A sensor correction apparatus and method

Abstract

The application relates to the technical field of measurement, in particular to a sensor correction device and method. The sensor correction device comprises a laser measurement module and a mirror, the mirror is connected with a moving component on a corrected device, the laser measurement module is matched with the mirror and is used for acquiring a first data value; a sensor acquisition module is electrically connected with a sensor on the corrected device and is used for acquiring a second data value output by the sensor; a synchronous control module is electrically connected with the laser measurement module and the sensor acquisition module, is used for controlling the data value acquisition time sequence of the laser measurement module and the sensor acquisition module and storing the acquired first data value and second data value. In this way, the data value acquisition time is short and enough data values can be acquired, so that the time required for sensor correction can be effectively reduced and the precision of sensor correction can be effectively improved.

Description

Technical Field

[0001] This invention relates to the field of measurement technology, and more specifically to a sensor calibration device and method. Background Technology

[0002] In modern industrial applications, high-precision displacement sensors are widely used in fields such as automation control, robotics, machine tool processing, and aerospace. These applications place increasingly higher demands on the measurement accuracy of sensors. To ensure the accuracy and reliability of the measured position data, sensors must undergo rigorous calibration.

[0003] The existing sensor calibration method is as follows: control the device to be calibrated to start, and when the moving part on the device to be calibrated moves to a certain position, control the device to be calibrated to pause, obtain a reference data value through a laser device and obtain a measurement data value through a sensor; then control the device to be calibrated to start again, and when the moving part on the device to be calibrated moves to a certain position, control the device to pause, and obtain a reference data value through a laser device and obtain a measurement data value through a sensor again, and so on, repeating the operation continuously.

[0004] The sampling efficiency of this sensor calibration method is very low, which makes the entire calibration process take a lot of time. In addition, the sampling data points are very limited, which leads to low accuracy of the obtained compensation data and ultimately results in poor sensor calibration. Summary of the Invention

[0005] The purpose of this invention is to provide a sensor calibration device and method that can effectively reduce the time required for sensor calibration and effectively improve the accuracy of sensor calibration.

[0006] In a first aspect of the present invention, a sensor calibration device is provided for calibrating a sensor on a device to be calibrated. The sensor calibration device includes:

[0007] A laser measurement module and a reflector are used to acquire a first data value. The reflector is connected to the moving parts on the device being calibrated. The laser measurement module works with the reflector to acquire the first data value.

[0008] The sensor acquisition module is electrically connected to the sensor on the device being calibrated and is used to acquire the second data value output by the sensor.

[0009] The synchronous control module is electrically connected to the laser measurement module and the sensor acquisition module. It is used to control the data value acquisition timing of the laser measurement module and the sensor acquisition module and to store the acquired first data value and second data value.

[0010] The data processing module, electrically connected to the synchronization control module, is used to process the collected first and second data values ​​to obtain compensation data.

[0011] The accuracy compensation module, electrically connected to the data processing module, is used to calibrate the sensors on the calibrated device using compensation data.

[0012] As a preferred embodiment of the present invention, the laser measurement module integrates:

[0013] A laser emitting unit is used to emit laser signals to the reflector;

[0014] The laser receiving unit is used to receive laser echo signals, which are generated by the reflector after receiving the laser signal.

[0015] The controller calculates the first data value based on the laser signal and the laser echo signal.

[0016] As a preferred embodiment of the present invention, the synchronization control module includes:

[0017] The data acquisition request generation unit is used to generate data value acquisition requests;

[0018] The first data value acquisition unit is electrically connected to the acquisition request generation unit and is used to control the laser measurement module to acquire and store the first data value based on the first preset acquisition timing after receiving the data value acquisition request.

[0019] The second data value acquisition unit is electrically connected to the acquisition request generation unit and is used to control the sensor acquisition module to acquire and store the second data value based on the second preset acquisition timing after receiving the data value acquisition request.

[0020] The first preset acquisition timing sequence and the second preset acquisition timing sequence ensure that, under the same data value acquisition request, the acquired second data value and the acquired first data value are at the same moving position of the moving part.

[0021] As a preferred embodiment of the present invention, the data processing module includes:

[0022] A data preprocessing unit is used to remove outlier data values ​​from a first data value sequence to obtain a first processed data value sequence, and to remove outlier data values ​​from a second data value sequence to obtain a second processed data value sequence.

[0023] The error value sequence acquisition unit obtains an error value sequence based on the first processed data value sequence and the second processed data value sequence;

[0024] The error curve acquisition unit obtains the error value curve based on the error value sequence and uses the error value curve as compensation data.

[0025] As a preferred embodiment of the present invention, the accuracy compensation module includes:

[0026] The compensation table acquisition unit obtains the compensation table based on the error value curve and interpolation data;

[0027] The format conversion unit converts the format of the compensation table into a format that is compatible with the sensor on the device being calibrated or the control system on the device being calibrated.

[0028] The compensation table writing unit writes the format-converted compensation table to the sensor on the device being calibrated or to the control system on the device being calibrated.

[0029] In a second aspect of the present invention, a sensor calibration method is provided, and in the first aspect, a sensor calibration device is provided. The sensor calibration method includes:

[0030] When the calibration device is activated, and the moving parts on the calibration device move, the synchronization control module controls the laser measurement module to acquire the first data value and store the first data value in the synchronization control module. At the same time, the synchronization control module controls the sensor acquisition module to acquire the second data value and store the second data value in the synchronization control module.

[0031] When the device being calibrated is turned off, the data processing module processes the first and second data values ​​collected to obtain compensation data; the accuracy compensation module uses the compensation data to calibrate the sensors on the device being calibrated.

[0032] As a preferred embodiment of the present invention, the method further includes the following steps before activating the calibration device:

[0033] Connect the reflector to the moving parts on the device being calibrated, and install the laser measurement module so that the laser signal emitted by the laser emitting unit can be received by the reflector and the laser echo signal emitted by the reflector can be received by the laser receiving unit.

[0034] Connect the sensor acquisition module to the sensor on the device being calibrated;

[0035] Connect the synchronous control module to the laser measurement module and the sensor acquisition module respectively;

[0036] Connect the data processing module to the synchronization control module;

[0037] Connect the synchronization control module to the accuracy compensation module.

[0038] As a preferred embodiment of the present invention, after turning off the calibrated device, the following is further included:

[0039] Connect the accuracy compensation module to the sensor or control system on the device being calibrated.

[0040] As a preferred embodiment of the present invention, the data processing module processes the collected first data value and second data value to obtain compensation data, specifically including:

[0041] The data preprocessing unit removes outlier data values ​​from the first data value sequence to obtain a first processed data value sequence, and removes outlier data values ​​from the second data value sequence to obtain a second processed data value sequence.

[0042] The error value sequence acquisition unit obtains the error value sequence based on the first processed data value sequence and the second processed data value sequence;

[0043] The error curve acquisition unit obtains the error value curve based on the error value sequence and uses the error value curve as compensation data.

[0044] As a preferred embodiment of the present invention, the accuracy compensation module calibrates the sensor on the calibrated device using compensation data, specifically including:

[0045] The compensation table acquisition unit obtains the compensation table based on the error value curve and interpolation data;

[0046] The format conversion unit converts the format of the compensation table into a format that is compatible with the sensor on the device being calibrated or the control system on the device being calibrated.

[0047] The compensation table writing unit writes the format-converted compensation table to the sensor on the device being calibrated or to the control system on the device being calibrated.

[0048] In summary, the present invention has the following beneficial effects:

[0049] The sensor calibration device and method of this invention, through the setting of the synchronous control module, enables the laser measurement module to acquire the first data value at high frequency and the sensor acquisition module to acquire the second data value at high frequency. Furthermore, under the same data value acquisition request, the actual position corresponding to the first data value and the actual position corresponding to the second data value are the same. This setting results in a shorter data value acquisition time and the acquisition of a sufficient number of data values, ultimately effectively reducing the time required for sensor calibration and effectively improving the accuracy of sensor calibration.

[0050] Further or more detailed beneficial effects will be described in conjunction with specific embodiments in the detailed implementation. Attached Figure Description

[0051] Figure 1 A schematic diagram of a sensor calibration device according to an embodiment of the present invention is shown;

[0052] Figure 2A schematic diagram of a sensor calibration method according to an embodiment of the present invention is shown. Detailed Implementation

[0053] Embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While some embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the invention. It should be understood that the accompanying drawings and embodiments are for illustrative purposes only and are not intended to limit the scope of protection of the invention.

[0054] In the description of embodiments of the present invention, the term "comprising" and similar terms should be understood as open-ended inclusion, i.e., "including but not limited to". The term "based on" should be understood as "at least partially based on". The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment". The terms "first", "second", etc., may refer to different or the same objects. Other explicit and implicit definitions may also be included below.

[0055] This invention discloses a sensor calibration device, such as... Figure 1 As shown, the device includes:

[0056] The laser measurement module is connected to the device being calibrated, and the reflector is connected to the moving parts on the device being calibrated. The laser measurement module and the reflector work together to acquire the first data value.

[0057] In this embodiment, the laser measurement module integrates:

[0058] A laser emitting unit is used to emit laser signals to the reflector;

[0059] The laser receiving unit is used to receive laser echo signals, which are generated by the reflector after receiving the laser signal.

[0060] The controller calculates the first data value based on the laser signal and the laser echo signal.

[0061] In this embodiment, the sensor is not calibrated independently, but rather the entire device with the sensor installed is calibrated together.

[0062] In this embodiment, the laser emitting unit, laser receiving unit, and controller are integrated into a single component (i.e., the laser measurement module). The laser measurement module has a magnetic base at its bottom. When connecting the laser measurement module to the device being calibrated, simply connect the laser measurement module to the device via the magnetic base. Therefore, the assembly and disassembly of the laser measurement module and the device being calibrated are very simple. Similarly, the reflector also has a magnetic base at its bottom. When connecting the reflector to the moving parts on the device being calibrated, simply connect the reflector to the moving parts via the magnetic base. Therefore, the assembly and disassembly of the reflector and the device being calibrated are also very simple.

[0063] In this embodiment, the sensor is mounted on the moving part of the calibrated device. The sensor can be a linear encoder to detect the linear displacement of the moving part (which may be a moving block); it can also be an encoder to detect the rotation angle of the moving part (which may be a turntable). When detecting linear displacement, a linear mirror group is used, and the laser measurement module works in conjunction with the linear mirror group to obtain the linear displacement value; the first data value in this case is the linear displacement value. When detecting rotation angle, an angle mirror group is used, and the laser measurement module works in conjunction with the angle mirror group to obtain the angle value; the first data value in this case is the angle value.

[0064] The sensor acquisition module is electrically connected to the sensor on the device being calibrated and is used to acquire the second data value output by the sensor.

[0065] In this embodiment, the sensor acquisition module has an interface for connecting to the sensor. This interface can be one or more of the following: a communication interface, a pulse signal interface, a voltage analog interface, and a current analog interface. During connection, simply connect the sensor's terminals to the adapter interface on the sensor acquisition module. The sensor can be a linear encoder for detecting the linear displacement of a moving part (such as a moving block); it can also be an encoder for detecting the rotation angle of a moving part (such as a turntable). When detecting linear displacement, the sensor acquisition module obtains the linear displacement value, and the second data value is the linear displacement value. When detecting rotation angle, the sensor acquisition module obtains the angle value, and the second data value is the angle value.

[0066] The synchronous control module is electrically connected to the laser measurement module and the sensor acquisition module. It is used to control the timing of data value acquisition by the laser measurement module and the sensor acquisition module and to store the acquired first data value and second data value.

[0067] In this embodiment, the synchronization control module includes:

[0068] The data acquisition request generation unit is used to generate data value acquisition requests. The data acquisition request generation unit generates data value acquisition requests according to a preset acquisition frequency.

[0069] The first data value acquisition unit is electrically connected to the acquisition request generation unit and is used to control the laser measurement module to acquire and store the first data value based on the first preset acquisition timing after receiving the data value acquisition request.

[0070] The second data value acquisition unit is electrically connected to the acquisition request generation unit. It is used to control the sensor acquisition module to acquire and store the second data value based on the second preset acquisition timing after receiving the data value acquisition request.

[0071] The first preset acquisition timing sequence and the second preset acquisition timing sequence ensure that, under the same data value acquisition request, the acquired second data value and the acquired first data value are at the same moving position of the moving part.

[0072] If the first and second data acquisition units immediately acquire the first and second data values ​​after receiving the data acquisition request, the actual location corresponding to the first data value may differ from that of the second data value due to differences in the characteristics of the laser measurement module and the sensor itself. Therefore, this embodiment sets a first preset acquisition sequence and a second preset acquisition sequence. Upon receiving the data acquisition request, the first data acquisition unit controls the laser measurement module to acquire the first data value based on the first preset acquisition sequence (i.e., waiting for a first time). Similarly, the second data acquisition unit controls the sensor acquisition module to acquire the second data value based on the second preset acquisition sequence (i.e., waiting for a second time). This ensures that under the same data acquisition request, the actual location corresponding to the first data value and the actual location corresponding to the second data value are the same. The first and second preset acquisition sequences have been obtained through extensive prior testing. Typically, once the model of the laser measurement module, the model of the sensor, and the model of the device being calibrated are known, the first and second preset acquisition sequences are also known.

[0073] In this embodiment, taking an encoder as an example, assuming that the encoder takes 1 second to detect one rotation angle, and the acquisition request generation unit generates a data value acquisition request every 1 ms, then the first data value acquisition unit can eventually acquire 1000 first data values, and the second data value acquisition unit can eventually acquire 1000 second data values. After receiving the data value acquisition request, the first data value acquisition unit waits 10 µs to control the laser measurement module to acquire the first data value; after receiving the data value acquisition request, the second data value acquisition unit waits 13 µs to control the sensor acquisition module to acquire the second data value.

[0074] The data processing module, electrically connected to the synchronization control module, is used to process the collected first and second data values ​​to obtain compensation data.

[0075] In this embodiment, the data processing module includes:

[0076] The data preprocessing unit is used to remove outlier data values ​​from a first data value sequence to obtain a first processed data value sequence, and to remove outlier data values ​​from a second data value sequence to obtain a second processed data value sequence.

[0077] This embodiment assumes that the first data value in the first data value sequence is normal. Then, the second data value is compared with the first data value. If the absolute value of the difference between the two is greater than a preset fluctuation threshold, the second data value is marked as an abnormal data value; otherwise, it is not marked as an abnormal data value. Similarly, if the absolute value of the difference between the 100th and 99th data values ​​is greater than the preset fluctuation threshold, the 100th data value is marked as an abnormal data value. When the 100th data value is marked as an abnormal data value, the 101st data value is compared with the 99th data value (not the 100th). If the absolute value of the difference is greater than the preset fluctuation threshold, the 101st data value is marked as an abnormal data value; otherwise, it is not marked as an abnormal data value. Finally, if the 101st data value is not marked as an abnormal data value, the 102nd data value is compared with the 101st data value. The first data value is then continuously compared until all the first data values ​​in the sequence of first data values ​​have been compared.

[0078] The same procedure applies to the second data value sequence. In this embodiment, it is assumed that the first second data value in the second data value sequence is normal. Then, the second second data value is compared with the first. If the absolute value of the difference between the two is greater than a preset fluctuation threshold, the second second data value is marked as an abnormal data value; otherwise, it is not marked as an abnormal data value. If the second second data value is marked as an abnormal data value, the third second data value is compared with the first second data value (not the second). If the absolute value of the difference between the two is greater than the preset fluctuation threshold, the third second data value is also marked as an abnormal data value; otherwise, it is not marked as an abnormal data value. If the third second data value is not marked as an abnormal data value, the fourth second data value is compared with the third. This process of comparing second data values ​​continues until all second data values ​​in the second data value sequence have been compared.

[0079] In this embodiment, it is assumed that the 100th first data value in the first data value sequence is marked as an abnormal data value, and the 2nd second data value in the second data value sequence is marked as an abnormal data value. Then, the 2nd and 100th first data values ​​in the first data value sequence are removed to obtain the first processed data value sequence; at the same time, the 2nd and 100th second data values ​​in the second data value sequence are removed to obtain the second processed data value sequence.

[0080] Due to sudden vibrations or other reasons, there may be obviously abnormal data values ​​(i.e., abnormal data values) in the first and second data value sequences. Removing these abnormal data values ​​will make the subsequent compensation data more accurate.

[0081] The error value sequence acquisition unit obtains an error value sequence based on the first processed data value sequence and the second processed data value sequence. Specifically, it acquires the first second processed data value from the second processed data value sequence, acquires the first first processed data value from the first processed data value sequence, and subtracts the first first processed data value from the first second processed data value to obtain the first error value; simultaneously, it acquires the second second processed data value from the second processed data value sequence, acquires the second first processed data value from the first processed data value sequence, and subtracts the second second processed data value from the second second processed data value to obtain the second error value; simultaneously, it acquires the third second processed data value from the second processed data value sequence, acquires the third first processed data value from the first processed data value sequence, and subtracts the third second processed data value from the third first processed data value to obtain the third error value; ...

[0082] Finally, an error value sequence can be obtained, including the first error value, the second error value, the third error value, and so on.

[0083] The error curve acquisition unit obtains an error value curve based on the error value sequence and uses the error value curve as compensation data. This embodiment takes angle detection using a specific encoder as an example, assuming the fitted error value curve is... ,in, It is the angle measurement value obtained by the encoder (i.e., the data value after the second processing). It is the difference between the measured angle value and the true angle value (i.e., the data value after the first processing).

[0084] The accuracy compensation module, electrically connected to the data processing module, is used to calibrate the sensors on the calibrated device using compensation data.

[0085] In this embodiment, the accuracy compensation module includes:

[0086] The compensation table acquisition unit obtains the compensation table based on the error value curve and interpolation data. This embodiment continues to use an encoder for angle detection as an example, assuming the fitted error value curve is... In this embodiment, the difference data are assumed to be 0.1°, 0.2°, 0.3°, etc. Substituting the interpolated data into the error curve yields the compensation value corresponding to each interpolated data. A compensation table can then be obtained using the interpolated data and the compensation value data.

[0087] The format conversion unit converts the format of the compensation table into a format that is compatible with the sensor on the device being calibrated or the control system on the device being calibrated.

[0088] The compensation table writing unit writes the format-converted compensation table to the sensor or control system of the device being calibrated. The accuracy compensation module also has an interface for connecting to the sensor or control system of the device being calibrated. Before writing the compensation table, the sensor or control system of the device being calibrated needs to be connected to the interface on the accuracy compensation module. After the accuracy compensation module is connected to the sensor or control system of the device being calibrated, the compensation table is then written to the sensor or control system through the accuracy compensation module.

[0089] When the calibrated device is used subsequently, assuming the sensor acquires a measurement value, the corresponding compensation value is looked up from the compensation table based on the measurement value. Finally, the measurement value is subtracted from the compensation value to obtain the sensor's true value (i.e., the compensated value).

[0090] This invention discloses a sensor calibration method, wherein the sensor calibration in the above embodiments is as follows: Figure 2 As shown, the method includes:

[0091] When the calibration device is activated, as the moving parts on the calibration device move, the synchronization control module controls the laser measurement module to acquire the first data value and store the first data value in the synchronization control module. At the same time, the synchronization control module controls the sensor acquisition module to acquire the second data value and store the second data value in the synchronization control module.

[0092] When the device being calibrated is turned off, the data processing module processes the first and second data values ​​collected to obtain compensation data; the accuracy compensation module uses the compensation data to calibrate the sensors on the device being calibrated.

[0093] In this embodiment, starting the calibration device means causing the moving parts on the calibration device to start moving during a sensor calibration process, and stopping the calibration device means causing the moving parts on the calibration device to stop moving during a sensor calibration process.

[0094] In this embodiment, the entire data acquisition process only requires switching the calibrated device on and off once. Once the calibrated device is activated, the synchronization control module controls the laser measurement module and sensor acquisition module to acquire the first and second data values ​​at high frequency. Taking an encoder as an example, assuming the encoder takes 1 second to detect one rotation angle, and the acquisition request generation unit generates a data acquisition request every 1 ms, then the first data acquisition unit can ultimately acquire 1000 first data values, and the second data acquisition unit can also acquire 1000 second data values. First, the entire data acquisition process only takes 1 second, significantly reducing the time cost of sensor calibration; second, it can acquire a sufficient number of data values, thereby enabling the acquisition of a sufficient number of error values, resulting in a higher accuracy of the fitted error curve and ultimately a better sensor calibration effect.

[0095] In this embodiment, the process includes the following steps before activating the calibration device (i.e., causing the moving parts on the calibration device to begin moving):

[0096] Connect the reflector to the moving parts of the device being calibrated, and connect the laser measurement module to the device being calibrated. This allows the laser signal emitted by the laser emitting unit to be received by the reflector, and the laser echo signal emitted by the reflector to be received by the laser receiving unit. The laser measurement module has a magnetic mount at its bottom. Connecting the laser measurement module to the device being calibrated is simple; just connect the laser measurement module to the device using the magnetic mount. Similarly, the reflector also has a magnetic mount at its bottom. Connecting the reflector to the moving parts of the device being calibrated is also simple; just connect the reflector to the moving parts using the magnetic mount.

[0097] Connect the sensor acquisition module to the sensor on the device being calibrated. The sensor acquisition module has an interface for connecting to the sensor, which can be one or more of the following: a communication interface, a pulse signal interface, a voltage analog interface, and a current analog interface. During connection, simply connect the sensor's terminals to the adapter interface on the sensor acquisition module.

[0098] Connect the synchronous control module to the laser measurement module and the sensor acquisition module respectively;

[0099] Connect the data processing module to the synchronization control module;

[0100] The synchronization control module and the accuracy compensation module are connected. In this embodiment, the sensor acquisition module, synchronization control module, data processing module, and accuracy compensation module can be integrated into a single main module. The sensor acquisition module and the synchronization control module are pre-connected, as are the synchronization control module and the data processing module, and the data processing module and the accuracy compensation module. The main module has a first interface for connecting the synchronization control module and the laser measurement module, a second interface for connecting the sensor acquisition module and the sensor, a third interface for connecting the accuracy compensation module and the control system on the sensor or the calibrated device, and a fourth interface for connecting to a control interface (e.g., a PLC or a computer). Parameters in the main module (e.g., the generation frequency of acquisition requests in the acquisition request generation unit, the first preset acquisition sequence in the first data value acquisition unit, the second preset acquisition sequence in the second data value acquisition unit, etc.) can be set through the control interface.

[0101] In this embodiment, after closing the calibration device (i.e., stopping the movement of the moving parts on the calibration device), the following is also included:

[0102] Connect the accuracy compensation module to the sensor or control system on the device being calibrated.

[0103] In this embodiment, the data processing module processes the collected first and second data values ​​to obtain compensation data, specifically including:

[0104] The data preprocessing unit removes outlier data values ​​from the first data value sequence to obtain a first processed data value sequence, and removes outlier data values ​​from the second data value sequence to obtain a second processed data value sequence.

[0105] The error value sequence acquisition unit obtains the error value sequence based on the first processed data value sequence and the second processed data value sequence;

[0106] The error curve acquisition unit obtains the error value curve based on the error value sequence and uses the error value curve as compensation data.

[0107] In this embodiment, the accuracy compensation module calibrates the sensor on the calibrated device using compensation data, specifically including:

[0108] The compensation table acquisition unit obtains the compensation table based on the error value curve and interpolation data;

[0109] The format conversion unit converts the format of the compensation table into a format that is compatible with the sensor on the device being calibrated or the control system on the device being calibrated.

[0110] The compensation table writing unit writes the format-converted compensation table to the sensor on the device being calibrated or to the control system on the device being calibrated.

[0111] Although the subject matter has been described using language specific to structural features and / or methodological logic, it should be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or actions described above. Rather, the specific features and actions described above are merely illustrative examples of implementing the claims.

Claims

1. A sensor calibration device for calibrating sensors on a device to be calibrated, characterized in that, include: A laser measurement module and a reflector, wherein the reflector is connected to an actuating component on the device being calibrated, and the laser measurement module cooperates with the reflector to acquire a first data value; The sensor acquisition module is electrically connected to the sensor on the device being calibrated and is used to acquire the second data value output by the sensor. A synchronization control module is electrically connected to the laser measurement module and the sensor acquisition module, and is used to control the data value acquisition timing of the laser measurement module and the sensor acquisition module and store the acquired first data value and second data value; The data processing module, electrically connected to the synchronization control module, is used to process the collected first data value and second data value to obtain compensation data; The accuracy compensation module is electrically connected to the data processing module and is used to calibrate the sensors on the calibrated device using compensation data.

2. The device according to claim 1, characterized in that, The laser measurement module integrates: A laser emitting unit is used to emit laser signals toward the reflector; A laser receiving unit is used to receive laser echo signals, which are generated by the reflector receiving the laser signal. The controller calculates a first data value based on the laser signal and the laser echo signal.

3. The device according to claim 1, characterized in that, The synchronization control module includes: The data acquisition request generation unit is used to generate data value acquisition requests; The first data value acquisition unit is electrically connected to the acquisition request generation unit and is used to control the laser measurement module to acquire and store the first data value based on the first preset acquisition timing after receiving the data value acquisition request. The second data value acquisition unit is electrically connected to the acquisition request generation unit and is used to control the sensor acquisition module to acquire and store the second data value based on the second preset acquisition timing after receiving the data value acquisition request. The first preset acquisition timing and the second preset acquisition timing ensure that, under the same data value acquisition request, the acquired second data value and the acquired first data value are at the same moving position of the motion component.

4. The device according to claim 1, characterized in that, The data processing module includes: A data preprocessing unit is used to remove outlier data values ​​from a first data value sequence to obtain a first processed data value sequence, and to remove outlier data values ​​from a second data value sequence to obtain a second processed data value sequence. The error value sequence acquisition unit obtains an error value sequence based on the first processed data value sequence and the second processed data value sequence; The error curve acquisition unit obtains an error value curve based on the error value sequence and uses the error value curve as compensation data.

5. The device according to claim 4, characterized in that, The accuracy compensation module includes: The compensation table acquisition unit obtains the compensation table based on the error value curve and interpolation data; The format conversion unit converts the format of the compensation table into a format that is compatible with the sensor on the device being calibrated or with the control system on the device being calibrated. The compensation table writing unit writes the format-converted compensation table to the sensor on the device being calibrated or to the control system on the device being calibrated.

6. A sensor calibration method, employing the sensor calibration device according to any one of claims 1-5, characterized in that, include: When the calibration device is activated, and the moving parts on the calibration device move, the synchronization control module controls the laser measurement module to acquire the first data value and store the first data value in the synchronization control module. At the same time, the synchronization control module controls the sensor acquisition module to acquire the second data value and store the second data value in the synchronization control module. When the device being calibrated is turned off, the data processing module processes the first and second data values ​​collected to obtain compensation data; the accuracy compensation module uses the compensation data to calibrate the sensors on the device being calibrated.

7. The method according to claim 6, characterized in that, Before activating the calibration device, the following is also included: Connect the reflector to the moving parts on the device being calibrated, and install a laser measurement module so that the laser signal emitted by the laser emitting unit can be received by the reflector and the laser echo signal emitted by the reflector can be received by the laser receiving unit. Connect the sensor acquisition module to the sensor on the device being calibrated; Connect the synchronous control module to the laser measurement module and the sensor acquisition module respectively; Connect the data processing module to the synchronization control module; Connect the synchronization control module to the accuracy compensation module.

8. The method according to claim 6, characterized in that, After shutting down the calibrated device, the following is also included: Connect the accuracy compensation module to the sensor or control system on the device being calibrated.

9. The method according to claim 6, characterized in that, The data processing module processes the collected first and second data values ​​to obtain compensation data, specifically including: The data preprocessing unit removes outlier data values ​​from the first data value sequence to obtain a first processed data value sequence, and removes outlier data values ​​from the second data value sequence to obtain a second processed data value sequence. The error value sequence acquisition unit obtains the error value sequence based on the first processed data value sequence and the second processed data value sequence; The error curve acquisition unit obtains the error value curve based on the error value sequence and uses the error value curve as compensation data.

10. The method according to claim 9, characterized in that, The accuracy compensation module calibrates the sensors on the calibrated device using compensation data, specifically including: The compensation table acquisition unit obtains the compensation table based on the error value curve and interpolation data; The format conversion unit converts the format of the compensation table into a format that is compatible with the sensor on the device being calibrated or with the control system on the device being calibrated. The compensation table writing unit writes the format-converted compensation table to the sensor on the device being calibrated or to the control system on the device being calibrated.

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