An automated correction control system and method for a correction wheel

Abstract

The application relates to an automatic correction control system and method of a correction wheel, and the control method comprises a correction wheel fixing device, a display module, a detection input module, a control processing module and a driving module; the correction wheel fixing device is positioned and matched with a center gear ring of a grinding machine; the detection input module inputs disc surface flatness information of a grinding disc, and positioning detection information of the correction wheel on the grinding disc is detected; a signal input end of the control processing module is connected with a signal output end of the display module and a signal output end of the detection input module, a signal output end of the control processing module is connected with a signal input end of the driving module, the control processing module generates corresponding disc correction control parameters according to the disc surface flatness information and the positioning detection information, the product frequency dispersion difference and the defective rate are reduced, the degree of manual intervention in the disc correction process is reduced, the dependence on personnel experience is reduced, and the automation degree and the standardization level of the overall disc correction operation are improved.

Description

Technical Field

[0001] This application relates to the technical field of correction wheel correction control, and in particular to an automated correction wheel correction control system and method. Background Technology

[0002] Currently, with the increasing precision requirements in quartz wafer processing, the impact of grinding and polishing processes on wafer surface quality and overall product consistency is becoming increasingly significant. During the grinding process of quartz wafers, the wafer surface is typically continuously ground using a grinding machine. The flatness of the upper and lower grinding discs directly affects the processing uniformity of the wafer surface. After prolonged processing, the grinding discs are prone to deformation and uneven wear due to localized wear, uneven force, or continuous friction, leading to a decrease in the flatness of the grinding disc surface. If wafer grinding continues even when the flatness of the grinding disc exceeds the allowable range, it can easily cause a decrease in processing consistency between individual wafers and between wafers in the entire disk, thus affecting product quality stability and overall processing yield. To ensure that the grinding discs maintain a good flatness, periodic disc repair is usually required to restore the flatness of the grinding disc surface. However, current grinding wheel repair processes largely rely on operators manually placing the correction wheels based on experience and manually setting the repair direction, time, and speed. This not only makes it difficult to maintain consistent spacing between the correction wheels, but also leads to inconsistent operating habits among different operators, resulting in unstable repair effects. Furthermore, improper parameter settings can exacerbate localized deformation of the grinding wheel. In addition, traditional repair processes are highly dependent on operator experience and skill, leading to long training periods, difficulties in manual supervision, and poor operational consistency. Summary of the Invention

[0003] To address the problem of unstable correction results caused by the reliance on manual experience in the placement of correction wheels in existing technologies, this application provides an automated correction wheel control system and method.

[0004] An automated correction control system for a correction wheel includes a correction wheel fixing device, a display module, a detection input module, a control processing module, and a drive module; The correction wheel fixing device is positioned and detachably connected to the central gear ring of the grinding machine, and is used to place multiple correction wheels at equal intervals on the lower grinding disc of the grinding machine. The detection input module is used to acquire and input the flatness information of the grinding disc surface, as well as the positioning detection information for the positioning detection of the correction wheel on the grinding disc after the correction wheel fixing device is removed; The signal input terminal of the control processing module is connected to the signal output terminal of the display module and the signal output terminal of the detection input module, respectively. The signal output terminal of the control processing module is connected to the signal input terminal of the drive module. The control processing module is used to generate corresponding grinding control parameters based on the flatness information and positioning detection information of the grinding surface. The grinding control parameters include at least the grinding direction parameter, the grinding time parameter, and the grinding speed parameter. Based on the grinding control parameters, the control module generates corresponding drive control signals and display control signals. The display control signals are used to drive the display module to push the running status information and grinding status information of the grinding machine. The drive module is used to drive the grinding machine to perform corresponding repair actions according to the drive control signal.

[0005] By adopting the above technical solution, through the coordinated cooperation between the correction wheel fixing device, the detection input module, the control processing module, and the drive module, it is possible not only to achieve equidistant positioning of multiple correction wheels on the grinding disc, but also to automatically generate grinding disc control parameters by combining disc surface flatness information and correction wheel positioning detection information, thereby automatically controlling the grinding machine to perform corresponding grinding disc actions. This effectively reduces the impact of manual experience operation on grinding disc quality and improves the stability and automation of grinding disc flatness control.

[0006] Preferably, the correction wheel fixing device includes: The positioning disk body is disc-shaped, and a central positioning hole is provided at the center of the positioning disk body. The central positioning hole is used to coaxially position the positioning disk body on the lower grinding disk of the grinding machine. The positioning disk body has multiple correction wheel positioning holes, which are evenly spaced along the circumference of the central positioning hole, and each correction wheel positioning hole is the same radial distance from the central positioning hole. The positioning hole of the correction wheel is aligned with the positioning of the correction wheel.

[0007] By adopting the above technical solution, and by setting a central positioning hole and multiple correction wheel positioning holes evenly spaced along the circumference, the positioning disc body can be quickly and coaxially positioned on the lower grinding disc of the grinding machine, and the multiple correction wheels can be uniformly limited and positioned, thereby effectively avoiding the problem of local uneven wear caused by uneven spacing of correction wheels, and improving the consistency of correction wheel placement and the uniformity of grinding disc.

[0008] Preferably, the positioning disc body is provided with multiple weight reduction holes, each weight reduction hole being located between two adjacent correction wheel positioning holes.

[0009] By adopting the above technical solution and setting multiple weight-reducing holes on the positioning plate body, the overall weight of the positioning plate body is reduced while ensuring the overall structural stability. This makes it easier for operators to pick up and put down the plate, reduces the burden of manual handling, and improves the operational convenience during the plate preparation process.

[0010] Preferably, an annular groove is provided between the central positioning hole and the correction wheel positioning hole. The annular groove is coaxially arranged with the central positioning hole to engage with the central gear ring of the grinding machine, thereby coaxially positioning the positioning disc body on the lower grinding disc of the grinding machine.

[0011] By adopting the above technical solution and setting an annular groove coaxial with the central positioning hole, the positioning disc body can form a stable positioning engagement with the central gear ring of the grinding machine, thereby further improving the coaxial positioning accuracy between the positioning disc body and the grinding machine, avoiding the positioning disc body from shifting, and improving the overall placement accuracy of the correction wheel.

[0012] An automated correction control method for a correction wheel, applied to an automated correction control system for a correction wheel, the control method comprising: Obtain the flatness information of the grinding machine's disc surface, and determine whether the preset disc repair conditions have been met based on the disc surface flatness information; If the preset dressing conditions are met, the grinding machine is controlled to enter the dressing mode, and the stroke position information of the correction wheel fixing device is detected in real time. Based on the stroke position information, it is determined whether multiple correction wheels have been placed at equal distances on the lower grinding disc of the grinding machine. If it is determined that multiple correction wheels have been placed at equal distances on the lower grinding disc of the grinding machine and the correction wheel fixing device can be detached and removed, then the positioning detection information corresponding to the correction wheels is obtained. Based on the positioning detection information and the flatness information of the disc surface, the corresponding disc repair control parameters are generated, and the corresponding drive control signal and display control signal are generated based on the disc repair control parameters. The drive control signal is used to execute the corresponding disc repair action. After completing the disc dressing action, control the grinder to return from disc dressing mode to grinding disc mode.

[0013] By adopting the above technical solution, the grinding machine is automatically controlled to enter the dressing mode after the preset dressing conditions are met, and the dressing wheel positioning detection information is automatically acquired after the dressing wheel is placed at equal distances. Combined with the disc surface flatness information, dressing control parameters are automatically generated, thereby realizing the automated control of the dressing process, avoiding the problem of human error in dressing or incorrect dressing parameter settings, and improving the standardization and stability of the dressing process.

[0014] Preferably, the step of obtaining the positioning detection information corresponding to the correction wheel includes: Position detection processing is performed on multiple correction wheels to obtain the circumferential position parameters, radial position parameters, and contact state parameters of each correction wheel; Based on the circumferential position parameters, determine the corresponding circumferential interval angle between any two adjacent correction wheels, and calculate the difference between each circumferential interval angle and the preset standard interval angle to generate the corresponding circumferential distribution deviation parameters. Based on the radial position parameters, determine the corresponding radial distance between each correction wheel and the center position of the grinding machine, and compare the differences between each radial distance to generate the corresponding radial distribution deviation parameters; Based on the contact state parameters, the effective number of correction wheels in effective contact state is statistically analyzed, and the ratio between the effective number of correction wheels and the total number of correction wheels is calculated. Then, the corresponding contact consistency parameters are generated based on the ratio. Based on the circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters, corresponding correction wheel positioning detection information is generated.

[0015] By adopting the above technical solution, the circumferential position, radial position, and contact state of multiple correction wheels are detected separately, and circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters are further generated. This can comprehensively reflect the actual distribution and contact state of multiple correction wheels, improve the accuracy of correction wheel positioning detection information, and provide a reliable data foundation for the generation of subsequent wheel-correction control parameters.

[0016] Preferably, the step of obtaining the flatness information of the grinding machine disc includes: The grinding disc of the grinding machine is divided into regions to generate multiple circumferential detection regions and multiple radial detection regions; Calculate the circumferential height difference parameter for each circumferential detection area and the radial height difference parameter for each radial detection area. Based on the circumferential height difference parameters and the radial height difference parameters, the corresponding disk wear distribution parameters are generated, and the disk wear distribution parameters are standardized to generate the corresponding disk flatness information.

[0017] By adopting the above technical solution, the grinding disc is divided into circumferential and radial detection areas, and the circumferential height difference parameters and radial height difference parameters corresponding to each area are calculated respectively. This allows for a more precise reflection of the wear state of different areas of the grinding disc, improves the regional expression ability of disc surface flatness information, and facilitates subsequent differentiated disc repair control for different areas.

[0018] Preferably, the step of generating corresponding repair control parameters based on positioning detection information and disc surface flatness information includes: Based on the positioning and detection information, the circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters corresponding to multiple correction wheels are obtained respectively. The circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters corresponding to each correction wheel are arranged according to the position order of the correction wheel and according to the position order of the disk area to generate the corresponding disk wear state matrix. Based on the disk surface flatness information, the corresponding disk surface wear distribution parameters are obtained, and the corresponding disk surface wear state matrix is ​​generated. The elements of each matrix in the correction wheel distribution state matrix are correlated and matched with the corresponding elements in the disc wear state matrix to generate the correction weight value for each disc area. Based on the repair weight value, the corresponding repair control parameters are generated.

[0019] By adopting the above technical solution, the circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters corresponding to multiple correction wheels are arranged in a matrix and then matched with the disc wear state matrix. This allows for the establishment of a correspondence between the actual distribution state of the correction wheels and the disc wear state, thereby generating the disc repair weight value for each disc area and improving the dynamic adaptability of the disc repair control parameter generation process.

[0020] Preferably, the step of performing correlation matching processing between each matrix element in the correction wheel distribution state matrix and the corresponding matrix element in the disc wear state matrix to generate the correction weight value corresponding to each disc area includes: Based on the distribution state matrix of the correction wheel, the circumferential and radial offsets of each correction wheel relative to the corresponding standard positioning position are determined, and the corresponding regional misalignment compensation matrix is ​​generated according to the circumferential and radial offsets. Based on the regional misalignment compensation matrix, position compensation processing is performed on each matrix element in the disk wear state matrix to generate a compensated disk wear matrix. Based on the wear deviation value corresponding to each matrix element in the compensated disc wear matrix, determine the disc repair requirement value corresponding to each disc area; Based on the repair demand value corresponding to each trading area and the contact consistency parameter in the correction wheel distribution state matrix, the repair weight value corresponding to each trading area is generated.

[0021] By adopting the above technical solution, a regional misalignment compensation matrix is ​​generated based on the circumferential and radial offset of the correction wheel relative to the standard positioning position. The regional misalignment compensation matrix is ​​then used to perform position compensation processing on the wear state matrix of the disc surface. This corrects the disc repair area deviation caused by the actual placement offset of the correction wheel, avoids over-repair or under-repair in local areas, and improves the accuracy of disc repair control.

[0022] Preferably, the step of generating corresponding repair control parameters based on the repair weight value includes: Based on the repair weight value corresponding to each market area, the repair priority of each market area is sorted to generate the corresponding regional repair priority sequence. Based on the regional adjustment priority sequence, determine the corresponding multiple adjustment areas in stages, and generate adjustment direction parameters, adjustment time parameters, and adjustment speed parameters for each stage based on the adjustment weight value corresponding to each adjustment area in each stage. Based on the change in repair weight between two adjacent repair areas, corresponding repair direction switching parameters and repair speed adjustment parameters are generated. Based on the repair direction parameters, repair time parameters, repair speed parameters, repair direction switching parameters, and repair speed adjustment parameters corresponding to each stage, the corresponding repair control parameters are generated.

[0023] By adopting the above technical solution, a regional repair priority sequence is generated based on the repair weight value corresponding to each plate area. Furthermore, repair direction parameters, repair time parameters, and repair speed parameters corresponding to different stages are generated. This enables dynamic adjustment of the repair strategy according to the wear requirements of different plate areas, achieving phased and regional dynamic repair control, and improving the overall repair efficiency and uniformity of the grinding plate.

[0024] In summary, this application includes at least one of the following beneficial technical effects: This application constructs a collaborative control mechanism that combines correction wheel positioning control, disk surface state detection, and dynamic generation of dressing parameters. First, by utilizing the positioning relationship between the correction wheel fixing device and the central gear ring of the grinding machine, multiple correction wheels are uniformly and equidistantly positioned on the lower grinding disk. This avoids the imbalance problem in the dressing area caused by inconsistent spacing, placement misalignment, or uneven local force during traditional manual placement, allowing multiple correction wheels to form a more stable and uniform action trajectory during the dressing process. Simultaneously, the system does not directly execute the fixed dressing process after the correction wheels are placed. Instead, after removing the correction wheel fixing device, it further detects the actual distribution state of the multiple correction wheels. By acquiring information such as the circumferential position, radial position, and contact state of the correction wheels, and combining this with the disk surface flatness, the system comprehensively analyzes and processes the current wear distribution of the grinding disk and the actual action state of the correction wheels, thereby dynamically generating corresponding dressing direction parameters, dressing time parameters, and dressing speed parameters. Because the wear levels and actual working conditions of the correction wheel are not entirely consistent across different areas of the grinding disc, this solution dynamically adjusts the direction switching, grinding duration, and grinding speed during the grinding process based on changes in the disc and correction wheel conditions, rather than using the traditional single grinding mode with fixed direction, fixed speed, and fixed time. This approach not only improves the grinding process's adaptability to different disc wear conditions but also reduces localized over-grinding, under-grinding, and secondary wear caused by correction wheel placement errors. This allows the grinding disc to maintain a more stable flatness over long-term use, further improving the consistency and stability of quartz wafer grinding, reducing product frequency dispersion and defect rates. Simultaneously, it reduces operator intervention in the grinding process, decreases reliance on personnel experience, and increases the overall automation and standardization of the grinding operation. Attached Figure Description

[0025] Figure 1 This is a flowchart of an automated correction control system for a correction wheel according to an embodiment of this application; Figure 2 This is a partial structural schematic diagram of an automated correction control system for a correction wheel according to one embodiment of this application; Figure 3 This is a partial structural schematic diagram of the correction wheel fixing device in an automated correction control system for correction wheels according to an embodiment of this application; Figure 4 This is a flowchart of an automated correction control method for a correction wheel according to an embodiment of this application.

[0026] Explanation of reference numerals in the attached figures: 1. Positioning disc body; 2. Center positioning hole; 3. Correction wheel positioning hole; 4. Weight reduction hole; 5. Annular groove. Detailed Implementation

[0027] The present application will be further described in detail below with reference to the accompanying drawings.

[0028] In one embodiment, such as Figure 1 As shown, this application discloses an automated correction control system for a correction wheel, including a correction wheel fixing device, a display module, a detection input module, a control processing module, and a drive module; The correction wheel fixing device is positioned and detachably connected to the central gear ring of the grinding machine, and is used to place multiple correction wheels at equal intervals on the lower grinding disc of the grinding machine. The detection input module is used to acquire and input the flatness information of the grinding disc surface, as well as the positioning detection information for the positioning detection of the correction wheel on the grinding disc after the correction wheel fixing device is removed; The signal input terminal of the control processing module is connected to the signal output terminal of the display module and the signal output terminal of the detection input module, respectively. The signal output terminal of the control processing module is connected to the signal input terminal of the drive module. The control processing module is used to generate corresponding grinding control parameters based on the flatness information and positioning detection information of the grinding surface. The grinding control parameters include at least the grinding direction parameter, the grinding time parameter, and the grinding speed parameter. Based on the grinding control parameters, the control module generates corresponding drive control signals and display control signals. The display control signals are used to drive the display module to push the running status information and grinding status information of the grinding machine. The drive module is used to drive the grinding machine to perform corresponding repair actions according to the drive control signal.

[0029] In this embodiment, the correction wheel fixing device is mainly used to complete the rapid equidistant positioning of multiple correction wheels on the grinding disc of the grinding machine. The display module is mainly used to display the machine's operating status, perform human-machine interaction, and provide feedback on the grinding disc status. The detection input module is mainly used to acquire the disc surface status data and correction wheel positioning status data corresponding to the grinding disc. The control processing module is mainly used to perform logical analysis, parameter calculation, and control command generation on various detection data. The drive module is used to drive the grinding machine to perform the corresponding grinding disc action according to the control command output by the control processing module, thereby forming a complete grinding disc control link.

[0030] Specifically, the correction wheel fixing device is positioned above the lower grinding disc of the grinding machine during actual use. The central positioning hole in the correction wheel fixing device forms a coaxial positioning fit with the central gear ring of the grinding machine, while the annular groove forms a limiting engagement with the outer circumference of the central gear ring, ensuring that the correction wheel fixing device does not shift circumferentially or radially during placement. Because the correction wheel fixing device is coaxially positioned with the lower grinding disc, the multiple correction wheel positioning holes can form a regular circumferential distribution around the center of the grinding machine. This ensures that each correction wheel, after being inserted into its corresponding positioning hole, forms a uniform circumferential interval and a consistent radial distribution distance, thereby ensuring that multiple correction wheels form a uniform working area during subsequent disc dressing. After the correction wheel fixing device completes the correction wheel positioning, it can be completely removed from the grinding disc. At this time, the multiple correction wheels remain in their corresponding positioning positions without significant shifting, facilitating subsequent disc dressing operations. The weight-reducing holes on the positioning disc body reduce the overall weight of the positioning disc body while maintaining overall structural strength, thereby reducing the labor intensity of operators during frequent pick-and-place operations and mitigating placement offset problems caused by excessive weight of the positioning disc body.

[0031] The display module and the control processing module are connected via a signal transmission interface. The display module can be implemented using an industrial touch screen, a human-machine interface terminal, or other visual display devices. It not only displays the current grinding mode, dressing mode, standby status, and fault status of the grinding machine, but also displays the dressing direction, dressing time, dressing speed, and corresponding dressing progress information for the current dressing stage. Simultaneously, the display module allows inspection personnel to input corresponding disc status information, dressing trigger conditions, and relevant dressing control parameters, enabling the control processing module to establish corresponding dressing control logic based on the input information.

[0032] The detection input modules are respectively set up for the correction wheel area and the grinding disc area to acquire the positioning status of the correction wheel and the flatness status of the grinding disc. The detection input modules may include a position detection unit, a contact detection unit, and a disc surface status acquisition unit. The position detection unit is mainly used to detect the circumferential and radial positions of each correction wheel relative to the center of the grinding machine, thereby determining whether the multiple correction wheels have been evenly distributed according to preset rules. The contact detection unit is mainly used to detect whether each correction wheel has formed effective contact with the grinding disc, to avoid problems such as some correction wheels being suspended, tilted, or having unstable contact. The disc surface status acquisition unit is used to acquire the disc surface height or wear status corresponding to different areas of the grinding disc, thereby determining whether there is localized uneven wear, uneven circumferential wear, or radial wear differences on the grinding disc. The various status data acquired by the detection input modules are transmitted to the control processing module in real time for subsequent disc repair parameter calculations.

[0033] The control processing module, as the core control unit of the entire system, can integrate a PLC controller, industrial controller, or embedded control unit. It is electrically connected to the display module, detection input module, and drive module, and performs unified analysis and processing on various input data. Upon receiving the disc surface flatness information uploaded by the detection input module, the control processing module first determines whether the current grinding disc meets the preset dressing conditions. If the conditions are met, the control processing module controls the grinding machine to enter dressing mode and further analyzes the position and contact states of multiple correction wheels. Subsequently, the control processing module generates corresponding dressing control parameters based on the positioning status of the correction wheels and the wear state of the disc surface. During this process, the control processing module not only analyzes the wear degree of different areas of the disc surface but also comprehensively considers the impact of the actual placement deviation of the correction wheels on the dressing area, thereby dynamically determining the corresponding dressing direction, dressing time, and dressing speed. For areas with high wear, the control processing module can increase the dressing priority of the corresponding area and extend the action time of the corresponding dressing stage; for areas with large deviations in the distribution of correction wheels, it can reduce the dressing speed or adjust the dressing direction to avoid local over-dressing.

[0034] The drive module is connected to both the drive mechanism and the control processing module of the grinding machine. Internally, it includes a frequency converter drive unit, a motor drive unit, and a direction switching control unit. Upon receiving the drive control signal from the control processing module, the drive module controls the rotation direction, speed, and running time of the corresponding motor in the grinding machine. The frequency converter drive unit primarily adjusts the motor speed to achieve speed control for different dressing stages. The direction switching control unit controls the grinding disc to rotate in different directions at different stages, improving the overall uniformity of the dressing. The motor drive unit drives the grinding disc to perform the actual dressing action. After the dressing action is completed, the control processing module stops the current dressing action and controls the grinding machine to exit dressing mode and return to grinding disc mode, thus completing the entire automated dressing control process.

[0035] The correction wheel fixing device includes: Positioning disk body 1, the positioning disk body 1 is disc-shaped, and a central positioning hole 2 is provided at the center of the positioning disk body 1. The central positioning hole 2 is used to coaxially position the positioning disk body 1 on the lower grinding disk of the grinding machine. The positioning disk body 1 has multiple correction wheel positioning holes 3, which are evenly spaced along the circumference of the central positioning hole 2, and each correction wheel positioning hole 3 has the same radial distance from the central positioning hole. The positioning hole 3 of the correction wheel is engaged with the positioning of the correction wheel.

[0036] The positioning disc body 1 is provided with multiple weight reduction holes 4, and each weight reduction hole 4 is located between two adjacent correction wheel positioning holes 3.

[0037] An annular groove 5 is provided between the center positioning hole 2 and the correction wheel positioning hole 3. The annular groove 5 is coaxially arranged with the center positioning hole 2 to engage with the center gear ring of the grinding machine, thereby coaxially positioning the positioning disk body 1 on the lower grinding disk of the grinding machine.

[0038] In this embodiment, the correction wheel fixing device is mainly used to quickly, uniformly, and equidistantly position multiple correction wheels before the grinding machine performs dressing operations. This avoids the problem of force imbalance in the dressing area caused by errors in the spacing of correction wheels, placement offsets, or uneven circumferential distribution during traditional manual placement. The entire correction wheel fixing device uses the positioning disc body 1 as the main load-bearing structure. The positioning disc body 1 is generally disc-shaped, and its outer contour dimensions are adapted to the working area of ​​the lower grinding disc of the grinding machine, allowing the positioning disc body 1 to be stably placed above the lower grinding disc. In actual use, the positioning disc body 1 mainly serves as a unified positioning reference platform for multiple correction wheels, and also as the installation connection base between various functional structures, ensuring that the positioning holes 3 of each correction wheel can always maintain a fixed spatial positional relationship. Because the positioning disc body 1 adopts a disc structure, multiple correction wheels can form a regular circumferential distribution around the center of the grinding machine after positioning, thus enabling the correction wheels to form a relatively uniform dressing trajectory during the subsequent dressing process.

[0039] A central positioning hole 2 is provided in the central area of ​​the positioning disk body 1. The central positioning hole 2 is coaxially arranged with the positioning disk body 1, and its central axis coincides with the center of the positioning disk body 1. During placement, the central positioning hole 2 corresponds to the center position of the lower grinding disk of the grinding machine and is used for the grinding machine's central gear ring to pass through. Since the grinding machine's central gear ring is located at the rotation center of the entire lower grinding disk, after the positioning disk body 1 is fitted onto the central gear ring through the central positioning hole 2, it can complete the overall positioning with the central gear ring as a coaxial positioning reference. In this way, after the positioning disk body 1 is placed on the lower grinding disk, its overall circumferential and radial positions are restricted, thereby avoiding the problem of eccentricity or circumferential rotational offset of the positioning disk body 1 during placement. At the same time, since the multiple correction wheel positioning holes 3 are all circumferentially evenly arranged around the central positioning hole 2, the coaxial positioning accuracy of the central positioning hole 2 will directly affect the final placement consistency of the multiple correction wheels.

[0040] Multiple correction wheel positioning holes 3 are located in the middle and outer regions of the positioning disc body 1. These holes are evenly spaced along the circumferential direction of the central positioning hole 2, and maintain the same radial distance from each hole. In other words, the correction wheel positioning holes 3 form a circular array structure with equal radii centered on the central positioning hole 2. When the operator places multiple correction wheels into their respective positioning holes 3, the wheels automatically form a regular, equiangularly spaced distribution. Since the spacing and angular relationship between the positioning holes 3 are pre-fixed, the operator does not need to repeatedly measure the actual spacing between the correction wheels or adjust their placement based on experience, effectively reducing the impact of human placement errors on the subsequent grinding effect. Furthermore, during the grinding process, the multiple correction wheels form a relatively uniform working area around the center of the lower grinding disc, thus avoiding over- or under-grinding in localized areas. The positioning hole 3 of the correction wheel and the correction wheel form a positioning fit relationship. After the correction wheel is put in, its outer periphery can be limited by the inner wall of the positioning hole 3 of the correction wheel, thereby reducing the problem of lateral displacement or tilting of the correction wheel during the placement stage.

[0041] The positioning disc body 1 is also provided with multiple weight-reducing holes 4, each located in the area between two adjacent correction wheel positioning holes 3. The weight-reducing holes 4 are mainly used to locally reduce the weight of the positioning disc body 1, thereby reducing its overall mass. Since the positioning disc body 1 is usually made of sheet metal or high-strength composite materials, a completely enclosed structure would result in a large overall weight, making frequent handling and disassembly difficult for operators. Therefore, by setting weight-reducing holes 4 between the multiple correction wheel positioning holes 3, the amount of material used can be reduced while maintaining the overall structural strength and rigidity of the positioning disc body 1, thus reducing the overall weight and improving the ease of handling for operators during the disc preparation stage. At the same time, the weight-reducing holes 4 are evenly distributed, which can avoid uneven stress or structural deformation of the positioning disc body 1 due to excessive weight reduction in local areas.

[0042] An annular groove 5 is provided between the central positioning hole 2 and the multiple correction wheel positioning holes 3. The annular groove 5 is coaxially arranged around the central positioning hole 2 and has an overall annular structure. When the positioning disk body 1 is placed on the lower grinding disk of the grinding machine, the annular groove 5 forms an embedded engagement with the outer periphery of the central gear ring of the grinding machine. Specifically, the outer periphery of the central gear ring can be embedded into the annular groove 5, so that the positioning disk body 1 is not only restricted by the central gear ring in the radial direction, but also restricted in the axial and circumferential directions. Through the engagement between the annular groove 5 and the central gear ring, the overall positioning stability between the positioning disk body 1 and the grinding machine can be further improved, reducing the positional displacement of the positioning disk body 1 caused by vibration, collision, or force changes after placement. At the same time, the annular groove 5 can also improve the adhesion stability between the positioning disk body 1 and the grinding machine, so that the multiple correction wheels can maintain a more stable spatial distribution after placement, thereby improving the consistency of the action area of ​​the multiple correction wheels and the uniformity of the grinding trajectory during subsequent grinding.

[0043] In this embodiment, an automated correction wheel control system is applied in a quartz wafer grinding equipment to perform automated correction wheel control and automatic correction wheel positioning control on the grinding disc of the grinding machine. The entire system mainly includes a correction wheel fixing device, a display module, a detection input module, a control processing module, and a drive module. The correction wheel fixing device is mainly used to achieve uniform equidistant positioning of multiple correction wheels on the lower grinding disc. The display module is mainly used to display the operating status of the grinding machine and to allow inspectors to input disc surface flatness information. The detection input module is mainly used to acquire disc surface flatness information and correction wheel positioning detection information. The control processing module is mainly used to generate corresponding correction wheel control parameters based on the disc surface flatness information and positioning detection information. The drive module is used to drive the grinding machine to perform corresponding correction wheel actions based on the correction wheel control parameters.

[0044] In this embodiment, the correction wheel fixing device mainly includes a positioning disc body 1. The positioning disc body 1 has a disc-shaped structure, and its overall diameter is preferably set to 66cm. Its outer diameter is slightly smaller than the outer diameter of the outer gear ring of the grinding machine to ensure that the positioning disc body 1 can be stably placed on the lower grinding disc during actual use, while facilitating handling and disassembly by operators. The thickness of the positioning disc body 1 is preferably set to 1cm to ensure that the positioning disc body 1 has sufficient structural rigidity during the placement of multiple correction wheels, thereby avoiding the impact of overall deformation on the actual positioning accuracy between multiple correction wheels.

[0045] A central positioning hole 2 is provided at the center of the positioning disk body 1. The central positioning hole 2 is a circular through hole with a diameter preferably set to 30cm. The central positioning hole 2 is mainly used to form a positioning fit with the central gear ring of the grinding machine, so that the positioning disk body 1 can complete the overall positioning with the central gear ring of the grinding machine as a coaxial positioning reference. In this embodiment, an annular groove 5 is also provided on the corresponding area on the back of the central positioning hole 2. The annular groove 5 is coaxially arranged around the central positioning hole 2, with a width preferably set to 9cm and a depth preferably set to 0.5cm. When the positioning disk body 1 is placed on the lower grinding disk of the grinding machine, the annular groove 5 can form an embedded snap-fit ​​fit with the central gear ring of the grinding machine, so that the positioning disk body 1 is not only restricted in the radial direction, but also forms a stable limit in the circumferential and axial directions, thereby further improving the overall coaxial positioning stability between the positioning disk body 1 and the grinding machine.

[0046] The outermost region of the positioning disk body 1 is provided with multiple correction wheel positioning holes 3. In this embodiment, six correction wheel positioning holes 3 are preferably provided. Each correction wheel positioning hole 3 is evenly spaced along the circumferential direction of the central positioning hole 2, and each correction wheel positioning hole 3 maintains the same radial distance from the central positioning hole 2, thus forming a regular circumferential array structure. The diameter of each correction wheel positioning hole 3 is preferably set to 14.5 cm to form a limiting positioning fit with the corresponding correction wheel. In actual use, the operator only needs to place the multiple correction wheels into the corresponding correction wheel positioning holes 3, and they will automatically form an equiangular distribution around the center of the grinding disk. There is no need to manually measure the actual distance between the multiple correction wheels repeatedly, thus effectively reducing manual placement errors.

[0047] In this embodiment, the positioning disk body 1 is also provided with a plurality of weight-reducing holes 4, each of which is located in the area between two adjacent correction wheel positioning holes 3. Preferably, there are six weight-reducing holes 4, and their diameter is preferably 6.7 cm. The weight-reducing holes 4 are mainly used to reduce the overall weight of the positioning disk body 1, thereby reducing the labor intensity of operators during handling and disassembly. At the same time, the weight-reducing holes 4 are evenly distributed along the circumference, thereby avoiding the problem of uneven stress or structural deformation of the positioning disk body 1 due to excessive weight reduction in local areas.

[0048] In this embodiment, the detection input module is mainly used to acquire the disc surface flatness information and the correction wheel positioning detection information corresponding to the grinding machine. The disc surface flatness information mainly characterizes the wear state of different areas of the grinding disc, and can be obtained through a displacement detection structure or a disc surface detection structure. After performing the inspection operation, the inspector can input the disc surface flatness information corresponding to the current grinding disc through the display module. After acquiring the disc surface flatness information, the control processing module determines whether the current grinding disc has reached the preset repair conditions. When the system determines that the current grinding disc has reached the repair conditions, the control processing module will control the grinding machine to enter the repair mode and restrict the grinding machine from continuing to perform normal grinding actions.

[0049] In this embodiment, after the grinding machine enters the dressing mode, the operator first raises the upper grinding disc and then raises the lower grinding disc using the lower disc lifting structure to remove the grinding rollers and the wafer to be processed. Afterward, the lower grinding disc is returned to its original working position, and the correction wheel fixing device is placed on the lower grinding disc. At this time, the central positioning hole 2 and the annular groove 5 will form a stable locking engagement with the central gear ring of the grinding machine. Subsequently, the operator sequentially places the six correction wheels into the corresponding correction wheel positioning holes 3, and the correction wheels will automatically form a regular, equidistant distribution. After placement, the operator removes the positioning disc body 1 as a whole; at this time, the multiple correction wheels still maintain their corresponding spatial distribution without significant displacement.

[0050] In this embodiment, the detection input module further performs position detection processing on multiple correction wheels to obtain corresponding positioning detection information. Specifically, the system acquires the circumferential position parameters, radial position parameters, and contact state parameters corresponding to each correction wheel, and further generates corresponding circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters. Then, the control processing module combines the disc surface flatness information and the correction wheel positioning detection information to generate corresponding disc dressing control parameters. The disc dressing control parameters mainly include disc dressing direction parameters, disc dressing time parameters, and disc dressing speed parameters.

[0051] In this embodiment, the control processing module further constructs a correction wheel distribution state matrix and a disc wear state matrix, and performs correlation matching processing on the two matrices. Specifically, the system generates a regional misalignment compensation matrix based on the circumferential and radial offsets of the correction wheel relative to the standard positioning position, and uses the regional misalignment compensation matrix to perform position compensation processing on the disc wear state matrix to generate a compensated disc wear matrix. Subsequently, the system generates corresponding disc repair requirement values ​​based on the wear deviation values ​​corresponding to each region in the compensated disc wear matrix, and generates corresponding disc repair weight values ​​by combining the contact consistency parameters corresponding to the correction wheel. Afterward, the system generates a regional disc repair priority sequence based on the disc repair weight values ​​corresponding to each region, and further generates disc repair direction parameters, disc repair time parameters, and disc repair speed parameters corresponding to different disc repair stages.

[0052] After receiving the drive control signal generated by the control processing module, the drive module controls the dual frequency converters and dual motors to perform corresponding rotation direction and speed control, respectively. Specifically, different frequency converters correspond to the drive control of different motors, thereby achieving coordinated control of the grinding wheel direction, grinding wheel speed, and grinding wheel time. For example, in certain grinding wheel stages, the control processing module can control the grinding wheel to perform a clockwise low-speed grinding action, while switching to a counterclockwise high-speed grinding action in subsequent stages to improve the overall uniformity of grinding between different areas.

[0053] In this embodiment, after multiple correction wheels are placed, the operator controls the upper grinding disc to press down above the correction wheels and starts the sand pump system. The control processing module then controls the drive module to execute the corresponding correction action according to the corresponding correction control parameters. After the correction action is completed, the control processing module automatically stops the current correction process and controls the grinding machine to exit the correction mode and return to the wafer grinding mode. At this time, the operator removes the correction wheels and puts back in the grinding wheel and the wafer to be processed, and then controls the upper grinding disc to press down again to the processing position. After restarting the wafer grinding mode, the system can also automatically control the sand output, eliminating the need for the operator to manually start the sand operation again, thereby further improving the automation level of the overall processing flow.

[0054] An automated correction control method for a correction wheel, applied to an automated correction control system for a correction wheel, the control method comprising: S10. Obtain the flatness information of the grinding machine's disc surface, and determine whether the preset disc repair conditions have been met based on the disc surface flatness information. S20. If the preset repair conditions are met, the grinding machine is controlled to enter the repair mode. The stroke position information of the correction wheel fixing device is detected in real time. Based on the stroke position information, it is determined whether multiple correction wheels have been placed at equal distances on the lower grinding disc of the grinding machine. S30. If it is determined that multiple correction wheels have been placed at equal distances on the lower grinding disc of the grinding machine and the correction wheel fixing device can be detached and removed, then obtain the positioning detection information corresponding to the correction wheels. S40. Based on the positioning detection information and the flatness information of the disc surface, generate the corresponding disc repair control parameters, and generate the corresponding drive control signal and display control signal based on the disc repair control parameters. The drive control signal is used to execute the corresponding disc repair action. S50. After completing the disc repair action, control the grinder to return from disc repair mode to grinding disc mode.

[0055] In this embodiment, the disc flatness information is mainly used to characterize the current surface state of the upper and lower grinding discs of the grinding machine. It is not a single height data, but a comprehensive state data reflecting the wear differences between different areas of the grinding disc, local height deviations, and overall wear trends. Specifically, the disc flatness information can be obtained by a disc surface detection device installed on the grinding machine. The disc surface detection device can use a displacement sensor, a laser rangefinder, or a contact detection structure to detect the surface height state corresponding to different areas of the grinding disc. Since the grinding disc is prone to local uneven wear or uneven circumferential wear during long-term operation, the disc flatness information usually includes the height difference state, circumferential wear state, and radial wear state corresponding to multiple areas. The control system will determine whether the current grinding disc has reached the preset grinding disc repair conditions based on the disc flatness information. The preset grinding disc repair conditions are mainly used to limit the state range in which the grinding disc is allowed to continue grinding disc processing. When the disc surface wear exceeds the preset range, the control system will consider that the current grinding disc is no longer suitable for continuing normal grinding disc operation, thereby automatically triggering the subsequent grinding disc repair process.

[0056] The dressing mode primarily characterizes the working mode of the polishing machine after switching from normal wafer processing to dressing mode. In dressing mode, the polishing machine ceases wafer polishing and instead uses multiple dressing wheels to trim the surface of the polishing disc. In this mode, the control system individually controls the disc rotation direction, dressing time, and dressing speed, while pausing wafer processing actions and some process flows in normal polishing mode to avoid impacting wafer processing. Conversely, the polishing mode characterizes the machine's operation after resuming normal wafer polishing. After completing the dressing action, the system automatically exits dressing mode and returns to polishing mode to continue subsequent wafer polishing processes.

[0057] The correction wheel fixing device is mainly used to uniformly position multiple correction wheels before the dressing process begins, ensuring a consistent circumferential and radial distribution of the wheels on the lower grinding disc. By positioning itself in conjunction with the center of the grinding machine, the device allows the correction wheels to be arranged regularly around the center of the grinding disc, avoiding uneven dressing caused by spacing errors or positional misalignments during traditional manual placement. The stroke position information characterizes the actual position of the correction wheel fixing device during placement, and can be obtained through limit sensors, proximity switches, or displacement detection structures. By monitoring the stroke position information in real time, the control system can determine whether the correction wheel fixing device has moved to the target placement position and whether the multiple correction wheels are in their corresponding positioning areas. When the stroke position information reaches a preset range, the control system considers the multiple correction wheels to have been placed at equal intervals.

[0058] The positioning detection information is mainly used to reconfirm the actual distribution of multiple correction wheels after the correction wheel fixing device is removed. It primarily reflects the current true position and contact status of the correction wheels. Since the correction wheels may slightly shift after removal from the fixing device, the system needs to further acquire the positioning detection information corresponding to the correction wheels to confirm whether they still maintain the target distribution. The positioning detection information typically includes the circumferential position, radial position, and contact status of the correction wheels. The circumferential position mainly reflects the distribution of the correction wheels in the circumferential direction, the radial position mainly reflects the distance relationship between the correction wheels and the center of the grinding disc, and the contact status mainly reflects whether the correction wheels have formed stable contact with the grinding disc.

[0059] The dressing control parameters are mainly used for dynamic control of the entire dressing process, including dressing direction parameters, dressing time parameters, and dressing speed parameters. The dressing direction parameter controls the rotation direction or direction switching method of the grinding disc during the dressing process to adjust the dressing trajectory of different areas. The dressing time parameter controls the duration of different dressing stages to ensure that different wear areas receive the appropriate dressing time. The dressing speed parameter controls the rotation speed of the grinding disc or the relative speed of the dressing wheel during the dressing process to adjust the dressing intensity. The control system dynamically generates corresponding dressing control parameters based on disc surface flatness information and positioning detection information to execute different dressing strategies according to different disc surface conditions.

[0060] The drive control signal is mainly used to convert the grinding disc control parameters generated by the control processing module into corresponding equipment execution signals. These signals can be output to the frequency converter, motor driver, or direction switching control unit via PLC to control the grinding machine to perform corresponding grinding disc actions. The drive control signal is used not only to control the start and stop of the grinding disc but also to control rotation direction switching, speed adjustment, and operation switching between different stages. The display control signal is mainly used to control the display module to display the current machine status. It can display real-time status information such as the current grinding disc stage, grinding disc time, grinding disc direction, and grinding disc progress to the operator, allowing the operator to observe the current grinding disc status. The grinding disc action mainly characterizes the actual grinding process performed by the grinding machine on the grinding disc surface through multiple correction wheels. During the grinding process, multiple correction wheels continuously correct the high points on the disc surface as the grinding disc rotates, gradually restoring the overall flatness of the grinding disc.

[0061] For example, during actual wafer repair, when the height difference of the outer ring of the polishing pad is significantly greater than that of the central area, the control system first determines that the polishing pad has met the preset repair conditions based on the pad's flatness information and automatically switches to repair mode. Subsequently, the operator places the correction wheel fixing device on the lower polishing pad, and multiple correction wheels are positioned equidistantly through the device. The system confirms that the correction wheel fixing device has reached the target positioning position through stroke position information. After the correction wheel fixing device is removed, the system further acquires positioning detection information for the multiple correction wheels to confirm that they have not shifted significantly. Then, the control system combines the current pad flatness information and the correction wheel positioning detection information to generate corresponding repair control parameters, such as reducing the repair speed, extending the repair time for the outer ring area, and increasing the frequency of repair direction switching, thereby improving the repair effect in the outer ring area. After completing the repair operation, the system automatically exits the repair mode and returns to the wafer grinding mode to continue executing subsequent wafer processing procedures.

[0062] Furthermore, the step of obtaining the positioning detection information corresponding to the correction wheel includes: S301. Perform position detection processing on multiple correction wheels to obtain the circumferential position parameters, radial position parameters and contact state parameters of each correction wheel; S302. Based on the circumferential position parameters, determine the corresponding circumferential interval angle between any two adjacent correction wheels, and calculate the difference between each circumferential interval angle and the preset standard interval angle to generate the corresponding circumferential distribution deviation parameters. S303. Based on the radial position parameters, determine the corresponding radial distance between each correction wheel and the center position of the grinding machine, and perform difference comparison processing between each radial distance to generate the corresponding radial distribution deviation parameters. S304. Based on the contact state parameters, count the effective number of correction wheels in effective contact state, calculate the ratio between the effective number of correction wheels and the total number of correction wheels, and then generate the corresponding contact consistency parameters based on the ratio. S305. Generate the corresponding correction wheel positioning detection information based on the circumferential distribution deviation parameter, radial distribution deviation parameter, and contact consistency parameter.

[0063] Furthermore, the step of obtaining the flatness information of the grinding machine disc includes: S101. Divide the grinding disc of the grinding machine into regions to generate multiple circumferential detection regions and multiple radial detection regions. S102. Calculate the circumferential height difference parameter of each circumferential detection area and the radial height difference parameter of each radial detection area respectively. S103. Based on the circumferential height difference parameter and the radial height difference parameter, generate the corresponding disc wear distribution parameter, standardize the disc wear distribution parameter, and generate the corresponding disc flatness information.

[0064] In this embodiment, the circumferential position parameter is mainly used to characterize the actual distribution of each correction wheel in the circumferential direction around the center of the grinding machine. It can be acquired through a visual detection structure, an angle-coded detection structure, or a circumferential position sensing structure located above the grinding machine. Since multiple correction wheels should ideally be distributed at regular equiangular intervals along the center of the grinding disk, the circumferential position parameter is typically used to reflect the actual angular state of each correction wheel relative to the center of the grinding machine. After acquiring the circumferential position parameter corresponding to each correction wheel, the control system further determines the corresponding circumferential interval angle between any two adjacent correction wheels. The circumferential interval angle mainly characterizes the angle between two adjacent correction wheels in the circumferential direction, directly reflecting the uniformity of the distribution of multiple correction wheels in the circumferential direction. The preset standard interval angle is mainly used as the target angle value under the standard distribution state. For example, when six correction wheels are set on the grinding disk, the ideal standard interval angle corresponding to each correction wheel is sixty degrees. By calculating the difference between each circumferential interval angle and the preset standard interval angle, the system can determine the degree of deviation between the current actual distribution state and the ideal distribution state of each correction wheel, and generate the corresponding circumferential distribution deviation parameter. The circumferential distribution deviation parameter is mainly used to reflect the arrangement error of multiple correction wheels in the circumferential direction. The larger the deviation value, the more uneven the actual circumferential distribution among the multiple correction wheels.

[0065] Radial position parameters primarily reflect the actual distance between each correction wheel and the center of the grinding disc. These parameters can be obtained through distance sensing, laser ranging, or image recognition measurement structures. Since each correction wheel should form a circle with the same radius around the center of the grinding disc during normal grinding, the radial distance between each correction wheel and the center of the grinding machine should theoretically be consistent. After obtaining the radial position parameters for each correction wheel, the system further calculates the radial distance between each correction wheel and the center of the grinding machine and compares the differences between the radial distances of different correction wheels to generate corresponding radial distribution deviation parameters. These radial distribution deviation parameters primarily reflect the consistency of multiple correction wheels in the radial direction, and can be used to determine whether some correction wheels are shifted inwards or outwards. When the radial distance of some correction wheels deviates significantly from other correction wheels, the system considers the current correction wheels to have an abnormal distribution in the radial direction, thus affecting the uniformity of force in the corresponding area during subsequent grinding.

[0066] Contact state parameters primarily characterize the stability of contact between each dressing wheel and the grinding disc surface. These parameters can be obtained through pressure detection structures, contact sensors, or load detection structures. Since multiple dressing wheels need to form stable contact with the grinding disc surface during dressing, if some dressing wheels are suspended, tilted, or have insufficient contact pressure, effective dressing will not be achieved in certain areas. Effective contact state primarily characterizes the working state of the dressing wheels when they have reached preset contact conditions, such as forming stable contact pressure or a continuous contact area between the dressing wheel and the grinding disc. After the system counts the number of dressing wheels in effective contact state, it further obtains the corresponding effective quantity information. Effective quantity information primarily characterizes the number of dressing wheels currently in normal contact state, while the total number of dressing wheels information characterizes the total number of dressing wheels currently participating in the dressing process. By calculating the ratio between the effective quantity information and the total number of dressing wheels, the system can determine the consistency of the overall contact state of the dressing wheels and further generate corresponding contact consistency parameters. Contact consistency parameters primarily reflect the overall contact stability among multiple dressing wheels. When this parameter is low, it indicates that some dressing wheels have not formed stable contact, which can easily lead to uneven dressing in certain areas. Subsequently, the system will generate corresponding correction wheel positioning detection information based on the circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters, so as to fully reflect the actual distribution and contact status of multiple correction wheels.

[0067] In this embodiment, the circumferential detection area is mainly used to characterize multiple detection areas divided around the central circumference of the grinding disk, and can be used to analyze the wear state corresponding to different circumferential positions of the grinding disk. For example, the entire grinding disk can be divided into multiple fan-shaped areas according to the angular direction, so that the disk surface state corresponding to each circumferential area can be detected separately. The radial detection area is mainly used to characterize multiple annular areas formed along the outer circumference of the grinding disk, and can be used to analyze the wear condition corresponding to different radii of the grinding disk. By simultaneously setting the circumferential and radial detection areas, the control system can analyze the surface state of the grinding disk from both circumferential and radial dimensions.

[0068] The circumferential height difference parameter primarily reflects the surface height difference within the same circumferential detection area or between different circumferential detection areas. It can be calculated from the height values ​​corresponding to multiple detection points. When there is a significant local bulge or depression in a certain circumferential area, its corresponding circumferential height difference parameter will increase significantly. The radial height difference parameter mainly reflects the surface height difference between different radial detection areas, and can be used to determine whether there is uneven wear between the central area and the outer ring area of ​​the grinding disc. For example, when the wear degree of the outer ring of the grinding disc is significantly higher than that of the central area, the radial height difference parameter corresponding to the outer ring area will be higher than that of the central area.

[0069] The wear distribution parameters of the grinding disc are mainly used to comprehensively reflect the wear distribution state between different areas of the entire grinding disc. They can be generated jointly by circumferential height difference parameters and radial height difference parameters. The system comprehensively analyzes the wear trend, wear direction, and local wear degree of the entire grinding disc based on the height difference state corresponding to different areas, thereby generating the corresponding wear distribution parameters. Standardization processing is mainly used to perform a unified scale conversion on the wear data between different areas to reduce the impact of differences in numerical ranges between different detection areas on subsequent control calculations. For example, the system can convert the height difference parameters corresponding to different areas into standardized proportional values ​​within a unified range, thereby improving the stability of subsequent disc repair parameter calculations. The disc flatness information generated after standardization processing can more accurately reflect the current overall true wear state of the grinding disc and serves as an important basis for generating subsequent disc repair control parameters.

[0070] For example, in actual testing, the system first divides the entire grinding disc into multiple circumferential and radial detection areas, and obtains the disc surface height data corresponding to each area through a displacement detection structure. When the radial height difference parameter corresponding to the outer ring area is detected to be significantly higher than that of the central area, the system determines that the grinding disc has an outer ring wear phenomenon. At the same time, the system also performs position detection on the six correction wheels. If the circumferential interval angle between two correction wheels is detected to be significantly smaller than the preset standard interval angle, it indicates that the correction wheels in that area have a circumferential aggregation problem, which leads to an increase in the corresponding circumferential distribution deviation parameter. Subsequently, the system further detects the contact state between multiple correction wheels and the grinding disc. When it is found that one correction wheel has not formed a stable contact, the effective quantity information will be lower than the total number of correction wheels, which leads to a decrease in the contact consistency parameter. Finally, the system integrates the above detection results to generate corresponding correction wheel positioning detection information and disc surface flatness information for use in the subsequent grinding control parameter generation.

[0071] Furthermore, the step of generating corresponding repair control parameters based on positioning detection information and disc surface flatness information includes: S401. Based on the positioning detection information, obtain the circumferential distribution deviation parameters, radial distribution deviation parameters and contact consistency parameters corresponding to multiple correction wheels respectively, and arrange the circumferential distribution deviation parameters, radial distribution deviation parameters and contact consistency parameters corresponding to each correction wheel according to the position order of the correction wheel, and arrange them according to the position order of the disk area to generate the corresponding disk wear state matrix. S402. Based on the disk surface flatness information, obtain the corresponding disk surface wear distribution parameters and generate the corresponding disk surface wear state matrix; S403. Perform correlation matching processing on each matrix element in the correction wheel distribution state matrix and the corresponding matrix element in the disc wear state matrix to generate the correction weight value corresponding to each disc area. S404. Generate corresponding repair control parameters based on the repair weight value.

[0072] Furthermore, the step of performing correlation matching processing between each matrix element in the correction wheel distribution state matrix and the corresponding matrix element in the disk wear state matrix to generate the correction weight value corresponding to each disk area includes: S4031. Based on the distribution state matrix of the correction wheel, determine the circumferential and radial offsets of each correction wheel relative to the corresponding standard positioning position, and generate the corresponding regional misalignment compensation matrix according to the circumferential and radial offsets. S4032. Based on the regional misalignment compensation matrix, position compensation processing is performed on each matrix element in the disk wear state matrix to generate a compensated disk wear matrix. S4033. Based on the wear deviation values ​​corresponding to each matrix element in the compensated disc wear matrix, determine the disc repair requirement value corresponding to each disc area. S4034. Based on the repair demand value corresponding to each plate area and the contact consistency parameter in the correction wheel distribution state matrix, generate the repair weight value corresponding to each plate area.

[0073] Furthermore, the step of generating corresponding adjustment control parameters based on the adjustment weight value includes: S4041. Based on the repair weight value corresponding to each market area, sort the repair priority of each market area to generate the corresponding area repair priority sequence. S4042. Based on the regional repair priority sequence, determine the corresponding multiple stage repair areas, and generate the corresponding stage repair direction parameters, repair time parameters, and repair speed parameters according to the repair weight values ​​corresponding to each stage repair area. S4043. Generate corresponding repair direction switching parameters and repair speed adjustment parameters based on the corresponding change in repair weight between two adjacent repair areas. S4044. Generate corresponding repair control parameters based on the repair direction parameters, repair time parameters, repair speed parameters, repair direction switching parameters, and repair speed adjustment parameters for each stage.

[0074] In this embodiment, the correction wheel distribution state matrix is ​​mainly used to characterize the overall spatial distribution state of multiple correction wheels in the current dressing state. Essentially, it is a state mapping structure established according to a preset positional order. After acquiring the circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters corresponding to multiple correction wheels, the control system performs data arrangement processing according to the actual circumferential arrangement order of each correction wheel on the grinding disc and the correspondence between disc surface areas. This ensures that each matrix element corresponds to the correction wheel state information on a specific disc surface area. Since the corresponding action areas of each correction wheel during the dressing process have a clear positional association, the correction wheel distribution state matrix can not only reflect the overall uniformity of the correction wheel distribution but also the actual action state of the correction wheels corresponding to different disc surface areas. Through this matrix arrangement, the control system can more intuitively establish the correspondence between the correction wheel states and disc surface areas, facilitating subsequent regional dressing control calculations.

[0075] The wear state matrix of the grinding disc is mainly used to characterize the wear distribution state of different areas of the grinding disc, and it can be further generated by transforming the wear distribution parameters of the grinding disc. The control system will arrange the wear states corresponding to different circumferential detection areas and different radial detection areas into a matrix according to the spatial distribution relationship of the grinding disc, so that each matrix element corresponds to the actual wear state of a certain area on the grinding disc. Since the wear degree between different areas of the grinding disc is not consistent during long-term operation, the wear state matrix of the grinding disc can more accurately reflect the local wear differences of the entire grinding disc. Through the wear state matrix of the grinding disc, the control system can perform regional analysis of the wear trend of different areas, thereby avoiding the problem that the traditional overall average grinding disc repair method cannot identify local uneven wear.

[0076] The correlation matching process is mainly used to establish the correspondence between the correction wheel distribution state matrix and the disc wear state matrix. Since the actual operating area corresponding to different correction wheels directly affects the dressing effect of the corresponding disc area, the control system performs region-based matching between each matrix element in the correction wheel distribution state matrix and the corresponding matrix element in the disc wear state matrix to determine the degree of influence of the current correction wheel distribution state on the dressing effect of the corresponding disc area. Through this matching process, the system can simultaneously consider the coupling relationship between the disc wear state and the actual placement state of the correction wheels, thereby avoiding the problem of directly performing disc dressing based on the original disc wear state when the correction wheels are misaligned or have unstable contact.

[0077] Circumferential offset primarily characterizes the degree of deviation of each correction wheel relative to the preset standard positioning position in the circumferential direction. It can be calculated from the difference between the actual circumferential position and the standard circumferential position. When a correction wheel deviates in the circumferential direction, its corresponding actual dressing trajectory will also deviate relative to the target area. Radial offset primarily characterizes the degree of positional deviation of each correction wheel in the radial direction. It can be used to determine whether the correction wheel deviates from the preset dressing radius. When a correction wheel deviates radially, its corresponding dressing area will move towards the inner or outer circle, thus affecting the dressing uniformity of the corresponding area.

[0078] The area misalignment compensation matrix is ​​primarily used to describe the offset relationship of the dressing area caused by the actual positional deviation of the dressing wheel. It can be generated by combining the circumferential and radial offsets of each dressing wheel. The control system performs offset mapping processing on the corresponding areas in the original disc wear state matrix based on the actual offset direction and degree of the dressing wheel. For example, when a dressing wheel shifts clockwise, its corresponding actual dressing area will also shift clockwise relative to the original target area. Therefore, the system corrects the position of the corresponding area using the area misalignment compensation matrix. In this way, the system can more realistically reflect the correspondence between the actual dressing area of ​​the dressing wheel and the disc wear area.

[0079] Position compensation processing is mainly used to correct the regional position of the original disc wear state matrix using a regional misalignment compensation matrix. The control system remaps the corresponding matrix elements in the disc wear state matrix based on the actual offset of each correction wheel, thereby generating a compensated disc wear matrix. The compensated disc wear matrix primarily reflects the matching relationship between the actual trimmed area of ​​the correction wheel and the true wear area of ​​the disc. Compared to the original disc wear state matrix, it more accurately reflects the current trimmed area state of the correction wheel.

[0080] The wear deviation value primarily characterizes the actual wear degree of each region in the compensated wear matrix. It is generated by considering the height difference, localized uneven wear, and regional wear distribution of the corresponding region. The wear requirement value primarily characterizes the required wear intensity for a given region, reflecting the region's need for wear time, speed, and direction adjustments. When a region has a large wear deviation value, the system considers that region to have a high wear requirement, thus increasing its priority in subsequent wear processes.

[0081] The wear weight value primarily characterizes the overall wear priority of different areas of the treadmill during the entire wear process. It is generated jointly by the wear demand value of the corresponding area and the distribution state of the correction wheel. Because the wear level and correction wheel contact state vary across different areas, the system dynamically generates the corresponding wear weight value based on the wear demand value and contact consistency parameters for each area. When an area has a high wear level and a stable correction wheel contact state, its corresponding wear weight value will be relatively high, thus receiving a higher wear priority in subsequent wear processes.

[0082] The regional repair priority sequence is primarily used to rank the repair priorities of each region on the wear plate, reflecting the order in which different regions should be repaired. The control system sorts the regions from highest to lowest repair weight value to generate the regional repair priority sequence. Multiple-stage repair regions are used to represent the sets of regions corresponding to different repair stages determined by the priority sequence. Because the wear conditions differ between regions, the system divides multiple repair regions into different stages for separate repair to avoid localized over-repair caused by uniform overall repair.

[0083] The dressing direction parameter primarily controls the rotation direction or direction switching method of the grinding disc at different dressing stages, adjusting the relative motion trajectory between the dressing wheel and the disc surface. The dressing time parameter controls the dressing duration at different stages to ensure sufficient dressing time for high-wear areas. The dressing speed parameter controls the dressing speed or dressing intensity at different stages. When a certain area has a high dressing weight, the system can appropriately extend the dressing time and reduce the dressing speed to improve the dressing accuracy of that area.

[0084] The change in grinding wheel weight primarily characterizes the degree of change in the corresponding grinding wheel weight value between two adjacent grinding wheel stages, reflecting the changing trend of grinding wheel requirements between different stages. The grinding wheel direction switching parameter mainly controls the direction switching method between different grinding wheel stages, such as controlling the timing of switching between clockwise and counterclockwise grinding wheel movements. The grinding wheel speed adjustment parameter mainly controls the speed change method between different grinding wheel stages to avoid sudden changes in grinding wheel speed that could lead to unstable force on the grinding wheel. Finally, the system comprehensively generates corresponding grinding wheel control parameters based on the grinding wheel direction parameters, grinding wheel time parameters, grinding wheel speed parameters, grinding wheel direction switching parameters, and grinding wheel speed adjustment parameters for each stage, achieving dynamic control of the entire grinding wheel process.

[0085] For example, in actual wheel repair, the system first generates a wheel distribution state matrix based on the circumferential and radial deviation parameters of multiple repair wheels, and simultaneously generates a wheel wear state matrix based on the wear states of different regions. When a significant clockwise offset is detected between two repair wheels relative to the standard positioning position, the system generates a corresponding regional misalignment compensation matrix and performs position compensation processing on the original wheel wear state matrix to obtain a compensated wheel wear matrix. Subsequently, based on the higher wear deviation value of the outer ring region in the compensated wheel wear matrix, the system determines that the repair demand value for the outer ring region is greater, and generates a higher repair weight value by combining the contact consistency parameters of the current multiple repair wheels. Then, the system prioritizes the outer ring region in the regional repair priority sequence, reduces the repair speed and extends the repair time in the first repair stage, and increases the frequency of repair direction switching to improve the repair effect of the outer ring region. After completing the first stage of repair, the system gradually switches to other repair areas to continue performing subsequent repair actions.

[0086] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. An automated correction control system for a correction wheel, characterized in that, It includes a correction wheel fixing device, a display module, a detection input module, a control processing module, and a drive module; The correction wheel fixing device is positioned and detachably connected to the central gear ring of the grinding machine, and is used to place multiple correction wheels at equal distances on the lower grinding disc of the grinding machine. The detection input module is used to acquire and input the flatness information of the grinding disc surface, as well as the positioning detection information for positioning detection of the correction wheel on the grinding disc after the correction wheel fixing device is removed; The signal input terminal of the control processing module is connected to the signal output terminal of the display module and the signal output terminal of the detection input module, respectively. The signal output terminal of the control processing module is connected to the signal input terminal of the drive module. The control processing module is used to generate corresponding grinding control parameters based on the flatness information of the disc surface and the positioning detection information. The grinding control parameters include at least grinding direction parameters, grinding time parameters, and grinding speed parameters. Based on the grinding control parameters, the control module generates corresponding drive control signals and display control signals. The display control signals are used to drive the display module to push the running status information and grinding status information of the grinding machine. The drive module is used to drive the grinding machine to perform corresponding repair actions according to the drive control signal.

2. The automatic correction control system for a correction wheel according to claim 1, characterized in that, The correction wheel fixing device includes: Positioning disk body (1), the positioning disk body (1) is disc-shaped, and a central positioning hole (2) is provided at the center of the positioning disk body (1). The central positioning hole (2) is used to coaxially position the positioning disk body (1) on the lower grinding disk of the grinding machine. The positioning disk body (1) is provided with a plurality of correction wheel positioning holes (3), the plurality of correction wheel positioning holes (3) are distributed at equal intervals along the circumference of the central positioning hole (2), and each correction wheel positioning hole (3) is the same radial distance from the central positioning hole; The positioning hole (3) of the correction wheel is engaged with the positioning of the correction wheel.

3. The automatic correction control system for a correction wheel according to claim 2, characterized in that, The positioning disc body (1) is provided with a plurality of weight reduction holes (4), each of the weight reduction holes (4) being located between two adjacent correction wheel positioning holes (3).

4. The automatic correction control system for a correction wheel according to claim 2, characterized in that, An annular groove (5) is provided between the central positioning hole (2) and the correction wheel positioning hole (3). The annular groove (5) is coaxially arranged with the central positioning hole (2) to engage with the central gear ring of the grinding machine, thereby coaxially positioning the positioning disk body (1) on the lower grinding disk of the grinding machine.

5. An automated correction control method for a correction wheel, characterized in that, The control method, applied to an automated correction control system for a correction wheel as described in any one of claims 1-4, comprises: Obtain the flatness information of the grinding machine's disc surface, and determine whether the preset disc repair conditions have been met based on the disc surface flatness information; If the preset repair conditions are met, the grinding machine is controlled to enter the repair mode, and the stroke position information of the correction wheel fixing device is detected in real time. Based on the stroke position information, it is determined whether the multiple correction wheels have been placed at equal distances on the lower grinding disc of the grinding machine. If it is determined that multiple correction wheels have been placed at equal distances on the lower grinding disc of the grinding machine and the correction wheel fixing device can be detached and removed, then the positioning detection information corresponding to the correction wheels is obtained; Based on the positioning detection information and the flatness information of the disc surface, corresponding disc repair control parameters are generated, and corresponding drive control signals and display control signals are generated based on the disc repair control parameters. The drive control signals are used to execute the corresponding disc repair actions. After completing the dressing action, control the grinding machine to return from the dressing mode to the grinding disc mode.

6. The automatic correction control method for a correction wheel according to claim 5, characterized in that, The step of obtaining the positioning detection information corresponding to the correction wheel includes: Position detection processing is performed on multiple correction wheels to obtain the circumferential position parameters, radial position parameters, and contact state parameters of each correction wheel; Based on the circumferential position parameters, determine the corresponding circumferential interval angle between any two adjacent correction wheels, and perform difference calculation processing on each of the circumferential interval angles and the preset standard interval angle to generate the corresponding circumferential distribution deviation parameters. Based on the radial position parameters, determine the corresponding radial distance between each correction wheel and the center position of the grinding machine, and perform difference comparison processing between each radial distance to generate the corresponding radial distribution deviation parameters; Based on the contact state parameters, the effective number of correction wheels in effective contact state is statistically analyzed, and the ratio between the effective number of correction wheels and the total number of correction wheels is calculated. Then, the corresponding contact consistency parameters are generated based on the ratio. Based on the circumferential distribution deviation parameter, the radial distribution deviation parameter, and the contact consistency parameter, corresponding correction wheel positioning detection information is generated.

7. The automatic correction control method for a correction wheel according to claim 5, characterized in that, The step of obtaining the flatness information of the grinding machine disc includes: The grinding disc of the grinding machine is divided into regions to generate multiple circumferential detection regions and multiple radial detection regions; The circumferential height difference parameter of each of the circumferential detection areas and the radial height difference parameter of each of the radial detection areas are calculated respectively. Based on the circumferential height difference parameter and the radial height difference parameter, the corresponding disk surface wear distribution parameter is generated, and the disk surface wear distribution parameter is standardized to generate the corresponding disk surface flatness information.

8. The automatic correction control method for a correction wheel according to claim 5, characterized in that, The step of generating corresponding repair control parameters based on the positioning detection information and the flatness information of the disc surface includes: Based on the positioning and detection information, the circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters corresponding to multiple correction wheels are obtained respectively. The circumferential distribution deviation parameters, radial distribution deviation parameters, and contact consistency parameters corresponding to each correction wheel are arranged according to the position order of the correction wheel and according to the position order of the disk area to generate the corresponding disk wear state matrix. Based on the disk surface flatness information, the corresponding disk surface wear distribution parameters are obtained, and the corresponding disk surface wear state matrix is ​​generated. The matrix elements in the correction wheel distribution state matrix are associated and matched with the corresponding matrix elements in the disc wear state matrix to generate the disc repair weight value corresponding to each disc area. Based on the repair weight value, the corresponding repair control parameters are generated.

9. The automatic correction control method for a correction wheel according to claim 8, characterized in that, The step of performing correlation matching processing between each matrix element in the correction wheel distribution state matrix and the corresponding matrix element in the disk wear state matrix to generate the repair weight value corresponding to each disk area includes: Based on the distribution state matrix of the correction wheel, the circumferential and radial offsets of each correction wheel relative to the corresponding standard positioning position are determined, and a corresponding regional misalignment compensation matrix is ​​generated according to the circumferential and radial offsets. Based on the regional misalignment compensation matrix, position compensation processing is performed on each matrix element in the disk wear state matrix to generate a compensated disk wear matrix. Based on the wear deviation value corresponding to each matrix element in the compensated disc wear matrix, determine the disc repair requirement value corresponding to each disc area; Based on the repair demand value corresponding to each disk area and the contact consistency parameter in the correction wheel distribution state matrix, a repair weight value corresponding to each disk area is generated.

10. The automatic correction control method for a correction wheel according to claim 8, characterized in that, The step of generating corresponding repair control parameters based on the repair weight value includes: Based on the repair weight value corresponding to each market area, the repair priority of each market area is sorted to generate the corresponding regional repair priority sequence. Based on the regional repair priority sequence, multiple corresponding repair areas are determined, and repair direction parameters, repair time parameters, and repair speed parameters for each stage are generated according to the repair weight values ​​corresponding to each stage repair area. Based on the change in repair weight between two adjacent repair areas, corresponding repair direction switching parameters and repair speed adjustment parameters are generated. Based on the repair direction parameters, repair time parameters, repair speed parameters, repair direction switching parameters, and repair speed adjustment parameters corresponding to each stage, the corresponding repair control parameters are generated.

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