Dual-pupil modulation based multi-modal common-path microscopic imaging device and method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- HARBIN INST OF TECH
- Filing Date
- 2026-06-08
- Publication Date
- 2026-08-07
AI Technical Summary
此类方案的不足在于：不同光路存在视场畸变差异、放大率差异、机械抖动差异，后期算法配准精度有限（通常仅达到数像素至亚像素量级），难以满足图形晶圆等高精度场景中模态间严格对齐的要求；此外，系统体积大、成本高、调试复杂
[0031]本发明所述的一种基于双光瞳调制的多模态共光路显微成像装置，实现了共焦层析、明场成像、暗场散射成像三种模态在共光路、共物镜、共探测器条件下的分时可重构采集，所获多模态图像天然像素级配准，无需后期算法配准；通过在照明臂中设置分别共轭于样品面与物镜后焦面的两个空间光调制器，将“控制照明形状/位置”与“控制照明角度”两种功能解耦至两个独立调制元件，实现了多模态电子化切换，无需切换照明源或引入额外环形照明装置；收集端采用可切换孔径而非有源相位调制器，在共焦与明场模式下不引入成像光路波前畸变，保证共焦模式下的横向分辨率不退化；在暗场模式下移入中心孔径有效遮挡镜面反射，获得高对比度暗场图像；本发明兼容现有的基于数字微镜器件的并行线阵共焦扫描技术，可在已有结构照明共焦系统的基础上通过升级照明臂与收集臂实现多模态扩展。
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Figure CN122524813A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of optical precision measurement and microscopic imaging technology, specifically relating to a multimodal common-path microscopic imaging device and method based on dual-pupil modulation. Background Technology
[0002] In fields such as semiconductor manufacturing, precision optical component fabrication, and micro / nano structure characterization, high-precision sample detection often requires the simultaneous acquisition of information from multiple imaging modalities: confocal tomography can acquire the sample's three-dimensional morphology (height map), bright-field tomography can acquire the sample's reflectance distribution and RGB color images, and dark-field tomography has high sensitivity to scattering defects (particles, scratches, sub-resolution bridging, etc.) on the sample's surface and subsurface. Multimodal information fusion can significantly improve the accuracy of defect classification and discrimination. Existing technologies typically employ the following two approaches to achieve multimodal imaging:
[0003] The first type involves using multiple independent optical paths or multiple microscope systems to acquire different modalities, and then aligning the modalities using a post-processing image registration algorithm. The drawbacks of this approach are: differences in field-of-view distortion, magnification, and mechanical jitter exist between different optical paths, resulting in limited registration accuracy in the post-processing algorithm (typically only reaching the level of a few pixels to sub-pixels), making it difficult to meet the strict alignment requirements between modalities in high-precision scenarios such as patterned wafers; furthermore, the system is large, costly, and complex to debug.
[0004] The second type involves achieving mode switching within a single microscope by physically switching the illumination source or filter, such as by introducing an external ring LED illumination to achieve a dark field. Although this approach uses a single objective lens, the dark field module typically requires a separate ring illumination device, and mode switching necessitates mechanical intervention of the illumination source, making it impossible to achieve rapid, reconfigurable multimodal acquisition. Furthermore, the ring illumination structure is fixed and lacks programmable illumination angle capabilities.
[0005] In addition, while existing parallel confocal scanning techniques (such as structured illumination confocal scanning based on digital micromirror devices) can provide high-speed three-dimensional tomography capabilities, they typically only operate in bright field mode and lack a collaborative integration mechanism with dark field modes. Summary of the Invention
[0006] The problem to be solved by this invention is to achieve multimodal synchronous reconfigurable imaging under the conditions of common optical path, common objective lens, and common detector. It proposes a multimodal common optical path microscopic imaging device and method based on dual pupil modulation.
[0007] To achieve the above objectives, the present invention provides the following technical solution:
[0008] A multimodal common-path microscopic imaging device based on dual-pupil modulation includes a light source, an optical fiber coupler, a collimator, a first spatial light modulator, a first relay lens group, a second relay lens group, a second spatial light modulator, a beam splitter, a tube mirror, a common objective lens, a sample surface, a piezoelectric displacement device, a third relay lens group, a switchable aperture, a fourth relay lens group, an area array image detector, and a control unit.
[0009] An illumination arm is formed by a light source, an optical fiber coupler, a collimator, a first spatial light modulator, a first relay lens group, a second spatial light modulator, and a second relay lens group arranged sequentially along the optical axis.
[0010] The collection arm is composed of a third relay lens group, a switchable aperture lens group, a fourth relay lens group, and an area array image detector arranged sequentially along the optical axis.
[0011] The illumination arm is located on the left side of the beam splitter, the collection arm is located on the right side of the beam splitter, and the tube lens, common objective lens and sample surface placed on the piezoelectric displacement device are arranged sequentially on the front side of the beam splitter.
[0012] The control unit is used to control the first spatial light modulator, the second spatial light modulator, the piezoelectric displacement device, and the switchable aperture and area array image detector.
[0013] Furthermore, the first spatial light modulator is a digital micromirror device; the second spatial light modulator is a liquid crystal phase-type spatial light modulator, a second digital micromirror device, a programmable aperture wheel, or an annular aperture switching device.
[0014] Furthermore, the first spatial light modulator is conjugate to the sample surface; the second spatial light modulator is conjugate to the back focal plane of the common objective; the first relay lens group is used to image the first spatial light modulator onto the sample surface, and at the same time, the conjugate surface of the back focal plane of the common objective is formed at the Fourier surface position of the first relay lens group, and the second spatial light modulator is located on the conjugate surface of the back focal plane of the common objective.
[0015] Furthermore, the switchable aperture is located at the Fourier surface of the third relay lens group, which is conjugate to the back focal plane of the common objective lens; the area array image detector is conjugate to the sample surface; the switchable aperture has two working states: the optical path ingress and the optical path egress.
[0016] Furthermore, the switchable aperture is an electrically controlled flip-in mechanical aperture, a programmable transmissive liquid crystal light valve, a third digital micromirror device, or a programmable phase modulator. The radius of the central circular light-transmitting area of the switchable aperture is greater than zero and smaller than the pupil radius corresponding to the full-value aperture of the common objective lens.
[0017] Furthermore, the control unit configures the states of three modulation elements according to the operating mode, which includes confocal tomography mode, bright field imaging mode, and dark field scattering imaging mode.
[0018] In confocal tomography mode, the first spatial light modulator loads the structured illumination pattern, the second spatial light modulator loads the phase map that concentrates the light in the central region of the pupil, and the switchable aperture is in the removed state.
[0019] In bright-field imaging mode, the first spatial light modulator is in a state of total internal reflection, the second spatial light modulator is loaded with a phase map that concentrates light in the central region of the pupil, and the switchable aperture is in a state of being removed.
[0020] In dark field scattering imaging mode, the first spatial light modulator is in a state of total internal reflection, the second spatial light modulator is loaded to concentrate the light on the phase map of the outer ring region of the pupil, and the switchable aperture is in a state of shifting in.
[0021] Furthermore, the structured illumination pattern is a high-density linear array pattern extending along a first direction and a high-density linear array pattern extending along a second direction orthogonal to the first direction. The control unit controls the first spatial light modulator to load the linear array patterns in the two orthogonal directions in a time-division manner in confocal tomography mode, and reconstructs the confocal tomography image based on the image sequence acquired by the area array image detector under scanning in the two orthogonal directions.
[0022] Furthermore, in the dark field scattering imaging mode, the inner diameter of the outer ring region of the pupil corresponds to an angle greater than that of the central light-transmitting area of the switchable aperture, and the outer diameter of the outer ring region of the pupil corresponds to the full-value aperture of the common objective lens.
[0023] A multimodal common-path microscopy imaging method based on dual-pupil modulation, implemented using the aforementioned multimodal common-path microscopy imaging device based on dual-pupil modulation, includes the following steps:
[0024] S1. The control unit configures the first spatial light modulator, the second spatial light modulator, and the switchable aperture to the confocal tomography mode, and performs a three-dimensional tomographic scan to obtain a three-dimensional morphology image of the sample;
[0025] S2. The control unit switches the first spatial light modulator, the second spatial light modulator, and the switchable aperture to bright field imaging mode, and the area array image detector acquires a bright field two-dimensional image of the sample.
[0026] The S3 control unit switches the first spatial light modulator, the second spatial light modulator, and the switchable aperture to dark field scattering imaging mode, and the area array image detector acquires dark field scattering images of the sample.
[0027] Furthermore, the transfer cross function of the aforementioned multimodal common-path microscopic imaging device based on dual-pupil modulation... for:
[0028]
[0029] Where g is the pupil coordinate, and The frequency distribution of the pupil surface, for The complex conjugate frequency, S(g) is the illumination pupil function, For the imaging pupil function, for The complex conjugate function.
[0030] The beneficial effects of this invention are:
[0031] This invention discloses a multimodal common-path microscopy imaging device based on dual-pupil modulation, which realizes time-division reconfigurable acquisition of three modes—confocal tomography, bright-field imaging, and dark-field scattering imaging—under common-path, common-objective, and common-detector conditions. The acquired multimodal images are naturally pixel-level registered, eliminating the need for post-processing algorithms. By setting two spatial light modulators conjugate to the sample surface and the objective lens back focal plane, respectively, in the illumination arm, the functions of "controlling the illumination shape / position" and "controlling the illumination angle" are decoupled to two independent modulation elements, achieving electronic switching of multimodal modes without the need to switch illumination sources or introduce additional ring illumination devices. The collection end uses a switchable aperture instead of an active phase modulator, which does not introduce wavefront distortion of the imaging optical path in confocal and bright-field modes, ensuring that the lateral resolution in confocal mode is not degraded. In dark-field mode, the central aperture is moved in to effectively block specular reflection, obtaining high-contrast dark-field images. This invention is compatible with existing parallel linear array confocal scanning technology based on digital micromirror devices and can achieve multimodal expansion by upgrading the illumination arm and collection arm on the basis of existing structured illumination confocal systems. Attached Figure Description
[0032] Figure 1 This is a schematic diagram of the structure of a multimodal common-path microscopic imaging device based on dual-pupil modulation according to the present invention;
[0033] Figure 2 This is a schematic diagram of the pupil illumination distribution of the second spatial light modulator of the present invention in three modes, wherein (a) is the central circle illumination distribution in bright field and confocal modes, (b) is the ring illumination distribution in dark field mode, and (c) is the single azimuth angle oblique illumination distribution.
[0034] Figure 3 This is a schematic diagram of the separation of the mirror and scattering radius at the pupil of the collecting arm and the effect of the switchable aperture in this invention, wherein (a) is a schematic diagram of the backlight passing through the objective lens, and (b) is a schematic diagram of the beam composition distribution at the imaging pupil;
[0035] Figure 4 This is a timing diagram showing the coordinated configuration of the three working modes of this invention. Detailed Implementation
[0036] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention; that is, the described specific embodiments are merely a part of the embodiments of the invention, and not all of them. The components of the specific embodiments of the invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations, and the invention may also have other embodiments.
[0037] Therefore, the following detailed description of specific embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected specific embodiments of the invention. All other specific embodiments obtained by those skilled in the art based on these specific embodiments without inventive effort are within the scope of protection of this invention.
[0038] To further understand the invention's content, features, and effects, the following specific embodiments are provided, along with accompanying drawings. Figure 1 -Appendix Figure 4 Detailed explanation is as follows:
[0039] Example 1:
[0040] A multimodal common-path microscopic imaging device based on dual-pupil modulation includes a light source 1, an optical fiber coupler 2, a collimator 3, a first spatial light modulator 4, a first relay lens group 5, a second relay lens group 6, a second spatial light modulator 7, a beam splitter 8, a tube mirror 9, a common objective lens 10, a sample surface 11, a piezoelectric displacement device 12, a third relay lens group 13, a switchable aperture 14, a fourth relay lens group 15, an area array image detector 16, and a control unit 17.
[0041] The illumination arm is composed of a light source 1, an optical fiber coupler 2, a collimator 3, a first spatial light modulator 4, a first relay lens group 5, a second spatial light modulator 7, and a second relay lens group 6 arranged sequentially along the optical axis.
[0042] The collection arm is composed of the third relay lens group 13, the switchable aperture 14, the fourth relay lens group 15, and the area array image detector 16 arranged sequentially along the optical axis.
[0043] An illumination arm is located on the left side of the beam splitter 8, and a collection arm is located on the right side of the beam splitter 8. A tube lens 9, a common objective lens 10, and a sample surface 11 placed on a piezoelectric displacement device 12 are arranged sequentially on the front side of the beam splitter 8.
[0044] The control unit 17 is used to control the first spatial light modulator 4, the second spatial light modulator 7, the piezoelectric displacement device 12, the switchable aperture device 14, and the area array image detector 16.
[0045] Furthermore, the first spatial light modulator 4 is a digital micromirror device; the second spatial light modulator 7 is a liquid crystal phase-type spatial light modulator, a second digital micromirror device, a programmable aperture wheel, or an annular aperture switching device.
[0046] Furthermore, the first spatial light modulator 4 is conjugate to the sample surface 11; the second spatial light modulator 7 is conjugate to the back focal plane of the common objective lens 10; the first relay lens group 5 is used to image the first spatial light modulator 4 onto the sample surface 11, and at the same time, the conjugate surface of the back focal plane of the common objective lens 10 is formed at the Fourier surface position of the first relay lens group 5, and the second spatial light modulator 7 is located on the conjugate surface of the back focal plane of the common objective lens 10.
[0047] Furthermore, the switchable aperture 14 is located at the Fourier surface position of the third relay lens group 13, and the Fourier surface position of the third relay lens group 13 is conjugate to the back focal plane of the common objective lens 10; the area array image detector 16 is conjugate to the sample surface 11; the switchable aperture 14 has two working states: the optical path ingress and the optical path egress.
[0048] Furthermore, the switchable aperture 14 is an electrically controlled flip-in mechanical aperture, a programmable transmissive liquid crystal light valve, a third digital micromirror device, or a programmable phase modulator. The radius of the central circular light-transmitting area of the switchable aperture 14 is greater than zero and smaller than the pupil radius corresponding to the full-value aperture of the common objective lens 10.
[0049] Furthermore, the control unit 17 configures the states of three modulation elements according to the operating mode, including confocal tomography mode, bright field imaging mode, and dark field scattering imaging mode.
[0050] In confocal tomography mode, the first spatial light modulator 4 loads a structured illumination pattern, the second spatial light modulator 7 loads a phase map that concentrates light in the central region of the pupil, and the switchable aperture 14 is in the removed state.
[0051] In bright-field imaging mode, the first spatial light modulator 4 is in total internal reflection state, the second spatial light modulator 7 is loaded with a phase map that concentrates light in the central region of the pupil, and the switchable aperture 14 is in the removed state.
[0052] In dark field scattering imaging mode, the first spatial light modulator 4 is in a total internal reflection state, the second spatial light modulator 7 is loaded with a phase map that concentrates light in the outer ring region of the pupil, and the switchable aperture 14 is in a shift-in state.
[0053] Furthermore, the structured illumination pattern is a high-density linear array pattern extending along the first direction and a high-density linear array pattern extending along the second direction orthogonal to the first direction. The control unit 17 controls the first spatial light modulator to load the linear array patterns in the two orthogonal directions in a 4-minute time-sharing mode, and reconstructs the confocal tomographic image based on the image sequence acquired by the area array image detector 16 under scanning in the two orthogonal directions.
[0054] Furthermore, in the dark field scattering imaging mode, the inner diameter of the outer ring region of the pupil corresponds to an angle greater than that of the central light-transmitting area of the switchable aperture 14, and the outer diameter of the outer ring region of the pupil corresponds to the full-value aperture of the common objective lens 10.
[0055] Furthermore, the light source is a low-coherence light source, preferably a light-emitting diode; the physical full-scale aperture of the common objective lens is not less than 0.85 to ensure sufficient imaging resolution after dividing the illumination ring and the collection center area; the piezoelectric positioner carries the sample surface or the common objective lens and moves along the optical axis under the control of the control unit to achieve three-dimensional tomographic scanning.
[0056] Example 2:
[0057] A multimodal common-path microscopy imaging method based on dual-pupil modulation, implemented using the multimodal common-path microscopy imaging device based on dual-pupil modulation described in Example 1, is characterized by comprising the following steps:
[0058] S1. The control unit configures the first spatial light modulator, the second spatial light modulator, and the switchable aperture to the confocal tomography mode, and performs a three-dimensional tomographic scan to obtain a three-dimensional morphology image of the sample;
[0059] S2. The control unit switches the first spatial light modulator, the second spatial light modulator, and the switchable aperture to bright field imaging mode, and the area array image detector acquires a bright field two-dimensional image of the sample.
[0060] The S3 control unit switches the first spatial light modulator, the second spatial light modulator, and the switchable aperture to dark field scattering imaging mode, and the area array image detector acquires dark field scattering images of the sample.
[0061] Furthermore, the transfer cross function of the aforementioned multimodal common-path microscopic imaging device based on dual-pupil modulation... for:
[0062]
[0063] Where g is the pupil coordinate, and The frequency distribution of the pupil surface, for The complex conjugate frequency, S(g) is the illumination pupil function, For the imaging pupil function, for The complex conjugate function.
[0064] Furthermore, when the second spatial light modulator loads the phase map of the central region of the pupil, S(g) is expressed as:
[0065]
[0066] Where g threshold This illuminates the edge of the pupil aperture. At this point, g is closer to the center of the optical axis, the illumination beam angle is smaller, and the obliquely incident light from the outer ring cannot enter, making it suitable for bright-field or confocal detection. Adjust the pupil aperture size so that g... threshold With the same numerical aperture as the objective lens, the light energy utilization is highest, and it does not affect bright-field or confocal detection; when the second spatial light modulator loads the phase map of the outer ring region of the pupil, S(g) is expressed as:
[0067]
[0068] At this time, the beam in the central region and the low-frequency stray light are blocked, and only the oblique incident light enters. The illumination light is a large-angle illumination, which can be used in dark field detection.
[0069] When the switchable aperture is inactive, P(f) has no effect, allowing all frequency components to pass through; when the switchable aperture is active, P(f) can be expressed as:
[0070]
[0071] Where f threshold The edge frequency of the imaging pupil aperture is such that the imaging pupil blocks the specular reflection light from the outer ring, allowing only scattered light to pass through, thus achieving dark-field imaging.
[0072] Furthermore, the first spatial light modulator loads high-density linear array patterns in two orthogonal directions in a time-division manner, and the control unit extracts and fuses the images in the orthogonal directions through a virtual slit to reconstruct a confocal tomographic image with isotropic resolution based on the acquired image sequence.
[0073] Example 3:
[0074] This embodiment is based on Embodiment 1 and is applied in practice as follows:
[0075] like Figure 1 As shown, this embodiment provides a multimodal common-path microscopic imaging device based on dual-pupil modulation, comprising:
[0076] The light source is a light-emitting diode with a center wavelength of 455nm, which forms a collimated illumination beam after passing through fiber optic coupler 2 and collimating lens group 3;
[0077] The first spatial light modulator (digital micromirror device, model example: TI DLP670S, micromirror array 2716×1600, micromirror size 5.4μm, binary pattern refresh rate not less than 9kHz) has a target surface conjugate to the sample surface and is used to load structured illumination patterns in confocal mode.
[0078] The first relay lens group La and the second relay lens group Lb, the front focal plane of La coincides with the target surface of the first spatial light modulator 4, and the back focal plane of Lb coincides with the object-side conjugate surface of the common objective lens 10; the Fourier surface position between La and Lb is the illumination pupil surface, denoted as pupil A.
[0079] The second spatial light modulator is a liquid crystal phase-type spatial light modulator, whose modulation surface is located at pullil A and is conjugate with the back focal plane of the common objective lens 10.
[0080] The beam splitter is a non-polarized beam splitter cube, located after the first relay lens group and before the common objective lens 10, with a reflectivity to transmittance ratio of 50:50.
[0081] The tube endoscope has a focal length of 200mm, and the common objective is a 100x microscope objective with a numerical aperture of 0.90. The sample surface is placed on the object-side focal plane of the common objective and is supported by a piezoelectric positioner to achieve axial scanning.
[0082] In the collecting arm, the reflected light from the sample surface passes through the common objective lens, tube lens, and beam splitter before entering the third relay lens group Lc and the fourth relay lens group Ld. The front focal plane of Lc is located at the intermediate image plane after the beam splitter 8. The Fourier surface position between Lc and Ld is the collecting pupil surface, denoted as pupil C.
[0083] The switchable aperture is an electrically controlled flip-in mechanical aperture located at pulley C, with the diameter of its central circular light-transmitting aperture set to the size corresponding to a numerical aperture of 0.60. It is in the out state in confocal tomography mode and bright field imaging mode, and in the in state in dark field scattering imaging mode.
[0084] The area array image detector is a high-speed CMOS area array image detector, whose photosensitive surface is conjugate to the sample surface;
[0085] The control unit is electrically connected to the first spatial light modulator, the second spatial light modulator, the switchable aperture, the piezoelectric positioner, and the area array image detector, respectively, and performs coordinated configuration and synchronous triggering of each modulation element.
[0086] Example 4:
[0087] Based on Example 1, this embodiment establishes a collaborative acquisition process for three modes as follows:
[0088] The control unit performs multimodal acquisition according to the following timing sequence:
[0089] The first stage (confocal tomography), lasting approximately several seconds, completes the acquisition and reconstruction of three-dimensional data for all axial layers;
[0090] In the second stage (mode switching), the control unit switches the phase diagram of the second spatial light modulator from the central circle to a ring distribution, and at the same time drives the switchable aperture 14 to switch from the move-out state to the move-in state. The duration of this switching is on the order of tens to hundreds of milliseconds.
[0091] In the third stage (dark field acquisition), the first spatial light modulator switches to total internal reflection mode, and the area array image detector acquires dark field images.
[0092] In the fourth stage (optional, bright field acquisition), the control unit maintains the second spatial light modulator in the center circular phase pattern, switches the switchable aperture to the out state, and acquires a bright field image.
[0093] Since the three modes share the same objective lens, the same tube lens, and the same area array image detector throughout the entire process, and the sample surface remains unchanged during the acquisition process, the acquired three-dimensional topography image, bright field image and dark field image are naturally aligned at the pixel level. The correspondence between the images of each mode is determined by the system geometry rather than established by the registration algorithm in the later stage. The registration accuracy is only limited by the pixel sampling accuracy of the detector.
[0094] Example 5:
[0095] Based on Example 1, this embodiment presents a method for upgrading the compatibility of existing structured lighting confocal systems as follows:
[0096] For existing structured illumination confocal microscopy systems based on digital micromirror devices (i.e., systems that only include a first spatial light modulator as the structured light modulation element at the illumination end and whose collection arm is a conventional through-path optical path), they can be upgraded to the multimodal common-path device of this invention in the following ways:
[0097] (1) In the first relay lens group of the illumination arm, position the pupil A and add the second spatial light modulator;
[0098] (2) Add a third relay lens group Lc and a fourth relay lens group Ld to the collecting arm, and add a switchable aperture at the pullil C position between them;
[0099] (3) Add collaborative control logic for the second spatial light modulator and the switchable aperture to the control unit.
[0100] After the upgrade, the original confocal tomography function remains unaffected (corresponding to the confocal tomography mode of this invention), and two new imaging modes, bright field and dark field, are added, along with the natural registration capability between the three modes.
[0101] It should be noted that relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0102] Although this application has been described above with reference to specific embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of this application. In particular, as long as there is no structural conflict, the features in the specific embodiments disclosed in this application can be combined with each other in any way. The lack of an exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, this application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.
Claims
1. A multimodal common-path microscopic imaging device based on dual-pupil modulation, characterized in that, Includes a light source (1), fiber optic coupler (2), collimator (3), first spatial light modulator (4), first relay lens group (5), second relay lens group (6), second spatial light modulator (7), beam splitter (8), tube lens (9), common objective lens (10), sample surface (11), piezoelectric displacement device (12), third relay lens group (13), switchable aperture (14), fourth relay lens group (15), area array image detector (16), and control unit (17); The illumination arm is composed of a light source (1), an optical fiber coupler (2), a collimator (3), a first spatial light modulator (4), a first relay lens group (5), a second spatial light modulator (7), and a second relay lens group (6) arranged sequentially along the optical axis. The collection arm is composed of the third relay lens group (13), the switchable aperture (14), the fourth relay lens group (15), and the area array image detector (16) arranged sequentially along the optical axis. The illumination arm is located on the left side of the beam splitter (8), the collection arm is located on the right side of the beam splitter (8), and the tube lens (9), the common objective lens (10), and the sample surface (11) placed on the piezoelectric displacement device (12) are arranged in sequence on the front side of the beam splitter (8). The control unit (17) is used to control the first spatial light modulator (4), the second spatial light modulator (7), the piezoelectric displacement device (12), the switchable aperture device (14), and the area array image detector (16).
2. The multimodal common-path microscopic imaging device based on dual-pupil modulation according to claim 1, characterized in that, The first spatial light modulator (4) is a digital micromirror device; the second spatial light modulator (7) is a liquid crystal phase-type spatial light modulator or a second digital micromirror device or a programmable aperture wheel or an annular aperture switching device.
3. The multimodal common-path microscopic imaging device based on dual-pupil modulation according to claim 2, characterized in that, The first spatial light modulator (4) is conjugate to the sample surface (11); the second spatial light modulator (7) is conjugate to the back focal plane of the common objective (10); the first relay lens group (5) is used to image the first spatial light modulator (4) onto the sample surface (11), and at the same time, the conjugate surface of the back focal plane of the common objective (10) is formed at the Fourier surface position of the first relay lens group (5), and the second spatial light modulator (7) is located on the conjugate surface of the back focal plane of the common objective (10).
4. The multimodal common-path microscopic imaging device based on dual-pupil modulation according to claim 3, characterized in that, The switchable aperture (14) is located at the Fourier surface of the third relay lens group (13), and the Fourier surface of the third relay lens group (13) is conjugate to the back focal plane of the common objective lens (10); the area array image detector (16) is conjugate to the sample surface (11); the switchable aperture (14) has two working states: the light path in and the light path out.
5. A multimodal common-path microscopic imaging device based on dual-pupil modulation according to claim 4, characterized in that, The switchable aperture (14) is an electrically controlled flip-in mechanical aperture, a programmable transmissive liquid crystal light valve, a third digital micromirror device, or a programmable phase modulator. The radius of the central circular light-transmitting area of the switchable aperture (14) is greater than zero and smaller than the pupil radius corresponding to the full numerical aperture of the common objective lens (10).
6. A multimodal common-path microscopic imaging device based on dual-pupil modulation according to claim 5, characterized in that, The control unit (17) configures the states of three modulation elements according to the working mode, including confocal tomography mode, bright field imaging mode and dark field scattering imaging mode. In confocal tomography mode, the first spatial light modulator (4) loads a structured illumination pattern, the second spatial light modulator (7) loads a phase map that concentrates light in the central region of the pupil, and the switchable aperture (14) is in the removed state. In bright field imaging mode, the first spatial light modulator (4) is in total internal reflection state, the second spatial light modulator (7) loads a phase map that concentrates light in the central region of the pupil, and the switchable aperture (14) is in the removed state. In the dark field scattering imaging mode, the first spatial light modulator (4) is in a total reflection state, the second spatial light modulator (7) loads a phase map that concentrates light in the outer ring region of the pupil, and the switchable aperture (14) is in a shift-in state.
7. A multimodal common-path microscopic imaging device based on dual-pupil modulation according to claim 6, characterized in that, The structured illumination pattern is a high-density linear array pattern extending along the first direction and a high-density linear array pattern extending along the second direction orthogonal to the first direction. The control unit (17) controls the first spatial light modulator (4) to load the linear array patterns in the two orthogonal directions in a time-division manner in the confocal tomography mode, and reconstructs the confocal tomography image based on the image sequence acquired by the area array image detector (16) under the scanning in the two orthogonal directions.
8. A multimodal common-path microscopic imaging device based on dual-pupil modulation according to claim 7, characterized in that, In the dark field scattering imaging mode, the inner diameter of the outer ring region of the pupil corresponds to an angle greater than that of the central light-transmitting area of the switchable aperture (14), and the outer diameter of the outer ring region of the pupil corresponds to the full-value aperture of the common objective lens (10).
9. A multimodal common-path microscopy imaging method based on dual-pupil modulation, implemented using a multimodal common-path microscopy imaging device based on dual-pupil modulation as described in any one of claims 1-8, characterized in that... Includes the following steps: S1. The control unit configures the first spatial light modulator, the second spatial light modulator, and the switchable aperture to the confocal tomography mode, and performs a three-dimensional tomographic scan to obtain a three-dimensional morphology image of the sample; S2. The control unit switches the first spatial light modulator, the second spatial light modulator, and the switchable aperture to bright field imaging mode, and the area array image detector acquires a bright field two-dimensional image of the sample. The S3 control unit switches the first spatial light modulator, the second spatial light modulator, and the switchable aperture to dark field scattering imaging mode, and the area array image detector acquires dark field scattering images of the sample.
10. A multimodal common-path microscopic imaging method based on dual-pupil modulation according to claim 9, characterized in that, The transfer cross function of the multimodal common-path microscopic imaging device based on dual-pupil modulation. for: Where g is the pupil coordinate, and The frequency distribution of the pupil surface, for The complex conjugate frequency, S(g) is the illumination pupil function, For the imaging pupil function, for The complex conjugate function.