More specifically, the lower surface of the upper enclosure has a limiting slot and a fixing slot. The sealing gasket can be inserted into the limiting slot. The diameter of the fixing slot is smaller than that of the limiting slot. The positioning pin hole is opened on the upper surface of the fixing slot. The positioning protrusion can be inserted into the positioning pin hole. After the lower surface of the upper enclosure is aligned with the upper surface of the lower enclosure, the limiting plate is slidably connected to the positioning slot and the positioning plate can be inserted into the positioning port. The cooperation between the positioning protrusion and the positioning pin hole prevents the upper enclosure and the lower enclosure from being misaligned during installation, ensuring that the upper end of the limiting plate can be accurately inserted into the positioning slot.

[0015] The beneficial effect of this invention is that it provides a quick-release solid-state precursor bottle tray structure. 1) The present invention provides a movable groove on the outer side of the lower enclosure and a limiting plate in the movable groove. When the upper enclosure and the lower enclosure are engaged, the positioning plate on the outer side of the limiting plate is inserted into the positioning port. Therefore, the upper enclosure and the lower enclosure can be quickly connected to form a tray assembly, which facilitates the formation of a sealed cavity for placing the solid precursor. In addition, a sealing gasket is provided inside the lower enclosure. The sealing gasket expands outward due to thermal expansion and tightly squeezes the inner wall of the limiting groove at the bottom of the upper enclosure. The higher the temperature, the greater the sealing force, thus achieving a hot self-tightening seal.

[0016] 2) The present invention provides a first heating plate, a second heating plate and a third heating plate inside the source bottle body, so as to form a temperature gradient from bottom to top inside the source bottle, so as to realize the slow sublimation of the precursor from the bottom and avoid boiling and splashing.

[0017] 3) The limiting protrusion of the lower enclosure of the present invention is provided with a positioning protrusion, and a positioning pin hole is provided at the corresponding position on the lower surface of the upper enclosure. The positioning protrusion and the positioning pin hole adopt a clearance fit (tolerance 0.02mm). When assembling, the positioning protrusion is first inserted into the positioning pin hole for guidance, ensuring that the upper enclosure and the lower enclosure are completely coaxial, avoiding sealing gaps and uneven heating caused by eccentricity. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This is a cross-sectional view of the structure of the present invention.

[0020] Figure 2 This is a schematic diagram of the spiral tube structure of the present invention.

[0021] Figure 3 This is a schematic diagram of the structure of the present invention when tilted after cross-section.

[0022] Figure 4 yes Figure 3 A magnified structural diagram at point A in the diagram.

[0023] Figure 5 This is a schematic diagram of the tray assembly structure of the present invention.

[0024] Figure 6 This is a cross-sectional view of the tray assembly of the present invention.

[0025] Figure 7 yes Figure 6 A magnified structural diagram at point B in the diagram.

[0026] Figure 8 This is a schematic diagram of the upper enclosure and upper chassis structure of the present invention.

[0027] Figure 9 yes Figure 8 A magnified structural diagram at point C in the diagram.

[0028] Figure 10 This is a schematic diagram of the lower enclosure and lower chassis structure of the present invention.

[0029] Figure 11 yes Figure 10 Enlarged structural diagram at point D.

[0030] In the diagram: 1. Source bottle body; 2. Bottle cap; 3. Heating chamber; 30. First heating plate; 31. Second heating plate; 32. Third heating plate; 4. First pipe; 5. Spiral tube; 50. Exhaust port; 6. Tray assembly; 60. Lower chassis; 61. Upper chassis; 62. Lower enclosure; 622. Support plate; 63. Upper enclosure; 7. Moving groove; 8. Limiting assembly; 80. Support rod; 81. Limiting plate; 82. Positioning plate; 83. Return spring; 9. Positioning groove; 10. Positioning port; 11. Sealing gasket; 12. Positioning assembly; 121. Limiting protrusion; 122. Positioning pin; 13. Positioning pin hole; 14. Threaded groove; 15. Positioning spring; 16. Limiting push plate; 17. Main pipe; 18. Threaded rod; 19. Hose; 20. Limiting groove; 21. Fixing groove. Detailed Implementation

[0031] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention, and therefore only show the components relevant to the invention.

[0032] Example 1: like Figures 1-11 The diagram shows an embodiment of the present invention, a quick-release solid precursor source bottle tray structure, comprising: a source bottle body 1, with the side of the source bottle body 1 facing the direction of gravity defined as the lower surface, a bottle cap 2 provided on the upper surface of the source bottle body 1, a heating cavity 3 provided inside the bottle body of the source bottle body 1, and a first heating plate 30, a second heating plate 31 and a third heating plate 32 arranged sequentially from bottom to top inside the heating cavity 3, and a first pipe 4 installed on the side near the bottom of the source bottle body 1, and a spiral tube 5 provided inside the source bottle body 1. When high-temperature fluid is input into the source bottle body 1 through the first pipe 4, the high-temperature fluid is transported along the spiral tube 5 by the cooperation of the hose 19, and then the spiral transport of the spiral tube 5 facilitates the uniform application of the high-temperature fluid to the surface of the tray assembly 6, which is convenient for heating the solid precursor; Furthermore, a tray assembly 6 is provided inside the source bottle body 1. The tray assembly 6 includes a lower base plate 60 and an upper base plate 61. A lower enclosure 62 is provided on the upper surface of the lower base plate 60, and an upper enclosure 63 is provided on the lower surface of the upper base plate 61. The upper enclosure 63 and the lower enclosure 62 are quickly connected and fitted to form the tray assembly 6, which facilitates the formation of a sealed cavity by the tray assembly 6 to place the solid precursor. Furthermore, the outer ring surface of the lower enclosure 62 is provided with a moving groove 7, and a limiting component 8 is provided in the moving groove 7. The limiting component 8 includes a support rod 80, a limiting plate 81, and a positioning plate 82. The lower surface of the upper enclosure 63 is provided with a positioning groove 9, and the side of the positioning groove 9 near the outer ring surface of the upper enclosure 63 is provided with a positioning opening 10. The lower surface of the upper enclosure 63 is provided with a positioning pin hole 13. In addition, the upper surface of the lower enclosure 62 is provided with a sealing gasket 11 and a positioning component 12. The positioning component 12 includes a limiting protrusion 121 and a positioning protrusion 122. The positioning protrusion 122 and the positioning pin hole 13 cooperate to prevent the upper enclosure 63 and the lower enclosure 62 from being misaligned during installation, and ensure that the upper end of the limiting plate 81 can be accurately inserted into the positioning groove 9, which facilitates the subsequent installation and fixing of the upper enclosure 63 and the lower enclosure 62.

[0033] Example 2: like Figure 3 and Figure 4 As shown, based on Embodiment 1, the following addition is made: a threaded groove 14 is formed on the inner bottom surface of the source bottle body 1. A positioning spring 15 is provided on the lower surface of the threaded groove 14. One end of the positioning spring 15 is fixedly connected to the lower surface of the threaded groove 14, and the other end of the positioning spring 15 is fixedly connected to a limiting push plate 16. The limiting push plate 16 has a circular plate structure. The opening width of the threaded groove 14 is larger than the diameter of the limiting push plate 16, so as to allow the limiting push plate 16 to slide through the threaded groove 14. Among the several sets of tray assemblies 6, the tray assembly 6 located at the bottom layer and abutting against the bottom of the bottle inside the source bottle body 1 has a threaded rod 18 vertically fixedly connected at the center position of its lower surface. The lower end of the threaded rod 18 is threaded into the threaded groove 14. When needed... When fixing the tray assembly 6, first screw the threaded rod 18 into the threaded groove 14. As the threaded rod 18 rotates and moves downward in the threaded groove 14, it presses down on the limiting push plate 16, thereby compressing the positioning spring 15. After the threaded rod 18 has rotated, the tray assembly 6 can be fixed inside the source bottle body 1. The positioning spring 15 generates an upward force on the limiting push plate 16 through its own upward elastic force. On the one hand, the preload force generated by the limiting push plate 16 on the threaded rod 18 prevents the threaded rod 18 from rotating. On the other hand, it also makes the bottom surface of the tray assembly 6 fit tightly against the bottom of the source bottle body 1, which is convenient for the subsequent disassembly of the tray assembly 6. It is only necessary to rotate the threaded rod 18 out of the threaded groove 14.

[0034] Example 3: like Figure 1 , Figure 2 , Figure 5 and Figure 6 as shown, the following is added on the basis of the first embodiment: a plurality of sets of tray assemblies 6 are sequentially stacked and arranged inside the source bottle body 1 along the axial direction thereof, a main pipe 17 penetrating through the plurality of sets of tray assemblies 6 is arranged at the center of the tray assemblies 6, a support plate 622 is disposed in the lower enclosure 62, a plurality of sets of honeycomb holes are opened on the surface of the support plate 622. When the solid precursor is placed on the surface of the support plate 622, the high-temperature fluid can effectively pass through the bottom of the solid precursor through the plurality of sets of honeycomb holes, which facilitates uniform heating of the bottom of the solid precursor. In addition, the first heating plate 30, the second heating plate 31 and the third heating plate 32 are all configured as independent temperature control units. By applying increasing heating power to the first heating plate 30, the second heating plate 31 and the third heating plate 32, a temperature gradient field increasing stepwise from bottom to top is formed inside the heating cavity 3. In order to meet the differentiated heat receiving requirements of the tray assemblies 6 at different height positions, the first heating plate 30, the second heating plate 31 and the third heating plate 32 are arranged in a stacked array in the heating cavity 3, and each heating plate is internally provided with an independent heating element and a temperature sensor. In actual operation, the system sets the output power of the first heating plate 30, the second heating plate 31 and the third heating plate 32 in a gradient, for example, the power is set as P1<P2<P3, so that the steady-state temperature on the surface of each heating plate increases sequentially, for example, the first heating plate 30 is maintained at 60°C, the second heating plate 31 is maintained at 80°C, and the third heating plate 32 is maintained at 100°C. This layered independent temperature control effectively avoids the problem of excessive upper and lower temperature difference caused by traditional single heat source heating, and ensures that a stable and accurate temperature gradient from bottom to top is formed in the source bottle body 1, as shown in Table 1.

[0035] The spiral tube 5 is fixedly connected to the inner wall of the bottle body of the source bottle body 1. A flexible tube 19 is installed at one end of the spiral tube 5 close to the inner bottom of the source bottle body 1. One end of the flexible tube 19 is in communication with the output end of the first pipeline 4, and the other end of the flexible tube 19 is in communication with the end face of the spiral tube 5. A plurality of sets of the tray assemblies 6 are located in the central area of the spiral tube 5. A plurality of sets of exhaust holes 50 are opened on the surface of the spiral tube 5, the plurality of sets of exhaust holes 50 are uniformly distributed in a spiral pattern along the axial direction and the circumferential direction of the spiral tube 5, and the axial spacing and the circumferential spacing between two adjacent sets of the exhaust holes 50 are equal. By arranging the spiral tube 5 around the tray assemblies 6, when the high-temperature fluid is conveyed in the spiral tube 5, the heat discharged through the opened exhaust holes 50 can act on the tray assemblies 6 uniformly, which can further improve the heating effect of the solid precursor.

[0036] Table 1: Comparison table between the traditional source bottle heating method and the solution of the present application

[0037] Fourth Embodiment: like Figure 6 and Figure 7 As shown, based on Embodiment 1, the following additions are made: one end of the support rod 80 is vertically fixed to the side of the moving groove 7; a limiting plate 81 is sleeved on the support rod 80; the limiting plate 81 is generally square plate-shaped; two sets of support rods 80 are provided, the two sets of support rods 80 are vertically fixed about the side wall of the moving groove 7, and the two sets of support rods 80 are arranged vertically at intervals; the limiting plate 81 is square plate-shaped, and the limiting plate 81 slides with the two sets of support rods 80, and can move towards or away from the source bottle body 1 along the axial direction of the support rods 80; a return spring 83 is sleeved on the surface of the support rod 80, one end of the return spring 83 is fixedly connected to the side wall of the moving groove 7, and the return spring 83... The other end is fixedly connected to the side of the limiting plate 81 facing the moving groove 7. When it is necessary to install and cooperate the upper enclosure 63 and the lower enclosure 62, first press the limiting plate 81 to make the limiting plate 81 move along the support rod 80. Then place the upper enclosure 63 on the surface of the lower enclosure 62. Then the limiting plate 81 can be released. The limiting plate 81 can be reset by the elastic force of the return spring 83. In addition, the elastic force of the return spring 83 prevents the limiting plate 81 from automatically moving along the support rod 80. After the limiting plate 81 is reset, the positioning plate 82 is inserted into the positioning port 10, so that the upper enclosure 63 and the lower enclosure 62 can be quickly installed and fixed.

[0038] Example 5: like Figures 7-11As shown, based on Embodiment 1, the following is added: the sealing gasket 11 has an overall annular structure with a right-angled triangular cross-section; a ring-shaped limiting protrusion 121 is fixedly connected to the upper surface of the lower enclosure 62, and the limiting protrusion 121 has a trapezoidal cross-section; a limiting groove 20 and a fixing groove 21 are provided on the lower surface of the upper enclosure 63; the sealing gasket 11 can be inserted into the limiting groove 20; the groove diameter of the fixing groove 21 is smaller than the groove diameter of the limiting groove 20; a positioning pin hole 13 is provided on the upper surface of the fixing groove 21; and a positioning protrusion 122 can be inserted into the positioning pin hole 13. After the lower surface of the upper enclosure 63 is aligned with the upper surface of the lower enclosure 62, the limiting plate 81 is slidably connected to the positioning groove 9, and the positioning plate 82 can be inserted into the positioning port 10. When the upper enclosure 63 and the lower enclosure 62 are installed together, the positioning protrusion 122 can first be... 2. The positioning pin hole 13 is engaged with the positioning pin hole 13 to avoid the installation misalignment of the upper enclosure 63 and the lower enclosure 62, and to ensure that the upper end of the limiting plate 81 can be accurately inserted into the positioning groove 9. The positioning protrusion 122 and the positioning pin hole 13 adopt a clearance fit (tolerance 0.02mm). When assembling, the positioning protrusion 122 is first inserted into the positioning pin hole 13 for guidance, to ensure that the upper enclosure 63 and the lower enclosure 62 are completely coaxial, and to avoid sealing gaps and uneven heating caused by eccentricity. In addition, the limiting protrusion 121 is inserted into the fixing groove 21 to avoid the upper enclosure 63 from shifting on the surface of the lower enclosure 62. After the upper enclosure 63 and the lower enclosure 62 are installed, the sealing gasket 11 is inserted into the limiting groove 20. The sealing gasket 11 expands outward due to thermal expansion, and tightly squeezes the inner wall of the limiting groove 20 opened at the bottom of the upper enclosure 63. The higher the temperature, the greater the sealing force, and to achieve hot self-tightening sealing.

[0039] Based on the above-described preferred embodiments of the present invention, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A quick-release solid precursor bottle tray structure, comprising: The source bottle body (1) is defined with the side facing the direction of gravity as the lower surface. The upper surface of the source bottle body (1) is provided with a bottle cap (2). The source bottle body (1) is characterized in that a heating cavity (3) is provided inside the bottle body. The heating cavity (3) is provided with a first heating plate (30), a second heating plate (31) and a third heating plate (32) arranged from bottom to top. In addition, a first pipe (4) is installed on the side near the bottom of the source bottle body (1). A spiral tube (5) is provided inside the source bottle body (1). Furthermore, a tray assembly (6) is provided inside the source bottle body (1). The tray assembly (6) includes a lower base plate (60) and an upper base plate (61). A lower enclosure (62) is provided on the upper surface of the lower base plate (60), and an upper enclosure (63) is provided on the lower surface of the upper base plate (61). Several sets of tray assemblies (6) are stacked sequentially along their axial direction inside the source bottle body (1). A main pipe (17) is provided at the center of the tray assembly (6) to pass through several sets of tray assemblies (6). A support plate (622) is provided inside the lower enclosure (62), and several sets of honeycomb holes are opened on the surface of the support plate (622). In addition, the outer ring surface of the lower enclosure (62) is provided with a moving groove (7), and a limiting component (8) is provided in the moving groove (7). The limiting component (8) includes a support rod (80), a limiting plate (81) and a positioning plate (82). The lower surface of the upper enclosure (63) is provided with a positioning groove (9). The side of the positioning groove (9) near the outer ring surface of the upper enclosure (63) is provided with a positioning port (10). The lower surface of the upper enclosure (63) is provided with a positioning pin hole (13). In addition, the upper surface of the lower enclosure (62) is provided with a sealing gasket (11) and a positioning component (12), the positioning component (12) including a limiting protrusion (121) and a positioning protrusion (122).

2. The quick-release solid precursor source bottle tray structure according to claim 1, characterized in that, The inner bottom surface of the source bottle body (1) is provided with a threaded groove (14). A positioning spring (15) is provided on the lower surface of the threaded groove (14). One end of the positioning spring (15) is fixedly connected to the lower surface of the threaded groove (14), and the other end of the positioning spring (15) is fixedly connected to a limiting push plate (16). The limiting push plate (16) has a circular plate structure. The opening width of the threaded groove (14) is greater than the diameter of the limiting push plate (16) so as to allow the limiting push plate (16) to slide through the threaded groove (14).

3. The quick-release solid precursor source bottle tray structure according to claim 2, characterized in that, Among the several groups of tray assemblies (6), the tray assembly (6) located at the bottom layer and abutting against the bottom of the bottle inside the source bottle body (1) has a threaded rod (18) vertically fixedly connected at the center of its lower surface. The lower end of the threaded rod (18) is threaded into the threaded groove (14).

4. The quick-release solid precursor source bottle tray structure according to claim 1, characterized in that, The first heating plate (30), the second heating plate (31) and the third heating plate (32) are all configured as independent temperature control units. By applying increasing heating power to the first heating plate (30), the second heating plate (31) and the third heating plate (32), a temperature gradient field that increases stepwise from bottom to top is formed inside the heating cavity (3).

5. The quick-release solid precursor source bottle tray structure according to claim 1, characterized in that, The spiral tube (5) is fixedly connected to the inner wall of the source bottle body (1). A flexible tube (19) is installed at one end of the spiral tube (5) near the bottom of the source bottle body (1). One end of the flexible tube (19) is connected to the output end of the first pipe (4), and the other end of the flexible tube (19) is connected to the end face of the spiral tube (5). Several sets of tray assemblies (6) are located in the central area of ​​the spiral tube (5). The surface of the spiral tube (5) is provided with exhaust holes (50). Several sets of exhaust holes (50) are provided. The several sets of exhaust holes (50) are evenly distributed in a spiral pattern along the axial and circumferential directions of the spiral tube (5). The axial distance and circumferential distance between two adjacent sets of exhaust holes (50) are equal.

6. The quick-release solid precursor source bottle tray structure according to claim 1, characterized in that, One end of the support rod (80) is vertically fixed to the side of the moving groove (7). The limiting plate (81) is sleeved on the support rod (80). The limiting plate (81) has a square plate structure. There are two sets of support rods (80). The two sets of support rods (80) are vertically fixed about the side wall of the moving groove (7). The two sets of support rods (80) are arranged vertically and alternately up and down along the vertical direction. The limiting plate (81) has a square plate structure. The limiting plate (81) slides with the two sets of support rods (80) and can move towards or away from the source bottle body (1) along the axial direction of the support rod (80).

7. The quick-release solid precursor source bottle tray structure according to claim 6, characterized in that, The support rod (80) is fitted with a reset spring (83). One end of the reset spring (83) is fixedly connected to the side wall of the moving groove (7), and the other end of the reset spring (83) is fixedly connected to the side of the limiting plate (81) facing the moving groove (7).

8. The quick-release solid precursor source bottle tray structure according to claim 1, characterized in that, The sealing gasket (11) has an overall ring structure and its cross-section is a right triangle. The upper surface of the lower enclosure (62) is fixedly connected with a limiting protrusion (121) with a ring structure. The cross-section of the limiting protrusion (121) is trapezoidal.

9. The quick-release solid precursor source bottle tray structure according to claim 1, characterized in that, The lower surface of the upper enclosure (63) is provided with a limiting groove (20) and a fixing groove (21). The sealing gasket (11) can be inserted into the limiting groove (20). The groove diameter of the fixing groove (21) is smaller than the groove diameter of the limiting groove (20). The positioning pin hole (13) is opened on the upper surface of the fixing groove (21). The positioning protrusion (122) can be inserted into the positioning pin hole (13). After the lower surface of the upper enclosure (63) is aligned with the upper surface of the lower enclosure (62), the limiting plate (81) is slidably connected with the positioning groove (9) and the positioning plate (82) can be inserted into the positioning port (10).

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