Method and system for early warning of magnetron system failure for etching machine cavity and medium

Abstract

The application provides a fault early warning method and system for a magnetron system of an etching machine cavity and a medium. At least one fault detection signal of a constant current source device is acquired, and the fault detection signal is used to indicate a fault type of the magnetron system. A mapping relationship between preset fault types and flickering codes is determined, and a flickering code sequence corresponding to the at least one fault detection signal is determined. Different fault types correspond to different flickering codes. A display element is controlled according to the flickering code sequence. In this way, different fault types correspond to different flickering codes, and the flickering codes corresponding to faults are sequentially ordered and constructed into a flickering code sequence for sequential display, so that the display of multiple faults and fault positioning is realized.

Description

Technical Field

[0001] This application relates to the field of etching machine monitoring technology, and in particular to a method, system and medium for early warning of faults in a magnetic control system for an etching machine cavity. Background Technology

[0002] In wafer etching processes, a magnetron sputtering system is needed to provide a continuous and stable drive current to the coils in the etching cavity to generate a magnetic field that guides the ion beam to bombard the wafer surface. To monitor the operating status of the magnetron sputtering system in the etching machine, a display panel and detection circuits are typically installed to indicate fault information.

[0003] However, as the number of fault types that need to be monitored continues to increase, the current approach to adapt to this increase is mainly through expanding the display panel. However, no matter how the panel is expanded or adjusted, it only displays "fault present / no fault" and cannot locate the fault location, type, or other information. Summary of the Invention

[0004] In view of this, this application provides a method, system and medium for early warning of faults in the magnetic control system of an etching machine cavity, which aims to solve the problem that existing fault display schemes cannot realize the display of multiple fault types and fault location indication.

[0005] In a first aspect, embodiments of this application provide a fault early warning method for a magnetic control system of an etching machine cavity. The magnetic control system includes at least a constant current source device, a coil electrically connected to the power output terminal of the constant current source device, and a controller. The fault early warning method includes: Acquire at least one fault detection signal from the constant current source device, the fault detection signal being used to indicate the type of fault occurring in the magnetic control system; Based on a preset mapping relationship between fault types and flashing codes, a flashing code sequence corresponding to the at least one fault detection signal is determined; wherein, the flashing codes corresponding to different fault types are different from each other; The display is controlled by the indicator element according to the blinking code sequence.

[0006] Secondly, embodiments of this application provide a magnetic control system, which includes at least a constant current source device, a coil electrically connected to the power output terminal of the constant current source device, and a controller, wherein the controller includes: The signal acquisition module is used to acquire at least one fault detection signal of the constant current source device, the fault detection signal being used to indicate the type of fault that has occurred in the magnetic control system; The encoding determination module is used to determine the flashing code sequence corresponding to the at least one fault detection signal according to a preset mapping relationship between fault types and flashing codes; wherein the flashing codes corresponding to different fault types are different from each other; The display control module is used to control the indicator element to display according to the flashing code sequence.

[0007] Thirdly, this disclosure provides a computer-readable storage medium storing computer-executable instructions that, when invoked and executed by a processor, cause the processor to implement the aforementioned method for early warning of magnetic control system faults in etching machine cavities.

[0008] The embodiments of this application bring the following beneficial effects: This application proposes a fault early warning method, system, and medium for a magnetic control system in an etching machine cavity. The method involves acquiring at least one fault detection signal from a constant current source device, which indicates the fault type occurring in the magnetic control system. Based on a preset mapping relationship between fault types and flashing codes, a flashing code sequence corresponding to at least one fault detection signal is determined. The flashing codes for different fault types are distinct. The flashing code sequence is used to control an indicator element for display. This approach, by setting different flashing codes to correspond to different fault types, enables the display of early warnings for different fault types even for a single indicator element. Furthermore, when multiple fault types exist simultaneously, all flashing codes are sequentially sorted to construct a flashing code sequence for sequential display, eliminating reliance on complex hardware structures and thus reducing hardware costs.

[0009] Other features and advantages of this application will be set forth in the following description and will be apparent in part from the description or may be learned by practicing the application. The objectives and other advantages of this application are realized and obtained through the structures particularly pointed out in the description, claims and drawings.

[0010] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0011] To more clearly illustrate the specific embodiments of this application or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram illustrating the application scenario of the semiconductor device provided in the embodiments of this application; Figure 2This is a flowchart of one embodiment of the fault early warning method for the magnetic control system of the etching machine cavity in this application; Figure 3 A timing diagram illustrating the acquisition of fault detection signals and the alternating display of multiple fault codes provided in an embodiment of this application; Figure 4 This is a schematic diagram of a magnetic control system provided in an embodiment of this application; Figure 5 This is a schematic diagram of a controller in a magnetic control system provided in an embodiment of this application. Detailed Implementation

[0013] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0014] The terms “first,” “second,” “third,” “fourth,” etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in a sequence other than that illustrated or described herein. Furthermore, the terms “comprising” or “having,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0015] It is understood that this application is actually applied to semiconductor equipment, such as plasma etching machines. The working principle of a plasma etching machine is to selectively remove material with nanoscale precision by utilizing highly reactive gases excited into plasma in a vacuum environment, through the synergistic effect of physical bombardment and chemical reaction. Specifically, such as... Figure 1 As shown, the plasma etching machine 10 includes a magnetic control system 110, a gas output module 120, an etching chamber 130, an electrostatic chuck and heating plate 140, and a high-voltage power supply 150. The magnetic control system 110 includes a controller 111, a constant current source device 112, a communication middleware 113, and a coil 114.

[0016] The controller 111 is communicatively connected to the constant current source device 112 and the communication middleware 113. The controller 111 is used to send drive signals to the constant current source device 112 according to preset etching process parameters. The etching process parameters include wafer material and etching pattern precision.

[0017] The constant current source device 112 responds to the drive signal, outputs a constant drive current, and transmits the drive current to the coil 114 to drive the coil 114 to generate a constant magnetic field 11.

[0018] The communication middleware 113 is electrically connected to the constant current source device 112. The communication middleware 113 provides a communication interface for data distribution logic. The communication middleware 113 can collect data such as current, voltage, and power output from the constant current source device 112 and transmit the collected data to the controller 111.

[0019] Coil 114 is electrically connected to constant current source device 112, and coil 114 is positioned above etching cavity 130. When coil 114 receives driving current, coil 114 forms a magnetic field 11 of specific intensity and distribution within etching cavity 130. Magnetic field 11 confines and guides the ionized plasma within etching cavity 130, ensuring that active ions move precisely toward the target area on the surface of wafer 12, thus guaranteeing the directionality and precision of etching.

[0020] The gas output module 120 is used to input a specific type of reactive gas, including fluorine- or chlorine-containing gases, into the etching chamber 130. The reactive gas is ionized to generate a plasma composed of ions, electrons, and highly reactive free radicals. The highly reactive free radicals chemically react with the material on the surface of wafer 12, generating volatile compounds. Charged ions in the plasma are accelerated under the influence of an electric field and vertically bombard the surface of wafer 12. The physical impact of high-energy ions not only removes atoms from the surface of wafer 12 but also enhances the chemical reaction rate and achieves highly directional anisotropic etching, thereby etching vertical sidewalls and precisely replicating the patterns on the photoresist.

[0021] An electrostatic chuck and heating plate 140 are disposed at the bottom of the etching chamber 130. When the wafer 12 is placed on the surface of the electrostatic chuck and heating plate 140, the electrostatic chuck and heating plate 140 fix the wafer 12 through electrostatic adsorption effect, preventing the wafer 12 from shifting or vibrating during the etching process, providing and maintaining a constant substrate temperature, preventing the reaction gas from condensing on the surface of the wafer 12, and ensuring the stability of the chemical reaction rate.

[0022] The high-voltage power supply 150 is electrically connected to the electrostatic chuck and the heating plate 140. The high-voltage power supply 150 is used to provide two power signals of opposite polarity to the electrostatic chuck and the heating plate 140 to control the electrostatic chuck and the heating plate 140 to adsorb or release the wafer 12.

[0023] In related technologies, fault display schemes are also provided in conjunction with constant current source equipment. Current fault display schemes mainly rely on display panels with corresponding fault indicator lights to indicate whether the magnetic control system is faulty. However, with the increasing number of control devices in plasma etching machines, the types of faults also increase. Current fault display methods can only indicate the presence or absence of a fault, but cannot pinpoint the fault type or location, which is detrimental to subsequent maintenance and repair. Therefore, this application provides a scheme that can simultaneously display multiple fault types and pinpoint the fault location.

[0024] For ease of understanding, the specific process of the embodiments of this application is described below. Figure 2 This illustration shows a flowchart of a fault early warning method for a magnetic control system in an etching machine cavity, according to an embodiment of this application. Figure 2 As shown, this application provides a fault early warning method for a magnetic control system in an etching machine cavity, the main logic of which is a controller in the magnetic control system. The magnetic control system includes at least a constant current source device, a coil electrically connected to the power output terminal of the constant current source device, and a controller. Combined with... Figure 1 The fault early warning method provided in this embodiment specifically includes the following steps: S210: Acquire at least one fault detection signal from the constant current source device, the fault detection signal being used to indicate the type of fault that has occurred in the magnetic control system.

[0025] In this embodiment, the constant current source device is equipped with a detection circuit or control logic that can detect its own operating parameters. The detection circuit or control logic will collect the driving current output by the constant current source device to each coil and the operating status of the control device connected to it in real time, and determine whether there is a fault according to the preset fault judgment logic. Based on the fault judgment result, a fault detection signal is generated. The fault detection signal is used to indicate the fault type of the fault that occurred in the magnetic control system. The fault detection signal can be an electrical signal or a numerical flag bit.

[0026] In practical applications, when acquiring fault detection signals, one or more fault detection signals can be acquired in real time or periodically through custom settings.

[0027] In one feasible implementation, the fault detection signal can be acquired using a register-based approach. Specifically, the controller determines the fault based on the detection circuit's findings and writes corresponding identifiers into the corresponding bits of the register. The fault detection signal is then extracted by reading the identifiers from each bit of the register in real time. Specifically: First, fault status information is read from the fault register in the constant current source device, such as when the controller accesses a predefined register address via the internal bus. Second, the first fault word in the first fault register and the second fault word in the second fault register are read. Finally, each bit of the first and second fault words is parsed to obtain the fault detection signal for the corresponding channel.

[0028] Here, the abstract fault detection signal acquisition process is set as a reading and parsing operation of specific hardware registers (first fault register and second fault register). By mapping different fault types to different bits of double-word registers (Error1_Read and Error2_Read in Table 1 below), and storing faults in registers, the system is scalable and not easily modified by errors. Furthermore, the controller can capture a snapshot of the state of all fault sources from the registers at once, and then parse the bits through software. This approach decouples fault acquisition and fault processing, making the software processing logic clear and independent of specific sensor types, greatly enhancing the modularity and portability of the system.

[0029] Furthermore, each bit of the first fault word and the second fault word is parsed, including: parsing the internal abnormal signals of the switch quantity, the abnormal power supply signal, and the polarity switching failure signal corresponding to each channel in the first fault word; parsing the output short circuit abnormal signal, the communication timeout signal, and the write current failure signal corresponding to each channel in the second fault word; determining the fault type of the corresponding channel according to the set state of each bit, and generating the fault detection signal of the corresponding channel.

[0030] It should be noted that the scope of fault information carried by the first fault word and the second fault word is defined here. The first fault word (corresponding to Error1_Read in Table 1) aggregates high-priority hardware faults directly related to power output, such as switching quantities, power supply, and polarity switching. The second fault word (corresponding to Error2_Read in Table 1) aggregates faults related to load status and communication status. The controller performs a bitwise logical AND operation on the two fault words respectively. For example, it checks whether bit 14 of the first fault word is "1". If so, it generates a fault detection signal of "5-channel switching quantity fault". This scheme of dividing register subwords according to functional domains makes the storage and parsing of fault information more organized, which is conducive to subsequent classification and priority sorting. The correspondence between each field in the first fault register and the second fault register and the fault can be set as shown in Table 1 below.

[0031]

[0032] Table 1 In another embodiment, for a current over-limit fault, the actual output current value and the corresponding set current value can be obtained; the existence of a current over-limit fault can be determined based on the deviation between the actual output current value and the set current value; when the actual output current value is determined to be greater than the set current value and exceeds a certain proportion, such as the set current value being 110%, a current over-limit fault detection signal is generated.

[0033] Specifically, it continuously samples the actual current in the output circuit using an analog-to-digital converter (ADC) and compares it with a user-defined current value. The fault triggering condition is not a simple equal-value comparison, but rather incorporates a 10% over-limit tolerance: actual value > set value × 110%. This tolerance setting avoids false alarms caused by minor current ripples or transient disturbances. Simultaneously, exceeding the 110% threshold accurately identifies truly dangerous overcurrent conditions. Once this condition is met, a fault detection signal is immediately generated, triggering subsequent robust protection actions and display processes, achieving accurate and fault-tolerant fault diagnosis.

[0034] In another embodiment, for the fault of output short circuit abnormality, the coil resistance detection result can also be obtained; when the coil resistance is less than the preset short circuit threshold, the output short circuit abnormality fault is determined; wherein, the preset short circuit threshold is 0.1Ω.

[0035] For example, the coil resistance is calculated in real time by injecting a small test current into the load and measuring the voltage drop across the circuit. When the detected coil resistance is less than the preset 0.1Ω, the system determines that the load is close to a short circuit and immediately generates an output short-circuit fault detection signal. Specifying the preset short-circuit threshold to this extremely low value of 0.1Ω clarifies that this solution targets metallic short-circuit faults. It can effectively and quickly identify highly dangerous abnormalities such as coil insulation damage and terminal bridging, preventing excessive short-circuit current from damaging expensive constant current source equipment.

[0036] In another embodiment, for a polarity switching failure, the polarity setting information and polarity acquisition information can be obtained; the polarity setting information and polarity acquisition information can be compared; and when the two are inconsistent, a polarity switching failure detection signal can be generated.

[0037] The output polarity switching of the magnetic control system relies on a bridge circuit driven by a control signal. The desired polarity setting information, such as forward current, is pre-set, and a command is sent to the polarity switching circuit. Simultaneously, the actual physical polarity is read through an independent polarity acquisition feedback channel; for example, the voltage polarity at the output terminal is detected via optocoupler isolation. When the two are inconsistent, it indicates that the polarity switching relay or power transistor has not operated as required, possibly due to sticking or a drive failure. At this point, a polarity switching failure fault detection signal is generated, which can promptly capture this serious actuator feedback mismatch problem and prevent catastrophic consequences for the etching process caused by a reversed magnetic field.

[0038] In another embodiment, for the fault of writing current failure, the actual output current at the end of the current ramp-up phase can be monitored after writing the target current value to the constant current source device; if the actual output current does not reach the target current value, a write current failure fault detection signal is generated; when the actual output current reaches the target current value, the write current failure fault detection signal is released.

[0039] When a new target current value is given via the digital-to-analog converter (DAC), the output current does not change abruptly but rather undergoes a ramp-up phase. At the end of this ramp-up phase (i.e., when the current should stabilize), the actual output current is sampled. If the deviation from the target current value exceeds the allowable range, it indicates that the DAC calibration table may have malfunctioned or there may be a nonlinearity issue in the hardware. In this case, a write current failure fault detection signal is generated. Simultaneously, the solution sets a ±100mA recovery tolerance band; once the current finally adjusts into this range, the fault is automatically cleared. This detection mechanism effectively distinguishes between internal system calibration problems and external load problems, instructing operators to perform calibration maintenance rather than troubleshooting the coil, thus improving the directionality of maintenance.

[0040] In another implementation, communication failures can be detected by monitoring the communication status between the central control board and the core board in the system; when no communication response information is received for more than 500 ms, a communication timeout fault detection signal is generated.

[0041] Specifically, the central control board, responsible for human-computer interaction and logic control, and the core board, responsible for fault detection and constant current control, continuously communicate via heartbeat packets. If the core board detects that it has not received a response frame from the central control board for 500 consecutive ms, it determines that the communication link is interrupted, indicating a communication fault. This 500ms duration is sufficient to filter out occasional packet loss caused by brief electromagnetic interference, and is also sensitive enough to quickly detect serious problems such as physical disconnections or software crashes. Incorporating this fault into the overall early warning system can alert technicians that internal system coordination has failed; although physical outputs may still exist, commands and status cannot be reliably transmitted.

[0042] S220: Determine at least one flashing code sequence corresponding to a fault detection signal based on a preset mapping relationship between fault types and flashing codes; wherein the flashing codes corresponding to different fault types are different from each other.

[0043] It should be noted that the flashing code can be understood as a predefined timing sequence for controlling the indicator element to turn on and off. Different flashing codes distinguish different fault types by combining parameters such as flashing frequency, flash count, and on / off duty cycle.

[0044] When a fault detection signal is detected and acquired in the constant current source device, the fault detection signal representing the fault type is converted into the corresponding flash code sequence according to the pre-set mapping table between fault type and flash code.

[0045] In practical applications, the scintillation coding sequence may include one scintillation code or multiple scintillation codes. That is, the corresponding target scintillation codes are found one by one from the mapping table according to the number of fault detection signals collected, and then the target scintillation codes are sorted according to the time order of the fault detection signals collected, so as to obtain the scintillation coding sequence.

[0046] Furthermore, when sorting the target flashing codes, in addition to sorting by time order, they can also be sorted by the priority of the fault type, with higher priority codes appearing first.

[0047] When analyzing each fault detection signal and determining that the current detection result is that there is only one fault type, its corresponding single flash code constitutes a flash code sequence; when multiple fault types exist at the same time, these target flash codes will be combined into an ordered flash code sequence according to rules.

[0048] S230: Control the indicator element to display according to the flashing code sequence.

[0049] After obtaining the flashing code sequence, the control logic of the indicator element is entered. By parsing the flashing code sequence, it is converted into a set of high and low level timing signals, which drive an indicator element to display according to a specific on / off pattern.

[0050] It should be noted that the indicating element refers to a device capable of generating visible light changes in response to electrical signals. During the control of the indicating element's display, information is transmitted to the outside world through its on / off states and dynamic combinations therein, indicating faults in the magnetic control system. In this application, a single-color light-emitting diode is preferred.

[0051] For example, if the constant current source device of the magnetic control system detects two faults at the same time, namely "coil open circuit" and "4-channel power supply abnormality", that is, it obtains the corresponding identifiers of the two faults from the fault register; then, based on the two identifiers collected, it queries the mapping relationship to determine that the target fault type "coil open circuit" corresponds to the first flashing code with the highest priority and is manifested as "continuous fast flashing", and the target fault type "4-channel power supply abnormality" corresponds to the fourth flashing code with the second highest priority and is manifested as "flashing four times".

[0052] Furthermore, the first and fourth blink codes are arranged in descending order of priority, and a preset output interval identifier is inserted to form a blink code sequence.

[0053] In step S230, a monochrome LED on the display panel of the magnetic control system is driven to blink sequentially according to the corresponding priority display rules based on the blink codes in the blink code sequence. For example, the first blink code is defined as "continuous fast flashing" for dozens of cycles, then turned off for a fixed interval, and then the fourth blink code is controlled to "blink four times" to complete one cycle, which is repeated continuously, that is, the entire blink code sequence blinks completely once, and subsequent cycles are controlled. At this time, when the on-site maintenance personnel see the alternating pattern of fast flashing and intermittent four-flashes of the indicator light, they can refer to the manual to quickly locate the two key issues: the first blink code corresponding to "the most urgent coil open circuit fault" and the fourth blink code corresponding to "the second most urgent power supply abnormality fault", which greatly improves the efficiency and completeness of fault diagnosis.

[0054] In one embodiment, if the indicator element is a single-color indicator element, the indicator element is controlled to display according to the flashing code sequence, specifically including: based on the bit timing of each target flashing code in the flashing code sequence, the indicator element is controlled to perform a combination display of on and off according to a preset flashing rule.

[0055] It should be noted that when controlling the indicator element to display a combination of on / off states, bit timing is introduced. Each blinking code is visualized as a time sequence composed of logic "0" and "1", for example, "1" represents on and "0" represents off. Based on a preset blinking rule (e.g., fast blink is defined as a square wave with a period of 200ms and a duty cycle of 50%), all the corresponding "0" or "1" of the blinking code is decoded into a string of binary timing commands accurate to milliseconds. These commands are then used to operate the general-purpose input / output port levels, controlling the indicator element to display a combination of on / off states. This achieves complete decoupling between the software-defined control logic and the physical hardware driver, allowing for flexible adjustment or expansion of fault codes by modifying the software mapping table without any hardware changes, significantly reducing the cost of system iteration and maintenance. Simultaneously, it breaks the limitation that a single indicator element can only express two states, "present" and "absent," enabling low-cost hardware to transmit multi-dimensional fault information through time-dimensional encoding.

[0056] In this embodiment, the display methods for acquiring one fault detection signal and two faults will be different. Therefore, when at least one fault detection signal is acquired, there is a situation of multiple faults occurring concurrently. The above-mentioned step S220, based on the preset mapping relationship between fault type and flashing code, determines the flashing code sequence corresponding to at least one fault detection signal, specifically including: First, determine the target fault type and priority corresponding to each fault detection signal. This involves iterating through all fault detection signals, identifying the target fault type represented by each signal, and retrieving the corresponding priority value from a pre-defined sorting table.

[0057] Secondly, based on each target fault type, the corresponding target flashing code is matched from the preset mapping relationship between fault types and flashing codes.

[0058] Finally, the flash codes of each target are prioritized and sorted to output a flash code sequence. The flash codes of targets with higher priorities are ranked earlier, thus constructing an ordered information output sequence that is different from the traditional single fault shielding mechanism.

[0059] By prioritizing the flashing codes of all targets in a multi-fault concurrent scenario, a comprehensive flashing code sequence is generated. This ensures that the highest priority fault information is communicated most quickly and frequently, while the second-highest priority fault information is not discarded but rather arranged into the display process in a preset order. This completely solves the problem of existing technologies that only display the highest priority faults, while the second-highest and lower priority faults are completely masked. This allows on-site personnel to perceive the full picture of the faults, providing a crucial information foundation for a complete and thorough investigation of all faults and the elimination of safety hazards.

[0060] In one embodiment, the display is controlled by the indicator element according to the flashing code sequence. Specifically, based on the flashing code sequence, the indicator element is controlled to flash sequentially or alternately according to a preset output interval identifier. Sequential flashing means flashing in descending order of priority, while alternating flashing means flashing the highest priority fault and the second highest priority fault in the flashing code sequence alternately. It should be noted that if the flashing code sequence contains flashing codes for two faults, then only flashing in descending order of priority is required, and the flashing time interval between the two faults is T1. If there are three or more faults, alternating flashing is used. Alternating flashing can be used to flash the flashing code corresponding to the highest priority fault and the flashing code corresponding to any non-highest priority fault simultaneously within one flashing cycle. Any non-highest priority fault can be displayed within any flashing cycle. For example, if the sequence contains faults 1, 2, and 3 ordered from high to low priority, the flashing order is: first flash fault 1, then flash fault 2, then return to fault 1, then fault 3. After completing the sequential flashing cycles of the three faults, the flashing pattern of fault 1, fault 2, fault 3 is repeated. It is understandable that the fault flashing order can also be that fault 1 flashes first, then fault 2 flashes, fault 3 is temporarily blocked, then it returns to fault 1, then fault 2. After fault 1 is eliminated, in a new flashing cycle, fault 2 flashes first, then fault 3 flashes. That is, in each flashing cycle, only the flashing codes corresponding to the two faults with the highest priority are flashed.

[0061] Two specific multi-fault display strategies are provided to adapt to different scenario requirements. When the "Sequential Flashing" mode is selected, the indicator element will display the highest priority target flashing code completely, followed by the next highest priority code. When the "Alternating Flashing" mode is selected, the indicator element can continuously switch back and forth between the target flashing codes of the highest priority and second highest priority faults. In particular, the "Alternating Flashing" mode allows on-site personnel to quickly identify the existence of the two most critical faults in a short time when multiple faults occur concurrently, without having to wait for a long time for the entire sequence to cycle, thus achieving continuous and rolling broadcast of the most urgent information. Both methods prevent secondary fault information from being submerged in long cycle periods, greatly enhancing the real-time performance and readability of the warning information.

[0062] Furthermore, the preset output interval identifier is either the output time interval between two target flashing codes or a specific flashing pattern. This embodiment refines two specific implementations of the output interval identifier. One is the "output time interval," for example, inserting a fixed 0.8-second off-duration period between two target flashing codes, using a visual pause to clearly separate different fault codes. The other is a "specific flashing pattern," for example, inserting an ultra-short, unique on-off pulse pair between each target flashing code as a separating marker. The introduction of these two identifier methods provides clear boundaries for continuously changing flashing code sequences, effectively avoiding visual overlap and confusion of flashing patterns of different faults, ensuring that on-site personnel can accurately segment and identify each independent fault code when interpreting indicator light information.

[0063] In one embodiment, the blinking code mentioned in the above embodiments includes at least one of continuous fast blinking, continuous slow blinking, and intermittent blinking a specific number of times. This embodiment constructs the physical basis of fault coding by concretizing blinking code into at least three easily distinguishable patterns. "Continuous fast blinking" can be defined as uninterrupted high-frequency blinking, representing the most urgent fault; "continuous slow blinking" represents the second most urgent fault; and "intermittent blinking a specific number of times," such as "blinking twice, pausing, then blinking twice again," provides a rich and scalable coding space for other fault types. The combination of these three basic patterns, through changes only in the time dimension, realizes a variety of visually distinct information units on a single indicator element.

[0064] In another implementation, a specific, priority-oriented mapping rule is provided for the process of matching target flashing codes based on target fault types. That is, based on each target fault type, the corresponding target flashing code is matched from a preset mapping relationship between fault types and flashing codes, including: If the target fault type corresponding to the fault detection signal is coil open circuit, the target flashing code is determined as the first flashing code, which has the highest priority. A coil open circuit causes the core function of the magnetic control system to be lost, requiring immediate shutdown for inspection; therefore, it is assigned the highest priority.

[0065] If the target fault type corresponding to the fault detection signal is current over-limit, the target flashing code is determined to be the second flashing code, which has a lower priority than the coil open circuit. Although current over-limit is not directly equivalent to coil open circuit, it may damage the load or power supply, so its priority is immediately after that.

[0066] If the target fault type corresponding to the fault detection signal is an internal switch quantity abnormality, the target flashing code is determined to be the third flashing code, which has a lower priority than the current over-limit priority. Switch quantity abnormality refers to an internal power device failure, which is a serious hardware problem.

[0067] If the target fault type corresponding to the fault detection signal is power supply abnormality, the target flashing code is determined to be the fourth flashing code, which has a lower priority than the priority of switch quantity abnormality. Power supply abnormality affects system stability, so its priority is secondary.

[0068] If the target fault type corresponding to the fault detection signal is an output short circuit anomaly, the target flashing code is determined to be the fifth flashing code, which has a lower priority than the power supply anomaly. Output short circuit is a protective fault and has a lower priority.

[0069] By clearly defining the descending order of fault priorities from coil open circuit to output short circuit anomaly and their unique mapping with the first to fifth flash codes, not only is a clear and unambiguous decision-making basis provided for the system, but it also ensures that on-site personnel can immediately associate the severity of the fault when they see the corresponding flashing pattern and prioritize the handling of the most critical issues. This is crucial for ensuring the safety and continuity of the etching process.

[0070] Furthermore, in addition to the five flashing codes mentioned above, more coding mapping relationships can be set. The specific number is determined based on the actual fault conditions. For example, a tenth flashing code mapping rule can be added. That is, based on each target fault type, the corresponding target flashing code is matched from the preset fault type and flashing code mapping relationship, including: If the target fault type corresponding to the fault detection signal is polarity switching failure, the target flashing code is determined to be the sixth flashing code, which has a lower priority than the output short circuit anomaly.

[0071] If the target fault type corresponding to the fault detection signal is a fan status fault, the target flashing code is determined to be the seventh flashing code, which has a lower priority than the priority of polarity switching failure.

[0072] If the fault type corresponding to the fault detection signal is write current failure, the flashing code is determined to be the eighth flashing code, which has a lower priority than the priority of fan status fault.

[0073] If the target fault type corresponding to the fault detection signal is communication timeout, the target flashing code is determined to be the ninth flashing code, which has a lower priority than the write current failure.

[0074] If the target fault type corresponding to the fault detection signal is no current, the target flashing code is determined to be the tenth flashing code, which has a lower priority than the communication timeout priority.

[0075] This embodiment extends the priority system downwards, covering a range of relatively minor faults, from polarity switching failures to no current. By establishing a correspondence between the sixth to tenth flash codes and specific fault types, with priorities decreasing sequentially, and combining this with the correspondence between the first to fifth flash codes, a complete fault coding system is formed. This system also includes the ranking of these ten priority gradients. This priority definition ensures that when multiple faults occur concurrently, the generated flash code sequence can strictly and accurately reflect the urgency spectrum of all faults, avoiding sequence generation chaos or information loss due to undefined priorities for some faults, thus ensuring the integrity and rigor of the early warning information system.

[0076] In one embodiment, to ensure the accuracy of the flashing display, the magnetic control system fault early warning method for the etching machine cavity also sets up a self-test process to monitor the reliability of the indicator element itself. The process includes: when a preset self-test trigger condition is detected, outputting a test control signal to the driving circuit of the indicator element; using a feedback detection circuit to obtain the actual response state of the indicator element in response to the test control signal; and determining whether the indicator element is faulty based on the actual response state.

[0077] In this embodiment, the self-testing mechanism of the indicator element is a key closed loop ensuring the reliability of the fault warning system itself. The magnetic control system actively sends a known test control signal, such as a pulse width modulation (PWM) waveform with a specific frequency and duty cycle, to drive the indicator element. Simultaneously, an independent feedback detection circuit captures the actual response state of the indicator element. For example, a photosensitive element converts the indicator element's light signal back into an electrical signal, or a current detection circuit monitors the current waveform flowing through the indicator element. By comparing the actual response state with the theoretical state expected by the test control signal, it can be determined whether the indicator element and its driving circuit exhibit failure modes such as constant on, constant off, short circuit, or open circuit. This mechanism transforms the indicator element from a simple output device into a monitorable closed-loop control node, eliminating the fatal risk of the fault detection system itself malfunctioning without the user's knowledge, and greatly improving the reliability of the method for fault detection.

[0078] Furthermore, the preset self-test trigger condition can be the time point when the plasma etching machine completes its power-on initialization process, or when the plasma etching machine runs continuously without load for a period exceeding a preset idle threshold under no-fault conditions. Setting it to the time point when the power-on initialization process is completed ensures that the initial health check of the indicator components is completed before the equipment is put into formal operation, guaranteeing that the warning channel is open for both factory-shipped and restarted equipment. Setting it to the time point when the continuous idle running time exceeds the preset idle threshold primarily utilizes the intervals in the etching process to perform non-intrusive inspections during a stable system window with no transaction processing. This timed inspection mechanism can promptly detect slowly developing faults (such as brightness decay caused by LED aging) without human intervention during monitoring periods, achieving full lifecycle reliability assurance.

[0079] In another feasible implementation, after step S230: controlling the indicator element to display according to the flashing code sequence, the method further includes: constructing a fault priority list based on the target flashing code corresponding to at least one fault detection signal, and reporting it to the host computer through the communication interface of the magnetic control system.

[0080] This embodiment effectively establishes a collaborative working channel between local visual indication and remote system monitoring. While controlling the indicator element to provide limited, cyclical visual cues, all detected faults are organized into a complete fault priority list according to priority order, and reported to the factory's manufacturing execution system or equipment engineering workstation, etc., via a communication interface.

[0081] When non-technical personnel on-site observe complex alternating flashing patterns and find them difficult to distinguish, they can contact the technical personnel in the monitoring room via telephone or walkie-talkie. The technical personnel can then obtain an accurate and complete list of all activated faults by querying the full fault list stored in the host computer. By adding this process, the inherent limitation of the narrow information bandwidth of monochrome indicator elements is compensated for, achieving a combination of rapid on-site overview and precise central diagnosis, thus optimizing fault response and maintenance procedures.

[0082] In one embodiment, to enable rapid safety protection upon fault detection—that is, to seamlessly integrate the fault warning method with the active safety protection mechanism—the method further includes an output protection logic. This logic includes: when the fault detection signal corresponding to the target fault type meets the output protection conditions, controlling the constant current source device to cut off the output current; and maintaining the current cut-off state until the corresponding fault exit condition is met.

[0083] When the system diagnoses one or more preset critical fault types, its response goes beyond simply displaying warning information; it immediately enters the action phase—forcibly cutting off the current output of the constant current source device via hardware control signals. This closed-loop design of detection-display-protection prioritizes system safety, preventing the persistence of faults from damaging equipment, wafers, or even operators. Simultaneously, an exit condition mechanism is introduced, making the protection state self-locking. The system can only resume operation after manual investigation and complete elimination of the root cause of the fault, forcibly guiding a complete, closed-loop fault handling process.

[0084] Furthermore, the triggering range of the output protection conditions includes at least one of the following: when a coil open circuit fault is detected, the output current is forcibly cut off; when a current over-limit fault is detected, the output current is forcibly cut off; when a polarity switching failure fault is detected, the output current is forcibly cut off; when a power supply abnormality fault is detected, the output current is forcibly cut off; when an internal abnormality fault of the switch quantity is detected, the output current is forcibly cut off; when an output short circuit abnormality fault is detected, the output current is forcibly cut off.

[0085] This section lists six fault types that necessitate triggering the forced interruption of output current protection. These faults are all of a severe level, directly related to personal safety, the safety of core equipment hardware, or the loss of basic system functions. When any of the above fault detection signals is valid, the output enable pin will be immediately deactivated, thereby cutting off the power output of the constant current source device at the hardware level. This clear and decisive hardware protection measure minimizes the potential secondary hazards caused by the fault.

[0086] The fault exit conditions include: when the target fault type is a coil open circuit fault, the coil is detected to be reconnected and the coil resistance value returns to normal after power-down; when the target fault type is a current over-limit fault, a reset command is received or the device is restarted; when the target fault type is a fan status fault, the fan is detected to be reconnected normally; when the target fault type is a power supply abnormality fault, power-down is performed and hardware fault diagnosis is completed; when the target fault type is an output short circuit abnormality fault, power-down is performed and the coil short circuit status is confirmed to be eliminated; after the corresponding exit conditions are met, the fault status is lifted.

[0087] In essence, this setup establishes a clear and operable release mechanism for each fault type where the output is forcibly cut off due to protection logic. For example, a coil open circuit requires physical repair and restoration, which the system confirms by re-checking the resistance value; an overcurrent might be due to incorrect parameter settings, and can be resolved through a reset command or restart. These exit conditions are not simply self-recovering but require a clear repair action or signal. This constitutes a complete lifecycle management loop of fault diagnosis-protection-repair-recovery, ensuring that the equipment operates in a deterministic and safe state under all circumstances.

[0088] In one embodiment, before step S230 controls the indicator element to display according to the flashing code sequence, the method further includes display processing of the normal operating state of the device. This processing includes: Obtain the current operating status of the magnetic control system. It will read the current stage of the state machine.

[0089] When the device is detected to be in a startup state or an upgrade program execution state, the control indicator element displays a breathing pattern. This breathing pattern setting can be understood as a visual prompt to the user that the system is busy and to wait.

[0090] When the device is detected to be in a normal output state, the indicator element is kept constantly lit. This indicates that the magnetic control system is working properly and the current output is stable.

[0091] When a no-current state is detected in the device, the indicator element is kept off. This indicates that the device is in standby or has no task.

[0092] This embodiment establishes a set of display definitions covering normal operating scenarios before the fault code display logic, so that all states of the single indicator element, including constant light, constant darkness, breathing, and various flashing states, have clear information meanings, forming a complete set of equipment human-machine interface indicator light specifications, eliminating the ambiguity of status indication.

[0093] Figure 3 This is a timing diagram illustrating the acquisition of fault detection signals and the alternating display of multiple fault codes, provided in an embodiment of this application. Figure 3 The timing diagram visually illustrates the complete execution process of steps S210 to S230 in a specific application scenario. In the diagram, at time t1, the system simultaneously detects the bit 14 (switching quantity fault) of the first fault word (Error1_Read) and the bit 6 (channel short circuit anomaly) of the second fault word (Error2_Read). At time t2, the controller parses these two fault words, generating two fault detection signals. Subsequently, the controller queries the mapping relationship, determining that the "5 switching quantity fault" corresponding to bit 14 is mapped to the highest priority, represented by "continuous fast flashing," as the first flashing code, and the "5 channel short circuit anomaly" corresponding to bit 6 is mapped to the next highest priority, represented by "flashing six times," as the fifth flashing code. For example... Figure 2As shown in the timing diagram, starting from time t3, the controller drives the indicator element to begin alternating blinking: first, it executes the "continuous fast blink" mode of the first blink code, lasting for the T1 time period; then, a preset output interval marker is inserted, manifested as an extinguishing interval of Tgap duration; next, it executes the "blink six times" mode of the fifth blink code, lasting for the T2 time period; then, an extinguishing interval of Tgap duration is inserted again, and the cycle repeats. This timing diagram clearly reveals how a single indicator element, through timing coding, alternately transmits two fault information of different priorities in a multi-fault concurrent scenario.

[0094] In this embodiment, the above-mentioned magnetic control system fault early warning method for etching machine cavity is implemented by establishing a mapping relationship between fault type and specific flashing code, and assigning a unique and easily identifiable visual code to each fault type; when a fault is detected, a single indicator element (such as a monochrome LED) is driven to display according to the corresponding flashing code based on the mapping relationship. This method enables the clear transmission of specific fault type information to on-site operators even using only a low-cost indicator element, effectively solving the problem in the background technology that a single indicator element cannot display multiple fault types.

[0095] Furthermore, when multiple faults occur concurrently, this method prioritizes all detected faults, generates a sequence containing multiple target flashing codes, and drives the indicator element by flashing sequentially or alternately (especially alternating between the highest and second-highest priority faults). This setup ensures that on-site personnel are aware of at least the two most urgent faults, avoiding the risk of secondary faults being completely masked and missed due to only displaying the highest priority fault in traditional solutions. At the same time, it does not require additional hardware costs, thus balancing information richness and economy.

[0096] Furthermore, by introducing a self-test process for the indicator element, the integrity of the indicator element and its driving circuit is verified periodically or triggered, and indicator element failures are reported as high-priority faults, which significantly improves the reliability of the fault warning system itself and solves the safety hazard of the indicator element itself failing without being detected in the prior art.

[0097] Figure 4 A schematic diagram of a magnetic control system provided in an embodiment of this application is shown. Figure 4 As shown, this application embodiment also provides a magnetic control system, which is used to implement the above-described method embodiments and preferred embodiments, and will not be repeated hereafter. The magnetic control system includes at least a constant current source device, a coil electrically connected to the power output terminal of the constant current source device, and a controller. The controller includes: a signal acquisition module 310, an encoding determination module 320, and a display control module 330.

[0098] The signal acquisition module 310 is used to acquire at least one fault detection signal of the constant current source device, the fault detection signal being used to indicate the type of fault that has occurred in the magnetic control system; The encoding determination module 320 is used to determine the flashing code sequence corresponding to the at least one fault detection signal according to a preset mapping relationship between fault types and flashing codes; wherein the flashing codes corresponding to different fault types are different from each other; The display control module 330 is used to control the indicator element to display according to the flashing code sequence.

[0099] The functions and technical effects of each module in this magnetic control system are completely consistent with the corresponding steps in the aforementioned method embodiments. The signal acquisition module 310 captures system faults in real time by reading the fault register or processing analog signal detection results. The encoding determination module 320 executes the core encoding mapping and priority sorting logic to generate a flashing encoding sequence. The display control module 330 then converts the sequence into specific IO control signals. Through the combination of these three functional modules, the controller achieves high information content and high reliability fault early warning for the magnetic control system at extremely low hardware cost.

[0100] In some alternative implementations, the indicating element is specifically a common monochrome light-emitting diode (LED), which may be red, green, or yellow.

[0101] In another embodiment, the indicator element is a single-color indicator element, and the signal acquisition module 310 is specifically used to: control the indicator element to perform a combination display of on and off according to a preset flashing rule based on the bit timing of each target flashing code in the flashing code sequence.

[0102] In this embodiment, when the at least one fault detection signal includes two or more, the encoding determination module 320 is specifically used for: Determine the target fault type and priority corresponding to each fault detection signal; Based on each of the target fault types, the corresponding target flashing code is matched from the preset mapping relationship between fault types and flashing codes; The blink codes of each target are sorted by priority, and the blink code sequence is output, wherein the blink codes of targets with higher priority are sorted first.

[0103] In this embodiment, the display control module 330 is specifically used for: Based on the flashing code sequence, the indicator element is controlled to flash sequentially or alternately according to the preset output interval identifier. The sequential flashing is flashing in order of priority from high to low, and the alternating flashing is flashing alternately between the highest priority fault and the second highest priority fault in the flashing code sequence.

[0104] In this embodiment, the encoding determination module 320 is specifically used for: If the target fault type corresponding to the fault detection signal is coil open circuit, the target flashing code is determined to be the first flashing code, which has the highest priority. If the target fault type corresponding to the fault detection signal is current over-limit, the target flashing code is determined to be the second flashing code, which has a lower priority than the coil open circuit priority; If the target fault type corresponding to the fault detection signal is an internal abnormality of the switch quantity, the target flashing code is determined to be the third flashing code, which has a lower priority than the current over-limit priority. If the target fault type corresponding to the fault detection signal is power supply abnormality, the target flashing code is determined to be the fourth flashing code, which has a lower priority than the priority of switch quantity abnormality. If the target fault type corresponding to the fault detection signal is an output short circuit abnormality, the target flashing code is determined to be the fifth flashing code, which has a lower priority than the power supply abnormality. In this embodiment, the encoding determination module 320 is specifically used for: If the target fault type corresponding to the fault detection signal is polarity switching failure, the target flashing code is determined to be the sixth flashing code, which has a lower priority than the output short circuit abnormality. If the target fault type corresponding to the fault detection signal is a fan status fault, the target flashing code is determined to be the seventh flashing code, which has a lower priority than the priority of polarity switching failure. If the fault type corresponding to the fault detection signal is write current failure, the flashing code is determined to be the eighth flashing code, which has a lower priority than the fan status fault. If the target fault type corresponding to the fault detection signal is communication timeout, the target flashing code is determined to be the ninth flashing code, which has a lower priority than the write current failure.

[0105] If the target fault type corresponding to the fault detection signal is no current, the target flashing code is determined to be the tenth flashing code, which has a lower priority than the communication timeout priority.

[0106] In this embodiment, the controller further includes: a self-test module 340, used for: When a preset self-test trigger condition is detected, a test control signal is output to the drive circuit of the indicator element; The actual response state of the indicator element to the test control signal is obtained using a feedback detection circuit. The indicator element is determined to be faulty based on the actual response status.

[0107] In this embodiment, the self-test triggering conditions include: when the plasma etching machine completes the power-on initialization process, or when the plasma etching machine runs continuously without load for a period of time exceeding a preset idle threshold under no-fault conditions.

[0108] In this embodiment, the controller further includes: a sending module 350, used for: A fault priority list is determined based on the target flashing code corresponding to the at least one fault detection signal, and reported to the host computer through the communication interface of the magnetic control system.

[0109] The apparatus provided in this application acquires at least one fault detection signal from a constant current source device, which indicates the fault type occurring in the magnetic control system. Based on a preset mapping relationship between fault types and flashing codes, it determines a flashing code sequence corresponding to at least one fault detection signal, wherein the flashing codes corresponding to different fault types are distinct. The flashing code sequence is then used to control an indicator element for display. This method utilizes a single indicator element to distinguish multiple fault types through different flashing codes and displays the information through a flashing code sequence when multiple faults occur concurrently. This achieves clear and reliable indication of multiple fault information and their priorities without increasing hardware complexity.

[0110] This embodiment also provides a magnetic control system, including a processor and a memory. The memory stores machine-executable instructions that can be executed by the processor. The processor executes the machine-executable instructions to implement the above-mentioned magnetic control system fault early warning method for etching machine cavity.

[0111] See Figure 5 As shown, the controller of the magnetic control system includes a processor 400 and a memory 401. The memory 401 stores machine-executable instructions that can be executed by the processor 400. The processor 400 executes the machine-executable instructions to implement the above-mentioned magnetic control system fault early warning method for etching machine cavity.

[0112] Furthermore, Figure 5 The controller shown also includes a bus 402 and a communication interface 403. The processor 400, the communication interface 403, and the memory 401 are connected via the bus 402.

[0113] The memory 401 may include high-speed random access memory (RAM) and may also include non-volatile memory, such as at least one disk storage device. Communication between this system network element and at least one other network element is achieved through at least one communication interface 403 (which can be wired or wireless), such as the Internet, wide area network, local area network, metropolitan area network, etc. The bus 402 may be an ISA bus, PCI bus, or EISA bus, etc. The bus can be divided into address bus, data bus, control bus, etc. For ease of representation, Figure 5 The symbol is represented by a single double-headed arrow, but this does not mean that there is only one bus or one type of bus.

[0114] The processor 400 may be an integrated circuit chip with signal processing capabilities. In implementation, each step of the above method can be completed by the integrated logic circuitry in the hardware of the processor 400 or by instructions in software form. The processor 400 may be a general-purpose processor, including a Central Processing Unit (CPU), a Network Processor (NP), etc.; it may also be a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. It can implement or execute the methods, steps, and logic block diagrams disclosed in the embodiments of this application. The general-purpose processor may be a microprocessor or any conventional processor. The steps of the methods disclosed in the embodiments of this application can be directly manifested as execution by a hardware decoding processor, or execution by a combination of hardware and software modules in the decoding processor. The software module can reside in a readily available storage medium in the art, such as random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, or registers. This storage medium is located in memory 401. The processor 400 reads information from memory 401 and, in conjunction with its hardware, completes the steps of the method described in the foregoing embodiments.

[0115] This embodiment also provides a computer-readable storage medium storing computer-executable instructions. When the computer-executable instructions are called and executed by a processor, the computer-executable instructions cause the processor to implement the above-described magnetic control system fault early warning method for etching machine cavities.

[0116] The computer program product of the magnetic control system fault early warning method, system and storage medium for etching machine cavity provided in the embodiments of this application includes a computer-readable storage medium storing program code. The instructions included in the program code can be used to execute the methods described in the preceding method embodiments. For specific implementation, please refer to the method embodiments, which will not be repeated here.

[0117] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working process of the system and apparatus described above can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0118] Furthermore, in the description of the embodiments of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0119] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0120] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0121] Finally, it should be noted that the above embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the protection scope of the claims.

Claims

1. A fault early warning method for a magnetic control system in an etching machine cavity, characterized in that, The magnetic control system includes at least a constant current source device, a coil electrically connected to the power output terminal of the constant current source device, and a controller. The fault early warning method includes: Acquire at least two fault detection signals from the constant current source device, the fault detection signals being used to indicate the type of fault occurring in the magnetic control system; Determine the target fault type and priority corresponding to each of the aforementioned fault detection signals; Based on each of the target fault types, the corresponding target flashing code is matched from the preset mapping relationship between fault types and flashing codes; wherein, the target flashing codes corresponding to different fault types are different from each other; The blink codes of each target are sorted by priority to generate a blink code sequence, wherein the blink codes of targets with higher priority are sorted first. The display is controlled by the indicator element according to the blinking code sequence.

2. The fault early warning method for the magnetic control system of an etching machine cavity according to claim 1, characterized in that, The indicator element is a single-color indicator element. The step of controlling the indicator element to display according to the flashing code sequence includes: controlling the indicator element to display a combination of on and off based on the bit timing of each target flashing code in the flashing code sequence and according to a preset flashing rule.

3. The fault early warning method for the magnetic control system of an etching machine cavity according to claim 1, characterized in that, The step of controlling the indicator element to display according to the flashing code sequence includes: Based on the flashing code sequence, the indicator element is controlled to flash sequentially or alternately according to the preset output interval identifier. The sequential flashing is flashing in order of priority from high to low, and the alternating flashing is flashing alternately between the highest priority fault and the second highest priority fault in the flashing code sequence.

4. The fault early warning method for the magnetic control system of an etching machine cavity according to claim 1, characterized in that, The step of matching the corresponding target flashing code from the preset mapping relationship between fault types and flashing codes based on each of the target fault types includes: If the target fault type corresponding to the fault detection signal is coil open circuit, the target flashing code is determined to be the first flashing code, which has the highest priority. If the target fault type corresponding to the fault detection signal is current over-limit, the target flashing code is determined to be the second flashing code, which has a lower priority than the coil open circuit priority; If the target fault type corresponding to the fault detection signal is an internal abnormality of the switch quantity, the target flashing code is determined to be the third flashing code, which has a lower priority than the current over-limit priority. If the target fault type corresponding to the fault detection signal is power supply abnormality, the target flashing code is determined to be the fourth flashing code, which has a lower priority than the priority of switch quantity abnormality. If the target fault type corresponding to the fault detection signal is an output short circuit abnormality, the target flashing code is determined to be the fifth flashing code, which has a lower priority than the power supply abnormality.

5. The fault early warning method for the magnetic control system of an etching machine cavity according to claim 1, characterized in that, The step of matching the corresponding target flashing code from the preset mapping relationship between fault types and flashing codes based on each of the target fault types includes: If the target fault type corresponding to the fault detection signal is polarity switching failure, the target flashing code is determined to be the sixth flashing code, which has a lower priority than the output short circuit abnormality. If the target fault type corresponding to the fault detection signal is a fan status fault, the target flashing code is determined to be the seventh flashing code, which has a lower priority than the priority of polarity switching failure. If the fault type corresponding to the fault detection signal is write current failure, the flashing code is determined to be the eighth flashing code, which has a lower priority than the fan status fault. If the target fault type corresponding to the fault detection signal is communication timeout, the target flashing code is determined to be the ninth flashing code, which has a lower priority than the write current failure priority. If the target fault type corresponding to the fault detection signal is no current, the target flashing code is determined to be the tenth flashing code, which has a lower priority than the communication timeout priority.

6. The fault early warning method for the magnetic control system of an etching machine cavity according to any one of claims 1-5, characterized in that, The method further includes: When a preset self-test trigger condition is detected, a test control signal is output to the drive circuit of the indicator element; The actual response state of the indicator element to the test control signal is obtained using a feedback detection circuit. The indicator element is determined to be faulty based on the actual response status.

7. The fault early warning method for the magnetic control system of an etching machine cavity according to claim 6, characterized in that, The self-test triggering conditions include: when the plasma etching machine completes the power-on initialization process, or when the plasma etching machine runs continuously without load for a period of time exceeding a preset idle threshold under no-fault conditions.

8. The fault early warning method for a magnetic control system according to claim 6, characterized in that, After controlling the indicator element to display according to the flashing code sequence, the method further includes: A fault priority list is constructed based on the target flashing codes corresponding to the at least two fault detection signals, and reported to the host computer through the communication interface of the magnetic control system.

9. A magnetic control system, characterized in that, The magnetic control system includes at least a constant current source device, a coil electrically connected to the power output terminal of the constant current source device, and a controller, wherein the controller includes: The signal acquisition module is used to acquire at least two fault detection signals of the constant current source device, wherein the fault detection signals are used to indicate the type of fault that has occurred in the magnetic control system; The encoding determination module is used to determine the target fault type and priority corresponding to each fault detection signal; based on each target fault type, it matches the corresponding target flashing code from the preset mapping relationship between fault type and flashing code; wherein the target flashing codes corresponding to different fault types are different from each other; it sorts the target flashing codes by priority to generate a flashing code sequence, wherein the target flashing code with higher priority is ranked earlier. The display control module is used to control the indicator element to display according to the flashing code sequence.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer-executable instructions, which, when invoked and executed by a processor, cause the processor to implement the magnetic control system fault early warning method for etching machine cavities as described in any one of claims 1-8.

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