Optical element decentering adjustment device and optical apparatus

Abstract

The application discloses an optical element eccentricity adjusting device and optical equipment, and relates to the technical field of optical devices.The optical element eccentricity adjusting device comprises a lens barrel, a lens frame, an inner frame, an outer frame, a first elastic member, a second elastic member and a driving structure, wherein the inner frame is sleeved on the lens frame, the outer frame is sleeved on the inner frame, the first elastic member is arranged between the outer frame and the lens barrel, and when the outer frame moves in the X direction, the first elastic member is elastically deformed to generate a driving force for returning the outer frame to the original position; the second elastic member is arranged between the inner frame and the outer frame, and when the inner frame moves in the Y direction, the second elastic member is elastically deformed to generate a driving force for returning the inner frame to the original position.The technical scheme provided by the application can realize high-precision eccentricity adjustment of the optical element in the X direction and the Y direction, and the adjustment in the X direction and the Y direction is decoupled, so that the adjustment precision is high and the repeatability is good.

Description

Technical Field

[0001] This invention relates to the field of optical device technology, and in particular to an optical element eccentricity adjustment device and optical equipment. Background Technology

[0002] An eccentric adjustment structure for optical elements is a precision assembly device used to adjust the radial position of optical elements. It is commonly used in the optical systems of high-end optoelectronic equipment such as semiconductor wafer defect inspection equipment and lithography machines. In precision optical systems such as large numerical aperture deep ultraviolet objectives, the objective is composed of multiple sets of optical elements. The eccentricity error of each optical element affects key performance indicators such as wavefront aberration, imaging resolution, and contrast of the objective. Therefore, an eccentric adjustment structure is needed to precisely correct the radial position of the optical elements to meet the imaging quality requirements of nanoscale defect detection.

[0003] In existing technologies, the eccentricity adjustment of optical elements mostly adopts a rigid adjustment structure. A typical scheme involves setting a set screw in the radial direction of the lens barrel. By turning the set screw, the lens frame is pushed to translate radially, thereby changing the eccentric position of the optical element. This type of structure usually arranges one or more sets of set screws in both the X and Y directions. The thrust is transmitted by the point or line contact between the end of the set screw and the outer wall of the lens frame. After adjustment, the position is fixed by tightening the lock nut. The adjustment process belongs to a rigid contact transmission method.

[0004] However, in actual adjustment, the rigid adjustment structure inevitably has mechanical gaps between the set screw and the lens frame, as well as between the rigid mating surfaces. In addition, the inherent motion backlash of the rigid transmission results in a large deviation between the actual displacement and the theoretical driving amount during the adjustment process. This leads to low adjustment resolution and poor adjustment repeatability, making it difficult to achieve the micron-level or even submicron-level eccentric adjustment accuracy required by large numerical aperture deep ultraviolet objectives. Consequently, it affects the imaging quality of the objective and the reliability of defect detection. Summary of the Invention

[0005] The main objective of this invention is to provide an optical element eccentricity adjustment device and optical equipment, which aims to achieve high-precision adjustment of optical element eccentricity and eliminate the degree of freedom coupling between the adjustment in the X and Y directions.

[0006] To achieve the above objectives, the present invention provides an optical element eccentricity adjustment device, comprising: The lens barrel, the axis of which is set along the Z direction; An outer frame is disposed inside the lens barrel and has an X-direction movable gap with the lens barrel so that the outer frame can move in the X direction; An inner frame is disposed within the outer frame and has a movable gap in the Y direction between the inner frame and the outer frame, so that the inner frame can move relative to the outer frame in the Y direction; A lens frame, disposed within the inner frame, is used to mount optical components; A first elastic element is connected between the outer frame and the lens barrel, and is capable of elastic deformation in the X direction to provide the outer frame with a restoring force in the X direction; A second elastic element, connected between the inner frame and the outer frame, and capable of elastic deformation in the Y direction, is used to provide a restoring force for the inner frame in the Y direction; and, The driving structure is capable of driving the outer frame and the inner frame to move respectively.

[0007] In one embodiment, at least two first elastic elements are provided, and at least two first elastic elements are provided on both sides of the outer frame along the Y direction.

[0008] In one embodiment, four first elastic elements are provided, and the four first elastic elements are distributed in a parallelogram shape.

[0009] In one embodiment, the first elastic element is disposed along the Y direction.

[0010] In one embodiment, at least two second elastic members are provided, with at least two second elastic members provided on both sides of the inner frame along the X direction.

[0011] In one embodiment, four second elastic elements are provided, and the four second elastic elements are distributed in a parallelogram shape.

[0012] In one embodiment, the second elastic element is disposed along the X direction.

[0013] In one embodiment, the driving structure includes a first driving member and a second driving member, the first driving member acting on the outer frame and driving the outer frame to move along the X direction, and the second driving member acting on the inner frame and driving the inner frame to move along the Y direction.

[0014] In one embodiment, the first elastic element includes a spring sheet; and / or, The second elastic element includes a spring sheet.

[0015] The present invention also proposes an optical device, including an optical element and an eccentricity adjustment device for the optical element.

[0016] The technical solution provided by this invention involves setting an inner frame fitted onto the lens frame and an outer frame fitted onto the inner frame. A first elastic element is set between the outer frame and the lens barrel, and a second elastic element is set between the inner frame and the outer frame. The elastic deformation of the first and second elastic elements is used to transmit motion and provide restoring force, eliminating the inherent mechanical backlash and motion hysteresis of rigid transmission. This achieves micron-level or even sub-micron-level eccentricity adjustment accuracy. Simultaneously, the first elastic element is set along the Y direction to restrict the movement of the outer frame in the Y direction, and the second elastic element is set along the X direction to enable the outer frame and the inner frame to move in conjunction in the X direction. This achieves basic decoupling of eccentricity adjustment in the X and Y directions. Adjustment in the X direction will not cause offset in the Y direction, and adjustment in the Y direction will not cause offset in the X direction. Repeated iterative adjustments are unnecessary, improving adjustment efficiency and reliability. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of an embodiment of an optical element eccentricity adjustment device provided by the present invention; Figure 2 for Figure 1 A top view of an optical element eccentricity adjustment device and the optical element after installation; Figure 3 for Figure 1 A partial cross-sectional view of an optical element eccentricity adjustment device is provided; Figure 4 for Figure 3 A magnified view of a portion of the image.

[0019] Explanation of icon numbers: 100. Optical element eccentricity adjustment device; 1. Lens tube; 2. Lens frame; 3. Inner frame; 4. Outer frame; 5. First elastic element; 6. Second elastic element; 7. First driving element; 8. Second driving element; 9. Optical element; 11. First gap; 12. Second gap.

[0020] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0022] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0023] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0024] An optical element eccentricity adjustment device is a precision assembly and adjustment device used to adjust the radial position of optical elements. It is widely used in the optical systems of high-end optoelectronic equipment such as semiconductor wafer defect inspection equipment and lithography machines. In precision optical systems such as large numerical aperture deep ultraviolet objectives, the objective is composed of multiple sets of optical elements, and the eccentricity error of each optical element significantly affects key performance indicators such as wavefront aberration, imaging resolution, and contrast. Existing rigid adjustment structures suffer from low adjustment resolution and poor repeatability due to mechanical gaps between the set screw and the lens frame, as well as inherent motion backlash in rigid transmission. Furthermore, adjustment in the X direction leads to displacement and angular deflection in the Y direction, resulting in a degree-of-freedom coupling problem.

[0025] To solve the above-mentioned technical problems, the present invention provides an optical element eccentricity adjustment device, which uses the elastic deformation of an elastic element to replace rigid transmission, so as to achieve high-precision and decoupled eccentricity adjustment in the X and Y directions.

[0026] Please see Figures 1 to 2The optical element eccentricity adjustment device 100 includes a lens barrel 1, a lens frame 2, an inner frame 3, an outer frame 4, a first elastic element 5, a second elastic element 6, and a driving structure. The axis of the lens barrel 1 is set along the Z-direction. The outer frame 4 is disposed inside the lens barrel 1 and has an X-direction clearance with the lens barrel 1, allowing the outer frame 4 to move along the X-direction. The inner frame 3 is disposed inside the outer frame 4 and has a Y-direction clearance with the outer frame 4, allowing the inner frame 3 to move relative to the outer frame 4 in the Y-direction. The lens frame 2 is disposed inside the inner frame 3 and is used to mount the optical element 9. The first elastic element 5 connects the outer frame 4 and the lens barrel 1 and can elastically deform in the X-direction to provide a restoring force for the outer frame 4 in the X-direction. The second elastic element 6 connects the inner frame 3 and the outer frame 4 and can elastically deform in the Y-direction to provide a restoring force for the inner frame 3 in the Y-direction. The driving structure can drive the outer frame 4 and the inner frame 3 to move respectively.

[0027] In this invention, by setting an inner frame 3 fitted onto the lens frame 2 and an outer frame 4 fitted onto the inner frame 3, and by setting a first elastic element 5 between the outer frame 4 and the lens barrel 1, and setting a second elastic element 6 between the inner frame 3 and the outer frame 4, the elastic deformation of the first elastic element 5 and the second elastic element 6 is used to transmit motion and provide restoring force, thereby eliminating the inherent mechanical backlash and motion backlash of rigid transmission, and achieving micron-level or even sub-micron-level eccentricity adjustment accuracy.

[0028] The lens barrel 1 serves as the base of the entire optical element eccentricity adjustment device 100, providing overall structural support, and its axis is set along the Z direction. Exemplarily, the lens barrel 1 is disc-shaped, with a circular flange structure on its outer contour. Flange mounting holes are provided on the outer periphery of the lens barrel 1 for fixing it to the main structure of the optical device. Exemplarily, the lens barrel 1 can also be square or polygonal; the present invention does not limit the specific shape of the lens barrel 1. The lens barrel 1 has a hollow cavity inside, which accommodates the outer frame 4, the inner frame 3, and the lens frame 2.

[0029] The lens frame 2 is movably disposed within the lens barrel 1 and is used to mount the optical element 9, meaning the lens frame 2 can move along the X and Y directions. Exemplarily, the lens frame 2 is annularly arranged, with its inner hole for mounting the optical element 9. The inner hole of the lens frame 2 has an annular support step, one end of which serves as a support reference surface for the optical element 9. The edge of the optical element 9 rests on the support reference surface, achieving surface-to-surface contact support. Exemplarily, a spacer is also provided in the inner hole of the lens frame 2, positioned between the support reference surface and the optical element 9. The optical element 9 makes surface-to-surface contact with the spacer. By correcting the flatness of the spacer, the mounting position and accuracy of the optical element 9 can be further precisely adjusted. Exemplarily, a pressure ring is also provided on the lens frame 2, pressing against the edge of the lens frame 2 or the edge of the optical element 9 to achieve axial clamping and fixing of the lens frame 2 and the optical element 9. The lens frame 2 is indirectly mounted within the lens barrel 1 via the inner frame 3 and can move with the inner frame 3 in the X and Y directions to change the radial position of the optical element 9, achieving eccentric adjustment.

[0030] The lens frame 2 is located within the inner frame 3, which drives the movement of the lens frame 2. Specifically, the inner frame 3 is ring-shaped, and the lens frame 2 is installed inside the inner frame 3. The lens frame 2 and the inner frame 3 can be rigidly fixed together by means of interference fit, bonding, threaded connection, etc., so that the lens frame 2 and the inner frame 3 form an integral moving unit. When the inner frame 3 moves in the X or Y direction, the lens frame 2 and the optical element 9 mounted on it move synchronously. The inner frame 3 has degrees of freedom of movement in the X and Y directions, that is, the inner frame 3 can perform translational movements in the X and Y directions respectively.

[0031] The outer frame 4 is fitted onto the inner frame 3 and has a degree of freedom of movement in the X direction. Specifically, the outer frame 4 is arranged in a ring shape, and the inner frame 3 is located inside the outer frame 4. There is a gap between the outer frame 4 and the inner frame 3 in the Y direction. That is, in the Y direction, the outer frame 4, the gap, and the inner frame 3 are arranged sequentially. In some embodiments, the gap is arranged around the circumference of the inner frame 3 to provide displacement space for the relative movement of the inner frame 3 relative to the outer frame 4 in the Y direction. Similarly, there is also a gap between the outer frame 4 and the lens barrel 1 in the X direction. That is, in the X direction, the outer frame 4, the gap, and the lens barrel 1 are arranged sequentially. In some embodiments, the gap is arranged around the circumference of the outer frame 4 to provide displacement space for the movement of the outer frame 4 relative to the lens barrel 1 in the X direction.

[0032] Furthermore, the movable gap between the outer frame 4 and the inner frame 3 includes a first gap 11, and the movable gap between the outer frame 4 and the lens barrel 1 includes a second gap 12. The first gap 11 and the second gap 12 are respectively located between the outer peripheral surface of the inner frame 3 and the inner peripheral surface of the outer frame 4, and between the outer peripheral surface of the outer frame 4 and the inner peripheral surface of the lens barrel 1. The widths of the first gap 11 and the second gap 12 are designed according to the maximum stroke required for eccentric adjustment, so that no rigid collision occurs between the inner frame 3 and the outer frame 4, or between the outer frame 4 and the lens barrel 1, during the adjustment process.

[0033] Please refer to the following: Figures 3 to 4 The first elastic element 5 is located between the outer frame 4 and the lens barrel 1, with one end connected to the outer frame 4 and the other end connected to the lens barrel 1. The first elastic element 5 is used to achieve an elastic connection between the outer frame 4 and the lens barrel 1, replacing the traditional rigid contact transmission. When the outer frame 4 is pushed by the driving structure and moves along the X direction, the first elastic element 5 undergoes elastic deformation. Due to the elastic deformation, an elastic restoring force is generated, which is used to generate a restoring force to drive the outer frame 4 along the X direction. At the same time, when the outer frame 4 moves along the X direction, the outer frame 4 drives the inner frame 3 to move synchronously along the X direction through the second elastic element 6, and then drives the lens frame 2 and the optical element 9 to move along the X direction through the inner frame 3, realizing the eccentric adjustment of the optical element 9 in the X direction.

[0034] Exemplarily, the first elastic element 5 includes a sheet, which is arranged in a thin sheet shape and has flexibility in the bending direction and stiffness in the axial direction. Exemplarily, the first elastic element 5 may also include a leaf spring or an elastic deformation beam. Exemplarily, the first elastic element 5 may also be an integrally formed elastic hinge structure, that is, the first elastic element 5 is integrally formed with the outer frame 4 and the lens barrel 1, and a thin-walled elastic deformation beam is formed by opening a through groove in the connection area between the outer frame 4 and the lens barrel 1, thereby constituting the first elastic element 5.

[0035] The first elastic element 5 transmits motion through elastic deformation. There is no mechanical gap between the rigid mating surfaces, nor is there any backlash in the direction of motion. This enables precise control of the displacement of the outer frame 4, thereby achieving high-precision eccentric adjustment of the optical element 9 in the X direction.

[0036] Furthermore, the first elastic element 5 is arranged along the Y direction, that is, the length direction of the first elastic element 5 extends along the Y direction. With this arrangement, the first elastic element 5 has a small bending stiffness in the X direction, allowing the outer frame 4 to undergo elastic displacement in the X direction; simultaneously, the first elastic element 5 has a large tensile / compressive stiffness in the Y direction, restricting the degree of freedom of the outer frame 4 in the Y direction. Therefore, when adjusting the Y direction, the inner frame 3 moves along the Y direction, and the second elastic element 6 is pulled by the inner frame 3, undergoing elastic deformation in the Y direction. Since one end of the second elastic element 6 is connected to the outer frame 4, the outer frame 4 has a tendency to move along the Y direction. However, because the first elastic element 5 is arranged along the Y direction and has a large stiffness in the Y direction, the movement of the outer frame 4 in the Y direction is restricted, thus ensuring that the outer frame 4 remains essentially stationary during Y-direction adjustment, achieving decoupling of adjustment in the X and Y directions.

[0037] In embodiments of the present invention, at least two first elastic elements 5 are provided, and at least two first elastic elements 5 are provided on both sides of the outer frame 4 along the Y direction. Specifically, at least one first elastic element 5 is provided on one side of the outer frame 4 along the Y direction, and at least one first elastic element 5 is provided on the other side of the outer frame 4 along the Y direction. The first elastic elements 5 on both sides are symmetrically distributed about the central axis of the inner frame 3 along the X direction. With this arrangement, when the outer frame 4 moves along the X direction under the push of the driving structure, the first elastic elements 5 on both sides undergo symmetrical elastic deformation. The resulting elastic restoring forces cancel each other out in the Y direction, and the resultant force in the X direction points towards the reset direction. This allows the outer frame 4 to perform a pure translational motion in the X direction, avoiding the generation of deflection torque during the adjustment process and ensuring the linearity and adjustment accuracy of the adjustment movement.

[0038] For example, the first elastic elements 5 are located directly above and below the outer frame 4 along the Y direction (with reference to the orientation shown in the attached figures), and the two first elastic elements 5 are symmetrical about the central axis of the outer frame 4. For example, the first elastic elements 5 can also be provided in three or more forms to further improve the stability of the movement of the outer frame 4.

[0039] Furthermore, in an embodiment of the present invention, four first elastic elements 5 are provided, and the four first elastic elements 5 are distributed in a parallelogram. Specifically, two first elastic elements 5 are provided on one side of the outer frame 4 along the Y direction, and two first elastic elements 5 are provided on the other side of the outer frame 4 along the Y direction. The two first elastic elements 5 on the same side are arranged at intervals along the X direction. The first elastic elements 5 on both sides are symmetrically arranged about the central axis of the inner frame 3 along the X direction, so that the four first elastic elements 5 are arranged in a parallelogram. By using four first elastic elements 5 distributed in a parallelogram to form a parallelogram elastic hinge structure, when adjusting in the X direction, the four first elastic elements 5 deform together to ensure that the outer frame 4 performs a strict translational movement without rotational deviation. The inherent kinematic constraints of the parallelogram structure make the movement trajectory of the outer frame 4 a linear translation, further improving the adjustment accuracy and linearity of the movement.

[0040] The second elastic element 6 is disposed between the inner frame 3 and the outer frame 4, with one end connected to the outer frame 4 and the other end connected to the inner frame 3. The second elastic element 6 is used to achieve an elastic connection between the inner frame 3 and the outer frame 4. When the inner frame 3 is pushed by the driving structure and moves in the Y direction, the second elastic element 6 undergoes elastic deformation. Due to the elastic deformation, an elastic restoring force is generated, which is used to generate a restoring force to drive the inner frame 3 in the Y direction. At the same time, the second elastic element 6 has a large stiffness in the X direction, so that when the outer frame 4 moves in the X direction, the outer frame 4 can push the inner frame 3 to move synchronously in the X direction through the second elastic element 6, thereby realizing linkage during adjustment in the X direction.

[0041] Exemplarily, the second elastic element 6 includes a sheet, which is arranged in a thin sheet shape. Exemplarily, the second elastic element 6 may also include a leaf spring or an elastic deformation beam. Exemplarily, the second elastic element 6 may also be an integrally formed elastic hinge structure, that is, the second elastic element 6 is integrally formed with the inner frame 3 and the outer frame 4, and a thin-walled elastic deformation beam is formed by opening a through groove in the connection area between the inner frame 3 and the outer frame 4, thereby constituting the second elastic element 6.

[0042] The second elastic element 6 transmits motion through elastic deformation. There is no mechanical gap between the rigid mating surfaces, nor is there any backlash in the direction of motion. This enables precise control of the displacement of the inner frame 3, thereby achieving high-precision eccentric adjustment of the optical element 9 in the Y direction.

[0043] Furthermore, the second elastic element 6 is arranged along the X direction, that is, the length direction of the second elastic element 6 extends along the X direction. With this arrangement, the second elastic element 6 has a small bending stiffness in the Y direction, allowing the inner frame 3 to undergo elastic displacement relative to the outer frame 4 in the Y direction; simultaneously, the second elastic element 6 has a large tensile / compressive stiffness in the X direction, so that when the outer frame 4 moves along the X direction, the second elastic element 6 can rigidly transmit the displacement in the X direction to the inner frame 3. In other words, the outer frame 4 pushes the inner frame 3 to move synchronously along the X direction through the second elastic element 6, ensuring that the inner frame 3 basically does not displace in the Y direction when adjusted in the X direction, thus achieving decoupling of adjustment in the X and Y directions. In other words, the second elastic element 6 is arranged along the X direction. On the one hand, when adjusting the X direction, the second elastic element 6 acts as a rigid force transmission component in the X direction, transmitting the X-direction displacement of the outer frame 4 to the inner frame 3, thus avoiding crosstalk displacement of the inner frame 3 in the Y direction. On the other hand, when adjusting the Y direction, the second elastic element 6 undergoes bending elastic deformation in the Y direction, allowing the inner frame 3 to move independently of the outer frame 4 in the Y direction, and the elastic restoring force of the second elastic element 6 is used to drive the inner frame 3 to reset in the Y direction.

[0044] In embodiments of the present invention, at least two second elastic elements 6 are provided, and the at least two second elastic elements 6 are provided on both sides of the inner frame 3 along the X direction and symmetrically arranged about the central axis of the inner frame 3 along the Y direction. Specifically, at least one second elastic element 6 is provided on one side of the inner frame 3 along the X direction, and at least one second elastic element 6 is provided on the other side of the inner frame 3 along the X direction. The second elastic elements 6 on both sides are symmetrically distributed about the central axis of the inner frame 3 along the Y direction. With this arrangement, when the inner frame 3 moves along the Y direction under the push of the driving structure, the second elastic elements 6 on both sides undergo symmetrical elastic deformation. The resulting elastic restoring forces cancel each other out in the X direction, and the resultant force in the Y direction points towards the reset direction, thereby making the inner frame 3 perform pure translational motion in the Y direction, avoiding the generation of deflection torque during the adjustment process, and ensuring the linearity and adjustment accuracy of the adjustment movement.

[0045] Exemplarily, the second elastic members 6 are disposed on the left and right sides of the inner frame 3 along the X direction (with reference to the orientation shown in the attached figure), and the two second elastic members 6 are symmetrical about the central axis of the inner frame 3. Exemplarily, the second elastic members 6 may also be provided in three or more forms to further improve the stability of the movement of the inner frame 3.

[0046] Furthermore, in an embodiment of the present invention, four second elastic elements 6 are provided, and the four second elastic elements 6 are distributed in a parallelogram. Specifically, two second elastic elements 6 are provided on one side of the inner frame 3 along the X direction, and two second elastic elements 6 are provided on the other side of the inner frame 3 along the X direction. The two second elastic elements 6 on the same side are spaced apart along the Y direction, and the second elastic elements 6 on both sides are symmetrically arranged about the central axis of the inner frame 3 along the Y direction, so that the four second elastic elements 6 are arranged in a parallelogram. By using four second elastic elements 6 distributed in a parallelogram to form a parallelogram elastic hinge structure, when adjusting in the Y direction, the four second elastic elements 6 deform together, ensuring that the inner frame 3 performs a strict translational movement relative to the outer frame 4 without generating rotational deviation. The inherent kinematic constraints of the parallelogram structure make the movement trajectory of the inner frame 3 a linear translation, further improving the adjustment accuracy and linearity of the movement.

[0047] In this embodiment, the driving structure includes a first driving member 7 and a second driving member 8. The first driving member 7 abuts against the outer frame 4 and is used to drive the outer frame 4 to move in the X direction. Exemplarily, the first driving member 7 includes a drive motor and a push rod. The output shaft of the drive motor is connected to or abuts against the push rod. The push rod abuts against the outer frame 4. The drive motor drives the push rod to extend and retract in the X direction, thereby pushing the outer frame 4 to move in the X direction.

[0048] The second driving member 8 abuts against the inner frame 3 and is used to drive the inner frame 3 to move along the Y direction. For example, the second driving member 8 includes a drive motor and a push rod. The output shaft of the drive motor is connected to or abuts against the push rod. The push rod abuts against the inner frame 3. The drive motor drives the push rod to extend and retract along the Y direction, thereby pushing the inner frame 3 to move along the Y direction.

[0049] Please see Figure 3 and Figure 4 The working process of the optical element eccentricity adjustment device 100 when adjusting in the X direction is described in detail below.

[0050] When it is necessary to adjust the optical element 9 eccentrically in the X direction, the first drive member 7 is activated. The first drive member 7 generates a pushing force in the X direction and acts on the outer frame 4, driving the outer frame 4 to move in the X direction. During the movement of the outer frame 4 in the X direction, the first elastic member 5 between the outer frame 4 and the lens barrel 1 undergoes elastic deformation. Since the first elastic member 5 is set along the Y direction, it is bent in the X direction, generating an elastic restoring force. The direction of this elastic restoring force is opposite to the movement direction of the outer frame 4, which is used to drive the outer frame 4 to reset in the X direction after the first drive member 7 removes the driving force.

[0051] Meanwhile, since the second elastic element 6 is arranged along the X direction, it has a large tensile / compressive stiffness in the X direction. The X-direction displacement of the outer frame 4 is rigidly transmitted to the inner frame 3 through the second elastic element 6, causing the inner frame 3 to move synchronously with the outer frame 4 along the X direction. The X-direction displacement of the inner frame 3 is then transmitted to the lens frame 2 and the optical element 9 mounted thereon, thereby realizing the adjustment of the eccentric position of the optical element 9 in the X direction.

[0052] During this process, since the first elastic element 5 is set along the Y direction and has a large stiffness in the Y direction, the outer frame 4 will not be displaced in the Y direction. That is, the adjustment in the X direction will not cause the offset in the Y direction, thus achieving the decoupling of the X direction adjustment and the Y direction adjustment.

[0053] Please see Figure 3 and Figure 4 The working process of the optical element eccentricity adjustment device 100 when adjusting in the Y direction is described in detail below.

[0054] When it is necessary to adjust the optical element 9 eccentrically in the Y direction, the second drive member 8 is activated. The second drive member 8 generates a pushing force in the Y direction and acts on the inner frame 3, driving the inner frame 3 to move in the Y direction. During the movement of the inner frame 3 in the Y direction, the second elastic member 6 between the inner frame 3 and the outer frame 4 undergoes elastic deformation. Since the second elastic member 6 is set along the X direction, it is bent in the Y direction, generating an elastic restoring force. The direction of this elastic restoring force is opposite to the movement direction of the inner frame 3, which is used to drive the inner frame 3 to reset in the Y direction after the second drive member 8 removes the driving force.

[0055] During this process, since one end of the second elastic element 6 is connected to the outer frame 4, when the inner frame 3 moves along the Y direction, the second elastic element 6 generates a tensile force along the Y direction on the outer frame 4, causing the outer frame 4 to tend to move along the Y direction. However, since the first elastic element 5 is set along the Y direction and has a large tensile / compressive stiffness in the Y direction, the first elastic element 5 plays a role in constraining the degree of freedom of the outer frame 4 in the Y direction, effectively limiting the movement of the outer frame 4 in the Y direction. Therefore, during Y-direction adjustment, the outer frame 4 remains basically stationary in the Y direction, and only the inner frame 3 undergoes elastic displacement relative to the outer frame 4 in the Y direction, thus achieving decoupling between Y-direction adjustment and X-direction adjustment.

[0056] The Y-direction displacement of the inner frame 3 is transmitted to the lens frame 2 and the optical element 9 mounted thereon, thereby realizing the eccentric position adjustment of the optical element 9 in the Y direction.

[0057] Furthermore, it should be noted that in the embodiments of the present invention, the first elastic member 5 and the second elastic member 6 are preferably integrally formed with the lens barrel 1, the outer frame 4, and the inner frame 3. That is, through grooves are formed on the integral lens barrel blank using precision machining methods such as wire cutting, electrical discharge machining, or laser cutting to form an integral elastic support structure of the lens barrel 1, the outer frame 4, the inner frame 3, the first elastic member 5, and the second elastic member 6. With this configuration, the components of the entire elastic support structure are connected by thin-walled elastic beams of the material itself, with no assembly gaps. The accuracy is entirely determined by the machining accuracy, achieving the highest adjustment resolution and repeatability accuracy. At the same time, the rigidity and stability of the integral structure are superior to the split assembly structure, which is suitable for the stability requirements of high-speed scanning conditions in wafer inspection equipment.

[0058] Of course, the first elastic element 5 and the second elastic element 6 can also be independent spring sheets or leaf springs, which are fixedly connected to the corresponding frame by screws or adhesives, etc. The present invention does not limit this.

[0059] The present invention also provides an optical device, which includes an optical element 9 and an optical element eccentricity adjustment device 100 of the above embodiments. The specific structure of the optical element eccentricity adjustment device 100 is as described in the above embodiments. Since the present optical device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, and will not be described in detail here.

[0060] Optical equipment can be semiconductor wafer defect detection equipment, lithography machines, or other optical equipment requiring precise eccentricity adjustment of optical elements. Any optical equipment with an optical element eccentricity adjustment device 100 falls under the category of optical equipment described in this invention. For example, the optical equipment is a bright-field wafer defect detection equipment, and the optical element eccentricity adjustment device 100 is applied to the large numerical aperture deep ultraviolet objective lens system of this equipment for two-dimensional eccentricity adjustment of optical elements within the objective lens. For example, the optical equipment can also be a dark-field detection equipment or other optical detection equipment. For example, the optical equipment can also be an optical system within a laser processing device.

[0061] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. An optical element eccentricity adjustment device, characterized in that, include: The lens barrel, the axis of which is set along the Z direction; An outer frame is disposed inside the lens barrel and has an X-direction movable gap with the lens barrel so that the outer frame can move in the X direction; An inner frame is disposed within the outer frame and has a movable gap in the Y direction between the inner frame and the outer frame, so that the inner frame can move relative to the outer frame in the Y direction; A lens frame, disposed within the inner frame, is used to mount optical components; A first elastic element is connected between the outer frame and the lens barrel, and is capable of elastic deformation in the X direction to provide the outer frame with a restoring force in the X direction; The second elastic element is connected between the inner frame and the outer frame and is capable of elastic deformation in the Y direction to provide the inner frame with a restoring force in the Y direction; as well as, The driving structure is capable of driving the outer frame and the inner frame to move respectively.

2. The optical element eccentricity adjustment device as described in claim 1, characterized in that, At least two first elastic elements are provided, and at least two first elastic elements are provided on both sides of the outer frame along the Y direction.

3. The optical element eccentricity adjustment device as described in claim 2, characterized in that, There are four first elastic elements, which are distributed in a parallelogram shape.

4. The optical element eccentricity adjustment device as described in any one of claims 1 to 3, characterized in that, The first elastic element is arranged along the Y direction.

5. The optical element eccentricity adjustment device as described in claim 1, characterized in that, At least two second elastic elements are provided, and at least two second elastic elements are provided on both sides of the inner frame along the X direction.

6. The optical element eccentricity adjustment device as described in claim 5, characterized in that, There are four second elastic elements, which are arranged in a parallelogram shape.

7. The optical element eccentricity adjustment device as described in claim 5 or 6, characterized in that, The second elastic element is arranged along the X direction.

8. The optical element eccentricity adjustment device as described in claim 1, characterized in that, The driving structure includes a first driving member and a second driving member. The first driving member acts on the outer frame and drives the outer frame to move along the X direction, and the second driving member acts on the inner frame and drives the inner frame to move along the Y direction.

9. The optical element eccentricity adjustment device as described in claim 1, characterized in that, The first elastic element includes a spring sheet; and / or, The second elastic element includes a spring sheet.

10. An optical device, characterized in that, It includes optical elements and an optical element eccentricity adjustment device according to any one of claims 1 to 9.

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