A beam quality analysis system

Abstract

The application discloses a light beam quality analysis system, comprising: a bottom plate; a collimation assembly fixed to the bottom plate and used for collimating a to-be-tested light beam incident to the collimation assembly; a first attenuation assembly fixed to the bottom plate and located on an outgoing light path of the collimation assembly and used for attenuating energy of the to-be-tested light beam; a beam-reducing assembly fixed to the bottom plate and located on an outgoing light path of the first attenuation assembly and used for beam-reducing the to-be-tested light beam; and a collection assembly fixed to the bottom plate and located on an outgoing light path of the beam-reducing assembly and used for receiving the to-be-tested light beam and obtaining a light spot image. In the light beam quality analysis system, the collimation assembly, the first attenuation assembly, the beam-reducing assembly and the collection assembly are all fixed to the bottom plate, so that the installation and adjustment errors can be reduced, and the accuracy of the quality analysis on the light beam can be avoided from being affected.

Description

Technical Field

[0001] This invention relates to the field of beam measurement technology, and in particular to a beam quality analysis system. Background Technology

[0002] Beam quality analysis equipment is used to observe and analyze beams, such as laser beams. Existing beam quality analysis equipment, when used with high-energy beams, relies on attenuators at the front of the target to reduce beam energy. However, for extremely high-energy beams, the energy remains high even after attenuation, failing to meet measurement requirements. Furthermore, for beams with large diameters, existing beam quality analysis equipment introduces an additional beam-shrinking optical system, which not only increases cost but also introduces assembly and adjustment errors, affecting measurement results. Summary of the Invention

[0003] The purpose of this invention is to provide a beam quality analysis system that can reduce the attenuation energy and beam shrinkage of the beam under test, and can reduce the introduction of assembly and adjustment errors to avoid affecting the accuracy of beam analysis.

[0004] To achieve the above objectives, the present invention provides the following technical solution:

[0005] A beam quality analysis system, comprising:

[0006] Base plate;

[0007] A collimation assembly, fixed to the base plate, is used to collimate the beam of light to be measured incident on the collimation assembly;

[0008] The first attenuation component is fixed to the base plate and located in the output light path of the collimation component, and is used to attenuate the energy of the beam to be measured.

[0009] A beam-shrinking assembly, fixed to the base plate and located in the output optical path of the first attenuation assembly, is used to shrink the beam to be tested.

[0010] The acquisition component is fixed to the base plate and located in the output optical path of the beam-shrinking component, and is used to receive the beam to be tested and obtain a beam spot image.

[0011] Optionally, the first attenuation component includes an attenuation unit, the attenuation unit comprising:

[0012] A beam splitter is used to partially reflect and partially transmit the beam to be tested incident on the beam splitter, so that the reflected beam forms the propagating beam to be tested.

[0013] An extinction element is disposed on the transmission light path of the beam splitter and is used to absorb the light beam transmitted from the beam splitter.

[0014] Optionally, the extinction element includes an extinction tube, which is used to allow the light beam transmitted from the beam splitter to enter the extinction tube, and the inner wall of the extinction tube is provided with a light-absorbing surface.

[0015] Optionally, it also includes:

[0016] A stray light collecting component is disposed on the side of the beam splitter away from the extinction component. The stray light collecting component includes an extinction plate, the surface of which is a light-absorbing surface and is provided with a conical surface.

[0017] Optionally, the first attenuation component includes:

[0018] The first attenuation unit includes a first beam splitter and a first extinction member. The first beam splitter is used to partially reflect and partially transmit the beam of light to be tested incident on the first beam splitter, so that the reflected beam forms the beam of light to be tested that propagates. The first extinction member is disposed on the transmission light path of the first beam splitter and is used to absorb the beam of light transmitted from the first beam splitter.

[0019] The second attenuation unit is disposed on the reflected light path of the first beam splitter and includes a second beam splitter and a second extinction unit. The second beam splitter is used to partially reflect and partially transmit the beam to be tested incident on the second beam splitter, so that the reflected beam forms the beam to be tested that propagates. The second extinction unit is disposed on the transmitted light path of the second beam splitter and is used to absorb the beam transmitted from the second beam splitter.

[0020] The third attenuation unit is disposed on the reflected light path of the second beam splitter and includes a third beam splitter and a third extinction unit. The third beam splitter is used to partially reflect and partially transmit the test beam incident on the third beam splitter, so that the reflected beam forms the propagating test beam. The third extinction unit is disposed on the transmitted light path of the third beam splitter and is used to absorb the beam transmitted from the third beam splitter.

[0021] The fourth attenuation unit is disposed on the reflected light path of the third beam splitter and includes the fourth beam splitter. The fourth beam splitter is used to partially reflect and partially transmit the beam to be tested incident on the fourth beam splitter, so that the reflected beam forms the propagating beam to be tested.

[0022] The beam quality analysis system also includes:

[0023] The first stray light collecting component is disposed on the side of the first beam splitter away from the first extinction component;

[0024] The second stray light collecting component is disposed on the side of the second beam splitter away from the second extinction component.

[0025] Optionally, it also includes:

[0026] The second attenuation component is fixed to the base plate and includes a rotating wheel and at least two attenuation plates disposed on the rotating wheel. The at least two attenuation plates have different attenuation ratios for the beam energy. The rotating wheel is used to drive the at least two attenuation plates to rotate so that any one of the attenuation plates is in the propagation optical path of the beam to be tested.

[0027] Optionally, it also includes:

[0028] An axis-adjusting assembly is fixed to the base plate and located in the optical path between the first attenuation assembly and the beam-shrinking assembly, and is used to adjust the optical axis of the beam to be tested.

[0029] Optionally, the acquisition component includes:

[0030] A first camera is used to receive the beam to be measured and obtain a light spot image;

[0031] A displacement stage is used to support the first camera and to drive the first camera to move along the optical axis of the first camera.

[0032] Optionally, it further includes: an optical axis memory component, fixed to the base plate and located in the outgoing optical path of the collimation component, used to obtain the deviation between the incident position and the reference position of the beam under test, so as to adjust the position and angle of the collimation component according to the deviation.

[0033] Optionally, it also includes:

[0034] The first beam splitter is movable into and out of a preset position, the preset position being located between the collimation component and the first attenuation component, and the first beam splitter is used to reflect part of the beam to be tested from the collimation component;

[0035] A camera assembly, fixed to the base plate and located on the reflected light path of the first beam splitter, is used to receive the reflected light beam from the first beam splitter and obtain a light spot image.

[0036] As can be seen from the above technical solution, in the beam quality analysis system provided by the present invention, the energy of the beam under test can be attenuated by the first attenuation component, and the beam shrinking component can shrink the beam under test. Furthermore, in the beam quality analysis system of the present invention, the collimation component, the first attenuation component, the beam shrinking component, and the acquisition component are all fixed on the base plate, which can reduce the introduction of assembly and adjustment errors and avoid affecting the accuracy of beam quality analysis. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 A schematic diagram of the component arrangement and optical path of a beam quality analysis system provided in one embodiment;

[0039] Figure 2 A top view of a beam quality analysis system provided in one embodiment;

[0040] Figure 3 A structural diagram of an extinction element in a beam quality analysis system provided in one embodiment;

[0041] Figure 4 A longitudinal cross-sectional schematic diagram of an extinction element in a beam quality analysis system provided in one embodiment;

[0042] Figure 5 A structural diagram of a stray light collection component of a beam quality analysis system provided in one embodiment;

[0043] Figure 6 for Figure 5 A front view of the stray light collection assembly shown;

[0044] Figure 7 for Figure 5 Side view of the stray light collection assembly shown;

[0045] Figure 8 This is a schematic diagram showing the arrangement of a beam-shrinking component, a second attenuation component, and a acquisition component in a beam quality analysis system provided in one embodiment.

[0046] The reference numerals in the accompanying drawings include:

[0047] 1-Collimation component, 2-First attenuation component, 3-Axis adjustment component, 4-Beam shrinking component, 5-Second attenuation component, 6-Acquisition component, 7-First beam splitting element, 8-Camera component, 9-Mounting plate, 10-Base plate, 11-First stray light collection component, 12-Second stray light collection component;

[0048] 201-First beam splitter, 202-First extinction element, 203-Second beam splitter, 204-Second extinction element, 205-Third beam splitter, 206-Third extinction element, 207-Fourth beam splitter, 208-Extinction cylinder, 209-Conical surface, 210-Outer cylinder, 211-Heat dissipation element, 212-Extinction plate, 213-Second bracket;

[0049] 301 - First reflective element, 302 - Second reflective element, 303 - Third reflective element, 501 - Rotating wheel. Detailed Implementation

[0050] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0051] This embodiment provides a beam quality analysis system, including:

[0052] Base plate 10;

[0053] Collimation component 1, fixed to the base plate 10, is used to collimate the beam of light to be measured incident on the collimation component 1;

[0054] The first attenuation component 2 is fixed to the base plate 10 and located in the output light path of the collimation component 1, and is used to attenuate the energy of the beam to be measured.

[0055] The beam-shrinking component 4 is fixed to the base plate 10 and located in the output light path of the first attenuation component 2, and is used to shrink the beam to be tested.

[0056] Acquisition component 6 is fixed to the base plate 10 and located on the outgoing light path of the beam-shrinking component 4, and is used to receive the beam to be tested and obtain a light spot image.

[0057] This beam quality analysis system is equipped with a first attenuation component 2, which attenuates the energy of the beam under test, enabling this beam quality analysis system to be applied to high-energy beams.

[0058] This beam quality analysis system is equipped with a beam shrinking component 4, which can shrink the beam under test, enabling this beam quality analysis system to be applied to beams with large beam diameters.

[0059] In this embodiment of the beam quality analysis system, the collimation component 1, the first attenuation component 2, the beam shrinking component 4, and the acquisition component 6 are all fixed on the base plate 10. Compared with the existing additional arrangement of beam shrinking optical system and attenuation optical device, it can reduce the introduction of assembly and adjustment errors and avoid affecting the accuracy of beam quality analysis.

[0060] For example, refer to Figure 1 , Figure 1This is a schematic diagram of the component arrangement and optical path of a beam quality analysis system provided in one embodiment. Figure 2 This is a top view of a beam quality analysis system provided in one embodiment. Figure 1 and Figure 2 As shown, the collimation component 1, the first attenuation component 2, the beam shrinking component 4, and the acquisition component 6 are arranged sequentially along the optical path, and each component is fixed on the base plate 10.

[0061] In some embodiments, the first attenuation component 2 includes an attenuation unit, the attenuation unit comprising:

[0062] A beam splitter is used to partially reflect and partially transmit the beam to be tested incident on the beam splitter, so that the reflected beam forms the propagating beam to be tested.

[0063] An extinction element is disposed on the transmission light path of the beam splitter and is used to absorb the light beam transmitted from the beam splitter.

[0064] The beam to be tested is incident on the beam splitter. Part of the beam is reflected and part is transmitted. The transmitted beam is then incident on the extinction element, which absorbs the transmitted beam. The beam reflected from the beam splitter forms the beam to be tested that continues to propagate. This propagating beam has less light energy than the original beam incident on the beam splitter, thus achieving energy attenuation of the beam to be tested.

[0065] In some embodiments, the beam splitter includes a wedge prism. The beam to be tested is incident on one end face of the wedge prism. Part of the beam is reflected, and part is refracted from the end face of the wedge prism and transmitted through it. In some embodiments, the extinction element includes an extinction cylinder for allowing the beam transmitted from the beam splitter to enter. The inner wall of the extinction cylinder is provided with a light-absorbing surface. After entering the extinction cylinder, the beam transmitted from the beam splitter is incident on its side walls and bottom, where it is absorbed by the light-absorbing surface, achieving extinction.

[0066] In some embodiments, the bottom surface of the extinction tube is a conical surface, which is a light-absorbing surface. The sidewalls of the extinction tube also have light-absorbing surfaces. When a light beam enters the extinction tube and is incident on the conical surface, the beam is absorbed. If the beam is reflected at the conical surface, the reflected light is incident on the sidewalls of the extinction tube and absorbed. For example, refer to... Figure 3 and Figure 4 , Figure 3 This is a structural diagram of an extinction element in a beam quality analysis system according to one embodiment. Figure 4 A longitudinal cross-sectional schematic diagram of an extinction element in a beam quality analysis system provided in one embodiment is shown below. Figure 3 and Figure 4As shown, the bottom surface of the extinction tube 208 is a conical surface 209. In practical applications, the depth of the extinction tube 208 and the angle of the conical surface 209 can be optically simulated and designed to ensure that all light reflected by the conical surface 209 can enter the interior of the extinction tube 208 without any light escaping. The extinction tube 208 can be circular, and the conical surface 209 is a conical surface. The beam under test is usually a beam with a circular cross-section, thus matching the extinction tube 208 with the beam under test. Optical simulation can employ the ray tracing method of geometric optics, which treats light as a geometric ray and analyzes the trajectory of light in the system based on the laws of reflection / refraction.

[0067] In some embodiments, the inner wall of the matting cylinder 208 is blackened to enable it to absorb light. In some embodiments, the inner wall of the matting cylinder 208 is threaded, specifically, the side wall of the matting cylinder 208 may be threaded. This increases the surface area of ​​the inner wall of the matting cylinder, increases the light-absorbing area, and causes diffuse reflection of light hitting the inner wall of the matting cylinder 208. The matting cylinder 208 may be a metal matting cylinder.

[0068] In some implementation methods, reference may be made to Figure 3 and Figure 4 As shown, the matting component also includes an outer cylinder 210, with a matting tube 208 disposed inside the outer cylinder 210. The outer cylinder 210 is used to absorb light, absorbing stray light and preventing stray light leakage to ensure safety. In some embodiments, a heat sink 211 is provided on the outer side of the bottom of the matting tube 208. The light beam entering the matting tube 208 is absorbed by its sidewalls and bottom, accumulating heat, which is then dissipated through the heat sink 211. The heat sink 211 can be, but is not limited to, heat dissipation fins. The matting tube 208 can be mounted on a first bracket, which is fixed to the base plate 10. The area occupied by the heat sink 211 can be set according to thermal simulation data to ensure effective heat dissipation while minimizing the structural size. Thermal simulation refers to using a computer to simulate the process of heat generation, transfer, and dissipation in a virtual environment. The physical basis of thermal simulation is the accurate modeling of the following three basic heat transfer mechanisms: thermal conduction (the transfer of heat within an object or between objects in contact); thermal convection (the transfer of heat through a flowing fluid (gas or liquid); and thermal radiation (the transfer of heat directly through electromagnetic waves without relying on any medium). The core methods used in thermal simulation include the finite element method, finite volume method, finite difference method, and thermal resistance mesh method.

[0069] In some embodiments, the beam quality analysis system further includes a stray light collection component disposed on the side of the beam splitter away from the extinction element. A small amount of light may leak out on the side of the beam splitter away from the extinction element. This leaked light is light reflected from the beam splitter, and this light deviates from the propagation path of the beam under test, forming stray light. The stray light collection component collects this stray light, preventing it from affecting the measurement and analysis of the beam under test.

[0070] In some embodiments, the stray light collecting component includes an extinction plate whose surface is a light-absorbing surface and has a conical surface. The conical surface on the surface of the extinction plate increases the light-absorbing area. The surface of the extinction plate may have a triangular pyramidal surface. For example, see [reference needed]. Figure 5 , Figure 6 and Figure 7 , Figure 5 This is a structural diagram of a stray light collection component of a beam quality analysis system according to one embodiment. Figure 6 for Figure 5 The image shows a front view of the stray light collection assembly. Figure 7 for Figure 5 A side view of the stray light collection assembly shown. Figures 5 to 7 As shown, the surface of the matting plate 212 is provided with densely arranged triangular pyramidal surfaces, which can effectively absorb the light incident on the matting plate 212. The surface of the matting plate 212 can be blackened to form a light-absorbing surface. The matting plate 212 can be a metal plate. The matting plate 212 can be mounted on a second bracket 213, which is fixed to the base plate 10.

[0071] In some embodiments, the first attenuation component 2 includes at least two sets of attenuation units, which are sequentially arranged along the propagation optical path of the beam under test. The first attenuation component 2, through these at least two sets of attenuation units, employs a 'step-by-step attenuation' method to attenuate the energy of the high-energy laser beam. The number of attenuation units included in the first attenuation component 2 can be adjusted according to actual conditions. The following embodiment uses four sets of attenuation units as an example; it is understood that other numbers of attenuation units can be used in practical applications.

[0072] In some implementation methods, reference may be made to Figure 1 and Figure 2 As shown, the first attenuation component 2 includes:

[0073] The first attenuation unit includes a first beam splitter 201 and a first extinction member 202. The first beam splitter 201 is used to partially reflect and partially transmit the beam to be tested incident on the first beam splitter 201, so that the reflected beam forms the beam to be tested that propagates. The first extinction member 202 is disposed on the transmission light path of the first beam splitter 201 and is used to absorb the beam transmitted from the first beam splitter 201.

[0074] The second attenuation unit is disposed on the reflected light path of the first beam splitter 201, and includes a second beam splitter 203 and a second extinction member 204. The second beam splitter 203 is used to partially reflect and partially transmit the test beam incident on the second beam splitter 203, so that the reflected beam forms the propagating test beam. The second extinction member 204 is disposed on the transmitted light path of the second beam splitter 203 and is used to absorb the beam transmitted from the second beam splitter 203.

[0075] The third attenuation unit is disposed on the reflected light path of the second beam splitter 203, and includes a third beam splitter 205 and a third extinction unit 206. The third beam splitter 205 is used to partially reflect and partially transmit the test beam incident on the third beam splitter 205, so that the reflected beam forms the propagating test beam. The third extinction unit 206 is disposed on the transmitted light path of the third beam splitter 205 and is used to absorb the beam transmitted from the third beam splitter 205.

[0076] The fourth attenuation unit is disposed on the reflected light path of the third beam splitter 205 and includes a fourth beam splitter 207. The fourth beam splitter 207 is used to partially reflect and partially transmit the test beam incident on the fourth beam splitter 207, so that the reflected beam forms the propagating test beam.

[0077] The beam under test propagates sequentially through the first attenuation unit, the second attenuation unit, the third attenuation unit, and the fourth attenuation unit, with the light energy decreasing sequentially. By the time the beam reaches the fourth attenuation unit, the light energy is already relatively low; therefore, an extinction element is not required in the transmission path of the fourth beam splitter 207. In this embodiment, the implementation methods of the first beam splitter 201, the second beam splitter 203, the third beam splitter 205, and the fourth beam splitter 207 can refer to the above-described implementation methods for beam splitters, and the implementation methods of the first extinction element 202, the second extinction element 204, and the third extinction element 206 can refer to the above-described implementation methods for extinction elements, and will not be repeated here.

[0078] In some implementation methods, reference may be made to Figure 1 and Figure 2 As shown, the beam quality analysis system also includes:

[0079] The first stray light collecting component 11 is disposed on the side of the first beam splitter 201 away from the first extinction component 202;

[0080] The second stray light collecting component 12 is disposed on the side of the second beam splitter 203 away from the second extinction component 204.

[0081] When the beam under test reaches the first attenuation unit, its light energy is relatively high, and a significant amount of light tends to spill out in the first beam splitter 201. This stray light is absorbed by setting up the first stray light collection component 11. When the beam under test reaches the second attenuation unit, its light energy is still relatively high, and a significant amount of stray light still spills out in the second beam splitter 203. This stray light is absorbed by setting up the second stray light collection component 12.

[0082] In some embodiments, the beam quality analysis system further includes: a second attenuation component 5, fixed to the base plate 10 and including a rotating wheel 501 and at least two attenuation plates disposed on the rotating wheel, wherein the at least two attenuation plates have different attenuation ratios for the beam energy, and the rotating wheel is used to drive the at least two attenuation plates to rotate so that any one of the attenuation plates is in the propagation optical path of the beam under test. The second attenuation component 5 further attenuates the energy of the beam under test after it has been attenuated by the first attenuation component 2, ensuring that the energy of the beam under test incident on the acquisition component 6 is not too high. Depending on the energy of the beam under test, an attenuation plate with a suitable energy attenuation ratio can be selected from the at least two attenuation plates of the second attenuation component 5, and the rotating wheel can be controlled to rotate so that the attenuation plate enters the propagation optical path of the beam under test. For example, refer to... Figure 8 , Figure 8 This is a schematic diagram illustrating the arrangement of the beam-shrinking component, the second attenuation component, and the acquisition component of a beam quality analysis system according to one embodiment. Figure 8 As shown, the second attenuation component 5 includes a rotating wheel 501, which is provided with multiple attenuation plates.

[0083] In this embodiment, the structure of the beam-shrinking component 4 and the beam-shrinking ratio are not limited; the beam-shrinking ratio can be set according to application requirements. In some embodiments, the beam-shrinking component 4 may include a first lens and a second lens arranged sequentially along the optical axis of the beam-shrinking component 4. For example, see [reference needed]. Figure 1 and Figure 8 As shown, the first lens and the second lens are arranged sequentially in the beam-shrinking assembly 4.

[0084] In some embodiments, the beam quality analysis system further includes an axis adjustment assembly 3, fixed to the base plate 10 and located in the optical path between the first attenuation assembly 2 and the beam shrinking assembly 4, for adjusting the optical axis of the beam under test so that the optical axis of the beam under test is coaxial with the optical axis of the acquisition assembly 6. The axis adjustment assembly 3 can adjust the optical axis of the beam under test in a two-dimensional direction.

[0085] In some implementation methods, reference may be made to Figure 1 As shown, the optical axis adjustment assembly 3 includes at least: a first reflecting element 301 for reflecting the beam to be tested to a second reflecting element 302; and a second reflecting element 302 for reflecting the beam to be tested. The first reflecting element 301 can be used to adjust the optical axis of the beam to be tested in the horizontal direction, and the second reflecting element 302 can be used to adjust the optical axis of the beam to be tested in the vertical direction. (See reference...) Figure 2 As shown, the axis-adjusting assembly 3 also includes a third reflective element 303, used to reflect the beam to be tested from the second reflective element 302 to the beam-shrinking assembly 4.

[0086] In some embodiments, the acquisition component 6 includes: a first camera for receiving the beam under test and obtaining a spot image; and a displacement stage for supporting the first camera and driving the first camera to move along its optical axis. The optical axis of the first camera is considered to be the optical axis of the acquisition component 6. By driving the first camera to move along its optical axis, the first camera acquires the spot of the beam under test at different positions along the optical axis of the beam under test. Based on the spot diameter of the beam under test at different positions along the optical axis of the beam under test, the beam waist characteristics of the beam under test can be analyzed.

[0087] In some implementation methods, reference may be made to Figure 8 As shown, the beam-shrinking component 4, the second attenuation component 5, and the acquisition component 6 are all mounted on the mounting plate 9. The mounting plate 9 is detachably connected to the base plate 10. The beam-shrinking component 4, the second attenuation component 5, and the acquisition component 6 can be fixed to the mounting plate 9 first, and then the beam-shrinking component 4, the second attenuation component 5, and the acquisition component 6 can be fixed to the base plate 10 together with the mounting plate 9. In this way, the beam-shrinking component 4, the second attenuation component 5, and the acquisition component 6 are modularized, which facilitates installation and debugging.

[0088] In some embodiments, the beam quality analysis system further includes an optical axis memory component, fixed to the base plate 10 and located on the outgoing optical path of the collimating component 1, used to acquire the deviation between the incident position and the reference position of the beam under test, so as to adjust the position and angle of the collimating component 1 according to the deviation. The reference position is the incident position of the beam under test when the optical axis of the beam under test is coaxial with the optical axis of the collimating component 1. In practical applications, after changing the beam under test, there may be a deviation between the optical axis of the beam under test and the optical axis of the collimating component 1. In the prior art, this is adjusted manually, which is highly dependent on the operator's experience, time-consuming, and prone to human error. The beam under test is generated by a light source, and each time the beam under test is changed (i.e., the light source is changed), it is equivalent to rebuilding the optics, which seriously restricts the detection efficiency and the feasibility of online applications. This beam quality analysis system is equipped with an optical axis memory component. After switching the light source of the beam under test, it can automatically adjust the position and angle of the collimation component 1 to adjust the incident position of the beam under test to the reference position, thereby achieving rapid restoration of the optical axis.

[0089] In some implementations, the optical axis memory component includes:

[0090] The first beam splitter 7 is movable into and out of a preset position, which is located between the collimation component 1 and the first attenuation component 2. The first beam splitter 7 is used to reflect part of the beam to be tested from the collimation component 1.

[0091] The camera assembly 8 is fixed to the base plate 10 and located on the reflected light path of the first beam splitter 7, and is used to receive the reflected light beam from the first beam splitter 7 and obtain a light spot image.

[0092] The optical axis of the beam under test is aligned with the optical axis of the collimating component 1 using the first beam splitter 7 and the camera assembly 8. The position of the reflected beam generated by the beam under test from the first beam splitter 7 in the image generated by the camera assembly 8 when the optical axis of the beam under test is aligned with the optical axis of the collimating component 1 can be predetermined; this position is designated as the reference position. After changing the beam under test, the position of the beam in the image generated by the camera assembly 8 is observed, and the position and angle of the collimating component 1 are adjusted so that the beam is located at the corresponding reference position in the image generated by the camera assembly 8, thereby aligning the optical axis of the beam under test with the optical axis of the collimating component 1. Alignment of the optical axis of the beam under test with the optical axis of the collimating component 1 means that the optical axis of the beam under test and the optical axis of the collimating component 1 are coaxial.

[0093] In some embodiments, the camera assembly 8 includes: a second beam splitter for splitting a reflected beam from the first beam splitter 7 into a first sub-beam and a second sub-beam; a second camera disposed on the outgoing light path of the first sub-beam; and a third camera disposed on the outgoing light path of the second sub-beam. The second camera is used to align with the position of the beam to be measured, and the third camera is used to align with the angle of the beam to be measured.

[0094] In some embodiments, the collimator of the collimating assembly 1 is translatable in a two-dimensional direction and its pitch and yaw angles are adjustable. The beam splitter included in the first attenuation assembly 2 is translatable in a two-dimensional direction and its pitch and yaw angles are adjustable, enabling adjustment of the position and angle of the beam to be measured. The extinction element included in the first attenuation assembly 2 is translatable in a two-dimensional direction to ensure that the beam transmitted from the beam splitter can completely enter the extinction element. The reflective element included in the axis-adjusting assembly 3 is translatable in a two-dimensional direction and its pitch and yaw angles are adjustable.

[0095] The collimation component 1, the first attenuation component 2, the axis adjustment component 3, and the camera component 8 can be fixed to the base plate 10 with screws. The beam quality analysis system of this embodiment may be equipped with an outer cover to completely enclose all components mounted on the base plate 10, ensuring personnel safety. The beam quality analysis system of this embodiment can support large-aperture beam measurement, exemplarily supporting real-time online measurement of 86.5% of beams with an aperture of 50mm and a power output of tens of thousands of watts.

[0096] The beam quality analysis system provided by this invention has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the embodiments above are merely for the purpose of helping to understand the method and core ideas of this invention. It should be noted that those skilled in the art can make various improvements and modifications to this invention without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this invention.

Claims

1. A beam quality analysis system, characterized in that, include: Base plate; A collimation assembly, fixed to the base plate, is used to collimate the beam of light to be measured incident on the collimation assembly; The first attenuation component is fixed to the base plate and located in the output light path of the collimation component, and is used to attenuate the energy of the beam to be measured. A beam-shrinking assembly, fixed to the base plate and located in the output optical path of the first attenuation assembly, is used to shrink the beam to be tested. The acquisition component is fixed to the base plate and located in the output optical path of the beam-shrinking component, and is used to receive the beam to be tested and obtain a beam spot image.

2. The beam quality analysis system according to claim 1, characterized in that, The first attenuation component includes an attenuation unit, the attenuation unit comprising: A beam splitter is used to partially reflect and partially transmit the beam to be tested incident on the beam splitter, so that the reflected beam forms the propagating beam to be tested. An extinction element is disposed on the transmission light path of the beam splitter and is used to absorb the light beam transmitted from the beam splitter.

3. The beam quality analysis system according to claim 2, characterized in that, The extinction element includes an extinction tube, which is used to allow the light beam transmitted from the beam splitter to enter the extinction tube, and the inner wall of the extinction tube is provided with a light-absorbing surface.

4. The beam quality analysis system according to claim 2, characterized in that, Also includes: A stray light collecting component is disposed on the side of the beam splitter away from the extinction component. The stray light collecting component includes an extinction plate, the surface of which is a light-absorbing surface and is provided with a conical surface.

5. The beam quality analysis system according to claim 1, characterized in that, The first attenuation component includes: The first attenuation unit includes a first beam splitter and a first extinction member. The first beam splitter is used to partially reflect and partially transmit the beam of light to be tested incident on the first beam splitter, so that the reflected beam forms the beam of light to be tested that propagates. The first extinction member is disposed on the transmission light path of the first beam splitter and is used to absorb the beam of light transmitted from the first beam splitter. The second attenuation unit is disposed on the reflected light path of the first beam splitter and includes a second beam splitter and a second extinction unit. The second beam splitter is used to partially reflect and partially transmit the beam to be tested incident on the second beam splitter, so that the reflected beam forms the beam to be tested that propagates. The second extinction unit is disposed on the transmitted light path of the second beam splitter and is used to absorb the beam transmitted from the second beam splitter. The third attenuation unit is disposed on the reflected light path of the second beam splitter and includes a third beam splitter and a third extinction unit. The third beam splitter is used to partially reflect and partially transmit the test beam incident on the third beam splitter, so that the reflected beam forms the propagating test beam. The third extinction unit is disposed on the transmitted light path of the third beam splitter and is used to absorb the beam transmitted from the third beam splitter. The fourth attenuation unit is disposed on the reflected light path of the third beam splitter and includes the fourth beam splitter. The fourth beam splitter is used to partially reflect and partially transmit the beam to be tested incident on the fourth beam splitter, so that the reflected beam forms the propagating beam to be tested. The beam quality analysis system also includes: The first stray light collecting component is disposed on the side of the first beam splitter away from the first extinction component; The second stray light collecting component is disposed on the side of the second beam splitter away from the second extinction component.

6. The beam quality analysis system according to claim 1, characterized in that, Also includes: The second attenuation component is fixed to the base plate and includes a rotating wheel and at least two attenuation plates disposed on the rotating wheel. The at least two attenuation plates have different attenuation ratios for the beam energy. The rotating wheel is used to drive the at least two attenuation plates to rotate so that any one of the attenuation plates is in the propagation optical path of the beam to be tested.

7. The beam quality analysis system according to any one of claims 1 to 6, characterized in that, Also includes: An axis-adjusting assembly is fixed to the base plate and located in the optical path between the first attenuation assembly and the beam-shrinking assembly, and is used to adjust the optical axis of the beam to be tested.

8. The beam quality analysis system according to any one of claims 1 to 6, characterized in that, The acquisition component includes: A first camera is used to receive the beam to be measured and obtain a light spot image; A displacement stage is used to support the first camera and to drive the first camera to move along the optical axis of the first camera.

9. The beam quality analysis system according to any one of claims 1 to 6, characterized in that, Also includes: An optical axis memory component is fixed to the base plate and located in the outgoing optical path of the collimation component. It is used to obtain the deviation between the incident position and the reference position of the beam to be tested, so as to adjust the position and angle of the collimation component according to the deviation.

10. The beam quality analysis system according to claim 9, characterized in that, The optical axis memory component includes: The first beam splitter is movable into and out of a preset position, the preset position being located between the collimation component and the first attenuation component, and the first beam splitter is used to reflect part of the beam to be tested from the collimation component; A camera assembly, fixed to the base plate and located on the reflected light path of the first beam splitter, is used to receive the reflected light beam from the first beam splitter and obtain a light spot image.

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