A grating galvanometer device and a control system and method thereof

Abstract

The application discloses a grating galvanometer device and a control system and method thereof, and belongs to the field of laser processing equipment.The grating galvanometer device comprises a grating galvanometer motor, a motor output shaft, a galvanometer clamp, a triangular chuck type quick clamp, a DD motor, and a motor support.The galvanometer clamp is installed at the end of the motor output shaft and is used for clamping and fixing a laser reflecting mirror.The one end of the quick clamp is coaxially fixedly connected with the motor output shaft.The DD motor is provided with a motor output shaft, and the motor output shaft is rigidly connected with the other end of the quick clamp so that the motor output shaft and the motor output shaft are coaxially rotated.The motor support is used for bearing the grating galvanometer motor and the DD motor.The application can collect, model and iteratively correct the short-period error in the operation process of the galvanometer motor by taking the real-time feedback data of the DD motor as the precision reference, solves the short-period error problem of the low-line grating galvanometer motor, realizes the real-time correction of the angle positioning error of the galvanometer motor, improves the precision and consistency of laser processing, reduces the hardware cost of the equipment, and enhances the working condition adaptability.

Description

Technical Field

[0001] This invention relates to the field of laser equipment technology, and in particular to a grating galvanometer device and its control system and method. Background Technology

[0002] In laser processing equipment, the grating galvanometer motor is the core actuator for achieving high-precision laser beam scanning. Its angular positioning accuracy directly determines the dimensional accuracy, trajectory consistency, and product yield of the laser-processed pattern. Currently, constrained by equipment cost, installation space, and control schemes, some grating galvanometer motors are equipped with low-resolution grating scales, resulting in low angular resolution. Furthermore, influenced by multiple factors such as grating scale manufacturing errors, installation eccentricity, motor shaft runout, and complex operating conditions, the motor operation generates significant short-cycle errors. Specifically, the angular positioning deviation fluctuates periodically with the rotation of the motor shaft, with a deviation range reaching up to ±0.05°. This error directly leads to quality problems such as laser scanning trajectory distortion, pattern offset, and uneven etching depth, making it difficult to meet the micron-level precision machining requirements of high-end fields such as semiconductors, precision electronics, and medical devices.

[0003] Currently, the industry's conventional optimization solutions for the aforementioned short-cycle errors in galvanometer motors mainly include three types: replacing the high-resolution grating ruler, optimizing the motor installation process, and offline software error calibration. However, all of these have significant technical shortcomings and limitations. Replacing the high-resolution grating ruler can improve the basic resolution, but it will significantly increase the hardware cost of the equipment. Moreover, the galvanometer motor itself has a compact structure and limited installation space, making the assembly of the high-resolution grating ruler extremely difficult and its applicability poor. Optimizing the installation process can only reduce some systematic errors such as installation eccentricity and assembly deviation, and cannot eliminate the inherent short-cycle errors during motor operation from the root. Traditional software error calibration is mostly a static offline calibration mode, which can only compensate for inherent errors under fixed operating conditions. It cannot adapt to error drift caused by dynamic changes in operating conditions such as temperature fluctuations and mechanical vibrations during equipment operation, and its compensation stability and real-time performance are insufficient.

[0004] In addition, in complex machining scenarios involving workpiece rotation and galvanometer axis linkage, high-precision rotating platforms such as the galvanometer motor and the DD motor (a type of low-speed, high-torque permanent magnet synchronous servo motor) generally adopt independent control modes, achieving only basic motion synchronization without establishing an effective error linkage feedback and compensation mechanism. The system cannot utilize the high-precision data from the DD motor's high-resolution encoder to correct the galvanometer motor's positioning error in real time, resulting in idle and wasted high-precision hardware resources and further limiting the overall precision machining capabilities of the laser processing equipment.

[0005] Therefore, the industry urgently needs a new high-precision error compensation technology solution that relies on the encoder data of the high-resolution DD motor to achieve real-time, adaptive dynamic compensation for the short-cycle error of the low-line grating galvanometer motor. Without significantly increasing the equipment manufacturing cost, it can effectively improve the angle positioning accuracy of the galvanometer motor and the stability of equipment operation, and solve the pain points of existing technologies such as insufficient processing accuracy, high modification cost, unstable error compensation effect, and low utilization rate of high-precision resources. Summary of the Invention

[0006] This invention provides a grating galvanometer device and its control system and method, which aims to solve the short-cycle error problem of the motor of the low-line grating galvanometer, realize the real-time correction of the angular positioning error of the galvanometer motor, improve the accuracy and consistency of laser processing, reduce the hardware cost of the equipment, and enhance the adaptability to working conditions.

[0007] This invention provides a grating galvanometer device, comprising: The grating galvanometer motor is equipped with a motor output shaft; A galvanometer clamp is installed at the end of the motor output shaft and is used to clamp and fix the laser reflector. A triangular chuck-type quick clamp, one end of which is coaxially and fixedly connected to the output shaft of the motor; The DD motor is equipped with a motor output shaft, which is rigidly connected to the other end of the triangular chuck quick clamp so that the motor output shaft rotates coaxially with the motor output shaft. Motor bracket, used to support the grating galvanometer motor and DD motor.

[0008] Furthermore, the number of lines on the grating scale of the grating galvanometer motor is less than 2500.

[0009] Furthermore, the DD motor has a built-in encoder with a line count greater than 50,000.

[0010] Furthermore, the triangular chuck-type quick clamp adopts an elastic centering jaw structure, and the fit tolerance between the elastic centering jaw structure and the motor output shaft is less than or equal to H7 / h6.

[0011] This invention also provides a control system for a grating galvanometer device, comprising: The grating galvanometer device as described in any of the preceding items; A control module, electrically connected to the grating galvanometer device, includes: The instruction sending unit is used to send control instructions to the grating galvanometer device so that the grating galvanometer device performs corresponding actions according to the control instructions. The data acquisition unit is used to acquire the first angular position data of the encoder in the grating galvanometer motor and the second angular position data of the encoder in the DD motor; The model building unit is used to combine the first angular position data and the second angular position data to build a short-period error model of the grating galvanometer motor; An error compensation unit is used to generate a compensation signal through the short-period error model and send the compensation signal to the grating galvanometer motor to correct the error of the grating galvanometer motor.

[0012] This invention also provides a control method for a grating galvanometer device, applied to the control system of the grating galvanometer device described above, the control method comprising: A control command is sent to the grating galvanometer device so that the grating galvanometer device performs the corresponding action according to the control command; The first angular position data of the encoder in the grating galvanometer motor and the second angular position data of the encoder in the DD motor are collected. A short-period error model for the grating galvanometer motor is constructed by combining the first and second angular position data. The short-period error model is used to generate a compensation signal for the grating galvanometer device in real time, and the compensation signal is sent to the grating galvanometer motor to correct the error of the grating galvanometer motor.

[0013] Furthermore, the control method for the grating galvanometer device also includes: The coaxiality of the motor output shaft of the grating mirror and the motor output shaft of the DD motor is calibrated using the triangular chuck-type quick clamp.

[0014] Furthermore, the acquisition of the first angular position data of the encoder in the grating galvanometer motor and the acquisition of the second angular position data of the encoder in the DD motor include: The DD motor is controlled to rotate at a constant low speed for one revolution according to a preset rotation speed, and the first angular position data and the second angular position data are collected synchronously according to a preset collection frequency.

[0015] Furthermore, the step of constructing a short-period error model for the grating galvanometer motor by combining the first angular position data and the second angular position data includes: Calculate the deviation between the first angular position data and the second angular position data; The short-period error model is constructed using the deviation value.

[0016] Furthermore, the step of generating a compensation signal for the grating galvanometer device in real time using the short-period error model and sending the compensation signal to the grating galvanometer motor to correct the error of the grating galvanometer motor includes: Real-time acquisition of the first angular position data corresponding to the grating galvanometer motor and the second angular position data corresponding to the DD motor; The error compensation amount is calculated by combining the short-period error model and the second angular position data; A compensation signal is generated based on the error compensation amount and sent to the grating galvanometer motor.

[0017] Compared with the prior art, the beneficial effects of the embodiments of the present invention are as follows: (1) Positioning accuracy is greatly improved: Through feedback compensation of the high-resolution DD motor 104 encoder, the angle positioning error of the low-line grating galvanometer motor is reduced from ±0.05° before compensation to ±0.005°, the angle resolution is improved by two orders of magnitude, the laser scanning trajectory distortion rate is significantly reduced, and the processing pattern accuracy is greatly improved. (2) Effective control of hardware costs: There is no need to replace the high-line grating ruler. High-precision processing can be achieved by simply combining the existing 1024-line grating galvanometer motor and the 157447-line DD motor 104. The hardware cost of the equipment is reduced by more than 30%, which is suitable for the precision upgrade needs of low-end and mid-range equipment. (3) Strong adaptability to working conditions: The adaptive error model construction and iterative update scheme can effectively eliminate the influence of changes in working conditions such as temperature, vibration, and wear on the error compensation effect, significantly improve the long-term operating stability of the equipment, and ensure that the compensation effect does not drift. (4) Improved processing consistency and yield: The combination of dual-axis synchronous control and real-time error compensation ensures the consistency of laser scanning trajectory, and the processing yield is increased from 95% before compensation to 99.8%, which greatly reduces the rework rate and is suitable for large-scale production scenarios. (5) High structural integration: The integrated coaxial structure design is adopted. The galvanometer module and the DD motor are rigidly connected by a triangular chuck, eliminating the need for additional tooling and debugging procedures, thus improving the efficiency of equipment installation and debugging by more than 50%. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of a grating galvanometer device provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of a grating galvanometer device from another perspective, provided in an embodiment of the present invention. Figure 3 This is a schematic diagram of the structure of a grating galvanometer device from another perspective, provided in an embodiment of the present invention. Figure 4 A schematic block diagram of a control module in a control system for a grating galvanometer device provided in an embodiment of the present invention; Figure 5 This is a flowchart illustrating a control method for a grating galvanometer device provided in an embodiment of the present invention. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0022] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0023] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0024] Please see below. Figures 1-3 An embodiment of the present invention provides a grating galvanometer device 100, comprising: The grating galvanometer motor 101 is equipped with a motor output shaft; A galvanometer clamp 102 is installed at the end of the motor output shaft and is used to clamp and fix the laser reflector. The triangular chuck-type quick clamp 103 has one end fixedly connected to the output shaft of the motor coaxially; The DD motor 104 is provided with a motor output shaft, which is rigidly connected to the other end of the triangular chuck quick clamp 103 so that the motor output shaft rotates coaxially with the motor output shaft; The motor bracket 105 is used to support the grating galvanometer motor 101 and the DD motor 104.

[0025] In this embodiment, the grating galvanometer device 100 specifically includes a grating galvanometer motor 101, a galvanometer clamp 102, a triangular chuck-type quick clamp 103, a DD motor 104, and a motor bracket 105. The grating galvanometer motor 101 has a built-in low-line-count grating encoder for outputting a basic angle position signal. The triangular chuck-type quick clamp 103 enables rapid coaxial centering assembly of the two output shafts, ensuring stable torque transmission and minimal coaxiality error during transmission, thus avoiding additional angular deviations caused by assembly eccentricity. In actual operation, the DD motor 104 drives the grating galvanometer motor 101 to rotate synchronously, while simultaneously using its built-in high-line-count encoder to output a higher-precision angle position reference signal, providing data support for subsequent error compensation.

[0026] This embodiment utilizes real-time feedback data from the encoder of the high-resolution DD motor 104 as a precision benchmark. It can accurately collect, model, and iteratively correct short-cycle errors during the operation of the galvanometer motor, achieving real-time adaptive compensation for the angular positioning error of the low-resolution grating galvanometer motor 101 without replacing the high-resolution grating ruler or requiring complex assembly process optimization. Compared to traditional galvanometer structures and error optimization schemes, this embodiment addresses the industry pain points of low-resolution grating galvanometers—low resolution, large periodic deviations, and poor compensation stability—at the structural level. It reduces the angular positioning error of the galvanometer motor from ±0.05° to ±0.005°, significantly improving the flatness, consistency, and processing accuracy of the laser scanning trajectory. Furthermore, this device is compact, easy to assemble, and has low modification costs, making it suitable for various high-end precision laser processing scenarios such as precision marking, laser welding, and fine cutting, effectively improving product processing yield and equipment versatility.

[0027] Specifically, the number of lines on the grating scale of the grating galvanometer motor 101 is less than 2500 lines, for example, 1024 lines.

[0028] The DD motor 104 has a built-in encoder with a line count greater than 50,000, for example, 157,447 lines.

[0029] This embodiment uses a combination of a low-ratio grating galvanometer motor 101 and a high-ratio DD motor 104 encoder. While ensuring that the overall processing accuracy meets the standards, the hardware modification cost is reduced to the greatest extent. There is no need to make large-scale changes to the existing equipment structure. The accuracy upgrade can be achieved simply by coaxial assembly, which can adapt to the modification needs of most existing equipment.

[0030] In one embodiment, the triangular chuck-type quick clamp 103 adopts an elastic centering jaw structure, and the fit tolerance between the elastic centering jaw structure and the motor output shaft is less than or equal to H7 / h6.

[0031] In this embodiment, the triangular chuck-type quick clamp 103 adopts an elastic centering jaw structure. Its fit tolerance with the motor output shaft is ≤H7 / h6, and its clamping repeatability is ≤±0.01mm. This enables high-precision centering clamping, ensuring no backlash, slippage, or relative offset during dual-axis transmission. This embodiment, through the triangular chuck-type quick clamp 103 with high-precision centering capability, achieves rigid coaxial docking between the output shaft of the grating galvanometer motor 101 and the output shaft of the DD motor 104. This minimizes errors caused by assembly eccentricity, shaft runout, and transmission backlash, ensuring precise synchronous linkage between the two axes. This provides highly stable mechanical structural support for subsequent high-precision data calibration, short-cycle error modeling, and real-time compensation.

[0032] It should be noted that the specific models of the core hardware components such as the grating galvanometer motor 101, DD motor 104, and triangular chuck quick clamp 103 in this embodiment can be flexibly selected and replaced according to the actual equipment operating conditions and processing requirements. Regular adjustments to the hardware models do not deviate from the core technical solution and protection scope of this embodiment. For example, the jaw structure dimensions of the triangular chuck quick clamp 103 can be customized and adapted according to the actual specifications of the output shafts of the galvanometer motor and DD motor 104, enabling compatibility with transmission equipment of different shaft diameters and models, effectively improving the adaptability and versatility of this embodiment. Furthermore, since the purpose of using the triangular chuck quick clamp 103 in this embodiment is to achieve workpiece positioning and ensure coaxiality, all equivalent implementation methods that achieve workpiece centering and ensure assembly / processing coaxial accuracy through various positioning and clamping structures, centering fixtures, and coaxial limiting components fall within the protection scope of this solution.

[0033] like Figure 4 As shown, this embodiment of the invention also provides a control system for a grating galvanometer device 100, the control system comprising: The grating galvanometer device 100 as described above; Control module 200, electrically connected to the grating galvanometer device 100, includes: The instruction sending unit 201 is used to send control instructions to the grating galvanometer device 100 so that the grating galvanometer device 100 performs corresponding actions according to the control instructions; The data acquisition unit 202 is used to acquire the first angular position data of the encoder in the grating galvanometer motor 101 and the second angular position data of the encoder in the DD motor 104. The model building unit 203 is used to build a short-period error model of the grating galvanometer motor 101 by combining the first angular position data and the second angular position data. The error compensation unit 204 is used to generate a compensation signal through the short-period error model and send the compensation signal to the grating galvanometer motor 101 to perform error correction on the grating galvanometer motor 101.

[0034] In this embodiment, the control system is equipped with the grating galvanometer device 100, which includes a hardware control unit and an algorithm compensation unit. Specifically, it includes a control module 200, a galvanometer motor controller, and a DD motor 104 controller, which can realize dual-axis synchronous control, real-time data acquisition, and dynamic error compensation.

[0035] The control module 200 specifically includes an instruction sending unit 201, a data acquisition unit 202, a model building unit 203, and an error compensation unit 204. The instruction sending unit 201 sends machining trajectory instructions and synchronous control instructions to the grating galvanometer device 100, enabling the device to perform preset machining actions such as laser scanning deflection and synchronous rotation of the shaft system. The data acquisition unit 202 synchronously acquires the first angular position data output by the encoder of the grating galvanometer motor 101 and the second angular position data output by the encoder of the DD motor 104, providing raw data for error modeling. Data support; the model building unit 203 uses the second angular position data of the DD motor 104 with higher precision as a benchmark, and calibrates the first angular position data of the grating galvanometer motor 101 to accurately extract the short-cycle error characteristics during the operation of the galvanometer motor, and iteratively builds a short-cycle error model of the galvanometer motor that is adapted to the real-time working conditions; the error compensation unit 204 dynamically generates an accurate compensation signal based on the real-time updated short-cycle error model, and sends the compensation signal to the grating galvanometer motor 101 in real time to complete the dynamic correction of the angular positioning deviation of the galvanometer motor and eliminate the periodic positioning error.

[0036] The specific control process is as follows: The host computer, acting as the core control terminal, can establish communication links with the galvanometer motor controller and the DD motor 104 controller via Ethernet or fieldbus, respectively, to achieve high-speed synchronous transmission of control commands and feedback data. The system's dual-axis synchronization error is ≤1μs, which can completely avoid compensation deviations and machining trajectory distortions caused by asynchronous motion. During operation, the host computer issues machining trajectory and synchronization control commands. After receiving the commands, the galvanometer motor controller drives the grating galvanometer motor 101 to complete the laser reflector deflection action. The DD motor 104 controller synchronously drives the DD motor 104 to coaxially link with the output shaft of the galvanometer motor. The data acquisition unit 202 continuously and in real-time acquires angle data from two encoders. The error compensation unit 204, relying on the high-precision DD motor 104 data, completes error modeling and iterative optimization, and outputs compensation signals in real-time to the galvanometer motor controller, forming a closed-loop control logic of synchronous control, data acquisition, error modeling, and dynamic compensation, thereby significantly improving the positioning accuracy of the galvanometer motor and the stability of laser processing.

[0037] like Figure 5 As shown, this embodiment of the invention also provides a control method for a grating galvanometer device, applied to the control system of the grating galvanometer device 100 as described above, the control method including steps S101 to S104.

[0038] Step S101: Send a control command to the grating galvanometer device 100 so that the grating galvanometer device 100 performs the corresponding action according to the control command; Step S102: Collect the first angular position data of the encoder in the grating galvanometer motor 101 and the second angular position data of the encoder in the DD motor 104; Step S103: Construct a short-period error model for the grating galvanometer motor 101 by combining the first angular position data and the second angular position data; Step S104: Generate a compensation signal for the grating galvanometer device 100 in real time using the short-period error model, and send the compensation signal to the grating galvanometer motor 101 to perform error correction on the grating galvanometer motor 101.

[0039] In this embodiment, based on the mechanical structure of dual-axis coaxial rigid linkage, the high-precision position feedback data of the ultra-high resolution DD motor 104 encoder is used as the true value benchmark to accurately identify and model the periodic positioning error of the low-marker grating galvanometer motor 101. The entire method adopts a real-time online dynamic compensation mechanism, which differs from the traditional static offline calibration method. It can adapt to complex working conditions such as temperature drift, mechanical vibration, and load fluctuation during equipment operation in real time, and can continuously and dynamically correct the short-cycle error generated by the galvanometer motor during continuous operation, effectively avoiding the problems of compensation failure and accuracy drift in traditional calibration methods. At the same time, the method relies on a microsecond-level dual-axis synchronous communication architecture to ensure a high degree of synchronization between data acquisition, error calculation, and compensation output, eliminating secondary processing errors caused by timing deviations.

[0040] This embodiment can significantly improve the angular positioning accuracy and motion consistency of the low-ratio grating galvanometer motor 101 without replacing the high-cost, space-constrained high-ratio grating ruler, solely through structural coordination and closed-loop algorithm control. It stably reduces the short-cycle angular error of the galvanometer motor from ±0.05° to ±0.005°. This control method boasts strong compatibility, low modification cost, and high compensation stability. It can adapt to various dynamic laser processing conditions, effectively solving the defects of traditional galvanometer control schemes such as trajectory distortion, pattern offset, uneven processing depth, and large yield fluctuations. It significantly improves the processing accuracy and finished product consistency of laser precision marking, welding, and cutting processes, greatly expanding the application scope of low-cost galvanometer systems in high-end precision laser processing.

[0041] In one embodiment, the control method for the grating galvanometer device further includes: The coaxiality of the motor output shaft of the grating mirror and the motor output shaft of the DD motor 104 is calibrated using the triangular chuck quick clamp 103.

[0042] In this embodiment, leveraging the precision advantage of the elastic centering jaw structure inherent in the triangular chuck-type quick clamp 103, high-precision coaxial calibration and rigid locking of the output shafts of the galvanometer motor and the DD motor 104 can be completed in one go during equipment assembly, eliminating the need for repeated manual adjustments using external testing tools such as dial indicators. This assembly calibration method not only simplifies the equipment assembly process and lowers the barrier to manual assembly, but also effectively avoids individual errors and assembly deviations caused by manual adjustments, ensuring a high degree of uniformity in the coaxiality accuracy of different equipment and different assembly batches. It also eliminates additional angular positioning errors introduced by assembly eccentricity and shaft offset from the mechanical structure perspective. Furthermore, after completing coaxial calibration and rigid clamping, the equipment can be directly powered on to complete initial error modeling and parameter calibration, eliminating the need for multiple subsequent manual re-inspections and secondary adjustments. This significantly shortens the equipment assembly, debugging, and modification cycle, providing a stable and reliable mechanical structure foundation for subsequent high-precision dual-axis data benchmarking, accurate modeling of short-cycle errors, and real-time dynamic compensation.

[0043] In addition, other coaxiality calibration methods can be considered in other embodiments, such as a dynamic coaxiality calibration algorithm based on synchronous acquisition of angles from dual encoders. This algorithm adaptively corrects residual coaxiality deviations between the two axes through software algorithms, further compensating for minor coaxiality errors after mechanical clamping, and achieving dual precision assurance through mechanical centering and software calibration. This algorithm does not rely on external precision testing instruments; it can complete fully automatic calibration by relying on data acquired from the device's built-in dual-axis encoders. Specifically, it may include the following steps: (1) Global uniform speed sampling control: control the grating galvanometer motor 101 and DD motor 104 to rotate synchronously and uniformly throughout the entire range. The rotation angle covers the entire cycle from 0° to 360°. Set a fixed sampling frequency and synchronously collect the first angle position data of the galvanometer motor encoder and the second angle position data of the DD motor encoder within the entire cycle to construct a dual-axis angle synchronization dataset.

[0044] (2) Coaxial deviation data calculation: Using the angle data of the high-resolution DD motor 104 as the true value benchmark, the deviation between the measured value of the galvanometer motor angle and the theoretical synchronous value at the same moment is calculated point by point. The periodic deviation components caused by coaxial eccentricity and shaft misalignment are extracted throughout the entire cycle, and the accidental error data caused by equipment vibration and random noise are filtered out. (3) Coaxial error model fitting: The periodic coaxial deviation data are fitted based on the least squares method to construct a mathematical model of biaxial coaxiality error including coaxial eccentricity radius and eccentricity phase angle, and the residual coaxial deviation parameters after biaxial assembly are calculated. (4) Software adaptive compensation calibration: The calculated coaxiality error parameters are input into the system control algorithm to generate coaxiality deviation compensation coefficients. During the operation of the equipment, the coaxiality compensation amount is dynamically superimposed according to the real-time rotation angle of the motor to offset the coaxiality error remaining by mechanical clamping. (5) Closed-loop verification of calibration effect: After the software compensation is completed, the dual-axis synchronous full-cycle operation is driven again, and the dual-axis angle data is collected for deviation verification until the dual-axis coaxial deviation converges to the set threshold range, and the fully automatic coaxiality calibration is completed.

[0045] This software calibration scheme can serve as an auxiliary optimization method for mechanical centering and clamping. It can correct minor residual coaxial deviations within the tolerance range of H7 / h6, further improving the accuracy of dual-axis coaxial linkage. It is suitable for ultra-high precision laser processing scenarios and operates fully automatically without manual intervention, resulting in higher calibration efficiency and consistency.

[0046] In one embodiment, the acquisition of the first angular position data of the encoder in the grating galvanometer motor 101 and the acquisition of the second angular position data of the encoder in the DD motor 104 includes: The DD motor 104 is controlled to rotate at a constant low speed for one revolution according to a preset rotation speed, and the first angle position data and the second angle position data are collected synchronously according to a preset collection frequency.

[0047] In this embodiment, by controlling the DD motor 104 to rotate at a constant low speed for one revolution, the entire angular position range of the grating galvanometer motor 101 can be completely covered. The first angular position data and corresponding second angular position reference data of all positions within the entire working stroke of the motor are acquired in one go. This allows the subsequently constructed short-cycle error model to fully cover the entire working angle range of the galvanometer motor, completely avoiding the problems of missing identification and incomplete modeling of local angular position errors. Simultaneously, the constant low-speed (e.g., 0.5-2 rpm) steady-state rotation acquisition method effectively avoids interference from high-speed rotation centrifugal force, shaft runout caused by frequent acceleration and deceleration impacts, and mechanical disturbances. This significantly reduces the impact of dynamic operating conditions on the sampled data, making the acquired dual-axis position data more closely match the actual error state under steady-state operation of the equipment, and significantly improving the accuracy and reliability of subsequent error modeling. Furthermore, the preset acquisition frequency in this embodiment can be flexibly and adaptively adjusted according to the actual characteristic frequency of the short-period error of the grating galvanometer motor 101. For example, the acquisition frequency is not lower than 1kHz, so as to accurately match the error fluctuation pattern, fully capture the subtle error feature information, and avoid the problem of omission of error details and feature distortion caused by insufficient sampling frequency. This provides comprehensive, real and reliable raw data support for the construction of a high-precision short-period error model.

[0048] In one embodiment, constructing a short-period error model for the grating galvanometer motor 101 by combining the first angular position data and the second angular position data includes: Calculate the deviation between the first angular position data and the second angular position data; The short-period error model is constructed using the deviation value.

[0049] In this embodiment, the second angular position data acquired by the encoder of the high-scale DD motor 104 is used as the true value benchmark. The actual deviation of the low-scale grating galvanometer motor 101 at each angular position is calculated. The deviation value is directly mapped and fitted to the corresponding angular position to obtain a short-cycle error lookup table model covering the entire stroke. This modeling method is logically simple, computationally inexpensive, and requires no complex parameter identification process. It can quickly complete the construction of the error model. At the same time, the model can completely restore the distribution characteristics of the short-cycle periodic error of the galvanometer motor based on the acquired full-stroke deviation data, ensuring the accuracy of subsequent error compensation. During long-term operation of the equipment, data can be periodically re-acquired to update the error model, offsetting the influence of long-term drift factors such as mechanical wear and temperature drift on the error distribution, and continuously maintaining a high-precision compensation effect.

[0050] In other embodiments, based on the first and second angle position data, a high-precision modeling method combining time-domain filtering and Fourier series fitting can be used to deeply process the original data. By filtering out random noise and separating short-period fundamental frequency errors from higher harmonic errors, a more accurate and robust short-period error analytical model can be constructed. This effectively solves the problems of the basic lookup table model being susceptible to sampling noise, accidental mechanical disturbances, and insufficient error fitting smoothness. The specific processing and modeling steps are as follows: (1) Preprocessing and noise reduction of raw data: The first and second angle position data collected synchronously contain a small amount of vibration noise and random sampling error. The moving average filtering algorithm is used to smooth the two sets of raw data, remove abnormal and sudden data points, and retain the real periodic error components caused by grating lines, shaft runout and assembly eccentricity, thereby improving the effectiveness and stability of the raw dataset. (2) High-precision deviation sequence solution: Taking the pre-processed second angle position data as the true value benchmark, combined with the dual-axis synchronous angle correspondence, the true angle deviation of the first angle position data of the galvanometer motor is calculated point by point, and a continuous deviation sequence that changes periodically with the rotation angle position is constructed to complete the orderly arrangement of discrete error data; (3) Short-period error feature decomposition: Based on the periodic error law of the galvanometer motor's full-cycle rotation, the deviation sequence is subjected to fast Fourier transform to separate the fundamental component and harmonic components of the short-period error, and the error features from different sources such as the inherent periodic error of the low-line grating, the periodic error of the shaft system runout, and the assembly eccentricity error are accurately extracted to achieve refined identification of the error source. (4) Fourier series model fitting: Select the effective fundamental frequency and high harmonic components, remove the irregular random noise components, and obtain the Fourier analytical error model that adapts to the full range angle of the galvanometer motor by least squares fitting. Construct a continuous and differentiable short-period error function to replace the traditional discrete lookup table model and realize the accurate deduction of error at any rotation position. (5) Model residual verification and solidification: The residuals of the calculated error of the fitted analytical model are compared and verified with the actual collected deviation data. If the residuals converge to the preset accuracy threshold, the model parameters are solidified. If the residuals exceed the standard, the harmonic order and fitting coefficients are re-optimized, the model accuracy is iteratively optimized, and finally a short-period error model with high fitting degree and high robustness is obtained.

[0051] Compared to basic lookup table modeling, the above modeling method can effectively filter out false error information caused by operating condition disturbances, accurately decompose multi-source periodic error components, and has stronger model continuity, smoothness and generalization ability. It can further improve the error compensation accuracy in small angle ranges and is suitable for ultra-high precision application scenarios such as ultra-fine laser micromachining and micron-level trajectory scanning.

[0052] In one embodiment, the step of generating a compensation signal for the grating galvanometer device 100 in real time using the short-period error model and sending the compensation signal to the grating galvanometer motor 101 to perform error correction on the grating galvanometer motor 101 includes: The first angular position data corresponding to the grating galvanometer motor 101 and the second angular position data corresponding to the DD motor 104 are collected in real time. The error compensation amount is calculated by combining the short-period error model and the second angular position data; A compensation signal is generated based on the error compensation amount and sent to the grating galvanometer motor 101.

[0053] In this embodiment, during normal equipment operation, the system consistently uses the second angular position data output by the DD motor 104 ultra-high resolution encoder as the true reference for the current actual angular position. Combined with a pre-built short-cycle error model, the system uses real-time lookup to obtain the theoretical positioning deviation value corresponding to the current angular position of the galvanometer motor, and uses this theoretical deviation value as the real-time error compensation amount. Based on this compensation amount, the system quickly generates a precise angle compensation signal and sends it to the grating galvanometer motor 101 controller in real time, dynamically correcting the real-time positioning angle of the galvanometer motor and completing the closed-loop error correction for single-step position. The compensation logic provided in this embodiment is simple, computationally efficient, and has extremely low response latency. Relying on the equipment's microsecond-level high-speed synchronous communication architecture, it can achieve microsecond-level real-time compensation output. This process does not occupy the equipment's processing cycle time and does not affect the continuity of laser scanning and processing. It can continuously and stably suppress the short-cycle positioning error of the galvanometer motor while fully preserving the original processing efficiency of the equipment, ensuring high precision and consistency of the laser scanning trajectory.

[0054] In other embodiments, an adaptive dynamic weighted iterative compensation strategy can be adopted. This differs from the traditional static compensation method that relies on fixed lookup tables. By introducing multi-dimensional operating condition parameters such as operating temperature, rotational speed, continuous machining time, and shaft load fluctuations, and constructing a multi-variable coupled dynamic error compensation model, intelligent adaptive and precise compensation for short-cycle errors can be achieved, further improving the accuracy and robustness of error compensation under complex and varying operating conditions. This avoids the limitation of traditional single error models being unable to adapt to dynamic changes in operating conditions. The specific implementation method is as follows: First, while the system synchronously collects dual-axis angle data during equipment operation, it also collects operating condition parameters such as equipment temperature, galvanometer movement speed, scanning acceleration, and continuous processing time in real time, and establishes a correlation mapping relationship between angle error and multiple operating condition parameters. Secondly, based on the pre-trained error weight algorithm, the pre-constructed short-cycle error model is dynamically weighted and corrected. For the error amplitude shift caused by thermal expansion and contraction of the grating ruler, dynamic runout of the shaft system, and changes in friction damping under different working conditions, the error compensation weight of each angle position is adaptively adjusted to correct the compensation lag and accuracy deviation of the fixed model. Furthermore, the system compares the angle output data after correction by the galvanometer motor with the high-precision reference data of the DD motor 104 in real time, calculates the compensation residual frame by frame, and inputs the residual data into the error model in reverse iteration to complete the online fine-tuning and dynamic updating of the model parameters, realizing closed-loop adaptive optimization of sampling-compensation-residual verification-model iteration. Finally, by combining the speed look-ahead characteristics of the laser processing trajectory, the compensation signal is output in advance to eliminate the dynamic compensation error caused by servo response lag and achieve high-precision synchronous compensation in high-speed dynamic scanning scenarios.

[0055] The above compensation method can effectively adapt to complex working scenarios such as high-speed laser scanning, long-term continuous processing, and alternating high and low temperature conditions. It can continuously offset the short-cycle error drift caused by time-varying working conditions, and solve the defects of traditional compensation methods such as accuracy decay and poor adaptability under changing working conditions. It can further suppress the galvanometer positioning error under dynamic working conditions to within ±0.003°, which greatly improves the trajectory consistency and processing yield under harsh scenarios such as high-precision laser micro-machining and ultrafast laser scanning.

[0056] In addition, this embodiment also has a continuous online model iteration optimization mechanism. During the long-term continuous operation of the equipment, the system can continuously and uninterruptedly collect the first angular position data of the grating galvanometer motor 101 and the second angular reference data of the DD motor 104, monitor the positioning residual changes of the galvanometer motor in the entire angular range in real time, and dynamically update the short-cycle error model parameters in combination with the real-time operating conditions of the equipment. This effectively offsets the error drift caused by time-varying interference factors such as ambient temperature drift, mechanical vibration and impact, shaft friction and wear, thermal expansion and contraction of the grating ruler and dynamic load fluctuations during the operation of the equipment. It solves the problem of the compensation accuracy decay and adaptability deterioration of the traditional static fixed error model after long-term operation, and ensures the long-term stability and consistency of the error compensation effect of the galvanometer motor.

[0057] Furthermore, in some embodiments, a time-series forgetting weighted iteration and working condition clustering adaptive optimization strategy can be adopted to achieve high-precision model iteration and upgrade. Unlike the conventional equal data update method, this method can effectively distinguish between effective error transition information and random disturbance noise, improving the accuracy and robustness of model iteration. Specifically, the optimization logic can be as follows: the system introduces a time-series forgetting factor to perform weight decay processing on historical sampling data, weakening the model influence of old working condition data, and focusing on adopting the latest cycle of dual-axis sampling data and residual features to accurately capture the systematic error shift caused by slow equipment aging and cumulative temperature changes, achieving smooth and accurate iteration of model parameters, and avoiding model lag problems caused by data redundancy and interference from old data; simultaneously, the system has a built-in multi-dimensional working condition clustering identification logic, which can automatically distinguish different working condition scenarios such as normal temperature steady state, high and low temperature limits, high-speed scanning, and long-term continuous processing, establishing independent sub-error model libraries for different working conditions, automatically matching the corresponding optimal model parameters and completing seamless switching when equipment working conditions change, realizing adaptive closed-loop optimization of working condition identification-model matching-parameter iteration. Furthermore, this iterative mechanism can support online seamless updates. The model iteration and calibration process does not require machine downtime or manual calibration, and does not affect the normal laser processing production cycle of the equipment. It can continuously maintain an ultra-high precision compensation state throughout the entire life cycle of the equipment, thereby significantly reducing the cost of equipment maintenance and precision calibration, and significantly improving the long-term stability and product yield consistency of high-end precision laser processing.

[0058] The following examples, in conjunction with specific engineering applications, further illustrate the practical application effects and technical advantages of the device, control system, and method provided in this invention.

[0059] Example 1: Application of high-precision laser marking on ring-shaped metal parts This embodiment applies a high-precision grating galvanometer device 100 to the full-area laser marking of ring-shaped precision metal parts. The device is equipped with a 1024-line low-resolution grating galvanometer motor 101 and a 157,447-line ultra-high-resolution DD motor 104. The two sets of axes are rigidly coaxially assembled through a triangular chuck-type quick clamp 103. After clamping, the coaxiality error of the two axes is controlled within 0.01mm, ensuring the synchronization accuracy and structural stability of the dual-axis linkage from a mechanical structure perspective.

[0060] Before formal processing, the system controls the DD motor 104 to drive the output shaft of the galvanometer motor to rotate at a constant low speed of 1 rpm for one revolution. At the same time, a high-frequency sampling frequency of 2 kHz is set to synchronously collect the full-cycle dual-axis angular position data, complete the full-domain modeling and parameter solidification of the short-cycle error model of the galvanometer motor, and accurately calibrate the periodic positioning deviation caused by grating line error, shaft runout, and assembly eccentricity.

[0061] In the actual marking process, the host computer issues a circular trajectory marking command, and the galvanometer motor drives the laser beam in real time to complete a high-precision scanning action. The DD motor 104 synchronously drives the circular workpiece to rotate coaxially with the galvanometer axis, realizing coordinated processing of galvanometer scanning and workpiece rotation. The processing error compensation algorithm module uses the feedback data from the high-precision encoder of the DD motor 104 as the truth benchmark, and combines it with a pre-built short-period error model to calculate the angle compensation amount in real time, dynamically correcting the real-time positioning error of the galvanometer motor, and effectively suppressing the periodic trajectory distortion problem caused by the low-line grating.

[0062] Actual processing test results show that after dynamic error compensation in this embodiment, the circumferential dimension deviation of the ring marking pattern is optimized from ±0.05mm to ±0.008mm, the marking depth uniformity of the workpiece can reach 99%, and the batch processing yield consistently reaches 99.8%, fully meeting the micron-level marking process requirements for high-end precision ring-shaped metal parts. Compared with traditional uncompensated galvanometer processing equipment, this embodiment can reduce the workpiece rework rate by more than 80%, greatly improving the stability and mass production economy of the precision marking process.

[0063] Example 2: 360° Laser Welding Application for Curved Surface Parts of Medical Devices This embodiment applies the control system to a 360° omnidirectional laser welding scenario for curved structural components of medical devices, a precision joining process requiring high consistency and reliability. The processing system relies on a galvanometer motor to achieve high-speed and precise scanning of the laser welding trajectory. Simultaneously, a DD motor 104 carries and drives the curved workpiece to rotate at a uniform speed, realizing the coordinated operation of galvanometer beam scanning and workpiece rotation. Furthermore, the high-precision angle feedback from the DD motor 104 throughout the process enables real-time correction of galvanometer positioning errors.

[0064] Before batch welding, the equipment first completes full-range dual-axis data acquisition and short-cycle error modeling, accurately fitting the periodic error distribution pattern of the galvanometer motor across the entire angular range, and establishing an error compensation model adapted to the dynamic welding conditions. During the welding process, the system dynamically generates compensation signals in real time using the error model, continuously correcting the angular positioning deviation of the galvanometer motor. Simultaneously, relying on a microsecond-level dual-axis synchronous control mechanism, it ensures the high-time synchronization of the galvanometer movement and workpiece rotation, eliminating process defects such as weld seam offset and uneven width caused by asynchronous linkage.

[0065] Mass production test results show that, after adopting the control system of this embodiment, the laser weld width deviation of curved medical device parts can be stably controlled within ±0.01mm. The weld seam is formed continuously and smoothly without local width distortion, and the weld bonding strength fully meets the precision welding standards of the medical device industry. Furthermore, compared to traditional processing equipment where the galvanometer and rotating platform are controlled separately, the integrated coaxial linkage and dynamic compensation scheme of this embodiment can improve the overall welding processing efficiency by more than 60%. The weld seam consistency, appearance uniformity, and structural reliability of batch products are significantly improved, fully meeting the needs of high-precision medical device mass production with high yield rates.

[0066] In summary, compared with existing technologies, this embodiment achieves technological breakthroughs in multiple dimensions, including positioning accuracy, cost control, working condition adaptability, mass production performance, and assembly structure, based on a dual-axis rigid coaxial structure, high-precision reference feedback, and adaptive dynamic compensation mechanism. Specific beneficial effects are as follows: (1) Significantly improve angle positioning accuracy and eliminate laser trajectory distortion: This embodiment uses the angle data of the ultra-high resolution DD motor 104 encoder as the true value benchmark to dynamically compensate for the inherent short-cycle error of the low-scale grating galvanometer motor 101 in real time. The angle positioning error of the galvanometer motor can be optimized from ±0.05° in the traditional solution to ±0.005°, and the angle detection and control resolution is improved by two orders of magnitude. It effectively solves the problems of insufficient resolution of the low-scale grating ruler, shaft runout, scanning trajectory distortion caused by assembly eccentricity, pattern offset and uneven depth, fundamentally improving the laser processing trajectory accuracy and contour accuracy, and meeting the micron-level precision processing needs of semiconductor, medical device and other fields; (2) Significantly reduced hardware modification costs and outstanding cost-effectiveness: This embodiment does not require replacing the expensive and space-constrained high-resolution grating ruler. It only requires building a reference compensation system based on the existing 1024-line low-resolution grating galvanometer motor 101 and a 157447-line ultra-high resolution DD motor 104 to achieve high-precision processing indicators. Compared with the traditional modification scheme of directly upgrading the high-resolution grating ruler, this embodiment can reduce the hardware upgrade cost of the equipment by more than 30%. It can complete the precision upgrade without changing the original galvanometer main structure, and is suitable for the high-precision iterative upgrade scenario of low-to-mid-range laser equipment. It has stronger applicability and economy. (3) Adaptive to complex working conditions and excellent long-term compensation stability: This embodiment adopts an iteratively updatable adaptive error modeling and dynamic compensation strategy, which is different from the traditional static offline calibration fixed compensation method. During the operation of the equipment, dual-axis angle data can be collected in real time. Combined with time-varying working conditions such as temperature fluctuations, mechanical vibration, shaft wear, and load changes, the error model parameters are dynamically iteratively optimized to effectively offset the compensation failure problem caused by working condition drift. The error compensation effect is guaranteed to be drift-free and attenuated throughout the entire process, which greatly improves the operational accuracy and stability of the equipment throughout its entire life cycle. (4) Optimize batch processing consistency and effectively improve production yield: This embodiment integrates microsecond-level dual-axis synchronous control and real-time closed-loop error compensation mechanism, which completely solves the problems of asynchronous motion and compensation lag caused by the independent control of traditional galvanometer and rotary platform, and ensures the continuity and consistency of laser scanning trajectory throughout the process. After actual mass production verification, the equipment processing yield increased from 95% before compensation to 99.8%, which greatly reduced the probability of product rework and scrap, significantly reduced the cost of batch production, and is fully adaptable to the large-scale, high-yield production scenario of precision parts; (5) High structural integration and significantly improved assembly and debugging efficiency: This embodiment uses a triangular chuck-type quick clamp 103 to achieve a rigid coaxial integrated structure design of the galvanometer motor and the DD motor 104. Relying on the high-precision matching characteristics of the elastic centering jaws, high-precision coaxial positioning and rigid locking can be quickly completed during the assembly stage without the need for manual repeated adjustment and tooling calibration using additional precision instruments. Compared with the traditional split assembly structure, the efficiency of equipment installation, debugging and modification in this embodiment is improved by more than 50%. The structure is compact, the assembly is convenient, and the batch consistency is good, effectively shortening the equipment production and on-site debugging cycle.

[0067] This invention also provides a computer-readable storage medium storing a computer program thereon, which, when executed, can perform the steps provided in the above embodiments. The storage medium may include various media capable of storing program code, such as a USB flash drive, a portable hard drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.

[0068] This invention also provides a computer device, which may include a memory and a processor. The memory stores a computer program, and when the processor calls the computer program in the memory, it can implement the steps provided in the above embodiments. Of course, the computer device may also include various network interfaces, power supplies, and other components.

[0069] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple; relevant parts can be referred to in the method section. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

[0070] It should also be noted that, in this specification, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. A grating galvanometer device, characterized in that, include: The grating galvanometer motor is equipped with a motor output shaft; A galvanometer clamp is installed at the end of the motor output shaft and is used to clamp and fix the laser reflector. A triangular chuck-type quick clamp, one end of which is coaxially and fixedly connected to the output shaft of the motor; The DD motor is equipped with a motor output shaft, which is rigidly connected to the other end of the triangular chuck quick clamp so that the motor output shaft rotates coaxially with the motor output shaft; the triangular chuck quick clamp adopts an elastic centering jaw structure, and the fit tolerance between the elastic centering jaw structure and the motor output shaft is less than or equal to H7 / h6; Motor bracket, used to support the grating galvanometer motor and DD motor.

2. The grating galvanometer device according to claim 1, characterized in that, The number of lines on the grating scale of the grating galvanometer motor is less than 2500.

3. The grating galvanometer device according to claim 1, characterized in that, The DD motor has a built-in encoder with a scale count of more than 50,000 lines.

4. A control system for a grating galvanometer device, characterized in that, include: The grating galvanometer device as described in any one of claims 1-3; A control module, electrically connected to the grating galvanometer device, includes: The instruction sending unit is used to send control instructions to the grating galvanometer device so that the grating galvanometer device performs corresponding actions according to the control instructions. The data acquisition unit is used to acquire the first angular position data of the encoder in the grating galvanometer motor and the second angular position data of the encoder in the DD motor; The model building unit is used to combine the first angular position data and the second angular position data to build a short-period error model of the grating galvanometer motor; An error compensation unit is used to generate a compensation signal through the short-period error model and send the compensation signal to the grating galvanometer motor to correct the error of the grating galvanometer motor.

5. A control method for a grating galvanometer device, applied to the control system of the grating galvanometer device as described in claim 4, characterized in that, The control method includes: A control command is sent to the grating galvanometer device so that the grating galvanometer device performs the corresponding action according to the control command; The first angular position data of the encoder in the grating galvanometer motor and the second angular position data of the encoder in the DD motor are collected. A short-period error model for the grating galvanometer motor is constructed by combining the first and second angular position data. The short-period error model is used to generate a compensation signal for the grating galvanometer device in real time, and the compensation signal is sent to the grating galvanometer motor to correct the error of the grating galvanometer motor.

6. The control method for the grating galvanometer device according to claim 5, characterized in that, Also includes: The coaxiality of the output shaft of the grating galvanometer motor and the output shaft of the DD motor are calibrated using the triangular chuck-type quick clamp.

7. The control method for the grating galvanometer device according to claim 5, characterized in that, The acquisition of the first angular position data of the encoder in the grating galvanometer motor and the acquisition of the second angular position data of the encoder in the DD motor include: The DD motor is controlled to rotate at a constant low speed for one revolution according to a preset rotation speed, and the first angular position data and the second angular position data are collected synchronously according to a preset collection frequency.

8. The control method for the grating galvanometer device according to claim 5, characterized in that, The step of constructing a short-period error model for the grating galvanometer motor by combining the first and second angular position data includes: Calculate the deviation between the first angular position data and the second angular position data; The short-period error model is constructed using the deviation value.

9. The control method for the grating galvanometer device according to claim 5, characterized in that, The step of generating a compensation signal for the grating galvanometer device in real time using the short-period error model and sending the compensation signal to the grating galvanometer motor to correct the error of the grating galvanometer motor includes: Real-time acquisition of the first angular position data corresponding to the grating galvanometer motor and the second angular position data corresponding to the DD motor; The error compensation amount is calculated by combining the short-period error model and the second angular position data; A compensation signal is generated based on the error compensation amount and sent to the grating galvanometer motor.

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