A multi-device shared sample flow transfer system

Abstract

This invention relates to the field of semiconductor advanced process inspection and failure analysis technology, and particularly to a multi-device shared sample transfer system, comprising: a reference establishment module for fixing the target sample to a common reference support body and establishing a spatial reference; a device interface module for matching with the clamping ends or cavity interfaces of different target devices, enabling the support body to be compatible with various devices; a transfer holding module for maintaining the same support body between different devices to complete sample transfer; an anti-contamination module for reducing the risks of oxidation, particulate contamination, and environmental exposure during the transfer process; an attitude constraint module for constraining the displacement and attitude deflection of the support body and the sample through locking and limiting structures to ensure attitude repeatability; a deviation correction module for reading the previous positioning results and performing deviation correction on the sample attitude of the current device; and a result output module for outputting repeatability positioning results, contamination control results, and pose information for subsequent analysis.

Description

Technical Field

[0001] This invention relates to the field of semiconductor advanced process testing and failure analysis technology, and in particular to a multi-device shared sample transfer system. Background Technology

[0002] As the process technology of advanced logic, advanced memory, and advanced packaging products continues to advance, the sample structures faced by failure analysis services are becoming increasingly complex. Analysis targets are often located in deeply embedded layers, interface layers, or high aspect ratio structures, making it difficult for a single device to complete the entire characterization process. Typically, multiple devices such as FIB, TEM, and nanoprobes are needed to continuously process, observe, and perform electrical tests on the same target sample. In existing technologies, the sample fixation methods during multi-device transfers are inconsistent, with different devices using dedicated stages. This leads to difficulties such as repeated clamping, manual alignment, and exposure to unprotected environments when switching devices. General-purpose stages are mostly only compatible with single devices or single orientations, making it difficult to support joint analysis workflows. This results in slow candidate region convergence, a lack of unified benchmarks and result inheritance relationships between analysis actions, and frequent problems in engineering practice such as repeated disassembly, sample damage, unstable conclusions, and extended analysis cycles.

[0003] The main technical problem with the above-mentioned existing technology is that, during the transfer of multiple devices, due to the lack of a common reference bearing body and a unified interface matching mechanism, the sample cannot quickly and accurately reproduce the spatial attitude of the preceding device after being transferred between different devices, resulting in large repeatability errors and high risk of sample contamination, which in turn affects the integrity of the evidence chain and the reliability of the conclusions of the joint analysis. Summary of the Invention

[0004] To overcome the above deficiencies, this invention provides a multi-device shared sample transfer system, which aims to improve the problems of large repeated positioning errors and high risk of sample contamination caused by the lack of a common reference bearing body and a unified interface matching mechanism during the multi-device transfer process.

[0005] This invention provides the following technical solution: a multi-device shared sample transfer system, comprising:

[0006] The benchmark establishment module is used to fix the target sample to the common benchmark support body and establish the spatial benchmark of the target sample based on the common benchmark support body;

[0007] The device interface module is used to match the clamping end or cavity interface of different target devices so that the common reference bearing body can be compatiblely docked with each target device.

[0008] The transfer and holding module is used to maintain the same common reference carrier body between different devices to complete the transfer of the target sample between different devices;

[0009] A contamination prevention module is used to reduce the risk of oxidation, particulate contamination, and environmental exposure of the target sample during the transfer process;

[0010] The attitude constraint module is used to constrain the displacement and attitude deflection of the common reference bearing body and the target sample through locking and limiting structures, so as to ensure the attitude repeatability of the target sample in different circulation stages.

[0011] The deviation correction module is used to read the positioning results recorded or output by the reference establishment module on each target device side, and perform deviation correction on the sample posture on the current device side according to the read positioning results.

[0012] The results output module is used to output repeatability results, contamination control results, and pose information for subsequent analysis.

[0013] The present invention has the following beneficial effects:

[0014] 1. In this invention, by maintaining the same fixed state between different devices through the common reference bearing body, and by combining the locking and limiting structure and the deviation correction module, the spatial attitude reproduction accuracy of the sample between the devices is significantly improved; at the same time, by maintaining a low oxygen environment or sealing protection during the transfer process through the anti-contamination module, the risk of particulate contamination and environmental exposure is effectively reduced.

[0015] 2. In this invention, the rapid locking and limiting structure avoids secondary damage caused by repeated clamping and manual alignment, making it particularly suitable for multi-device tandem analysis of fragile or trace samples, thus improving the integrity of the samples.

[0016] 3. In this invention, the integrated carrier body, interchangeable interface adapter structure and standardized transfer process reduce the intermediate preparation actions and repeated calibration time when switching between devices, thereby significantly improving the overall efficiency of failure analysis.

[0017] 4. In this invention, by recording and outputting repeated positioning results, pollution control results, and pose information on each device side, the results of previous processing, observation, and testing can be directly called and inherited by subsequent devices, forming a closed-loop data chain. This avoids uncertainty in conclusions or difficulty in verification due to the loss of reference, and enhances the traceability and reliability of the analysis results. Attached Figure Description

[0018] Figure 1 This is a schematic diagram showing the core module relationships of a multi-device shared sample transfer system proposed in this invention;

[0019] Figure 2 This is a simplified flowchart illustrating the cross-device sample transfer process of a multi-device shared sample transfer system proposed in this invention.

[0020] Figure 3 This is a schematic diagram of the common reference bearing structure of a multi-device shared sample transfer system proposed in this invention;

[0021] Figure 4 This is a schematic diagram of the key control parameters of a multi-device shared sample transfer system proposed in this invention;

[0022] Figure 5 This invention proposes a replacement scheme for the interface adapter structure of a multi-device shared sample transfer system.

[0023] Among them, 10 is the benchmark establishment module; 20 is the equipment interface module; 21 is the interface adapter structure; 30 is the flow retention module; 40 is the anti-pollution module; 41 is the sealing protection cover; 50 is the attitude constraint module; 51 is the locking and limiting structure; 52 is the deviation detection unit; 60 is the deviation correction module; 70 is the result output module; 100 is the common benchmark bearing theme; and 200 is the target equipment. Detailed Implementation

[0024] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] In this invention, "common reference" means that when the target sample is transferred between different devices, its position and orientation are always determined based on the same spatial reference coordinate system. The spatial reference is established through the positioning reference structure on the common reference carrier and can be directly inherited and used by subsequent devices.

[0026] Reference Figure 1This invention provides a multi-device shared sample transfer system, comprising: a reference establishment module 10, a device interface module 20, a transfer holding module 30, an anti-contamination module 40, an attitude constraint module 50, a deviation correction module 60, and a result output module 70. The shared reference support body 100 is equipped with a positioning reference structure 110 for fixing the target sample and establishing a spatial reference. The reference establishment module 10 is fixedly connected to the shared reference support body 100. The device interface module 20 is configured with at least two interchangeable interface adapter structures 21 for matching with the clamping ends or cavity interfaces of different target devices 200. The transfer holding module 30 is used to maintain the same shared reference support body 100 between different devices. The anti-contamination module 40 is equipped with a sealed protective cover 41 or an isolated environment to reduce the risk of sample oxidation and particulate contamination during transfer. The attitude constraint module 50 includes a locking and limiting structure 51 and a deviation detection unit 52 for constraining the displacement and attitude deflection of the shared reference support body 100 and the sample. The deviation correction module 60 is communicatively connected to both the reference establishment module 10 and the attitude constraint module 50. It reads the positioning results recorded or output by the reference establishment module 10 and performs deviation correction on the sample attitude of the current device. The result output module 70 outputs repeatability results, contamination control results, and pose information for subsequent analysis. The modules work collaboratively in a preset logical order to complete the non-destructive, high-precision transfer of samples between multiple target devices 200.

[0027] Reference Figure 2 The present invention provides a method for multi-device shared sample transfer, comprising the following steps:

[0028] S100, the reference establishment module 10 fixes the target sample to the predetermined fixed area of ​​the common reference support body 100, maintains the spatial correspondence by locking or bonding, and establishes the spatial reference of the target sample relative to the common reference support body 100 based on the known coordinates of the positioning reference structure 110 in three-dimensional space.

[0029] S200, the device interface module 20 identifies the clamping end or cavity interface type and size parameters of the current target device 200, selects a matching adapter structure from at least two interchangeable interface adapter structures 21, and installs or docks it to the common reference bearing body 100 so that its external connection characteristics are mechanically compatible with the current target device 200.

[0030] S300, the transfer and holding module 30 removes the common reference support body 100 from the current target device 200, and transfers it to the docking area of ​​the next target device while keeping the target sample and the common reference support body 100 relatively fixed.

[0031] S400, the anti-pollution module 40 places the common reference carrier 100 and the target sample in a sealed protective cover 41 or an isolated environment to keep the oxygen content below a preset threshold and isolate particulate pollutants.

[0032] S500, the attitude constraint module 50 places the common reference bearing body 100 in the predetermined installation position within the current target device 200, aligning the positioning reference structure 110 with the reference positioning surface or positioning pin within the device, and applying a locking force through the locking and limiting structure 51 to restrict the translational and rotational degrees of freedom; the deviation detection unit 52 reads the positioning results recorded or output by the preceding device, obtains the actual spatial position, and calculates the position deviation ΔP and the angle deviation Δθ.

[0033] S600, the deviation correction module 60 drives the sample stage of the target device 200 to move or adjust the state of the locking and limiting structure 51 according to the deviation correction amount calculated by the deviation detection unit 52, so as to eliminate the deviation and make the posture of the target sample in the current device consistent with the posture in the preceding device.

[0034] S700, after completing the deviation correction at each target device, the result output module 70 records the actual repeatability accuracy value at the current device as the repeatability result; after the entire process is completed or at a preset node, it summarizes the peak oxygen content, particle count, or environmental exposure duration monitored by the pollution prevention module 40 to generate pollution control results; based on the spatial reference and the final attitude parameters after each deviation correction, it generates pose information for subsequent analysis; and outputs the above results in a readable format to a storage medium, display device, or to the control system of the next device.

[0035] This embodiment details the specific mechanism by which the reference establishment module 10 fixes the target sample to the common reference support body 100 and establishes a spatial reference. The specific implementation process includes the following steps:

[0036] S110, the reference establishment module 10 places the target sample in a predetermined fixed area of ​​the common reference support body 100. This predetermined fixed area is a plane or groove precisely machined on the upper surface of the common reference support body 100, with a surface roughness not exceeding Ra0.8μm. A positioning reference structure 110 is provided on the common reference support body 100, which includes at least three non-collinear reference markers or a reference edge and a reference point. The reference establishment module 10 aligns the target sample with the positioning reference structure 110, establishing a defined spatial correspondence between the characteristic areas of the target sample and the reference markers. As a preferred embodiment, the lower left corner of the target sample coincides with the first reference marker, and the edge of the target sample is parallel to the reference edge. It should be noted that the above alignment operation can be assisted by an optical microscope or a visual guidance system to ensure initial positioning accuracy.

[0037] S120, the reference establishment module 10 fixes the target sample to the common reference support body 100 by locking or bonding to maintain spatial correspondence. The locking method uses elastic pressure plates or threaded fasteners, with the applied locking force controlled within the range of 0.6N to 1.4N; the bonding method uses vacuum-compatible conductive adhesive or double-sided carbon conductive tape. After fixing, the spatial correspondence between the target sample and the positioning reference structure 110 remains unchanged. Real-time monitoring of the locking force can be achieved through a miniature force sensor integrated within the locking structure, ensuring that the locking force is always within the aforementioned preferred range.

[0038] S130, the reference establishment module 10 establishes a spatial reference for the target sample relative to the common reference support body 100 based on the known coordinates of the positioning reference structure 110 in three-dimensional space. The spatial coordinates of the positioning reference structure 110 are pre-calibrated using a coordinate measuring machine or optical calibration system and recorded in the storage medium of the common reference support body 100 or directly used as a physical reference. The establishment of the spatial reference includes the following sub-steps: taking the first reference marker point in the positioning reference structure 110 as the origin O (0,0,0); taking the direction of the line connecting the first reference marker point and the second reference marker point as the positive X-axis direction; taking the direction of the normal perpendicular to the bearing plane of the common reference support body 100 as the positive Z-axis direction; determining the positive Y-axis direction according to the right-hand rule, thereby constructing a three-dimensional Cartesian coordinate system. Subsequently, the coordinates of at least three non-collinear feature points on the target sample in this coordinate system are measured. Let the feature points be... , , The coordinates are respectively The spatial reference of the target sample is characterized by the following parameters:

[0039] Sample centroid coordinates: ;

[0040] Sample orientation: Represented by the angle between the line connecting two feature points and the coordinate axis, such as the angle between the sample edge and the X-axis. ;

[0041] The reference establishment module 10 stores the aforementioned spatial reference information as a data record, including the coordinate origin, coordinate axis directions, sample centroid coordinates, and orientation angle. This spatial reference is used by the device interface module 20, attitude constraint module 50, and deviation correction module 60 in subsequent transfers. Through the above process, the target sample is reliably fixed to the common reference support body 100, and a unified spatial reference that can be inherited by subsequent devices is established, thereby ensuring the consistency and reproducibility of sample attitude during multi-device transfers.

[0042] This embodiment details the specific mechanism by which the device interface module 20 matches the clamping end or cavity interface of different target devices 200, enabling the common reference bearing body 100 to be compatiblely docked with each target device 200. (See attached...) Figure 5 As shown, attached Figure 5 The diagram illustrates alternative solutions for different interface adapter structures 21. The specific implementation process includes the following steps:

[0043] S210, the device interface module 20 identifies the type and dimensional parameters of the clamping end or cavity interface of the current target device 200. The target device 200 includes focused ion beam equipment, transmission electron microscopes, and nanoprobe stages. The identification method can be any of the following: manually inputting the device model through a human-machine interface, with the device interface module 20 automatically matching the interface type based on a pre-stored device interface database; or scanning the geometric features of the clamping end using an optical sensor, including the opening diameter, number of jaws, position of the locating pins, and taper angle, extracting feature vectors, and comparing them with the database. Interface types include at least circular dovetail groove interfaces, rectangular clamping interfaces, and threaded interfaces. Dimensional parameters include the outer diameter, inner diameter, depth, and fit tolerances of the interface. It should be noted that for differences in device interfaces between different manufacturers or models, corresponding parameters can be pre-entered into the database to support rapid identification in mixed-line production scenarios.

[0044] S220, based on the identification result, the device interface module 20 selects an adapter structure that matches the current target device 200 from at least two interchangeable interface adapter structures 21. The interface adapter structure 21 is pre-processed as an independent, detachable component, and each adapter structure corresponds to a device interface type. The selection logic for the adapter structure is as follows: Let the current device interface type code be T, and the adapter structure type code be A. The matching function M(T) returns the required adapter structure code. When M(T) = A, the device interface module 20 retrieves the corresponding adapter structure from its storage location. As a preferred approach, for the dovetail groove interface commonly used in transmission electron microscope sample holders, an adapter structure with a corresponding dovetail male is selected; for the clamping end of focused ion beam equipment, an adapter structure with a planar clamping boss is selected.

[0045] S230, the device interface module 20 installs or docks the selected adapter structure to the common reference support body 100. The common reference support body 100 has a uniform mounting base on its bottom or side, with positioning holes and locking threads. The installation method between the interface adapter structure 21 and the base is as follows: insert the positioning pin of the interface adapter structure 21 into the positioning hole of the base to achieve coarse positioning; rotate the locking nut or move the eccentric buckle to generate a preset locking force between the interface adapter structure 21 and the base, the locking force ranging from 0.8N to 1.1N. After installation, the external connection characteristics of the common reference support body 100 are mechanically compatible with the clamping end or cavity interface of the current target device 200, meaning that the shape, size, and tolerance of the mating surfaces meet the device clamping requirements, enabling a wobbly docking.

[0046] S240: After completing the operation of the current target device 200, the device interface module 20 disassembles or switches the interface adapter structure 21 to restore the common reference support body 100 to a state suitable for docking with the next target device. The disassembly steps include: releasing the locking nut or retracting the eccentric buckle to separate the interface adapter structure 21 from the base, and placing the adapter structure back in the designated storage position. If the next target device requires a different adapter structure, the above steps S220 to S230 are repeated. To facilitate continuous operation of multiple devices, multiple interface adapter structures 21 conversion layers can be pre-installed on the common reference support body 100 simultaneously, and switching can be performed by rotation or sliding without complete disassembly. During switching, the conversion mechanism is manually or automatically driven so that the working surface of the corresponding adapter structure faces the device clamping end, and the remaining adapter structures are stored in the protective position.

[0047] Through the above process, the common reference carrier 100 can be compatible with the interfaces of various target devices 200, such as focused ion beam equipment, transmission electron microscope and nanoprobe stage, without the need to replace the carrier itself, thus realizing rapid multi-device transfer of samples.

[0048] In this embodiment, the specific mechanism by which the transfer and holding module 30 maintains the same common reference carrier 100 between different devices to complete the transfer of the target sample between different devices is described in detail. (See attached diagram) Figure 4 As shown, attached Figure 4 This is a window diagram of key control parameters, showing feasible windows and recommended ranges for key control quantities such as oxygen content and locking force. The specific implementation process includes the following steps:

[0049] S310, after the current target device 200 completes its operation, the transfer holding module 30 removes the common reference support body 100 from the current target device 200, maintaining the relative fixed state between the target sample and the common reference support body 100. The current target device 200 can be a focused ion beam device, a transmission electron microscope, or a nanoprobe stage. The removal operation adopts different methods depending on the device type: for devices with a vacuum chamber, the chamber pressure is first restored to atmospheric pressure through the venting valve, the chamber door is opened, and a vacuum-compatible sample rod or robotic arm is used to grasp the preset clamping groove on the common reference support body 100 and pull it out smoothly along the axial direction; for open chamber devices, the common reference support body 100 is directly picked up from the stage using tweezers or a suction pen. During the removal process, the existing locking or adhesive fixing state between the target sample and the common reference support body 100 must be maintained, and the locking force applied by the attitude constraint module 50 must not be released.

[0050] S320, while maintaining the aforementioned relatively fixed state, the transfer and holding module 30 transfers the common reference carrier 100 to the docking area of ​​the next target device 200. A clean-type sample transfer box or a manual tray is used as the transfer tool. The transfer and holding module 30 places the common reference carrier 100 in the positioning groove of the transfer tool. The shape of the positioning groove matches the bottom contour of the common reference carrier 100 to prevent tipping or shaking during transport. If the transfer environment is a non-protective atmosphere and the target sample is sensitive to oxygen or water vapor, the common reference carrier 100, along with the transfer tool, is placed into a sealed transfer chamber, which is filled with inert gas or evacuated to an oxygen content below 30 ppm. The transfer path is from the current device installation location through a laboratory clean passage to the loading area of ​​the next target device.

[0051] S330, the transfer holding module 30, through the cooperation between the clamping end or cavity interface of the next target device 200 and the device interface structure configured on the common reference support body 100, fixes the common reference support body 100 within the next target device 200, thereby completing the transfer from the current target device to the next target device. The specific steps are as follows: The transfer holding module 30 removes the common reference support body 100 from the transfer tool, aligning the interface adapter structure 21 already installed on it with the clamping end of the next target device 200; it then inserts the common reference support body 100 into the predetermined docking area of ​​the next target device 200, aligning the positioning surface of the interface adapter structure 21 with the corresponding positioning surface of the device clamping end. The set position deviation vector is... This vector is obtained by observation with an optical microscope or by laser ranging. If If the deviation exceeds the preset coarse positioning threshold (e.g., 0.5mm), the horizontal position and height of the common reference bearing body 100 are manually or automatically fine-tuned to reduce the deviation to within the threshold. The clamping end of the next target device 200 is then driven to move, such as pressing down the pressure plate, retracting the jaws, or tightening the threads, creating a contact clamping force between the clamping end and the interface adapter structure 21. This clamping force is controlled within the range of 0.8N to 1.1N and is monitored by a force sensor. After clamping, the common reference bearing body 100 is locked within the device, and its spatial position is fixed relative to the device coordinate system. The locking status is checked by confirming that the common reference bearing body 100 is not shaking or tilting using a position sensor or vision system within the device. If the requirements are met, the transfer is considered successful; if not, the clamping end is released, and the alignment and locking steps are repeated.

[0052] Through the above process, the common reference support body 100 is transferred intact from the current target device 200 to the next target device 200. The relative fixed state between the target sample and the support body is not damaged during the entire transfer process, providing a stable foundation for the subsequent attitude constraint module 50 and deviation correction module 60.

[0053] This embodiment details the specific mechanism by which the anti-contamination module 40 reduces the risk of oxidation, particulate contamination, and environmental exposure of the target sample during the transfer process. (See attached diagram.) Figure 4 As shown, attached Figure 4 This is a window diagram of key control parameters, showing feasible windows and recommended ranges for key control quantities such as oxygen content and locking force. The specific implementation process includes the following steps:

[0054] S410, before or at the start of the transfer process, the anti-contamination module 40 places the common reference carrier 100 and the target sample in an isolated environment, or configures a sealed protective cover 41 for the common reference carrier 100 and the target sample. The isolated environment can take one of the following forms: First, a portable vacuum transfer box, which has a slot for placing the common reference carrier 100 inside, and the box is equipped with a sealing door and an exhaust valve, which can be connected to an external vacuum pump or inert gas source; second, a glove box-type low-oxygen operating table, which continuously circulates high-purity nitrogen gas. The sealed protective cover 41 is a detachable cover made of transparent polycarbonate material. The bottom of the cover is sealed to the common reference carrier 100 by an O-ring, and the top of the cover has an openable valve for docking with the equipment clamping end. If the sealed protective cover 41 solution is used, the protective cover is fastened onto the common reference carrier 100, pressed to deform the O-ring to form an airtight seal, and the quick-release buckles around the perimeter are locked.

[0055] S420, the anti-pollution module 40 maintains the oxygen content within the isolated environment or sealed protective cover 41 below a preset threshold during the transfer process, and prevents external particulate contaminants from entering. The preset threshold is an oxygen content below 30 ppm, corresponding to a water vapor content below 50 ppm. The specific control method is as follows: a high-purity nitrogen cylinder is connected to the air inlet of the vacuum transfer box, the valve is opened to purge at a flow rate of 0.5 L / min, and the exhaust valve is opened simultaneously. A trace oxygen analyzer is used to monitor the oxygen concentration inside the box in real time. Let the current oxygen concentration be... The target threshold is =30ppm. When > If necessary, increase the purging flow rate or extend the purging time until... ≤ For the sealed protective cover 41 option, the cover is pre-filled with dry nitrogen and equipped with an oxygen indicator or miniature sensor. If the oxygen content exceeds the standard, it is refilled. Particulate contaminant isolation is achieved by: all seams of the isolated environment or sealed protective cover 41 are designed with dustproof seals, and openings are equipped with HEPA filters or Class 100 clean laminar flow hoods to ensure that the number of gas particles entering the protective cover meets the ISO Class 3 standard, that is, the number of particles larger than 0.1μm in each cubic meter of air does not exceed 1000.

[0056] S430, before the common reference support body 100 docks with the next target device 200, the anti-contamination module 40 removes or opens the sealing protective cover 41, or maintains the connection between the isolated environment and the cavity of the next target device, to prevent the target sample from being exposed to the external environment at the moment of docking. Specifically, there are two scenarios:

[0057] Scenario 1: For the scheme using the sealed protective cover 41, after the common reference support body 100 is sent into the docking area of ​​the next target device 200 and before the device clamping end moves, the protective cover 41 should be opened first through the openable valve or side sliding cover on the top of the sealed protective cover 41. If the target device 200 has a vacuum chamber, the chamber should be evacuated to a pressure close to that inside the sealed protective cover 41 (pressure difference less than 100Pa) before opening the valve to prevent airflow from impacting the sample. After opening, the sealed protective cover 41 should be removed as a whole or flipped over to be below the common reference support body 100.

[0058] Scenario 2: For solutions employing an isolated environment, such as a vacuum transfer box, the transfer box is directly connected to the loading interface of the target device 200. The connection method is as follows: the transfer box's docking flange is aligned with the inlet flange of the device cavity; the locking ring is rotated to seal the connection; then the gap between the two is evacuated; finally, the inner door of the transfer box and the outer door of the device are opened, allowing the isolated environment to connect with the target device 200 cavity, forming a continuous low-oxygen channel. In this scenario, the target sample remains in a protected environment throughout the process of being transferred from the transfer box into the device cavity, never exposed to the atmosphere.

[0059] Through the above process, the target sample is effectively protected throughout the entire transfer process and at the moment of environmental change, and the risks of oxidation and particulate contamination are significantly reduced.

[0060] In this embodiment, the specific mechanism by which the attitude constraint module 50 constrains the displacement and attitude deflection of the common reference bearing body 100 and the target sample through the locking and limiting structure 51 is described in detail to ensure the attitude repeatability of the target sample at different stages of circulation. The specific implementation process includes the following steps:

[0061] S510, the attitude constraint module 50 places the common reference support body 100 at a predetermined installation position within the current target device 200, and aligns the positioning reference structure 110 on the common reference support body 100 with the reference positioning surface or positioning pin within the current target device 200. The predetermined installation position is the fixed support area on the sample stage or platform of the target device 200, which has a reference positioning surface, i.e., a precision-ground plane with a surface roughness not greater than Ra0.4μm; or has two or more positioning pins with a diameter tolerance of ±2μm. The bottom of the common reference support body 100 is provided with a corresponding positioning reference structure 110, specifically in the form of a V-groove, a conical hole, or a flat edge. The alignment operation is as follows: the common reference support body 100 is slowly lowered close to the reference positioning surface, so that the V-groove of the positioning reference structure 110 contacts the positioning pin on the device, or the bottom edge of the common reference support body 100 is in contact with the reference positioning surface. When the locating pin is fully inserted into the bottom of the V-groove, the planar position of the common reference bearing body 100 is defined; when the bottom surface is in contact with the reference locating surface, the height direction is defined. After alignment, the initial position deviation of the common reference bearing body 100 in the equipment coordinate system should be less than 0.1 mm.

[0062] S520, the attitude constraint module 50 applies a locking force to the common reference bearing body 100 through the locking and limiting structure 51, restricting the translational and rotational degrees of freedom of the common reference bearing body 100 in three-dimensional space. The locking and limiting structure 51 includes an elastic pressure plate, a threaded pressure block, or an eccentric cam. The locking process is as follows: the locking element is manually or pneumatically driven to make its pressing surface contact the force point on the upper surface or side of the common reference bearing body 100. The applied locking force is monitored by a force sensor and the control range is 0.8N to 1.1N. The locking force vector is denoted as... ,in This is the vertical clamping force. and A horizontal limiting force is applied. After locking, all six degrees of freedom of the common reference load-bearing body are fully constrained: translational degree of freedom... and rotational degrees of freedom All are limited to the micrometer range.

[0063] S530, simultaneously or after the locking and limiting structure 51 is activated, the attitude constraint module 50 detects the relative positional deviation between the common reference bearing body 100 and the target device 200. If the deviation exceeds the allowable range, the locking and limiting structure 51 or the placement attitude of the common reference bearing body 100 is adjusted until the attitude repeatability meets the preset requirements. The detection steps specifically include the following sub-steps:

[0064] S531, Read the positioning results recorded or output by the preceding equipment. These positioning results are stored in the electronic tag, QR code, or system database of the common reference carrier 100, including the desired spatial reference coordinates calibrated in the preceding equipment. and theoretical orientation angle The data is transmitted to the position deviation calculation unit of the current device via the read interface.

[0065] S532, Obtain the actual spatial position of the positioning reference structure 110 on the current common reference support body 100 within the target device 200. Activate the optical microscope or laser displacement sensor built into the target device 200 to scan the feature points of the positioning reference structure 110 on the common reference support body 100 and acquire the actual coordinates in real time. and orientation angle is .

[0066] S533 compares the actual spatial location with the desired location in the positioning results, and calculates the position deviation and / or angle deviation. The calculation method is as follows:

[0067] ;

[0068] ;

[0069] The overall positional deviation is The attitude deviation is = .

[0070] S534 determines whether the deviation value exceeds the preset allowable range and outputs the determination result to decide whether to perform attitude adjustment. Preset allowable range: position deviation. Components of attitude deviation The computing unit will Compare with the allowed range to generate a judgment flag (Flag): If and If the flag is 0, then Flag=0, indicating no adjustment is needed; otherwise, Flag=1, indicating that attitude adjustment needs to be performed. This judgment result is output to the adjustment execution unit of the attitude constraint module. If Flag=1, then attitude adjustment is performed. There are two adjustment methods: one is to fine-tune the adjusting screws on the locking and limiting structure to change the position of the clamping point or the pressure distribution, causing a small displacement of the common reference bearing body; the other is to loosen the locking structure, readjust the placement attitude of the common reference bearing body in the predetermined installation position, such as rotating it by a certain angle or translating it slightly, and then locking it again. After adjustment, the above steps are repeated until Flag=0, meaning the attitude repeatability meets the preset requirements.

[0071] S540, before completing the operation of the current target device 200 and preparing to transfer to the next device, the attitude constraint module 50 releases the constraints of the locking and limiting structure 51 to release the common reference bearing body 100. The release operation is as follows: reverse drive the locking and limiting structure 51, that is, loosen the threads, lift the pressure plate or retract the eccentric cam, so that the locking force is reduced to zero. After confirming that all locking parts have disengaged from the surface of the common reference bearing body 100, the common reference bearing body 100 is in a free state and can be removed from the device for the next transfer.

[0072] Through the above process, the common reference bearing body 100 is stably constrained in each device, and the attitude repeatability is guaranteed through detection and closed-loop adjustment. The input (previous positioning result), output (judgment flag) and adjustment action of the entire detection process form a complete closed loop, providing a precise initial state for the subsequent deviation correction module 60.

[0073] In this embodiment, the specific mechanism by which the deviation correction module 60 reads the positioning results recorded or output by the reference establishment module 10 at each target device side, and performs deviation correction on the sample attitude at the current device side based on the read positioning results is described in detail. The specific implementation process includes the following steps:

[0074] S610, the deviation correction module 60 reads the positioning results recorded or output by the preceding equipment on the target equipment side. These positioning results are stored in an electronic tag, QR code, or external database attached to the common reference carrier 100, and are generated and stored by the reference establishment module 10. The positioning results include at least the following information: the desired spatial reference coordinates calibrated in the preceding equipment. Expected Orientation Angle and the nominal coordinate transformation matrix between the preceding device and the current device. The deviation correction module 60 transmits these data to the deviation correction calculation unit of the current device via the read interface.

[0075] S620, the deviation correction module 60 acquires the actual attitude parameters of the current common reference support body 100 within the target device 200. It activates the optical alignment system or laser interferometer built into the target device 200 to measure the current spatial position and angle of the positioning reference structure 110 on the common reference support body 100. Let the measured actual coordinates be... The actual orientation angle is This set of parameters represents the actual attitude parameters of the current device.

[0076] S630, the deviation correction module 60 compares the actual attitude parameters with the desired attitude parameters in the positioning results, and calculates the deviation correction amount for each degree of freedom. The desired attitude parameters are the theoretical values ​​in the current device coordinate system obtained by transforming the desired reference coordinates of the preceding device. Let the coordinate system of the preceding device be... The current device coordinate system is The transformation matrix is The desired attitude parameters are:

[0077] ;

[0078] ;

[0079] in, It is a rotation submatrix.

[0080] Calculate the deviation values ​​for each degree of freedom:

[0081] ;

[0082] ;

[0083] The deviation correction amount is set as the negative of the deviation value, which is the amount of compensation that needs to be applied to each degree of freedom:

[0084] ;

[0085] ;

[0086] S640, the deviation correction module 60, based on the deviation correction amount, drives the sample stage of the target device 200 to move or adjusts the locking limit state of the common reference support body 100 to eliminate the deviation and ensure that the posture of the target sample in the current device is consistent with the posture in the preceding device. The specific execution method is divided into the following two cases:

[0087] Scenario 1: When the deviation correction amount is... , , When the absolute values ​​of all deviations are greater than the minimum step resolution of the sample stage (e.g., 0.1 μm), the method of driving the sample stage is preferred. The deviation correction module 60 will adjust the deviation amount. The data is sent to the sample stage controller of the target device 200, which drives the sample stage to move a corresponding distance and angle in the corresponding degree of freedom. Let the current coordinates of the sample stage be... The corrected target coordinates are:

[0088] ;

[0089] ;

[0090] After the sample stage is moved into position, the actual attitude parameters are measured again to verify whether the corrected residual is less than the preset threshold, for example. If the conditions are met, the correction is complete; if not, the calculation and driving process of S630 to S640 above is repeated.

[0091] Scenario 2: When the sample stage's stroke cannot cover the required correction amount, or when the correction amount is mainly a small angular deflection and the sample stage does not have a corresponding rotation axis, the locking and limiting state of the common reference bearing body 100 is adjusted. The specific operation is as follows: partially loosen the locking and limiting structure 51, insert a precision shim between the common reference bearing body 100 and the equipment base, or use a fine-tuning set screw, manually or automatically apply a small translation or rotation, and then re-lock. After adjustment, measure the actual attitude parameters again, and repeat the calculation of the deviation correction amount until the requirements are met.

[0092] After completing the deviation correction, the deviation correction module 60 records the final actual attitude parameters of the current device as the new positioning result and updates the electronic tag or database of the common reference bearing body 100 for subsequent equipment to call.

[0093] Through the above process, each target device can actively correct its current attitude deviation based on the positioning results of the preceding device, ensuring that the spatial attitude of the target sample remains highly consistent across devices, thereby achieving spatial inheritability of the analysis results.

[0094] This embodiment details the specific mechanism by which the result output module 70 outputs repeatability results, contamination control results, and pose information for subsequent analysis. (See attached diagram.) Figure 5 As shown, attached Figure 5 The comparison chart shows the improvement of this solution over the conventional solution in key indicators such as repeatability error and particle contamination number. The specific implementation process includes the following steps:

[0095] S710, after completing the deviation correction on each target device side, the result output module 70 records the actual repeatability accuracy value on the current device side as the repeatability result. The repeatability accuracy value reflects the degree of consistency of the spatial attitude of the common reference bearing body 100 with respect to the preceding device or the standard reference after being repeatedly clamped and locked in the current device. After the deviation correction module 60 completes the correction, it obtains the final position residual vector. Repeatability accuracy is represented by the magnitude of the comprehensive position residual in three-dimensional space:

[0096] ;

[0097] For each target device 200, this value is recorded as a repeat positioning result. If the same device is clamped multiple times, the result for each clamping is recorded. Statistical values, including maximum, minimum, and average values, are calculated. The record format is: device name, timestamp, repeatability accuracy value, and unit (μm).

[0098] S720, the result output module 70, after the entire process is completed or at a preset node, summarizes the peak oxygen content, particle count, or environmental exposure duration monitored by the pollution prevention module 40 during the process, and generates pollution control results. The pollution prevention module 40 continuously monitors the following parameters during the process: oxygen content within the isolated environment or sealed protective cover 41, recorded in real time using a trace oxygen analyzer, assuming the oxygen content sequence is... ,in This is the sampling time point. The peak oxygen content is... Particle counting was performed using a laser particle counter to count the number of particles larger than 0.1 μm in a unit volume of air. The particle concentration sequence was set as follows: The peak value is Environmental exposure duration refers to the cumulative time from the moment the common reference bearing 100 leaves the high vacuum or protective environment of the first device until it enters the next device or re-establishes protection, denoted as . Preset nodes are, for example, between every two equipment transfers or after all equipment analyses are completed. Pollution control results are summarized in tabular form, including transfer stage number, peak oxygen content (ppm), peak particle count (particles / m³), exposure duration (s), and the judgment result on whether preset thresholds (oxygen content ≤30 ppm, particle count conforming to ISO 3 level) are met.

[0099] S730, the result output module 70 generates pose information for subsequent analysis based on the spatial reference and the final attitude parameters after each deviation correction. The spatial reference originates from the three-dimensional coordinate system established by the reference establishment module 10, including the origin, coordinate axis directions, and the initial coordinates of the target sample feature points within it. Let the initial coordinate system be... The initial coordinates of the sample feature points are The final attitude parameters after each deviation correction include the current device coordinate system. pose matrix of the lower common reference bearing body The pose information includes the following: the spatial coordinates of the target sample in the current device coordinate system; and the transformation of the sample feature points from their initial coordinates to the current device coordinate system using coordinate transformation.

[0100] ;

[0101] Orientation angle of the target sample in the current device: from the pose matrix Extracting Euler angles of rotation ;

[0102] Coordinate transformation matrix of the current device relative to the previous device or relative to the initial reference: Let the coordinate system of the previous device be... The current device coordinate system is Then the transformation matrix Calculated from the two pose matrices: ,in This is the final pose matrix recorded by the previous device. The pose information is stored in a structured data format for subsequent analysis software to access.

[0103] S740, the result output module 70 outputs repeatability results, contamination control results, and pose information in a readable format to a storage medium, display device, or transmits them to the control system of the next device. The readable format includes one or more of the following: text format (CSV, JSON, XML), database records, and graphical interface display. When outputting to a storage medium, the data is written to a solid-state drive or network storage, and a log file is attached to record the output timestamp. When outputting to a display device, the data is presented on the user interface in the form of tables, graphs, or 3D model annotations, such as displaying a repeatability accuracy trend chart for each device, an oxygen content change curve over time, and a real-time position diagram of the sample in the device. When transmitting to the control system of the next device, the transformation matrix in the pose information is transmitted via a local area network or serial communication protocol. The repeated positioning results are sent to the motion controller of the next device for automatic loading and pre-alignment, thereby reducing the manual calibration time on the device side.

[0104] Through the above process, all key parameters and results from the device side are systematically recorded, summarized, and output, forming a complete data loop and providing users with a traceable and reproducible chain of analytical evidence.

[0105] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multi-device shared sample transfer system, characterized in that, include: The benchmark establishment module is used to fix the target sample to the common benchmark support body and establish the spatial benchmark of the target sample based on the common benchmark support body. The spatial benchmark is recorded or output in the form of positioning results. The device interface module is used to match the clamping end or cavity interface of different target devices so that the common reference bearing body can be compatiblely docked with each target device. The transfer and holding module is used to maintain the same common reference carrier body between different devices to complete the transfer of the target sample between different devices; A contamination prevention module is used to reduce the risk of oxidation, particulate contamination, and environmental exposure of the target sample during the transfer process; The attitude constraint module is used to constrain the displacement and attitude deflection of the common reference bearing body and the target sample through locking and limiting structures, so as to ensure the attitude repeatability of the target sample in different circulation stages. The deviation correction module is communicatively connected to the reference establishment module and the attitude constraint module, respectively. The deviation correction module is used to read the positioning result from the reference establishment module and perform deviation correction on the current device side of the sample attitude according to the positioning result.

2. The multi-device shared sample transfer system according to claim 1, characterized in that, The reference establishment module fixes the target sample to the common reference support body and establishes a spatial reference for the target sample based on the common reference support body, including: The positioning reference structure is provided on the common reference support body, and the locking member or adhesive layer is used to fix the target sample to the predetermined fixing area of ​​the common reference support body and maintain the spatial correspondence. The target sample is fixed to the common reference support body by locking or bonding to maintain the spatial correspondence. Furthermore, the reference establishment module establishes a spatial reference for the target sample relative to the common reference bearing body based on the known coordinates of the positioning reference structure in three-dimensional space.

3. The multi-device shared sample transfer system according to claim 1, characterized in that, The device interface module is matched with the clamping end or cavity interface of different target devices to enable the common reference bearing body to be compatible with various target devices, including: At least two interchangeable interface adapter structures, and an identification unit for identifying the clamping end or cavity interface type and size parameters of the current target device; The device interface module is configured to: select a matching adapter structure based on the identification result and install or dock it with the common reference bearing body, so that the external connection characteristics of the common reference bearing body are mechanically compatible with the clamping end or cavity interface of the current target device, and disassemble or switch the adapter structure after completing the operation of the current target device.

4. The multi-device shared sample transfer system according to claim 1, characterized in that, The transfer and holding module maintains the same common reference carrier body between different devices to complete the transfer of the target sample between different devices, including: After the current target device completes its operation, the common reference support body is removed from the current target device, and the target sample and the common reference support body are kept in a relatively fixed state. While maintaining the relatively fixed state, the common reference bearing body is transferred to the docking area of ​​the next target device; By cooperating with the clamping end or cavity interface of the next target device and the device interface structure configured on the common reference bearing body, the common reference bearing body is fixed in the next target device to complete the transfer from the current target device to the next target device.

5. A multi-device shared sample transfer system according to claim 1, characterized in that, The anti-contamination module reduces the risk of oxidation, particulate contamination, and environmental exposure of the target sample during the transfer process by including: An isolation environment or sealed protective cover for accommodating the common reference support body and the target sample; An oxygen content monitoring unit is used to maintain the oxygen content in the isolated environment or sealed protective cover below a preset threshold during the transfer process and to prevent external particulate pollutants from entering. Furthermore, the anti-contamination module is configured to remove or open the sealing protective cover or maintain the connection between the isolation environment and the cavity of the next target device before the common reference support body docks with the next target device, so as to avoid the target sample being exposed to the external environment at the moment of docking.

6. A multi-device shared sample transfer system according to claim 1, characterized in that, The attitude constraint module constrains the displacement and attitude deflection of the common reference bearing body and the target sample through locking and limiting structures to ensure the attitude repeatability of the target sample at different stages of circulation, including: Locking and limiting structure, and deviation detection unit for detecting the relative positional deviation between the common reference bearing body and the target device; The attitude constraint module is configured to: place the common reference bearing body in a predetermined installation position within the current target device, and align the positioning reference structure on the common reference bearing body with the reference positioning surface or positioning pin within the current target device; apply a locking force to the common reference bearing body through the locking and limiting structure to restrict its translational and rotational degrees of freedom; simultaneously or after locking, use the deviation detection unit to detect the relative position deviation; if the deviation exceeds the allowable range, adjust the locking and limiting structure or adjust the placement attitude until the attitude repeatability meets the preset requirements; release the constraint of the locking and limiting structure before completing the operation of the current target device and preparing to transfer to the next device.

7. A multi-device shared sample transfer system according to claim 6, characterized in that, The deviation detection unit reads the positioning results recorded or output by the preceding device and determines the deviation, including: Read the positioning results recorded or output by the preceding device; Obtain the actual spatial position of the positioning reference structure on the current common reference bearing body within the target device; The actual spatial location is compared with the expected location in the positioning result, and the position deviation value and / or angle deviation value are calculated. Determine whether the deviation value exceeds the preset allowable range, and output the determination result to decide whether to perform attitude adjustment.

8. A multi-device shared sample transfer system according to claim 1, characterized in that, The deviation correction module reads the positioning results recorded or output by the reference establishment module and performs deviation correction on the current sample attitude on the device side, including: On the target device side, read the positioning results recorded or output by the preceding device; Obtain the actual attitude parameters of the current common reference bearing body within the target device; The actual attitude parameters are compared with the expected attitude parameters in the positioning results, and the deviation correction amount in each degree of freedom is calculated. Based on the deviation correction amount, the sample stage of the target device is driven to move or the locking limit state of the common reference bearing body is adjusted to eliminate the deviation and make the posture of the target sample in the current device consistent with the posture in the preceding device.

9. A multi-device shared sample transfer system according to claim 1, characterized in that, The system also includes a result output module, which outputs repeatability results, contamination control results, and pose information for subsequent analysis, including: After completing the deviation correction on each target device side, record the actual repeatability accuracy value on the current device side as the repeatability result; After the entire circulation process is completed or at a preset node, the peak oxygen content, particle count, or environmental exposure duration monitored by the pollution prevention module during the circulation process are summarized to generate pollution control results; Based on the spatial reference and the final attitude parameters after each deviation correction, pose information is generated for subsequent analysis. The repeated positioning results, pollution control results, and pose information are output in a readable format to a storage medium, display device, or transmitted to the control system of the next device.

Images