A cavity plug valve assembly

Abstract

This invention discloses a cavity slide gate valve assembly, comprising a slide gate valve housing and a sealing plate that mates with the upper opening of the slide gate valve housing. A magnetic component is disposed between the sealing plate and the slide gate valve housing. A vertical plate is connected to the side of the sealing plate facing the inner cavity of the slide gate valve housing via an elastic element. The vertical plate has a through hole for the magnetic poles of the magnetic component to pass through. Since the sealing plate and the vertical plate are connected by the elastic element and are not subjected to external force, they maintain a relatively static overall translational state, allowing the sealing plate to smoothly and accurately reach the sealing position. Subsequently, the magnetic component is energized, generating a repulsive magnetic field. Under the action of this magnetic field force, the sealing plate overcomes the constraint force of the elastic element, produces a slight displacement relative to the vertical plate, and finally adheres tightly to the inner wall of the slide gate valve housing. At this time, the vertical plate provides a reverse support force to the sealing plate through the elastic element, thereby converting the repulsive force of the magnetic field into a stable static pressure of the sealing plate on the inner wall of the housing, achieving a seal.

Description

Technical Field

[0001] This invention relates to the field of cavity sealing technology, and in particular to a cavity slide valve assembly. Background Technology

[0002] A slide gate valve is a type of valve that controls the opening and closing of a cavity by the translation of a sealing plate. It is widely used in vacuum coating, semiconductor manufacturing, metallurgy, chemical industry, and other fields. One of the core performance indicators of a slide gate valve is its sealing performance, that is, whether the sealing plate can reliably fit tightly against the shell and form an effective seal after it is in position.

[0003] Currently, traditional slide gate valves mainly employ the following two methods for sealing plate clamping: Using cylinders to push the sealing plate against the housing has significant drawbacks in practical applications: First, to ensure uniform force on the sealing plate, multiple cylinders are often needed to push it synchronously. However, the synchronicity of multiple cylinders is difficult to guarantee, and some cylinders may lead or lag behind, resulting in the sealing plate not fully adhering to the housing and causing air leakage. Second, the cylinders themselves are large and heavy, occupying a large installation space and increasing the overall weight of the equipment, thereby increasing the manufacturing cost and installation difficulty.

[0004] A ramp-type mechanical limiter is used to ensure the sealing plate is tightly pressed against the housing for a seal. This method involves incorporating interlocking ramp structures on the housing or sealing plate. When the sealing plate moves to near the closed position, the ramp structure guides it, pressing it against the housing. However, the ramp-type mechanical limiter structure is complex, requiring high precision in both machining and fitting of the ramps. It also demands significant space and a larger number of parts, increasing both initial design and manufacturing costs and subsequent maintenance and upkeep. Summary of the Invention

[0005] In view of this, the present invention addresses the deficiencies of the existing technology, and its main objective is to provide a cavity slide valve assembly that overcomes the shortcomings of traditional cylinder-driven methods, such as poor synchronization and heavy weight, as well as the complex structure and difficult maintenance of ramp-type mechanical limiting methods.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a cavity slide valve assembly, including a slide valve housing and a sealing plate that cooperates with the upper door opening of the slide valve housing, wherein a magnetic component is provided between the sealing plate and the slide valve housing; A vertical plate is connected to the side of the sealing plate facing the inner cavity of the slide valve body via an elastic element. The vertical plate has a through hole for the magnetic poles in the magnetic assembly to pass through. The uprights are connected to a driving component; When the door is closed, the drive unit drives the upright plate to move the sealing plate horizontally to close the door opening of the slide valve housing. The magnetic component is energized to generate a repulsive magnetic field, which pushes the sealing plate to press against the inner wall of the slide valve housing to form a seal.

[0007] Furthermore, the magnetic component includes an electromagnet and a permanent magnet arranged opposite each other, and the electromagnet and the permanent magnet correspond to the position of the through hole.

[0008] Furthermore, a permanent magnet is installed on the side of the sealing plate facing the vertical plate, and an electromagnet is installed on the outer wall of the slide valve housing, with the magnetic end of the electromagnet extending into the inner cavity of the slide valve housing.

[0009] Furthermore, the driving components include a winch and a steel cable, with one end of the steel cable connected to the vertical plate and the other end connected to the drum of the winch.

[0010] Furthermore, at least two winches are provided, respectively arranged on the left and right sides of the slide valve housing. The steel cables on the two winches extend along the length of the slide valve housing, and the ends of the two steel cables are connected to the center position of the same end side of the vertical plate.

[0011] Furthermore, one end of the upright plate is provided with multiple first guide members arranged at equal intervals along the length direction, and steel cables are laid on each of the first guide members.

[0012] Furthermore, multiple second guide members are respectively provided on the opposite side walls of the inner cavity of the slide gate valve housing. Each second guide member is arranged at equal intervals along the length direction of the slide gate valve housing, and at least some of the second guide members abut against the side wall of the vertical plate.

[0013] Furthermore, a sliding assembly is provided at the bottom of the inner cavity of the slide valve housing. The end of the upright plate opposite to the first guide member is supported on the sliding assembly and can slide back and forth along the length of the slide valve housing.

[0014] Furthermore, the elastic element includes a bearing plate disposed on the sealing plate, a cylinder disposed on the upright plate, and a rod slidably inserted into the cylinder. One end of the rod is connected to the bearing plate, and a spring is disposed between the other end of the rod and the cylinder. The spring is used to apply an elastic force to the rod in the direction of the bearing plate.

[0015] Furthermore, a sealing ring is provided on the inner wall of the slide gate valve body around the gate opening. The sealing ring is used to abut against the sealing plate when the sealing plate is pressed against the inner wall of the slide gate valve body.

[0016] Compared with the prior art, the present invention has obvious advantages and beneficial effects. Specifically, as can be seen from the above technical solution, when the door closing action is performed, the driving component first drives the upright plate, which in turn moves the sealing plate horizontally until the sealing plate completely covers and seals the door opening of the slide valve housing. During this translation process, since the sealing plate and the upright plate are connected by an elastic element and are not subjected to external force, they maintain a relatively static overall translation state, allowing the sealing plate to reach the sealing position smoothly and accurately. Subsequently, the magnetic component is energized, generating a repulsive magnetic field. Under the action of this magnetic field force, the sealing plate overcomes the constraint force of the elastic element, produces a small displacement relative to the upright plate, and finally adheres tightly to the inner wall of the slide valve housing. At this time, the upright plate provides a reverse support force to the sealing plate through the elastic element, thereby converting the repulsive force of the magnetic field into a stable static pressure of the sealing plate on the inner wall of the housing, thus achieving sealing.

[0017] To more clearly illustrate the structural features and effects of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0018] Figure 1 This is a perspective view of Embodiment 1 of the present invention.

[0019] Figure 2 This is a cross-sectional view of the top of the gate valve housing according to Embodiment 1 of the present invention.

[0020] Figure 3 This is Embodiment 1 of the present invention. Figure 2 Enlarged view of point A.

[0021] Figure 4 This is a side sectional view of the gate valve housing according to Embodiment 1 of the present invention.

[0022] Figure 5 This is a diagram illustrating the magnetic component of Embodiment 1 of the present invention.

[0023] Figure 6 This is a diagram illustrating the elastic element of Embodiment 1 of the present invention.

[0024] Explanation of reference numerals in the attached diagram: Slide valve body 10; Elastic component a, bearing plate a1, cylinder a2, rod a3, spring a4; Sealing plate 20; Magnetic component 30, electromagnet 31, permanent magnet 32; Vertical plate 40, through hole 41; Drive component 50, winch 51, steel cable 52; First guide component 60; Second guide component 70; Sliding group 80; 90mm sealing ring. Detailed Implementation

[0025] Please refer to Figure 1-6 As shown, it illustrates the specific structure of a preferred first embodiment of the present invention, which is a cavity slide valve assembly, including a slide valve housing 10 and a sealing plate 20 that cooperates with the door opening on the slide valve housing 10. A magnetic component 30 is provided between the sealing plate 20 and the slide valve housing 10. The sealing plate 20 is connected to the upright plate 40 on the side facing the inner cavity of the slide valve housing 10 via an elastic element a. The upright plate 40 has a through hole 41 for the magnetic poles in the magnetic assembly 30 to pass through. The upright plate 40 is connected to the driving component 50; When the door is closed, the drive unit 50 drives the upright plate 40 to move the sealing plate 20 to close the door opening of the slide valve housing 10. The magnetic component 30 is energized to generate a repulsive magnetic field, which pushes the sealing plate 20 to stick to the inner wall of the slide valve housing 10 to form a seal. When the door closing action is performed, the drive unit 50 first drives the upright plate 40, which in turn moves the sealing plate 20 horizontally until the sealing plate 20 completely covers and seals the door opening of the slide valve housing 10. During this translation process, since the sealing plate 20 and the upright plate 40 are connected by the elastic element a and are not subjected to external force, they maintain a relatively static overall translation state, allowing the sealing plate 20 to reach the sealing position smoothly and accurately. Subsequently, the magnetic component 30 is energized, generating a repulsive magnetic field. Under the action of this magnetic field force, the sealing plate 20 overcomes the constraint force of the elastic element a, produces a small displacement relative to the upright plate 40, and finally adheres tightly to the inner wall of the slide valve housing 10. At this time, the upright plate 40 provides a reverse support force to the sealing plate 20 through the elastic element a, thereby converting the repulsive force of the magnetic field into a stable static pressure of the sealing plate 20 on the inner wall of the housing 10, thus achieving a seal.

[0026] It should be noted that, similarly, when the magnetic component 30 is de-energized, the sealing plate 20 is in contact with the upright plate 40 under the reset of the elastic element a, and the door is opened.

[0027] like Figure 5 As shown, exemplarily, the magnetic assembly 30 includes an electromagnet 31 and a permanent magnet 32 ​​disposed opposite to each other, and the electromagnet 31 and the permanent magnet 32 ​​correspond to the positions of the through hole 41. By extending the magnetic end of the electromagnet 31 into the through hole 41, the vertical plate 40 will not interfere with the electromagnet 31 and / or the permanent magnet 32 ​​during translation.

[0028] like Figure 4As shown, for example, the permanent magnet 32 ​​is mounted on the side of the sealing plate 20 facing the vertical plate 40, and the electromagnet 31 is mounted on the outer wall of the slide valve housing 10, with the magnetic end of the electromagnet 31 extending into the inner cavity of the slide valve housing 10. When the electromagnet 31 is energized and generates a repulsive force, this repulsive force acts directly on the permanent magnet 32, thereby directly driving the sealing plate 20 to move towards the inner wall of the housing 10. No intermediate transmission components are needed in the entire magnetic force transmission path, resulting in a rapid response and low energy loss, thus improving the response speed and clamping efficiency of the sealing action.

[0029] In addition, the main body of the electromagnet 31 is located outside the housing, which facilitates wiring, heat dissipation and maintenance, and reduces the risk of contamination of electrical components in vacuum or high-cleanliness environments. Furthermore, after the magnetic end of the electromagnet 31 extends into the inner cavity, the distance between it and the permanent magnet 32 ​​is shortened, reducing the air gap in the magnetic circuit. This allows for the generation of a greater repulsive force under the same input power, thereby reducing energy consumption and equipment costs.

[0030] like Figure 2 As shown, exemplarily, the drive unit 50 includes a winch 51 and a steel cable 52. One end of the steel cable 52 is connected to the vertical plate 40, and the other end is connected to the drum of the winch 51. By rotating the drum of the winch 51 in both directions, the steel cable 52 can be wound and unwound, thereby driving the vertical plate 40 to reciprocate along the length of the slide valve housing 10. Compared with the traditional cylinder drive method, the transmission structure of the winch 51 and the steel cable 52 is simpler, eliminating the need for a complex air circuit system and synchronous control device, reducing the number of parts, lowering the overall size and weight, and simplifying the installation and maintenance process.

[0031] like Figure 2 As shown, for example, at least two winches 51 are provided, respectively arranged on the outer sides of the left and right ends of the slide valve housing 10. The steel cables 52 on the two winches 51 extend along the length direction of the slide valve housing 10, and the ends of the two steel cables 52 are connected to the center position of the same end side of the upright plate 40. By arranging the two winches 51 on the outer sides of the left and right ends of the housing 10, the two winches 51 can alternately perform winding and unwinding actions. That is, one winch winds up and pulls the upright plate 40 to that side, while the other winch simultaneously unwinds and releases the steel cable. Thus, the reciprocating translation of the upright plate 40 (i.e., the opening and closing actions) can be achieved by the forward and reverse drive of the winches, without the need for an additional reset mechanism or bidirectional drive element, simplifying the structure of the drive system.

[0032] It should be noted that the ends of both steel cables 52 are connected to the same center position on the side of the vertical plate 40, so that the traction force of the two winches 51 on the vertical plate 40 acts on the same point. No matter which direction the vertical plate 40 moves, the direction of the traction force it receives coincides with that point, and no deflection torque is generated relative to the center of the vertical plate 40.

[0033] like Figure 3 As shown, for example, a plurality of first guide members 60 are arranged at equal intervals along the length direction at one end of the upright plate 40, and the steel cable 52 is laid on each of the first guide members 60. The plurality of first guide members 60 are arranged at equal intervals along the length direction of the upright plate 40, so that the support spacing of each guide member on the steel cable 52 is uniform and consistent, and the span of the steel cable 52 between each adjacent pair of guide members is equal. Thus, the sag and tension of the steel cable 52 are evenly distributed in each span range, avoiding the steel cable sagging or vibration due to excessive span, and also avoiding the steel cable bending angle being too large due to excessive span, which would increase frictional resistance.

[0034] like Figure 3 As shown, for example, multiple second guide members 70 are respectively provided on the opposite side walls of the inner cavity of the slide valve housing 10. The second guide members 70 are arranged at equal intervals along the length direction of the slide valve housing 10, and at least some of the second guide members 70 abut against the side wall of the upright plate 40. By providing multiple second guide members 70 on the opposite side walls of the inner cavity of the housing 10, and making at least some of the second guide members 70 abut against the side wall of the upright plate 40, guide constraints extending along the translation direction are formed on both the left and right sides of the upright plate 40. The guide constraints work together with the sliding group 80 to make the bottom and sides of the upright plate 40 simultaneously have real-time limiting, effectively limiting the offset and sway of the upright plate 40 in the direction perpendicular to its translation, ensuring that the upright plate 40 always moves in a straight reciprocating motion along the length direction of the housing 10, and avoiding the sealing plate 20 from being misaligned with the door opening due to the tilt of the upright plate, which would result in inaccurate coverage or sealing failure.

[0035] like Figure 4 As shown, for example, a sliding assembly 80 is provided at the bottom of the inner cavity of the slide valve housing 10. The end of the upright plate 40 facing away from the first guide member 60 is supported on the sliding assembly 80 and can slide back and forth along the length of the slide valve housing 10. By supporting one end of the upright plate 40 on the sliding assembly 80 at the bottom of the inner cavity of the housing 10, the sliding assembly 80 provides stable vertical support for the upright plate 40, bearing the gravity load of the upright plate 40 and the sealing plate 20 and other components connected to it. At the same time, the upright plate 40 can slide freely back and forth along the sliding assembly 80 in the length of the housing 10, realizing gravity support and low-resistance guidance for the translational movement of the upright plate 40. Compared with the scheme that relies solely on guide rails or suspension, this arrangement directly transmits the gravity load to the bottom of the housing, with a clear and stable force path, avoiding the sag or tilt of the upright plate and its connecting components due to gravity.

[0036] like Figure 6As shown, exemplarily, the elastic element a includes a bearing plate a1 disposed on the sealing plate 20, a cylinder a2 disposed on the upright plate 40, and a rod a3 slidably inserted inside the cylinder a2. One end of the rod a3 is connected to the bearing plate a1, and a spring a4 is disposed between the other end of the rod a3 and the cylinder a2. The spring a4 is used to apply an elastic force to the rod a3 in the direction of the bearing plate a1. By fixing one end of the rod a3 to the bearing plate a1 and cooperating with the spring a4 inside the cylinder a2, a floating connection is formed between the sealing plate 20 and the upright plate 40. When the electromagnet 31 is not energized, the spring a4 applies a continuous elastic tension to the sealing plate 20 through the rod a3 and the bearing plate a1, keeping the sealing plate 20 always in close contact with the upright plate 40 and in a retracted state, simplifying the control logic and reducing energy consumption.

[0037] It should be noted that when the electromagnet 31 is energized and generates a repulsive force to push the sealing plate 20 towards the inner wall of the housing 10, the sealing plate 20 drives the bearing plate a1 and the rod a3 to move together. The rod a3 slides inside the cylinder a2 and compresses the spring a4. During this process, the repulsive force overcomes the elastic force of the spring a4 and does work, and the spring a4 is compressed and stores energy. When the electromagnet 31 is de-energized, the spring a4 releases the stored elastic potential energy, and pushes the sealing plate 20 to move in the opposite direction through the rod a3 and the bearing plate a1, automatically detaching from the inner wall of the housing 10 and resetting to the retracted state of being tightly attached to the vertical plate 40.

[0038] like Figure 4 As shown, for example, a sealing ring 90 is provided on the inner wall of the slide gate valve housing 10 around the door opening. The sealing ring 90 is used to abut against the sealing plate 20 when the sealing plate 20 is pressed against the inner wall of the slide gate valve housing 10. By providing the sealing ring 90 on the inner wall of the slide gate valve housing 10 and arranging it around the door opening, when the sealing plate 20 is pushed against the inner wall of the housing 10 by the magnetic component 30, the sealing plate 20 directly abuts against the sealing ring 90 and causes it to undergo elastic compression deformation. This compression deformation fills the microscopic gap between the sealing plate 20 and the inner wall of the housing 10, forming a reliable airtight or vacuum sealing interface.

[0039] In summary, the key design focus of this invention is; When the door closing action is performed, one winch 51 of the drive unit 50 starts, and its drum rotates forward to wind up the steel cable 52, while the other winch 51 unwinds synchronously. The steel cable 52 pulls the upright plate 40 through each of the first guide members 60, causing the sealing plate 20 to move horizontally together. During this translation process, since the sealing plate 20 and the upright plate 40 are connected by the elastic member a and the electromagnet 31 is not energized, the sealing plate 20 is pressed tightly against the upright plate 40 under the elastic force of the spring a4, and the two maintain a relatively static overall translation state, so that the sealing plate 20 can reach the sealing position smoothly and accurately until the sealing plate 20 completely covers and seals the door opening of the slide valve housing 10; Subsequently, the electromagnet 31 in the magnetic component 30 is energized, generating a magnetic field that repels the permanent magnet 32. Under the action of this magnetic force, the sealing plate 20 overcomes the constraint force of the spring a4 in the elastic element a, causing the bearing plate a1 and the rod a3 to move relative to the vertical plate 40. The rod a3 slides within the cylinder a2 and compresses the spring a4, causing the sealing plate 20 to undergo a slight displacement relative to the vertical plate 40, and finally adheres tightly to the inner wall of the slide valve housing 10. At this time, the sealing plate 20 abuts against the sealing ring 90 and causes it to undergo elastic compression deformation, forming a reliable seal. Simultaneously, the vertical plate 40 provides a reverse support force to the sealing plate 20 through the elastic element a, thereby converting the repulsive force of the magnetic field into a stable static pressure of the sealing plate 20 on the inner wall of the housing 10, achieving a seal.

[0040] When the door opening action is performed, the electromagnet 31 is de-energized, and the magnetic force disappears. The compressed spring a4 releases its stored elastic potential energy, which pushes the sealing plate 20 to move in the opposite direction through the rod a3 and the bearing plate a1, causing the sealing plate 20 to detach from the inner wall of the housing 10 and return to its retracted state, tightly pressed against the upright plate 40. Subsequently, the winch 51 in the drive unit 50 rotates in the opposite direction, pulling the upright plate 40 through the steel cable 52 and causing the sealing plate 20 to move horizontally, thus removing the sealing plate 20 from the door opening and completing the door opening action.

[0041] The above description is merely a preferred embodiment of the present invention and does not constitute any limitation on the technical scope of the present invention. Therefore, any minor modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention shall still fall within the scope of the technical solution of the present invention.

Claims

1. A cavity slide gate valve assembly, comprising a slide gate valve housing (10) and a sealing plate (20) that mates with an opening on the slide gate valve housing (10), characterized in that: A magnetic component (30) is provided between the sealing plate (20) and the gate valve housing (10). The sealing plate (20) is connected to a vertical plate (40) on the side facing the inner cavity of the slide valve housing (10) via an elastic element (a). The vertical plate (40) has a through hole (41) for the magnetic poles in the magnetic assembly (30) to pass through. The upright plate (40) is connected to a driving component (50); When the door is closed, the drive unit (50) drives the upright plate (40) to move the sealing plate (20) to close the door opening of the gate valve housing (10). The magnetic component (30) is energized to generate a repulsive magnetic field, which pushes the sealing plate (20) to stick to the inner wall of the gate valve housing (10) to form a seal.

2. The cavity slide gate valve assembly according to claim 1, characterized in that: The magnetic component (30) includes an electromagnet (31) and a permanent magnet (32) arranged opposite to each other, and the electromagnet (31) and the permanent magnet (32) correspond to the positions of the through hole (41).

3. The cavity slide gate valve assembly according to claim 2, characterized in that: The permanent magnet (32) is installed on the side of the sealing plate (20) facing the vertical plate (40), the electromagnet (31) is installed on the outer wall of the gate valve housing (10), and the magnetic end of the electromagnet (31) extends into the inner cavity of the gate valve housing (10).

4. The cavity slide gate valve assembly according to claim 1, characterized in that: The drive unit (50) includes a winch (51) and a steel cable (52), one end of which is connected to the vertical plate (40) and the other end is connected to the drum of the winch (51).

5. The cavity slide gate valve assembly according to claim 4, characterized in that: At least two winches (51) are provided, respectively arranged on the left and right sides of the slide valve housing (10). The steel cables (52) on the two winches (51) extend along the length direction of the slide valve housing (10), and the ends of the two steel cables (52) are connected to the center position of the same side of the vertical plate (40).

6. A cavity slide gate valve assembly according to claim 4 or 5, characterized in that: One end of the upright plate (40) is provided with a plurality of first guide members (60) arranged at equal intervals along the length direction, and the steel cable (52) is laid on each of the first guide members (60).

7. A cavity slide gate valve assembly according to claim 4 or 5, characterized in that: Multiple second guide members (70) are respectively provided on the opposite side walls of the inner cavity of the slide valve housing (10). Each second guide member (70) is arranged at equal intervals along the length direction of the slide valve housing (10), and at least some of the second guide members (70) abut against the side wall of the upright plate (40).

8. A cavity slide gate valve assembly according to claim 6, characterized in that: The bottom of the inner cavity of the slide valve housing (10) is provided with a sliding assembly (80). The end of the upright plate (40) away from the first guide member (60) is supported on the sliding assembly (80) and can slide back and forth along the length direction of the slide valve housing (10).

9. The cavity slide gate valve assembly according to claim 1, characterized in that: The elastic element (a) includes a bearing plate (a1) disposed on the sealing plate (20), a cylinder (a2) disposed on the upright plate (40), and a rod (a3) ​​slidably passing through the cylinder (a2). One end of the rod (a3) ​​is connected to the bearing plate (a1), and a spring (a4) is disposed between the other end of the rod (a3) ​​and the cylinder (a2). The spring (a4) is used to apply an elastic force to the rod (a3) ​​in the direction of the bearing plate (a1).

10. A cavity slide gate valve assembly according to claim 1, characterized in that: A sealing ring (90) is provided on the inner wall of the gate valve housing (10) around the door opening. The sealing ring (90) is used to abut against the sealing plate (20) when the sealing plate (20) is pressed against the inner wall of the gate valve housing (10).

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