Substrate handling assembly and substrate handling system
By designing complementary support clearance parts and conveying mechanism limiting structures in the substrate container, the problems of substrate unit offset and swaying during the conveying process are solved, achieving stable substrate conveying and improving the automation efficiency of semiconductor processes.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- GUDENG PRECISION IND CO LTD
- Filing Date
- 2026-04-22
- Publication Date
- 2026-08-04
AI Technical Summary
The support components in existing substrate containers can easily obstruct the movement of robotic arms, causing problems such as substrate unit displacement, shaking, or even stack collapse during handling.
Design a substrate handling assembly, including a support member and a handling mechanism. The support member has a clearance portion, and the handling mechanism has a limiting structure. The clearance portion and the limiting structure are structurally complementary to avoid mechanical interference, and the limiting structure stabilizes the position of the substrate unit in the second axis.
It effectively prevents the substrate units from shifting or shaking during handling, reduces the risk of stack collapse, and improves the safety of automated storage and retrieval and the overall handling efficiency.
Smart Images
Figure CN122514221A_ABST
Abstract
Description
Technical Field
[0001] This patent application claims international priority to U.S. Provisional Application No. 63 / 798,652, filed on May 2, 2025, entitled “SUBSTRATE HANDLING ASSEMBLY”, the entire contents of which are incorporated herein by reference and form part of the specification.
[0002] This invention relates to a substrate handling assembly and a substrate handling system, and more particularly to a substrate handling assembly and a substrate handling system applied in the field of semiconductor manufacturing. Background Technology
[0003] In the semiconductor industry, various substrates are widely used in manufacturing processes related to semiconductor components. To protect substrates from impacts and environmental contamination, substrate containers are currently known for their ability to hold them. In one known substrate container, the substrate is placed on a carrier tray and stacked together within the container. The substrate container offers various support technologies to support the carrier tray and the substrate. This carrier tray design helps improve the overall efficiency of substrate handling.
[0004] With the recent advancements in the semiconductor industry, automated workpiece handling has become a trend and a key factor for manufacturers to reduce labor costs, improve process efficiency, and increase yield. To accommodate movement and handling between different workstations, pallets need to be compatible with the technical standards of industry automated transport systems, such as Overhead Hoist Transport (OHT) specifications, or compatible with substrate container load port equipment to facilitate handling by robotic arms.
[0005] In existing technologies, substrates and carrier pads are stacked in front-opening wafer transfer cassettes (FOUPs). However, in such solutions, the stacking of multiple substrates and carrier pads within the substrate container significantly increases the overall stack height and weight, thereby increasing the difficulty for robotic arms in handling this stack. Furthermore, the presence of supports within the substrate container restricts the position where the robotic arm can grasp the stacked substrates and carrier pads, and also hinders the movement of the robotic arm, easily causing the stack to shift or wobble during handling, and in worse cases, even leading to the stack collapsing.
[0006] Therefore, the industry urgently needs a technical solution that can transport substrates in substrate containers in a more stable and efficient manner. Summary of the Invention
[0007] The present invention provides a substrate handling assembly and a substrate handling system, thereby solving the problem that the support components in the existing substrate container can easily obstruct the movement of the robotic arm and its access space, causing the substrate units to shift, shake, or even cause the entire stack to collapse when the robotic arm is handling multiple stacked substrate units.
[0008] One aspect of the present invention provides a substrate handling assembly suitable for a substrate container. The substrate container includes a container body for accommodating substrate units. The substrate handling assembly includes: a support member disposed within the container body for supporting the substrate units, the support member having a clearance portion; and a handling mechanism including: a pick-and-place portion movably entering and exiting the container body and for picking up and placing the substrate units in a first axial direction; and a limiting structure disposed on the pick-and-place portion for limiting the substrate units in a second axial direction. The clearance portion and the limiting structure are structurally complementary, thereby avoiding mechanical interference between them.
[0009] In one specific embodiment, the pick-and-place portion is movable along the first axis to define a pick-up state and a placement state. When the pick-and-place portion is in the pick-up state, the substrate unit is supported by the pick-and-place portion and detached from the support member, and is limited by the limiting structure. When the pick-and-place portion is in the placement state, the substrate unit is supported by the support member, and the pick-and-place portion and the limiting structure are detached from the substrate unit.
[0010] In one specific embodiment, the clearance portion is an edge recess of the support member in the second axial direction.
[0011] In one specific embodiment, the limiting structure includes a limiting plate, which is an edge of the pick-and-place portion protruding along the second axis.
[0012] In one specific embodiment, the limiting structure further includes a limiting block extending from the limiting plate along the first axial direction for contacting and positioning the substrate unit.
[0013] In one specific embodiment, the limiting structure further includes a suction cup disposed on the limiting plate for contacting and positioning the substrate unit.
[0014] In one specific embodiment, the edge recess is an arc-shaped recess or a polygonal recess, and the edge protrusion is an arc-shaped protrusion or a polygonal protrusion.
[0015] In one specific embodiment, the conveying mechanism further includes a positioning element disposed on the pick-and-place portion for positioning the substrate unit in the third axis.
[0016] In one specific embodiment, the first axis is a vertical direction, and the second axis and the third axis are horizontal directions orthogonal to the first axis.
[0017] Another aspect of the present invention provides a substrate handling system, comprising: a substrate container, the substrate container including: a container body having an internal accommodating space for accommodating substrate units; and a support member disposed on the inner wall surface of the container body facing the accommodating space for supporting the substrate units, the support member having a clearance portion; and a handling mechanism including: a pick-and-place portion movably entering and exiting the container body and for pick-and-place the substrate units in a first axial direction; and a limiting structure disposed on the pick-and-place portion for limiting the substrate units in a second axial direction. The clearance portion and the limiting structure are structurally complementary, thereby avoiding mechanical interference between them.
[0018] The substrate handling assembly and substrate handling system of the present invention have the following advantages: The complementary design of the avoidance portion of the support member and the limiting structure of the conveying mechanism effectively prevents mechanical interference with the support member when the conveying mechanism enters the container body for pick-and-place operations. Simultaneously, the limiting structure limits the substrate unit along the second axis, stably maintaining its position during pick-and-place and conveying, effectively preventing lateral displacement or swaying. This structural configuration not only significantly reduces the risk of substrate unit stack collapse but also improves the safety and overall handling efficiency of automated access in semiconductor processes. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of a substrate handling assembly according to an embodiment of the present invention.
[0020] Figure 2 yes Figure 1 A schematic diagram of the transport mechanism moving into the container body.
[0021] Figure 3 This is a schematic diagram of the transport mechanism and the substrate unit.
[0022] Figure 4 This is a schematic diagram of the avoidance part and the limiting structure according to an embodiment of the present invention. Figure 2 A magnified schematic diagram of region P in the middle.
[0023] Figure 5 This is a schematic diagram of the avoidance part and the limiting structure according to another embodiment of the present invention.
[0024] Figure 6 This is a schematic diagram of a limiting structure according to another embodiment of the present invention.
[0025] Figure 7 This is a schematic diagram of a conveying mechanism according to another embodiment of the present invention.
[0026] Figure 8 This is a schematic diagram when the pick-and-place section is located inside the container body.
[0027] Figure 9 This is a schematic diagram of the pick-and-place section contacting the substrate unit after it moves.
[0028] Figure 10 This is a schematic diagram of the pick-up / placement unit in the pick-up state.
[0029] Figure 11 This is a schematic diagram of a substrate handling system according to an embodiment of the present invention.
[0030] Figure 12 This is a schematic diagram of a substrate handling system according to another embodiment of the present invention.
[0031] Figure 13 This is a schematic diagram of a substrate handling system according to another embodiment of the present invention.
[0032] Explanation of icon numbers Detailed Implementation
[0033] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be understood that the embodiments described herein are merely exemplary embodiments of the present invention and are not intended to limit the scope of protection of the present invention; in fact, the present invention can be implemented in many different forms, and the scope of the present invention should not be construed as limited to the embodiments given herein. These embodiments are provided to make the disclosure of the present invention more thorough and complete, and to enable those skilled in the art to fully understand and practice the present invention accordingly. Furthermore, in the following detailed description, the same reference numerals denote the same or similar components. The terms "comprising," "including," and "having" as used herein are open-ended, meaning they do not exclude the presence or addition of one or more other features, steps, elements, components, and / or combinations thereof.
[0034] In the substrate handling assembly and system of this invention, the handling mechanism and the support member inside the substrate container cooperate with each other. The clearance portion of the support member and the limiting structure of the handling mechanism are structurally complementary, thereby avoiding mechanical interference between them. This configuration enables the handling mechanism to stably pick up, place, and handle substrate units inside the substrate container, preventing the substrate units from shifting or shaking during handling, thereby significantly reducing the risk of stack collapse.
[0035] In this embodiment of the invention, the workpiece is a substrate unit comprising a stack of carrier disks and / or substrates. The invention does not limit the number of carrier disks and / or substrates in the substrate unit. For example, a stack of two or more substrates and / or carrier disks can constitute the substrate unit described herein. The substrate is used to support the carrier disk and can be a thin substrate of different sizes and shapes. Applicable examples include, but are not limited to, photolithographic masks, wafers, glass substrates, or other plate-shaped components related to semiconductor processes. During transport, the substrate is placed on the carrier disk and is transported, conveyed, moved, or picked up / dropped along with the carrier disk. In this case, the substrate unit comprises a stack of multiple substrates and carrier disks. However, in some cases, the carrier disk can be transported, conveyed, moved, or picked up / dropped independently without supporting a substrate. In this case, the substrate unit is a stack of multiple carrier disks.
[0036] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
[0037] Please refer to Figures 1 to 3 , Figure 1 This is a schematic diagram of a substrate handling assembly according to an embodiment of the present invention. Figure 2 yes Figure 1 A schematic diagram of the transport mechanism moving into the container body. Figure 3 This is a schematic diagram of the transport mechanism and the substrate unit. The substrate transport assembly 100 of this embodiment is applicable to a substrate container 110, which includes a container body 111 for accommodating a substrate unit 500. The substrate transport assembly 100 includes a support member 115 and a transport mechanism 150. The support member 115 is disposed within the container body 111 for supporting the substrate unit 500, and has a clearance portion 116. The transport mechanism 150 includes a pick-and-place portion 155 and a limiting structure 156. The pick-and-place portion 155 movably enters and exits the container body 111 for picking up and placing the substrate unit 500 along a first axis A1. The limiting structure 156 is disposed on the pick-and-place portion 155 for limiting the substrate unit 500 along a second axis A2. The clearance portion 116 and the limiting structure 156 are structurally complementary, thereby avoiding mechanical interference between them.
[0038] In this embodiment, the pick-and-place unit 155 moves in and out of the container body 111 along a horizontal third axis A3, and picks and places the substrate unit 500 along a vertical first axis A1. Figures 1 to 3As shown, in this embodiment, the first axis A1 is defined as the vertical direction, and the second axis A2 and the third axis A3 are defined as horizontal directions orthogonal to the first axis A1. Through the complementary design of the clearance portion 116 and the limiting structure 156, when the pick-and-place portion 155 moves upward along the first axis A1 within the container body 111, it will not be obstructed by the support member 115. Therefore, the substrate unit 500 can be smoothly lifted from the support member 115 or placed onto the support member 115. The operational state of the pick-and-place portion 155 will be described in detail later.
[0039] Please refer to Figure 4 This is a schematic diagram of the avoidance part and the limiting structure according to an embodiment of the present invention. Figure 2 An enlarged schematic diagram of the central region P. The clearance portion 116 is an edge recess 119 of the support member 115 on the second axis A2. The limiting structure 156 includes a limiting plate 157, which is an edge protrusion 159 of the pick-and-place portion 155 on the second axis A2. By the edge recess 119 and the edge protrusion 159 corresponding structurally (including contour shape and size), mechanical interference between the pick-and-place portion 155 and the support member 115 is avoided, allowing the pick-and-place portion 155 to move smoothly vertically along the first axis A1, solving the problem of traditional support members hindering the movement of the robotic arm. In this embodiment, the edge recess 119 is a polygonal recess (e.g., ...). Figure 4 The image shown is a rectangle, and the edge protrusion 159 is a polygonal protrusion (as shown in the image). Figure 4 (The image shown is a rectangle). However, the shape of the edge recess 119 and the edge protrusion 159 is not limited to this. Please refer to... Figure 5 This is a schematic diagram of the avoidance part and the limiting structure according to another embodiment of the present invention. In this embodiment, the edge recess 119(1) is an arc-shaped recess, and the edge protrusion 159(1) is an arc-shaped protrusion. By the edge recess 119(1) and the edge protrusion 159(1) corresponding structurally (including contour shape and size), mechanical interference can also be avoided. Those skilled in the art should understand that the structurally complementary technical solutions described herein are not intended to be... Figure 4 and Figure 5 The design is limited; any shape configuration that can avoid mechanical interference between the two can be applied in this invention.
[0040] Next, the technical details of the limiting structure 156 and the limiting substrate unit 500 will be explained. Please refer to [link / reference]. Figures 2 to 4 In addition to the aforementioned limiting plate 157, the limiting structure 156 selectively includes a limiting block 158, which extends from the limiting plate 157 along the first axial direction A1 for contacting and positioning the substrate unit 500. Figure 3As shown, in this embodiment, the limiting block 158 extends upward along the first axis A1 to the substrate unit 500, thereby limiting the substrate unit 500 from both sides of the substrate unit 500 along the second axis A2 to prevent it from shifting or shaking during transportation, thereby avoiding the collapse of the stack of substrate units 500.
[0041] Please refer to Figure 6 This is a schematic diagram of a limiting structure according to another embodiment of the present invention. In this embodiment, a limiting structure 256 is disposed on the pick-and-place portion 255 for limiting the substrate unit 500 along the second axis A2. The limiting structure 256 includes a limiting plate 257, which is an edge protrusion 259 of the pick-and-place portion 255 along the second axis A2. The limiting structure 256 in this embodiment further includes a suction cup 258 disposed on the limiting plate 257 for contacting and positioning the substrate unit 500. In practical application, the suction cup 258 contacts the substrate unit 500 from bottom to top along the first axis A1 (vertical direction) and uses vacuum force to adsorb and stably fix the substrate unit 500, preventing it from shifting laterally or shaking during transportation.
[0042] Please refer to Figure 7 This is a schematic diagram of a conveying mechanism according to another embodiment of the present invention. The conveying mechanism 350 in this embodiment corresponds to the one described above. Figure 3 The difference between the conveying mechanism 150 in this embodiment and the conveying mechanism 350 in this embodiment is that the conveying mechanism 350 further includes a positioning element 360, which is disposed on the pick-and-place part 355, for positioning the substrate unit 500 on the third axis A3 (a horizontal direction orthogonal to the first axis A1 and perpendicular to the second axis A2). When the pick-and-place part 355 moves in and out of the container body 111 (marked on the third axis A3) on the third axis A3. Figure 1 When the substrate unit 500 is positioned on the pick-and-place section 355, the positioning element 360 can ensure the stability of the substrate unit 500 during movement and transport by the cooperation of the limiting structure 356 and the positioning element 360.
[0043] Regarding the operation state of the pick-and-place unit 155 in the aforementioned embodiment, please also refer to... Figures 1 to 3 as well as Figures 8 to 10 . Figure 8 This is a schematic diagram showing the container being placed inside the main body of the container. Figure 9 This is a schematic diagram showing the contact between the pick-and-place section and the substrate unit after the pick-and-place section has moved. Figure 10 This is a schematic diagram of the pick-up / placement section in the picking state. The pick-up / placement section 155 of the conveying mechanism 150 can move along the first axis A1, thereby defining a picking state and a placement state. When it is necessary to transport the substrate unit 500, firstly, the pick-up / placement section 155 moves along the third axis A3 into the container body 111 and reaches a predetermined position, such as... Figure 2 and Figure 8As shown. At this time, the pick-and-place section 155 has not yet come into contact with the substrate unit 500, and the substrate unit 500 is still supported by the support member 115.
[0044] Next, the pick-and-place section 155 moves upward along the first axis A1 until it contacts the substrate unit 500, at which point the limiting structure 156 is located on both sides of the substrate unit 500.
[0045] Subsequently, as the pick-and-place unit 155 continues to move upward along the first axis A1 and lifts the substrate unit 500, the pick-and-place unit 155 is in a picking-up state. Because the clearance part 116 and the limiting structure 156 are structurally complementary, there is no mechanical interference between them, allowing the pick-and-place unit 155 to smoothly lift the substrate unit 500 upward. At this time, the substrate unit 500 is supported by the pick-and-place unit 155 and detaches from the support member 115. The substrate unit 500 is spatially limited (especially along the second axis A2) by the limiting structure 156.
[0046] Finally, the pick-and-place unit 155 moves along the third axis A3 toward the outside of the container body 111, thus completing the transport operation of removing the substrate unit 500 from the substrate container 110.
[0047] Conversely, when it is necessary to transport the substrate unit 500 into the substrate container 110, firstly, the pick-and-place section 155, carrying (or supporting, gripping) the substrate unit 500, moves along the third axis A3 into the container body 111 and reaches a predetermined position. Next, the pick-and-place section 155 moves downward along the first axis A1, causing the substrate unit 500 to contact the support member 115. As the pick-and-place section 155 continues to move downward along the first axis A1, the substrate unit 500 is supported by the support member 115, and simultaneously, the pick-and-place section 155 disengages from the limiting structure 156. At this point, the pick-and-place section 155 is in a placed state. Finally, the pick-and-place section 155 exits the container body 111, completing the transport operation of placing the substrate unit 500 into the substrate container 110.
[0048] With the above structural configuration and operation mode, when the pick-and-place section 155 is in the picking state, the substrate unit 500 is supported by the pick-and-place section 155 and detaches from the support member 115, and is limited by the limiting structure 156; when the pick-and-place section 155 is in the placement state, the substrate unit 500 is supported by the support member 115, and the pick-and-place section 155 and the limiting structure 156 detach from the substrate unit 500. When processing the stacking of multiple substrate units 500 simultaneously, the substrate handling assembly of the present invention can significantly reduce the risk of stacking misalignment, shaking or collapse, and can improve the overall efficiency of semiconductor processes.
[0049] Please refer to Figure 11This is a schematic diagram of a substrate handling system according to an embodiment of the present invention. The substrate handling system 400 of this embodiment includes a substrate container 410 and a handling mechanism 450. The substrate container 410 includes a container body 411 and a support member 415. The container body 411 has an accommodating space 412 for accommodating a substrate unit 500. The support member 415 is disposed on an inner wall surface 413 of the container body 411 facing the accommodating space 412, and is used to support the substrate unit 500. The support member 415 has a clearance portion 416. The handling mechanism 450 includes a pick-and-place portion 455 and a limiting structure 456. The pick-and-place portion 455 is movably inserted into and removed from the container body 411 and is used to pick up and place the substrate unit 500 along a first axial direction A1. The limiting structure 456 is disposed on the pick-and-place portion 455 and is used to limit the substrate unit 500 along a second axial direction A2. The avoidance part 416 and the limiting structure 456 are structurally complementary, thereby avoiding mechanical interference between the two.
[0050] The complementary design of the avoidance part 416 and the limiting structure 456 in this embodiment, as well as the operating state of the pick-and-place part 455, are the same as those in the substrate handling assembly 100 described above according to the embodiment of the present invention, and will not be repeated here. By using the limiting structure 456 to limit the substrate unit 500 along the second axis A2, and by avoiding mechanical interference between the avoidance part 416 and the limiting structure 456, the substrate handling system 400 of the present invention can significantly reduce the risk of stacking misalignment, shaking, or collapse, and improve the overall efficiency of the semiconductor process.
[0051] Although in this embodiment, the substrate container 410 in the substrate handling system 400 is used to accommodate two stacked substrate units 500 ( Figure 11 The invention includes two stacked substrate units 500 arranged side by side on the left and right. For example, it includes two pick-and-place parts 455 that respectively handle two sets of stacked substrate units 500. However, the number of stacked substrate units 500 is not limited to this.
[0052] Please refer to Figure 12 This is a schematic diagram of a substrate handling system according to another embodiment of the present invention. In the substrate handling system 600, the substrate container 610 is, for example, a container for holding a single stack of substrate units 500, and the substrate handling system 600 includes, for example, a single pick-and-place unit 655 for handling the substrate units 500.
[0053] Additionally, please refer to Figure 13 This is a schematic diagram of a substrate handling system according to another embodiment of the present invention. In the substrate handling system 700, the substrate container 710, for example, accommodates three stacked substrate units 500, and the substrate handling system 700 accordingly includes three pick-and-place sections 755 to respectively handle the three stacked substrate units 500.
[0054] In summary, in the substrate handling assembly and system of this invention, the substrate handling assembly includes a support member and a handling mechanism. The support member is disposed within the container body to support substrate units and has a clearance portion. The handling mechanism includes a pick-and-place section and a limiting structure. The pick-and-place section can movably enter and exit the container body and is used to pick up and place substrate units along a first axial direction. The limiting structure is disposed on the pick-and-place section and is used to limit the substrate units along a second axial direction. Through the cooperation of the clearance portion of the support member and the limiting structure of the handling mechanism, the substrate units within the substrate container can be stably picked up, placed, and handled, effectively reducing the risk of stack collapse and improving the overall automation efficiency of the semiconductor process.
[0055] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Those skilled in the art can make various changes, modifications, and equivalent substitutions to the present invention without departing from its spirit and scope. Therefore, the scope of protection of the present invention should be determined by the scope defined in the appended claims.
Claims
1. A substrate handling assembly, suitable for a substrate container, the substrate container comprising a container body for accommodating substrate units, characterized in that, include: A support member is disposed within the container body for supporting the substrate unit, and the support member has a clearance portion; as well as Handling equipment, including: The pick-and-place section is movable into and out of the container body and is used to pick up and place the substrate unit in the first axial direction; and A limiting structure is provided on the pick-and-place portion to limit the substrate unit in the second axial direction; The avoidance part and the limiting structure are structurally complementary, thereby avoiding mechanical interference between them.
2. The substrate handling assembly as described in claim 1, characterized in that: The pick-up and place-down unit is movable along the first axis, thereby defining a pick-up state and a place-down state, wherein: When the pick-up / placement part is in the picking-up state, the substrate unit is supported by the pick-up / placement part and detached from the support member, and is limited by the limiting structure; and When the pick-and-place part is in the placement state, the substrate unit is supported by the support member, and the pick-and-place part is detached from the limiting structure from the substrate unit.
3. The substrate handling assembly as described in claim 1, characterized in that: The clearance portion is the edge recess of the support member in the second axial direction.
4. The substrate handling assembly as described in claim 3, characterized in that: The limiting structure includes a limiting plate, which is the edge of the pick-and-place part protruding in the second axis.
5. The substrate handling assembly as described in claim 4, characterized in that: The limiting structure further includes a limiting block extending from the limiting plate along the first axial direction for contacting and positioning the substrate unit.
6. The substrate handling assembly as described in claim 4, characterized in that: The limiting structure also includes a suction cup component disposed on the limiting plate for contacting and positioning the substrate unit.
7. The substrate handling assembly as described in claim 4, characterized in that: The edge recess is an arc-shaped recess or a polygonal recess, and the edge protrusion is an arc-shaped protrusion or a polygonal protrusion.
8. The substrate handling assembly as described in claim 1, characterized in that: The conveying mechanism further includes a positioning element disposed on the pick-and-place section for positioning the substrate unit in the third axis.
9. The substrate handling assembly as described in claim 8, characterized in that: The first axis is a vertical direction, and the second axis and the third axis are horizontal directions orthogonal to the first axis.
10. A substrate handling system, characterized in that, include: The substrate container includes: The container body has an internal accommodating space for accommodating the substrate unit; and A support member, disposed on the inner wall surface of the container body facing the accommodating space, is used to support the substrate unit; the support member has a clearance portion; and Handling equipment, including: The pick-and-place section is movably inserted into and removed from the container body, and is used for picking up and placing the substrate unit along a first axial direction; and A limiting structure is provided on the pick-and-place portion to limit the substrate unit in the second axial direction; The avoidance part and the limiting structure are structurally complementary, thereby avoiding mechanical interference between them.