High sensitivity hydrogen optical detection device and detection method

Abstract

The application discloses a high-sensitivity hydrogen optical detection device and a detection method, and relates to the technical field of hydrogen detection.The detection device comprises a substrate, a hydrogen-absorbing deformation sensitive layer arranged on the substrate, a first reflecting film arranged on the hydrogen-absorbing deformation sensitive layer, and a matching laser module, a photosensitive module and a data processing module.The hydrogen-absorbing deformation sensitive layer generates thickness change after absorbing hydrogen, the thickness change of the sensitive layer directly causes the offset of reflected light path, and the hydrogen concentration can be calculated by detecting the position change of the reflected light spot.The high-sensitivity hydrogen optical detection device proposed in the application relies on mechanical deformation to be converted into an optical position signal, and the working mode has the advantages of fast response speed and high sensitivity.Meanwhile, the detection mode is pure optical non-contact measurement, is not affected by an electromagnetic environment, and the detection device has good operation stability, so that the early fault early warning demand of the power system can be met, and sudden equipment failure can be prevented, and the safe and stable operation of the power grid can be ensured.

Description

Technical Field

[0001] This invention relates to the field of hydrogen detection technology, and in particular to a high-sensitivity hydrogen optical detection device and detection method. Background Technology

[0002] During the operation of various core equipment in the power system, hydrogen is a key characteristic gas for characterizing latent faults, sealing leaks, and insulation degradation. For example, when oil-immersed transformers experience early faults such as partial discharge or overheating, the insulating oil decomposes to produce trace amounts of hydrogen, which can serve as an important criterion for fault early warning. Large hydrogen-cooled generators require real-time monitoring of trace hydrogen leaks to prevent hydrogen accumulation and the risk of explosion, while ensuring the unit's cooling efficiency. Insulation aging and internal micro-discharge defects in power equipment such as GIS, instrument transformers, and cable terminals are also accompanied by the generation of trace amounts of hydrogen. Power scenarios have stringent requirements for hydrogen detection, requiring ultra-high detection accuracy at the ppm or even ppb level, and adaptability to complex operating conditions with wide outdoor temperature ranges and strong electromagnetic interference. Achieving long-term stable online monitoring of hydrogen is of great practical significance for preventing sudden equipment failures and ensuring the safe and stable operation of the power grid.

[0003] Currently, hydrogen detection mainly includes gas chromatography, electrochemical methods, and traditional optical methods. Among them, gas chromatography is mainly used for offline hydrogen detection. However, due to the cumbersome and time-consuming degassing, separation, and analysis processes, gas chromatography is not suitable for the online monitoring needs of power systems. Electrochemical detection uses hydrogen-sensitive materials to undergo a redox reaction with hydrogen, thereby generating a weak current signal related to the hydrogen concentration for continuous monitoring. However, the sensing electrodes are easily affected by ambient temperature and humidity, as well as interference from stray gases in the field, resulting in significant signal drift, short equipment lifespan, and interference from the strong electromagnetic environment in power fields, leading to poor data stability. Traditional optical detection technology emits a specific laser beam through the gas to be measured. Hydrogen molecules selectively absorb light energy in the corresponding wavelength band, and the hydrogen concentration can be calculated by detecting the attenuation of the transmitted light intensity. However, the laser absorption spectrum is limited by the low infrared absorption coefficient of hydrogen itself, resulting in poor signal-to-noise ratio for trace ppb-level detection. Furthermore, the device system is relatively complex and cannot meet the early fault warning requirements of power systems. Summary of the Invention

[0004] This invention provides a highly sensitive optical detection device and method for hydrogen, which aims to effectively detect trace amounts of hydrogen to meet the early warning requirements of power systems, thereby preventing sudden equipment failures and ensuring the safe and stable operation of the power grid.

[0005] The high-sensitivity hydrogen optical detection device provided by this invention includes:

[0006] Base;

[0007] A hydrogen-absorbing deformation-sensitive layer is disposed on the substrate; the hydrogen-absorbing deformation-sensitive layer undergoes a thickness change after absorbing hydrogen gas;

[0008] A first reflective film is disposed on the surface of the hydrogen absorption deformation sensitive layer;

[0009] The laser module is used to emit a laser at a preset angle onto the surface of the first reflective film;

[0010] A photosensitive module is used to receive the laser light reflected by the first reflective film and record the position information of the light spot;

[0011] The data processing module is used to analyze the position information of the light spot and calculate the hydrogen concentration.

[0012] Optionally, the material of the hydrogen absorption deformation sensitive layer is at least one of palladium, tantalum, zirconium, palladium alloy, tantalum alloy, zirconium alloy, and rare earth metal hydride.

[0013] Optionally, the material of the first reflective film is at least one of gold, silver, platinum, titanium, chromium, and nickel.

[0014] Optionally, the substrate is a carbon-based material.

[0015] Optionally, the hydrogen absorption deformation sensitive layer includes multiple measuring sections, each with a different initial thickness.

[0016] Optionally, the substrate is further provided with a constraint layer, which is disposed in close contact with and around the hydrogen absorption deformation sensitive layer, and the constraint layer provides rigid constraint on the in-plane expansion of the hydrogen absorption deformation sensitive layer.

[0017] Optionally, the constraint layer is made of at least one of rigid resin, inorganic ceramic, gold, platinum, tungsten, and molybdenum.

[0018] Optionally, the substrate is further provided with a zero-point calibration area, and the zero-point calibration area is provided with a second reflective film; the thickness of the second reflective film is the same as the thickness of the first reflective film.

[0019] Optionally, the photosensitive module is a CCD photosensitive element.

[0020] The high-sensitivity optical detection method for hydrogen gas provided by this invention uses the above-mentioned device to detect hydrogen gas, and the method includes the following steps:

[0021] S1, emit a laser beam at a preset angle toward the surface of the first reflective film;

[0022] S2, receives the laser light reflected by the first reflective film and records the position information of the light spot;

[0023] S3, parse the spot position information and calculate the hydrogen concentration;

[0024] The hydrogen concentration is calculated using the following formula:

[0025] ;

[0026] In the formula, The distance of the light spot displacement. This represents the increase in thickness of the hydrogen absorption deformation sensitive layer. The laser incident angle, Where is the hydrogen concentration, and k is the deformation constant of the hydrogen absorption deformation sensitive layer related to the hydrogen concentration.

[0027] The present invention has the following beneficial effects:

[0028] This invention is based on the mechanism that the hydrogen-absorbing deformation sensitive layer expands and changes its thickness after absorbing hydrogen. The change in the thickness of the sensitive layer directly causes the reflected light path to shift. The hydrogen concentration can be calculated by detecting the change in the position of the reflected light spot. The light spot position signal is intuitive and easy to capture, and the signal conversion link is simple. The working mode of converting mechanical deformation into an optical position signal has the advantages of fast response speed and high sensitivity. The detection device can quickly sense changes in hydrogen concentration and achieve real-time and accurate detection of hydrogen. At the same time, this detection method is a pure optical non-contact measurement, which is not affected by the electromagnetic environment, and the detection device has good operational stability. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the system structure of some embodiments of the high-sensitivity hydrogen optical detection device of the present invention;

[0031] Figure 2 This is a schematic diagram illustrating the detection principle of the high-sensitivity hydrogen optical detection device of the present invention;

[0032] Figure 3 This is a schematic diagram of the film cross-sectional structure of Embodiment 1 of the high-sensitivity hydrogen optical detection device of the present invention;

[0033] Figure 4 This is a schematic diagram of the film layer planar structure of Embodiment 1 of the high-sensitivity hydrogen optical detection device of the present invention;

[0034] Figure 5 This is a schematic diagram of the film cross-sectional structure of Embodiment 2 of the high-sensitivity hydrogen optical detection device of the present invention;

[0035] Figure 6 This is a schematic diagram of the film cross-sectional structure of Embodiment 3 of the high-sensitivity hydrogen optical detection device of the present invention;

[0036] Figure 7 This is a schematic diagram of the film cross-sectional structure of Embodiment 4 of the high-sensitivity hydrogen optical detection device of the present invention;

[0037] Figure 8 This is a schematic diagram of the position of the light spot received by the photosensitive module in Embodiment 4 of the high-sensitivity hydrogen optical detection device of the present invention.

[0038] Explanation of reference numerals in the attached figures:

[0039] 1. Substrate; 2. Hydrogen absorption deformation sensitive layer; 3. First reflective film; 4. Laser module; 41. Laser; 42. Mirror; 5. Photosensitive module; 6. Data processing module; 7. Constraint layer; 8. Second reflective film. Detailed Implementation

[0040] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0041] In the description of this invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0042] The terms "first" and "second" in this invention are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features; thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0043] This invention provides a highly sensitive optical detection device and method for hydrogen, which aims to effectively detect trace amounts of hydrogen to meet the early warning requirements of power systems, thereby preventing sudden equipment failures and ensuring the safe and stable operation of the power grid.

[0044] See Figure 1 In this embodiment of the invention, the high-sensitivity hydrogen optical detection device includes a substrate 1, a hydrogen absorption deformation sensitive layer 2, a first reflective film 3, a laser module 4, a photosensitive module 5, and a data processing module 6. The hydrogen absorption deformation sensitive layer 2 is disposed on the substrate 1, and the first reflective film 3 is disposed on the hydrogen absorption deformation sensitive layer 2. The laser module 4 emits laser light at a preset angle onto the surface of the first reflective film 3. The photosensitive module 5 receives the laser light reflected from the first reflective film 3 and records the position information of the light spot. The data processing module 6 is electrically connected to the photosensitive module 5 and is used to analyze the position information of the light spot and calculate the hydrogen concentration.

[0045] In this embodiment of the invention, the hydrogen-absorbing deformation sensitive layer expands in volume after absorbing hydrogen. The material of the hydrogen-absorbing deformation sensitive layer includes, but is not limited to, palladium, tantalum, zirconium, palladium alloy, tantalum alloy, zirconium alloy, rare earth metal hydrides, etc.

[0046] In the case of low-hydrogen conditions (H / Pd atomic ratio < 0.02), hydrogen atoms can be uniformly filled into the interstices of the palladium lattice in small quantities, causing elastic and uniform expansion of the palladium lattice. The number of interstitial hydrogen sites is positively correlated with the hydrogen concentration. At this time, the volume expansion of palladium is approximately proportional to the hydrogen concentration multiplied by a fixed coefficient, satisfying an approximate direct proportional relationship. Moreover, the thickness of palladium can be basically restored after dehydrogenation. As the hydrogen concentration increases, palladium undergoes a transformation from the α-phase to the β-phase palladium hydride, which leads to sudden and significant lattice expansion. The concentration change and the palladium volume change will deviate from the direct proportional relationship. Therefore, the initial thickness of the palladium film needs to be designed according to the hydrogen detection range, limiting the upper limit of the volume expansion of the palladium film to the α-phase range. For example, for the requirements of online monitoring of power system faults (hydrogen concentration 1~500 μL / L), the initial thickness of the palladium film can be selected from 100~1000 nm, and the area of ​​the palladium film can be selected from 5~100 mm². 2 The shape of the palladium film is not limited and can be rectangular, square, circular, elliptical, rhomboid, or various planar shapes. Pd-Au alloy, Pd-Co alloy, Pd-Y alloy, Pd-Ag alloy, and Pd-Cu alloy can suppress the α-β phase transition of palladium to a certain extent and can lengthen the linear proportional range of expansion volume versus hydrogen concentration.

[0047] Besides palladium and palladium alloys, tantalum, zirconium, tantalum alloys (Ta-Pd alloys, Ta-Ru alloys, etc.), and zirconium alloys also exhibit significant and reversible thickness changes after absorbing hydrogen. Hydrogen atoms fill the interstices of the tantalum or zirconium lattice, thereby inducing elastic lattice distortion. Rare earth metal hydrides such as LaNi5H6 and CeH2 show significant lattice volume expansion after absorbing hydrogen, with thickness changes reaching 15-25%, and can also be used as alternative materials to palladium and palladium alloys.

[0048] The first reflective film is disposed on the hydrogen absorption deformation sensitive layer. The first reflective film needs to meet the requirements of high reflectivity, good adhesion to the palladium film, chemical stability, and low hydrogen permeation interference. At the same time, it is compatible with the reflection requirements of common laser wavelengths (such as 532nm, 632.8nm, 660nm, 850nm, 1310nm, etc.). In the embodiments of the present invention, the material of the first reflective film can be selected from gold, silver, platinum, titanium, chromium, nickel and related alloys.

[0049] The hydrogen absorption deformation sensitive layer is disposed on the substrate. The substrate needs to meet the requirements of flexibility and low modulus (to reduce film shedding), hydrogen permeability, and coating compatibility. In the embodiments of the present invention, the substrate is preferably a carbon-based material, such as ultrathin graphite sheets, graphene / polymer composite flexible substrates, carbon nanotube / polymer composite flexible substrates, diamond-like carbon films, porous carbon sheets, carbon fiber films (carbon cloth), etc.

[0050] In some embodiments, the laser module 4 includes a laser 41 and a reflector 42. The laser 41 emits laser light of a preset wavelength in the visible to infrared band, such as a 532nm green semiconductor laser, a 660nm red semiconductor laser, or a 632.8nm He-Ne laser. The reflector 42 deflects the laser emitted from the laser 41, so that the laser light is incident on the surface of the first reflective film 3 at a preset angle θ. The reflector 42 also has a beam-splitting function, which can split the laser light emitted by the laser 41 into multiple parallel laser beams to meet the detection requirements of multiple light spots. In some specific embodiments, the reflector 42 can be a MEMS optical reflector. The chip-level micro-optical device, manufactured based on microelectromechanical systems (MEMS) technology, has the core function of driving a mirror to generate precise angular deflection or surface shape changes through electrical signals, thereby achieving pointing control, scanning, modulation, or wavefront correction of the laser beam. It has the advantages of miniaturization, low power consumption, and high precision. The photosensitive module 5 uses a CCD photosensitive element to record the position of the light spot. The data processing module 6 receives the electrical signal output by the photosensitive module 5, analyzes the light spot position information, and calculates the hydrogen concentration by combining it with a preset relationship. The data processing module 6 includes at least two basic units: a control circuit and a signal acquisition circuit. This invention does not specifically limit the specific circuit topology, component models, or hardware carrier of the data processing module 6.

[0051] In this embodiment of the invention, the hydrogen-absorbing deformation sensitive layer expands and its thickness changes after absorbing hydrogen. The change in the thickness of the sensitive layer directly causes the reflected light path to shift. The hydrogen concentration can be calculated by analyzing the positional change of the reflected light spot.

[0052] Optical path shift caused by changes in the thickness of the hydrogen absorption deformation sensitive layer, such as Figure 2 As shown, the angle between the incident laser and the plane is... The increase in thickness of the hydrogen-absorbing deformation-sensitive layer after absorbing hydrogen is [value missing]. (Since the first reflective film does not absorb hydrogen, the increase in the thickness of the film system is the same as the increase in the thickness of the hydrogen absorption deformation sensitive layer.) Figure 2 Therefore, the structure of the first reflective film is omitted. Accordingly, the light spot displacement distance is... From mathematical relations, we know that:

[0053] ;

[0054] Furthermore, due to the increased thickness of the hydrogen absorption deformation sensitive layer... For parameters related to the type and volume of the hydrogen-absorbing material, and for ease of calculation, the area of ​​the hydrogen-absorbing deformation-sensitive layer in the planar direction can be kept constant. If a hydrogen-absorbing deformation-sensitive material is selected whose volume expansion varies linearly or approximately linearly with the hydrogen concentration, the above relationship can be converted to:

[0055] ;

[0056] In the formula, k is the deformation constant of the hydrogen absorption deformation sensitive layer related to the hydrogen concentration. This parameter can be calibrated through a series of hydrogen absorption tests with a defined concentration.

[0057] Therefore, the steps of the above-mentioned high-sensitivity hydrogen optical detection device for detecting hydrogen concentration can be summarized as follows:

[0058] S1, emit a laser beam at a preset angle toward the surface of the first reflective film;

[0059] S2, receives the laser light reflected by the first reflective film and records the position information of the light spot;

[0060] S3, analyze the spot position information and calculate the hydrogen concentration;

[0061] Hydrogen concentration is calculated using the following formula:

[0062] ;

[0063] In the formula, The distance of the light spot displacement. This represents the increase in thickness of the hydrogen absorption deformation sensitive layer. The laser incident angle, Where is the hydrogen concentration, and k is the deformation constant of the hydrogen absorption deformation sensitive layer related to the hydrogen concentration.

[0064] This invention is based on the mechanism that the hydrogen-absorbing deformation sensitive layer expands and its thickness changes after absorbing hydrogen. The change in the thickness of the sensitive layer directly causes the reflected light path to shift. The hydrogen concentration is obtained by detecting the change in the position of the reflected light spot. The light spot position signal is intuitive and easy to capture, and the signal conversion link is simple. The working mode of converting mechanical deformation into an optical position signal has the advantages of fast response speed and high sensitivity. The detection device can quickly sense the change in hydrogen concentration and achieve real-time and accurate detection of hydrogen. At the same time, this detection method is a pure optical non-contact measurement, which is not affected by the electromagnetic environment, and the detection device has good operational stability.

[0065] Based on the above embodiments, the present invention also proposes the following specific embodiments. It should be noted that the following specific embodiments are merely exemplary and are not intended to limit the scope of protection of the present invention in any way.

[0066] Example 1:

[0067] This invention provides a high-sensitivity optical detection device for hydrogen gas, the system structure of which is as follows: Figure 1 For membrane structure, please refer to Figure 3 , 4 The hydrogen absorption deformation sensitive layer 2 is a palladium film, and a constraint layer 7 is also provided on the substrate 1. The constraint layer 7 is set closely around the hydrogen absorption deformation sensitive layer 2. The constraint layer 7 provides rigid constraint on the in-plane expansion of the hydrogen absorption deformation sensitive layer 2, so that the deformation of the hydrogen absorption deformation sensitive layer 2 is concentrated only in the thickness direction.

[0068] The constraint layer 7 must meet the requirements of not adsorbing hydrogen, not undergoing hydrogen-induced deformation, adhering firmly to the carbon-based substrate / hydrogen-absorbing deformation sensitive layer, and being suitable for the operating conditions of power equipment. The materials that can be selected for the constraint layer 7 include, but are not limited to, rigid resins (such as high-modulus rigid polyimide, hard phenolic resin), inorganic ceramics (such as alumina, silicon nitride, zirconium oxide, etc.), gold, platinum, tungsten, molybdenum, etc. Rigid resins can form a ring-shaped constraint dam for the hydrogen-absorbing deformation sensitive layer by dispensing and photolithography. Gold, platinum, tungsten, and molybdenum can be patterned by physical vapor deposition or chemical vapor deposition. Inorganic ceramics can be prepared by physical vapor deposition, chemical vapor deposition, or powder sintering.

[0069] Example 2:

[0070] This invention provides a high-sensitivity optical detection device for hydrogen gas, the system structure of which is as follows: Figure 1 Based on Example 1, the membrane structure is divided into a first measuring range section RH and a second measuring range section RL. The thickness of the hydrogen absorption deformation sensitive layer in the first measuring range section RH is greater than that in the second measuring range section RL. Figure 5 As shown.

[0071] In this embodiment, the thickness of the hydrogen absorption deformation sensitive layer of the first range section RH can be selected from 500 to 1000 nm, and the thickness of the hydrogen absorption deformation sensitive layer of the second range section RL can be selected from 100 to 500 nm. The initial thickness of the second range section RL is small, so even when faced with trace amounts of hydrogen generated by early faults in power equipment, it can produce sufficient relative thickness changes to drive a significant shift in the reflected light spot, thus achieving higher detection sensitivity. The initial thickness of the first range section RH is larger, and the deformation margin is sufficient. Even under conditions where the equipment overheats or discharges, resulting in higher concentrations of hydrogen, the overall volume expansion can still be strictly controlled within the linear expansion range, achieving stable measurement of hydrogen concentration. The multiple range sections are arranged on the same substrate and can share a single set of laser emission optical path, photosensitive module, and data processing module, eliminating the need to independently deploy multiple sensors with different ranges.

[0072] The two range settings are just an example. In actual applications, three or more ranges with different palladium film thicknesses can be set as needed.

[0073] Example 3:

[0074] See Figure 6 Based on Example 2, this embodiment separates the first range section RH and the second range section RL with a constraint layer 7 so that the two range sections can independently detect the hydrogen concentration and avoid cross-interference.

[0075] Example 4:

[0076] See Figure 7 Based on embodiment 3, this embodiment includes a zero-point calibration area. The zero-point calibration area includes a second reflective film 8. The second reflective film 8 has the same thickness and material as the first reflective film 3. The light spot reflected by the second reflective film 8 is used for zero-point calibration.

[0077] In actual working conditions, high-sensitivity hydrogen optical detection devices may be unable to serve as stable zero points in the palladium film region due to unavoidable minor irreversible deformation and stress deviation inherent in the palladium film itself, coupled with global interference such as light source aging, temperature changes, and mechanical vibration. In contrast, the second reflective film in the region without palladium film is insensitive to hydrogen and has a more stable optical and mechanical state, and can be used as a built-in reference zero point for real-time zero-point calibration and cancellation of common-mode interference.

[0078] See Figure 8 The initial distance between the reflected light spot in the palladium film region and the zero point is... The distance between the reflected light spot in the palladium film region after absorbing hydrogen and the zero point is... Then the light spot displacement distance It can be represented as .

[0079] In this embodiment of the invention, the fabrication processes of the hydrogen absorption deformation sensitive layer, the constraint layer, and the reflective layer, as well as the specific implementation methods of the laser module, the photosensitive module, and the data processing module, are not specifically limited. It is understood that the thin film functional layers can be fabricated using commonly used industry processes such as magnetron sputtering, electron beam evaporation, chemical vapor deposition, sol-gel, resin curing, and photolithography, depending on the material. The functional modules such as laser emission, spot photosensitive, and signal processing can be implemented using various general-purpose laser light sources, photosensitive devices, embedded processing chips, and supporting circuits. Furthermore, this invention does not limit the external dimensions and spatial arrangement of the components of the device. In practical applications, conventional layout forms such as coaxial optical path arrangement, layered stacking of components, discrete installation of modules, and partitioning of the substrate plane can be adopted. Those skilled in the art can freely complete the conventional size and structural design according to the installation conditions and detection accuracy requirements.

[0080] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A high-sensitivity optical detection device for hydrogen, characterized in that, include: Base; Hydrogen absorption deformation sensitive layer disposed on the substrate; The hydrogen-absorbing deformation-sensitive layer undergoes a thickness change after absorbing hydrogen gas. A first reflective film is disposed on the surface of the hydrogen absorption deformation sensitive layer; The laser module is used to emit a laser at a preset angle onto the surface of the first reflective film; A photosensitive module is used to receive the laser light reflected by the first reflective film and record the position information of the light spot; The data processing module is used to analyze the position information of the light spot and calculate the hydrogen concentration.

2. The high-sensitivity hydrogen optical detection device according to claim 1, characterized in that, The material of the hydrogen absorption deformation sensitive layer is at least one of palladium, tantalum, zirconium, palladium alloy, tantalum alloy, zirconium alloy, and rare earth metal hydride.

3. The high-sensitivity hydrogen optical detection device according to claim 1, characterized in that, The material of the first reflective film is at least one of gold, silver, platinum, titanium, chromium, and nickel.

4. The high-sensitivity hydrogen optical detection device according to claim 1, characterized in that, The substrate is a carbon-based material.

5. The high-sensitivity hydrogen optical detection device according to claim 1, characterized in that, The hydrogen absorption deformation sensitive layer includes multiple range sections, each with a different initial thickness.

6. The high-sensitivity hydrogen optical detection device according to claim 1, characterized in that, The substrate is further provided with a constraint layer, which is disposed in close contact with and around the hydrogen absorption deformation sensitive layer, and the constraint layer provides rigid constraint on the in-plane expansion of the hydrogen absorption deformation sensitive layer.

7. The high-sensitivity hydrogen optical detection device according to claim 6, characterized in that, The material of the constraint layer is at least one of rigid resin, inorganic ceramic, gold, platinum, tungsten, and molybdenum.

8. The high-sensitivity hydrogen optical detection device according to claim 1, characterized in that, The substrate is also provided with a zero-point calibration area, and the zero-point calibration area is provided with a second reflective film; The thickness of the second reflective film is the same as the thickness of the first reflective film.

9. The high-sensitivity hydrogen optical detection device according to claim 1, characterized in that, The photosensitive module is a CCD photosensitive element.

10. A high-sensitivity optical detection method for hydrogen, comprising using the high-sensitivity optical detection device for hydrogen as described in any one of claims 1-9, characterized in that, The method includes the following steps: S1, emit a laser beam at a preset angle toward the surface of the first reflective film; S2, receives the laser light reflected by the first reflective film and records the position information of the light spot; S3, parse the spot position information and calculate the hydrogen concentration; The hydrogen concentration is calculated using the following formula: ； In the formula, The distance of the light spot displacement. This represents the increase in thickness of the hydrogen absorption deformation sensitive layer. The laser incident angle, Where is the hydrogen concentration, and k is the deformation constant of the hydrogen absorption deformation sensitive layer related to the hydrogen concentration.

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