Clamping and turning robot
Patent Information
- Application Number
- CN202611016636.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2026-07-09
- Publication Date
- 2026-09-22
- Estimated Expiration
- 2046-07-09
AI Technical Summary
应用于半导体行业的翻转机械手通常为多节翻转机械手臂,由于在工艺要求中需要对晶圆进行翻转,而传统的机械手臂在手腕处直接增加翻转机构,会导致结构复杂、可靠性差,将晶圆由0°位翻转至180°位以及水平传送晶圆的精度难以保证
[0016]本发明提供的一种夹持翻转机械手,能够独立于机械手臂外实现高精度自适应翻转目标工件,结构简单,制造成本低。
Smart Images

Figure CN122518311B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of flipping manipulators, and specifically relates to a gripping and flipping manipulator. Background Technology
[0002] A flipping robot is an automated device used in industrial production lines to adjust the posture of workpieces. It is widely used in machining, assembly, and inspection processes, and its performance directly affects the level of automation and operational efficiency of the production line. Flipping robots used in the semiconductor industry are typically multi-segment flipping arms. Because the process requires flipping wafers, traditional robotic arms with a flipping mechanism directly added to the wrist end result in complex structures, poor reliability, and difficulty in guaranteeing the accuracy of flipping wafers from 0° to 180° and horizontally transferring them. For processes requiring correction, the hardware precision requirements at the end of the multi-segment flipping robot are extremely high. Furthermore, the friction-based wafer transfer method cannot flip wafers of different thicknesses or with large warpages during transfer, affecting the quality of the completed process. Summary of the Invention
[0003] To address the problems existing in the prior art, this invention provides a gripping and flipping robot that can achieve high-precision adaptive flipping of the target workpiece independently of the robotic arm. It has a simple structure and low manufacturing cost.
[0004] To achieve the above objectives, the present invention adopts the following technical solution:
[0005] A gripping and flipping robot includes a flipping assembly, a gripping assembly, and a control assembly. The flipping assembly includes a housing and an end cap, the end cap being rotatable relative to the housing along its central axis. The gripping assembly is disposed on the end cap so that the rotation of the end cap can drive the gripping assembly to flip, and the gripping assembly is used to grip a target workpiece. The control assembly is electrically connected to the flipping assembly and the gripping assembly, and the control assembly is used to control the rotation of the end cap of the flipping assembly and to control the gripping assembly to grip or release the target workpiece.
[0006] Furthermore, the tilting assembly also includes an angular contact bearing, a rotating ring, and a first drive assembly. An annular mounting groove is provided on the inner side of the housing, and the angular contact bearing is located inside the annular mounting groove. The rotating ring is rotatably mounted on the inner ring of the angular contact bearing, and an end cap is connected to the rotating ring on the side near the opening of the annular mounting groove. The first drive assembly includes a first servo motor, a first synchronous pulley, a second synchronous pulley, and a synchronous belt. The first servo motor is connected to the housing via a tensioning structure, the first synchronous pulley is connected to the output end of the first servo motor, the second synchronous pulley is connected to the rotating ring via a fixed shaft, and the synchronous belt is fitted onto the first and second synchronous pulleys to enable the first servo motor to drive the rotating ring to rotate. The first servo motor is electrically connected to the control assembly.
[0007] Furthermore, the flipping assembly also includes a cable chain, a cable chain mounting seat is provided on the rotating ring, a cable chain fixing seat is provided on the housing, and a guide hole is also provided on the housing. The fixed end of the cable chain is fixedly connected to the cable chain fixing seat, and the moving end of the cable chain passes through the guide hole and extends to the outside of the housing to connect with the cable chain mounting seat.
[0008] Furthermore, the clamping assembly includes a clamping component and a robotic arm component. The clamping component includes clamping blocks and a drive transmission module. A guide rail is also provided on the end cover. Two clamping blocks are slidably mounted on the guide rail. The drive transmission module is used to drive the clamping blocks to slide along the guide rail. The robotic arm component is mounted on the clamping blocks. When the two clamping blocks slide along the guide rail to move closer or further apart, the robotic arm component can clamp or release the target workpiece.
[0009] Furthermore, the drive transmission module includes a second servo motor, a gear, and a rack. The second servo motor is located inside the housing, and its output end is rotatably inserted through the center of the end cover. The gear is connected to the output end of the second servo motor, and the rack is mounted on the clamping blocks. The racks on the two clamping blocks extend towards each other along the sliding direction of the clamping blocks, and the racks on the two clamping blocks are located on both sides of the gear so that the rack meshes with the gear. The second servo motor is electrically connected to the control unit.
[0010] Furthermore, the gripping and flipping robot also includes a guide block, a clamping sensor, and an opening sensor. The guide block is mounted on the clamping block and extends towards the edge of the end cap along the sliding direction of the clamping block. An adjustment block is mounted on the guide block. Two clamping sensors are respectively mounted on the bottom sides of the housing. The opening sensor is mounted on the bottom of the housing. When the end cap rotates the gripping assembly to the 0° or 180° position and the clamping block is in the clamping state, the adjustment block blocks the clamping sensor, and the clamping sensor feeds back a clamping signal. When the end cap rotates the gripping assembly to the 0° or 180° position and the clamping block is in the opening state, the guide block blocks the opening sensor, and the opening sensor feeds back an opening signal. The clamping sensor and the opening sensor are electrically connected to the control assembly.
[0011] Furthermore, the gripping and flipping robot also includes flipping sensors. Two flipping sensors are connected to the top and bottom of the housing respectively via adjustment plates. The adjustment plates are used to adjust the position of the flipping sensors. When the gripping assembly is in the initial position, the adjustment plates are adjusted so that the guide block blocks the flipping sensors, and the flipping sensors indicate that the gripping assembly is currently in the 0° position. When the end cover drives the gripping assembly to flip until the guide block blocks the flipping sensors again, the flipping sensors indicate that the gripping assembly is currently in the 180° position. The flipping sensors are electrically connected to the control assembly.
[0012] Furthermore, the clamping assembly also includes a fixed limiting block, an adjusting limiting block, and a size limiting block. The fixed limiting block is disposed on one side of the end cover, and the adjusting limiting block is movably disposed on the other side of the end cover. The fixed limiting block and the adjusting limiting block are both located between the two clamping blocks, and the adjusting limiting block has a radial movement along the end cover. The guide block also has a groove along the sliding direction of the clamping block, and the size limiting block is movably disposed at the bottom of the housing and slidably engaged in the groove.
[0013] Furthermore, the gripping and flipping robot also includes workpiece sensors, with two workpiece sensors respectively located at the bottom and top of the housing; wherein, when the gripping unit holds the target workpiece, the target workpiece blocks the workpiece sensor, and the workpiece sensor provides feedback that the gripper holds the target workpiece; wherein, the workpiece sensor is electrically connected to the control unit.
[0014] Furthermore, the robotic arm assembly includes connecting rods, gripping jaws, and adjusting screws. The two connecting rods are respectively connected to two clamping blocks; the two gripping jaws are respectively connected to the two connecting rods, and the ends of the two gripping jaws are provided with relatively extending gripping protrusions for contacting the target workpiece; the adjusting screws are provided on the connecting rods and are used to level the gripping jaws; wherein, the gripping jaws are provided with a first positioning edge; and / or, the robotic arm assembly also includes a positioning fixture, which is disposed between the two gripping jaws and is provided with a second positioning edge.
[0015] The beneficial effects of this invention are:
[0016] The present invention provides a gripping and flipping robot that can achieve high-precision adaptive flipping of target workpieces independently of the robotic arm. It has a simple structure and low manufacturing cost.
[0017] The present invention includes a clamping sensor, an opening sensor, and a flipping sensor. When the clamping assembly is flipped to the 0° position or the 180° position, the clamping sensor and the opening sensor can detect that the clamping block is in a clamped state or an open state. When the clamping assembly starts to flip from the initial position, the flipping sensor can detect whether the clamping assembly has accurately flipped into place from the 0° position to the 180° position.
[0018] The clamping assembly includes a fixed limit block, an adjusting limit block, and a size limit block. The fixed limit block and the adjusting limit block are used to provide buffer protection when the two clamping blocks are in the clamping state. The size limit block restricts the movement of the guide block within a certain range, thereby preventing the robot arm assembly from clamping too tightly and causing damage to the target workpiece. The installation position of the size limit block is adjustable, which can provide over-clamping protection for target workpieces of different thicknesses and prevent damage to the target workpiece. Attached Figure Description
[0019] Figure 1This is a schematic diagram of the structure of a gripping and flipping robot provided by the present invention;
[0020] Figure 2 A cross-sectional structural diagram of the flip-over assembly provided by the present invention;
[0021] Figure 3 This is a schematic diagram of the structure of the flip-up assembly provided by the present invention;
[0022] Figure 4 A schematic diagram of the clamping component in the flipping assembly and clamping assembly provided by the present invention;
[0023] Figure 5 A schematic diagram of the clamping assembly provided by the present invention;
[0024] In the diagram, 1. Flipping assembly; 11. Housing; 12. End cap; 13. Angular contact bearing; 14. Rotating ring; 151. First servo motor; 152. First synchronous pulley; 153. Second synchronous pulley; 154. Synchronous belt; 155. Tensioning structure; 156. Fixed shaft; 16. Cable chain; 161. Cable chain mounting base; 162. Cable chain fixing base; 163. Guide hole; 2. Clamping assembly; 21. Clamping assembly; 211. Clamping block; 212. Guide rail; 213. Second servo motor; 214. Gear; 2 15. Rack; 22. Robot arm assembly; 221. Connecting rod; 222. Clamping jaw; 223. Clamping protrusion; 224. Adjusting set screw; 225. First positioning edge; 226. Positioning fixture; 227. Second positioning edge; 23. Fixed limit block; 24. Adjusting limit block; 25. Size limit block; 3. Control assembly; 4. Target workpiece; 51. Guide block; 52. Adjusting block; 53. Clamping sensor; 54. Opening sensor; 55. Flip sensor; 551. Adjusting plate; 56. Workpiece sensor. Detailed Implementation
[0025] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.
[0026] like Figure 1As shown, a gripping and flipping robot includes a flipping assembly 1, a gripping assembly 2, and a control assembly 3. The flipping assembly 1, which drives the gripping assembly 2 to achieve a flipping action, specifically includes a housing 11 and an end cap 12. The end cap 12 is movably mounted on the housing 11 and can rotate relative to the housing 11 along its own central axis. The gripping assembly 2 is mounted on the end cap 12 so that rotating the end cap 12 can drive the gripping assembly 2 to flip. The gripping assembly 2 is used to grip a target workpiece 4 and adjust the target workpiece 4 to a horizontal position. The control assembly 3 is electrically connected to the flipping assembly 1 and the gripping assembly 2. The control assembly 3 is used to control the rotation of the end cap 12 of the flipping assembly 1 and to control the gripping assembly 2 to grip or release the target workpiece 4, thereby achieving a high-precision adaptive flipping action of the target workpiece 4. The target workpiece 4 can be a wafer or other workpiece.
[0027] Therefore, the present invention provides a gripping and flipping robot that can independently achieve high-precision adaptive flipping of the target workpiece 4, with a simple structure and low manufacturing cost.
[0028] In this embodiment, as Figure 2 As shown, the flipping assembly 1 also includes an angular contact bearing 13, a rotating ring 14, and a first drive assembly. An annular mounting groove is provided on the inner side of the housing 11, and the angular contact bearing 13 is disposed inside the annular mounting groove to support the rotation of the rotating ring 14. The rotating ring 14 is rotatably disposed within the inner ring of the angular contact bearing 13. An end cap 12 is connected to the side of the rotating ring 14 near the opening of the annular mounting groove, positioning the end cap 12 outside the housing 11 to facilitate the mounting of the clamping assembly 2 on the end cap 12. When the rotating ring 14 rotates within the inner ring of the angular contact bearing 13, it drives the end cap 12 and the clamping assembly 2 mounted on the end cap 12 to rotate synchronously. The first drive assembly includes a first servo motor 151, a first synchronous pulley 152, a second synchronous pulley 153, and a synchronous belt 154. The first synchronous pulley 152 is connected to the output end of the first servo motor 151. The second synchronous pulley 153 is connected to the rotating ring 14 via a fixed shaft 156. The synchronous belt 154 is fitted onto the first synchronous pulley 152 and the second synchronous pulley 153, so that the first servo motor 151 can drive the rotating ring 14 to rotate, thereby driving the clamping assembly 2 to complete a rotation from 0° to 180°. The 0° position represents the starting position before rotation begins, and the 180° position represents the ending position after rotation ends.
[0029] The first servo motor 151 is connected to the housing 11 via a tensioning structure 155, which is used to adjust the tension of the synchronous belt 154. In some possible embodiments, the tensioning structure 155 consists of multiple set screws, which, by turning the set screws, allow the first servo motor 151 to move toward or away from the second synchronous pulley 153.
[0030] The first servo motor 151 is electrically connected to the control unit 3, enabling the control unit 3 to control the start and stop of the first servo motor 151.
[0031] When using the control unit 3 to control the flipping unit 1 and the clamping unit 2, cables are typically used to connect the control unit 3 to the flipping unit 1 and the clamping unit 2. This causes the cables to easily become tangled and scratched during operation. In this embodiment, as... Figure 3 As shown, the flipping assembly 1 also includes a cable carrier 16, with the cable disposed inside the cable carrier 16. A cable carrier mounting base 161 is provided on the rotating ring 14, and a cable carrier fixing base 162 is provided on the housing 11. A guide hole 163 is also provided on the housing 11. The fixed end of the cable carrier 16 is fixedly connected to the cable carrier fixing base 162, and the moving end of the cable carrier 16 passes through the guide hole 163 and extends to the outside of the housing 11 to connect with the cable carrier mounting base 161. When the end cap 12 of the flipping assembly 1 drives the clamping assembly 2 to flip, the moving end of the cable carrier 16 rotates with the end cap 12 and is wound into the inside of the housing 11. The guide hole 163 can limit the movement of the cable carrier 16, preventing it from rubbing against the housing 11, thereby protecting the cable.
[0032] In this embodiment, as Figure 4 and Figure 5 As shown, the clamping assembly 2 includes a clamping assembly 21 and a robotic arm assembly 22. The clamping assembly 21 includes clamping blocks 211 and a drive transmission module. A guide rail 212 is also provided on the end cover 12. Two clamping blocks 211 are slidably mounted on the guide rail 212, and the robotic arm assembly 22 is mounted on the clamping blocks 211. When the drive transmission module drives the two clamping blocks 211 to slide along the guide rail 212 to move closer or further apart, the robotic arm assembly 22 can clamp or release the target workpiece 4.
[0033] In this embodiment, as Figure 4As shown, the drive transmission module includes a second servo motor 213, a gear 214, and a rack 215. The second servo motor 213 is disposed inside the housing 11, and its output end is rotatably inserted through the center of the end cover 12. The gear 214 is connected to the output end of the second servo motor 213, enabling the second servo motor 213 to drive the gear 214 to rotate while the end cover 12 remains stationary. A rack 215 is provided on the clamping block 211, and the racks 215 on the two clamping blocks 211 extend towards each other along the sliding direction of the clamping blocks 211. At the same time, the racks 215 on the two clamping blocks 211 are respectively located on both sides of the gear 214, so that the rack 215 meshes with the gear 214. When the second servo motor 213 drives the gear 214 to rotate, the gear 214 can drive the two clamping blocks 211 to move symmetrically through the rack 215, that is, the two clamping blocks 211 move closer or further away from each other, thereby driving the robot arm assembly 22 to move closer or further away from each other, so as to clamp or release the target workpiece 4.
[0034] The second servo motor 213 is electrically connected to the control unit 3, enabling the control unit 3 to control the start and stop of the second servo motor 213.
[0035] In this embodiment, as Figure 4 As shown, the gripping and flipping robot also includes a guide block 51, a clamping sensor 53, and an opening sensor 54. The guide block 51 is disposed on the clamping block 211 and extends towards the edge of the end cap 12 along the sliding direction of the clamping block 211. An adjusting block 52 is disposed on the guide block 51. Preferably, the guide blocks 51 and adjusting blocks 52 on both clamping blocks 211 are located on a straight line with the same diameter of the end cap 12. The two clamping sensors 53 are respectively disposed on both sides of the bottom of the housing 11, and the opening sensor 54 is disposed on the bottom of the housing 11, wherein the horizontal height of the clamping sensor 53 is higher than the horizontal height of the opening sensor 54.
[0036] Specifically, when the end cap 12 rotates the clamping part 2 to the 0° or 180° position, and the clamping block 211 is in the clamping state, the adjusting block 52 blocks the clamping sensor 53, and the clamping sensor 53 feeds back a clamping signal. When the end cap 12 rotates the clamping part 2 to the 0° or 180° position, and the clamping block 211 is in the open state, the guide block 51 blocks the opening sensor 54, and the opening sensor 54 feeds back an opening signal. Here, the 0° position represents the starting position before rotation begins, and the 180° position represents the ending position after rotation ends.
[0037] The clamping sensor 53 and the opening sensor 54 are electrically connected to the control unit 3, enabling the control unit 3 to acquire the signals fed back by the clamping sensor 53 and the opening sensor 54.
[0038] In this embodiment, as Figure 4 As shown, the gripping and flipping robot also includes flipping sensors 55. Two flipping sensors 55 are connected to the top and bottom of the housing 11 respectively via adjusting pieces 551. The adjusting pieces 551 are used to adjust the position of the flipping sensors 55 so that when the gripping assembly 2 is in its initial position, the guide block 51 accurately blocks the flipping sensors 55, and the flipping sensors 55 provide feedback that the gripping assembly 2 is currently at a 0° position. When the end cover 12 rotates the gripping assembly 2 until the guide block 51 blocks the flipping sensors 55 again, the flipping sensors 55 provide feedback that the gripping assembly 2 is currently at a 180° position, thus accurately determining the flipping angle of the gripping assembly 2, ensuring that the gripping assembly 2 can accurately flip 180° each time.
[0039] The flip sensor 55 is electrically connected to the control unit 3, enabling the control unit 3 to acquire the signal fed back by the flip sensor 55.
[0040] In this embodiment, as Figure 4 As shown, the clamping assembly 2 also includes a fixed limiting block 23, an adjusting limiting block 24, and a dimensional limiting block 25. The fixed limiting block 23 is disposed on one side of the end cover 12, and the adjusting limiting block 24 is movably disposed on the other side of the end cover 12. Both the fixed limiting block 23 and the adjusting limiting block 24 are located between the two clamping blocks 211, serving as a buffer and protection when the two clamping blocks 211 are in the clamping state, preventing the robot arm assembly 22 from clamping too tightly due to the two clamping blocks 211 being too close, thus avoiding damage to the target workpiece 4. The adjusting limiting block 24 has a radial movement along the end cover 12, used to adjust the movement based on the fixed limiting block 23 when the two clamping blocks 211 are in the clamping state, so that the robot arm assembly 22 can stably clamp the target workpiece 4.
[0041] like Figure 4 As shown, a groove is provided on the guide block 51 along the sliding direction of the clamping block 211. The size limiting block 25 is slidably engaged in the groove. When the clamping block 211 moves the guide block 51 upward, the bottom wall of the groove abuts against the lower edge of the size limiting block 25; when the clamping block 211 moves the guide block 51 downward, the top wall of the groove abuts against the upper edge of the size limiting block 25. This limits the movement of the guide block 51 within a certain range, preventing damage to the target workpiece 4 due to excessive clamping. The bottom of the housing 11 is provided with a mounting base with an elongated hole. The size limiting block 25 is movably engaged in the elongated hole. By adjusting the installation position of the size limiting block 25 in the elongated hole, over-clamping protection can be provided for target workpieces 4 of different thicknesses, preventing damage to the target workpiece 4.
[0042] like Figure 4As shown, the gripping and flipping robot also includes workpiece sensors 56. Two workpiece sensors 56 are respectively disposed at the bottom and top of the housing 11. When the gripping assembly 2 grips the target workpiece 4, the target workpiece 4 blocks the workpiece sensor 56, and the workpiece sensor 56 provides feedback that the target workpiece 4 is being gripped. When the gripping assembly 2 does not grip the target workpiece 4, the workpiece sensor 56 sends feedback to the control assembly 3 to issue an alarm. The workpiece sensor 56 is electrically connected to the control assembly 3, enabling the control assembly 3 to acquire the signals fed back by the workpiece sensor 56.
[0043] The specific types of the clamping sensor 53 and the workpiece sensor 56 are not limited here, as long as they can emit and detect light rays and provide feedback signals. Similarly, the specific types of the opening sensor 54 and the flipping sensor 55 are not limited here, as long as they can detect whether the light is blocked and provide corresponding signals based on the blocking status. Preferably, the clamping sensor 53, the opening sensor 54, the flipping sensor 55, and the workpiece sensor 56 can be infrared sensors, etc.
[0044] like Figure 5 As shown, the robotic arm assembly 22 includes connecting rods 221, gripping jaws 222, and adjusting screws 224. Two connecting rods 221 are respectively connected to two clamping blocks 211 and can move up and down with the clamping blocks 211. Two gripping jaws 222 are respectively connected to two connecting rods 221, allowing the connecting rods 221 to drive the gripping jaws 222 to clamp or release the target workpiece 4. The ends of the two gripping jaws 222 are provided with relatively extending gripping protrusions 223, which are used to contact the target workpiece 4, thereby achieving frictional transfer of target workpieces 4 with different thicknesses and large warping shapes. The connecting rods 221 are provided with adjusting screws 224 for leveling the gripping jaws 222, thereby achieving positional correction of the target workpiece 4 and keeping it horizontal.
[0045] When the target workpiece 4 is a wafer, the wafer usually has a specially made dummy wafer for clamping purposes; the dummy wafer has a central hole and arcs on both sides. Figure 5As shown, in some possible embodiments, the robotic arm assembly 22 further includes a positioning fixture 226, which is disposed between two gripping jaws 222. The positioning fixture 226 has corresponding central holes and arc-shaped second positioning edges 227 on its center and sides. When the robotic arm assembly 22 grips the wafer, the central hole on the dummy wafer engages with the second positioning edge 227 on the center of the positioning fixture 226, placing the wafer at the center of the robotic arm assembly 22. The arcs on both sides of the dummy wafer coaxially engage with the second positioning edges 227 on both sides of the positioning fixture 226, thereby preventing the wafer from slipping. The control assembly 3 records and repeats the position of the robotic arm assembly 22 at this time, ensuring that the wafer is always centered in the robotic arm assembly 22 each time it is picked up or placed. In other possible embodiments, the gripping jaws 222 are provided with a first positioning edge 225 for engaging with the wafer. Both the first positioning edge 225 and the second positioning edge 227 have a clearance fit with the target workpiece 4, thereby preventing over-gripping and damage.
[0046] The following description, in conjunction with the accompanying drawings, illustrates a debugging method of the present invention, which ensures effective contact between the clamping jaws 222 and the target workpieces 4 of various sizes:
[0047] like Figure 5 As shown, the robotic arm assembly 22 is equipped with two gripping claws 222. One of the gripping claws 222 is defined as the 0° reference. The gripping claw 222 is adjusted to be horizontal without using the adjusting screw 224. During the debugging process, the clamping block 211 is kept in the open state.
[0048] First, adjust the 0° reference clamping jaw 222:
[0049] Step 1: Adjust the Y-axis direction to be horizontal: Clamp the target workpiece 4 between the two clamping jaws 222, place the bubble level on the target workpiece 4, and adjust the adjusting screw 224 so that the bubble in the bubble level is located at the horizontal ±1 division.
[0050] Step 2: Adjust the horizontal direction of the X-axis: Adjust the adjusting screw 224 on the upper clamping jaw 222 so that all the clamping protrusions 223 of the two clamping jaws 222 are in contact with the target workpiece 4 and there is no shaking.
[0051] Adjust the other gripper 222:
[0052] Step 3: Control the flipping assembly 1 to flip horizontally along the X-axis, and the flipping sensor 55 will provide feedback on the flipping position signal; control the flipping assembly 1 to flip 180° so that the target workpiece 4 is placed on another clamping jaw 222;
[0053] Step 4: Adjust the set screw 224 along the Y-axis to ensure that the bubble gauge is horizontal and in contact with the surface of the target workpiece 4. Control the flipping assembly 1 to flip horizontally along the X-axis and the flipping sensor 55 to provide feedback on the flipping position signal.
[0054] Understandably, to ensure the reliability of the gripping and flipping robot and avoid increased operating resistance due to improper maintenance, the first servo motor 151 and the second servo motor 213 do not use torque mode. When gripping target workpieces 4 of different thicknesses or with large warping, resulting in changes in gripping depth, the gripping depth needs to be repeatedly calibrated. Each recalibration requires adjusting the adjusting block 52 on the guide block 51 so that the flipping sensor 55 is completely blocked when the gripping assembly 2 is in its initial position; and again, when the gripping assembly 2 is flipped 180°, the flipping sensor 55 is completely blocked again. This adjustment is repeated.
[0055] The solutions in the embodiments are not intended to limit the scope of protection of the present invention. All equivalent implementations or modifications that do not depart from the present invention are included in the scope of protection of the present invention.
Claims
1. A gripping and flipping robotic arm, characterized in that, include: The flip-up assembly (1) includes a housing (11) and an end cap (12), the end cap (12) being rotatable relative to the housing (11) along its central axis. A clamping assembly (2) is provided on the end cap (12) so that the clamping assembly (2) can be rotated when the end cap (12) is rotated. The clamping assembly (2) is used to clamp the target workpiece (4). A control assembly (3) is electrically connected to the flipping assembly (1) and the clamping assembly (2). The control assembly (3) is used to control the rotation of the end cap (12) of the flipping assembly (1) and to control the clamping assembly (2) to clamp or release the target workpiece (4). The flipping assembly (1) further includes: An angular contact bearing (13) is provided with an annular mounting groove on the inner side of the housing (11), and the angular contact bearing (13) is disposed on the inner side of the annular mounting groove; A rotating ring (14) is rotatably disposed on the inner ring of the angular contact bearing (13), and the end cap (12) is connected to the rotating ring (14) on the side near the opening of the annular mounting groove. The first drive assembly includes a first servo motor (151), a first synchronous pulley (152), a second synchronous pulley (153), and a synchronous belt (154). The first servo motor (151) is connected to the housing (11) through a tensioning structure (155). The first synchronous pulley (152) is connected to the output end of the first servo motor (151). The second synchronous pulley (153) is connected to the rotating ring (14) through a fixed shaft (156). The synchronous belt (154) is sleeved on the first synchronous pulley (152) and the second synchronous pulley (153) so that the first servo motor (151) can drive the rotating ring (14) to rotate. The first servo motor (151) is electrically connected to the control unit (3). The clamping assembly (2) includes: The clamping assembly (21) includes clamping blocks (211) and a drive transmission module. The end cover (12) is also provided with a guide rail (212). The two clamping blocks (211) are slidably disposed on the guide rail (212). The drive transmission module is used to drive the clamping blocks (211) to slide along the guide rail (212). The robotic arm assembly (22) is mounted on the clamping block (211). When the two clamping blocks (211) slide along the guide rail (212) to move closer or further away from each other, the robotic arm assembly (22) can clamp or release the target workpiece (4). The drive transmission module includes: The second servo motor (213) is disposed inside the housing (11), and the output end of the second servo motor (213) is rotatably inserted through the center of the end cover (12). A gear (214) and a rack (215) are provided. The gear (214) is connected to the output end of the second servo motor (213), and the rack (215) is disposed on the clamping block (211). The racks (215) on the two clamping blocks (211) extend towards each other along the sliding direction of the clamping blocks (211), and the racks (215) on the two clamping blocks (211) are respectively located on both sides of the gear (214) so that the rack (215) meshes with the gear (214). The second servo motor (213) is electrically connected to the control unit (3). Also includes: A guide block (51) is provided on the clamping block (211). The guide block (51) extends toward the edge of the end cap (12) along the sliding direction of the clamping block (211). An adjustment block (52) is provided on the guide block (51). Clamping sensors (53), two clamping sensors (53) are respectively disposed on both sides of the bottom of the housing (11); The sensor (54) is opened and disposed at the bottom of the housing (11); When the end cap (12) drives the clamping part (2) to flip to the 0° position or the 180° position, and the clamping block (211) is in the clamping state, the adjusting block (52) blocks the clamping sensor (53), and the clamping sensor (53) feeds back the clamping signal. When the end cap (12) drives the clamping part (2) to rotate to the 0° position or the 180° position, and the clamping block (211) is in the open state, the guide block (51) blocks the opening sensor (54), and the opening sensor (54) feeds back the opening signal; The clamping sensor (53) and the opening sensor (54) are electrically connected to the control unit (3).
2. The gripping and flipping robot according to claim 1, characterized in that, The flipping assembly (1) also includes: The cable chain (16) is provided with a cable chain mounting seat (161) on the rotating ring (14) and a cable chain fixing seat (162) on the housing (11). The housing (11) is also provided with a guide hole (163). The fixed end of the cable chain (16) is fixedly connected to the cable chain fixing seat (162). The moving end of the cable chain (16) passes through the guide hole (163) and extends to the outside of the housing (11) and connects with the cable chain mounting seat (161).
3. The gripping and flipping robot according to claim 1, characterized in that, Also includes: Two flip sensors (55) are connected to the top and bottom of the housing (11) respectively via an adjustment piece (551), the adjustment piece (551) being used to adjust the position of the flip sensors (55); When the clamping assembly (2) is in the initial position, the adjusting piece (551) is adjusted so that the guide block (51) blocks the flip sensor (55), and the flip sensor (55) provides feedback that the clamping assembly (2) is currently in the 0° position. When the end cap (12) causes the clamping assembly (2) to flip so that the guide block (51) blocks the flip sensor (55) again, the flip sensor (55) will provide feedback that the clamping assembly (2) is currently in the 180° position. The flip sensor (55) is electrically connected to the control unit (3).
4. The gripping and flipping robot according to claim 1, characterized in that, The clamping assembly (2) further includes: A fixed limiting block (23) and an adjusting limiting block (24) are provided, wherein the fixed limiting block (23) is disposed on one side of the end cover (12), and the adjusting limiting block (24) is movably disposed on the other side of the end cover (12); wherein the fixed limiting block (23) and the adjusting limiting block (24) are both located between the two clamping blocks (211), and the adjusting limiting block (24) has a radial displacement along the end cover (12); The size limiting block (25) and the guide block (51) are provided with a groove along the sliding direction of the clamping block (211). The size limiting block (25) is movably disposed at the bottom of the housing (11) and is slidably locked in the groove.
5. The gripping and flipping robot according to claim 1, characterized in that, Also includes: Workpiece sensors (56), two of the workpiece sensors (56) are respectively disposed at the bottom and top of the housing (11); When the clamping assembly (2) clamps the target workpiece (4), the target workpiece (4) blocks the workpiece sensor (56), and the workpiece sensor (56) provides feedback that the target workpiece (4) is clamped. The workpiece sensor (56) is electrically connected to the control unit (3).
6. The gripping and flipping robot according to claim 1, characterized in that, The robotic arm assembly (22) includes: Connecting rod (221), the two connecting rods (221) are respectively connected to the two clamping blocks (211); Clamping claws (222), two clamping claws (222) are respectively connected to two connecting rods (221), and the ends of the two clamping claws (222) are provided with relatively extended clamping protrusions (223), the clamping protrusions (223) are used to contact the target workpiece (4); An adjusting screw (224) is provided on the connecting rod (221), and the adjusting screw (224) is used to level the clamping jaw (222). The clamping claw (222) is provided with a first positioning edge (225); And / or, the robotic arm assembly (22) further includes a positioning fixture (226) disposed between the two gripping claws (222), and the positioning fixture (226) is provided with a second positioning edge (227).
Citation Information
Patent Citations
Substrate, chucking device and substrate cleaning apparatus
JP1999163094A
Wafer clamping mechanism
US20030094824A1