Automatic photoresist liquid bottle transfer equipment

Abstract

The application discloses a photoresist liquid bottle automatic transfer equipment, relates to the photoresist liquid bottle transfer technical field, and includes a moving base and a push handle, further includes a protection assembly;The protection assembly includes a breather pipe, a placing bin and a positioning plate;The placing bin is a hollow matrix body with openings on both sides, and is fixed on the top of the moving base, and the positioning plate is fixed in the placing bin;A plurality of placing grooves are uniformly formed in the positioning plate, and one photoresist liquid bottle is placed in each placing groove;The photoresist liquid bottle is a bottle body composed of a spherical body and a cylindrical body, the spherical body is in contact with the top of the moving base, an annular positioning capsule is fixed in each placing groove, and the spherical body is located in the positioning capsule;The breather pipe is used for inflating the positioning capsule, and the positioning capsule expands and abuts against the surface of the photoresist liquid bottle after being inflated;The photoresist liquid bottle can be fixed, kept stable during the transfer process, ensure that particles are uniformly distributed in the photoresist liquid bottle, and ensure the quality of use.

Description

Technical Field

[0001] This invention relates to the field of photoresist liquid bottle transfer technology, and in particular to an automatic photoresist liquid bottle transfer device. Background Technology

[0002] After the photoresist bottles are taken out of the warehouse, they are scanned and bound to the warehouse at the workbench. Then, they need to be transported to the de-icing cabinet by an automatic transfer device. Since most photoresist bottles have a spherical base, and the placement platform of the automatic transfer device is mostly a flat structure, the stability of the photoresist bottles when stacked is insufficient. Moreover, when the automatic transfer device passes through bumpy sections or has obstacles such as stones on the road, the automatic transfer device will shake more, resulting in uneven distribution of photoresist particles in the photoresist bottle and affecting the accuracy of use.

[0003] Therefore, in order to address the above-mentioned technical problems, it is necessary to provide an automatic transfer device for photoresist liquid bottles.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0005] This application provides an automatic transfer device for photoresist bottles, which solves the problem in the prior art where the photoresist bottle shakes significantly during the transfer process, resulting in uneven distribution of photoresist particles inside the bottle and affecting the accuracy of use.

[0006] This application provides an automatic transfer device for a photoresist liquid bottle, including a movable base and a pusher, as well as protective components; The protective components include a vent pipe, a storage compartment, and a positioning plate; The placement chamber is a rectangular body with a hollow interior and openings on both sides, and it is fixed to the top of the movable base, with the positioning plate fixed inside the placement chamber. The positioning plate has multiple placement slots evenly spaced, and each placement slot contains a photoresist liquid bottle. The photoresist bottle is composed of a sphere and a cylinder. The sphere contacts the top of the movable base. Each placement slot has a fixed annular positioning bladder, and the sphere is located in the positioning bladder. The vent tube is used to inflate the positioning bladder. After inflation, the positioning bladder expands and comes into contact with the surface of the photoresist liquid bottle.

[0007] Furthermore, one end of the vent pipe is connected to an air pump, and the other end of the vent pipe is connected to a distribution pipe, with a branch pipe fixed to the outlet end of the distribution pipe. The branch pipe has air supply pipes fixed at even intervals at the air outlet end, and the empty end of the air supply pipe extends into the positioning bladder, and the connection between the air supply pipe and the positioning bladder is airtight and fixed.

[0008] Furthermore, each of the photoresist bottles is fixed with a coded label, and a coding identification device is fixed inside the storage compartment. The coding identification device is an infrared scanner, which is used to identify the coded label.

[0009] Furthermore, the coding and identification device is located in front of the photoresist liquid bottle; An alarm device is fixed on the placement compartment.

[0010] Furthermore, the protective assembly also includes multiple support bases; The support base is fixed on the movable base, and one support base is located below a photoresist liquid bottle; The support base has an arc-shaped groove near the top of the photoresist bottle, and the arc-shaped groove abuts against the bottom of the sphere. The support base is used to support the photoresist bottle.

[0011] Furthermore, multiple annular tubes are fixed inside the positioning plate, with one annular tube located outside a placement groove, and the air outlet end of the branch tube connected to the annular tube. The air delivery pipe is fixed to the inner ring surface of the annular pipe, and the air jet pipe is fixed at the bottom of the positioning plate near the support seat. The air inlet of the jet pipe is connected to the annular pipe, and the air outlet of the jet pipe faces the light-blocking liquid bottle.

[0012] Furthermore, a support plate is fixed inside the arc-shaped groove of the support base, and the support plate abuts against the bottom of the sphere; Each of the aforementioned support bases has multiple drainage holes, and the top of the movable base has a through groove. A collection groove can be pulled out and connected to the through groove. The collection groove covers the area of ​​the placement groove, and the drainage holes communicate with the inside of the through groove.

[0013] Furthermore, a bracket is fixed to the side of the mobile base, and a transport component is fixed on the bracket; The transport assembly includes a guide rail and a lifting device; The guide rail is fixed on the bracket near the positioning plate. There are two guide rails, which are parallel to each other. A moving device is positioned between the two guide rails. Furthermore, the mobile device is capable of moving between two guide rails, and the lifting device is fixed at the bottom of the mobile device. The lifting device is a hydraulic cylinder and its free end is fixed with a fixed frame. Multiple clamping cylinders are fixed on the mounting frame.

[0014] Furthermore, one of the clamping cylinders is used to clamp a photoresist liquid bottle.

[0015] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages: With the protective components in place, the photoresist bottles are taken out of the warehouse and placed into the placement slots one by one. Air is pumped into the vent pipe to inflate the positioning bladder. The inflated positioning bladder tightly wraps around the spherical base of the photoresist bottle, which can fix the photoresist bottle in place and keep it stable during the transfer process. This ensures that the particles inside the photoresist bottle are evenly distributed and that the quality of use is guaranteed. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional structural diagram of the automatic transfer device for photoresist liquid bottles of the present invention; Figure 2 This is a schematic diagram showing the connection relationship between the branch pipe and the gas supply pipe of the automatic transfer device for photoresist liquid bottles of the present invention. Figure 3 This is a schematic diagram showing the structural relationship between the coding and identification device and the placement compartment of the automatic transfer device for photoresist liquid bottles of the present invention; Figure 4 This is a schematic diagram showing the connection relationship between the photoresist liquid bottle and the coded tag in the automatic transfer device for photoresist liquid bottles of the present invention. Figure 5 This is a front view cross-sectional structural diagram of the automatic transfer device for photoresist liquid bottles of the present invention; Figure 6 This is a schematic diagram showing the positional relationship between the positioning capsule and the photoresist liquid bottle in the automatic transfer device for photoresist liquid bottles of the present invention; Figure 7 This is a schematic diagram showing the positional relationship between the support base and the photoresist liquid bottle in the automatic transfer device for photoresist liquid bottles of the present invention. Figure 8 This is a three-dimensional structural diagram of the handling component of the automatic transfer device for photoresist liquid bottles of the present invention; Figure 9 This is a front view structural diagram of the moving device of the automatic transfer equipment for photoresist liquid bottles of the present invention; Figure 10 This is a side view of the transport component of the automatic transfer device for photoresist liquid bottles of the present invention.

[0018] In the diagram: 100, movable base; 110, collection trough; 120, bracket; 130, handling assembly; 131, guide rail; 1311, moving device; 132, lifting device; 133, fixed frame; 1331, clamping cylinder; 140, push handle; 200. Protective components; 210. Vent pipe; 211. Distribution pipe; 212. Branch pipe; 213. Air supply pipe; 214. Ring pipe; 220. Placement compartment; 221. Encoding and identification device; 230. Positioning plate; 231. Placement slot; 232. Positioning bladder; 233. Jet nozzle; 240. Support base; 241. Support plate; 250. Alarm device; 300. Optical resist liquid bottle; 310. Coded label. Detailed Implementation

[0019] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0020] like Figures 1 to 3 As shown, this application proposes an automatic transfer device for photoresist liquid bottles, including a movable base 100 and a pusher 140. The pusher 140 is fixed on the movable base 100. The user can push the movable base 100 by holding the pusher 140. The movable base 100 can flexibly turn and move autonomously. The movable base 100 is used to drive the device to move. It also includes a protective component 200. The protective component 200 includes a vent pipe 210, a placement compartment 220, and a positioning plate 230; The placement chamber 220 is a rectangular body with a hollow interior and openings on both sides, and it is fixed to the top of the movable base 100. The placement chamber 220 has an open design to facilitate the removal of the photoresist liquid bottle 300. The positioning plate 230 is fixed inside the placement chamber 220. The positioning plate 230 has multiple placement slots 231 evenly distributed on it, and a photoresist liquid bottle 300 is placed in one placement slot 231. The photoresist bottle 300 is a bottle body composed of a sphere and a cylinder. The cylinder is fixed on the top of the sphere, and the sphere is in contact with the top of the movable base 100. Each placement slot 231 is fixed with an annular positioning bladder 232, and the sphere is located in the positioning bladder 232. The vent tube 210 is used to inflate the positioning bladder 232. After inflation, the positioning bladder 232 expands and comes into contact with the surface of the photoresist liquid bottle 300.

[0021] It is worth noting that the expansion of the positioning capsule 232 can secure the photoresist bottle 300, preventing significant shaking during transfer and ensuring the effectiveness of the photoresist.

[0022] Specifically, such as Figures 1 to 3 As shown, one end of the vent pipe 210 is connected to an air pump, which is fixed on the movable base 100. The other end of the vent pipe 210 is connected to a distribution pipe 211, and a branch pipe 212 is fixed on the air outlet end of the distribution pipe 211. The branch pipe 212 has an air supply pipe 213 fixed at even intervals on its outlet end. The empty end of the air supply pipe 213 extends into the positioning bladder 232, and the connection between the air supply pipe 213 and the positioning bladder 232 is airtight and fixed.

[0023] It is easy to understand that multiple photoresist liquid bottles 300 can be positioned simultaneously by a single drive source, thereby reducing the cost of use.

[0024] In the above embodiment, after the photoresist liquid bottles 300 are taken out of the warehouse, they are placed into the placement slot 231 in sequence. After placement, air is introduced into the ventilation pipe 210 by an air pump. The gas enters the positioning bladder 232 through the air delivery pipe 213, inflating the positioning bladder 232. The inflated positioning bladder 232 tightly wraps around the spherical base of the photoresist liquid bottle 300, which can fix the photoresist liquid bottle 300 in place and can simultaneously fix multiple photoresist liquid bottles 300. The photoresist liquid bottle 300 is transferred to the vicinity of the return cabinet by the moving base 100. After reaching the designated position, air is extracted from the ventilation pipe 210 by an air pump, causing the positioning bladder 232 to contract and reset, making it easy to take out the photoresist liquid bottle 300. This ensures stability during the transfer process, ensures uniform particle distribution in the photoresist liquid bottle 300, and ensures the quality of use. In some embodiments of this application, such as Figure 4 and Figure 5 As shown, each of the photoresist liquid bottles 300 is fixed with an coded label 310, and an coded identification device 221 is fixed inside the placement compartment 220. The coded identification device 221 is an infrared scanner and is used to identify the coded label 310.

[0025] It should be noted that the encoding and identification device 221 is electrically connected to the terminal device via a circuit. The encoding and identification device 221 has a built-in set of infrared transmitter and receiver. When the infrared transmitter scans the encoding tag 310, the information on the encoding tag 310 is received by the receiver and converted into an electrical signal. After being processed by the internal decoder, a string of digital signals is output and transmitted to the mobile device. The terminal device analyzes the signal to determine whether the information on the encoding tag 310 is correct, thereby realizing the identification of the encoding tag 310.

[0026] Specifically, such as Figure 4 and Figure 5 As shown, the coding and identification device 221 is located in front of the photoresist liquid bottle 300; An alarm device 250 is fixed on the placement compartment 220. The alarm device 250 is electrically connected to the terminal equipment. When the coded label 310 on the photoresist liquid bottle 300 is identified and an abnormality occurs, the alarm device 250 will issue an alarm to remind the surrounding staff to check in time.

[0027] It is worth noting that multiple photoresist bottles 300 are simultaneously detected and identified by the coding and identification device 221.

[0028] Based on the above embodiments, after the photoresist bottle 300 is placed, the coding and identification device 221 can scan and identify the coding label 310 on the photoresist bottle 300. When the information scanned by the coding and identification device 221 is analyzed on the terminal device and an anomaly is found, the alarm device 250 will issue an alarm in time to notify nearby staff to check the abnormal information in time. This will help to identify the problems with the photoresist bottle 300 in a timely manner, reduce the burden of subsequent testing, and ensure the quality of photoresist bottle 300 replacement.

[0029] In some embodiments of this application, specifically, such as Figures 6 to 8 As shown, the protective assembly 200 also includes a plurality of support bases 240; The support base 240 is fixed on the movable base 100, and one support base 240 is located below a photoresist liquid bottle 300; The support base 240 has an arc-shaped groove near the top of the photoresist liquid bottle 300, and the arc-shaped groove abuts against the bottom of the sphere. The support base 240 is used to support the photoresist liquid bottle 300.

[0030] It is easy to understand that the support base 240 can increase the contact with the bottom of the photoresist liquid bottle 300, making the photoresist liquid bottle 300 more secure.

[0031] Specifically, such as Figures 6 to 8 As shown, multiple annular tubes 214 are fixed inside the positioning plate 230. One annular tube 214 is located outside a placement groove 231, and the air outlet end of the branch tube 212 is connected to the annular tube 214. The air delivery pipe 213 is fixed to the inner ring surface of the annular pipe 214, and the air jet pipe 233 is fixed at the bottom of the positioning plate 230 near the support base 240. The air inlet of the jet pipe 233 is connected to the annular pipe 214, and the air outlet of the jet pipe 233 faces the light-blocking liquid bottle 300.

[0032] It should be noted that after the photoresist bottle 300 is taken out of the warehouse, it needs to be placed in a re-temperature cabinet for de-icing and settling. The gas sprayed from the jet pipe 233 can pre-de-ic the surface of the photoresist bottle 300. In addition, the photoresist bottle 300 is at a low temperature when it is taken out of the warehouse. After the photoresist bottle 300 comes into contact with the outside air, water droplets are easily formed on its surface, which is more obvious in hot weather. This results in more water accumulation in the placement chamber 220 during the transfer of the photoresist bottle 300. Frequent cleaning of the water accumulation increases the time and reduces the efficiency of the transfer.

[0033] Specifically, such as Figures 6 to 8 As shown, a support plate 241 is fixed in the arc-shaped groove of the support base 240. The support plate 241 abuts against the bottom of the sphere. That is to say, there is a gap between the support base 240 and the photoresist liquid bottle 300, which makes it easy for water droplets to fall into the support base 240. Each of the support bases 240 has multiple drainage holes. The top of the movable base 100 has a through groove, and a collection groove 110 can be pulled out and connected to the through groove. The collection groove 110 covers the area of ​​the placement groove 231, and the drainage holes are connected to the inside of the through groove.

[0034] It is worth noting that the water droplets on the photoresist bottle 300 can fall into the support base 240 and enter the collection tank 110 in the through-slot through the drain hole. The water droplets generated at the photoresist bottle 300 are collected in a concentrated manner through the collection tank 110, which facilitates unified treatment and prevents water accumulation in the placement chamber 220.

[0035] Based on the above embodiments, when air is introduced into the positioning bladder 232 through the vent pipe 210, air can be simultaneously introduced into the jet pipe 233 through the annular pipe 214. The gas ejected from the jet pipe 233 contacts the surface of the photoresist liquid bottle 300. Under the action of gravity, water droplets on the surface of the photoresist liquid bottle 300 are introduced into the support base 240. The water droplets enter the collection tank 110 through the water leakage hole of the support base 240, avoiding water accumulation in the placement chamber 220 and facilitating the unified treatment of accumulated water, thereby improving the efficiency of transfer.

[0036] In some embodiments of this application, such as Figure 9 As shown, a bracket 120 is fixed to the side of the mobile base 100, and a handling component 130 is fixed on the bracket 120. The handling component 130 is used to handle the photoresist liquid bottle 300, which speeds up the transfer and improves the efficiency of product transfer. The transport assembly 130 includes a guide rail 131 and a lifting device 132; The guide rail 131 is fixed on the bracket 120 near the positioning plate 230. There are two guide rails 131, which are parallel to each other. A moving device 1311 is positioned between the two guide rails 131. The mobile device 1311 can move between two guide rails 131. The lifting device 132 is fixed to the bottom of the mobile device 1311. The lifting device 132 is a hydraulic cylinder and its empty end is fixed with a fixed frame 133. Multiple clamping cylinders 1331 are fixed on the fixed frame 133. The fixed frame 133 is located above one side of the movable base 100, which facilitates the handling of the light-blocking liquid bottle 300.

[0037] Specifically, such as Figure 9 As shown, one of the clamping cylinders 1331 is used to clamp a photoresist liquid bottle 300.

[0038] The five horizontally distributed placement slots 231 on the positioning plate 230 form a group, and the five light-blocking liquid bottles 300 form a group. The positioning plate 230 has five sets of placement slots 231 and light resist liquid bottles 300 in the placement slots 231; There are multiple branch pipes 212, and one branch pipe 212 is located in front of a set of placement slots 231.

[0039] It is easy to understand that multiple clamping cylinders 1331 can move a group of photoresist liquid bottles 300 at a time, saving the time of loading and unloading back and forth and improving the transfer efficiency.

[0040] In the above embodiment, after a group of photoresist bottles 300 are arranged, the driving moving device 1311 moves within the guide rail 131, moving the fixing frame 133 above the photoresist bottles 300. Then, the lifting device 132 drives the fixing frame 133 to descend, with one photoresist bottle 300 located in a clamping cylinder 1331. The clamping cylinder 1331 clamps the group of photoresist bottles 300, and the moving device 1311 moves the group of photoresist bottles 300 into a set of placement slots 231. Repeating the above operation can realize the automated loading of photoresist bottles 300. Unloading can be done through the conveying component 130, which can realize the automated loading and unloading of photoresist bottles 300 while conveying them, thereby improving processing efficiency.

[0041] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0042] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. An automatic transfer device for photoresist liquid bottles, comprising a movable base (100) and a pusher (140), characterized in that, It also includes a protective component (200); the protective component (200) includes a vent pipe (210), a placement chamber (220), and a positioning plate (230); the placement chamber (220) is a rectangular body with a hollow interior and openings on both sides, and it is fixed to the top of the movable base (100), and the positioning plate (230) is fixed inside the placement chamber (220); the positioning plate (230) has multiple placement slots (231) evenly distributed on it, and one placement slot (231) contains... A photoresist liquid bottle (300) is placed there; the photoresist liquid bottle (300) is a bottle body composed of a sphere and a cylinder, the sphere is in contact with the top of the movable base (100), and an annular positioning bladder (232) is fixed in each placement slot (231), the sphere is located in the positioning bladder (232); the vent tube (210) is used to inflate the positioning bladder (232), and the positioning bladder (232) expands and abuts against the surface of the photoresist liquid bottle (300) after being inflated.

2. The automatic transfer device for photoresist liquid bottles as described in claim 1, characterized in that, One end of the ventilation tube (210) is connected to the air pump, and the other end of the ventilation tube (210) is connected to the distribution tube (211). A branch tube (212) is fixed on the air outlet end of the distribution tube (211). An air supply tube (213) is fixed on the air outlet end of the branch tube (212). The empty end of the air supply tube (213) extends into the positioning bladder (232), and the connection between the air supply tube (213) and the positioning bladder (232) is airtight and fixed.

3. The automatic transfer device for photoresist liquid bottles as described in claim 1, characterized in that, Each of the photoresist liquid bottles (300) is fixed with an coded label (310), and an coded identification device (221) is fixed inside the placement compartment (220). The coded identification device (221) is an infrared scanner and is used to identify the coded label (310).

4. The automatic transfer device for photoresist liquid bottles as described in claim 3, characterized in that, The coding and identification device (221) is located in front of the photoresist liquid bottle (300), and the photoresist liquid bottles (300) are placed in each group of placement slots (231) in order from farthest to near the coding and identification device (221); An alarm device (250) is fixed on the placement compartment (220).

5. The automatic transfer device for photoresist liquid bottles as described in claim 1, characterized in that, The protective assembly (200) also includes a plurality of support bases (240); the support bases (240) are fixed on the movable base (100), and one support base (240) is located below a photoresist liquid bottle (300); The support base (240) has an arc-shaped groove near the top of the photoresist bottle (300), and the arc-shaped groove abuts against the bottom of the sphere. The support base (240) is used to support the photoresist bottle (300).

6. The automatic transfer device for photoresist liquid bottles as described in claim 2, characterized in that, The positioning plate (230) has multiple annular tubes (214) fixed inside. One annular tube (214) is located outside a placement groove (231), and the air outlet of the branch tube (212) is connected to the annular tube (214). The air supply pipe (213) is fixed on the inner ring surface of the annular pipe (214), and the bottom of the positioning plate (230) is fixed with a jet pipe (233) near the support base (240); the air inlet end of the jet pipe (233) is connected to the annular pipe (214), and the air outlet end of the jet pipe (233) faces the light resist liquid bottle (300).

7. The automatic transfer device for photoresist liquid bottles as described in claim 5, characterized in that, A support plate (241) is fixed in the arc-shaped groove of the support base (240), and the support plate (241) abuts against the bottom of the sphere; each support base (240) has multiple drainage holes, and the top of the movable base (100) has a through groove, and a collection groove (110) can be pulled out and connected in the through groove. The collection groove (110) covers the area of ​​the placement groove (231), and the drainage holes are connected to the inside of the through groove.

8. The automatic transfer device for photoresist liquid bottles as described in claim 1, characterized in that, The movable base (100) has a bracket (120) fixed on its side, and a conveying component (130) is fixed on the bracket (120). The conveying component (130) includes a guide rail (131) and a lifting device (132). The guide rail (131) is fixed on the bracket (120) near the positioning plate (230). There are two guide rails (131), which are parallel to each other. A moving device (1311) is positioned between the two guide rails (131).

9. The automatic transfer device for photoresist liquid bottles as described in claim 8, characterized in that, The moving device (1311) can move between two guide rails (131), and the lifting device (132) is fixed at the bottom of the moving device (1311). The lifting device (132) is a hydraulic cylinder and its empty end is fixed with a fixed frame (133); multiple clamping cylinders (1331) are fixed on the fixed frame (133).

10. The automatic transfer device for photoresist liquid bottles as described in claim 9, characterized in that, One of the clamping cylinders (1331) is used to clamp a photoresist bottle (300).

Images