Magnetic levitation crucible lifting device in vacuum environment

Abstract

The present application relates to the field of special metallurgy, and discloses a kind of vacuum environment magnetic suspension crucible lifting device, comprising: vacuum cavity bottom is equipped with mounting seat;Magnetic suspension drive assembly, fixed in the vacuum cavity bottom mounting seat, comprising: stator electromagnetic coil group, rotor permanent magnet, coil fixing seat and magnetic shield cover;Guiding positioning assembly, including symmetrically distributed guiding magnetic strip, guiding slider and laser displacement sensor;Vacuum sealing assembly, for realizing the sealing isolation of the vacuum cavity;Heat dissipation assembly, including spiral water cooling channel, annular heat dissipation fin and heat-conducting silica gel;Intelligent control assembly, including PLC controller, servo driver, touch display screen and alarm module, for device closed-loop automation control.The present application can solve the defects of existing vacuum crucible lifting device, such as contact pollution, vacuum sealing failure, low lifting precision, poor stability, poor coil heat dissipation, strong electromagnetic interference, poor adaptability, high energy consumption and high maintenance cost.

Description

Technical Field

[0001] This invention relates to the field of special metallurgy, and in particular to a vacuum environment magnetic levitation crucible lifting device. Background Technology

[0002] In material preparation processes under vacuum conditions, the crucible, as the core container for material support, melting, reaction, and shaping, plays a crucial role. The stability of its lifting movement, the accuracy of its position, and the non-contact nature of its operation have a decisive impact on the purity, uniformity of microstructure, consistency of composition, and yield of the final product. Especially in processes with stringent requirements for cleanliness, precision, and stability, such as rare earth single crystal pulling, high-purity alloy smelting, high-temperature ceramic sintering, and vacuum coating, even minor crucible movements, positional deviations, or the introduction of impurities can directly lead to excessive material composition, increased crystal defects, decreased mechanical properties, or even the scrapping of the entire furnace. Therefore, crucible lifting devices under vacuum conditions must simultaneously meet multiple requirements, including non-contact drive, high-precision positioning, stable operation, reliable vacuum sealing, controllable heat dissipation, low electromagnetic interference, wide applicability, low energy consumption, and simple maintenance.

[0003] Currently, crucible lifting devices used in industrial vacuum environments are mainly divided into two categories: mechanical transmission lifting devices and simple magnetic levitation lifting devices.

[0004] Mechanical transmission lifting devices are the most widely used traditional solution, mainly composed of a stepper motor, reducer, lead screw, guide rod, support slide, and vacuum dynamic seal assembly. During operation, the stepper motor, after being reduced in speed and torque by the reducer, drives the lead screw to rotate. The lead screw nut drives the crucible support to move linearly up and down along the guide rod. The dynamic seal structure, penetrating the cavity, isolates the external transmission mechanism from the internal high-vacuum environment. This solution is structurally mature, has low cost, and strong load capacity, but it has inherent drawbacks that are difficult to overcome: First, the long-term reciprocating contact and friction of metal parts such as lead screws, guide rods, and slides will continuously generate tiny metal chips and abrasive particles. These impurities directly enter the vacuum chamber and adhere to the crucible or melt, which can easily cause high-purity materials to exceed the impurity standard.

[0005] Second, dynamic seals are subjected to reciprocating friction and alternating high and low temperatures for a long time, which makes them prone to aging, hardening, and wear, leading to sealing leaks, decreased vacuum levels, or even vacuum breakage, affecting production continuity.

[0006] Third, mechanical transmission pairs generally have errors due to clearance, elastic deformation, and wear accumulation. Conventional devices can only achieve a lifting and repositioning accuracy of ±0.1mm, which cannot meet the process requirements of single crystal pulling and precision melting that require micron-level control.

[0007] Simple magnetic levitation lifting devices, as an attempt at contactless driving, typically employ a single electromagnetic coil positioned below or around the crucible. By adjusting the coil's excitation current, the electromagnetic attraction or repulsion force is altered, allowing the crucible to levitate and move vertically. While this approach eliminates mechanical contact components and theoretically reduces contamination, its rudimentary structure and imperfect design have significant drawbacks: First, relying solely on a single coil lacks dedicated guiding and positioning constraints, making the crucible prone to horizontal shifting, tilting, and wobbling during lifting, leading to melt fluctuations, splashing, or uneven composition. Second, the vacuum environment offers virtually no convective heat dissipation, making it difficult to dissipate the coil's heat. Prolonged operation can cause insulation aging, coil burnout, and electromagnetic force attenuation, resulting in poor reliability and short lifespan. Third, the single-coil magnetic field distribution is diffuse and lacks shielding, causing electromagnetic leakage that interferes with precision components such as infrared thermometers, vacuum gauges, sensors, and video surveillance within the cavity, affecting process parameter acquisition and closed-loop control. Furthermore, the magnetic field utilization is low, energy consumption is high, and the fixed structure and weak adjustment capabilities make it difficult to adapt to crucibles of different volumes, weights, and materials, resulting in poor versatility.

[0008] In summary, the two existing types of vacuum crucible lifting devices are respectively trapped in technical bottlenecks of "mechanical contact contamination, insufficient precision, and easy seal failure" and "unstable suspension, poor heat dissipation, strong interference, weak adaptability, and high energy consumption." They cannot simultaneously meet the comprehensive requirements of high precision, high purity, high stability, low interference, low energy consumption, long life, and easy maintenance, which seriously restricts the stability, yield, and large-scale application of high-end material preparation processes. There is an urgent need to propose a new technical solution with optimized structure, comprehensive performance, and high reliability. Summary of the Invention

[0009] The summary of this invention introduces a series of simplified concepts, all of which are simplifications of existing technologies in the field, and will be further explained in detail in the detailed description section. This summary is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0010] The present invention aims to solve the technical problems of existing vacuum crucible lifting devices, such as contact contamination, vacuum seal failure, low lifting accuracy, poor stability, poor coil heat dissipation, strong electromagnetic interference, poor adaptability, high energy consumption, and high maintenance costs.

[0011] To solve the above-mentioned technical problems, the present invention provides a vacuum environment magnetic levitation crucible lifting device, comprising: The vacuum chamber is a cylindrical sealed structure with a vacuum interface on the side wall and a mounting base at the bottom; A magnetic levitation drive assembly, fixed to the bottom mounting base of the vacuum cavity, includes: a stator electromagnetic coil assembly, a rotor permanent magnet, a coil fixing base, and a magnetic shielding cover; The stator electromagnetic coil group is independently controlled, the rotor permanent magnet is fixed to the bottom of the crucible support assembly, and the magnetic shielding cover is wrapped around the outside of the stator electromagnetic coil group; The magnetic levitation drive assembly is used to provide contactless levitation and lifting power: through the electromagnetic attraction / repulsion between the stator electromagnetic coil group and the rotor permanent magnet, the crucible carrying assembly is able to levitate and lift without contact. The crucible support assembly is located inside the vacuum cavity and includes a crucible support, a crucible clamp, and a heat insulation layer. The guiding and positioning assembly includes: symmetrically distributed guide magnetic strips, guide sliders, and laser displacement sensors; the guide magnetic strips are vertically fixed to the inner wall of the vacuum chamber, the guide sliders are fixed to the crucible support and engage with the guide magnetic strips without contact, and the laser displacement sensors are fixed to the top of the vacuum chamber; A vacuum sealing assembly is used to achieve sealing and isolation of the vacuum cavity; The heat dissipation assembly includes a spiral water-cooling channel, an annular heat dissipation fin, and thermally conductive silicone; the water-cooling channel is located inside the coil mounting base, and the thermally conductive silicone is filled between the stator electromagnetic coil assembly and the coil mounting base; Intelligent control components include: PLC controller, servo driver, touch screen display and alarm module, used for closed-loop automated control of the device.

[0012] Optionally, the vacuum environment magnetic levitation crucible lifting device can be further improved, wherein the stator electromagnetic coil group consists of 3 to 6 sets of electromagnetic coils symmetrically distributed; for example, the coil is wound with copper enameled wire with a temperature resistance of ≥200℃, with 500-1000 turns and a wire diameter of 0.8-1.2mm.

[0013] Optionally, the vacuum environment magnetic levitation crucible lifting device can be further improved by selecting N52 neodymium iron boron permanent magnets as the rotor permanent magnet, with an external alumina ceramic or zirconia ceramic protective sleeve, and an air gap of 2mm-5mm between the rotor permanent magnet and the stator electromagnetic coil assembly.

[0014] Optionally, the vacuum environment magnetic levitation crucible lifting device can be further improved, wherein the crucible clamp is an adjustable structure composed of multiple arc-shaped clamping plates, and a graphite high-temperature resistant buffer pad is provided on the inner side.

[0015] Optionally, the vacuum environment magnetic levitation crucible lifting device can be further improved, wherein the heat insulation layer is made of ceramic fiber cotton, the thickness of the heat insulation layer is in the range of 10mm-20mm, and it is located between the crucible support and the rotor permanent magnet.

[0016] Optionally, the vacuum environment magnetic levitation crucible lifting device can be further improved, with the water cooling channel having a diameter of 8mm-12mm, and an external chiller providing cooling water at 15℃-25℃ with a water flow rate of 0.5m / s-1m / s, thereby controlling the operating temperature of the stator electromagnetic coil group to within 150℃.

[0017] Optionally, the vacuum environment magnetic levitation crucible lifting device can be further improved, wherein the magnetic shielding cover is made of permalloy, and the vacuum sealing assembly includes a fluororubber static seal and a stainless steel sealing sleeve.

[0018] Optionally, the vacuum environment magnetic levitation crucible lifting device can be further improved, wherein the servo driver current adjustment range of the intelligent control component is 0A-5A, the lifting speed adjustment range is 0.01mm / min-10mm / min, and the suspension height adjustment range is 0mm-200mm.

[0019] The working principle of this invention is explained below; This invention relies on a vacuum chamber to construct a stable high-vacuum sealed environment, providing clean, oxygen-free, and low-impurity basic conditions for the melting, pulling, sintering and other processes of materials in the crucible; As the core power unit, the magnetic levitation drive component generates a controllable electromagnetic field by passing alternating current through the stator electromagnetic coil group. This field forms a controllable electromagnetic attraction and repulsion force with the rotor permanent magnet fixed at the bottom of the crucible support component, establishing a stable levitation force field in the air gap. This allows the crucible support component and the crucible and materials it carries to be completely separated from mechanical contact, achieving contactless levitation and smooth lifting and lowering motion, thus eliminating the problem of debris pollution caused by mechanical friction at the source. The guiding and positioning component forms a horizontal constraint force field through symmetrically arranged permanent magnet guide strips and non-contact guide sliders, effectively limiting the horizontal offset, tilt, and sway of the crucible support component during the lifting and lowering process. At the same time, it works with a high-precision laser displacement sensor to collect the lifting height, suspension position, and horizontal offset of the crucible in real time, forming a closed-loop position feedback. The heat dissipation component is designed for the vacuum environment with no convection heat dissipation. It uses a spiral water-cooling channel inside the coil fixing seat, an outer ring heat dissipation fins, and high thermal conductivity thermally conductive silicone to quickly conduct the heat generated by the stator electromagnetic coil group during operation to the external cooling system, effectively controlling the coil operating temperature and avoiding high-temperature aging and electromagnetic force attenuation. The vacuum sealing assembly reliably seals key components of the vacuum chamber, such as interfaces, wiring holes, and mounting surfaces, through static sealing elements and sealing sleeves, ensuring a stable high vacuum level inside the chamber and preventing the intrusion of external air and impurities. The intelligent control assembly, centered on a PLC controller, receives real-time position signals from the guiding and positioning assembly. Combined with preset process parameters, it dynamically adjusts the current magnitude, direction, and frequency of the stator electromagnetic coil assembly via a servo driver, precisely controlling the levitation force, lifting speed, levitation height, and travel range to achieve fully automated closed-loop control. All components work together in an orderly manner to ultimately complete the non-contact, high-precision, high-stability, low-interference, and low-energy-consumption lifting operation of the crucible in a vacuum environment, meeting the stringent process requirements of high-end material preparation.

[0020] Compared with the prior art, the present invention can achieve at least the following technical effects: 1) Existing mechanical devices suffer from contact wear and debris contamination of high-purity materials. Simple magnetic levitation lacks this structure and has poor stability, making it impossible to balance purity and stability.

[0021] This invention employs magnetic levitation non-contact drive, eliminating mechanical wear debris and preventing material contamination. The impurity content is ≤400ppm, thus eliminating contact contamination and ensuring material purity.

[0022] 2) Existing mechanical devices have large transmission gaps and low precision. Simple magnetic levitation devices have no guiding structure and are prone to deviation and swaying.

[0023] This invention employs a symmetrical magnetic levitation structure, a guide and positioning component, and laser closed-loop control, achieving a lifting accuracy of ±0.05mm and a horizontal offset of ≤0.03mm, thus improving accuracy by 50% and enhancing lifting precision and stability.

[0024] 3) Existing simple magnetic levitation devices lack dedicated heat dissipation, and the coils are prone to high-temperature aging under vacuum. Mechanical devices do not require coil heat dissipation, but the seals are prone to failure.

[0025] This invention controls the coil temperature within 150°C by using vacuum-adapted water cooling, which optimizes heat dissipation and extends the life of the equipment.

[0026] 4) Existing simple magnetic levitation unshielded structures suffer from electromagnetic interference affecting internal components, resulting in low magnetic field utilization and high energy consumption.

[0027] This invention designs a permalloy magnetic shield to block interference, improve magnetic field utilization, and reduce energy consumption by 25%-35%.

[0028] 5) Existing mechanical devices have limited travel range, and simple magnetic levitation is only compatible with a single crucible, resulting in poor versatility.

[0029] The adjustable clamp designed in this invention is compatible with crucibles of various materials ranging from 20 to 200 ml. The lifting parameters are adjustable, the stroke is expandable, and it has strong adaptability and wide versatility.

[0030] 6) Existing mechanical devices require regular replacement of worn parts, resulting in high maintenance costs. Simple magnetic levitation coils are prone to aging and frequent malfunctions.

[0031] This invention has no easily damaged mechanical parts, reducing maintenance frequency by 60% and cost by 50% compared to existing technologies. Attached Figure Description

[0032] The accompanying drawings are intended to illustrate the general characteristics of the methods, structures, and / or materials used in specific exemplary embodiments of the invention, supplementing the description in the specification. However, the drawings are schematic diagrams not drawn to scale and may not accurately reflect the precise structural or performance characteristics of any of the given embodiments. The drawings should not be construed as limiting or restricting the range of numerical values ​​or properties covered by exemplary embodiments of the invention. The invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0033] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0034] Figure 2 This is a partial structural diagram of the magnetic levitation drive component and the crucible support component.

[0035] Explanation of reference numerals in the attached figures: 1-Vacuum cavity; 2-Magnetic levitation drive component; 3-Crucible support assembly; 4-Guide and positioning components; 5-Vacuum sealing assembly; 6-Heat dissipation components; 7-Intelligent control components; 21-Stator electromagnetic coil assembly; 22-Rotor permanent magnet; 23-Coil mounting bracket; 24-Magnetic shielding cover; 31-Crucible support. Detailed Implementation

[0036] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can fully understand other advantages and technical effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through different specific embodiments, and various details in this specification can also be applied based on different viewpoints, with various modifications or changes made without departing from the overall design concept of the invention. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. The following exemplary embodiments of the present invention can be implemented in many different forms and should not be construed as being limited to the specific embodiments set forth herein. It should be understood that these embodiments are provided to make the disclosure of the present invention thorough and complete, and to fully convey the technical solutions of these exemplary embodiments to those skilled in the art. It should be understood that when an element is referred to as "connected" or "combined" to another element, the element can be directly connected or combined to the other element, or there may be intermediate elements. The difference is that when an element is referred to as "directly connected" or "directly combined" to another element, there are no intermediate elements. Throughout the drawings, the same reference numerals always denote the same elements.

[0037] First embodiment; refer to Figure 1 Combination Figure 2 As shown, the present invention provides a vacuum environment magnetic levitation crucible lifting device, comprising: Vacuum chamber 1 is a cylindrical sealed structure made of 316L stainless steel with a wall thickness of 10mm and an inner wall roughness of Ra=0.6μm. A vacuum interface is provided on the side wall for connecting a molecular pump and a mechanical pump. The preset vacuum level is ≤10⁻ 5 P, with a mounting base at the bottom; The magnetic levitation drive assembly 2 is fixed to the bottom mounting base of the vacuum cavity 1 and includes: stator electromagnetic coil group 21, rotor permanent magnet 22, coil fixing base 23 and magnetic shielding cover 24. The stator electromagnetic coil group 21 is independently controlled and uses copper enameled wire with a temperature resistance of 200℃, 800 turns, and a diameter of 1.0mm. The coil holder 23 is made of aluminum alloy; The rotor permanent magnet 22 is fixed to the bottom of the crucible support assembly 3. The rotor permanent magnet 22 is N52 neodymium iron boron and equipped with an alumina ceramic protective sleeve. The magnetic shield 24 is wrapped around the outside of the stator electromagnetic coil group 21. The magnetic shield 24 is made of permalloy and has an air gap of 3mm. The stator electromagnetic coil group 21 consists of 4 groups, with copper enameled wire resistant to 200℃, 800 turns, and a diameter of 1.0mm; the rotor permanent magnet 22 is N52 neodymium iron boron, equipped with an alumina ceramic protective sleeve; the coil fixing base 23 is made of aluminum alloy, and the magnetic shield 24 is made of permalloy with an air gap of 3mm. The magnetic levitation drive assembly 2 is used to provide contactless levitation and lifting power: through the electromagnetic attraction / repulsion between the stator electromagnetic coil group 21 and the rotor permanent magnet 22, the crucible bearing assembly 3 is made to levitate and lift without contact. The crucible support assembly 3 is disposed inside the vacuum cavity 1 and includes a crucible support 31, a crucible clamp, and a heat insulation layer; The crucible support 31 is made of Inconel 718 and is 200mm high; the crucible clamp is compatible with 50ml-100ml copper segmented crucibles and has a graphite buffer pad; the heat insulation layer is made of ceramic fiber cotton and is 15mm thick. The guiding and positioning component 4 includes: symmetrically distributed guide magnetic strips, guide sliders, and laser displacement sensors; the guide magnetic strips are vertically fixed to the inner wall of the vacuum cavity 1. The guide slider is fixed to the crucible support 31 and engages with the guide magnetic strip without contact. The guide slider is equipped with a molybdenum disulfide lubricating layer. The laser displacement sensor is fixed to the top of the vacuum cavity 1, and the laser displacement sensor has an accuracy of ±0.01mm; Vacuum sealing assembly 5 is used to achieve sealing and isolation of the vacuum cavity 1; The heat dissipation component 6 includes a spiral water cooling channel, an annular heat dissipation fin, and thermally conductive silicone. The water-cooling channel is located inside the coil mounting base 23. The water-cooling channel has a diameter of 10mm, the cooling water is at 20℃ and the flow rate is 0.8m / s; the heat dissipation fins are 1.5mm thick and spaced 6mm apart. The thermally conductive silicone is filled between the stator electromagnetic coil assembly 21 and the coil fixing base 23, and the thermal conductivity of the thermally conductive silicone is 2.5 W / (m・K). Intelligent control component 7 includes a PLC controller, servo driver, touch screen display, and alarm module, used for closed-loop automated control of the device. Intelligent control component 7 selects an S7-1200 PLC, servo driver, 8-inch touch screen, and audible and visual alarm module.

[0038] The working process of the above embodiments is as follows: Vacuum preparation: Place the high-purity rare earth master alloy into a 50ml copper crucible and secure it with clamps; close the cavity and evacuate to ≤10⁻ 5 Pa, start the chiller; Suspension start: The touch screen is set to lift speed of 0.05mm / min and suspension height of 50mm; the controller control coil is supplied with 2A current, the crucible is suspended, and the horizontal deviation is ≤0.03mm; Precise lifting: During single crystal lifting, the sensor provides real-time position feedback, and the controller fine-tunes the current, achieving a lifting accuracy of ±0.04mm; the heat insulation layer isolates high temperatures of 1000-1400℃, and the magnetic shielding cover ensures normal infrared temperature measurement. Stop reset: After pulling is complete, the crucible is lowered to the initial position, high-purity argon gas is used to break the vacuum, and the single crystal is taken out.

[0039] The equipment can run continuously for 72 hours without failure, with single crystal purity of 3N or higher, impurities ≤400ppm, and orientation degree improved by 25%.

[0040] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It will also be understood that, unless explicitly defined herein, terms such as those defined in a general dictionary shall be interpreted as having the meaning consistent with their meaning in the relevant field context, and not as having an idealized or overly formal meaning.

[0041] The present invention has been described in detail above through specific embodiments and examples, but these are not intended to limit the invention. Many modifications and improvements can be made by those skilled in the art without departing from the principles of the invention, and these should also be considered within the scope of protection of the present invention.

Claims

1. A vacuum environment magnetic levitation crucible lifting device, characterized in that, include: The vacuum chamber (1) is a cylindrical sealed structure with a vacuum interface on the side wall and a mounting base at the bottom; The magnetic levitation drive assembly (2) is fixed to the bottom mounting base of the vacuum cavity (1) and includes: stator electromagnetic coil assembly (21), rotor permanent magnet (22), coil fixing base (23) and magnetic shielding cover (24). The stator electromagnetic coil group (21) is independently controlled, the rotor permanent magnet (22) is fixed to the bottom of the crucible support assembly (3), and the magnetic shield (24) is wrapped around the outside of the stator electromagnetic coil group (21). The magnetic levitation drive assembly (2) is used to provide contactless levitation and lifting power. It enables the crucible support assembly (3) to levitate and lift without contact through the electromagnetic attraction / repulsion between the stator electromagnetic coil assembly (21) and the rotor permanent magnet (22). The crucible support assembly (3) is located inside the vacuum cavity (1) and includes: a crucible support (31), a crucible clamp, and a heat insulation layer; The guiding and positioning assembly (4) includes: symmetrically distributed guiding magnetic strips, guiding sliders and laser displacement sensors; the guiding magnetic strips are vertically fixed to the inner wall of the vacuum cavity (1), the guiding sliders are fixed to the crucible support (31) and are in non-contact cooperation with the guiding magnetic strips, and the laser displacement sensors are fixed to the top of the vacuum cavity (1); Vacuum sealing assembly (5) is used to achieve sealing and isolation of the vacuum cavity (1); The heat dissipation component (6) includes: a spiral water cooling channel, an annular heat dissipation fin, and thermally conductive silicone; The water-cooling channel is located inside the coil fixing seat (23), and the thermally conductive silicone is filled between the stator electromagnetic coil group (21) and the coil fixing seat (23). The intelligent control component (7) includes: a PLC controller, a servo driver, a touch screen display and an alarm module, for closed-loop automated control of the device.

2. The vacuum environment magnetic levitation crucible lifting device according to claim 1, characterized in that: The stator electromagnetic coil group (21) consists of 3 to 6 groups of electromagnetic coils symmetrically distributed.

3. The vacuum environment magnetic levitation crucible lifting device according to claim 1, characterized in that: The rotor permanent magnet (22) is provided with an alumina ceramic or zirconia ceramic protective sleeve on the outside, and the air gap between it and the stator electromagnetic coil group (21) is 2mm-5mm.

4. The vacuum environment magnetic levitation crucible lifting device according to claim 1, characterized in that: The crucible clamp is an adjustable structure, consisting of multiple arc-shaped clamping plates, with a graphite high-temperature resistant buffer pad on the inner side.

5. The vacuum environment magnetic levitation crucible lifting device according to claim 1, characterized in that: The heat insulation layer is made of ceramic fiber cotton and is located between the crucible support (31) and the rotor permanent magnet (22).

6. The vacuum environment magnetic levitation crucible lifting device according to claim 1, characterized in that: The water cooling channel has a diameter of 8mm-12mm, and an external chiller provides cooling water at 15℃-25℃ with a water flow rate of 0.5m / s-1m / s, which controls the working temperature of the stator electromagnetic coil group (21) to within 150℃.

7. The vacuum environment magnetic levitation crucible lifting device according to claim 1, characterized in that: The magnetic shield (24) is made of permalloy, and the vacuum sealing assembly (5) includes a fluororubber static seal and a stainless steel sealing sleeve.

8. The vacuum environment magnetic levitation crucible lifting device according to claim 1, characterized in that: The intelligent control component (7) has a servo drive current adjustment range of 0A-5A, a lifting speed adjustment range of 0.01mm / min-10mm / min, and a suspension height adjustment range of 0mm-200mm.

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