Low-speed laser non-destructive dicing machine

Abstract

The application provides a low-speed laser nondestructive scribing machine, which comprises a laser module and a scribing module, wherein the scribing module comprises a base, a scribing table and a screw rod assembly; the screw rod assembly comprises a first motor, a first screw rod and a first sliding block; the first motor is fixedly connected with the first screw rod, the first screw rod is in transmission connection with the first sliding block, the scribing table is fixedly connected with the first sliding block and located above the base; the laser module is provided with grooving laser and thermal cracking laser, and the laser module is located above the scribing module, so that the scribing table can complete scribing of a battery piece on the scribing table by passing below the laser module. The low-speed laser nondestructive scribing machine adopts stress cutting principle, does not exist laser thermal ablation and mechanical scribing process, can make the stress fracture section of the battery piece clean and neat without damage points, greatly improves the mechanical strength of the battery piece, guarantees the yield and reliability of assembly processing and improves product quality.

Description

Technical Field

[0001] This invention belongs to the field of solar cell technology, specifically relating to a low-speed laser non-destructive scribing machine. Background Technology

[0002] With the rapid development of solar power generation technology and the continuous decline in power generation costs, improving module efficiency is one of the effective means to achieve photovoltaic grid parity. Most manufacturers have introduced high-density welding technologies such as shingled welding and small-pitch welding to improve module efficiency. While the introduction of new technologies can reduce the cost of photovoltaic systems, it also increases the breakage rate and reduces product yield. Therefore, downstream manufacturers are placing more stringent requirements on laser scribing technology. Conventional laser scribing has two drawbacks: the laser thermal ablation process leaves a lot of thermal damage on the cutting surface, reducing the mechanical strength of the cells; and mechanical breaking is prone to breakage when used on large-size silicon wafers. Low-speed laser non-destructive scribing machines are the general trend. In addition, in existing equipment, how to achieve more precise placement of cells before laser scribing directly affects the scribing yield. After scribing, the cells are often too close together, which is not conducive to subsequent operations such as transfer, visual inspection, and drying, and also increases the risk of collision, causing equipment downtime and reducing production efficiency.

[0003] Based on this, a low-speed laser non-destructive scribing machine is provided. This low-speed laser non-destructive scribing machine has a simple layout and compact structure. It adopts the stress cutting principle and does not involve laser thermal ablation or mechanical cracking. It can make the stress cross-section of the solar cell clean and neat without damage points, which greatly improves the mechanical strength of the solar cell, ensures the yield and reliability of the module processing, improves product quality, reduces costs, and generates very little dust during the processing, thus promoting environmental protection and sustainable development. Summary of the Invention

[0004] The purpose of this invention is to provide a low-speed laser non-destructive scribing machine to solve the shortcomings of the existing laser thermal ablation process, which has low scribing yield and low mechanical strength.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: A low-speed laser non-destructive scribing machine includes a laser module and a scribing module. The scribing module includes a base, a scribing stage, and a lead screw assembly. The lead screw assembly includes a first motor, a first lead screw, and a first slider. The first motor is fixedly connected to the first lead screw, and the first lead screw and the first slider are tractionally connected. The scribing stage is fixedly connected to the first slider and is located above the base. The laser module is equipped with a grooving laser and a thermal cracking laser. The laser module is located above the scribing module, allowing the scribing stage to pass under the laser module to scrib the battery cells on the scribing stage.

[0006] Furthermore, the dicing stage has adsorption holes on its surface and a vacuum adsorption chamber at its bottom, which is connected to a vacuum generator. By adsorbing and fixing the battery cells, slippage of the battery cells is effectively prevented, resulting in more precise dicing.

[0007] The present invention also includes a translational loading module, which includes a first support, a first wafer-picking lifting cylinder assembly and a first translational assembly. The first wafer-picking lifting cylinder assembly and the first support are slidably connected, and the first wafer-picking lifting cylinder assembly and the first translational assembly are drively connected, so that the first translational assembly drives the first wafer-picking lifting cylinder assembly to move back and forth to transfer the battery cells from the loading box module to the dicing table of the dicing module.

[0008] Furthermore, the first film-retrieving lifting cylinder assembly includes a first cylinder and a first adsorption component, wherein the first cylinder and the first adsorption component are fixedly connected.

[0009] Furthermore, the first translation component includes a translational double-acting linear motor and an electric slide.

[0010] This invention also includes a visual positioning module, which is located on one side of the first support of the translational loading module and between the base of the loading box module and the dicing module. The translational loading module first transfers the battery cells to the visual positioning module for inspection to check for defects (chipped corners, microcracks, breakage, etc.). Defective battery cells signal that they will not proceed to subsequent processes and are moved to the loading waste box, while defect-free cells are guided to the dicing module. By optimizing the positional layout between different modules, dicing efficiency is improved.

[0011] Furthermore, the visual positioning module includes a visual camera and a lens.

[0012] This invention also includes a lead screw guiding module, located below the vision positioning module. The lead screw guiding module includes a second motor, a second lead screw, a fixing plate, a guiding platform, and a guiding assembly. The second motor is fixedly connected to the second lead screw, and the second lead screw is kinetically connected to the fixing plate. The fixing plate is equipped with a guiding assembly, which limits and guides the battery cells on the guiding platform. By setting up the lead screw guiding module, the battery cells are limited and guided before dicing, resulting in more accurate positioning and improved dicing yield.

[0013] Furthermore, it also includes a base plate, on which the second motor is fixed, and the fixed plate is slidably connected to the base plate via a slide rail. This arrangement allows the fixed plate to move more smoothly, and combined with the lead screw drive, it achieves higher alignment accuracy.

[0014] Furthermore, the alignment component includes a stepper motor and a limiting rod. The stepper motor is fixed on a fixed plate, and the output shaft of the stepper motor is fixedly connected to the limiting rod, so that the stepper motor drives the limiting rod to rotate and align the battery cell.

[0015] Furthermore, there are two guiding components located on one side of the guiding platform.

[0016] The present invention also includes a translational transfer module, which includes a second support, a second wafer picking and lifting cylinder assembly, and a second translational assembly; the second wafer picking and lifting cylinder assembly and the second support are slidably connected, and the second wafer picking and lifting cylinder assembly and the second translational assembly are drively connected, so that the second translational assembly drives the second wafer picking and lifting cylinder assembly to move back and forth to transfer the battery cells from the dicing table of the dicing module to the drying and conveying module.

[0017] Furthermore, the second support of the translational transfer module and the first support of the translational loading module are arranged in parallel and are respectively located at both ends of the dicing module base in a Z-shape arrangement.

[0018] Furthermore, the second film-retrieving lifting cylinder assembly includes a second cylinder and a second adsorption component, wherein the second cylinder is fixedly connected to the second adsorption component via a fixing component.

[0019] Furthermore, the second translation component includes a third motor, a first synchronous belt, and a second slider; the third motor is drivenly connected to the first synchronous belt, and the first synchronous belt is fixedly connected to the second slider; the second cylinder is fixedly connected to the second slider, and the second slider is slidably connected to the second bracket.

[0020] The present invention can be improved as follows: the translational transfer module further includes a segmentation assembly, which includes a segmentation cylinder. The piston rod of the segmentation cylinder is fixedly connected to the second adsorption element, so that the battery cells adsorbed by the second adsorption element are separated by a certain distance. This facilitates subsequent transfer and visual inspection operations, and also increases the possibility of contact between the two battery cells, thereby improving the yield rate.

[0021] In this invention, the drying and conveying module includes a Teflon conveyor belt and multiple heating rods; the Teflon conveyor belt is equipped with a fan for vacuum adsorption. This configuration ensures the accuracy of the battery cell conveying position.

[0022] The present invention can be improved by further including a material unloading visual inspection module, which is located above the drying and conveying module. The material unloading visual inspection module includes a vision camera and a lens. The material unloading visual inspection module detects whether the battery cells have defects (chipped corners, microcracks, breakage, etc.). Intact battery cells (half-cells) are taken away by the unloading box module and placed in the unloading box, while defective battery cells are transferred to the end waste box.

[0023] The present invention also includes a material unloading and conveying module, which includes a third support, a third cell picking and lifting cylinder assembly, and a third translation assembly; the third cell picking and lifting cylinder assembly and the third support are slidably connected, and the third cell picking and lifting cylinder assembly and the third translation assembly are drively connected, so that the third translation assembly drives the third cell picking and lifting cylinder assembly to move back and forth to transfer the battery cells from the drying and conveying module to the unloading box.

[0024] Furthermore, the unloading and handling module and the translation and transfer module are located at both ends of the Teflon conveyor belt of the drying and conveying module, and the third support of the unloading and handling module and the second support of the translation and transfer module are arranged in parallel and opposite to each other.

[0025] Furthermore, the third film-picking lifting cylinder assembly includes a third cylinder and a third adsorption component, wherein the third cylinder and the third adsorption component are fixedly connected.

[0026] Furthermore, the third translation component includes a fourth motor, a second synchronous belt, and a third slider; the fourth motor is drivenly connected to the second synchronous belt, and the second synchronous belt is fixedly connected to the third slider; the third cylinder is fixedly connected to the third slider, and the third slider is slidably connected to the third bracket.

[0027] In some embodiments of the present invention, the first support of the translational feeding module, the second support of the translational transfer module, and the third support of the unloading and conveying module are arranged in parallel, with the first support located between the second and third supports; the base of the dicing module is located between the first and second supports; and the Teflon conveyor belt of the drying and conveying module is located between the second and third supports, with the Teflon conveyor belt arranged parallel to the base of the dicing module. By optimizing the spatial relationship of each structure, the structure is compact, occupies a small area, improves the smoothness of dicing transfer, and increases production efficiency.

[0028] The present invention has the following beneficial effects: (1) The low-speed laser non-destructive scribing machine of the present invention adopts the stress cutting principle, which does not involve laser thermal ablation and mechanical cracking process. It can make the stress cross-section of the battery cell clean and neat, without damage points, which greatly improves the mechanical strength of the battery cell, ensures the yield and reliability of the component processing, and improves the product quality.

[0029] (2) The low-speed laser non-destructive dicing machine of the present invention has a reasonable spatial structure layout, compact structure, small footprint, and improved transfer efficiency; at the same time, it accurately places the battery cells through multiple positioning structures, improves the dicing yield, and improves the convenience of operation during the transfer process by dicing operation, reduces the risk of collision, reduces downtime, and improves production efficiency.

[0030] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure of the low-speed laser non-destructive scribing machine of the present invention; Figure 2 This is a schematic diagram of the laser module structure of the present invention; Figure 3 This is a schematic diagram of the dicing module structure of the present invention; Figure 4 This is a schematic diagram of the feeding box module structure of the present invention; Figure 5 This is a schematic diagram of the translational feeding module structure of the present invention; Figure 6 This is a schematic diagram of the visual positioning module and the lead screw guiding module of the present invention; Figure 7 This is a schematic diagram of the translational material transfer module structure of the present invention; Figure 8 This is a schematic diagram of the drying and conveying module and the unloading visual inspection module of the present invention; Figure 9 This is a schematic diagram of the material handling module structure of the present invention; Figure 10 This is a schematic diagram of the material feeding box module structure of the present invention.

[0032] The attached diagram is labeled as follows: 1. Feeding box module; 2. Translation feeding module; 3. Vision positioning module; 4. Lead screw guiding module; 5. Laser module; 6. Slicing module; 7. Translation transfer module; 8. Drying conveying module; 9. Unloading vision inspection module; 10. Unloading handling module; 11. Unloading box module; 201. First bracket; 202. First slice lifting cylinder assembly; 203. First translation assembly; 2021. First cylinder; 2022. First adsorption component; 401. Base plate; 402. Second motor; 403. Second lead screw; 404. Fixing plate; 405. Guiding platform; 406. Guiding assembly; 4061. Stepper motor; 4062. Limiting rod; 601. Base; 602. Slicing platform; 603. Lead screw assembly; 60 31. First motor; 6032. First lead screw; 6033. First slider; 701. Second bracket; 702. Second sheet-picking lifting cylinder assembly; 703. Second translation assembly; 704. Sheet-splitting assembly; 7021. Second cylinder; 7022. Second adsorption component; 7023. Fixing component; 7031. Third motor; 7032. First synchronous belt; 7033. Second slider; 7041. Sheet-splitting cylinder; 801. Teflon conveyor belt; 802. Waste box; 1001. Third bracket; 1002. Third sheet-picking lifting cylinder assembly; 1003. Third translation assembly; 10021. Third cylinder; 10022. Third adsorption component; 10031. Fourth motor; 10032. Second synchronous belt; 10033. Third slider. Detailed Implementation

[0033] The technical solution of the present invention will be further described below with reference to specific embodiments, so that those skilled in the art can better understand and implement the technical solution of the present invention.

[0034] like Figure 1-10 The low-speed laser non-destructive dicing machine shown includes a feeding box module 1, a translational feeding module 2, a vision positioning module 3, a laser module 5, a dicing module 6, a translational transfer module 7, a drying and conveying module 8, a material unloading vision inspection module 9, a material unloading and handling module 10, and a material unloading box module 11.

[0035] The dicing module 6 includes a base 601, a dicing stage 602, and a lead screw assembly 603. The lead screw assembly 603 includes a first motor 6031, a first lead screw 6032, and a first slider 6033. The first motor 6031 is fixedly connected to the first lead screw 6032, and the first lead screw 6032 is drivenly connected to the first slider 6033. The dicing stage 602 is fixedly connected to the first slider 6033 and is located above the base 601. The laser module 5 is equipped with a grooving laser and a thermal cracking laser. The laser module 5 is located above the dicing module 6, allowing the dicing stage 602 to pass under the laser module 5 to dic the battery cells on the dicing stage 602. The surface of the dicing stage 602 has adsorption holes, and the bottom has a vacuum adsorption chamber connected to a vacuum generator. By adsorbing and fixing the battery cells, slippage of the battery cells is effectively prevented, and the dicing is more precise.

[0036] The loading box module 1 includes four loading boxes: two working boxes and two empty boxes. The solar cells on the loading box module 1 are transferred to the dicing module 6 via the translation loading module 2, where they are diced by the laser module 5. The loading box module 1 and the dicing module 6 are located at opposite ends of the translation loading module 2.

[0037] The translational loading module 2 includes a first support 201, a first wafer-picking lifting cylinder assembly 202, and a first translational assembly 203. The first wafer-picking lifting cylinder assembly 202 and the first support 201 are slidably connected, and the first wafer-picking lifting cylinder assembly 202 and the first translational assembly 203 are drively connected, so that the first translational assembly 203 drives the first wafer-picking lifting cylinder assembly 202 to move back and forth to transfer the battery cells from the loading box module 1 to the dicing table 602 of the dicing module 6. In this embodiment, the first wafer-picking lifting cylinder assembly 202 includes a first cylinder 2021 and a first suction member 2022, and the first cylinder 2021 and the first suction member 2022 are fixedly connected. The first translational assembly 203 includes a translational double-actuator linear motor and an electric slide.

[0038] The vision positioning module 3 is located on one side of the first support 201 of the translational loading module 2, and between the base 601 of the loading box module 1 and the dicing module 6. The vision positioning module 3 includes a fixing frame, a vision camera, and a lens. The vision camera and lens are fixed on the fixing frame. The solar cells are first transferred to the vision positioning module 3 by the translational loading module 2 for inspection to check for defects (chipped corners, microcracks, breakage, etc.). Defective solar cells give a signal and are not allowed to proceed to the next process. The defective solar cells are transported to the loading waste box. Defect-free solar cells are guided by the lead screw guiding module 4 and then transferred to the dicing module 6 by the translational loading module 2.

[0039] The lead screw guiding module 4 is located below the fixing frame of the vision positioning module 3. The lead screw guiding module 4 includes a base plate 401, a second motor 402, a second lead screw 403, a fixing plate 404, a guiding platform 405, and a guiding assembly 406. The second motor 402 is fixed to the base plate 401 and is fixedly connected to the second lead screw 403. The second lead screw 403 is drivenly connected to the fixing plate 404, and the fixing plate 404 is slidably connected to the base plate 401 via a slide rail. This arrangement allows the fixing plate 404 to move more smoothly, and combined with the lead screw drive, achieves higher guiding accuracy. The guiding assembly 406 is provided on the fixing plate 404, allowing the guiding assembly 406 to limit and guide the battery cells on the guiding platform 405. The alignment component 406 includes a stepper motor 4061 and a limiting rod 4062. The stepper motor 4061 is fixed on the fixing plate 404, and the output shaft of the stepper motor 4061 is fixedly connected to the limiting rod 4062, so that the stepper motor 4061 drives the limiting rod 4062 to rotate and align the battery cell. In this embodiment, there are two alignment tables 405, each equipped with two alignment components 406, located on one side of the alignment table 405. The alignment module 4 aligns the battery cell position, and then transfers it to the dicing module 6 for dicing, improving the dicing accuracy.

[0040] After laser scribing is completed in the scribing module 6, the solar cells are transferred from the scribing module 6 to the drying and conveying module 8 via the translation and transfer module 7. The translation and transfer module 7 includes a second support 701, a second cell-picking lifting cylinder assembly 702, and a second translation assembly 703. The second cell-picking lifting cylinder assembly 702 is slidably connected to the second support 701, and the second cell-picking lifting cylinder assembly 702 is drive-connected to the second translation assembly 703, so that the second translation assembly 703 drives the second cell-picking lifting cylinder assembly 702 to move back and forth to transfer the solar cells from the scribing table 602 of the scribing module 6 to the drying and conveying module 8. The second support 701 of the translation and transfer module 7 and the first support 201 of the translation and loading module 2 are arranged parallel to each other and are located at both ends of the base 601 of the scribing module 6 in a Z-shape. In this embodiment, the second film-picking lifting cylinder assembly 702 includes a second cylinder 7021 and two second suction members 7022. The second cylinder 7021 is fixedly connected to the two second suction members 7022 via a fixing member 7023. The second translation assembly 703 includes a third motor 7031, a first synchronous belt 7032, and a second slider 7033. The third motor 7031 is drivenly connected to the first synchronous belt 7032, and the first synchronous belt 7032 is fixedly connected to the second slider 7033. The second cylinder 7021 is fixedly connected to the second slider 7033, and the second slider 7033 is slidably connected to the second bracket 701. The translational transfer module 7 includes a slitting assembly 704, which includes a slitting cylinder 7041. The slitting cylinder 7041 is fixed to the fixing member 7023, and its piston rod is fixedly connected to a second adsorption member 7022. With this configuration, after the translational transfer module 7 picks up the slitting cells from the slitting table 602, the slitting cylinder 7041 separates the cells adsorbed by the two adsorption members 7022 into slitting pieces (separating them by a certain distance). This improves the avoidance of contact during subsequent cell transfer, increases the yield, and facilitates subsequent drying, unloading, and visual inspection operations. A waste collection box is located at the lower center of the second support 701 for placing NG cells. After the cells are slitting, the second cell picking and lifting cylinder assembly 702 places the NG cells into the waste collection box, while the good cells are transferred to the drying and conveying module 8.

[0041] The solar cells on the translation and transfer module 7 are transferred to the unloading and handling module 10 via the drying and conveying module 8. The unloading and handling module 10 includes a third support 1001, a third cell-picking lifting cylinder assembly 1002, and a third translation assembly 1003. The third cell-picking lifting cylinder assembly 1002 and the third support 1001 are slidably connected, and the third cell-picking lifting cylinder assembly 1002 and the third translation assembly 1003 are drively connected, so that the third translation assembly 1003 drives the third cell-picking lifting cylinder assembly 1002 to move back and forth to transfer the solar cells from the drying and conveying module 8 to the unloading box module 11. The third support 1001 of the unloading and handling module 10 and the second support 701 of the translation and transfer module 7 are arranged parallel to each other, and the drying and conveying module 8 is located between the unloading and handling module 10 and the translation and transfer module 7.

[0042] In this embodiment, the third sheet-picking lifting cylinder assembly 1002 includes a third cylinder 10021 and a third adsorption member 10022, with the third cylinder 10021 and the third adsorption member 10022 fixedly connected. The third translation assembly 1003 includes a fourth motor 10031, a second synchronous belt 10032, and a third slider 1033; the fourth motor 10031 is drivenly connected to the second synchronous belt 10032, and the second synchronous belt 10032 is fixedly connected to the third slider 1033; the third cylinder 10021 is fixedly connected to the third slider 1033, and the third slider 1033 is slidably connected to the third support 1001. The drying conveying module 8 includes a Teflon conveyor belt 801 and multiple heating rods; the Teflon conveyor belt 801 is vertically arranged with the second support 701 and the third support 1001, and the Teflon conveyor belt 801 is equipped with a fan for vacuum adsorption.

[0043] The unloading vision inspection module 9 is located above the drying conveyor module 8. The unloading vision inspection module 9 includes a vision camera and lens. The unloading vision inspection module 9 detects defects in the solar cells (chipped corners, microcracks, breaks, etc.). Intact solar cells (half-cells) are removed by the unloading transport module 10 and placed into the unloading box module 11. Defective solar cells are transferred to the waste box 802 at the end of the Teflon conveyor belt 801. The unloading box module 11 consists of four unloading sets: two sets are placed on the machine, and two sets are spares.

[0044] The above embodiments of the present invention are not intended to limit the scope of protection of the present invention. The implementation of the present invention is not limited thereto. All other modifications, substitutions or alterations made by those skilled in the art based on the above content of the present invention and in accordance with ordinary technical knowledge and common practices in the art, without departing from the basic technical concept of the present invention, shall fall within the scope of protection of the present invention.

Claims

1. A low-speed laser non-destructive scribing machine, characterized in that, The system includes a laser module (5) and a dicing module (6). The dicing module (6) includes a base (601), a dicing stage (602), and a lead screw assembly (603). The lead screw assembly (603) includes a first motor (6031), a first lead screw (6032), and a first slider (6033). The first motor (6031) is fixedly connected to the first lead screw (6032), and the first lead screw (6032) and the first slider (6033) are connected by transmission. The dicing stage (602) is fixedly connected to the first slider (6033) and is located above the base (601). The laser module (5) is equipped with a grooving laser and a thermal cracking laser. The laser module (5) is located above the dicing module (6), so that the dicing stage (602) passes under the laser module (5) to complete the dicing of the battery cells on the dicing stage (602).

2. The low-speed laser non-destructive scribing machine according to claim 1, characterized in that, The dicing stage (602) has adsorption holes on its surface and a vacuum adsorption chamber at its bottom, which is connected to a vacuum generator.

3. The low-speed laser non-destructive scribing machine according to claim 1, characterized in that, It also includes a translation loading module (2), which includes a first support (201), a first cell picking lifting cylinder assembly (202) and a first translation assembly (203). The first cell picking lifting cylinder assembly (202) and the first support (201) are slidably connected, and the first cell picking lifting cylinder assembly (202) and the first translation assembly (203) are drivenly connected, so that the first translation assembly (203) drives the first cell picking lifting cylinder assembly (202) to move back and forth to transfer the battery cells from the loading box module (1) to the dicing table (602) of the dicing module (6).

4. The low-speed laser non-destructive scribing machine according to claim 3, characterized in that, It also includes a visual positioning module (3), which is located on one side of the first support (201) of the translational feeding module (2) and between the base (601) of the feeding box module (1) and the dicing module (6); the visual positioning module (3) includes a visual camera and a lens.

5. The low-speed laser non-destructive scribing machine according to claim 4, characterized in that, It also includes a lead screw guiding module (4), which is located below the visual positioning module (3); the lead screw guiding module (4) includes a second motor (402), a second lead screw (403), a fixing plate (404), a guiding platform (405), and a guiding component (406); the second motor (402) is fixedly connected to the second lead screw (403), and the second lead screw (403) is drivenly connected to the fixing plate (404); the fixing plate (404) is provided with a guiding component (406), so that the guiding component (406) limits and guides the battery cells on the guiding platform (405).

6. The low-speed laser non-destructive scribing machine according to claim 5, characterized in that, It also includes a base plate (401), the second motor (402) is fixed on the base plate (401), and the fixing plate (404) is slidably connected to the base plate (401) via a slide rail; the guiding component (406) includes a stepper motor (4061) and a limiting rod (4062), the stepper motor (4061) is fixed on the fixing plate (404), and the output shaft of the stepper motor (4061) is fixedly connected to the limiting rod (4062), so that the stepper motor (4061) drives the limiting rod (4062) to rotate to guide the battery cell.

7. The low-speed laser non-destructive scribing machine according to claim 6, characterized in that, It also includes a translation transfer module (7), which includes a second bracket (701), a second cell picking and lifting cylinder assembly (702), and a second translation assembly (703); the second cell picking and lifting cylinder assembly (702) and the second bracket (701) are slidably connected, and the second cell picking and lifting cylinder assembly (702) and the second translation assembly (703) are driven to move back and forth, so that the second translation assembly (703) drives the second cell picking and lifting cylinder assembly (702) to move back and forth to transfer the battery cells from the dicing table (602) of the dicing module (6) to the drying and conveying module (8); the second bracket (701) of the translation transfer module (7) is arranged in parallel with the first bracket (201) of the translation loading module (2), and is arranged in a Z-shape at both ends of the base (601) of the dicing module (6).

8. The low-speed laser non-destructive scribing machine according to claim 7, characterized in that, The second cell-retrieving lifting cylinder assembly (702) includes a second cylinder (7021) and a second adsorption member (7022). The second cylinder (7021) is fixedly connected to the second adsorption member (7022) through a fixing member (7023). It also includes a cell-separating assembly (704), which includes a cell-separating cylinder (7041). The piston rod of the cell-separating cylinder (7041) is fixedly connected to the second adsorption member (7022), so that the battery cells adsorbed by the second adsorption member (7022) are separated by a certain distance.

9. The low-speed laser non-destructive scribing machine according to claim 8, characterized in that, It also includes a material handling module (10), which includes a third support (1001), a third cell lifting cylinder assembly (1002), and a third translation assembly (1003); the third cell lifting cylinder assembly (1002) and the third support (1001) are slidably connected, and the third cell lifting cylinder assembly (1002) and the third translation assembly (1003) are drivenly connected, so that the third translation assembly (1003) drives the third cell lifting cylinder assembly (1002) to move back and forth to transfer the battery cells from the drying and conveying module (8) to the unloading box.

10. The low-speed laser non-destructive scribing machine according to claim 9, characterized in that, The first support (201) of the translation loading module (2), the second support (701) of the translation transfer module (7) and the third support (1001) of the unloading and handling module (10) are arranged in parallel, and the first support (201) is located between the second support (701) and the third support (1001); the base (601) of the dicing module (6) is located between the first support (201) and the second support (701); the Teflon conveyor belt (801) of the drying and conveying module (8) is located between the second support (701) and the third support (1001), and the Teflon conveyor belt (801) is arranged in parallel with the base (601) of the dicing module (6).

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