Isotope reaction type gas concentration control method and system

Abstract

The application provides an isotope reaction type gas concentration control method and system. The method comprises the following steps: performing boundary adaptation on a target concentration trajectory value according to a device boundary to obtain an adapted concentration trajectory value of a current period; calculating an equivalent generation demand of the current period according to the adapted concentration trajectory values of the current period, a previous period and a next period; converting the equivalent generation demand into a main liquid feeding action amount and an exhaust demand amount according to an effective generation coefficient; subtracting the main liquid feeding action amount from the exhaust demand amount to obtain a directional period demand of the current control period; calculating an execution baseline core amount of the current control period according to an execution baseline core amount of the previous control period, the directional period demand of the current control period and a directional period demand of the next control period; and controlling the isotope reaction type gas concentration according to the execution baseline core amount of the current control period, a liquid one-way proportion and a liquid two-way proportion, thereby improving the accuracy of the isotope reaction type gas concentration control.

Description

Technical Field

[0001] This invention belongs to the field of gas concentration control, and particularly relates to an isotope reaction type gas concentration control method and system. Background Technology

[0002] In applications such as plant labeling, biochemical tracing, gas exchange experiments, environmental simulation culture, and other applications requiring stable isotope exposure in closed or semi-closed spaces, it is typically necessary to ensure that the isotope gas enters the experimental space according to a predetermined concentration trajectory to guarantee consistency in labeling intensity, exposure duration, and cumulative dose. Existing devices, in scenarios with standard bottled gas sources, often employ preset flow rates, proportional gas mixing, timed valve start / stop, or adjustments based on single-point concentration errors to achieve concentration control. However, when the target gas is not directly provided by a stable gas source but rather reacts and is gradually released from liquid feedstock within the device, the controlled object transforms into a dynamic process simultaneously influenced by factors such as reaction initiation conditions, liquid addition, release hysteresis, continuous generation, chamber diffusion, gas exchange and dilution, and actuator response. In this case, the target concentration trajectory preset by the experimenter often cannot directly correspond to specific reaction inputs and actions. Common solutions often separate the concentration target from the actual reaction process, lacking a mechanism to generate an implementable reaction plan based on the target trajectory and device boundaries before the task begins. This results in some target trajectories being set on the interface but difficult to form in the actual device. Therefore, improving the accuracy of isotope reactive gas concentration control has become an urgent technical problem to be solved. Summary of the Invention

[0003] The purpose of this invention is to provide a method and system for controlling the concentration of isotope reactive gases, which can improve the accuracy of isotope reactive gas concentration control.

[0004] To achieve the above objectives, a method for controlling the concentration of isotope reactive gases is provided in a first aspect of the present invention, the method comprising: The original concentration trajectory sequence and corresponding time points are obtained and linear interpolation is performed to obtain the target concentration trajectory value of the current control period. According to the preset device boundary, the target concentration trajectory value of the current control period is subjected to boundary adaptation processing to obtain the adapted concentration trajectory value of the current control period. Obtain the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle, and calculate the equivalent generation requirement of the current control cycle based on the adaptive concentration trajectory value of the current control cycle, the adaptive concentration trajectory value of the previous control cycle, and the adaptive concentration trajectory value of the next control cycle. The equivalent generation demand is converted into the main liquid injection action amount and the exhaust demand amount according to the preset effective generation coefficient. The main liquid injection action amount is subtracted from the exhaust demand amount to obtain the directional cycle demand of the current control cycle. Obtain the execution baseline core quantity of the previous control cycle and the directional cycle requirement of the next control cycle, and calculate the execution baseline core quantity of the current control cycle based on the execution baseline core quantity of the previous control cycle, the directional cycle requirement of the current control cycle, and the directional cycle requirement of the next control cycle. The concentration of isotope reactive gas is controlled based on the execution baseline core quantity of the current control cycle, the preset liquid path ratio, and the preset liquid path ratio.

[0005] Furthermore, the device boundary includes the allowable trajectory range and the maximum trajectory change. The step of performing boundary adaptation processing on the target concentration trajectory value for the current control period based on the preset device boundary to obtain the adapted concentration trajectory value for the current control period includes: Obtain the adaptive concentration trajectory value from the previous control cycle; Subtract the target concentration trajectory value of the current control cycle from the adapted concentration trajectory value of the previous control cycle to obtain the first data; wherein, if the absolute value of the first data is greater than the maximum trajectory change and the first data is a positive number, then the maximum trajectory change is defined as the second data; if the absolute value of the first data is greater than the maximum trajectory change and the first data is a negative number, then the opposite of the maximum trajectory change is defined as the second data; if the absolute value of the first data is less than or equal to the maximum trajectory change, then the first data is defined as the second data. The adaptive concentration trajectory value of the previous control cycle is added to the second data, and the result is limited to the allowable range of the trajectory to obtain the adaptive concentration trajectory value of the current control cycle.

[0006] Furthermore, the device boundary also includes a background concentration. The calculation of the equivalent generation requirement for the current control cycle based on the adapted concentration trajectory value of the current control cycle, the adapted concentration trajectory value of the previous control cycle, and the adapted concentration trajectory value of the next control cycle includes: The third data is obtained by subtracting the adaptive concentration trajectory value of the current control cycle from the adaptive concentration trajectory value of the previous control cycle. Subtract the adaptive concentration trajectory value of the current control cycle from the background concentration, and then multiply by the preset maintenance coefficient to obtain the fourth data. Subtract the adaptive concentration trajectory value of the next control cycle from the adaptive concentration trajectory value of the current control cycle to obtain the fifth data. Select the largest value between zero and the fifth data and multiply it by a preset pre-coefficient to obtain the sixth data. The third, fourth, and sixth data are added together to obtain the equivalent generation requirement.

[0007] Furthermore, the device boundary also includes an allowable action range and an allowable exhaust volume range. The step of converting the equivalent generation demand into the main liquid addition action volume and exhaust volume based on a preset effective generation coefficient includes: If the equivalent generation demand is greater than or equal to zero, divide the equivalent generation demand by the effective generation coefficient, and limit the result to the allowable action range to obtain the main liquid addition action amount, and the exhaust demand is zero; If the equivalent generation demand is less than zero, the negative of the equivalent generation demand is divided by the effective generation coefficient, and the result is limited to the allowable exhaust volume to obtain the exhaust demand, and the main liquid injection action amount is zero.

[0008] Furthermore, the device boundary also includes the device's permissible operating range. The calculation of the execution baseline core quantity for the current control cycle based on the execution baseline core quantity of the previous control cycle, the directional cycle requirement of the current control cycle, and the directional cycle requirement of the next control cycle includes: Multiply the execution baseline core quantity of the previous control cycle by the preset continuous expansion coefficient to obtain the seventh data; Subtract the preset number from the continuous expansion coefficient, and then multiply it by the directional cycle requirement of the current control cycle to obtain the eighth data. Subtract the directional cycle requirement of the next control cycle from the directional cycle requirement of the current control cycle, and then multiply by the preset forward correction coefficient to obtain the ninth data. The seventh, eighth, and ninth data are added together, and the result is limited to the range of actions allowed by the device to obtain the core execution baseline of the current control cycle.

[0009] Furthermore, the control of the isotope reactive gas concentration based on the execution baseline core quantity of the current control cycle, the preset liquid path ratio, and the preset liquid path ratio includes: The execution baseline of the liquid channel is obtained by multiplying the largest value between the core quantity of the execution baseline of the current control cycle and zero by the proportion of the liquid channel. The execution baseline of the liquid two-way path is obtained by multiplying the largest value between the core quantity of the execution baseline of the current control cycle and zero. The largest value between the negative of the core quantity of the execution baseline of the current control cycle and zero is selected as the execution baseline of the exhaust channel; The concentration of isotope reactive gas is controlled based on the execution baseline of the liquid path one, the execution baseline of the liquid path two, and the execution baseline of the exhaust channel.

[0010] Furthermore, after controlling the concentration of isotope reactive gas based on the execution baseline core quantity of the current control cycle, the preset liquid path ratio, and the preset liquid path ratio, the method further includes: Obtain the concentration sampling value for the current control cycle; Subtract the current concentration trajectory value from the concentration sampling value and then multiply by a preset proportional correction coefficient to obtain the execution compensation amount for the current cycle. The concentration of isotope reactive gas is controlled based on the compensation amount, the proportion of liquid channel one, and the proportion of liquid channel two.

[0011] A second aspect of the present invention provides an isotope reactive gas concentration control system, the system comprising: The acquisition unit is used to acquire the original concentration trajectory sequence and the corresponding time point, and perform linear interpolation to obtain the target concentration trajectory value of the current control period. The target concentration trajectory value is then subjected to boundary adaptation processing according to the preset device boundary to obtain the adapted concentration trajectory value of the current control period. The first calculation unit is used to obtain the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle, and calculate the equivalent generation requirement of the current control cycle based on the adaptive concentration trajectory value of the current control cycle, the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle. The conversion unit is used to convert the equivalent generation demand into the main liquid addition action amount and the exhaust demand amount according to the preset effective generation coefficient, and to subtract the main liquid addition action amount from the exhaust demand amount to obtain the directional cycle demand of the current control cycle. The second calculation unit is used to obtain the execution baseline core quantity of the previous control cycle and the directional cycle requirement of the next control cycle, and calculate the execution baseline core quantity of the current control cycle based on the execution baseline core quantity of the previous control cycle, the directional cycle requirement of the current control cycle, and the directional cycle requirement of the next control cycle. The control unit is used to control the concentration of isotope reactive gas according to the execution baseline core quantity of the current control cycle, the preset liquid one-way ratio, and the preset liquid two-way ratio.

[0012] In a third aspect of the invention, an electronic device is provided, the electronic device including a memory and a processor, the memory storing a computer program, the processor executing the computer program to implement the method described in the first aspect above.

[0013] In a fourth aspect of the invention, a computer-readable storage medium is provided, the computer-readable storage medium storing a computer program that, when executed by a processor, implements the method described in the first aspect.

[0014] The beneficial technical effects of the present invention are at least as follows: To address the aforementioned problems, this invention provides a method and system for controlling the concentration of isotope reactive gases. It establishes a continuous technical chain from the target concentration trajectory to the reaction scheme, then to the execution baseline, and finally to the device implementation. This transforms the target concentration trajectory from a setpoint into an executable and achievable actual marking process. The core concept involves first establishing a suitable trajectory constraint based on the target concentration trajectory and the device boundary. Then, based on this constraint, a cycle-by-cycle reaction scheme is generated, converting the abstract concentration change requirements into specific reaction generation and settling requirements. Subsequently, the reaction scheme is further expanded into an execution baseline oriented towards the liquid inlet and exhaust channels. This allows discrete reaction actions to form a continuous, smooth, and device-level action sequence that conforms to the laws of reaction initiation and gas diffusion. Finally, the execution baseline drives the actual device to complete the isotope gas release, diffusion establishment, and concentration adjustment, thereby achieving unification between the target concentration trajectory and the actual marking process and improving the accuracy of isotope reactive gas concentration control. This technical concept means that, compared with existing solutions, this invention is no longer simply about a certain control algorithm or a certain concentration correction step. Instead, it organizes trajectory setting, reaction generation and execution as a continuous whole. This can more effectively solve the problems of isotope reactive gas sources being difficult to directly control, difficult to execute smoothly and difficult to stably follow the target trajectory under dynamic release conditions. It also makes the entire system more in line with the operating logic of real devices in engineering implementation. Attached Figure Description

[0015] The present invention will be further described with reference to the accompanying drawings, but the embodiments in the drawings do not constitute any limitation on the present invention. For those skilled in the art, other drawings can be obtained based on the following drawings without creative effort.

[0016] Figure 1 This is a flowchart of an isotope reactive gas concentration control method provided in an embodiment of this application.

[0017] Figure 2 This is a schematic diagram of an isotope reaction type gas concentration control system provided in an embodiment of this application. Detailed Implementation

[0018] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0019] Please refer to Figure 1 , Figure 1 This is a flowchart of an isotope reactive gas concentration control method provided in an embodiment of this application. Figure 1 The method may include, but is not limited to, steps S101 to S105.

[0020] Step S101: Obtain the original concentration trajectory sequence and the corresponding time point, and perform linear interpolation to obtain the target concentration trajectory value of the current control period. Perform boundary adaptation processing on the target concentration trajectory value of the current control period according to the preset device boundary to obtain the adapted concentration trajectory value of the current control period. Step S102: Obtain the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle, and calculate the equivalent generation requirement of the current control cycle based on the adaptive concentration trajectory value of the current control cycle, the adaptive concentration trajectory value of the previous control cycle, and the adaptive concentration trajectory value of the next control cycle. Step S103: Based on the preset effective generation coefficient, the equivalent generation demand is converted into the main liquid injection action quantity and the exhaust demand quantity. The main liquid injection action quantity is subtracted from the exhaust demand quantity to obtain the directional cycle demand of the current control cycle. Step S104: Obtain the execution baseline core quantity of the previous control cycle and the directional cycle requirement of the next control cycle; calculate the execution baseline core quantity of the current control cycle based on the execution baseline core quantity of the previous control cycle, the directional cycle requirement of the current control cycle, and the directional cycle requirement of the next control cycle. Step S105: Control the concentration of isotope reactive gas according to the execution baseline core quantity of the current control cycle, the preset liquid one-way ratio, and the preset liquid two-way ratio.

[0021] In step S101 of some embodiments, the experimenter typically inputs several key moments and their corresponding trajectory values, such as the starting point, the rising endpoint, the maintenance endpoint, and the falling endpoint, rather than inputting a complete sequence for each control cycle. The controller reads this set of key points through an industrial communication interface and writes it into memory, forming the original concentration trajectory sequence. and corresponding time points .in, Indicates the first The trajectory values ​​of each key point are cached in the host computer interface. The time position of this key point is derived from the task configuration table; Indicates the internal controller number Each control moment is generated by the periodic clock of the PLC or host controller. To ensure the target concentration trajectory can be recalled moment-by-moment in subsequent processes, linear interpolation from analytical geometry is used. The target change between two adjacent key points is unfolded into a continuous straight line, and any control moment is mapped to its corresponding position on this line to obtain the target concentration trajectory value for the current control cycle. The corresponding calculation is as follows: ; in, Indicates the first The target concentration trajectory value corresponding to each control cycle; This represents the original concentration trajectory value at the starting point of the current interpolation interval; This represents the original concentration trajectory value at the end of the current interpolation interval; Indicates the starting time of the current interpolation interval; Indicates the end time of the current interpolation interval; This indicates the time corresponding to the current cycle of the controller; It indicates the relative position between two key points at the current moment.

[0022] In one example, if the input key points are (0, 400), (30, 800), (60, 800), and (90, 500), and the control cycle is 5, then when the controller runs to the 3rd cycle, there will be... The time point is between 0 and 30, therefore take... After substituting, we get ;when At that time, the target concentration trajectory value remained at 800; when When, substituting into the formula, we can obtain After this processing, the manually set sparse keypoints are expanded into a continuously readable target concentration trajectory sequence for each control cycle.

[0023] After the target concentration trajectory is deployed, the controller synchronously organizes the current device boundary. The device boundary retains only device information directly related to isotope gas generation and operational actions. Device boundary Including the initial reaction state and execution capability Initial reaction state In this process, the reaction chamber temperature is collected by thermocouples on the chamber wall, and the sampled signal is sent to the PLC analog register through the acquisition module; the reaction chamber pressure is collected by a top pressure sensor, converted by an A / D converter, and written to the controller buffer; the background concentration is output by an infrared concentration sensor inside the chamber, and the current sampled value is read in via a serial port or bus interface. To improve the stability of the initial state (initial reaction state), the controller continuously reads the sampled values ​​within several control cycles, takes the arithmetic average, and then latches the average result as the initial state of this round of experiment. Execution capability In this system, the liquid addition capacity is calculated by accumulating the opening time of the liquid addition solenoid valve and converting it to the liquid addition volume corresponding to the unit opening time in the equipment calibration table; the upper limit and minimum adjustment step of the air inlet valve, air outlet valve, and air extraction device are directly derived from the PLC parameter area or driver configuration register. and Organize into device boundaries As a unified input when generating reaction schemes, it enables the target concentration trajectory and device capabilities to correspond in the same data structure.

[0024] In obtaining and Subsequently, the controller continues to perform boundary adaptation on the target concentration trajectory value to ensure that the trajectory concentration change is consistent with the current operational capability of the device. This employs the rate limiting and amplitude clamping approach from discrete control: first, the allowable trajectory range is determined based on the device boundaries, including the lower bound of the allowable trajectory range. Upper bound of the allowed trajectory range Then, based on the execution capability, the maximum allowable trajectory change in a single control cycle is calculated. The target concentration trajectory is then corrected periodically to form an adaptive concentration trajectory. The calculation method is as follows: Obtain the adapted concentration trajectory value from the previous control cycle; subtract the target concentration trajectory value of the current control cycle from the adapted concentration trajectory value of the previous control cycle to obtain the first data; if the absolute value of the first data is greater than the maximum trajectory change and the first data is positive, then the maximum trajectory change is defined as the second data; if the absolute value of the first data is greater than the maximum trajectory change and the first data is negative, then the opposite of the maximum trajectory change is defined as the second data; if the absolute value of the first data is less than or equal to the maximum trajectory change, then the first data is defined as the second data; add the adapted concentration trajectory value from the previous control cycle to the second data, and limit the result to within the allowed trajectory range to obtain the adapted concentration trajectory value for the current control cycle. See the formula below: ; in, Indicates the first The adaptive concentration trajectory value corresponding to each control cycle; This indicates the adaptive concentration trajectory value that has been confirmed in the previous control cycle; Indicates the first The target concentration trajectory value for each control cycle; This indicates the maximum allowable trajectory change of the device within a single control cycle, determined by the actuator's capability. The conversion is obtained; Indicates the lower bound of the allowed trajectory range; This indicates the upper bound of the allowed trajectory range; Indicates when the change The absolute value exceeds At that time, cut it off to Specifically, It is positive, and The absolute value exceeds Then the value is , It is negative, and The absolute value exceeds Then the value is , The absolute value is less than or equal to Then the value is ; This means limiting the results to the allowed range of the trajectory. Inside.

[0025] In one example, if the adaptive concentration trajectory value of the previous control cycle The target concentration trajectory value for the current control period Calculate based on the current valve operating capacity and liquid filling capacity. At the same time, the upper limit of the allowable trajectory range is determined by the device boundary. If the value is 700, first calculate the change: 760 - 620 = 140, then... The result is 50, which is added to the value from the previous step to get 670. Finally, after... The value remains at 670; if the target concentration trajectory value rises to 790 in the next cycle, the change is first obtained as 790-670=120. Still 50, add them together to get 720, then... The posterior limit is set to 700. This is how it is obtained. It always remains within the range of changes that the current device can actually withstand.

[0026] In step S102 of some embodiments, the adaptive concentration trajectory value obtained in the above steps and device boundary These are used simultaneously in this step. The controller first reads sequentially. , and then from Read the background concentration that has been latched in this round of experiments. The effective generation coefficient and single-cycle action limit under the current formulation, where the current formulation is a formulation for generating isotopic gas from the reaction of liquid materials. The object of treatment here is no longer the "target value itself," but rather "how much additional gas generation the reaction system needs to provide to advance the current cycle to the target value." This transformation stems from the discrete mass conservation relation. For a closed or semi-closed chamber, the change in the target trajectory between two adjacent control cycles necessarily corresponds to a net generation demand. When the trajectory is in a plateau segment, although the difference between adjacent points is close to zero, there is still continuous exchange and maintenance consumption within the chamber, thus requiring a maintenance term. When the trajectory is about to enter the rising segment, the liquid reaction exhibits an initial hysteresis, and the controller needs to advance a portion of the rising demand for the next cycle to the current cycle so that the subsequent concentration formation process remains synchronized with the target trajectory. Based on this physical process, the controller combines the classical discrete difference term, the maintenance term under mass conservation, and the advance term from discrete prediction to obtain the equivalent generation demand for each cycle. Specifically, the adaptive concentration trajectory value of the current control cycle is subtracted from the adaptive concentration trajectory value of the previous control cycle to obtain the third data; the adaptive concentration trajectory value of the current control cycle is subtracted from the background concentration, and then multiplied by a preset maintenance coefficient to obtain the fourth data; the adaptive concentration trajectory value of the next control cycle is subtracted from the adaptive concentration trajectory value of the current control cycle to obtain the fifth data; the larger value between zero and the fifth data is selected and multiplied by a preset pre-coefficient to obtain the sixth data; the third, fourth, and sixth data are added together to obtain the equivalent generation requirement. As shown in the following formula: ; in, Indicates the first Each control cycle requires an equivalent generation demand provided by the liquid reaction; This represents the adaptive concentration trajectory value for the current control cycle. This represents the adaptive concentration trajectory value from the previous control cycle. Indicates the adaptive concentration trajectory value for the next control cycle; when During the last control cycle, the controller takes This causes the preceding term to naturally converge to zero in the last period; Indicates background concentration; To maintain the coefficient, it is measured in multiple stable maintenance experiments during the equipment commissioning phase and then written into the current formula parameter table. The controller reads it according to the formula number in this step. The pre-conversion coefficient is obtained from the reaction initiation hysteresis test and written into the parameter area; This indicates that pre-compensation is activated only when the adaptive concentration trajectory value in the next control cycle is higher than that in the current cycle. The first term of the formula gives the net increment required for trajectory advancement, the second term gives the maintenance requirement of the current concentration level relative to the background concentration, and the third term gives the pre-set requirement for the rising phase of the next cycle. The sum of the three terms still represents the same quantity, namely, the equivalent generation requirement cycle by cycle.

[0027] In one example, if the adaptive concentration trajectory values ​​for three consecutive control cycles are 620, 680, and 740, respectively, and the background concentration is 420, the current formulation parameter table records... , Then the intermediate period has This result indicates that the current cycle's response plan needs to cover three parts: trajectory ascent, plateau maintenance, and initial pre-launch phases, rather than just the 60-degree adjacent difference on the surface.

[0028] In step S103 of some embodiments, the following is obtained: Subsequently, the controller continues to convert this demand into liquid reaction action quantities. The underlying relationship here comes from the proportional mapping in equipment calibration: under fixed formula and initial conditions, a unit liquid action quantity corresponds to a stable nominal gas generation quantity. During equipment commissioning, release results are recorded under multiple action quantities to form a calibration table for the current formula; in this step, the controller... The initial state interval recorded in the calibration table is used to read the effective generation coefficients corresponding to this round of experiments. The device boundaries also include the allowable range of action quantity and the allowable range of exhaust volume. If the equivalent generation demand is greater than or equal to zero, the equivalent generation demand is divided by the effective generation coefficient, and the result is limited to the allowable range of action quantity to obtain the main liquid addition action quantity, with the exhaust demand being zero. If the equivalent generation demand is less than zero, the equivalent generation demand is divided by the effective generation coefficient, and the result is limited to the allowable exhaust volume to obtain the exhaust demand, with the main liquid addition action quantity being zero. The main liquid addition action quantity is calculated using the following formula: ; in, Indicates the first The main liquid addition action volume for each control cycle; This indicates the equivalent generation requirement; This represents the effective production coefficient under the current initial reaction state and the current formulation; it is the basis for the controller. The initial reaction state is a parameter directly read from the calibration table; the allowable range of motion [ ], This indicates the maximum permissible action amount per cycle for the current device, derived from... The execution capability parameters in the data; This indicates that the main liquid injection action amount is limited to 0 and the maximum action amount per single cycle. The formula originates from the inverse operation of proportional mapping, that is, "how much output is generated per unit action" is conversely equivalent to "how much action is needed to generate a certain demand." This is then superimposed with commonly used engineering limiting processing, allowing the main liquid addition action amount to be directly written into the reaction scheme. The exhaust demand is calculated using the following formula: ; in, Indicates the first Exhaust demand per control cycle, allowable exhaust volume range [ ], This indicates the maximum exhaust volume in a single cycle.

[0029] Continuing the calculation based on the aforementioned values, if the calibration table reads the value in the current initial state range... And the maximum single-cycle action of the current device If the value is 45, then substituting it gives... The controller then reads the pre-written two-component ratio in the current formula and records it as... and ,satisfy .when At that time, the controller retains the formula obtained from the previous equation. Simultaneously write ;when At that time, the controller sets the main liquid addition action amount for the current cycle to [value]. Then, adjust the calibration coefficient according to the same setting as the liquid addition action. The result is calculated in reverse to the exhaust demand, and the limited result is recorded as follows: For example, when , When the maximum allowable exhaust volume per single cycle is 25, the controller calculates the exhaust demand as follows: Therefore, this cycle is written. , If the current cycle is a positive dosing cycle and the formula ratio is 3:2, then the controller writes... , This is for direct use in the next step.

[0030] After repeating the above calculations along the entire trajectory sequence, the controller obtains the complete reaction scheme. This reaction scheme is stored as an array of structures arranged according to control cycles, with each array cell explicitly containing the main liquid addition action amount for that cycle. Exhaust demand Two-component ratio and . This determines the amount of trajectory advance, maintenance, and lead-in required for each cycle. This determines the background concentration, calibration table read position, effective generation coefficient, and upper limit of motion. This is how it is generated. This is a reaction-driven sequence tailored to the scenario described in this solution: the rising segment of the concentration trajectory is written as a positive liquid addition action, the plateau segment as a maintenance action, and the falling segment as a venting demand. The initial hysteresis of the liquid reaction is pre-programmed into the previous cycle of the trajectory via a pre-term. The next step directly reads... Generate device-level execution baseline.

[0031] Furthermore, This represents the amount of positive reaction action in the current cycle. This indicates a decline in exhaust demand during the current cycle. and It is the ratio of the two liquids written in the current cycle and the amount of this action, and it satisfies... The controller first organizes these four fields into a unified directional periodic requirement. Specifically written as When the current cycle requires increasing or maintaining the concentration through liquid reaction, Take the positive value; when the concentration needs to be reduced by venting or pumping air in the current cycle. Take the negative value. After this processing, the liquid addition action and the venting action are converged into a unified execution requirement on the same time axis, and subsequent execution layers generate a continuous device-level control baseline around this unified requirement.

[0032] In step S104 of some embodiments, the reaction scheme output by the above steps This step is fully expanded into the execution baseline. After entering this step, the controller reads the data sequentially according to the control cycle. The four fields already written in each cycle: main liquid addition action amount Exhaust demand Liquid ratio Liquid two-way ratio .

[0033] The continuous execution baseline is generated using a combination of first-order inertial expansion and one-step forward correction. Its foundation consists of two parts: the first part is a first-order discrete inertial element, originally derived from the discretized expression of a first-order inertial system in classical automatic control, used to ensure continuous output variation between adjacent control cycles; the second part is a one-step forward term, originally derived from the forward differential correction in discrete predictive control, used to pre-calculate the trend of the next cycle into the current cycle, enabling the current control quantity to anticipate the upcoming rise or fall. This step combines these two elements and uses them for the execution expansion of the response scheme to obtain a unified core quantity for the execution baseline. The derivation is as follows: first use the execution baseline core quantity generated in the previous cycle. Provide continuously unfolded historical data, and then bring the current cycle to the direction of the cycle demand. Write the main action for this cycle, and finally use the difference in demand between two adjacent cycles. This constitutes a forward correction term, making the liquid addition, reaction initiation, and venting time closer to the actual concentration formation process; when During the last control cycle, the controller takes This ensures that the forward correction term naturally converges to zero in the final cycle. Specifically, the execution baseline core quantity of the previous control cycle is multiplied by a preset continuous expansion coefficient to obtain the seventh data; a preset number (preset number is 1) is subtracted from the continuous expansion coefficient, and then multiplied by the directional cycle requirement of the current control cycle to obtain the eighth data; the directional cycle requirement of the next control cycle is subtracted from the directional cycle requirement of the current control cycle, and then multiplied by a preset forward correction coefficient to obtain the ninth data; the seventh, eighth, and ninth data are added together, and the result is limited to the allowable operating range of the device to obtain the execution baseline core quantity of the current control cycle. As shown in the following formula: ; in, Indicates the first The core execution baseline of each control cycle serves as a unified benchmark for subsequent decomposition into each execution component. This indicates the execution baseline core quantity that has been cached in the previous control cycle, which is written into the cache by the controller at the end of each cycle; This indicates the directional cyclical demand of the current control cycle; The directional cycle requirement for the next control cycle is read sequentially from the reaction scheme array, and the last cycle is taken as the current cycle value according to the aforementioned rules; The continuous expansion coefficient is determined during the device commissioning process based on the mechanical response time of the solenoid valve, the hysteresis of the liquid entering the reaction chamber, and the concentration build-up rate of the chamber, and then stored in the parameter area. The forward correction coefficient is represented by the recorded value that minimizes the trajectory deviation during the alignment experiment of the ascending and descending segments, which is then written into the controller; the device's permissible operating range [ ], This represents the upper limit of the device's permissible range of motion, indicating the upper limit of the current execution baseline. It is derived from the maximum permissible amount of motion in a single cycle in the actuator parameter table. This means that the calculation results are limited to the range of forward and reverse movements allowed by the device. The calculation relationship in this formula is continuous: Provides time continuity, Write the main action of the current cycle. Provides a forward correction; the sum of the three terms still represents the same type of execution baseline core quantity, thus maintaining consistency before and after the operation.

[0034] In one example, suppose the main liquid addition actions recorded in a three-cycle reaction scheme are as follows: , , There is no exhaust demand in any of the three cycles, therefore there is ,thereby , , The controller cache contains the execution baseline core values ​​from the previous control cycle. Read from the parameter area , Furthermore, the current device allows for an upper limit to its range of motion. Substituting, we can get Let's look at another calculation example for a pullback phase. If a certain cycle reaction scheme is written... , , , ,but , If the cached value from the previous cycle is retrieved... still using , Then this period has If the calculation result is negative at this point, it means that the execution baseline for this cycle will automatically switch to the exhaust channel.

[0035] In step S105 of some embodiments, a unified execution baseline core quantity is obtained. Subsequently, the controller further decomposes it into three device-level execution baselines. This decomposition stems from a direct combination of two types of relationships: one is the two-liquid ratio relationship already written into the reaction scheme, and the other is the positive and negative decomposition relationship of the execution direction. When When the value is positive, it indicates that the current cycle is dominated by a two-liquid addition reaction, and the controller proportionally distributes the positive baseline to liquid path one and liquid path two; when... When the value is negative, it indicates that the current cycle is dominated by exhaust gas decline, and the controller writes its absolute value into the exhaust channel. Specifically, the maximum value between the execution baseline core quantity of the current control cycle and zero is selected and multiplied by the liquid one-way ratio to obtain the execution baseline of liquid one-way; the maximum value between the execution baseline core quantity of the current control cycle and zero is selected and multiplied by the liquid two-way ratio to obtain the execution baseline of liquid two-way; the maximum value between the negative of the execution baseline core quantity of the current control cycle and zero is selected as the execution baseline of the exhaust channel; as shown in the following formula: ; ; ; in, Indicates the first The execution baseline of each control cycle liquid path; Indicates the first The execution baseline of the liquid two-way control cycle; Indicates the execution baseline of the exhaust passage; Indicates the proportion of liquid in one path. Indicates the liquid two-way ratio; Used to extract the positive action portion. Used to extract the reverse action portion. The logical relationship between the three formulas here is very straightforward: first, the first and second formulas split the forward execution baseline into two liquid streams according to the formula ratio; second, the third formula sends the entire reverse execution baseline into the exhaust channel; and the three together constitute the complete execution baseline for this cycle. .

[0036] Continuing with the example of the rising segment mentioned above, if the current control cycle is calculated as follows: The two-component ratio is , Then there is , , Looking at the pullback segment, if the current control period is calculated... Then there is , , The controller then... , and Converting to a low-level driver sequence table: First, divide a control cycle into several sub-time slices according to the driver configuration, then... and The corresponding valve opening pulse is prioritized in the first half of the current cycle, allowing the liquid to enter the reaction chamber and complete the start-up process as early as possible; The corresponding exhaust action is prioritized for the latter half of the current cycle, allowing the gas already released in this cycle to diffuse first, before the subsequent phase establishes a fallback process. This timing arrangement is directly written into the controller's underlying task table for the next step to execute sequentially.

[0037] Along the entire reaction scheme After repeating the above calculations, the controller obtains the complete execution baseline sequence. Among them, the main liquid addition action amount Determine the main body size and exhaust demand of the forward execution baseline. Determine the body size and two-component ratio of the reverse execution baseline. and The decision was made regarding how the forward execution baseline would be split across the two liquid channels. The final result... It is a cycle-by-cycle three-channel execution baseline sequence, in which the expansion amount and time sequence of the liquid channel 1, liquid channel 2, and exhaust channel are clearly given in each cycle within the control cycle. The next step directly drives the liquid addition device, intake valve, exhaust valve, and extraction device to complete the isotope labeling process based on this execution baseline.

[0038] In some embodiments, a baseline is performed. This step is directly translated into device-level execution, and the gas release and concentration trajectory formation process is completed in the actual isotope labeling device. The execution baseline essentially maps the reaction scheme into a cycle-by-cycle three-channel control variable, where... and The corresponding action intensities of the two liquid inlet channels are respectively. The corresponding exhaust channel's operational intensity. This step involves expanding these discrete periodic quantities into a continuous-time execution sequence, and combining reaction kinetics and the gas diffusion characteristics of the chamber to organize the specific execution order, ensuring that the actual concentration change process remains consistent with the target trajectory.

[0039] The controller in each control cycle At the beginning, the current cycle is read from the execution baseline sequence. , and The cycle is divided into multiple sub-time slices. The length of each sub-time slice is determined by the underlying drive cycle. For example, when the control cycle is 1 second and the drive cycle is 0.1 seconds, each control cycle is divided into 10 sub-time slices. The liquid addition action is preferentially scheduled to be executed in the first half of the cycle's sub-time slices, while the venting action is scheduled to be executed in the second half of the cycle. This scheduling method is derived from the reaction-diffusion-regulation time sequence, that is, after the liquid enters the reaction chamber, it needs to go through the reaction initiation and gas generation stages, then undergo diffusion to form a uniform concentration field, and finally achieve concentration reduction or stabilization through venting.

[0040] The liquid passage is controlled by a solenoid valve. The relationship between its opening time and the actual amount added was established during the equipment calibration phase and stored in the controller as a lookup table. The controller will... and This is mapped to the total opening time of the two solenoid valves, and then the opening time is evenly distributed into the sub-time slices of the first half of the cycle. For example, when When the value is 30, the controller looks up the table to obtain the corresponding total on-time. Then The start-up pulses are divided into several sub-time slices, allowing liquid to gradually enter the reaction chamber within that cycle, thus ensuring the continuity of the reaction process. (Exhaust channel) The processing method is similar. The controller looks up the opening time of the exhaust valve or the running time of the extraction device according to its value, and schedules it to be executed in the sub-time slice of the second half of the cycle, so that the gas is removed after diffusion is completed.

[0041] After controlling the concentration of isotope reactive gas based on the execution baseline core quantity, liquid path one ratio, and liquid path two ratio of the current control cycle, the concentration sampling value of the gas concentration sensor inside the chamber is read in real time. At the same time, the controller controls the reaction scheme. Read the dual-liquid ratio corresponding to the current cycle. and This is to ensure that the concentration deviation of the current cycle is consistently mapped onto the three-channel execution baseline. This is to ensure that the concentration sample values ​​are matched with the concentration trajectory values ​​of the current control cycle. To maintain consistency, this step introduces a compensation amount based on discrete proportional correction at the execution layer. The corresponding calculation involves subtracting the current control cycle's adapted concentration trajectory value from the concentration sampling value, then multiplying by a preset proportional correction coefficient to obtain the execution compensation amount for the current cycle. See the formula below: ; in, This indicates the amount of compensation to be performed during the current control cycle. This represents the adaptive concentration trajectory value for the current control cycle; The concentration sample value represents the concentration value measured in real time during the current control cycle. This represents the proportional correction factor, which is determined during the equipment commissioning phase based on the system response characteristics and written into the controller parameter area.

[0042] The concentration of isotope reactive gas is controlled based on the execution compensation amount, the proportion of liquid channel one, and the proportion of liquid channel two. Specifically, the execution compensation amount follows the same allocation rule when written into the three-channel execution baseline: when At that time, the controller pressed it. The proportions are respectively superimposed on and ,and Remain unchanged; when At that time, the controller first adjusts the dual-liquid ratio according to the current cycle from... and The corresponding amount is deducted synchronously. If there is still a negative compensation remaining after the deduction, the remaining part is added to the balance. The correction is achieved by the exhaust action in the second half of the cycle. To illustrate with a specific calculation, when the adapted concentration trajectory value for a certain control cycle is 700, and the actual measured concentration sampling value is 660, the following settings are used: Then there is If the current control cycle specifies a two-liquid ratio in the reaction protocol, then... , The controller then superimposes 8 onto the scales 4.8 and 3.2 respectively. and In the middle. Let's look at another example of a pullback correction. When the adapted concentration trajectory value is 700 and the actual measured concentration sampling value is 730, there is... If the current period originally had , , ,and , Then the controller first starts from and Subtracting 3.6 and 2.4 respectively, we obtain the corrected values. , , If the negative compensation amount in a certain cycle is greater than the current positive liquid addition baseline, the controller will adjust the compensation amount accordingly. and After deducting to zero, add the remaining amount back to the original amount. Then, by looking up a table, it is converted into an additional exhaust duration and superimposed on the second half of the current cycle's sub-time slice.

[0043] The entire execution process is carried out cyclically within a control cycle: each cycle begins with the addition of liquid, causing a reaction that generates gas; followed by either venting or maintaining the concentration to reach the target concentration trajectory; and fine-tuning is performed within the cycle based on real-time concentration deviations. As the cycle progresses, the gas is continuously generated, diffused, and regulated within the chamber, ultimately forming a concentration change process consistent with the target concentration trajectory. After the entire process is completed, the controller records the complete actual concentration time series as the result of this cycle. This series is continuously sampled by sensors and can be used for subsequent analysis or verification.

[0044] Steps S101 to S105 as illustrated in this embodiment involve obtaining the original concentration trajectory sequence and corresponding time points, performing linear interpolation to obtain the target concentration trajectory value for the current control cycle, and performing boundary adaptation processing on the target concentration trajectory value for the current control cycle based on a preset device boundary to obtain the adapted concentration trajectory value for the current control cycle. The adapted concentration trajectory values ​​for the previous and next control cycles are obtained, and the equivalent generation requirement for the current control cycle is calculated based on these values. The equivalent generation requirement is converted into the main liquid addition action quantity and the exhaust demand quantity according to a preset effective generation coefficient. The main liquid addition action quantity is subtracted from the exhaust demand quantity to obtain the directional cycle requirement for the current control cycle. The execution baseline core quantity for the previous control cycle and the directional cycle requirement for the next control cycle are obtained, and the execution baseline core quantity for the current control cycle is calculated based on these values. The concentration of isotope reactive gas is controlled based on the execution baseline core quantity of the current control cycle, the preset liquid one-way ratio, and the preset liquid two-way ratio, thereby improving the accuracy of isotope reactive gas concentration control.

[0045] Please see Figure 2 This application also provides an isotope reactive gas concentration control system, which can implement the above-mentioned isotope reactive gas concentration control method. The system includes: The acquisition unit 201 is used to acquire the original concentration trajectory sequence and the corresponding time point, and perform linear interpolation to obtain the target concentration trajectory value of the current control period. According to the preset device boundary, the target concentration trajectory value is subjected to boundary adaptation processing to obtain the adapted concentration trajectory value of the current control period. The first calculation unit 202 is used to obtain the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle, and calculate the equivalent generation requirement of the current control cycle based on the adaptive concentration trajectory value of the current control cycle, the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle. The conversion unit 203 is used to convert the equivalent generation demand into the main liquid injection action quantity and the exhaust demand quantity according to the preset effective generation coefficient, and to subtract the main liquid injection action quantity from the exhaust demand quantity to obtain the directional cycle demand of the current control cycle. The second calculation unit 204 is used to obtain the execution baseline core quantity of the previous control cycle and the directional cycle requirement of the next control cycle, and calculate the execution baseline core quantity of the current control cycle based on the execution baseline core quantity of the previous control cycle, the directional cycle requirement of the current control cycle and the directional cycle requirement of the next control cycle. The control unit 205 is used to control the concentration of isotope reactive gas according to the execution baseline core quantity of the current control cycle, the preset liquid one-way ratio, and the preset liquid two-way ratio.

[0046] The specific implementation of this isotope reactive gas concentration control system is basically the same as the specific embodiment of the isotope reactive gas concentration control method described above, and will not be repeated here.

[0047] The above description represents the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A method for controlling the concentration of isotope-reactive gas, characterized in that, The method includes: The original concentration trajectory sequence and corresponding time points are obtained and linear interpolation is performed to obtain the target concentration trajectory value of the current control period. According to the preset device boundary, the target concentration trajectory value of the current control period is subjected to boundary adaptation processing to obtain the adapted concentration trajectory value of the current control period. Obtain the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle, and calculate the equivalent generation requirement of the current control cycle based on the adaptive concentration trajectory value of the current control cycle, the adaptive concentration trajectory value of the previous control cycle, and the adaptive concentration trajectory value of the next control cycle. The equivalent generation demand is converted into the main liquid injection action amount and the exhaust demand amount according to the preset effective generation coefficient. The main liquid injection action amount is subtracted from the exhaust demand amount to obtain the directional cycle demand of the current control cycle. Obtain the execution baseline core quantity of the previous control cycle and the directional cycle requirement of the next control cycle, and calculate the execution baseline core quantity of the current control cycle based on the execution baseline core quantity of the previous control cycle, the directional cycle requirement of the current control cycle, and the directional cycle requirement of the next control cycle. The concentration of isotope reactive gas is controlled based on the execution baseline core quantity of the current control cycle, the preset liquid path ratio, and the preset liquid path ratio.

2. The isotope reaction gas concentration control method according to claim 1, characterized in that, The device boundary includes the allowable trajectory range and the maximum trajectory change. The boundary adaptation processing of the target concentration trajectory value for the current control period based on the preset device boundary to obtain the adapted concentration trajectory value for the current control period includes: Obtain the adaptive concentration trajectory value from the previous control cycle; Subtract the target concentration trajectory value of the current control cycle from the adapted concentration trajectory value of the previous control cycle to obtain the first data; wherein, if the absolute value of the first data is greater than the maximum trajectory change and the first data is a positive number, then the maximum trajectory change is defined as the second data; if the absolute value of the first data is greater than the maximum trajectory change and the first data is a negative number, then the opposite of the maximum trajectory change is defined as the second data; if the absolute value of the first data is less than or equal to the maximum trajectory change, then the first data is defined as the second data. The adaptive concentration trajectory value of the previous control cycle is added to the second data, and the result is limited to the allowable range of the trajectory to obtain the adaptive concentration trajectory value of the current control cycle.

3. The method for controlling the concentration of isotope-reactive gas according to claim 1, characterized in that, The device boundary also includes a background concentration. The calculation of the equivalent generation requirement for the current control cycle based on the adapted concentration trajectory value of the current control cycle, the adapted concentration trajectory value of the previous control cycle, and the adapted concentration trajectory value of the next control cycle includes: The third data is obtained by subtracting the adaptive concentration trajectory value of the current control cycle from the adaptive concentration trajectory value of the previous control cycle. Subtract the adaptive concentration trajectory value of the current control cycle from the background concentration, and then multiply by the preset maintenance coefficient to obtain the fourth data. Subtract the adaptive concentration trajectory value of the next control cycle from the adaptive concentration trajectory value of the current control cycle to obtain the fifth data. Select the largest value between zero and the fifth data and multiply it by a preset pre-coefficient to obtain the sixth data. The third, fourth, and sixth data are added together to obtain the equivalent generation requirement.

4. The method for controlling the concentration of an isotope-reactive gas according to claim 1, characterized in that, The device boundary also includes an allowable action range and an allowable exhaust volume range. The step of converting the equivalent generation requirement into the main liquid addition action volume and exhaust volume based on a preset effective generation coefficient includes: If the equivalent generation demand is greater than or equal to zero, divide the equivalent generation demand by the effective generation coefficient, and limit the result to the allowable action range to obtain the main liquid addition action amount, and the exhaust demand is zero; If the equivalent generation demand is less than zero, the negative of the equivalent generation demand is divided by the effective generation coefficient, and the result is limited to the allowable exhaust volume to obtain the exhaust demand, and the main liquid injection action amount is zero.

5. The method for controlling the concentration of an isotope-reactive gas according to claim 1, characterized in that, The device boundary also includes the device's permissible operating range. The calculation of the execution baseline core quantity for the current control cycle based on the execution baseline core quantity of the previous control cycle, the directional cycle requirement of the current control cycle, and the directional cycle requirement of the next control cycle includes: Multiply the execution baseline core quantity of the previous control cycle by the preset continuous expansion coefficient to obtain the seventh data; Subtract the preset number from the continuous expansion coefficient, and then multiply it by the directional cycle requirement of the current control cycle to obtain the eighth data. Subtract the directional cycle requirement of the next control cycle from the directional cycle requirement of the current control cycle, and then multiply by the preset forward correction coefficient to obtain the ninth data. The seventh, eighth, and ninth data are added together, and the result is limited to the range of actions allowed by the device to obtain the core execution baseline of the current control cycle.

6. The method for controlling the concentration of an isotope-reactive gas according to claim 1, characterized in that, The control of isotope reactive gas concentration based on the execution baseline core quantity of the current control cycle, the preset liquid path ratio, and the preset liquid path ratio includes: The execution baseline of the liquid channel is obtained by multiplying the largest value between the core quantity of the execution baseline of the current control cycle and zero by the proportion of the liquid channel. The execution baseline of the liquid two-way path is obtained by multiplying the largest value between the core quantity of the execution baseline of the current control cycle and zero. The largest value between the negative of the core quantity of the execution baseline of the current control cycle and zero is selected as the execution baseline of the exhaust channel; The concentration of isotope reactive gas is controlled based on the execution baseline of the liquid path one, the execution baseline of the liquid path two, and the execution baseline of the exhaust channel.

7. The method for controlling the concentration of an isotope-reactive gas according to claim 1, characterized in that, After controlling the concentration of isotope reactive gas according to the execution baseline core quantity of the current control cycle, the preset liquid path ratio, and the preset liquid path ratio, the method further includes: Obtain the concentration sampling value for the current control cycle; Subtract the current concentration trajectory value from the concentration sampling value and then multiply by a preset proportional correction coefficient to obtain the execution compensation amount for the current cycle. The concentration of isotope reactive gas is controlled based on the compensation amount, the proportion of liquid channel one, and the proportion of liquid channel two.

8. An isotope-reactive gas concentration control system, characterized in that, The system includes: The acquisition unit is used to acquire the original concentration trajectory sequence and the corresponding time point, and perform linear interpolation to obtain the target concentration trajectory value of the current control period. The target concentration trajectory value is then subjected to boundary adaptation processing according to the preset device boundary to obtain the adapted concentration trajectory value of the current control period. The first calculation unit is used to obtain the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle, and calculate the equivalent generation requirement of the current control cycle based on the adaptive concentration trajectory value of the current control cycle, the adaptive concentration trajectory value of the previous control cycle and the adaptive concentration trajectory value of the next control cycle. The conversion unit is used to convert the equivalent generation demand into the main liquid addition action amount and the exhaust demand amount according to the preset effective generation coefficient, and to subtract the main liquid addition action amount from the exhaust demand amount to obtain the directional cycle demand of the current control cycle. The second calculation unit is used to obtain the execution baseline core quantity of the previous control cycle and the directional cycle requirement of the next control cycle, and calculate the execution baseline core quantity of the current control cycle based on the execution baseline core quantity of the previous control cycle, the directional cycle requirement of the current control cycle, and the directional cycle requirement of the next control cycle. The control unit is used to control the concentration of isotope reactive gas according to the execution baseline core quantity of the current control cycle, the preset liquid one-way ratio, and the preset liquid two-way ratio.

9. An electronic device, characterized in that, The electronic device includes a memory and a processor. The memory stores a computer program, and when the processor executes the computer program, it implements the isotope reactive gas concentration control method according to any one of claims 1 to 7.

10. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by the processor, it implements an isotope reactive gas concentration control method according to any one of claims 1 to 7.

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